Liquid supply device

Abstract

The embodiment of the utility model discloses a liquid supply device. The liquid supply device comprises gas conveying equipment, liquid source supply equipment, waste gas exhaust equipment and a storage bottle, an air inlet pipe and a dip pipe which are communicated with the interior of the storage bottle are arranged on the storage bottle; the gas conveying equipment is connected with the gas inlet pipe through a first valve, the liquid source supply equipment is connected with the dip tube through a second valve, and a third valve is arranged between the waste gas exhaust equipment and the first valve; the liquid source supply device comprises a valve distribution box. According to the embodiment of the invention, the large-volume storage bottle is used, so that the bottle replacement frequency can be obviously reduced, and the stability and the reliability of chemical supply are ensured; meanwhile, by means of the valve distribution box, mutual interference of the multiple supply branches can be avoided, stable supply of chemicals in all the supply branches is guaranteed, mutual influence is reduced, the liquid supply work of the liquid supply device can be more flexible, and convenience is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of chemical supply device, in particular to a liquid supply device. BACKGROUND

[0002] In semiconductor vapor deposition, chemical supply is a very important process, and the stability and accuracy of the liquid supply device have important influence on the whole deposition process and the quality of the final product. The existing liquid supply device has a small supply amount, and when the chemical in the supply cylinder is supplied out or needs to be replaced, the liquid supply cylinder often needs to be replaced manually. Frequent replacement of the cylinder needs to be operated by professionals, and the replacement process has certain potential danger, and the problem of mixing of chemicals in the pipeline is also easy to occur. CONTENT OF THE UTILITY MODEL

[0003] The present application aims to solve at least one of the technical problems existing in the prior art. To this end, the present application provides a liquid supply device to solve the problems of frequent replacement of the liquid supply cylinder, low safety and stability of chemical supply.

[0004] The present application provides a liquid supply device, comprising: a gas conveying device, a liquid source supply device, a waste gas discharge device and a storage bottle;

[0005] The storage bottle is provided with a gas inlet pipe and a tapping pipe which communicate with the inside of the storage bottle;

[0006] The gas conveying device is connected with the gas inlet pipe through a first valve, the liquid source supply device is connected with the tapping pipe through a second valve, and a third valve is arranged between the waste gas discharge device and the first valve;

[0007] The liquid source supply device comprises a valve distribution box, a plurality of parallel supply branches are arranged in the valve distribution box, at least one valve is arranged on at least one supply branch, at least one supply branch is communicated with a supply trunk, and the supply trunk is connected with the second valve.

[0008] Based on the liquid supply device, a large-capacity storage bottle is used, which can significantly reduce the number of bottle replacement, thereby ensuring the stability and reliability of chemical supply. At the same time, by using the valve distribution box, the mutual interference of multiple supply branches can be avoided, the stable supply of chemicals in each supply branch can be ensured, the mutual influence can be reduced, and the liquid supply work of the liquid supply device can be more flexible, and the convenience can be improved.

[0009] Optionally, a filter device is arranged between the supply trunk and the second valve, the filter device comprises a filter, a straight-through branch and a filter branch; the filter is connected in series on the filter branch, the straight-through branch is connected in parallel with the filter branch, a fourth valve is arranged on the straight-through branch, and at least one valve is arranged on the filter branch.

[0010] Further, based on the above filtering device, different chemicals can be selectively filtered or not filtered before entering the valve distribution box, further ensuring the reliability and efficiency of chemical supply; the fourth valve can be a pneumatic valve, when the fourth valve is opened, the filtering branch is in an open circuit state, and the filter does not work, when the fourth valve is closed, the filtering branch is in a closed circuit state, and all chemicals are delivered to the supply trunk of the valve distribution box after passing through the filter.

[0011] Optionally, the filtering branch is provided with four valves in sequence along the fluid flow direction, which are a fifth valve, a sixth valve, a seventh valve and an eighth valve, wherein the sixth valve and the seventh valve are manual valves, the fifth valve and the eighth valve are pneumatic valves, and the sixth valve and the seventh valve are located on both sides of the filter.

[0012] Further, based on the above filtering branch, the opening and closing of the flow path on both sides of the filter can be controlled by two manual valves and two pneumatic valves, to ensure precise control of the inlet and outlet of the filter and avoid the entry of chemical mixtures that do not need to be filtered into the filter.

[0013] Optionally, the supply trunk is provided with a ninth valve, and the ninth valve is used to control the opening and closing of all the supply branches.

[0014] Further, based on the above ninth valve, the control of the supply trunk is realized, thereby realizing the opening and closing control of all the supply branches, that is, the control of the entire valve distribution box.

[0015] Optionally, each of the supply branches is provided with a first supply branch valve and a second supply branch valve in sequence along the fluid flow direction, the first supply branch valve is a pneumatic valve, and the second supply branch valve is a manual valve.

[0016] Further, based on the above first supply branch valve and the second supply branch valve, the individual control of all the supply branches can be realized, and further, the valve close to the supply port is set as a manual valve, which can more reliably prevent external pollutants from entering the valve distribution box and ensure the stability of the environment in the valve distribution box.

[0017] Optionally, the bottom of the storage bottle is provided with a liquid storage tank, and the bottom end of the dip tube extends to the bottom of the liquid storage tank.

[0018] Further, based on the bottom end (inlet) of the dip tube close to the bottom of the liquid storage tank, the utilization rate of the chemical can be effectively improved, and the residue of the chemical in the storage bottle can be reduced.

[0019] Optionally, the storage bottle is provided with a liquid level gauge.

[0020] Further, based on the above-mentioned liquid level meter, it is easier to obtain the more accurate remaining amount of chemicals in the storage bottle from the outside, and it is convenient to prepare for replacing the storage bottle in advance.

[0021] Optionally, the gas delivery device is sequentially provided with a tenth valve, an eleventh valve, a first pressure sensor and a twelfth valve from the gas delivery port to the first valve, the twelfth valve is connected with the first valve, the tenth valve is a pneumatic valve, the eleventh valve is a manually controlled pressure regulating valve, and the twelfth valve is a pneumatic valve.

[0022] Further, based on the above-mentioned gas delivery device, the control of gas delivery can be realized, and the control accuracy of the gas delivery work is improved, wherein the first pressure sensor can feedback the gas pressure of the pipeline between the eleventh valve and the twelfth valve, so as to facilitate the timely regulation and control of the eleventh valve.

[0023] Optionally, the pipeline between the eleventh valve and the first pressure sensor is connected with the supply main pipeline through a thirteenth valve, and the inlet of the first valve is connected with the outlet of the second valve through a fourteenth valve to form a purge circuit.

[0024] Further, based on the thirteenth valve and the fourteenth valve, a purge circuit for cleaning the pipeline is formed, when the storage bottle and / or the chemicals are replaced, the whole pipeline can be purged first, after the gas enters from the tenth valve, it can enter the valve distribution box through the second valve to purge and clean the valve distribution box, and the filter device can also be purged to ensure the cleaning of the filter branch and the straight-through branch, wherein the twelfth valve can prevent the gas from flowing back from the fourteenth valve to the thirteenth valve, so as to make the gas be discharged from the exhaust device as soon as possible.

[0025] Optionally, one end of the exhaust device is connected with the pipeline between the twelfth valve and the first valve, and the other end is connected with the outside, the exhaust device is sequentially provided with a second pressure sensor, a third valve, a third pressure sensor and a fifteenth valve along the fluid flow direction, the third valve is a pneumatic valve, and the fifteenth valve is a one-way valve.

[0026] Further, based on the above-mentioned exhaust device, it can prevent the exhaust gas from entering the gas delivery pipeline; the liquid source supply device provides pressure to the storage bottle through the gas delivery device to supply the chemicals in the storage bottle to the valve distribution box, and when the chemicals are supplied, the exhaust device can be used to exhaust the exhaust gas in the storage bottle, which can reduce the pollution and influence of the exhaust gas on the filter device and the valve distribution box, and the two pressure sensors can be used to monitor the internal state of the exhaust device in real time to improve the stability of the exhaust device.

[0027] Additional aspects and advantages of the present application will be made apparent from the following description. BRIEF DESCRIPTION OF DRAWINGS

[0028] The disclosure of the present application will become more fully understood from the following description, taken in conjunction with the accompanying drawings. It will be readily understood to those skilled in the art that the present application is not limited to the embodiments described and that the scope of the present application includes many alternatives.

[0029] Figure 1 The structure schematic diagram of the liquid supply device.

[0030] BRIEF DESCRIPTION OF DRAWINGS

[0031] 1, gas delivery equipment; 2, liquid source supply equipment; 21, valve distribution box; 211, supply branch; 212, supply trunk; 213, first supply branch valve; 214, second supply branch valve; 22, supply port; 3, waste gas exhaust equipment; 4, storage bottle; 41, gas inlet pipe; 42, dip tube; 43, liquid storage tank; 44, liquid level gauge; 51, first valve; 52, second valve; 53, third valve; 54, fourth valve; 55, fifth valve; 56, sixth valve; 57, seventh valve; 58, eighth valve; 59, ninth valve; 510, tenth valve; 511, eleventh valve; 512, twelfth valve; 513, thirteenth valve; 514, fourteenth valve; 515, fifteenth valve; 6, filtration equipment; 61, filter; 62, straight-through branch; 63, filtration branch; 71, first pressure sensor; 72, second pressure sensor; 73, third pressure sensor. DETAILED DESCRIPTION

[0032] Some embodiments of the present application will be described below with reference to the accompanying drawings. It should be understood by those skilled in the art that these embodiments are only used to explain the technical principles of the present application, and are not intended to limit the protection scope of the present application.

[0033] In semiconductor vapor deposition, chemical supply is a very important process, and the stability and accuracy of the liquid supply device have important influence on the entire deposition process and the quality of the final product. The existing liquid supply device has a small supply amount, and when the chemical in the supply cylinder is supplied out or needs to be replaced, the liquid supply cylinder often needs to be replaced manually. Frequent replacement of the cylinder needs to be operated by professionals, and the replacement process has certain potential danger, and the problem of mixing of chemicals in the pipeline is also easy to occur.

[0034] Based on this, the application provides a liquid supply device, which uses a large-volume storage bottle, can significantly reduce the bottle replacement frequency, thereby ensuring the stability and reliability of chemical supply; meanwhile, a valve distribution box is used, which can avoid mutual interference of multiple supply branches, ensure the stable supply of chemicals in each supply branch, reduce mutual influence, and also make the liquid supply work of the liquid supply device more flexible and improve convenience.

[0035] The application will be specifically described below through specific examples.

[0036] Referring to Figure 1 The embodiment provides a liquid supply device, which comprises a gas conveying device 1, a liquid source supply device 2, a waste gas discharge device 3 and a storage bottle 4. The gas conveying device 1 mainly conveys inert gas, which can be nitrogen. The storage bottle 4 can be a steel bottle, and the volume of the storage bottle 4 can be selected according to actual needs. The storage bottle 4 is provided with an air inlet pipe 41 and a dip tube 42 which are in communication with the inside of the storage bottle 4. The gas conveying device 1 is connected with the air inlet pipe 41 through a first valve 51, the liquid source supply device 2 is connected with the dip tube 42 through a second valve 52, and the gas conveying device 1 is connected with the waste gas discharge device 3 through a third valve 53. The liquid source supply device 2 comprises a valve distribution box 21, and a plurality of parallel supply branches 211 are arranged in the valve distribution box 21. Each supply branch 211 is provided with a valve, and all the supply branches 211 are in communication with a supply trunk 212, and the supply trunk 212 is connected with the second valve 52.

[0037] The liquid supply device provided by the embodiment uses a large-volume storage bottle 4, which can significantly reduce the bottle replacement frequency, thereby ensuring the stability and reliability of chemical supply. Meanwhile, a valve distribution box 21 is used, which can avoid mutual interference of multiple supply branches 211, ensure the stable supply of chemicals in each supply branch 211, reduce mutual influence, and also make the liquid supply work of the liquid supply device more flexible and improve convenience.

[0038] In some embodiments, a filter device 6 is arranged between the supply trunk 212 and the second valve 52. The filter device 6 comprises a filter 61, a straight-through branch 62 and a filter branch 63. The filter 61 is connected in series on the filter branch 63, and the straight-through branch 62 is connected in parallel with the filter branch 63. One end of the straight-through branch 62 is in communication with the supply trunk 212, and the other end is in communication with the second valve 52. One end of the filter branch 63 is in communication with the supply trunk 212, and the other end is in communication with the second valve 52. The straight-through branch 62 is provided with a fourth valve 54, and the filter branch 63 is provided with at least one valve.

[0039] Based on the above filter device 6, different chemicals can be selectively filtered or not filtered before entering the valve distribution box 21, further ensuring the reliability and efficiency of chemical supply; the fourth valve 54 can be a pneumatic valve. When the fourth valve 54 is open, the filter branch 63 is in an open circuit state, and the filter 61 does not work. When the fourth valve 54 is closed, the filter branch 63 is in a closed circuit state, and all chemicals are transported to the supply trunk 212 of the valve distribution box 21 after passing through the filter 61.

[0040] In further embodiments, four valves are provided on the filter branch 63, in order along the fluid flow direction as the fifth valve 55, the sixth valve 56, the seventh valve 57 and the eighth valve 58, wherein the sixth valve 56 and the seventh valve 57 are both manual valves, and the fifth valve 55 and the eighth valve 58 are both pneumatic valves, and the sixth valve 56 and the seventh valve 57 are respectively located on both sides of the filter 61.

[0041] Based on the above filter branch 63, the opening and closing of the flow path on both sides of the filter 61 can be controlled by two manual valves and two pneumatic valves, ensuring precise control of the inlet and outlet of the filter 61, and avoiding the entry of chemical mixtures that do not need to be filtered into the filter 61.

[0042] In some embodiments, the supply trunk 212 is provided with a ninth valve 59, and the ninth valve 59 is used to control the opening and closing of all supply branches 211, wherein the ninth valve 59 can be a pneumatic valve or a manual valve.

[0043] Based on the above ninth valve 59, the control of the supply trunk 212 is realized, thereby realizing the opening and closing control of all supply branches 211, that is, the control of the entire valve distribution box 21.

[0044] In some embodiments, each supply branch 211 is provided with a first supply branch valve 213 and a second supply branch valve 214 in order along the fluid flow direction, and the first supply branch valve 213 and the second supply branch valve 214 are respectively a pneumatic valve and a manual valve.

[0045] Based on the above first supply branch valve 213 and the second supply branch valve 214, the individual control of all supply branches 211 can be realized, and further, the valve close to the supply port 22 is set as a manual valve, which can more reliably prevent external pollutants from entering the valve distribution box 21, and ensure the stability of the environment in the valve distribution box 21.

[0046] In some embodiments, the bottom of the storage bottle 4 is provided with a liquid storage groove 43, and the bottom end of the dip tube 42 extends to the bottom of the liquid storage groove 43; wherein the liquid storage groove 43 can be arc-shaped or prismatic, and the like, without limitation, and the liquid storage groove 43 has a lowest point in the direction of gravity, which is the collection position of the chemical.

[0047] Based on the bottom end (inlet) of the dip tube 42 being close to the bottom of the liquid storage groove 43, the utilization rate of the chemical can be effectively improved, and the residual chemical in the storage bottle 4 can be reduced.

[0048] In further embodiments, the storage bottle 4 is provided with a liquid level meter 44, wherein the liquid level meter 44 can extend in the direction of gravity and be connected to the top cover or the bottom or the side wall of the storage bottle 4, and the liquid level meter 44 can be provided with multiple sensing points in the direction of gravity, so that the more accurate position of the chemical in the storage bottle 4 can be obtained.

[0049] Based on the above-mentioned liquid level meter 44, the more accurate remaining amount of the chemical in the storage bottle 4 can be more easily obtained from the outside, and the action of preparing to replace the storage bottle 4 in advance can be facilitated.

[0050] In some embodiments, the gas delivery device 1 is provided with a tenth valve 510, an eleventh valve 511, a first pressure sensor 71 and a twelfth valve 512 in sequence from the gas delivery port to the first valve 51, the twelfth valve 512 is connected with the first valve 51, the tenth valve 510 is a pneumatic valve, the eleventh valve 511 is a manually controlled pressure regulating valve, and the twelfth valve 512 is a pneumatic valve.

[0051] Based on the above-mentioned gas delivery device 1, the control of gas delivery can be realized, and the control accuracy of the gas delivery work can be improved, wherein the first pressure sensor 71 can feedback the gas pressure of the pipeline between the eleventh valve 511 and the twelfth valve 512, so as to facilitate the timely regulation and control of the eleventh valve 511.

[0052] In further embodiments, the pipeline between the eleventh valve 511 and the first pressure sensor 71 is connected with the supply main line 212 through a thirteenth valve 513, and the inlet of the first valve 51 is connected with the outlet of the second valve 52 through a fourteenth valve 514 to form a purge loop.

[0053] Based on the above-mentioned setting of the thirteenth valve 513 and the fourteenth valve 514, a purge circuit for cleaning the pipeline is formed. When the storage bottle 4 and / or the chemical are replaced, the entire pipeline can be purged first. After the gas enters from the tenth valve 510, it can enter the valve distribution box 21 through the thirteenth valve 513 to purge and clean the valve distribution box 21. The filter device 6 can also be purged to ensure the cleaning of the filter branch 63 and the straight-through branch 62. The twelfth valve 512 can prevent the gas from flowing back from the fourteenth valve 514 to the thirteenth valve 513, so that the gas is discharged from the waste gas discharge device 3 as soon as possible.

[0054] Optionally, one end of the waste gas discharge device 3 is connected to the pipeline between the twelfth valve 512 and the first valve 51, and the other end is connected to the outside. The waste gas discharge device 3 is sequentially provided with a second pressure sensor 72, a third valve 53, a third pressure sensor 73, and a fifteenth valve 515 in the fluid flow direction. The third valve 53 is a pneumatic valve, and the fifteenth valve 515 is a one-way valve, which can prevent external gas from polluting the internal environment of the liquid supply device. The second pressure sensor 72 can detect the pressure between the third valve 53 and the first valve 51, as well as the pressure between the twelfth valve 512 and the first valve 51. The third pressure sensor 73 can detect the pressure between the one-way valve (fifteenth valve 515) and the third valve 53.

[0055] Further, based on the above-mentioned waste gas discharge device 3, the gas inlet pipe can be prevented from being entered during waste gas discharge. The liquid source supply device provides pressure to the storage bottle 4 through the gas delivery device 1 to supply the chemical in the storage bottle 4 to the valve distribution box 21. When the chemical supply is completed, the waste gas in the storage bottle 4 can be discharged through the waste gas discharge device 3, which can reduce the pollution and influence of waste gas on the filter device 6 and the valve distribution box 21. The internal state of the waste gas discharge device 3 can be monitored in real time through the setting of the two pressure sensors, and the stability of the waste gas discharge device 3 can be improved.

[0056] In the description of the present specification, the description of the terms "one embodiment", "some embodiments", "an example", "a specific example", or "some examples" and the like means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily mean the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0057] In addition, the terms "first", "second", etc. are used only for the purpose of description, and cannot be understood as indicating or implying relative importance or implying the number of the technical features indicated. Therefore, the features defined as "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise explicitly and specifically limited.

[0058] Although the embodiments of the present application have been shown and described above, it is understood that the above-described embodiments are exemplary and cannot be construed as limiting the present application, and those skilled in the art can make changes, modifications, replacements and variations to the above-described embodiments within the scope of the present application.

Claims

1. A liquid supply device, characterized in that, The utility model relates to a gas supply system, which comprises a gas delivery device (1), a liquid source supply device (2), a waste gas exhaust device (3) and a storage bottle (4). The storage bottle (4) is provided with an air inlet pipe (41) and a dip tube (42) in communication with the interior of the storage bottle (4). The gas delivery device (1) is connected to the air inlet pipe (41) through a first valve (51), the liquid source supply device (2) is connected to the dip tube (42) through a second valve (52), and a third valve (53) is arranged between the waste gas exhaust device (3) and the first valve (51). The liquid source supply device (2) comprises a valve distribution box (21), a plurality of parallel supply branches (211) are arranged in the valve distribution box (21), at least one of the supply branches (211) is provided with a valve, at least one of the supply branches (211) is in communication with a supply trunk (212), and the supply trunk (212) is connected to the second valve (52). A filter device (6) is arranged between the supply trunk (212) and the second valve (52), the filter device (6) comprises a filter (61), a straight-through branch (62) and a filter branch (63), the filter (61) is connected in series to the filter branch (63), the straight-through branch (62) is connected in parallel to the filter branch (63), the straight-through branch (62) is provided with a fourth valve (54), and the filter branch (63) is provided with at least one valve.

2. The liquid supply apparatus according to claim 1, wherein Four valves are arranged on the filter branch (63) in sequence along the fluid flow direction, namely a fifth valve (55), a sixth valve (56), a seventh valve (57) and an eighth valve (58), wherein the sixth valve (56) and the seventh valve (57) are both manual valves, the fifth valve (55) and the eighth valve (58) are both pneumatic valves, and the sixth valve (56) and the seventh valve (57) are arranged on the two sides of the filter (61) respectively.

3. The liquid supply apparatus according to claim 2, wherein A ninth valve (59) is arranged on the supply trunk (212), and the ninth valve (59) is used for controlling the on-off of all the supply branches (211).

4. The liquid supply apparatus according to claim 1, wherein A first supply branch valve (213) and a second supply branch valve (214) are arranged on each of the supply branches (211) in sequence along the fluid flow direction, the first supply branch valve (213) is a pneumatic valve, and the second supply branch valve (214) is a manual valve.

5. The liquid supply apparatus according to claim 4, wherein A liquid storage tank (43) is arranged at the bottom of the storage bottle (4), and the bottom end of the dip tube (42) extends to the bottom of the liquid storage tank (43).

6. The liquid supply apparatus according to claim 1, wherein A liquid level meter (44) is arranged in the storage bottle (4).

7. The liquid supply apparatus according to claim 1, wherein ​ 8. The liquid supply apparatus according to any one of claims 1 to 7, wherein The gas delivery device (1) is sequentially provided with a tenth valve (510), an eleventh valve (511), a first pressure sensor (71) and a twelfth valve (512) from the gas delivery port to the first valve (51), the twelfth valve (512) is connected with the first valve (51), the tenth valve (510) is a pneumatic valve, the eleventh valve (511) is a manual pressure regulating valve, and the twelfth valve (512) is a pneumatic valve.

9. The liquid supply apparatus according to claim 8, wherein The pipeline between the eleventh valve (511) and the first pressure sensor (71) is connected with the supply main line (212) through a thirteenth valve (513), and the inlet of the first valve (51) is connected with the outlet of the second valve (52) through a fourteenth valve (514) to form a purge circuit.

10. The liquid supply apparatus according to claim 8, wherein One end of the exhaust gas discharge device (3) is connected with the pipeline between the twelfth valve (512) and the first valve (51), and the other end is connected with the outside, and the exhaust gas discharge device (3) is sequentially provided with a second pressure sensor (72), a third valve (53), a third pressure sensor (73) and a fifteenth valve (515) along the fluid flow direction, the third valve (53) is a pneumatic valve, and the fifteenth valve (515) is a one-way valve.

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