Graphite material surface grinding device for high-end semiconductor

Abstract

The utility model relates to a graphite material surface grinding device for a high-end semiconductor, which comprises an operating platform, a supporting seat arranged on the rear side of one end of the top surface of the operating platform, a supporting plate arranged on the rear side of the supporting seat, a first motor and a speed reducer arranged on the supporting plate, and an output shaft of the first motor fixedly connected with an input shaft of the speed reducer. An output shaft of the speed reducer faces forwards and is rotationally connected with the supporting base, the front end of the output shaft penetrates through the supporting base and is fixedly connected with a three-jaw chuck, a guide rail is fixedly arranged at the other end of the top face of the operation table in the front-back direction, an electric sliding block is slidably arranged on the guide rail, and a vertical plate is fixedly arranged on the top of the electric sliding block. A single-rod hydraulic cylinder is fixedly arranged on the upper portion of the vertical plate in a horizontal penetrating mode in the left-right direction, a piston rod of the single-rod hydraulic cylinder faces the direction where the three-jaw chuck is located and is fixedly connected with a second motor, an output shaft of the second motor faces forwards and is fixedly connected with a base, and grinding plates are detachably connected to the left side and the right side of the base. The high-purity graphite material grinding device can be used for automatically grinding columnar high-purity graphite materials, and is more convenient and practical.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of grinding, and particularly relates to a graphite material surface grinding device for high-end semiconductor. BACKGROUND

[0002] Currently, graphite materials for high-end semiconductor mainly include high-purity graphite and graphene materials, and the production process of high-purity graphite materials mainly includes raw material preparation, sintering, processing and molding, decarburization treatment, surface treatment and quality detection. Among them, in the surface treatment process, it is usually necessary to grind and polish the surface of the columnar high-purity graphite material produced according to actual needs. However, in actual processing, the existing columnar high-purity graphite material surface is usually manually ground by workers holding sandpaper, which is inconvenient and time-consuming and laborious, and needs to be improved. SUMMARY

[0003] Therefore, the purpose of the utility model is to provide a graphite material surface grinding device for high-end semiconductor, which can realize automatic grinding of columnar high-purity graphite material to solve the above problems.

[0004] To achieve the above purpose, the utility model adopts the technical scheme of a graphite material surface grinding device for high-end semiconductor, which comprises an operating table, an end of the top surface of the operating table is vertically and fixedly provided with a support seat on the rear side, a support plate is horizontally and fixedly provided on the rear side of the support seat in the front-rear direction, a first motor and a speed reducer are fixedly provided on the support plate, the output shaft of the first motor is coaxially and fixedly connected with the input shaft of the speed reducer, the output shaft of the speed reducer is rotationally connected with the support seat in the front direction, the output shaft of the speed reducer penetrates through the support seat at the front end and is coaxially and fixedly connected with a three-jaw chuck, a guide rail is horizontally and fixedly provided on the other end of the top surface of the operating table in the front-rear direction, an electric sliding block is slidably provided on the guide rail, a vertical plate is fixedly provided on the top of the electric sliding block, a single-rod hydraulic cylinder is horizontally and fixedly provided in the vertical plate in the left-right direction, the piston rod of the single-rod hydraulic cylinder is fixedly connected with a second motor in the direction of the three-jaw chuck, the output shaft of the second motor is fixedly connected with a base in the front direction, square positioning grooves are formed in the centers of the left and right sides of the base, grinding plates are abutted on the left and right sides of the base, one side of each grinding plate away from the base is a grinding surface, and the mesh numbers of the grinding surfaces of the two grinding plates are different, positioning blocks are fixedly provided in the centers of the sides of the two grinding plates close to the base, the positioning blocks are inserted into the positioning grooves on the same side, and a double-rod hydraulic cylinder is vertically arranged in the base.

[0005] Preferably, the positioning blocks are matched with the corresponding positioning grooves.

[0006] Preferably, the locking frame is adapted to the base and the two grinding plates.

[0007] Preferably, the operation table is made of foam aluminum.

[0008] The beneficial effects of the utility model are: when the cylindrical high-purity graphite workpiece is ground, the workpiece is first clamped and fixed at one end on the three-jaw chuck, then the single-rod hydraulic cylinder is operated to make the piston rod extend, which drives the base to move as a whole towards the workpiece until the grinding surface of the corresponding grinding plate abuts against the surface of the workpiece. Then, the first motor is operated to drive the three-jaw chuck and the workpiece to rotate as a whole through the transmission of the speed reducer, and the electric sliding block is operated to drive the grinding plate to feed in the front-rear direction, which can realize automatic grinding of the surface of the corresponding high-purity graphite workpiece. Compared with the original manual operation, the whole operation is simpler and more convenient, time-saving and labor-saving, and more practical.

[0009] In addition, the base can be driven to rotate by the second motor to a certain angle, so that the grinding plate and the workpiece are ground at a certain angle, the angle between the grinding plate and the workpiece can be flexibly changed, the grinding effect can be better ensured, and when the workpiece needs to be ground for two levels to improve the surface precision of the workpiece, the base can be driven to overturn 180 degrees as a whole by the second motor, so that the other grinding plate with a larger mesh number is turned to face the workpiece, and the workpiece is continuously ground for two levels by the grinding plate. When the grinding plate needs to be replaced, the double-rod hydraulic cylinder is operated in the stopped state to make the two piston rods extend, which drives the locking frame to move away from the base, so that the two grinding plates are unlocked, and the positioning block is pulled out, so that the two grinding plates can be disassembled. Then, after the new grinding plate is taken, the positioning block on the grinding plate is inserted into the corresponding positioning groove in place, so that the grinding plate abuts against the corresponding side of the base, and the double-rod hydraulic cylinder is operated to make the two piston rods retract, which drives the locking frame to move close to the base until the locking frame is sleeved on the outer side of the end of the base and the two grinding plates, so that the two grinding plates are tightly locked on the base, thereby completing the fixing and installation of the grinding plate, and the installation is stable and does not affect the subsequent use. In this way, the two grinding plates can be quickly disassembled and replaced, the grinding quality can be better ensured, and the use of the device as a whole is more flexible and convenient. BRIEF DESCRIPTION OF DRAWINGS

[0010] Fig. 1 is the front view structural schematic diagram of the utility model;

[0011] Fig. 2 is the left view structural schematic diagram of the supporting seat of the utility model;

[0012] Fig. 3 is the left view structural schematic diagram of the vertical plate and the base of the utility model;

[0013] Fig. 4 is the top view structural schematic diagram of the vertical plate and the base of the utility model;

[0014] Fig. 5 is the main view of the base structure schematic diagram of the utility model;

[0015] Fig. 6 is the main view structure schematic diagram of the utility model abrasive plate;

[0016] Fig. 7 is the main view of the utility model abrasive plate and base connection structure schematic diagram.

[0017] The figure mark: 1 is the operating platform, 2 is the support seat, 3 is the support plate, 4 is the first motor, 5 is the speed reducer, 6 is the three-jaw chuck, 7 is the guide rail, 8 is the electric sliding block, 9 is the vertical plate, 10 is the single-rod hydraulic cylinder, 11 is the second motor, 12 is the base, 13 is the positioning groove, 14 is the abrasive plate, 15 is the grinding surface, 16 is the positioning block, 17 is the double-rod hydraulic cylinder, 18 is the U-shaped support plate, 19 is the locking frame. Specific implementation

[0018] The utility model will be further described in detail in combination with the drawings and specific implementation:

[0019] As Figs. 1 to 7 Shown, a kind of graphite material surface grinding device for high-end semiconductor, including operating platform 1, the top surface of operating platform 1 one end rear side is vertically fixed with support seat 2, the rear side of support seat 2 is horizontally fixed with support plate 3 along front-rear direction, support plate 3 is fixed with first motor 4 and speed reducer 5, the output shaft of first motor 4 is coaxially fixedly connected with the input shaft of speed reducer 5, the output shaft of speed reducer 5 is rotationally connected with support seat 2 towards front and the output shaft front end of this speed reducer 5 penetrates support seat 2 and is coaxially fixedly connected with three-jaw chuck 6.Operating platform 1 top surface other end is horizontally fixed with guide rail 7 along front-rear direction, electric sliding block 8 is slidably arranged on guide rail 7, vertical plate 9 is fixed on the top of electric sliding block 8, single-rod hydraulic cylinder 10 is fixedly arranged along left-right direction through the upper portion of vertical plate 9, the piston rod of single-rod hydraulic cylinder 10 is fixedly connected with second motor 11 towards the direction of three-jaw chuck 6, the output shaft of second motor 11 is fixedly connected with base 12 towards front, the center of both sides of base 12 is provided with square positioning groove 13, the left and right sides of base 12 are all abutted with abrasive plate 14, the side of the two abrasive plates 14 away from base 12 is all grinding surface 15 and the mesh number of the grinding surface 15 of the two abrasive plates 14 is different, the center of the side of the two abrasive plates 14 close to base 12 is fixed with positioning block 16, and positioning block 16 is inserted into the same side positioning groove 13.Base 12 is built-in vertically arranged double-rod hydraulic cylinder 17, the two piston rods of double-rod hydraulic cylinder 17 are all fixedly connected with U-shaped support plate 18 and extend out of base 12, the two vertical parts of U-shaped support plate 18 are fixedly connected with the same square locking frame 19 towards base 12, and locking frame 19 is sleeved on the outside of base 12 and the two abrasive plates 14.

[0020] When grinding the high-purity graphite workpiece in a columnar shape, one end of the workpiece can be clamped and fixed on the three-jaw chuck 6, and then the single-rod hydraulic cylinder 10 is operated to extend the piston rod, so that the base 12 is driven to move as a whole towards the workpiece until the grinding surface of the corresponding grinding plate 14 abuts against the surface of the workpiece. Then, the first motor 4 is operated to drive the three-jaw chuck 6 and the workpiece to rotate as a whole through the transmission of the speed reducer 5, and the electric sliding block 8 is operated to drive the grinding plate 14 to feed in the front-rear direction, so that the automatic grinding of the surface of the corresponding high-purity graphite workpiece is realized. Compared with the original manual operation, the overall operation is more simple and convenient, time-saving and labor-saving, and more practical.

[0021] In addition, the base 12 can be driven to rotate by a certain angle by the second motor 11, so that the grinding plate 14 is ground at a certain angle with the workpiece, the angle between the grinding plate 14 and the workpiece can be flexibly changed, the grinding effect can be better guaranteed, and when the workpiece needs to be ground for two levels to improve the surface precision of the workpiece, the base 12 can be turned over by 180 degrees as a whole by the second motor 11, so that another grinding plate 14 with a larger number of meshes is turned over to face the workpiece, and the workpiece is continuously ground for two levels by the grinding plate 14. When the grinding plate 14 needs to be replaced, the double-rod hydraulic cylinder 17 is operated in the stopped state to extend the two piston rods, so that the locking frame 19 is driven to move away from the base 12, the locking of the two grinding plates 14 is released, and the positioning block 16 is pulled out, so that the two original grinding plates 14 can be disassembled. Then, after taking the new grinding plate 14, the positioning block 16 on the grinding plate 14 is inserted into the corresponding positioning groove 13 in place, so that the grinding plate 14 abuts against the side of the corresponding base 12, and then the double-rod hydraulic cylinder 17 is operated to retract the two piston rods, so that the locking frame 19 approaches the base 12 until the locking frame 19 is sleeved outside the end portions of the base 12 and the two grinding plates 14, so that the two grinding plates 14 are pressed and locked on the base 12, thereby completing the fixed installation of the grinding plate 14, and the installation is stable and does not affect the subsequent use. In this way, the two grinding plates 14 can be quickly disassembled and replaced, the grinding quality can be better guaranteed, and the use of the device as a whole is more flexible and convenient. The first motor 4, the speed reducer 5, the three-jaw chuck 6, the electric sliding block 8, the single-rod hydraulic cylinder 10, the second motor 11, the grinding plate 14 and the double-rod hydraulic cylinder 17 all adopt the existing technology, and the second motor 11 can specifically adopt a conventional stepping motor with a brake function, so as to realize the rotation by a certain angle and the position locking after the rotation is completed.

[0022] In the embodiment, the positioning block 16 is matched with the corresponding positioning groove 13 to ensure the smooth positioning and installation of the grinding plate 14.

[0023] In the embodiment, the locking frame 19 is matched with the base 12 and the two grinding plates 14 to ensure smooth fitting of the locking frame 19 and to realize locking installation of the two grinding plates 14.

[0024] In the embodiment, the operation table 1 is made of foamed aluminum, which is a current material and has the characteristics of high damping, shock absorption and energy absorption, can effectively buffer and absorb shock, and is more conducive to improving the working stability during grinding processing, thereby more effectively ensuring the grinding quality.

[0025] The above only describes the preferred embodiments of the present application and is not intended to limit the present application, and any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A graphite material surface polishing device for high-end semiconductors, characterized by, The operation table is characterized by comprising an operation table, a support seat vertically fixed on one end of the top surface of the operation table, a support plate horizontally fixed on the rear side of the support seat in the front-rear direction, a first motor and a speed reducer fixed on the support plate, a coaxially fixed connection between the output shaft of the first motor and the input shaft of the speed reducer, a rotation connection between the output shaft of the speed reducer and the support seat, a coaxially fixed connection between the front end of the output shaft of the speed reducer and the three-jaw chuck, a guide rail horizontally fixed on the other end of the top surface of the operation table in the front-rear direction, an electric sliding block slidingly arranged on the guide rail, a vertical plate fixed on the top of the electric sliding block, a single-rod hydraulic cylinder horizontally penetrating through the upper part of the vertical plate in the left-right direction, a second motor fixed on the piston rod of the single-rod hydraulic cylinder and facing the three-jaw chuck, a base fixed on the output shaft of the second motor and facing forward, a square positioning groove formed in the center of the left and right sides of the base, a grinding plate abutting against the left and right sides of the base, a grinding surface formed on the side of the two grinding plates away from the base and different in mesh number, a positioning block fixed on the side of the two grinding plates close to the base and in the corresponding positioning groove, and a double-rod hydraulic cylinder vertically arranged in the base, two piston rods of the double-rod hydraulic cylinder extending out of the base and fixedly connected with a U-shaped support plate, and the same square locking frame fixedly connected with the two vertical parts of the U-shaped support plate and sleeved on the outer sides of the base and the two grinding plates.

2. The high-end semiconductor graphite material surface polishing apparatus according to claim 1, wherein The positioning block is matched with the corresponding positioning groove.

3. The high-end semiconductor graphite material surface polishing apparatus according to claim 1, wherein The locking frame is matched with the base and the two grinding plates.

4. The high-end semiconductor graphite material surface polishing apparatus according to claim 1, wherein The operation table is made of foamed aluminum.

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