Scraper mechanism and waste gas treatment equipment

Abstract

The utility model relates to the technical field of waste gas treatment, and provides a scraper mechanism and waste gas treatment equipment, the mechanism comprises a guide assembly, a flexible scraper and a driving assembly, the guide assembly is suitable for being connected with a negative pressure detection port; the flexible scraper penetrates through the guide assembly; the driving assembly is connected to the flexible scraper, the driving assembly is suitable for driving the flexible scraper to be switched between a first position and a second position, and at the first position, the flexible scraper extends into the negative pressure detection opening; at the second position, the flexible scraper is far away from the negative pressure detection opening. The negative pressure detection port of the pipeline is connected with the guide assembly, the flexible scraper is driven by the driving assembly to move close to or away from the negative pressure detection port, the flexible scraper moves close to the negative pressure detection port to push away blockages at the negative pressure detection port, the blocked negative pressure detection port is cleaned, and the use efficiency of equipment is improved; the flexible scraper is used for cleaning the negative pressure detection port, the installation direction and position of the driving assembly can be adjusted, and the installation space is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to waste gas treatment technical field especially, relate to a scraper mechanism and waste gas treatment equipment. BACKGROUND

[0002] With the rapid development of the semiconductor industry, a large amount of waste gas (NF3, PH3, B2H6, SiH4, etc.) is inevitably produced in the production process. Most of these waste gases are heavier than air. If they are discharged into the atmosphere, they will deposit on the ground after spreading and reach a very high concentration, causing serious environmental pollution and endangering human health. If exposed to fire or other ignition sources, it will cause a fire or even an explosion. In order to avoid the harm of waste gas to human body and environment, a waste gas treatment system is used to treat the waste gas in the production process of the semiconductor industry.

[0003] The negative pressure monitoring port of the existing waste gas treatment system is prone to blockage during use, which causes the system to stop running and reduces the system efficiency. UTILITY MODEL CONTENTS

[0004] The utility model provides a scraper mechanism and waste gas treatment equipment to solve the defect that the negative pressure monitoring port of the existing technology is prone to blockage and reduces the efficiency.

[0005] The utility model provides a scraper mechanism, which comprises:

[0006] A guide assembly is adapted to be connected to the negative pressure detection port.

[0007] A flexible scraper is arranged in the guide assembly.

[0008] A driving assembly is connected to the flexible scraper, and the driving assembly is adapted to drive the flexible scraper to switch between a first position and a second position. In the first position, the flexible scraper extends into the negative pressure detection port to push away the blockage of the negative pressure detection port. In the second position, the flexible scraper is away from the negative pressure detection port.

[0009] According to the scraper mechanism provided by the utility model, the guide assembly comprises a first guide pipe and a second guide pipe connected together, the first guide pipe and the second guide pipe have a preset included angle, and the first guide pipe is connected to the negative pressure detection port.

[0010] According to the scraper mechanism provided by the utility model, the guide assembly further comprises an elbow pipe connected between the first guide pipe and the second guide pipe.

[0011] The utility model provides a kind of scraper mechanism, the flexible scraper includes detection port scraper section, flexible section and connecting section connected in turn, the detection port scraper section is located the first guide pipe, the connecting section is located the second guide pipe, the flexible section is at least partially located the elbow pipe.

[0012] According to the scraper mechanism provided by the utility model, the guide assembly is connected to the negative pressure detection port through the first connecting sleeve, and the first connecting sleeve has a pressure detection port.

[0013] According to the scraper mechanism provided by the utility model, the guide assembly is connected to the negative pressure detection port through the first connecting sleeve, and the first connecting sleeve has a pressure detection port.

[0014] According to the scraper mechanism provided by the utility model, the second connecting sleeve is provided with a scraper connecting rod connected to the flexible scraper and the output of the driving assembly.

[0015] According to the scraper mechanism provided by the utility model, the driving assembly comprises a driving cylinder.

[0016] The utility model further provides a kind of waste gas treatment equipment, including pipeline and the scraper mechanism described in any one of the above;The guide assembly is connected to the negative pressure detection port of the pipeline.

[0017] According to the scraper mechanism provided by the utility model, the guide assembly is connected to the negative pressure detection port through the first connecting sleeve, and the first connecting sleeve has a pressure detection port.

[0018] The scraper mechanism and the waste gas treatment equipment provided by the utility model connect the guide assembly through the negative pressure detection port of the pipeline, the flexible scraper is arranged in the guide assembly, and the flexible scraper is driven to move close to or away from the negative pressure detection port by the driving assembly, so that the flexible scraper moves close to the negative pressure detection port to push away the blockage at the negative pressure detection port, the cleaning of the blocked negative pressure detection port is realized, the shutdown caused by blockage is avoided, and the use efficiency of the equipment is improved;In addition, the flexible scraper is used to clean the negative pressure detection port, the installation direction and position of the driving assembly can be adjusted, the installation space is reduced, and the installation environment with limited space can be applied. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to more clearly illustrate the technical scheme of the utility model or the prior art, the following will briefly introduce the drawings needed to be used in the embodiment or the prior art description, and obviously, the drawings in the following description are some embodiments of the utility model, and for ordinary skilled in the art, other drawings can be obtained without creative labor according to these drawings.

[0020] Figure 1 Figure 1 is a structural schematic diagram of a scraper mechanism provided by the utility model.

[0021] Figure 2 Figure 2 is a structural schematic diagram of cooperation between the scraper mechanism and the pipeline provided by the utility model.

[0022] Figure 3 Figure 3 is a sectional view schematic diagram of cooperation between the scraper mechanism and the pipeline provided by the utility model.

[0023] Figure 4 Figure 4 is a structural schematic diagram of a guide assembly provided by the utility model.

[0024] Figure 5 Figure 5 is a structural schematic diagram of a flexible scraper provided by the utility model.

[0025] Figure 6 Figure 6 is a local enlarged structural schematic diagram of A of figure 5. Figure 3

[0026] Reference signs:

[0027] 110, pipeline; 111, negative pressure detection port;

[0028] 210, guide assembly; 211, first guide pipe; 212, second guide pipe; 213, elbow pipe;

[0029] 220, flexible scraper; 221, detection port scraper section; 222, flexible section; 223, connecting section;

[0030] 230, driving assembly; 231, driving cylinder; 2311, piston rod; 232, cylinder connecting sleeve;

[0031] 240, second connecting clamping sleeve; 241, scraper connecting rod;

[0032] 250, first connecting clamping sleeve; 251, pressure detection port. DETAILED DESCRIPTION

[0033] The embodiments of the utility model will be further described in detail below in combination with the drawings and examples. The following examples are used to illustrate the utility model, but cannot be used to limit the scope of the utility model.

[0034] ​In the description of the embodiments of the utility model, it needs to be explained that, the orientation or position relation indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like is the orientation or position relation shown in the drawings, and is only for the convenience of describing the embodiments of the utility model and simplifying the description, and therefore cannot be understood as a limitation on the embodiments of the utility model, which indicates or implies that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the embodiments of the utility model. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0035] In the description of the embodiments of the utility model, it needs to be explained that, unless otherwise explicitly specified and limited, the terms "connected", "connected" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrally connected, it can be mechanically connected, or it can be electrically connected, it can be directly connected, or it can be indirectly connected through an intermediate medium. For ordinary skilled in the art, the specific meaning of the above terms in the embodiments of the utility model can be understood according to the specific circumstances.

[0036] In the embodiments of the utility model, unless otherwise explicitly specified and limited, the first feature is "on" or "under" the second feature, which can be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature "above", "above" and "above" of the second feature can be that the first feature is directly above or obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" of the second feature can be that the first feature is directly below or obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0037] In the description of the present application, the description of the terms "one embodiment", "some embodiments", "example", "specific example" or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In the present application, the illustrative description of the above terms is not necessarily for the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine the different embodiments or examples described in the present application and the features of different embodiments or examples without contradiction.

[0038] The following will be described in combination with Figures 1-6 The scraper mechanism of the utility model is described.

[0039] The utility model discloses first aspect embodiment proposes a scraper mechanism, like Figures 1 to 3 As shown, the scraper mechanism includes guide assembly 210, flexible scraper 220 and drive assembly 230.

[0040] Among them, guide assembly 210 is suitable for connecting negative pressure detection port 111;Flexible scraper 220 is worn in guide assembly 210;Drive assembly 230 is connected to flexible scraper 220, and drive assembly 230 is suitable for driving flexible scraper 220 and moving along the extension direction of guide assembly 210 to approach negative pressure detection port 111 or away from negative pressure detection port 111.

[0041] Specifically, drive assembly 230 drives flexible scraper 220 to move to approach negative pressure detection port 111, to move to first position, at this time, flexible scraper 220 extends into negative pressure detection port 111 and pushes away the blockage at negative pressure detection port 111;Drive assembly 230 drives flexible scraper 220 to move to away from negative pressure detection port 111, to move to second position, at this time, flexible scraper 220 is away from negative pressure detection port 111, so that drive assembly 230 drives flexible scraper 220 to switch between first position and second position, in first position, flexible scraper 220 extends into negative pressure detection port 111 and pushes the blockage movement;In second position, flexible scraper 220 is away from negative pressure detection port 111.

[0042] Need to explain is, in the process of waste gas treatment equipment normal operation, flexible scraper 220 is in second position;When needing to clean the blocked negative pressure detection port 111, flexible scraper 220 is switched from second position to first position, in the process of moving from second position to first position of flexible scraper 220, the blockage of negative pressure detection port 111 is dredged and cleaned.

[0043] It can be understood that, through the connection of guide assembly 210 and the negative pressure detection port 111 of pipeline 110, flexible scraper 220 is worn in guide assembly 210 and moves along the extension direction of guide assembly 210, to realize reciprocating movement between first position and second position;In first position, flexible scraper 220 extends into negative pressure detection port 111 and pushes the blockage movement, can clean the blocked negative pressure detection port 111 in the process of normal operation of equipment, avoid cleaning, and further improve the processing efficiency;In second position, flexible scraper 220 is away from negative pressure detection port 111, does not affect the normal use of equipment;Thus, through the scraper mechanism, the blocked negative pressure detection port 111 of equipment is cleaned regularly, avoids blockage, and prolongs the maintenance cycle.

[0044] The scraper mechanism provided by the embodiment of the utility model, through the negative pressure detection port 111 of the pipeline 110 connecting the guide assembly 210, the flexible scraper 220 is arranged in the guide assembly 210, and the flexible scraper 220 is driven by the driving assembly 230 to move close to or away from the negative pressure detection port 111, the flexible scraper 220 moves close to the negative pressure detection port 111 to push away the blockage at the negative pressure detection port 111, the cleaning of the blocked negative pressure detection port 111 is realized, the shutdown caused by the blockage is avoided, and therefore the equipment use efficiency is improved; in addition, the negative pressure detection port 111 is cleaned by using the flexible scraper 220, the installation direction and position of the driving assembly 230 can be adjusted, and therefore the installation space is reduced, and the installation environment with limited space can be applied.

[0045] In an embodiment of the utility model, the guide assembly 210 includes a guide pipe, and the flexible scraper 220 is arranged in the guide pipe, and the guide pipe provides a guide function for the movement of the flexible scraper 220.

[0046] Optionally, as shown in the figure, Figure 4 The first guide pipe 211 and the second guide pipe 212 have a preset included angle, the first guide pipe 211 is connected to the negative pressure detection port 111, the flexible scraper 220 is arranged in the first guide pipe 211 and the second guide pipe 212, one end of the flexible scraper 220 is close to the negative pressure detection port 111, and the other end of the flexible scraper 220 is connected to the driving assembly 230.

[0047] It should be noted that, due to the limited floor area of the waste gas treatment equipment, the installation space of the scraper mechanism is limited, and the traditional scraper cannot be installed. The first guide pipe 211 and the second guide pipe 212 have an included angle in the utility model, the bending design of the guide pipe is realized, the installation space is reduced, and the installation in the limited space of the waste gas treatment equipment can be applied.

[0048] Further, the first guide pipe 211 and the second guide pipe 212 are connected through the elbow pipe 213, the first guide pipe 211 and the second guide pipe 212 are connected smoothly, so that the flexible scraper 220 is arranged smoothly at the connection position of the first guide pipe 211 and the second guide pipe 212, and the flexible scraper 220 is prevented from being stuck or damaged due to the bending transition at the connection position of the first guide pipe 211 and the second guide pipe 212.

[0049] Optionally, the guide pipe can be a flexible pipe, and the guide pipe is bent according to the installation space of the waste gas treatment equipment, so that the guide pipe is composed of multiple sections. Optionally, the guide pipe includes the first guide pipe 211, the elbow pipe 213 and the second guide pipe 212 after being bent.

[0050] It should be noted that when the guide pipe is designed to be bent, the inside of the guide pipe should be ensured to be free of deformation, so as to ensure the stability of the moving process of the flexible scraper 220.

[0051] In the embodiment, the guide assembly 210 comprises the second guide pipe 212, the elbow pipe 213 and the first guide pipe 211 connected in sequence, and the first guide pipe 211 and the second guide pipe 212 are arranged vertically; of course, in other embodiments, the included angle between the first guide pipe 211 and the second guide pipe 212 can be designed to be 0°-180° according to the actual installation space, and is preferably 45°-135°.

[0052] In an optional embodiment of the utility model, as shown in Figure 3 and Figure 5 , the flexible scraper 220 comprises the detection port scraper section 221, the flexible section 222 and the connecting section 223 connected in sequence, the detection port scraper section 221 is located in the first guide pipe 211, the connecting section 223 is located in the second guide pipe 212, and the flexible section 222 is at least partially located in the elbow pipe 213.

[0053] It can be understood that the detection port scraper section 221 is located in the first guide pipe 211, the connecting section 223 is located in the second guide pipe 212, the first guide pipe 211 and the second guide pipe 212 are both straight pipes, the detection port scraper section 221 and the connecting section 223 are both straight sections; during the moving process of the flexible scraper 220 driven by the driving assembly 230, the detection port scraper section 221 is always located in the first guide pipe 211, and the connecting section 223 is always located in the second guide pipe 212, so that the length of the flexible section 222 is greater than the length of the elbow pipe 213, and during the moving process of the flexible scraper 220, the flexible section 222 is at least partially located in the elbow pipe 213, so as to ensure the stability of the axial movement of the detection port scraper section 221 along the first guide pipe 211, and further improve the cleaning effect.

[0054] Optionally, the cross section of the flexible scraper 220 can also be rectangular, triangular, elliptical or any other shape, for adapting to different shapes of the negative pressure detection port 111, and the outer contour shape of the flexible scraper 220 is not limited in the application.

[0055] In an embodiment of the utility model, as shown in Figure 2 and Figure 3 , the scraper mechanism further comprises a first connecting sleeve 250, the first connecting sleeve 250 has three connecting ports, which are a first connecting port, a second connecting port and a third connecting port, the first connecting port is connected with the negative pressure detection port 111, the second connecting port is connected with the first guide pipe 211 of the guide assembly 210, and the third connecting port is a pressure detection port 251.

[0056] For example, the first connecting sleeve 250 is a three-way sleeve, the first connecting port and the second connecting port are oppositely arranged, and are connected with the first guide pipe 211 and the negative pressure detection port 111 respectively, the middle connecting port of the three-way sleeve is used as the pressure detection port 251 and is used for connecting the negative pressure detection component.

[0057] In one embodiment of the present application, as shown in Figure 3 and Figure 6 The scraper mechanism further comprises a second connecting sleeve 240, the first end of the second connecting sleeve 240 is sleeved on the second guide pipe 212, and the driving assembly 230 is connected to the second end of the second connecting sleeve 240.

[0058] For example, the upper end of the second connecting sleeve 240 is connected to the lower end of the second guide pipe 212, and the driving assembly 230 is fixed to the lower end of the second connecting sleeve 240.

[0059] In the embodiment, the second connecting sleeve 240 is a straight-through sleeve, the lower part of the second guide pipe 212 is connected with the straight-through sleeve, and the second connecting sleeve 240 can be a straight-through variable-diameter sleeve according to the size of the second guide pipe 212.

[0060] Further, the driving assembly 230 comprises a driving cylinder 231 and a cylinder connecting sleeve 232, the driving cylinder 231 is connected to the lower end of the second connecting sleeve 240 through the cylinder connecting sleeve 232, the driving cylinder 231 and the cylinder connecting sleeve 232 are connected through threads, and a sealing gasket is arranged between the driving cylinder 231 and the cylinder connecting sleeve 232, and the sealing gasket includes but is not limited to a Teflon sealing gasket.

[0061] As shown in Figure 3 and Figure 6 The piston rod 2311 of the driving cylinder 231 is located inside the cylinder connecting sleeve 232, and the inside of the cylinder connecting sleeve 232 ensures that the piston rod 2311 can move freely.

[0062] In a preferred embodiment of the present application, a scraper connecting rod 241 is arranged in the second connecting sleeve 240, the scraper connecting rod 241 connects the flexible scraper 220 and the output of the driving assembly 230; specifically, the scraper connecting rod 241 connects the connecting section 223 of the flexible scraper 220 and the piston rod 2311.

[0063] It can be understood that the scraper connecting rod 241 in the second connecting sleeve 240 is used to connect the flexible scraper 220 and the driving cylinder 231, and to guide the movement of the flexible scraper 220. It should be noted that the piston rod 2311 needs space to move, so that the front part has a large space when the cylinder is pulled back. The large space is not conducive to the movement of the flexible scraper 220 (the large space causes the flexible scraper 220 to be twisted without being guided), so the scraper connecting rod 241 provides a guiding function for the movement of the flexible scraper 220 in the large space.

[0064] In the embodiment, the driving cylinder 231 adopts a double driving cylinder, and two specifications of air pipes are adopted to prevent installation errors during installation.

[0065] The second aspect of the embodiment of the utility model provides a waste gas treatment equipment, the waste gas treatment equipment includes pipeline 110 and the scraper mechanism provided by any of the above embodiments, and the guide assembly 210 is connected to the negative pressure detection port 111 of the pipeline 110.

[0066] Specifically, the pipeline 110 can be an air inlet pipe of the waste gas treatment equipment, the air inlet pipe has a negative pressure detection pipe, the negative pressure detection pipe serves as the negative pressure detection port 111, the negative pressure detection pipe has a small diameter, and silane, phosphine and other gases in the waste gas are easy to form a dust state after chemical reaction, adhere to the inner wall of the negative pressure detection pipe, and cause the negative pressure detection port 111 to be blocked. The guide assembly 210 of the scraper mechanism is installed on the negative pressure detection pipe, and the blockage of the negative pressure detection port 111 of the negative pressure detection pipe is dredged, so that the negative pressure detection system is prevented from alarming.

[0067] It can be understood that the negative pressure detection port 111 of the negative pressure detection pipe of the waste gas treatment equipment is dredged and cleaned by the scraper mechanism, so that the cleaning can be performed without stopping the machine, the blockage is avoided, the maintenance cycle of the equipment is prolonged, and the use efficiency is improved.

[0068] Optionally, the waste gas treatment equipment further comprises a negative pressure detection component, the negative pressure detection component is connected to the pressure detection port 251 between the guide assembly 210 and the negative pressure detection port 111, and the negative pressure detection component comprises a negative pressure detection pipe and a negative pressure sensor.

[0069] Further, the first guide pipe 211 is connected to the negative pressure detection pipe of the air inlet pipe through the first connecting sleeve 250, the first connecting sleeve 250 is connected with a negative pressure detection pipe, and the negative pressure detection system further comprises a negative pressure blowing member. The negative pressure blowing member can introduce gas into the negative pressure detection pipe, and also can realize a certain anti-blocking function.

[0070] It should be noted that the negative pressure detection system detects negative pressure at the pressure detection port 251, and during the negative pressure detection process, a long-blowing small pressure airflow is blown into the first connecting sleeve 250, and even into the negative pressure detection pipeline and the scraper mechanism. The negative pressure purge member of the present embodiment can introduce gas into the negative pressure detection pipeline, which can prevent the flow of waste gas and dust in the negative pressure detection pipeline and the scraper mechanism from entering the negative pressure detection pipeline and the scraper mechanism, thereby avoiding corrosion and blockage of the negative pressure detection pipeline, the negative pressure sensor and the scraper mechanism.

[0071] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacements for some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A doctor mechanism characterized by, The utility model relates to a kind of negative pressure detection device, including: Guiding component, suitable for connecting negative pressure detection port; Flexible scraper, is arranged in the guiding component; Driving component, connected to the flexible scraper, the driving component is suitable for driving the flexible scraper switches between first position and second position, in the first position, the flexible scraper enters the negative pressure detection port to push away the blockage of the negative pressure detection port;In the second position, the flexible scraper is away from the negative pressure detection port.

2. The doctor mechanism of claim 1, wherein, The guiding component includes connected first guide pipe and second guide pipe, the first guide pipe and the second guide pipe have preset included angle, the first guide pipe is connected to the negative pressure detection port.

3. The doctor mechanism of claim 2, wherein, The guiding component further includes elbow pipe connected between the first guide pipe and the second guide pipe.

4. The doctor mechanism of claim 3, wherein, The flexible scraper includes detection port scraper section, flexible section and connecting section connected in sequence, the detection port scraper section is located in the first guide pipe, the connecting section is located in the second guide pipe, and the flexible section is at least partially located in the elbow pipe.

5. The doctor mechanism according to any one of claims 1 to 4, characterized in that The guiding component is connected to the negative pressure detection port by first connecting sleeve, and the first connecting sleeve has pressure detection port.

6. The doctor mechanism of claim 5, wherein, Further comprising second connecting sleeve, the first end of the second connecting sleeve is connected to the guiding component, and the second end of the second connecting sleeve is connected to the driving component.

7. The doctor mechanism of claim 6, wherein, The second connecting sleeve is provided with scraper connecting rod connected to the flexible scraper and the output of the driving component.

8. The doctor mechanism of claim 7, wherein, The driving component includes driving cylinder.

9. An exhaust gas treatment device, characterized by, Including pipeline and the scraper mechanism as claimed in any one of claims 1 to 8 above;The guiding component is connected to the negative pressure detection port of the pipeline.

10. The exhaust treatment device of claim 9, wherein, Further comprising negative pressure detection component, the negative pressure detection component is connected to the pressure detection port between the guiding component and the negative pressure detection port, and the negative pressure detection component has negative pressure purging member.

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