Centering calibration device

Abstract

The utility model provides a centering calibration device which is used for a single crystal furnace, the single crystal furnace comprises a crucible and a crystal rope vertically arranged above the crucible, and the centering calibration device is used for enabling the axis of the crystal rope and the axis of the crucible to be collinear; the centering calibration device comprises a heavy hammer, the heavy hammer is connected to the bottom end of the crystal rope in the vertical direction, and the bottom of the heavy hammer is provided with a centering conical tip; the center point of the centering compass is located on the axis extension line of the crucible, and the center point of the centering compass is located below the heavy hammer in the vertical direction; the adjusting structure comprises a plurality of adjusting components, one end of each adjusting component is an operation supply end, and the other end of each adjusting component can adjust the position of the crystal rope in the preset direction under the operation of the operation supply end; wherein a plurality of reference patterns are distributed on the surface of the centering compass along the circumferential direction, and the position of one adjusting component corresponds to the position of one reference pattern. According to the centering calibration device provided by the invention, the adjustment time can be saved, and the centering calibration efficiency can be improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor processing especially relates to a centering calibration device. BACKGROUND

[0002] In the field of production of single crystal silicon, during the crystal pulling process, the temperature distribution gradient around the center of the silicon liquid in the crucible in the single crystal furnace is consistent, which is most suitable for the growth of the crystal bar. Therefore, the position of the crystal bar and the seed crystal should be kept as close to the center of the silicon liquid as possible. If the position of the seed crystal is not at the center of the single crystal furnace, the crystal bar will deviate from the center of the quartz crucible during the crystal pulling process, which will affect the quality of the crystal bar and may also cause the crystal bar to collide with the heat field components such as the flow guide cylinder or the edge of the crucible, thereby affecting the quality of the crystal bar. Therefore, by adjusting the position of the seed crystal to make it at the center of the single crystal furnace, the above situations can be avoided, and the quality of the crystal bar can be improved.

[0003] In the prior art, some methods for centering and calibrating the seed crystal are as follows: a horizontally placed centering compass is arranged in the main chamber of the single crystal furnace, the centering compass is located above the crucible, a weight is hung below the crystal bar, the axis of the weight is collinear with the axis of the crystal bar, and the bottom of the weight is provided with a centering cone. During centering and calibration, the centering cone is slowly lowered until it is just out of the position of the centering compass, and after the centering cone is stable, the centering cone is adjusted to be at the center of the centering compass.

[0004] However, during the adjustment of the centering cone to align with the center of the centering compass, it is necessary to continuously adjust back and forth, and this adjustment method has no reference, it is difficult to grasp the adjustment distance of the centering cone each time, and it mainly relies on the experience of the operator to adjust, which wastes time and is low in efficiency. UTILITY MODEL CONTENTS

[0005] In order to solve at least one of the technical problems in the prior art, the present disclosure provides a centering calibration device.

[0006] The technical solutions provided by the embodiments of the present disclosure are as follows:

[0007] A centering calibration device for a single crystal furnace, the single crystal furnace comprising a crucible and a crystal bar vertically arranged above the crucible, the centering calibration device being used to make the crystal bar collinear with the axis of the crucible, the centering calibration device comprising:

[0008] a weight connected to the bottom end of the crystal bar in the vertical direction, and the bottom of the weight having a centering cone;

[0009] a centering compass, the center point of the centering compass being on the extension line of the axis of the crucible, and the center point of the centering compass being below the weight in the vertical direction;

[0010] The adjusting structure comprises a plurality of adjusting members, each of which is configured to have one end as an operating end and the other end to adjust the position of the crystal rope in a predetermined direction under the operation of the operating end; wherein,

[0011] The centering compass has a plurality of reference patterns distributed circumferentially on the disc surface, and the position of each adjusting member corresponds to one reference pattern.

[0012] Exemplarily, the reference patterns comprise reference base lines extending radially from the center of the disc surface of the centering compass to the edge of the disc surface.

[0013] Exemplarily, the plurality of adjusting members are distributed around the axis of the crystal rope, and different adjusting members are configured to adjust the position of the crystal rope in different radial directions of the disc surface of the centering compass; the plurality of reference base lines are configured to be distributed radially and radially from the center of the disc surface of the centering compass to the edge of the disc surface, and each reference base line extends along the adjusting direction of the adjusting member corresponding thereto.

[0014] Exemplarily, the plurality of adjusting members are uniformly distributed along the circumference of the crystal rope, so that the included angle between the adjusting directions of any two adjacent adjusting members is equal, and the plurality of reference patterns are uniformly distributed along the circumference of the centering compass.

[0015] Exemplarily, the adjusting members are at least three, and the centering compass is provided with at least three reference patterns.

[0016] Exemplarily, the adjusting member comprises an adjusting top wire, and the axis of the adjusting top wire is arranged horizontally along the radial direction of the centering compass.

[0017] Exemplarily, the adjusting structure further comprises a top wire fixing part, which is arranged on the single crystal furnace, and the adjusting top wire is movably connected to the top wire fixing part.

[0018] Exemplarily, the centering compass is configured to be arranged circumferentially rotatably in the single crystal furnace, and the reference patterns are rotatable with the centering compass to align with the corresponding adjusting members in the vertical direction.

[0019] Exemplarily, the disc surface of the centering compass is provided with angle scale lines circumferentially.

[0020] Exemplarily, the centering calibration device further comprises:

[0021] an acquisition unit for acquiring the position of the orthographic projection point of the centering cone tip on the disc surface of the centering compass;

[0022] a sorting unit configured to determine an adjustment sequence of each of the adjustment members according to a positional relationship between the orthographic point position and the reference pattern, the sorting unit being connected to the acquisition unit;

[0023] The adjustment structure further comprises an adjustment robot configured to operate each of the adjustment members to adjust the position of the crystal rope in the adjustment sequence determined by the sorting unit.

[0024] The present disclosure has the following beneficial effects:

[0025] The present disclosure provides a centering and calibration device, which comprises a weight, a centering compass and an adjustment structure. A plurality of reference patterns are distributed circumferentially on the surface of the centering compass, and the position of each adjustment member corresponds to the position of one reference pattern. In the centering and calibration of the crystal rope, the plurality of reference patterns provided on the centering compass can be used as a reference. The positional relationship between the orthographic point of the centering cone tip at the bottom of the weight on the surface of the centering compass and the reference pattern can be used to intuitively determine the adjustment distance of the centering cone tip when adjusting the position of the crystal rope by each adjustment member, thereby providing a reference for the next adjustment of the centering cone tip. Compared with the centering and calibration method of the prior art which relies on experience to adjust repeatedly, the adjustment time is saved and the centering and calibration efficiency is improved. BRIEF DESCRIPTION OF DRAWINGS

[0026] Figure 1 FIG. 1 shows a structural schematic diagram of a centering and calibration device according to an embodiment of the present disclosure;

[0027] Figure 2 FIG. 2 shows a structural schematic diagram of a centering compass in a centering and calibration device according to an embodiment of the present disclosure;

[0028] Figure 3 FIG. 3 shows a positional relationship diagram of a centering compass, an adjustment top wire and a centering cone tip in a centering and calibration device according to an embodiment of the present disclosure. DETAILED DESCRIPTION

[0029] To make the objectives, technical solutions and advantages of the embodiments of the present disclosure clearer, the technical solutions of the embodiments of the present disclosure will be described below in connection with the drawings of the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, rather than all the embodiments. Based on the described embodiments of the present disclosure, all other embodiments obtained by a person of ordinary skill in the art without any inventive effort fall within the scope of protection of the present disclosure.

[0030] Unless otherwise defined, technical terms or scientific terms used in the present disclosure shall have the ordinary meaning as understood by a person having ordinary skill in the art to which the present disclosure pertains. The terms "first", "second", and similar terms are used herein to distinguish one element from another, but do not necessarily indicate an order of importance, a number or a quantity. Similarly, the terms "one", "a" or "the" are not limited to refer to one instance of something, but rather to indicate the existence of at least one of something. The terms "comprising", "including", "containing" and similar terms are meant to encompass elements or objects not specifically listed, as well as equivalents thereof. The terms "connected", "coupled" and similar terms are not limited to direct or physical connections, but can include indirect or remote connections, as well as electrical connections, whether direct or indirect. The terms "upper", "lower", "left", "right", and similar terms are used only to represent relative positions, and can change accordingly when the absolute positions of the described objects are changed.

[0031] The terms "parallel", "perpendicular", and "same" as used in the embodiments of the present disclosure include the strict "parallel", "perpendicular", "same" and the "approximately parallel", "approximately perpendicular", "approximately same" with a certain tolerance, which, considering the measurement and the tolerance related to the measurement of a specific value (e.g., the limitation of a measurement system), represents the acceptable deviation range for the specific value determined by a person having ordinary skill in the art. For example, "approximately" can mean within one or more standard deviations, or within 3% or 5% of the value.

[0032] In addition, in this document, unless otherwise defined, the terms "substantial", "substantially", "approximately", and "about" are used to describe and account for small variations. When used in conjunction with an event or circumstance, these terms can encompass the event or circumstance that occurs exactly, as well as the event or circumstance that occurs approximately. For example, when used in conjunction with a numerical value, these terms can include a range of variation of the numerical value of less than or equal to 10%, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, less than or equal to ±0.05%. The term "substantially coplanar" can mean that two surfaces are arranged along the same plane within the micrometer range, for example, within 40 μm, 30 μm, 20 μm, 10 μm or 1 μm along the same plane.

[0033] The present disclosure provides a centering calibration device, which can be applied to a single crystal furnace, the single crystal furnace comprising a crucible and a crystal rope, the crucible being disposed in a single crystal furnace body for containing a silicon melt; the crystal rope being vertically arranged above the crucible.

[0034] The centering calibration device provided by the embodiments of the present disclosure can be used to align the crystal rope with the axis of the crucible, i.e., to center the crystal rope and the crucible before crystal pulling or when the crystal rope deviates.

[0035] As shown in Figure 1 and Figure 2 The centering calibration device provided by the embodiments of the present disclosure comprises:

[0036] a weight 100 connected to the bottom end of the crystal rope 10 in the vertical direction, and the bottom of the weight 100 has a centering cone tip 110;

[0037] a centering compass 200, the center point of the centering compass 200 is on the extension line of the axis of the crucible, and the center point O of the centering compass 200 is below the weight 100 in the vertical direction;

[0038] an adjusting structure 300, the adjusting structure 300 comprises a plurality of adjusting members 310, each of the adjusting members 310 is configured to have one end as an operating end A, and the other end can adjust the position of the crystal rope 10 in a predetermined direction under the operation of the operating end A; wherein,

[0039] a plurality of reference patterns 210 are distributed circumferentially on the disc surface of the centering compass 200, and the position of one of the adjusting members 310 corresponds to the position of one of the reference patterns 210.

[0040] In the centering calibration device provided by the embodiments of the present disclosure, a plurality of reference patterns 210 are distributed circumferentially on the disc surface of the centering compass 200, and the position of one of the adjusting members 310 corresponds to the position of one of the reference patterns 210. In this way, when the crystal rope 10 is centered and calibrated, the plurality of reference patterns 210 provided on the centering compass 200 can be used as a reference, and the position relationship between the projection point of the centering cone tip 110 at the bottom of the weight 100 on the disc surface of the centering compass 200 and the reference pattern 210 can be used to intuitively judge the adjustment distance of the centering cone tip 110 when the position of the crystal rope 10 is adjusted by each of the adjusting members 310, thereby providing a reference for the next adjustment of the centering cone tip 110. Compared with the prior art which only relies on experience to adjust back and forth to center and calibrate, the adjusting time is saved and the centering calibration efficiency is improved.

[0041] In some exemplary embodiments, the reference pattern 210 can comprise a reference reference line 211 extending radially from the center of the disc surface of the centering compass 200 to the edge of the disc surface.

[0042] For example, the adjustment members 310 are arranged around the axis of the crystal string 10, and the different adjustment members 310 are configured to adjust the position of the crystal string 10 in different radial directions of the surface of the centering compass 200. The reference lines 211 are arranged radially and radially from the center of the surface of the centering compass 200 to the edge of the surface, and each reference line 211 extends along the adjustment direction of the corresponding adjustment member.

[0043] In the above scheme, the reference pattern 210 is designed as a reference line 211, and one reference line 211 represents the adjustment direction of the corresponding adjustment member 310 to the crystal string 10. Therefore, the reference line 211 can be used as a reference to intuitively reflect the adjustment distance of the centering cone tip 110 when the adjustment member 310 is adjusted.

[0044] It should be understood that the reference pattern 210 is not limited to the reference line 211. For example, the reference pattern 210 can also include curves or rectangles, sectors, etc.

[0045] In addition, the reference line 211 can be a straight line, a dashed line, a scale line, or any other suitable line segment pattern.

[0046] In addition, for example, the reference pattern 210 can be formed on the surface of the centering compass 200 by printing, engraving, etching, mold injection, or any other suitable method.

[0047] In addition, in some exemplary embodiments, the centering compass 200 is configured to be rotatably arranged in the single crystal furnace, and the reference pattern 210 is rotatable with the centering compass 200 to align with the corresponding adjustment member 310 in the vertical direction.

[0048] In this way, in the case that there is a position offset between the reference pattern 210 and the adjustment member 310, the corresponding reference pattern 210 and the adjustment member 310 can be aligned by rotating the centering compass 200.

[0049] For example, the centering compass 200 can also be provided with an angle scale in the circumferential direction, and when the centering compass 200 is rotated, the reference pattern 210 can be determined whether it is rotated to the target position aligned with the corresponding adjustment member 310 based on the angle scale.

[0050] In some exemplary embodiments, the adjustment members 310 are evenly distributed along the circumference of the crystal bar 10, so that the angle between the adjustment directions of any two adjacent adjustment members 310 is equal, and the reference patterns 210 are evenly distributed along the circumference of the compass 200.

[0051] With the above scheme, by evenly distributing the adjustment members 310 along the circumference of the crystal bar 10, the crystal bar 10 can be adjusted by applying force to the crystal bar 10 from different radial directions.

[0052] For example, the adjustment members 310 can be at least three, and the compass 200 is provided with at least three reference patterns 210.

[0053] For example, the adjustment members 310 can be at least three, and the compass 200 is provided with at least three reference patterns 210. Figure 2 For example, the adjustment members 310 can be at least three, and the compass 200 is provided with at least three reference patterns 210.

[0054] In some exemplary embodiments, the adjustment member 310 can include an adjustment top wire 311, and the axis of the adjustment top wire 311 is horizontally arranged along the radial direction of the compass 200. In this way, one end of the adjustment top wire 311 in the axial direction can be configured as the operation end, and the other end can apply a push-pull force to the crystal bar 10, and by rotating the adjustment top wire 311, the position of the crystal bar 10 can be adjusted horizontally.

[0055] In some exemplary embodiments, the adjustment member 310 can include an adjustment top wire 311, and the axis of the adjustment top wire 311 is horizontally arranged along the radial direction of the compass 200. In this way, one end of the adjustment top wire 311 in the axial direction can be configured as the operation end, and the other end can apply a push-pull force to the crystal bar 10, and by rotating the adjustment top wire 311, the position of the crystal bar 10 can be adjusted horizontally.

[0056] In addition, in some exemplary embodiments, the adjusting structure 300 further comprises a top pin fixing component arranged on the single crystal furnace, and the adjusting top pin 311 is movably connected to the top pin fixing component. For example, the adjusting structure 300 can further comprise an adjusting disc provided with a through hole for the seed crystal, the crystal string 10 or the crystal string 10 pulling head to pass through, and the adjusting top pin 311 can be arranged on the adjusting disc at an axial end opposite to the operation end. In this way, when the adjusting top pin 311 rotates, the position of the crystal string 10 can be adjusted by pushing the adjusting disc. It should be understood that the above is only an exemplary description of the adjusting structure 300, and the structure of the adjusting structure 300 is not limited thereto.

[0057] In addition, in some exemplary embodiments, the centering calibration device further comprises an acquisition unit and a sorting unit. The acquisition unit is configured to acquire a position of a projection point of the centering cone tip 110 on a disc surface of the centering compass 200. The sorting unit is connected to the acquisition unit and is configured to determine an adjusting sequence of each adjusting member 310 according to a positional relationship between the position of the projection point and the reference pattern 210. The adjusting structure 300 further comprises an adjusting robot. The adjusting robot is connected to the sorting unit and is configured to operate each adjusting member 310 to adjust the position of the crystal string 10 according to the adjusting sequence determined by the sorting unit.

[0058] By using the above scheme, the position of the projection point of the centering cone tip 110 on the disc surface of the centering compass 200 can be acquired in real time by the acquisition unit. The adjusting sequence of each adjusting member 310 can be determined by the sorting unit based on the positional relationship between the position of the projection point and the reference pattern 210. Then, the adjusting robot can be used to operate each adjusting member 310 in sequence according to the above adjusting sequence, so as to complete the centering calibration of the crystal string 10 and realize the automatic centering calibration process.

[0059] It should be noted that the process of determining the adjusting sequence of each adjusting member 310 based on the positional relationship between the position of the projection point and the reference pattern 210 can also be that an operator manually determines the adjusting sequence of each adjusting member 310, and then operates the adjusting robot to operate each adjusting member 310 in sequence, so as to complete the centering calibration of the crystal string 10.

[0060] For example, the centering compass 200 is provided with three reference base lines 211, and the adjusting structure 300 comprises three adjusting top pins 311. For example, the centering calibration device provided by the embodiments of the present disclosure can be used to calibrate the position of the crystal string 10 in the following way. Figure 3 The specific working process of the centering calibration device provided by the embodiments of the present disclosure is described as follows.

[0061] First, rotate the centering compass 200 to align the positions of the three reference lines 211 and the three adjusting screws 311 in the vertical direction.

[0062] Then, the centering cone tip 110 is slowly lowered until it is just disengaged from the centering compass 200.

[0063] Then, determine the position of the orthogonal projection point of the centering cone tip 110 on the centering compass 200, identify which two reference reference lines 211 the orthogonal projection point of the centering cone tip 110 is located between, and then determine the two adjustment set screws 311 corresponding to the two reference reference lines 211 as the two adjustment set screws 311 to be operated.

[0064] Then, among the two adjusting screws 311 to be operated, the adjusting screw 311 that is farther away from the orthographic projection point of the centering cone tip 110 is taken as the first adjusting screw 311, and the adjusting screw 311 that is closer to the orthographic projection point of the centering cone tip 110 is taken as the second adjusting screw 311. The first adjusting screw 311 is adjusted alone until the centering cone tip 110 moves to a reference baseline 211 corresponding to the second adjusting screw 311.

[0065] Then, adjust the second adjusting screw 311 separately to move the centering cone tip 110 to the center point O of the centering compass 200.

[0066] For example, see Figure 3 As shown, when the centering cone tip 110 is located between the first adjusting screw 311A ​​and the second adjusting screw 311B, the centering cone tip 110 is closer to the second adjusting screw 311B than the first adjusting screw. At this time, the first adjusting screw 311A ​​can be adjusted separately first to move the centering cone tip 110 to the second reference baseline 211B corresponding to the second adjusting screw 311B. Then, the second adjusting screw 311B can be adjusted to move the centering cone tip 110 to the exact center of the centering compass 200.

[0067] It should be understood that the above is only an example and is not limited to this for specific centering and calibration processes.

[0068] The following points need to be explained:

[0069] (1) The accompanying drawings of the embodiments of this disclosure only involve the structures involved in the embodiments of this disclosure. Other structures can be referred to the general design.

[0070] (2) In the drawings used to describe embodiments of the present disclosure, the thickness of layers or regions is exaggerated or reduced, for clarity, i.e., the drawings are not drawn to scale. It will be understood that when an element such as a layer, film, region or substrate is referred to as being "on" or "under" another element, it can be "directly" on or under the other element or an intervening element can also be present.

[0071] (3) Embodiments of the present disclosure and features in embodiments can be combined if not in conflict, to make new embodiments.

[0072] The above merely describes specific embodiments of the present disclosure, but the scope of protection of the present disclosure is not limited thereto, and the scope of protection of the present disclosure should be subject to the scope of protection of the claims.

Claims

1. A centering alignment device for a single crystal furnace, said single crystal furnace comprising a crucible and a string of seed crystals vertically disposed above said crucible, said centering alignment device for collimating said string of seed crystals with an axis of said crucible; characterized in that, The centering calibration device comprises: a weight connected to the bottom end of the crystal string in the vertical direction, and the bottom of the weight has a centering cone tip; a centering compass whose center point is on the axial extension line of the crucible and is below the weight in the vertical direction; an adjusting structure comprising a plurality of adjusting members, each of which is configured to have one end as an operating end and the other end to adjust the position of the crystal string in a predetermined direction under the operation of the operating end; wherein a plurality of reference patterns are distributed circumferentially on the disc surface of the centering compass, and the position of one adjusting member corresponds to the arrangement of one reference pattern.

2. The centering alignment device of claim 1, wherein, The reference pattern comprises a reference datum line extending radially from the center of the disc surface of the centering compass to the edge of the disc surface.

3. The centering alignment device of claim 2, wherein, A plurality of adjusting members are distributed around the axis of the crystal string, and different adjusting members are configured to adjust the position of the crystal string in different radial directions of the disc surface of the centering compass; a plurality of reference datum lines are configured to be distributed radially and radially from the center of the disc surface of the centering compass to the edge of the disc surface, and each reference datum line extends along the adjusting direction of the adjusting member corresponding thereto.

4. The centering alignment device of claim 1, wherein, A plurality of adjusting members are uniformly distributed along the circumference of the crystal string, so that the included angle between the adjusting directions of any two adjacent adjusting members is equal, and a plurality of reference patterns are uniformly distributed along the circumference of the centering compass.

5. The centering alignment device of claim 1, wherein, The adjusting member has at least three, and the centering compass is provided with at least three reference patterns.

6. The centering alignment device of claim 1, wherein, The adjusting member comprises an adjusting top wire, and the axis of the adjusting top wire is arranged horizontally along the radial direction of the centering compass.

7. The centering alignment device of claim 6, wherein, The adjusting structure further comprises a top wire fixing part provided on the single crystal furnace, and the adjusting top wire is movably connected to the top wire fixing part.

8. The centering alignment device of claim 1, wherein, The centering compass is configured to be circumferentially rotatable in the single crystal furnace, and the reference pattern is rotatable with the centering compass to align with the corresponding adjusting member in the vertical direction.

9. The centering alignment device of claim 8, wherein, The disc surface of the centering compass is provided with an angular scale line along the circumference.

10. The centering alignment device of claim 1, wherein, The centering calibration device further comprises: an acquisition unit for acquiring the position of the orthographic projection point of the centering cone tip on the disc surface of the centering compass; a sorting unit for determining the adjusting sequence of each adjusting member according to the positional relationship between the orthographic projection point and the reference pattern, and the sorting unit is connected to the acquisition unit; The adjusting structure further comprises an adjusting robot configured to adjust the position of the crystal string by operating each adjusting member according to the adjusting sequence determined by the sorting unit.

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