Valve positioning device and semiconductor processing equipment

Abstract

The utility model provides a valve positioning device and semiconductor processing equipment, and the valve positioning device comprises a support which is arranged at the opening position of a valve; the detection unit is arranged on the bracket; the detection unit is used for determining the positions of at least three detection points on the valve; the at least three detection points are located on a circle with the center position of the valve as the circle center; the processing unit is coupled with the detection unit; the processing unit is used for determining the center position according to the positions of the at least three detection points and determining the deviation value between the center position and the initial installation position.

Description

TECHNICAL FIELD

[0001] The utility model relates to pressure control field especially relates to a valve positioning device and semiconductor processing equipment. BACKGROUND

[0002] Valve is one of the most important components in pressure control equipment, and through adjusting the opening and closing degree of the valve, the precise control of the chamber pressure can be realized. For example, pendulum valve has the advantages of small space occupation and fast valve closing speed, and is widely used in various industrial fields.

[0003] However, in the case of large deviation of the installation position of the valve, the opening and closing error of the valve may be increased, and thus the pressure control of the equipment may be wrong. SUMMARY

[0004] The utility model provides a valve positioning device and semiconductor processing equipment.

[0005] In a first aspect, the utility model provides a valve positioning device, comprising:

[0006] A support is arranged at the opening position of the valve;

[0007] A detection unit is arranged on the support; the detection unit is used for determining the positions of at least three detection points on the valve; the at least three detection points are located on a circle with the center position of the valve as the center;

[0008] A processing unit is coupled to the detection unit; the processing unit is used for determining the center position according to the positions of the at least three detection points, and determining the deviation value between the center position and the initial installation position.

[0009] In some embodiments, the valve surface has a circular protrusion with the center position as the center, and the at least three detection points are located at the edge of the circular protrusion.

[0010] In some embodiments, the detection unit comprises:

[0011] A first detection arm, the projection of the first detection arm on the valve intersects with the circular protrusion; the first detection arm is used for detecting the height change at the edge of the circular protrusion to determine the position of at least one detection point;

[0012] A second detection arm, the projection of the second detection arm on the valve intersects with the circular protrusion; the second detection arm is used for detecting the height change at the edge of the circular protrusion to determine the positions of at least two detection points.

[0013] In some embodiments, the first detection arm and / or the second detection arm comprises:

[0014] a signal transmitting unit configured to transmit a detection signal to the valve;

[0015] a signal receiving unit configured to receive a reflection signal reflected from the valve;

[0016] a height detecting unit configured to detect a height variation at the edge of the circular protrusion according to a time difference between transmitting the detection signal and receiving the reflection signal.

[0017] In some embodiments, the signal transmitting unit comprises a grating.

[0018] In some embodiments, the valve positioning device further comprises:

[0019] an adjusting unit connected to the first detection arm and / or the second detection arm; the adjusting unit is configured to adjust an included angle and / or a distance between the first detection arm and the second detection arm.

[0020] In some embodiments, the valve positioning device further comprises:

[0021] a control terminal coupled to the processing unit; the control terminal is configured to control the processing unit to record the current center position as the initial installation position in response to a first instruction input by a user; the control terminal is configured to display the deviation value output by the processing unit in response to a second instruction input by a user.

[0022] In some embodiments, the valve positioning device further comprises:

[0023] a storage unit coupled to the processing unit; the storage unit is configured to store the initial installation position.

[0024] In some embodiments, the valve is connected to one end of a swing arm, and the other end of the swing arm is rotationally connected to a main shaft.

[0025] In a second aspect, the utility model provides a kind of semiconductor processing equipment, including valve and the valve positioning device of any one in above-mentioned embodiment.

[0026] In the valve positioning device provided by the utility model, the detection unit is used to determine the positions of at least three detection points on the valve, and the processing unit is used to determine the center position of the valve according to the positions of the at least three detection points and determine the deviation value between the center position and the initial installation position. In this way, during the installation of the valve, the operator can adjust the installation position of the valve based on the deviation value until the deviation value is close to or equal to zero, thereby improving the installation accuracy of the valve and facilitating the improvement of the stability of equipment operation. BRIEF DESCRIPTION OF DRAWINGS

[0027] Figure 1 A schematic diagram of a pendulum valve is provided for the utility model;

[0028] Figure 2 A schematic diagram of a valve positioning device is provided for the utility model;

[0029] Figure 3a And Figure 3b A schematic diagram of a circular protrusion of a valve is provided for the utility model;

[0030] Figure 4 A schematic diagram of another valve positioning device is provided for the utility model;

[0031] Figure 5 A schematic diagram of a detection arm is provided for the utility model. DETAILED DESCRIPTION

[0032] In order to facilitate the understanding of the utility model, the exemplary embodiments of the utility model will be described in more detail below with reference to the relevant drawings. Although the exemplary embodiments of the utility model are shown in the drawings, it should be understood that the utility model can be implemented in various forms, and should not be limited by the specific embodiments set forth herein. On the contrary, these embodiments are provided so that the utility model can be more thoroughly understood, and the scope of the utility model can be fully conveyed to those skilled in the art.

[0033] In the following description, a large number of specific details are given in order to provide a more thorough understanding of the utility model. However, it is obvious to those skilled in the art that the utility model can be implemented without one or more of these details. In some embodiments, in order to avoid confusion with the utility model, some technical features known in the art are not described; that is, all features of the actual embodiments can not be described here, and the known functions and structures are not described in detail.

[0034] Generally, the terms can be understood at least in part from the use in the context. For example, at least in part depending on the context, the term "one or more" as used herein can be used to describe any feature, structure, or characteristic in the singular or can be used to describe combinations of features, structures, or characteristics in the plural. Similarly, terms such as "a" or "said" can also be understood, depending at least in part on the context, to convey a singular usage or to convey a plural usage. In addition, "based on" can be understood as not necessarily intended to convey an exclusive set of factors, and can instead allow for additional factors not necessarily explicitly described, also depending at least in part on the context.

[0035] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the present application. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and / or "comprising", when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups thereof. As used herein the term "and / or" includes any and all combinations of associated items.

[0036] For a thorough understanding of the present application, reference will be made to the following detailed description, in conjunction with the accompanying drawings, in which: The preferred embodiments of the present application will be described in detail below with reference to the drawings. However, the present application can have other embodiments in addition to these detailed descriptions.

[0037] In some embodiments, the vacuum equipment usually uses valves for pressure control. For ease of understanding, a pendulum valve is taken as an example for description below. It should be noted that the embodiments involved in the present application can also be applied to other types of valves, which are not limited here. The pendulum valve is controlled by a motor counter, and when controlling the pressure, the pendulum valve will swing to the learned steps to achieve the purpose of pressure control. Since the movement of the pendulum valve belongs to mechanical movement, and the pendulum valve is in a vacuum environment, a sealing ring is needed for sealing. In the use process, the sealing ring will age and be corroded by corrosive products, so the sealing ring and the vacuum oil need to be replaced regularly. However, the pendulum valve does not have a corresponding positioning tool during maintenance, which leads to the problem of zero drift after installation, poor installation accuracy, and easy error of the equipment during operation, which causes a great burden to the equipment engineers.

[0038] Figure 1 The pendulum valve is shown in a structural schematic view, wherein the valve 10 is connected with one end of the swing arm 11, and the other end of the swing arm 11 is rotationally connected with the main shaft 12. The pendulum valve has a high requirement for the coincidence degree of the center position of the valve 10 and the axis of the pipeline 13 (the line connecting the centers of all radial sections of the pipeline 13). If the initial position is deviated, the error will be larger when adjusting the opening degree of the pipeline 13 subsequently. In some embodiments, the installer needs to judge whether the valve 10 is placed in the correct position by touch and vision, which is strongly influenced by personal subjective consciousness and experience, and has a large installation error, so that the position of the valve body is prone to deviation, resulting in poor installation accuracy of the pendulum valve.

[0039] As Figure 2As shown, the utility model provides a valve positioning device 100, include: support 110 set in the opening position at valve 101, detection unit 120 set up on support 110, detection unit 120 is used for determining the position of at least three detection points P on valve 101, at least three detection points P are located on the circle with the center position of valve 101 as the center, processing unit 130 is coupled detection unit 120, processing unit 130 is used for determining the center position C according to the position of at least three detection points P, and determining the deviation value between center position C and initial installation position.

[0040] In the embodiment, the valve positioning device 100 includes a support 110, a detection unit 120, and a processing unit 130. The support 110 can be fixed on the valve body shell or the machine table by fasteners such as buckles and screws, and is located at the opening position of the valve 101. The support 110 can be used to carry the detection unit 120, so that the detection unit 120 detects the valve 101 above or below the valve 101.

[0041] The detection unit 120 can determine the positions of at least three detection points P on the valve 101. The detection points P can be used to determine the center position of the valve 101. Here, the center position can refer to the geometric center of the valve 101, or a reference point at any fixed position on the valve 101. The utility model does not make too many limitations. Exemplarily, the three detection points P can be located on a circle with the center position of the valve 101 as the center. In this way, the center position of the valve 101 can be determined according to the perpendicular bisector of the line connecting the two detection points P. The detection points P can be pre-set on the valve 101 (such as before the equipment is installed). For example, a patch that can reflect light signals can be provided on the surface of the valve 101 as a detection point P, or a position with concave and convex fluctuations on the surface of the valve 101 can be used as a detection point P. It should be noted that the positions of the detection points P can not be fixed, as long as they can be used to locate the center position of the valve 101 (such as any three points on the circumference of the valve 101). The detection unit 120 can also determine the positions of more than three detection points P. The utility model does not make too many limitations. In addition, the center position can also be pre-set on the surface of the valve 101. The detection unit 120 can be used to directly determine the center position.

[0042] The processing unit 130 can determine the center position C of the valve 101 based on the positions of the at least three detection points P, and calculate a deviation value between the center position C and an initial installation position. The initial installation position is the accurate installation position of the valve 101, which can be positioned when the equipment is installed and stored in the valve positioning device 100. The processing unit 130 can be implemented by a processor, a programmable logic device (PLD), a field-programmable gate array (FPGA), a micro controller unit (MCU), a microprocessor, or other electronic elements.

[0043] Therefore, during the maintenance installation of the valve 101, the operator can adjust the installation position of the valve 101 based on the deviation value until the deviation value approaches or equals to zero, so as to improve the installation accuracy of the valve 101 and improve the stability of the equipment operation.

[0044] It should be noted that the equipment to which the valve 101 belongs in the utility model is not limited to a semiconductor equipment, but can be any equipment that needs to use the valve 101 to control pressure, flow, flow direction, and pipeline opening and closing.

[0045] In some embodiments, as shown in Figure 3a and Figure 3b , the surface of the valve 101 has a circular protrusion 101a with the center position C as the center, and the at least three detection points P are located at the edge of the circular protrusion 101a. Among them, Figure 3a is a top view of the valve 101, Figure 3b is a front view of the valve 101.

[0046] In the embodiment, the surface of the valve 101 has a circular protrusion 101a with the center position C as the center, and the circular protrusion 101a is used to adapt to a sealing ring, so as to improve the sealing performance of the valve 101. Therefore, the edge of the circular protrusion 101a is stepped, so that the detection unit can determine the at least three detection points P located at the edge of the circular protrusion 101a by detecting the height change of the surface of the valve 101.

[0047] In some embodiments, as shown in Figure 4As shown, the detection unit 120 includes: a first detection arm 121, a projection of the first detection arm 121 on the valve 101 intersects with the circular protrusion 101a; the first detection arm 121 is used to detect the height change at the edge of the circular protrusion 101a to determine the position of at least one detection point P; a second detection arm 122, a projection of the second detection arm 122 on the valve 101 intersects with the circular protrusion 101a; the second detection arm 122 is used to detect the height change at the edge of the circular protrusion 101a to determine the position of at least two detection points P.

[0048] In this embodiment, the detection unit 120 includes a first detection arm 121 and a second detection arm 122. The projection of the first detection arm 121 on the valve 101 intersects with the circular protrusion 101a, that is, the first detection arm 121 can obtain the position information of 2 detection points P. Similarly, the second detection arm 122 can also obtain the position information of 2 detection points P. It should be noted that in the actual detection process, one of the first detection arm 121 or the second detection arm 122 can only determine the position of one detection point P, and the other one can determine the position of two detection points P, so that the processing unit 130 determines the center position C based on the positions of three detection points P.

[0049] Exemplarily, the first detection arm 121 and the second detection arm 122 can obtain the time difference between the emission of the detection signal and the reception of the reflected signal by emitting the detection signal and receiving the reflected signal, and determine the height change at the edge of the circular protrusion 101a according to the change of the time difference, and finally determine the position of the detection point P. In other embodiments, the first detection arm 121 and the second detection arm 122 can also determine the height change at the edge of the circular protrusion 101a by image recognition and the like.

[0050] In some embodiments, as Figure 5 As shown, the first detection arm 121 and / or the second detection arm 122 includes: a signal emission unit 123 for emitting a detection signal to the valve 101; a signal receiving unit 124 for receiving a reflected signal reflected from the valve 101; a height detection unit 125 for detecting the height change at the edge of the circular protrusion 101a according to the time difference between emitting the detection signal and receiving the reflected signal.

[0051] In this embodiment, the first detection arm 121 and / or the second detection arm 122 can determine the height change at the edge of the circular protrusion 101a by emitting a detection signal and receiving a reflected signal. Specifically, the first detection arm 121 and / or the second detection arm 122 can include a signal emission unit 123, a signal receiving unit 124, and a height detection unit 125.

[0052] The signal emitting unit 123 can emit a detection signal to the surface of the valve 101, where the detection signal includes but is not limited to laser, ultrasonic wave, infrared ray, radio wave, microwave, etc. The signal emitting unit 123 can have the same shape as the first detection arm 121, such as the signal emitting unit 123 can be long strip-shaped, thereby emitting a detection signal to the long strip-shaped area below the first detection arm 121. The signal receiving unit 124 can be a sensor corresponding to the detection signal, thereby receiving a reflected signal reflected from the valve 101. The height detecting unit 125 can include any suitable logic circuit and analog circuit, thereby determining the height change at the edge of the circular protrusion 101a based on the time difference between emitting the detection signal and receiving the reflected signal. It can be understood that in each detection arm, the number of signal emitting units 123 can be one or more, and the number of signal receiving units 124 can be one or more, Figure 5 Only as a schematic diagram for easy understanding, and not used to limit the protection scope of the utility model.

[0053] In some embodiments, the signal emitting unit includes a grating.

[0054] In the embodiment, the signal emitting unit can include a light source and a grating, thereby emitting a long strip-shaped detection light signal to the surface of the valve, to detect the height of the long strip-shaped area below the detection arm.

[0055] In some embodiments, as shown, the valve positioning device 100 further includes an adjusting unit 140 connected to the first detection arm 121 and / or the second detection arm 122, and the adjusting unit 140 is used to adjust the included angle and / or distance between the first detection arm 121 and the second detection arm 122. Figure 4

[0056] In the embodiment, the adjusting unit 140 is connected to at least one of the first detection arm 121 and the second detection arm 122, and the adjusting unit 140 can include a rotating shaft, a sliding rail, a pulley, etc., thereby enabling the first detection arm 121 and / or the second detection arm 122 to perform rotation, translation, etc. movement. In this way, the included angle and / or distance between the first detection arm 121 and the second detection arm 122 can be adjusted by the adjusting unit 140 to adapt to valves of different sizes and shapes, thereby increasing the flexibility of the valve positioning device 100. It can be understood that the valve positioning device 100 in the utility model can be detached and installed from the machine equipment at any time.

[0057] In some embodiments, as shown, the valve positioning device 100 further includes a height adjusting unit 130 connected to the first detection arm 121 and / or the second detection arm 122, and the height adjusting unit 130 is used to adjust the height of the first detection arm 121 and / or the second detection arm 122. Figure 4 ​As shown, the valve positioning device 100 further includes: a control terminal 150 coupled to the processing unit 130; the control terminal 150 responds to a first command input by the user to control the processing unit 130 to record the current center position C as the initial installation position; the control terminal 150 responds to a second command input by the user to display the deviation value output by the processing unit 130.

[0058] In this embodiment, the valve positioning device 100 also includes a control terminal 150. The user can use the control terminal 150 to record the initial installation position and continuously display the deviation value during valve installation. This allows for continuous adjustment of the valve's installation position based on the deviation value until it approaches or equals zero. For example, the control terminal 150 may have "positioning" and "comparison" buttons (or any suitable method such as a touchscreen). When the user presses the "positioning" button (i.e., inputs a first command), the control terminal 150 controls the processing unit 130 to record the current center position C as the initial installation position. When the user presses the "comparison" button (i.e., inputs a second command), the control terminal 150 displays the deviation value on a screen or instrument.

[0059] In some embodiments, such as Figure 4 As shown, the valve positioning device 100 further includes a storage unit 160, coupled to the processing unit 130; the storage unit 160 is used to store the initial installation position.

[0060] In the present embodiment, the valve positioning device 100 further comprises a storage unit 160 for storing the initial installation position, so that the processing unit 130 can read the initial installation position stored in the storage unit 160 at any time, and compare and calculate with the current center position C to determine the deviation value. Exemplarily, the storage unit 160 can be a volatile memory or a non-volatile memory, or both. The non-volatile memory can be a read-only memory (ROM), a programmable read-only memory (PROM), an erasable programmable read-only memory (EPROM), an electrically erasable programmable read-only memory (EEPROM), a ferromagnetic random access memory (FRAM), a flash memory, a magnetic surface memory, an optical disc, or a compact disc read-only memory (CD-ROM). The magnetic surface memory can be a disk memory or a tape memory.The volatile memory can be a random access memory (RAM), such as a static random access memory (SRAM), a synchronous static random access memory (SSRAM), a dynamic random access memory (DRAM), a synchronous dynamic random access memory (SDRAM), a double data rate synchronous dynamic random access memory (DDR SDRAM), an enhanced synchronous dynamic random access memory (ESDRAM), a sync link dynamic random access memory (SLDRAM), or a direct rambus random access memory (DRRAM).

[0061] In some embodiments, the valve is connected with one end of a swing arm, and the other end of the swing arm is rotationally connected with the main shaft.

[0062] The utility model provides a kind of semiconductor processing equipment, including valve and the valve positioning device of any one in the above embodiment.Exemplarily, here semiconductor processing equipment includes but is not limited to dry etching equipment, wet etching equipment, furnace tube equipment and the like.

[0063] It should be noted that the equipment to which the valve in the utility model belongs is not limited to semiconductor processing equipment, but can be any equipment that needs to use the valve for pressure control, flow control, flow direction control and pipeline opening and closing control.

[0064] In the valve positioning device provided by the utility model, the detection unit is used to determine the positions of at least three detection points on the valve, the processing unit is used to determine the center position of the valve according to the positions of the at least three detection points, and the deviation value between the center position and the initial installation position is determined. In this way, during the installation of the valve, the operator can adjust the installation position of the valve based on the deviation value until the deviation value is close to or equal to zero, so as to improve the installation accuracy of the valve and facilitate the improvement of the stability of equipment operation.

[0065] It should be understood that every feature, structure, or characteristic described in relation to an embodiment is within the scope of at least one embodiment of the present application. Therefore, whenever an embodiment is mentioned in this specification, it is understood that the embodiment in question includes at least one embodiment of the present application. Also, it is understood that the various features, structures, or characteristics described in relation to an embodiment can be combined in any suitable manner in one or more embodiments. It should be understood that the order of steps in the above-described processes is not meant to be limiting, and that the steps can be performed in any suitable order, as determined by the function and logic of the steps, and that the order of steps should not be construed as limiting the embodiments of the present application. The order of the above-described embodiments of the present application is merely for the purpose of description, and does not represent the superiority or inferiority of the embodiments.

[0066] The preferred embodiments of the present application are described above with the specific details. However, it should be understood that the patent scope of the present application is not limited to those preferred embodiments, and that equivalent structural variations, which are made based on the contents of the specification and drawings of the present application, or which are directly / indirectly applied to other related technical fields, are included in the patent scope of the present application.

Claims

1. A valve positioning device, characterized by The valve positioning device comprises: a valve surface having a circular protrusion with a center position; at least three detection points are located at the edge of the circular protrusion; a bracket arranged at the open position of the valve; a detection unit arranged on the bracket; the detection unit is used to determine the positions of the at least three detection points on the valve; the at least three detection points are located on a circle with the center position of the valve as the center; a processing unit coupled to the detection unit; the processing unit is used to determine the center position according to the positions of the at least three detection points, and determine the deviation value between the center position and the initial installation position.

2. The valve positioning device of claim 1, wherein The detection unit comprises: a first detection arm, a projection of the first detection arm on the valve intersects with the circular protrusion; the first detection arm is used to detect the height change at the edge of the circular protrusion to determine the position of at least one of the detection points; a second detection arm, a projection of the second detection arm on the valve intersects with the circular protrusion; the second detection arm is used to detect the height change at the edge of the circular protrusion to determine the positions of at least two of the detection points.

3. The valve positioning device of claim 2, wherein, The first detection arm and / or the second detection arm comprises: a signal emitting unit for emitting a detection signal to the valve; a signal receiving unit for receiving a reflected signal reflected back from the valve; a height detection unit for detecting the height change at the edge of the circular protrusion according to the time difference between emitting the detection signal and receiving the reflected signal.

4. The valve positioning device of claim 3, wherein The signal emitting unit comprises a grating.

5. The valve positioning device of claim 2, wherein The valve positioning device further comprises: an adjusting unit connected to the first detection arm and / or the second detection arm; the adjusting unit is used to adjust the included angle and / or distance between the first detection arm and the second detection arm.

6. The valve positioning device of claim 1, wherein The valve positioning device further comprises: a control terminal coupled to the processing unit; the control terminal controls the processing unit to record the current center position as the initial installation position in response to a first instruction input by a user; the control terminal displays the deviation value output by the processing unit in response to a second instruction input by a user.

7. The valve positioning device of claim 6, wherein, The valve positioning device further comprises: a storage unit coupled to the processing unit; the storage unit is used to store the initial installation position.

8. The valve positioning device of claim 1, wherein, The valve is connected to one end of a swing arm, and the other end of the swing arm is rotationally connected to a main shaft.

9. A semiconductor processing apparatus, characterized by comprising: The valve positioning device comprises a valve and any one of claims 1 to 8. The valve positioning device comprises a valve and any one of claims 1 to 8.

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