Copper sheet oxidation equipment for DCB process

Abstract

The utility model provides copper sheet oxidation equipment for a DCB (dicumyl peroxide) process, which comprises a shell, and first conveyors are arranged on two sides of the shell. The copper sheet surface oxidation device has the beneficial effects that a predetermined amount of strong oxidant such as potassium permanganate can be sprayed to the surface of a copper sheet through the infusion pump, the liquid storage tank and the liquid spraying pipe, so that the surface of the copper sheet can be oxidized under the condition of keeping the hardness of the copper sheet; water can be continuously sprayed to the surface of the copper sheet through a water suction pump, a water storage tank and a water spraying pipe, the surface of the copper sheet can vibrate in cooperation with an ultrasonic vibrator in the second conveyor after washing is conducted for a period of time, and therefore by-products generated in the oxidation process of MnO2 powder and the like on the surface of the copper sheet can be cleaned; the water storage tank is arranged in the water storage tank, MnO2 and other by-products can be intercepted at the top end of the water storage tank and slide into the water storage tank through the feeding port along the water storage tank by matching with the nanoscale filter screen, and water can fall back into the water storage tank after passing through the nanoscale filter screen, so that the MnO2 and other by-products can be collected in a centralized manner, and the water can be recycled.

Description

TECHNICAL FIELD

[0001] The utility model relates to a copper sheet oxidation equipment for DCB technology belongs to DCB technology field. BACKGROUND

[0002] DCB technology, full name is Direct Copper Bonding (direct copper bonding) technology, is a kind of special process method that copper foil is directly bonded to the surface of ceramic substrate. The ceramic substrate with copper cladding manufactured by this process has high thermal conductivity, high electrical performance and high reliability, so it has wide application in the field of electronic packaging and heat sink manufacturing.

[0003] In the prior art, the traditional DCB process needs to oxidize the side of the copper sheet that is in contact with the ceramic first. This oxidation is carried out in an inert gas atmosphere and by heating and oxygen. This oxidation method has two problems: first, the process conditions are harsh and the production efficiency is low; second, the hardness of the copper sheet is greatly reduced after high-temperature annealing, which makes it difficult to transfer the copper sheet, and a thick oxide layer is formed on the surface of the copper sheet, which leads to the formation of a wrinkled skin on the grain boundary of the copper ceramic sheet after sintering, thereby affecting the appearance of the copper-clad ceramic substrate. SUMMARY

[0004] To solve the problems of the traditional DCB process in the background art, the utility model provides a copper sheet oxidation equipment for DCB process, which can solve the problem of the traditional DCB process in the background art that the hardness of the copper sheet is greatly reduced after high-temperature annealing, which makes it difficult to transfer the copper sheet, and a thick oxide layer is formed on the surface of the copper sheet, which leads to the formation of a wrinkled skin on the grain boundary of the copper ceramic sheet after sintering, thereby affecting the appearance of the copper-clad ceramic substrate.

[0005] To achieve the above-mentioned purpose, the utility model is realized by the following technical scheme: a copper sheet oxidation equipment for DCB process, comprising a housing, the housing is provided with a first conveyor on both sides, the housing is provided with a second conveyor inside, the second conveyor is provided with an ultrasonic vibrator inside, a plurality of through holes are opened on the surface of the second conveyor, a clamping assembly is arranged above the second conveyor in the housing, and an oxidation assembly is arranged below the second conveyor in the housing.

[0006] Further, the clamping assembly includes a guide groove opened at the top end of the housing, a bidirectional threaded rod is rotatably connected to the inner wall of the guide groove, one end of the bidirectional threaded rod is fixedly connected with a clamping motor, a moving seat is threadedly connected to the surface of the bidirectional threaded rod, and a clamping plate is fixedly connected to the end of the moving seat away from the bidirectional threaded rod.

[0007] Further, the oxidation assembly comprises a nanometer filter screen movably connected to the inner wall of the shell, the nanometer filter screen is fixedly connected with the shell through bolts, a material box is fixedly connected to the side surface of the shell, a feeding port is formed in the opposite side of the shell and the material box, a water storage tank is fixedly connected to the inner wall of the shell below the nanometer filter screen, a water pump is fixedly connected to the side surface of the shell, a water spraying pipe is fixedly connected to the inner wall of the shell above the nanometer filter screen, a plurality of water spraying heads are fixedly connected to the surface of the water spraying pipe, a liquid storage tank is fixedly connected to the side surface of the shell on the side of the water pump, a liquid pumping pump is fixedly connected to the top end of the liquid storage tank, a liquid spraying pipe is fixedly connected to the inner wall of the shell on the side of the water spraying pipe, and a plurality of liquid spraying heads are fixedly connected to the surface of the liquid spraying pipe.

[0008] Further, the top surface of the first conveyor is flush with the top surface of the second conveyor, and the moving seat is in the shape of "L".

[0009] Further, the liquid storage tank is rotatably connected with a stirring rod, and the top end of the stirring rod is fixedly connected with a stirring motor.

[0010] Further, the nanometer filter screen is in an inclined shape, and the water spraying heads and the liquid spraying heads are in an inclined shape.

[0011] The first conveyor and the second conveyor in the shell can transport the copper sheet, the second conveyor and the first conveyor will be closed after running for a period of time, at this time, the clamping motor, the bidirectional threaded rod, the moving seat and the guide groove can drive the two clamping plates to move towards the copper sheet, so that the copper sheet can be limited, and displacement of the copper sheet in the oxidation process is avoided.

[0012] The predetermined amount of high manganese oxide and other strong oxidizing agent can be sprayed to the surface of the copper sheet through the liquid pump, the liquid storage tank and the liquid spraying pipe, so that the surface of the copper sheet is oxidized, thereby solving the problem of the large decrease of the hardness of the copper sheet after high temperature annealing, retaining the hardness of the copper sheet, facilitating the transfer of the oxidized copper sheet, after the oxidation of the copper sheet is completed, water can be continuously sprayed to the surface of the copper sheet through the water pump, the water storage tank and the water spraying pipe, so that the by-products generated in the oxidation process, such as MnO2 powder, can be removed, the combination layer bubbles caused by the decomposition of copper oxide to produce oxygen are reduced, the thermal conductivity of the product is improved, after a period of flushing, the second conveyor 3 inside the ultrasonic vibrator can make the surface of the copper sheet vibrate, thereby further improving the cleaning effect of the by-products generated in the oxidation process, such as MnO2 powder, and the nanometer filter screen can intercept the by-products such as MnO2 at the top end and slide into the feed tank through the feed inlet, and the water will fall back into the water storage tank after passing through the nanometer filter screen, so that the by-products such as MnO2 can be collected, which is beneficial to improve the efficiency of the enterprise, and the water can be recycled, thereby effectively reducing the production cost. BRIEF DESCRIPTION OF DRAWINGS

[0013] Other features, objects and advantages of the present application will become more apparent from the following detailed description of non-limiting embodiments, read in conjunction with the accompanying drawings:

[0014] Figure 1 It is a schematic diagram of the overall structure of the copper sheet oxidation equipment for the DCB process of the present application;

[0015] Figure 2 It is a schematic diagram of the front face cross-sectional structure of the shell of the copper sheet oxidation equipment for the DCB process of the present application;

[0016] Figure 3 It is a schematic diagram of the side cross-sectional structure of the shell of the copper sheet oxidation equipment for the DCB process of the present application.

[0017] In the figure: 1, shell; 2, first conveyor; 3, second conveyor; 4, clamping assembly; 41, guide groove; 42, bidirectional threaded rod; 43, clamping motor; 44, moving seat; 45, clamping plate; 5, oxidation assembly; 51, nanometer filter screen; 52, feed tank; 53, feed inlet; 54, water storage tank; 55, water pump; 56, water spraying pipe; 57, liquid storage tank; 58, liquid pump; 59, liquid spraying pipe; 6, stirring rod; 7, stirring motor. DETAILED DESCRIPTION

[0018] In order to make the technical means, creative features, purposes and effects achieved by the present application easy to understand, the present application will be further described below in conjunction with specific embodiments.

[0019] Please refer to Figure 1 and Figure 2 The utility model provides a technical scheme: a copper sheet oxidation equipment for DCB technology, including casing 1, the both sides of casing 1 are provided with first conveyor 2, be provided with second conveyor 3 in casing 1, be provided with ultrasonic vibrator in second conveyor 3, the surface of second conveyor 3 is opened with a plurality of through -hole, be provided with clamping assembly 4 in casing 1 and be located the top of second conveyor 3, be provided with oxidation assembly 5 in casing 1 and be located the below of second conveyor 3.

[0020] Through first conveyor 2 and the second conveyor 3 in casing 1 can transport copper sheet, after second conveyor 3 operates for a period of time, it will be closed with first conveyor 2, at this time through clamping motor 43, two-way threaded rod 42, moving seat 44 and guide slot 41 can drive two clamping plates 45 to move towards copper sheet, so as to be able to limit copper sheet, avoid the displacement of copper sheet in the process of oxidation;

[0021] Through the liquid pump 58, the liquid storage tank 57 and the liquid injection pipe 59, the predetermined amount of high manganese oxide and other strong oxidizing agent can be sprayed to the surface of the copper sheet, that is, the surface of the copper sheet can be oxidized, so as to solve the problem of the large reduction of the hardness of the copper sheet after high temperature annealing, and the hardness of the copper sheet is retained, which is convenient for transferring the oxidized copper sheet. After the oxidation of the copper sheet is completed, the water pump 55, the water storage tank 54 and the water injection pipe 56 can continuously spray water to the surface of the copper sheet, so as to remove the by-products generated in the oxidation process, such as MnO2 powder, and reduce the combination layer bubbles caused by the decomposition of copper oxides to generate oxygen, improve the thermal conductivity of the product, and cooperate with the ultrasonic vibrator inside the second conveyor 3 to vibrate the surface of the copper sheet after a period of flushing, so as to further improve the cleaning effect of the by-products generated in the oxidation process, such as MnO2 powder, and cooperate with the nanometer filter screen 51 to intercept the by-products such as MnO2 at the top and slide into the feed tank 52 through the feed port 53. After the water passes through the nanometer filter screen 51, it will fall back into the water storage tank 54, so as to not only collect the by-products such as MnO2, but also improve the efficiency of the enterprise, and recycle the water, effectively reducing the cost of production.

[0022] Please refer to Figure 1 、 Figure 2 and Figure 3The clamping assembly 4 comprises a guide groove 41 formed in the top end of the shell 1, the inner wall of the guide groove 41 is rotationally connected with a bidirectional threaded rod 42, one end of the bidirectional threaded rod 42 is fixedly connected with a clamping motor 43, the surface of the bidirectional threaded rod 42 is threadedly connected with a moving seat 44, and one end of the moving seat 44 away from the bidirectional threaded rod 42 is fixedly connected with a clamping plate 45. The clamping motor 43, the bidirectional threaded rod 42, the moving seat 44 and the guide groove 41 can drive the two clamping plates 45 to move towards the copper sheet, so that the copper sheet can be limited, and displacement of the copper sheet during oxidation can be avoided.

[0023] The oxidation assembly 5 comprises a nanometer filter screen 51 movably connected to the inner wall of the shell 1, the nanometer filter screen 51 is fixed between the shell 1 by bolts, the side of the shell 1 is fixedly connected with a material box 52, the opposite side of the shell 1 and the material box 52 is provided with an inlet 53, the inner wall of the shell 1 located below the nanometer filter screen 51 is fixedly connected with a water storage tank 54, the side of the shell 1 is fixedly connected with a water pump 55, the inner wall of the shell 1 located above the nanometer filter screen 51 is fixedly connected with a water spraying pipe 56, a plurality of water spraying heads are fixedly connected to the surface of the water spraying pipe 56, the side of the shell 1 located on one side of the water pump 55 is fixedly connected with a liquid storage tank 57, the top end of the liquid storage tank 57 is fixedly connected with a liquid pump 58, the inner wall of the shell 1 located on one side of the water spraying pipe 56 is fixedly connected with a liquid spraying pipe 59, and a plurality of liquid spraying heads are fixedly connected to the surface of the liquid spraying pipe 59. The liquid pump 58, the liquid storage tank 57 and the liquid spraying pipe 59 can spray a predetermined amount of strong oxidant such as high manganese dioxide onto the surface of the copper sheet, so that the surface of the copper sheet can be oxidized, thereby solving the problem that the hardness of the copper sheet is greatly reduced after high-temperature annealing, retaining the hardness of the copper sheet, facilitating the transfer of the oxidized copper sheet, and after the copper sheet is oxidized, the water pump 55, the water storage tank 54 and the water spraying pipe 56 can continuously spray water onto the surface of the copper sheet, so that the by-products generated in the oxidation process such as MnO2 powder on the surface of the copper sheet can be removed, the combination layer bubbles caused by the decomposition of copper oxides to produce oxygen are reduced, the thermal conductivity of the product is improved, and after a period of flushing, the ultrasonic vibrator in the second conveyor 3 can vibrate the surface of the copper sheet, thereby further improving the cleaning effect of the by-products generated in the oxidation process such as MnO2 powder, and the nanometer filter screen 51 can intercept the by-products such as MnO2 at the top end and slide into the material box 52 through the inlet 53, and the water will fall back into the water storage tank 54 after passing through the nanometer filter screen 51, so that the by-products such as MnO2 can be collected, which is beneficial to improve the efficiency of the enterprise, and the water can be recycled, thereby effectively reducing the production cost.

[0024] The top surface of the first conveyor 2 is flush with the top surface of the second conveyor 3, and the moving seat 44 is in the shape of "L". The top surface of the first conveyor 2 being flush with the top surface of the second conveyor 3 ensures that there is no concave-convex part of the copper sheet during the conveying process, thereby ensuring that the copper sheet can be smoothly conveyed, and the moving seat 44 being in the shape of "L" ensures that the spray pipe 56 and the liquid spray pipe 59 do not hinder the movement of the moving seat 44 during the clamping of the copper sheet.

[0025] The stirring rod 6 is rotatably connected in the liquid storage tank 57, and the top end of the stirring rod 6 is fixedly connected with the stirring motor 7. When the strong oxidizing agent such as potassium permanganate used is in powder form, the stirring motor 7 can drive the stirring rod 6 to rotate in the liquid storage tank 57, thereby ensuring that the potassium permanganate and other powders stored in the liquid storage tank 57 can be fully mixed with water, which is conducive to improving the oxidation effect of the copper sheet.

[0026] The nanometer filter screen 51 is in an inclined shape, and the water spray head and the liquid spray head are both in an inclined shape. The nanometer filter screen 51 in an inclined shape can guide the MnO2 and copper oxides into the material box 52 for centralized collection, and the water spray head and the liquid spray head in an inclined shape ensure that the strong oxidizing agent such as potassium permanganate and water can be sprayed onto the surface of the copper sheet located at the middle part of the top end of the second conveyor 3.

[0027] Specific implementation: the copper sheet is placed on the top end of the first conveyor 2, which will convey the copper sheet to the top end of the second conveyor 3 located in the housing 1. After the second conveyor 3 operates for a period of time, it will be closed together with the first conveyor 2. At this time, the clamping motor 43 will be started and drive the two-way threaded rod 42 connected thereto to rotate, thereby causing the two moving seats 44 to move towards each other along the guide groove 41, and then drive the two clamping plates 45 to move towards the copper sheet located at the middle part of the top end of the second conveyor 3, thereby being able to limit the copper sheet and avoid displacement of the copper sheet during oxidation.

[0028] After the clamping plate 45 clamps the copper sheet, the liquid pump 58 will extract a predetermined amount of strong oxidizing agent such as potassium permanganate in the liquid storage tank 57 and convey it into the liquid spray pipe 59 through the pipeline. The liquid spray pipe 59 sprays the strong oxidizing agent such as manganese oxide onto the surface of the copper sheet, which can oxidize the surface of the copper sheet, thereby solving the problem of a significant reduction in the hardness of the copper sheet after high-temperature annealing, retaining the hardness of the copper sheet, and facilitating the transfer of the oxidized copper sheet. Under the action of the strong oxidizing agent (potassium permanganate and catalyst, etc.), the surface of the copper sheet will undergo the following reaction:

[0029] 4KMnO4+3Cu+4H + →4MnO2↓+3CuO2↓+2H2O+4K +

[0030] 2KMnO4+3Cu+2H + →2MnO2↓+3CuO↓+H2O+2K+

[0031] 2KMnO4+6Cu+2H + →2MnO2↓+3Cu2O↓+H2O+2K +

[0032] After the oxidation of the copper sheet is completed, the water pump 55 will continuously extract the water in the water storage tank 54 and deliver it to the inside of the water spray pipe 56, which will spray water to the surface of the copper sheet, so as to remove the by-products generated in the oxidation process such as MnO2 powder on the surface of the copper sheet, reduce the combined layer bubbles caused by the decomposition of copper oxide to produce oxygen, and improve the thermal conductivity of the product. After a period of flushing, the ultrasonic vibrator inside the second conveyor 3 can vibrate the surface of the copper sheet, thereby further improving the cleaning effect of the by-products such as MnO2 powder generated in the oxidation process. The by-products such as MnO2 will fall to the surface of the nanometer filter screen 51 along with the water. Since the by-products such as MnO2 are insoluble in water, they are intercepted at the top end of the nanometer filter screen 51, and then slide into the feed tank 52 through the feed inlet 53 along the nanometer filter screen 51. The water will fall back into the water storage tank 54 after passing through the nanometer filter screen 51, so as to not only be able to collect the by-products such as MnO2 in a centralized manner, but also to improve the efficiency of the enterprise, and to recycle the water, thereby effectively reducing the cost of production.

[0033] In addition, it should be understood that although the present specification is described in terms of embodiments, not every embodiment contains only one independent technical solution, and the description of the specification is only for the sake of clarity. The skilled person should consider the specification as a whole, and the technical solutions in each embodiment can be appropriately combined to form other embodiments that the skilled person can understand.

Claims

1. A copper sheet oxidizing apparatus for a DCB process, characterized by: The utility model provides a kind of shell (1), the shell (1) both sides are provided with first conveyor (2), the shell (1) is provided with second conveyor (3) inside, the second conveyor (3) is provided with ultrasonic vibrator inside, the surface of the second conveyor (3) is provided with several through holes, the shell (1) is provided with clamping assembly (4) above the second conveyor (3) inside, the shell (1) is provided with oxidation assembly (5) below the second conveyor (3) inside.

2. The copper sheet oxidizing apparatus for a DCB process according to claim 1, wherein: The clamping assembly (4) includes a guide slot (41) opened at the top end of the shell (1), a bidirectional threaded rod (42) is rotatably connected to the inner wall of the guide slot (41), one end of the bidirectional threaded rod (42) is fixedly connected to a clamping motor (43), a moving seat (44) is threadedly connected to the surface of the bidirectional threaded rod (42), and one end of the moving seat (44) away from the bidirectional threaded rod (42) is fixedly connected to a clamping plate (45).

3. The copper sheet oxidizing apparatus for a DCB process according to claim 1, wherein: The oxidation assembly (5) includes a nanometer filter screen (51) movably connected to the inner wall of the shell (1), the nanometer filter screen (51) is fixed to the shell (1) by bolts, a material box (52) is fixedly connected to the side of the shell (1), a feed inlet (53) is formed on the opposite side of the shell (1) and the material box (52), a water storage tank (54) is fixedly connected to the inner wall of the shell (1) below the nanometer filter screen (51), a water pump (55) is fixedly connected to the side of the shell (1), a water spraying pipe (56) is fixedly connected to the inner wall of the shell (1) above the nanometer filter screen (51), a plurality of water spraying heads are fixedly connected to the surface of the water spraying pipe (56), a liquid storage tank (57) is fixedly connected to the side of the shell (1) on one side of the water pump (55), a liquid pumping pump (58) is fixedly connected to the top end of the liquid storage tank (57), a liquid spraying pipe (59) is fixedly connected to the inner wall of the shell (1) on one side of the water spraying pipe (56), and a plurality of liquid spraying heads are fixedly connected to the surface of the liquid spraying pipe (59).

4. The copper sheet oxidizing apparatus for a DCB process according to claim 2, characterized in that: The top surface of the first conveyor (2) is flush with the top surface of the second conveyor (3), and the moving seat (44) is in the shape of "L".

5. The copper sheet oxidizing apparatus for a DCB process according to claim 3, characterized in that: A stirring rod (6) is rotatably connected in the liquid storage tank (57), and a stirring motor (7) is fixedly connected to the top end of the stirring rod (6).

6. The copper sheet oxidizing apparatus for a DCB process according to claim 3, wherein: The nanometer filter screen (51) is in an inclined shape, and the water spraying heads and the liquid spraying heads are both in an inclined shape.

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