Magnetic conductive target positioning tool

Abstract

The utility model relates to the technical field of magnetic conductive target positioning, in particular to a magnetic conductive target positioning tool which comprises a bottom plate. The device further comprises a positioning block, an opening, an air extracting pump, an air conveying pump, a suction cup, a front-back moving assembly and a left-right moving assembly. The front-back moving assembly is arranged at the upper end of the bottom plate. A target material is placed on the upper surface of the positioning block, the sucking pump is started, the target material is fixed through the suction cup, after the target material is machined, the air conveying pump is started, the adsorption force between the target material and the suction cup disappears, and the target material can be easily taken down, so that the target material can be rapidly disassembled, and the target material is convenient to use. According to the mechanism, the downtime caused by replacement of the target material can be greatly shortened, so that the production efficiency is improved, meanwhile, physical contact is reduced for fixation, abrasion is reduced, the quality is further improved, the production efficiency is improved, and abrasion between the target material and a tool is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to magnetically permeable target positioning technical field especially relates to a magnetically permeable target positioning frock. BACKGROUND

[0002] The magnetically permeable target positioning frock is a device specially designed for a magnetron sputtering system, which is used to ensure that the target material can be accurately positioned and fixed during the sputtering process. This frock plays a crucial role in modern thin film manufacturing and nanotechnology fields because it directly affects the quality and uniformity of the thin film.

[0003] The common magnetically permeable target positioning frock has a complicated procedure for positioning and disassembling the magnetically permeable target, which cannot quickly replace the magnetically permeable target, thereby increasing the downtime for replacing the target material and reducing production efficiency. Moreover, the physical contact area is large when fixing the magnetically permeable target, which increases wear and tear and affects the final product quality.

[0004] Therefore, in view of the above problems of the magnetically permeable target positioning frock, which cannot quickly replace the magnetically permeable target, thereby increasing the downtime for replacing the target material and reducing production efficiency, and the physical contact area is large when fixing the magnetically permeable target, which increases wear and tear, a magnetically permeable target positioning frock can be designed. The target material is placed on the upper surface of the positioning block, the suction cup is used to fix the target material by starting the air suction pump, and the adsorption force between the target material and the suction cup disappears after processing, so that the target material can be easily removed, thereby quickly disassembling the target material. This mechanism can greatly reduce the downtime caused by replacing the target material, thereby improving production efficiency, reducing physical contact for fixing, reducing wear and tear, and further improving quality. This mechanism not only improves production efficiency but also reduces wear and tear between the target material and the frock to solve the above problems. SUMMARY

[0005] In order to overcome the problems of the common magnetically permeable target positioning frock, which cannot quickly replace the magnetically permeable target, thereby increasing the downtime for replacing the target material and reducing production efficiency, and the physical contact area is large when fixing the magnetically permeable target, which increases wear and tear.

[0006] The technical scheme of the utility model discloses a magnetically permeable target positioning frock, which comprises a bottom plate, a positioning block, an opening, an air suction pump, a gas conveying pump, a suction cup, a front and rear moving assembly and a left and right moving assembly. The upper end of the bottom plate is provided with the front and rear moving assembly, the upper end of the front and rear moving assembly is provided with the left and right moving assembly, the upper end of the left and right moving assembly is provided with a mounting block, the upper end surface of the mounting block is fixedly provided with the positioning block, the inside of the positioning block is provided with an opening, the opening of the upper end surface of the positioning block is fixedly connected with the suction cup, the front side surface opening of the positioning block is fixedly provided with the air suction pump, the left side surface opening of the positioning block is installed with the gas conveying pump, and the right side surface opening of the positioning block is installed with a gas pressure detector.

[0007] Preferably, the target material is placed on the upper surface of the positioning block, the air in the opening is exhausted by starting the air exhaust pump, the target material is fixed by the suction cup, the air pressure detector can detect the air pressure in the opening, when the air pressure is abnormal, the air exhaust pump is started to exhaust the excess air in the opening, when the processing is completed, the air supply pump is started to supply air to the opening, so that the air pressure in the opening is restored, the adsorption force between the target material and the suction cup disappears, the target material can be easily removed, so that the target material can be quickly disassembled, the mechanism can greatly reduce the downtime caused by replacing the target material, thereby improving the production efficiency, and physical contact is reduced for fixation, wear is reduced, quality is further improved, and the front and rear moving assemblies and the left and right moving assemblies are provided, so that the target material can be adjusted in position to ensure accurate alignment with the substrate or other components. The mechanism not only improves production efficiency, but also reduces wear between the target material and the tooling, improves the precision and quality of the sputtering process.

[0008] As a preferred, the front and rear moving assembly includes an electric sliding rail one, a sliding block one and a fixed plate, and the left and right moving assembly includes an electric sliding rail two, a sliding block two and a mounting block. The front and rear moving assembly can drive the target material to move forward and backward, and the left and right moving assembly can drive the target material to move left and right. Through cooperation, the target material can move in all directions.

[0009] As a preferred, the upper end surface of the bottom plate is provided with two electric sliding rails one, the upper surface of the electric sliding rail one is slidably connected with the sliding block one, and the upper end surface of the two sliding blocks one is fixedly provided with the fixed plate. Starting the electric sliding rail one can drive the sliding block one to move along the electric sliding rail one, thereby driving the fixed plate to move, and the mechanism connected with the fixed plate will also move.

[0010] As a preferred, the upper end surface of the fixed plate is fixedly provided with the electric sliding rail two, the upper surface of the electric sliding rail two is slidably connected with the sliding block two, and the upper surface of the sliding block two is fixedly provided with the mounting block. Starting the electric sliding rail two can drive the sliding block two to move, thereby driving the mounting block to move, and the mechanism connected with the mounting block will also move.

[0011] As a preferred, the upper end surface of the mounting block is fixedly provided with the positioning block, and the left side of the bottom plate is fixedly provided with a side plate on both sides. The mounting block is used for mounting the positioning block, and the positioning block can be replaced to position target materials of different specifications.

[0012] As preferred, the left side plate is provided with a laser sensing module on the side surface close to the positioning block, the right side plate is provided with a proximity sensing module and a visual sensing module on the side surface close to the positioning block, the laser sensing module is used for measuring the distance between the target material and the substrate or the position of the target material, the distance can be accurately measured by emitting a laser beam and receiving the reflected signal, so as to ensure the alignment of the target material and the substrate, the proximity sensing module is used for detecting the distance between the target material and the sensor, and is used for non-contact detection at a close distance, so as to ensure the stability of the target material during the whole sputtering process, and the visual sensing module is used for capturing the position information of the target material and the positioning block, the position and posture of the target material can be analyzed through image processing technology, and the accurate alignment of the target material and the substrate can be ensured.

[0013] As preferred, the bottom plate is provided with a support plate on the rear end surface, the support plate is provided with a controller on the side surface close to the positioning block, the laser sensing module, the proximity sensing module and the visual sensing module transmit signals to the controller, the controller controls the front and rear moving assembly and the left and right moving assembly, the position of the target material can be accurately adjusted through the cooperation of the front and rear moving assembly and the left and right moving assembly, the alignment of the target material and the substrate or other components can be ensured, so as to realize the automatic adjustment of the position of the target material and achieve the best centering effect.

[0014] The utility model discloses the beneficial effect:

[0015] 1, the target material is placed on the upper surface of the positioning block, starts the air pump and exports the air in the opening, fixes the target material through the sucking disc, and the air pressure detector can detect the air pressure in the opening, when the air pressure is abnormal, the air pump will be started to discharge the excess air in the inside, when processing is good, the air pump is started, and air is transported to the opening, so that the air pressure in the opening recovers, the adsorption force between the target material and the sucking disc disappears, and the target material can be easily taken down, so that the target material can be quickly disassembled, the mechanism can greatly reduce the downtime caused by replacing the target material, thereby improving production efficiency, and physical contact is reduced for fixing, wear is reduced, quality is further improved, through the setting of the front and rear moving assembly and the left and right moving assembly, the target material can adjust the position to ensure accurate alignment with the substrate or other components, the mechanism not only improves production efficiency, but also reduces wear between the target material and the tooling, improves the precision and quality of the sputtering process. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 A three-dimensional structure schematic view of the magnetic target positioning tool is shown.

[0017] Figure 2 A three-dimensional structure schematic view of the magnetic target positioning tool is shown.

[0018] Figure 3The utility model discloses a kind of magnetically permeable target positioning tool electric sliding rail two place three-dimensional structure schematic diagram of location.

[0019] Figure 4 The utility model discloses a kind of magnetically permeable target positioning tool positioning block place three-dimensional structure schematic diagram of location.

[0020] Mark explanation:1, bottom plate;2, side plate;3, support plate;4, electric sliding rail one;5, sliding block one;6, fixed plate;7, electric sliding rail two;8, sliding block two;9, mounting block;10, positioning block;11, opening;12, air pump;13, air pressure detector;14, gas pump;15, suction disc;16, laser sensing module;17, proximity sensing module;18, visual sensing module;19, controller. Specific embodiments

[0021] The utility model is further explained below in connection with the drawings and examples.

[0022] Please refer to Figures 1-4 The utility model provides a kind of magnetically permeable target positioning tool, including bottom plate 1;Still including positioning block 10, opening 11, air pump 12, gas pump 14, suction disc 15, front and back moving assembly and left and right moving assembly, the upper end of bottom plate 1 is provided with front and back moving assembly, the upper end of front and back moving assembly is provided with left and right moving assembly, the upper end of left and right moving assembly is provided with mounting block 9, the upper end surface of mounting block 9 is fixedly provided with positioning block 10, the inside of positioning block 10 is opened with opening 11, positioning block 10 is fixedly connected with suction disc 15 at the upper end surface opening 11, positioning block 10 is fixedly set with air pump 12 at the front side surface opening 11, positioning block 10 is installed with gas pump 14 at the left side surface opening 11, positioning block 10 is installed with air pressure detector 13 at the right side surface opening 11.

[0023] Please refer to Figures 1-4In the embodiment, the front and rear moving assembly includes electric slide rail one 4, sliding block one 5 and fixed plate 6, and the left and right moving assembly includes electric slide rail two 7, sliding block two 8 and mounting block 9. The front and rear moving assembly can drive the target material to move forward and backward, and the left and right moving assembly can drive the target material to move left and right. Through cooperation, the target material can move in all directions. The upper end surface of the bottom plate 1 is provided with two electric slide rails one 4. The upper surface of the electric slide rail one 4 is slidably connected with the sliding block one 5. The upper end surface of the two sliding blocks one 5 is fixedly provided with the fixed plate 6. Starting the electric slide rail one 4 can drive the sliding block one 5 to move along the electric slide rail one 4, thereby driving the fixed plate 6 to move. The mechanism connected with the fixed plate 6 will also move. The upper end surface of the fixed plate 6 is fixedly provided with the electric slide rail two 7. The upper surface of the electric slide rail two 7 is slidably connected with the sliding block two 8. The upper surface of the sliding block two 8 is fixedly provided with the mounting block 9. Starting the electric slide rail two 7 can drive the sliding block two 8 to move, thereby driving the mounting block 9 to move. The mechanism connected with the mounting block 9 will also move.

[0024] Please refer to Figures 1-4 In the embodiment, the upper end surface of the mounting block 9 is fixedly provided with the positioning block 10. The left side of the bottom plate 1 is fixedly provided with a side plate 2. The mounting block 9 is used for mounting the positioning block 10. The positioning block 10 can be replaced and can position target materials of different specifications. The side surface of the left side plate 2 close to the positioning block 10 is installed with a laser sensing module 16. The side surface of the right side plate 2 close to the positioning block 10 is installed with a proximity sensing module 17 and a visual sensing module 18. The laser sensing module 16 is used for measuring the distance between the target material and the substrate or the position of the target material. The distance can be accurately measured by emitting a laser beam and receiving the reflected signal, thereby ensuring that the target material is aligned with the substrate. The proximity sensing module 17 is used for detecting the distance between the target material and the sensor. It is used for close-range non-contact detection to ensure the stability of the target material during the entire sputtering process. The visual sensing module 18 is used for capturing the position information of the target material and the positioning block 10. Through image processing technology, the position and attitude of the target material can be analyzed to ensure that the target material is accurately aligned with the substrate. The rear end surface of the bottom plate 1 is fixedly provided with a support plate 3. The side surface of the support plate 3 close to the positioning block 10 is installed with a controller 19. The laser sensing module 16, the proximity sensing module 17 and the visual sensing module 18 will transmit signals to the controller 19. The controller 19 controls the front and rear moving assembly and the left and right moving assembly. Through the cooperation of the front and rear moving assembly and the left and right moving assembly, the position of the target material can be accurately adjusted to ensure that the target material is aligned with the substrate or other components, thereby realizing automatic adjustment of the position of the target material to achieve the best centering effect.

[0025] In the process of working, the target is placed on the upper surface of the positioning block 10, the air in the opening 11 is exhausted by starting the air pump 12, the target is fixed by the suction cup 15, the air pressure detector 13 can detect the air pressure in the opening 11, when the air pressure is abnormal, the air pump 12 will be started to exhaust the excess air inside, when the processing is finished, the air pump 14 is started to transport air to the opening 11, so that the air pressure in the opening 11 is restored, the adsorption force between the target and the suction cup 15 disappears, the target can be easily taken down, so that the target can be quickly disassembled, the mechanism can greatly reduce the downtime caused by replacing the target, thereby improving the production efficiency, at the same time, the physical contact for fixing is reduced, the wear is reduced, the quality is further improved, through the setting of the front and rear moving assembly and the left and right moving assembly, the target can adjust the position to ensure accurate alignment with the substrate or other components, the mechanism not only improves the production efficiency, but also reduces the wear between the target and the tooling, improves the precision and quality of the sputtering process, the front and rear moving assembly can drive the target to move forward and backward, the left and right moving assembly can drive the target to move left and right, through cooperation, the target can move in all directions, starting the electric sliding rail one 4 can drive the sliding block one 5 to move along the electric sliding rail one 4, thereby driving the fixed plate 6 to move, the mechanism connected with the fixed plate 6 will also move, starting the electric sliding rail two 7 can drive the sliding block two 8 to move, thereby driving the mounting block 9 to move, the mechanism connected with the mounting block 9 will also move, the mounting block 9 is used for mounting the positioning block 10, the positioning block 10 can be replaced, and different specifications of targets can be positioned, the laser sensing module 16 is used for measuring the distance between the target and the substrate or the position of the target, through emitting a laser beam and receiving the reflected signal, the distance can be accurately measured, thereby ensuring that the target is aligned with the substrate, the proximity sensing module 17 is used for detecting the distance between the target and the sensor, for close-range non-contact detection, to ensure the stability of the target during the entire sputtering process, the vision sensing module 18 is used for capturing the position information of the target and the positioning block 10, through image processing technology, the position and attitude of the target can be analyzed, to ensure that the target is accurately aligned with the substrate, the laser sensing module 16, the proximity sensing module 17 and the vision sensing module 18 will transmit signals to the controller 19, the controller 19 controls the front and rear moving assembly and the left and right moving assembly, through the cooperation of the front and rear moving assembly and the left and right moving assembly, the position of the target can be accurately adjusted, to ensure that the target is aligned with the substrate or other components, thereby realizing automatic adjustment of the position of the target to achieve the best centering effect.

[0026] Through the above steps, the target material is placed on the upper surface of the positioning block 10, the air in the opening 11 is exhausted by starting the air pump 12, the target material is fixed by the suction cup 15, the air pressure detector 13 can detect the air pressure in the opening 11, when the air pressure is abnormal, the air pump 12 will be started to exhaust the excess air inside, when the processing is finished, the air pump 14 is started to transport air to the opening 11, so that the air pressure in the opening 11 is restored, the adsorption force between the target material and the suction cup 15 disappears, the target material can be easily taken down, so that the target material can be quickly disassembled, the mechanism can greatly reduce the downtime caused by replacing the target material, thereby improving the production efficiency, at the same time, the physical contact for fixing is reduced, the wear is reduced, the quality is further improved, through the setting of the front and rear moving assemblies and the left and right moving assemblies, the target material can adjust the position to ensure accurate alignment with the substrate or other assemblies, the mechanism not only improves the production efficiency, but also reduces the wear between the target material and the tooling, improves the precision and quality of the sputtering process, to solve the common problem that the magnetic target positioning tooling cannot quickly replace the magnetic target, thereby increasing the downtime for replacing the target material, thereby reducing the production efficiency, at the same time, when the magnetic target is fixed, the physical contact area is large, which increases the wear.

Claims

1. A magnetic guide target positioning tool, comprising a base plate (1); characterized in that: Also include positioning block (10), opening (11), air pump (12), air pump (14), suction cup (15), front and rear moving assembly and left and right moving assembly, the upper end of the base plate (1) is provided with front and rear moving assembly, the upper end of the front and rear moving assembly is provided with left and right moving assembly, the upper end of the left and right moving assembly is provided with mounting block (9), the upper end surface of mounting block (9) is fixedly provided with positioning block (10), the inside of positioning block (10) is provided with opening (11), the upper end surface of positioning block (10) is fixedly connected with suction cup (15) at opening (11), the front side surface of positioning block (10) is mounted with air pump (12) at opening (11), the left side surface of positioning block (10) is mounted with air pump (14) at opening (11), the right side surface of positioning block (10) is mounted with air pressure detector (13) at opening (11).

2. The magnetic guide target positioning tool according to claim 1, wherein: The front and rear moving assembly includes electric slide rail one (4), sliding block one (5) and fixed plate (6), and the left and right moving assembly includes electric slide rail two (7), sliding block two (8) and mounting block (9).

3. The magnetic guide target positioning tool according to claim 2, characterized in that: The upper end surface of the base plate (1) is provided with two electric slide rail one (4) at intervals, the upper surface of the electric slide rail one (4) is slidably connected with the sliding block one (5), and the upper end surface of the two sliding block one (5) is fixedly provided with the fixed plate (6).

4. The magnetic guide target positioning tool according to claim 3, characterized in that: The upper end surface of the fixed plate (6) is fixedly provided with the electric slide rail two (7), the upper surface of the electric slide rail two (7) is slidably connected with the sliding block two (8), and the upper surface of the sliding block two (8) is fixedly provided with the mounting block (9).

5. The magnetic flux guide positioning tool of claim 4, wherein: The upper end surface of the mounting block (9) is fixedly provided with the positioning block (10), and the left side of the base plate (1) is fixedly provided with one side plate (2) on both sides.

6. The magnetic flux guide positioning tool of claim 5, wherein: The left side plate (2) is mounted with a laser sensing module (16) on the side surface close to the positioning block (10), and the right side plate (2) is mounted with a proximity sensing module (17) and a visual sensing module (18) on the side surface close to the positioning block (10).

7. The magnetic guide target positioning tool of claim 5, wherein: The rear end surface of the base plate (1) is fixedly provided with a support plate (3), and the side surface of the support plate (3) close to the positioning block (10) is mounted with a controller (19).

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