Waste gas treatment equipment

Abstract

The utility model provides waste gas treatment equipment which comprises a shell, a gas inlet and a gas outlet, the shell is provided with an inlet and an outlet, the sleeve is arranged in the shell, the sleeve is provided with a closed reaction cavity, the reaction cavity is communicated with the inlet and the outlet, a purification coating is arranged in the sleeve, and the purification coating is used for purifying waste gas generated in the reaction cavity. According to the waste gas treatment equipment, the purification coating is arranged in the sleeve, and the purification coating reacts with carbon monoxide in waste gas by utilizing high temperature generated by reaction in the sleeve, so that the waste gas is purified, and the environmental protection property is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to waste gas treatment technical field especially, relate to a waste gas treatment equipment. BACKGROUND

[0002] With the increasingly prosperous semiconductor industry, capacity surges, various waste gas will be produced in the production process, these gases are mostly serious harm to human body and environment, and in the production process, although the waste gas will be handled, but the present handling situation is not ideal, there are still many harmful gases in waste gas after purification by waste gas treatment equipment, if directly discharging into the atmosphere, after spreading, will deposit on the ground, and reach very high concentration, cause serious environmental pollution, endanger human health.

[0003] Among these waste gases, especially carbon monoxide. Because in the equipment operation, it is by methane and air reaction combustion. Because the gas flow rate is fast, and the reaction cavity internal volume is small, cannot fully react methane in the first time, will have a small amount of carbon monoxide while generating a large amount of carbon dioxide. Therefore, how to purify carbon monoxide in waste gas is the problem that the person skilled in the art needs to solve. CONTENT OF UTILITY MODEL

[0004] The utility model provides a waste gas treatment equipment to solve the problem that carbon monoxide in waste gas is difficult to remove in prior art.

[0005] The utility model provides a waste gas treatment equipment, which comprises:

[0006] A shell is provided with an inlet and an outlet;

[0007] A sleeve is arranged in the shell, the sleeve is provided with a closed reaction cavity, the reaction cavity is communicated with the inlet and the outlet, and a purification coating is arranged in the sleeve, which is used for purifying the waste gas generated in the reaction cavity.

[0008] According to the waste gas treatment equipment, the purification coating is a copper oxide sand blasting coating.

[0009] According to the waste gas treatment equipment, the waste gas treatment equipment further comprises a receiving member, the purification coating is coated on the surface of the receiving member, and the receiving member is arranged in the sleeve and is attached to the inner wall of the sleeve.

[0010] According to the waste gas treatment equipment, the receiving member is made of high-temperature-resistant and corrosion-resistant material.

[0011] According to the waste gas treatment equipment, the sleeve is arranged in the shell, the reaction cavity in the sleeve is communicated with the outlet and the inlet, waste gas can be discharged into the reaction cavity through the inlet, and then the reacted waste gas is discharged through the outlet.

[0012] According to the waste gas treatment equipment, the sleeve is arranged in the shell, the reaction cavity in the sleeve is communicated with the outlet and the inlet, waste gas can be discharged into the reaction cavity through the inlet, and then the reacted waste gas is discharged through the outlet.

[0013] According to the waste gas treatment equipment, the sleeve is arranged in the shell, the reaction cavity in the sleeve is communicated with the outlet and the inlet, waste gas can be discharged into the reaction cavity through the inlet, and then the reacted waste gas is discharged through the outlet.

[0014] According to the waste gas treatment equipment, the sleeve is arranged in the shell, the reaction cavity in the sleeve is communicated with the outlet and the inlet, waste gas can be discharged into the reaction cavity through the inlet, and then the reacted waste gas is discharged through the outlet.

[0015] According to the waste gas treatment equipment, the sleeve is arranged in the shell, the reaction cavity in the sleeve is communicated with the outlet and the inlet, waste gas can be discharged into the reaction cavity through the inlet, and then the reacted waste gas is discharged through the outlet.

[0016] According to the waste gas treatment equipment, the sleeve is arranged in the shell, the reaction cavity in the sleeve is communicated with the outlet and the inlet, waste gas can be discharged into the reaction cavity through the inlet, and then the reacted waste gas is discharged through the outlet.

[0017] The waste gas treatment equipment provided by the utility model, the sleeve is arranged in the shell, the reaction cavity in the sleeve is communicated with the outlet and the inlet, waste gas can be discharged into the reaction cavity through the inlet, and then the reacted waste gas is discharged through the outlet. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to make the technical scheme of the utility model or the prior art clearer, the following will briefly introduce the drawings needed in the embodiment or the prior art description, obviously, the drawings in the following description are some embodiments of the utility model, and other drawings can be obtained by those skilled in the art without creative labor.

[0019] Figure 1 It is the schematic view of the waste gas treatment equipment provided by the utility model.

[0020] Figure 2 It is the schematic view of the waste gas treatment equipment provided by the utility model.

[0021] Reference signs:

[0022] 1. Outer shell; 11. Inlet; 12. Outlet; 13. Air supply chamber;

[0023] 2. Sleeve; 21. Reaction chamber;

[0024] 3. Cleaning coating;

[0025] 4. Components. Detailed Implementation

[0026] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0027] The following is combined with Figure 1 This invention describes a waste gas treatment device, comprising a housing 1 and a sleeve 2. The housing 1 has an inlet 11 and an outlet 12. The sleeve 2 is disposed inside the housing 1 and has a closed reaction chamber 21, which is connected to the inlet 11 and the outlet 12. The sleeve 2 is provided with a purification coating 3, which is used to purify the waste gas generated in the reaction chamber 21.

[0028] like Figure 1 As shown, the entire waste gas treatment equipment includes a housing 1, which isolates the external space. Therefore, the sleeve 2 is placed inside the housing 1, and the housing 1 isolates the sleeve 2 from the external space, preventing the reaction inside the sleeve 2 from being affected by the outside. At the same time, it also prevents the reaction inside the sleeve 2 from affecting the outside, thus improving safety.

[0029] The sleeve 2 has a reaction chamber 21 inside, through which the waste gas is purified by reaction. Therefore, the reaction chamber 21 needs to be kept closed so that the waste gas reacts within this enclosed space. Because the reaction chamber 21 is closed, the risk of waste gas leakage can be prevented. However, the waste gas needs to enter the reaction chamber 21 from the outside to undergo reaction and purification, and the purified waste gas also needs to be discharged from the reaction chamber 21 to ensure that there is enough space within the reaction chamber 21 to purify the remaining waste gas. Therefore, in this embodiment, an inlet 11 and an outlet 12 are provided on the outer shell 1. The inlet 11 is connected to one end of the reaction chamber 21, and the outlet 12 is connected to the other end of the reaction chamber 21, so that the reaction chamber 21 can be filled with gas through the inlet 11 and discharged through the outlet 12.

[0030] And in the process of reaction and purification of the exhaust gas inside the reaction cavity 21, the sealing of the reaction cavity 21 needs to be ensured to prevent the exhaust gas from being discharged from the inlet 11 or the outlet 12 before being completely reacted in the reaction process, thereby causing environmental pollution. Therefore, the inlet 11 and the outlet 12 in the present application also need to be provided with switches to control the opening and closing.

[0031] When it is necessary to inject the exhaust gas into the reaction cavity 21, the inlet 11 is opened to inject the exhaust gas into the reaction cavity 21 from the inlet 11. At this time, the inlet 11 is opened, but the outlet 12 needs to be closed to prevent the exhaust gas injected from the inlet 11 from being discharged from the outlet 12. Only when the outlet 12 is closed can the exhaust gas injected from the inlet 11 fill the reaction cavity 21. Therefore, the opening and closing of the inlet 11 and the outlet 12 need to be controlled separately to ensure that when one of them is opened, the other can be closed.

[0032] The exhaust gas injected from the inlet 11 is mainly methane gas. Because the internal space of the reaction cavity 21 is small and the gas flow rate is fast, the methane gas cannot be completely reacted. Therefore, carbon monoxide is generated in the reaction process inside the reaction cavity 21. If the carbon monoxide is directly discharged into the atmosphere, it will cause environmental pollution. Moreover, the carbon monoxide is toxic and can also cause safety accidents.

[0033] Therefore, in the present embodiment, a purification coating 3 is arranged inside the reaction cavity 21. When the methane gas reacts to generate carbon monoxide inside the reaction cavity 21, the carbon monoxide is purified by the purification coating 3. Because the methane gas reacts to generate high temperature inside the reaction cavity 21, the purification coating 3 chemically reacts with the carbon monoxide by means of the high temperature generated by the methane gas reaction, thereby oxidizing the carbon monoxide into carbon dioxide. Then, when the exhaust gas is discharged together with the carbon dioxide, the pollution caused by the existence of carbon monoxide in the exhaust gas can be avoided. At the same time, during the discharge process, the inlet 11 needs to be closed and the outlet 12 needs to be opened, so that the exhaust gas is discharged from the outlet 12 together with the carbon dioxide, thereby avoiding mixing with the exhaust gas at the inlet 11 and affecting the subsequent reaction process.

[0034] In the present embodiment, the arrangement of the coating as the purification material can minimize the occupation of the internal space of the reaction cavity 21 and increase the reaction volume of the exhaust gas inside the reaction cavity 21. The increase of the reaction space can also avoid the generation of carbon monoxide in the exhaust gas and improve the purification efficiency of the exhaust gas.

[0035] Further, the purification coating 3 can be coated on the inner wall of the reaction cavity 21, or can be coated on a certain part inside the reaction cavity 21, or can be coated on other carriers and then arranged inside the reaction cavity 21 by the other carriers. Preferably, in the present embodiment, the purification coating 3 can be coated on the inner wall of the reaction cavity 21, thereby increasing the contact area of the purification coating 3 with the carbon monoxide and improving the purification efficiency.

[0036] In this embodiment, by setting the purification coating 3 inside the reaction cavity 21, the carbon monoxide generated in the reaction cavity 21 is oxidized to carbon dioxide by the reaction of the purification coating 3, thereby achieving the purification effect. The entire device achieves the purification effect by setting the purification coating 3 inside the reaction cavity 21, and the overall structure is simple and efficient. At the same time, the purification coating 3 also utilizes the high temperature generated in the reaction cavity 21 to accelerate the reaction, thereby improving the efficiency without the need for additional energy consumption.

[0037] In an embodiment, the purification coating 3 is a copper oxide sandblasting coating. Because the embodiment mainly aims to purify the carbon monoxide generated in the reaction cavity 21, a copper oxide with strong oxidizing property is selected as the material of the sandblasting coating. The purification coating 3 performs an oxidation reaction with the carbon monoxide, and the reaction equation is: CO + CuO = Cu + CO2. Because the purification coating 3 is arranged in the reaction cavity 21 and needs to withstand the high temperature generated in the reaction cavity 21, a copper oxide with good stability is selected as the material of the sandblasting coating in this embodiment. As an oxidizing agent, the copper oxide has a relatively stable structure and can maintain certain oxidation performance under high temperature or reaction conditions. Moreover, compared with noble metal catalysts, the metal oxide catalyst of copper oxide has a relatively low cost, which makes copper oxide more economically advantageous in large-scale applications. Using copper oxide as a catalyst to oxidize carbon monoxide, the final product is carbon dioxide, which is a harmless gas and friendly to the environment. In contrast, if the copper oxide is not effectively treated, its emission into the atmosphere will have a serious impact on the environment and human health. The reaction mechanism is that the Cu+ sites on the surface of the copper oxide can adsorb carbon monoxide and oxidize it to carbon dioxide through lattice oxygen. At the same time, the oxygen in the raw gas can supplement the oxygen vacancies generated in the process, thereby promoting the effective circulation of the catalytic reaction. This unique reaction mechanism enables the copper oxide to exhibit excellent catalytic performance in the carbon monoxide oxidation process.

[0038] Therefore, the selection of copper oxide in this embodiment can improve the environmental friendliness and economy of the entire device.

[0039] In an embodiment, the exhaust gas treatment device further comprises a receiving member 4, and the purification coating 3 is coated on the surface of the receiving member 4. The receiving member 4 is arranged in the sleeve 2 and is attached to the inner wall of the sleeve 2. In an embodiment, the receiving member 4 is detachably connected to the sleeve 2. In an embodiment, the receiving member 4 is made of a high-temperature-resistant and corrosion-resistant material.

[0040] Please refer to Figure 1 and Figure 2In the embodiment, the receiving member 4 is used as the carrier of the purification coating 3, the purification coating 3 is coated on the receiving member 4, and then the receiving member 4 carrying the purification coating 3 is placed in the reaction cavity 21. Since the sleeve 2 is cylindrical, the reaction cavity 21 inside the sleeve 2 is cylindrical. The cylindrical geometric shape makes the manufacturing relatively simple, and the manufacturing process is mature and low in cost. At the same time, the stress distribution of the cylindrical container is uniform when it is under pressure, and the bearing capacity is high. Therefore, the selection of the cylindrical sleeve 2 can have good economy and pressure bearing capacity.

[0041] Correspondingly, the receiving member 4 is also designed to be cylindrical, and the outer diameter of the receiving member 4 corresponds to the inner diameter of the reaction cavity 21, so that the receiving member 4 can be exactly placed in the reaction cavity 21, and the receiving member 4 is exactly fitted with the inner wall of the reaction cavity 21. Because the receiving member 4 is fitted with the inner wall of the reaction cavity 21, the space occupied by the receiving member 4 in the reaction cavity 21 is reduced, and the size of the receiving member 4 is increased, so that the receiving member 4 has a larger reaction contact area. Because the receiving member 4 is fitted with the inner wall of the reaction cavity 21, the contact area of the surface of the receiving member 4 fitted with the inner wall of the reaction cavity 21 with carbon monoxide is small, so this surface can not be coated with the purification coating 3, saving resources.

[0042] Further, in the embodiment, the receiving member 4 is arranged in the reaction cavity 21 of the sleeve 2, and the receiving member 4 is detachably connected with the sleeve 2. Because the purification coating 3 oxidizes carbon monoxide into carbon dioxide in the continuous oxidation reaction process, and is also reduced to copper, thereby losing the reduction ability. Therefore, the purification coating 3 will be consumed during a long period of use. After being consumed, the purification coating 3 does not have oxidation ability, so it cannot purify carbon monoxide, resulting in a large amount of carbon monoxide in the exhaust gas. Therefore, after the purification coating 3 is consumed, the purification coating 3 needs to be replenished. The internal space of the reaction cavity 21 is small, and the entire device is difficult to disassemble, and it is also difficult to perform sand blasting work on the inner wall of the reaction cavity 21 inside the reaction cavity 21.

[0043] Therefore, in the embodiment, the receiving member 4 is used as the carrier of the purification coating 3, and the receiving member 4 carrying the purification coating 3 enters the reaction cavity 21. The receiving member 4 is detachably connected with the sleeve 2, and when the purification coating 3 is consumed, the receiving member 4 is detached from the sleeve 2 and taken out, and the receiving member 4 is subjected to a sand blasting process in a space sufficient to allow the receiving member 4 to be coated with the purification coating 3 again. Then the receiving member 4 carrying the purification coating 3 is placed in the reaction cavity 21 of the sleeve 2 again, so that the purification coating 3 can continue to purify carbon monoxide. The reaction cavity 21 not only needs to withstand the high temperature generated by the reaction of methane gas, but also needs to prevent corrosion of the exhaust gas, so the receiving member 4 needs to be made of a material resistant to high temperature and corrosion.

[0044] In one embodiment, a gas replenishment chamber 13 is provided between the outer shell 1 and the sleeve 2. The sleeve 2 and the receiving component 4 have perforations on their surfaces, allowing the reaction chamber 21 to communicate with the gas replenishment chamber 13. In one embodiment, the gas replenishment chamber 13 contains nitrogen gas.

[0045] like Figure 1 As shown, sleeve 2 is disposed inside outer shell 1, and sleeve 2 and outer shell 1 are arranged at intervals. Therefore, there is a gap between sleeve 2 and outer shell 1, and this gap is the air replenishment chamber 13. In this embodiment, the surfaces of sleeve 2 and receiving component 4 are hollowed out to connect reaction chamber 21 and air replenishment chamber 13. Because air replenishment chamber 13 can also contain air, it can replenish air to reaction chamber 21. The carbon monoxide in reaction chamber 21 is produced due to incomplete reaction of methane gas. Therefore, in this embodiment, replenishing air to reaction chamber 21 through air replenishment chamber 13 can make the reaction of methane gas more complete, reduce the production of carbon monoxide, and also achieve the effect of purifying waste gas.

[0046] Meanwhile, in this embodiment, nitrogen gas is injected into the gas replenishment chamber 13, which can cool the surface of the reaction chamber 21.

[0047] In one embodiment, the outer casing 1 is further provided with an air vent that connects the air supply chamber 13 to the outside. In one embodiment, both the inlet 11 and the outlet 12 are located on the top of the outer casing 1.

[0048] In this embodiment, air vents are provided on the outer casing 1, allowing for the replenishment of air into the air supply chamber 13, ensuring sufficient gas supply within the chamber. Furthermore, replenishing the air supply chamber 13 via the air vents is more convenient and faster than replenishing it via the inlet 11. The fact that both the inlet 11 and outlet 12 are located on the top of the outer casing 1 simplifies the overall structure and facilitates installation. Of course, the inlet 11 and outlet 12 can be placed in different locations to meet different installation requirements; no limitation is imposed here.

[0049] In one embodiment, outlet 12 is connected to a negative pressure device used to remove impurities from reaction chamber 21. Because the gas generated in reaction chamber 21 may not be completely discharged from outlet 12, some residue may remain in reaction chamber 21, so it needs to be removed by the negative pressure device. Simultaneously, the purification coating 3 produces solid copper during the redox reaction, which also remains in reaction chamber 21. Therefore, the solid copper can also be removed from reaction chamber 21 by the negative pressure device, ensuring the cleanliness of reaction chamber 21.

[0050] It should be finally pointed out that: the above examples are only used to illustrate the technical solutions of the utility model, and not to limit them; although the utility model has been explained in detail with reference to the foregoing examples, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing examples, or make equivalent replacement to part of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the utility model.

Claims

1. An exhaust gas treatment device, characterized by, The application relates to a waste gas treatment device. The waste gas treatment device comprises the following parts: a shell (1) provided with an inlet (11) and an outlet (12); 2. The exhaust treatment device of claim 1, wherein, a sleeve (2) arranged in the shell (1), wherein the sleeve (2) is provided with a closed reaction cavity (21) which is communicated with the inlet (11) and the outlet (12), and the sleeve (2) is provided with a purification coating (3) for purifying waste gas generated in the reaction cavity (21).

3. The exhaust treatment device of claim 1, wherein, The purification coating (3) is a copper oxide sand blasting coating.

4. The exhaust treatment device of claim 3, wherein, The waste gas treatment device further comprises a receiving member (4), wherein the purification coating (3) is coated on the surface of the receiving member (4), the receiving member (4) is arranged in the sleeve (2) and is attached to the inner wall of the sleeve (2).

5. The exhaust treatment device of claim 3, wherein, The receiving member (4) is made of a high-temperature-resistant and corrosion-resistant material.

6. The exhaust treatment device of claim 5, wherein, A gas supplement cavity (13) is arranged between the shell (1) and the sleeve (2), and the surface of the sleeve (2) and the receiving member (4) is hollowed out, so that the reaction cavity (21) is communicated with the gas supplement cavity (13).

7. The exhaust treatment device of claim 3, wherein, The gas supplement cavity (13) contains nitrogen.

8. The exhaust treatment device of claim 5, wherein, The receiving member (4) and the sleeve (2) are detachably connected.

9. The exhaust treatment device of claim 1, wherein, The shell (1) is further provided with a gas hole which is communicated with the outside of the gas supplement cavity (13).

10. The exhaust treatment device of claim 1, wherein, The inlet (11) and the outlet (12) are arranged on the top of the shell (1). The outlet (12) is communicated with a negative pressure device which is used for sucking impurities in the reaction cavity (21).

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