Multifunctional vacuum chamber

Abstract

The utility model belongs to the technical field of semiconductor processing, and discloses a multifunctional vacuum chamber. The multifunctional vacuum chamber comprises a first opening, a cover plate, a bearing assembly and a lifting assembly, wherein the first opening is formed in the top of the vacuum chamber; one end of the cover plate is rotationally arranged at the first opening, and a fixing assembly is arranged at the other end of the cover plate and used for locking the cover plate and the vacuum chamber; the bearing assembly penetrates through the bottom of the vacuum cavity and can move in the vertical direction so as to bear and drive a workpiece to move into the vacuum cavity. The lifting assembly is arranged below the vacuum cavity and connected with the bearing assembly so as to drive the bearing assembly to move in the vertical direction. The lifting assembly is used for driving the bearing assembly to move, the workpiece is rapidly moved to the vacuum cavity, and the efficiency of placing the workpiece into the vacuum cavity is improved; and the cover plate is locked by using the fixing assembly, so that the sealing performance of the vacuum chamber is improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, and in particular to a multifunctional vacuum chamber. Background Technology

[0002] Before low-temperature wafer bonding, two homogeneous or heterogeneous semiconductor materials with clean, atomically flat surfaces must first undergo surface cleaning and activation treatment. Then, they are directly bonded under certain conditions. Surface activation is very important for low-temperature wafer bonding. For example, special gas treatment can reduce copper oxide to copper, and then copper can be bonded at temperatures below 200°C. Generally, the surface cleaning and activation equipment is equipped in the bonding equipment or vacuum chamber and cannot be operated independently. It needs to be coordinated with the process flow.

[0003] In existing technologies, vacuum chambers are equipped with openings, and robotic arms are used to place workpieces into the vacuum chamber through these openings. However, when placing workpieces into the vacuum chamber, the robotic arm usually needs to detect the opening position and placement depth, which is inefficient. The openings can be selectively sealed, typically using components such as flange clamps or clamping handles. However, when using flange clamps to seal the openings, disassembly is cumbersome, and when using clamping handles to seal the openings, the clamping handles may loosen once the vacuum chamber is filled with gas and reaches a slight positive pressure. Utility Model Content

[0004] The purpose of this invention is to provide a multifunctional vacuum chamber to solve the problems of low efficiency when a robotic arm puts a workpiece into a vacuum chamber in the prior art; selective sealing of the vacuum chamber opening is possible, but disassembly is troublesome when using flange clamps to seal the opening, and the clamping handle is prone to loosening when using a clamping handle to seal the opening, thereby improving the efficiency of workpiece insertion and improving the sealing performance of the vacuum chamber.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] A multifunctional vacuum chamber is provided, comprising:

[0007] The first opening is located at the top of the vacuum chamber;

[0008] A cover plate, one end of which is rotatably disposed at the first opening, and the other end of which is provided with a fixing component, the fixing component being used to lock the cover plate to the vacuum chamber;

[0009] A support assembly extends through the bottom of the vacuum chamber and is movable in a vertical direction to support and move the workpiece from the first opening into the vacuum chamber.

[0010] A lifting assembly is provided below the vacuum chamber and connected to the support assembly to drive the support assembly to move along the vertical direction.

[0011] As an optional technical solution for a multifunctional vacuum chamber, the multifunctional vacuum chamber further includes a heating component located at the bottom of the interior of the vacuum chamber for heating the workpiece. The supporting component can penetrate through the bottom of the vacuum chamber and the heating component.

[0012] As an optional technical solution for a multifunctional vacuum chamber, the bottom of the vacuum chamber is provided with a first through hole along the vertical direction, and the heating component is provided with a second through hole along the vertical direction. The first through hole and the second through hole correspond to each other. The bearing component includes a ejector pin, which is disposed inside the first through hole and the second through hole and is clearance-fitted with the first through hole and the second through hole. The end of the ejector pin is used to support the workpiece.

[0013] As an optional technical solution for a multifunctional vacuum chamber, the supporting assembly further includes a sliding member disposed between the ejector pin and the inner wall of the first through hole and / or the inner wall of the second through hole, so as to maintain the verticality of the ejector pin and seal the vacuum chamber.

[0014] As an optional technical solution for a multifunctional vacuum chamber, the supporting assembly further includes an adjusting component. The ejector pin is connected to the lifting assembly via the adjusting component. The adjusting component can drive the ejector pin to float in the horizontal and vertical directions to adjust the precise position of the ejector pin relative to the first through hole and the second through hole.

[0015] As an optional technical solution for a multifunctional vacuum chamber, a first interface is provided on the periphery of the vacuum chamber. The first interface is connected to the vacuum chamber, and different gases can be introduced into the vacuum chamber or the vacuum chamber can be evacuated through the first interface.

[0016] As an optional technical solution for a multifunctional vacuum chamber, the vacuum chamber is provided with a second opening on its periphery, and the vacuum chamber can be connected to other chambers through the second opening.

[0017] As an optional technical solution for a multifunctional vacuum chamber, the cover plate is provided with support members on both sides, one end of the support member is provided on the side wall of the cover plate, and the other end is rotatably provided on the side wall of the vacuum chamber.

[0018] As an optional technical solution for a multifunctional vacuum chamber, the cover plate is connected to a first handle on its periphery.

[0019] As an optional technical solution for a multifunctional vacuum chamber, the end face of the cover plate is provided with a transparent observation window.

[0020] The beneficial effects of this utility model are:

[0021] This application discloses a multifunctional vacuum chamber, including a first opening, a cover plate, a support assembly, and a lifting assembly. The first opening is located at the top of the vacuum chamber. One end of the cover plate is rotatably disposed at the first opening, and the other end is provided with a fixing assembly for locking the cover plate to the vacuum chamber. The support assembly penetrates through the bottom of the vacuum chamber and can move vertically to carry and move a workpiece into the vacuum chamber. The lifting assembly is located below the vacuum chamber and connected to the support assembly to drive the support assembly to move vertically. By using the lifting assembly to move the support assembly, the workpiece can be quickly moved into the vacuum chamber, avoiding the use of a robotic arm to place the workpiece, saving the inspection and identification process, and improving the efficiency of workpiece placement into the vacuum chamber. Using the fixing assembly to lock the cover plate can prevent the cover plate from loosening due to the slight positive pressure inside the vacuum chamber, thus improving the sealing performance of the vacuum chamber. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.

[0023] Figure 1 This is an isometric view of the multifunctional vacuum chamber provided in this embodiment of the present invention;

[0024] Figure 2 This is a partial structural isometric view of the multifunctional vacuum chamber provided in this embodiment of the utility model;

[0025] Figure 3 This is a cross-sectional view of the multifunctional vacuum chamber provided in an embodiment of this utility model.

[0026] In the picture:

[0027] 10. Vacuum chamber; 11. First interface; 12. Second opening;

[0028] 20. Cover plate; 21. Fixing component; 211. Second handle; 212. Fixing ring; 213. Fixing block; 22. Support component; 23. First handle; 24. Observation window; 25. Hinge;

[0029] 30. Heating components;

[0030] 40. Supporting component; 41. Ejector pin; 42. Sliding component; 43. Adjusting component;

[0031] 50. Lifting assembly; 51. Power source; 52. Connecting plate; 53. Fixing plate; 54. Fixing rod. Detailed Implementation

[0032] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.

[0033] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0034] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0035] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0036] In existing technologies, vacuum chambers are equipped with openings, and robotic arms are used to place workpieces into the vacuum chamber through these openings. However, when placing workpieces into the vacuum chamber, the robotic arm usually needs to detect the opening position and placement depth, which is inefficient. The openings can be selectively sealed, typically using components such as flange clamps or clamping handles. However, when using flange clamps to seal the openings, disassembly is cumbersome, and when using clamping handles to seal the openings, the clamping handles may loosen once the vacuum chamber is filled with gas and reaches a slight positive pressure.

[0037] To address the aforementioned problems, this embodiment provides a multifunctional vacuum chamber, see reference. Figures 1-3 The system includes a first opening, a cover plate 20, a support assembly 40, and a lifting assembly 50. The first opening is located at the top of the vacuum chamber 10. One end of the cover plate 20 is rotatably mounted on the first opening, and the other end is provided with a fixing assembly 21, which is used to lock the cover plate 20 to the vacuum chamber 10. The support assembly 40 penetrates through the bottom of the vacuum chamber 10 and can move vertically to carry and move the workpiece from the first opening into the vacuum chamber 10. The lifting assembly 50 is located below the vacuum chamber 10 and connected to the support assembly 40 to drive the support assembly 40 to move vertically. By using the lifting assembly 50 to move the support assembly 40, the workpiece can be quickly moved into the vacuum chamber 10, avoiding the use of a robotic arm to place the workpiece, saving the inspection and identification process, and improving the efficiency of placing the workpiece into the vacuum chamber 10. Using the fixing assembly 21 to lock the cover plate 20 can prevent the cover plate 20 from loosening due to the slight positive pressure inside the vacuum chamber 10, thus improving the sealing performance of the vacuum chamber 10.

[0038] Specifically, the cover plate 20 is fixed to the vacuum chamber 10 by a hinge 25 or a pivot. The fixing assembly 21 includes a second handle 211, a fixing ring 212, and a fixing block 213. The fixing block 213 is located on the side wall of the vacuum chamber 10 and corresponds to the position of the fixing ring 212. The second handle 211 is hinged to the cover plate 20. The fixing ring 212 is rotatably mounted on the second handle 211. When the second handle 211 is rotated counterclockwise, the fixing ring 212 moves downward in the vertical direction and is fitted onto the outside of the fixing block 213. When the second handle 211 is rotated clockwise, the fixing ring 212 moves upward in the vertical direction and locks with the bottom of the fixing block 213. When the vacuum chamber 10 is under a slight positive pressure, the cover plate 20 will be forced to lift upward, at which time the fixing ring 212 will be locked more firmly with the fixing block 213.

[0039] Furthermore, the multifunctional vacuum chamber also includes a heating assembly 30, which is located at the bottom inside the vacuum chamber 10 for heating the workpiece. A support assembly 40 extends through the bottom of the vacuum chamber 10 and the heating assembly 30. The heating assembly 30 controls the temperature inside the vacuum chamber 10, providing a suitable temperature environment for the workpiece (semiconductor material) to promote bonding between semiconductors. Specifically, the support assembly 40 moves vertically to move the workpiece from the first opening to the heating assembly 30 for heating. The heating assembly 30 can be configured as an electromagnetic heater or a resistance heater, etc.

[0040] Furthermore, a first through hole is vertically penetrating the bottom of the vacuum chamber 10, and a second through hole is vertically penetrating the heating assembly 30. The first and second through holes correspond to each other. The supporting assembly 40 includes a ejector pin 41, which is disposed inside the first and second through holes and has a clearance fit with them. The end of the ejector pin 41 is used to support the workpiece. The workpiece has an ejector pin hole, and the ejector pin 41 is inserted into the ejector pin hole to support the workpiece. The ejector pin 41 is driven by the lifting assembly 50 to move vertically, thereby driving the workpiece into the receiving cavity. In other embodiments, a hollow rod can be disposed inside the first and second through holes, and a suction nozzle can be provided at the end of the hollow rod to adsorb the workpiece and support it.

[0041] Furthermore, the support assembly 40 also includes a slider 42, which is disposed between the ejector pin 41 and the inner wall of the first through hole and / or the inner wall of the second through hole to maintain the perpendicularity of the ejector pin 41 and seal the vacuum chamber 10. Specifically, the slider 42 is configured as a sliding block, which can be annular to fit around the periphery of the ejector pin 41, or it can be semi-annular and multiple sliders can be provided. In other embodiments, an annular sealing rubber can be provided between the ejector pin 41 and the first through hole to improve the sealing performance of the first and second through holes, thereby improving the sealing performance of the vacuum chamber 10.

[0042] Furthermore, the supporting assembly 40 also includes an adjusting member 43. The ejector pin 41 is connected to the lifting assembly 50 via the adjusting member 43. The adjusting member 43 can drive the ejector pin 41 to float in the horizontal and vertical directions to adjust the precise position of the ejector pin 41 relative to the first and second through holes. Specifically, the adjusting member 43 is configured as an adjusting spring. The adjusting spring can swing horizontally. When the lifting assembly 50 and the ejector pin 41 are not aligned due to misalignment, the ejector pin 41 slides within the first and second through holes, applying a horizontal force to the adjusting spring without affecting the sliding of the ejector pin 41 and preventing the ejector pin 41 from breaking.

[0043] Specifically, the lifting assembly 50 includes a power source 51 and a connecting plate 52. The power source 51 is configured as a linear cylinder or a hydraulic cylinder. The extension rod of the cylinder is connected to one side of the connecting plate 52, and the adjusting spring is connected to the other side of the connecting plate 52. For example, the power source 51 drives the connecting plate 52 to move upward, and the connecting plate 52 drives the adjusting spring to move upward. The adjusting spring is first compressed, at which time the ejector pin 41 does not move. When the adjusting spring is compressed to its limit, the ejector pin 41 is driven upward by the adjusting spring.

[0044] Furthermore, multiple adjusting springs are provided, spaced apart on the connecting plate 52. One adjusting spring is connected to the ejector pin 41, while the remaining adjusting springs are connected to the bottom of the vacuum chamber 10 to maintain the balance of the connecting plate 52 and prevent uneven force exerted by the adjusting springs on the connecting plate 52. In this embodiment, at least three adjusting springs are provided.

[0045] Furthermore, the lifting assembly 50 also includes a fixing plate 53 and fixing rods 54. The fixing plate 53 is square, and the power source 51 is located at the geometric center of the fixing plate 53. One end of the fixing rod 54 is located at the bottom of the vacuum chamber 10, and the other end is located at the fixing plate 53. There are four fixing rods 54, all of which are connected to the four corners of the vacuum chamber 10 and the fixing plate 53.

[0046] Furthermore, a first interface 11 is provided around the vacuum chamber 10, communicating with the vacuum chamber 10. Different gases can be introduced into the vacuum chamber 10 through the first interface 11, or the vacuum chamber 10 can be evacuated. A second opening 12 is provided around the vacuum chamber 10, allowing the vacuum chamber 10 to connect with other chambers. Specifically, there are multiple first interfaces 11 to connect to different gas storage devices or vacuum pumps, achieving different functions; the second opening 12 is configured as a standard baffle valve interface.

[0047] Furthermore, support members 22 are provided on both sides of the cover plate 20. One end of the support member 22 is located on the side wall of the cover plate 20, and the other end is rotatably located on the side wall of the vacuum chamber 10. In this embodiment, the support member 22 is a support rod, which can support the cover plate 20, allowing the cover plate 20 to stop at different angles and heights. A first handle 23 is connected to the periphery of the cover plate 20. The first handle 23 is ring-shaped, making it easy to open the cover plate 20. In other embodiments, the first handle 23 can also be rod-shaped or spherical. A transparent observation window 24 is provided on the end face of the cover plate 20, making it easy to observe the specific situation inside the vacuum chamber 10. In this embodiment, the cover plate 20 is square, and the observation window 24 is circular, with the observation window 24 located at the geometric center of the cover plate 20.

[0048] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A multifunctional vacuum chamber, characterized in that, include: The first opening is located at the top of the vacuum chamber (10); A cover plate (20) is rotatably disposed at one end of the first opening and a fixing component (21) is provided at the other end. The fixing component (21) is used to lock the cover plate (20) to the vacuum chamber (10). A support assembly (40) extends through the bottom of the vacuum chamber (10) and is movable in a vertical direction to support and move the workpiece from the first opening into the vacuum chamber (10). A lifting assembly (50) is located below the vacuum chamber (10) and connected to the support assembly (40) to drive the support assembly (40) to move along the vertical direction.

2. The multifunctional vacuum chamber according to claim 1, characterized in that, The multifunctional vacuum chamber also includes a heating component (30), which is located at the bottom of the vacuum chamber (10) for heating the workpiece. The supporting component (40) can penetrate the bottom of the vacuum chamber (10) and the heating component (30).

3. The multifunctional vacuum chamber according to claim 2, characterized in that, The vacuum chamber (10) has a first through hole extending through it in the vertical direction at the bottom. The heating assembly (30) has a second through hole extending through it in the vertical direction. The first through hole and the second through hole correspond to each other. The bearing assembly (40) includes a pin (41). The pin (41) is disposed inside the first through hole and the second through hole and is in clearance fit with the first through hole and the second through hole. The end of the pin (41) is used to support the workpiece.

4. The multifunctional vacuum chamber according to claim 3, characterized in that, The support assembly (40) further includes a slider (42) disposed between the ejector pin (41) and the inner wall of the first through hole and / or the inner wall of the second through hole to maintain the verticality of the ejector pin (41) and seal the vacuum chamber (10).

5. The multifunctional vacuum chamber according to claim 3, characterized in that, The supporting component (40) further includes an adjusting member (43). The ejector pin (41) is connected to the lifting component (50) through the adjusting member (43). The adjusting member (43) can drive the ejector pin (41) to float in the horizontal and vertical directions to adjust the precise position of the ejector pin (41) relative to the first through hole and the second through hole.

6. The multifunctional vacuum chamber according to claim 1, characterized in that, The vacuum chamber (10) is provided with a first interface (11) on its periphery. The first interface (11) is connected to the vacuum chamber (10). Different gases can be introduced into the vacuum chamber (10) or the vacuum chamber (10) can be evacuated through the first interface (11).

7. The multifunctional vacuum chamber according to claim 1, characterized in that, The vacuum chamber (10) is provided with a second opening (12) on its periphery, and the vacuum chamber (10) can be connected to other chambers through the second opening (12).

8. The multifunctional vacuum chamber according to any one of claims 1-7, characterized in that, Support members (22) are provided on both sides of the cover plate (20). One end of the support member (22) is provided on the side wall of the cover plate (20), and the other end is rotatably provided on the side wall of the vacuum chamber (10).

9. The multifunctional vacuum chamber according to any one of claims 1-7, characterized in that, The cover plate (20) is connected to a first handle (23) on its periphery.

10. The multifunctional vacuum chamber according to any one of claims 1-7, characterized in that, The end face of the cover plate (20) is provided with a transparent observation window (24).

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