Temperature control device

Abstract

The embodiment of the utility model provides a temperature control device which comprises a refrigerating system and a plurality of circulating systems, the refrigerating system comprises a buffer water tank, and an outlet of the buffer water tank is respectively communicated with the plurality of circulating systems so as to distribute and exchange heat for the plurality of circulating systems to meet different temperature requirements of different loads. The multiple circulating systems share one refrigerating system, and the refrigerating system can carry out distribution heat exchange according to the requirements of different loads in the different circulating systems so as to meet the different temperature requirements of the different loads. The device is simplified, the cost is reduced, and the temperature requirements of a plurality of loads can be met at the same time.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor temperature control, specifically, relates to a temperature control equipment. BACKGROUND

[0002] In the field of semiconductor processing, the importance of temperature control equipment is self-evident. These devices ensure the performance and quality of semiconductor devices during production, testing, aging, etc. by precisely controlling temperature. Temperature control equipment provides a stable and reliable temperature control environment to ensure that the temperature fluctuation range of semiconductor devices during the production process is very small, thereby ensuring the quality and stability of the product. In addition, the precise temperature control of the temperature control equipment can accelerate the production process of semiconductor devices and reduce production delays caused by temperature instability. This helps to improve production efficiency and reduce production costs.

[0003] However, most of the current temperature control equipment cannot regulate the temperature of multiple different loads. Even if the temperature control equipment can regulate the temperature of different loads, the structure is relatively complex and the cost is high. SUMMARY

[0004] The utility model provides a temperature control equipment, it can satisfy the temperature demand of multiple loads simultaneously, and simple structure has reduced the cost.

[0005] The embodiment of the utility model can be implemented as follows:

[0006] The embodiment of the utility model provides a temperature control equipment, which comprises:

[0007] A refrigeration system, the refrigeration system includes a buffer tank for storing cooled water after refrigeration;

[0008] A plurality of circulation systems, the outlet of the buffer tank is respectively communicated with a plurality of the circulation systems to distribute heat exchange to a plurality of the circulation systems to meet different temperature requirements of different loads.

[0009] The beneficial effects of the temperature control equipment of the embodiment of the utility model include:

[0010] The temperature control equipment comprises a refrigeration system and a plurality of circulation systems, the refrigeration system comprises a buffer tank, the outlet of the buffer tank is respectively communicated with a plurality of the circulation systems to distribute heat exchange to a plurality of the circulation systems to meet different temperature requirements of different loads. By setting a plurality of circulation systems to share one refrigeration system, and by setting a buffer tank, the buffer cooled water after heat exchange of the refrigeration system can be distributed to a plurality of circulation systems for heat exchange refrigeration, so that the refrigeration system can be distributed heat exchange according to the requirements of different loads in different circulation systems to meet different temperature requirements of different loads. Simplify the equipment, reduce the cost, and can meet the temperature requirements of multiple loads simultaneously. Attached Figure Description

[0011] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0012] Figure 1 This is a schematic diagram of the temperature control device provided in an embodiment of the present invention.

[0013] Icons: 1000 - Temperature control equipment; 100 - Refrigeration system; 110 - Compressor; 120 - Condenser; 130 - Liquid receiver; 140 - First electronic expansion valve; 150 - Heat exchanger; 160 - Gas-liquid separator; 170 - Buffer tank; 180 - Return water pipeline; 190 - Cooling pipeline; 200 - Circulation system; 210 - First circulation system; 211 - First load; 212 - Heat exchanger; 213 - First water tank; 214 - First water pump; 215 - First heater; 216 - Three-way valve; 2161 - First valve port; 2162 - Second valve port; 2163 - Third valve port; 220 - Second circulation system System; 221-Second load; 222-Second water tank; 223-Second water pump; 224-Second heater; 230-Third circulation system; 231-Third load; 232-Third water tank; 233-Third water pump; 234-Third heater; 240-Heat exchanger; 241-First heat exchanger; 242-Second heat exchanger; 243-Third heat exchanger; 300-Control valve; 410-First temperature sensor; 420-Second temperature sensor; 430-Third temperature sensor; 440-Fourth temperature sensor; 500-Third electronic expansion valve; 600-First pressure sensor; 700-Fourth electronic expansion valve. Detailed Implementation

[0014] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0015] Therefore, the following detailed description of the embodiments of the application provided in the drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of the application. Based on the embodiments in the application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of protection of the application.

[0016] It should be noted that: similar reference numbers and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0017] In the description of the application, it should be noted that if the terms "upper", "lower", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship commonly used when the product of the application is used, only for the convenience of describing the application and simplifying the description, and not to indicate or imply that the device or element must have a particular orientation, be constructed and operated in a particular orientation, therefore, it cannot be understood as a limitation on the application.

[0018] In addition, if the terms "first", "second" and the like appear, they are only used to distinguish the description and cannot be understood as indicating or implying relative importance.

[0019] It should be noted that the features in the embodiments of the application can be combined with each other without conflict.

[0020] In the production process of the panel, a temperature-stable refrigerant needs to be provided to the load end, and at the same time, due to the different temperature requirements of the refrigerant required by the panel processing process according to the process, different heat exchange refrigeration needs to be carried out according to the temperature requirements of different loads. For example, the temperature requirements of the three positions of panel etching, deposition process and reaction cavity are not exactly the same, which can be divided into high, medium and low. However, the current temperature control equipment has a complex structure and high cost.

[0021] Based on this, please refer to Figure 1 The temperature control equipment 1000 provided in the embodiments of the application can effectively improve the above-mentioned technical problems. The temperature control equipment 1000 can simultaneously meet the temperature requirements of multiple loads, and has a simple structure and reduces the cost.

[0022] Figure 1 The schematic diagram of the temperature control equipment 1000 provided in the embodiments of the application is as follows: Figure 1As shown, the temperature control device 1000 provided in the embodiment includes a refrigeration system 100 and a plurality of circulating systems 200, the refrigeration system 100 includes a buffer water tank 170, and the outlet of the buffer water tank 170 is respectively communicated with the plurality of circulating systems 200 to distribute heat exchange of the plurality of circulating systems 200 to meet different temperature requirements of different loads. By setting the plurality of circulating systems 200 to share one refrigeration system 100, and by setting the buffer water tank 170, the buffered cooling water after heat exchange of the refrigeration system 100 can be distributed to the plurality of circulating systems 200 for heat exchange refrigeration, so that the refrigeration system 100 can be distributed for heat exchange according to the requirements of different loads in different circulating systems 200 to meet different temperature requirements of different loads. Simplify the equipment, reduce the cost, and can meet the temperature requirements of multiple loads at the same time.

[0023] The conventional temperature control device 1000, the plant water is only used as the compressor condensation and condenser circuit pre-cooling, and the plant water flows in the circuit. However, the temperature of the plant water is unstable and easy to fluctuate, and the instability of the temperature of the plant water will also cause the instability of the refrigeration system and the temperature fluctuation of the equipment, thereby affecting the temperature fluctuation of the load side circulating circuit. For example, the plant water is generally cold water of about 20℃, wherein the temperature of the plant water usually fluctuates with a deviation of ±2℃, and if affected by the weather, the temperature fluctuation is larger, which will have a certain influence on the stability of the refrigeration system, and the temperature of the refrigerated cooling water stored in the buffer water tank 170 in the present scheme is relatively stable, and the temperature fluctuation difference is small, generally not more than 0.5℃, thereby the temperature stability of the whole temperature control device 1000 can be improved, and the temperature control effect can be improved.

[0024] In order to reduce the fluctuation in the running process of the temperature control device 1000, please continue to refer to Figure 1The refrigeration system 100 in this embodiment includes a compressor 110, a condenser 120, a liquid receiver 130, a first electronic expansion valve 140, a heat exchanger 150, a gas-liquid separator 160, and a buffer water tank 170. The outlet of the compressor 110 is connected to the first inlet of the condenser 120, the first outlet of the condenser 120 is connected to the inlet of the liquid receiver 130, and the outlet of the liquid receiver 130 is connected to the inlet of the first electronic expansion valve 140. The outlet of the first electronic expansion valve 140 is connected to the first inlet of the first heat exchanger 241, and the first outlet of the heat exchanger 150 is connected to the inlet of the gas-liquid separator 160. The second outlet of the heat exchanger 150 is connected to the inlet of the buffer water tank 170. The outlet of the buffer water tank 170 is connected to multiple circulation systems 200 to distribute heat exchange among the multiple circulation systems 200. By setting up the buffer water tank 170, the cooling water after heat exchange in the refrigeration system 100 can be stored, which can reduce the impact of fluctuations in the plant water temperature on the entire equipment to a certain extent. The buffer water tank 170 can distribute the buffer cooling water after heat exchange in the refrigeration system 100 to multiple circulation systems 200 for heat exchange and cooling. One compressor 110 and one condenser 120 can perform heat exchange and cooling for multiple load circulation loops. There is no need to set up multiple compressors 110 and condensers 120, which simplifies the equipment structure, reduces costs, and can meet the temperature requirements of multiple loads at the same time.

[0025] To facilitate control of the cooling water flow rate into each circulation system 200, the temperature control device 1000 in this embodiment also includes multiple control valves 300 for controlling the cooling water flow rate. At least one control valve 300 is provided between the outlet of the buffer tank 170 and each circulation system 200. That is, each control valve 300 controls the flow rate of cooling water entering one circulation system 200, thereby meeting the different cooling needs of the circulation systems 200. Specifically, the control valve 300 in this embodiment is a solenoid valve.

[0026] Of course, in order to further achieve precise control and distribution of cooling water flow, such as Figure 1 As shown, a distribution valve can also be installed between the outlet of the buffer water tank 170 and the circulation system 200. The inlet of the distribution valve is connected to the buffer water tank 170, and the outlet of the distribution valve is connected to the circulation system 200. The distribution valve can be configured as a multi-inlet multi-outlet or a single-inlet multi-outlet type, as long as it can distribute the cooling water of the buffer water tank 170 to multiple circulation systems 200. Figure 1 In the example shown, the distribution valve can be configured as a valve with one inlet and multiple outlets, such as a multi-functional one-inlet, three-outlet angle valve. The multiple outlets of the valve can be connected to multiple circulation systems 200 respectively. Thus, using a single valve, cooling water can be distributed to multiple circulation systems 200. The flow rate of cooling water entering each circulation system 200 can be controlled by adjusting the opening and closing degree of the valves at the multiple outlets. Further, as...Figure 1 As shown, the control valve 300 can be arranged between the outlet of the distribution valve and the corresponding circulation system 200.

[0027] Please refer to Figure 1 The temperature control device 1000 in the embodiment further comprises a return water pipeline 180 connected to the second outlet of the condenser 120, and each circulation system 200 comprises at least a heat exchanger 240 and a load (for example Figure 1 the first load 211, the second load 221 and the third load 231) shown, the first inlet of the heat exchanger 240 is connected to the outlet end of the load, the first outlet of the heat exchanger 240 is connected to the inlet end of the load, the second inlet of the heat exchanger 240 is connected to the outlet of the buffer tank 170, and the second outlet of the heat exchanger 240 is connected to the return water pipeline 180.

[0028] Thus, the plant service water exchanged with the condenser 120 can flow back to the return water pipeline 180, and the plant service water exchanged with the heat exchanger 150, i.e. the cooling water, can be stored in the buffer tank 170, and the cooling water of the buffer tank 170 flows to the second inlet of the heat exchanger 240 to exchange with the cooling medium, and then flows out from the second outlet of the heat exchanger 240 and flows back to the return water pipeline 180, so that the cooling water exchanged with the circulation system 200 and the plant service water exchanged with the condenser 120 both flow back to the return water pipeline 180, which is simple in structure and convenient in pipeline connection, and the cooling medium exchanges with the cooling water and then flows to the load to perform refrigeration.

[0029] Each circulation system 200 further comprises a water tank, a water pump and a heater connected in sequence between the heat exchanger 240 and the load, the first outlet of the heat exchanger 240 is connected to the inlet of the water tank, and the outlet of the heater is connected to the inlet end of the load. The water pump is used to provide power for the circulation of the cooling medium in the circulation system 200, the water tank can be used to buffer the cooling medium exchanged with the heat exchanger 240, and the heater can be used to heat the cooling medium flowing out of the water tank to further control the temperature of the cooling medium flowing to the load; thus, the cooling medium flowing out of the load exchanges with the heat exchanger 240 and can be stored in the water tank, the cooling medium in the water tank is delivered to the heater by the water pump to be heated, and then flows back to the load after reaching the required target temperature, so as to realize accurate temperature control of the cooling medium and ensure the temperature control effect of the load. The heater can also be a heat exchanger capable of simultaneously realizing heating and refrigeration, and the cooling medium is heated or refrigerated according to the comparison between the temperature of the cooling medium flowing out of the water tank and the target temperature, so that the cooling medium reaches the required target temperature.

[0030] The circulation system 200 of the embodiment further has a branch line connected to the refrigeration system 100, and the refrigeration system 100 can introduce refrigerant into the circulation system 200 to exchange heat with the carrier refrigerant, thereby further refrigerating the carrier refrigerant to achieve low-temperature temperature control.

[0031] As shown in Figure 1 The at least one circulation system 200 further includes a heat exchange device 212 and a three-way valve 216. The first inlet of the heat exchange device 212 is connected to the first outlet of the heat exchanger 240, the first outlet of the heat exchange device 212 is connected to the inlet end of the load, the second inlet of the heat exchange device 212 is connected to the outlet of the liquid accumulator 130, the second outlet of the heat exchange device 212 is connected to the inlet of the gas-liquid separator 160, and the three-way valve 216 is connected to the outlet end of the load, the first inlet of the heat exchange device 212, and the first inlet of the heat exchanger 240, respectively. Thus, the flow path of the carrier refrigerant in the circulation system 200 can be controlled by the three-way valve 216, i.e., the outlet end of the load can be controlled to flow to the heat exchanger 240 or the heat exchange device 212. By controlling whether the refrigerant flows into the heat exchange device 212, whether the carrier refrigerant exchanges heat with the refrigerant for further refrigeration can be controlled, thereby achieving different refrigeration requirements and different temperature conditions.

[0032] Specifically, in the first working condition, the carrier refrigerant flowing out of the outlet end of the load can flow to the heat exchanger 240 through the three-way valve 216, exchange heat with the cooling water flowing through the heat exchanger 240, and then flow to the inlet end of the load through the heat exchange device 212. At this time, the refrigerant can not flow to the heat exchange device 212, and the heat exchange device 212 only serves as a flow path for the carrier refrigerant. At this time, the carrier refrigerant exchanges heat with the cooling water in the buffer tank 170, but does not exchange heat with the refrigerant, which is suitable for high-temperature or medium-temperature temperature control. In the second working condition, the carrier refrigerant flowing out of the load flows to the heat exchange device 212, and the refrigerant in the liquid accumulator 130 can flow to the heat exchange device 212 to exchange heat with the carrier refrigerant, which is suitable for low-temperature temperature control. Alternatively, the carrier refrigerant flowing out of the load can flow through the heat exchanger 240 and the heat exchange device 212 in sequence, and the refrigerant also flows to the heat exchange device 212 at this time. The carrier refrigerant exchanges heat with the cooling water and the refrigerant at the same time, thereby achieving rapid refrigeration. Further, by providing the heat exchange device 212, different refrigeration of multiple working conditions can be achieved.

[0033] In other examples, the three-way valve 216 can be formed to be capable of simultaneously communicating with the heat exchanger 240 and the heat exchange device 212, and the opening degrees of the two outlets thereof can be adjusted. By controlling the proportion of the carrier refrigerant flowing to the heat exchanger 240 and the heat exchange device 212, the carrier refrigerant amount exchanged with the cooling water and the refrigerant can be controlled, respectively, to further achieve different refrigeration requirements and further accurate temperature control.

[0034] The circulation system 200 of the embodiment can include at least two, one circulation system 200 can introduce the heat exchange device 212, and by controlling the flow path of the cold carrier flowing through the heat exchange device 212 and the heat exchanger 240, different temperature control requirements can be met, thereby realizing high, medium and low temperature control; one circulation system 200 can not include the heat exchange device 212, and by controlling the flow direction of the cooling water flowing therethrough, different temperature control requirements can be met, thereby realizing medium and high temperature control. The number and arrangement of the two circulation systems 200 in the temperature control equipment 1000 of the embodiment can be set according to actual needs, which are not specifically limited in the present application.

[0035] In some specific examples, please refer to Figure 1 The circulation system 200 in the embodiment includes a first circulation system 210, a second circulation system 220 and a third circulation system 230.

[0036] The first circulation system 210 includes a first load 211 and a first heat exchanger 241, the outlet end of the first load 211 is in communication with the first inlet of the first heat exchanger 241, the first outlet of the first heat exchanger 241 is in communication with the inlet end of the first load 211, the second inlet of the first heat exchanger 241 is in communication with the outlet of the buffer water tank 170, and the second outlet of the first heat exchanger 241 is in communication with the second outlet of the condenser 120. The second circulation system 220 includes a second load 221 and a second heat exchanger 242, the outlet end of the second load 221 is in communication with the first inlet of the second heat exchanger 242, the first outlet of the second heat exchanger 242 is in communication with the inlet end of the second load 221, the second inlet of the second heat exchanger 242 is in communication with the outlet of the buffer water tank 170, and the second outlet of the second heat exchanger 242 is in communication with the second outlet of the condenser 120.

[0037] The first circulation system 210 in the embodiment further includes a heat exchange device 212, a first water tank 213, a first water pump 214, a first heater 215 and a three-way valve 216, the three-way valve 216 includes a first valve port 2161, a second valve port 2162 and a third valve port 2163, the outlet end of the first load 211 is in communication with the first valve port 2161, the second valve port 2162 is in communication with the first inlet of the first heat exchanger 241, the first outlet of the first heat exchanger 241 is in communication with the first inlet of the heat exchange device 212, the first outlet of the heat exchange device 212 is in communication with the inlet of the first water tank 213, the outlet of the first water tank 213 is in communication with the inlet of the first water pump 214, the outlet of the first water pump 214 is in communication with the inlet of the first heater 215, and the outlet of the first heater 215 is in communication with the inlet end of the first load 211; the third valve port 2163 is in communication with the first inlet of the heat exchange device 212; the second inlet of the heat exchange device 212 is in communication with the outlet of the liquid reservoir 130, and the second outlet of the heat exchange device 212 is in communication with the inlet of the gas-liquid separator 160. Thus, the first circulation system 210 can realize high and low temperature control and meet different temperature control requirements.

[0038] The second circulation system 220 in the embodiment comprises a second load 221, a second heat exchanger 242, a second water tank 222, a second water pump 223 and a second heater 224. The outlet end of the second load 221 is in communication with the first inlet of the second heat exchanger 242. The first outlet of the second heat exchanger 242 is in communication with the inlet end of the second load 221. The second inlet of the second heat exchanger 242 is in communication with the outlet of the buffer water tank 170. The second outlet of the second heat exchanger 242 is in communication with the second outlet of the condenser 120. The inlet of the second water tank 222 is in communication with the first outlet of the second heat exchanger 242. The outlet of the second water tank 222 is in communication with the inlet of the second water pump 223. The outlet of the second water pump 223 is in communication with the inlet of the second heater 224. The outlet of the second heater 224 is in communication with the inlet end of the second load 221.

[0039] The third circulation system 230 comprises a third load 231, a third heat exchanger 243, a third water tank 232, a third water pump 233 and a third heater 234. The outlet end of the third load 231 is in communication with the first inlet of the third heat exchanger 243. The first outlet of the third heat exchanger 243 is in communication with the inlet end of the third load 231. The second inlet of the third heat exchanger 243 is in communication with the outlet of the buffer water tank 170. The second outlet of the third heat exchanger 243 is in communication with the second outlet of the condenser 120. The inlet of the third water tank 232 is in communication with the first outlet of the third heat exchanger 243. The outlet of the third water tank 232 is in communication with the inlet of the third water pump 233. The outlet of the third water pump 233 is in communication with the inlet of the third heater 234. The outlet of the third heater 234 is in communication with the inlet end of the third load 231. Thus, the cold carriers of the second circulation system 220 and the third circulation system 230 only exchange heat with the cooling water, and do not exchange heat with the refrigerant, so that high and medium temperature control can be achieved. By controlling the flow of the cooling water that exchanges heat with the cold carriers, different temperature control requirements of the second circulation system 220 and the third circulation system 230 can be met.

[0040] In some specific examples, the first circulation system 210 can achieve low, medium and high temperature control. The second circulation system 220 and the third circulation system 230 can achieve medium and high temperature control. For example, the first circulation system 210 can achieve temperature control adjustment of-20℃ to 60℃. The second circulation system 220 can achieve temperature control adjustment of 30℃ to 90℃. The third circulation system 230 can achieve temperature control adjustment of 60℃ to 120℃. Each circulation system 200 can achieve independent temperature control.

[0041] Of course, it can be understood that a plurality of circulation systems 200, such as four, five, etc., can be set according to the specific production temperature requirements, which are not limited herein. Meanwhile, each circulation system 200 can be provided with or without a heat exchange device 212 and a three-way valve 216 according to the actual load temperature requirements. For example, the first circulation system 210, the second circulation system 220 and the third circulation system 230 can all include a heat exchange device 212 and a three-way valve 216; only one of the circulation systems 200 can be provided with a heat exchange device 212 and a three-way valve 216; of course, any two circulation systems 200 can be provided with a heat exchange device 212 and a three-way valve 216, which is determined according to the actual working condition requirements, which is not limited herein.

[0042] In some examples, the temperature control device 1000 further includes a third electronic expansion valve 500 arranged between the second inlet of the heat exchange device 212 and the outlet of the liquid reservoir 130. By controlling the third electronic expansion valve 500, the flow of refrigerant in the refrigeration system 100 to the heat exchange device 212 can be controlled, and the third electronic expansion valve 500 can also be used to adjust the flow and pressure of the refrigerant to ensure efficient operation of the refrigeration system 100.

[0043] In some examples, the temperature control device 1000 further includes a first temperature sensor 410 and a first pressure sensor 600 arranged between the outlet of the compressor 110 and the first inlet of the condenser 120 for detecting the outlet temperature and outlet pressure of the compressor 110, which can reflect the operating state of the compressor 110 and can be used as reference data for the control of the compressor 110 and the adjustment of the operation of the refrigeration system 100.

[0044] In some examples, the temperature control device 1000 of the present embodiment further includes a second temperature sensor 420 arranged at the outlet of the buffer water tank 170 for detecting the outlet temperature of the cooling water of the buffer water tank 170, which can be used as a parameter for load temperature control adjustment. For example, according to the temperature detection value, it can be judged whether the cooling water can meet the temperature control requirements of the load, and the flow of the cooling water can be adjusted according to the temperature value in combination with the temperature control requirements of each circulation system 200.

[0045] In some examples, a third temperature sensor 430 is arranged at the outlet of the water tank of each circulation system 200 in the embodiment. The measured value of the third temperature sensor 430 of each circulation system 200 is compared with the set value. If the difference between the set value and the measured value is within the set range of the circulation system 200, the temperature of the cooling water of the refrigeration system 100 after heat exchange with the heat exchanger 240 of the circulation system 200 is within the temperature range required by the load of the circulation system 200, and the opening degree of the control valve 300 between the circulation system 200 and the buffer water tank 170 does not need to be adjusted. If the difference between the set value and the measured value is not within the preset range, the opening degree of the control valve 300 between the circulation system 200 and the buffer water tank 170 is adjusted according to the PID algorithm, so that the temperature of the cooling water flowing into the water tank after heat exchange of the heat exchanger 240 is within the preset range.

[0046] In order to more accurately control the temperature value of the cooling medium entering each load, a fourth temperature sensor 440 is arranged between the outlet of the heater of each circulation system 200 and the inlet end of the load in the embodiment. The measured value of the fourth temperature sensor 440 of each circulation system 200 is compared with the set value. According to the difference between the set value and the measured value, the output power of the heater of each circulation system 200 is adjusted according to the PID algorithm, so that the temperature of the cooling water flowing into the inlet end of the load reaches the target temperature of the load.

[0047] Please continue to refer to Figure 1 The refrigeration system 100 in the embodiment further includes a cooling pipeline 190 connected to the outlet of the liquid accumulator 130 and the cooling inlet of the compressor 110, respectively. The cooling pipeline 190 is provided with a fourth electronic expansion valve 700. By arranging the branch, the compressor 110 can be sprayed and cooled to prevent the temperature of the compressor 110 from being too high.

[0048] The control method of the temperature control device 1000 of the embodiment of the application will be described below according to the specific example shown in Figure 1 The control method of the temperature control device 1000 of the embodiment of the application will be described below according to the specific example shown in

[0049] The temperature value PV1 detected by the first temperature sensor 410 and the saturation temperature value PV0 corresponding to the pressure value measured by the first pressure sensor 600 are compared. PV0-PV1=X. When a≤X≤b, the speed of the compressor 110 is stepwise corrected, and the speed is adjusted according to the step. When X

[0050] Please refer to Figure 1In order to control the cooling water temperature of the plant service water, the temperature control device 1000 in this embodiment further comprises a second temperature sensor 420 arranged at the outlet of the buffer water tank 170. According to the difference Y between the measured temperature value PV2 of the second temperature sensor 420 and the set temperature value SV2, it is determined whether the difference Y satisfies c≤Y≤d, where c<0 and d>0. When c≤Y≤d is not satisfied, the opening of the first electronic expansion valve 140 is controlled according to the PID algorithm. By adjusting the opening of the first electronic expansion valve 140, according to the second temperature sensor 420, if the temperature is lower than the target value, then the opening of the first electronic expansion valve 140 is reduced, otherwise the opening of the first electronic expansion valve 140 is increased, so as to control the value of Y within c≤Y≤d.

[0051] The difference between the measured value PV3 of the temperature sensor at the outlet of the first water tank 213 and the set value SV3 is the value Z, and it is determined whether the value Z satisfies e≤Z≤f (e<0 and f>0). When e≤Z≤f is satisfied, the fine adjustment state is entered. When e≤Z≤f is not satisfied, the opening of the control valve 300 is adjusted by PID, for example, when Z<e, the opening of the control valve 300 between the first circulating system 210 and the buffer water tank 170 is increased, and when Z>f, the opening of the control valve 300 between the first circulating system 210 and the buffer water tank 170 is reduced. When the minimum temperature of the subcooling water, for example 7℃, cannot bear the load, the opening of the third electronic expansion valve 500 is controlled by PID to make e≤Z≤f.

[0052] The difference between the measured value PV4 of the temperature sensor at the outlet of the second water tank 222 and the set value SV4 is set as the value O, and it is determined whether the value O satisfies g≤O≤h (g<0 and h>0). When g≤O≤h is satisfied, the fine adjustment state is entered. When g≤O≤h is not satisfied, the opening of the control valve 300 between the second water tank 222 and the second circulating system 220 is adjusted by PID. When O<g, the opening of the control valve 300 between the second water tank 222 and the second circulating system 220 is increased, and when O>h, the opening of the control valve 300 between the second water tank 222 and the second circulating system 220 is reduced.

[0053] The difference between the measured value PV5 of the temperature sensor at the outlet of the third water tank 232 and the set value SV5 is set as the value P, and it is determined whether the value P satisfies i≤P≤j (i<0 and j>0). When i≤P≤j is satisfied, the fine adjustment state is entered. When i≤P≤j is not satisfied, the opening of the control valve 300 between the third water tank 232 and the third circulating system 230 is adjusted by PID. When P<i, the opening of the control valve 300 between the third water tank 232 and the third circulating system 230 is increased, and when P>j, the opening of the control valve 300 between the third water tank 232 and the third circulating system 230 is reduced.

[0054] The measured value of the fourth temperature sensor 440 is set as Q, and the difference between PV6 and the set value SV6, and the heater power is controlled according to the deviation of the Q value, when the Q value difference is large, the output of the heater power is controlled to be large by adjusting the power of the voltage unchanged and controlling the current to be large, and vice versa.

[0055] In summary, the temperature control device 1000 includes a refrigeration system 100 and a plurality of circulating systems 200, the refrigeration system 100 is connected with the plurality of circulating systems 200 respectively, the refrigeration system 100 includes a buffer tank 170, the outlet of the buffer tank 170 is communicated with the plurality of circulating systems 200 respectively, so as to distribute heat exchange for the plurality of circulating systems 200, so as to meet different temperature requirements of different loads. By setting the plurality of circulating systems 200 to share one refrigeration system 100, and the refrigeration system 100 can distribute heat exchange according to the requirements of different loads in different circulating systems 200, so as to meet different temperature requirements of different loads. Simplify the device, reduce the cost, and can meet the temperature requirements of multiple loads at the same time.

[0056] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited to this, any skilled person in the art can easily think of changes or replacements within the technical range disclosed by the present application, which should be covered within the protection scope of the present application.

Claims

1. A temperature control device, characterized by, The application relates to a temperature control device (1000) comprising: a refrigeration system (100) comprising a buffer water tank (170) for storing cooling water after refrigeration; a plurality of circulation systems (200), an outlet of the buffer water tank (170) being communicated with the plurality of circulation systems (200) respectively, so that the plurality of circulation systems (200) are distributed heat exchange to meet different temperature requirements of different loads.

2. The temperature-controlled device of claim 1, wherein, The refrigeration system (100) further comprises a compressor (110), a condenser (120), a liquid accumulator (130), a first electronic expansion valve (140), a heat exchanger (150) and a gas-liquid separator (160), an outlet of the compressor (110) being communicated with a first inlet of the condenser (120), a first outlet of the condenser (120) being communicated with an inlet of the liquid accumulator (130), an outlet of the liquid accumulator (130) being communicated with an inlet of the first electronic expansion valve (140); an outlet of the first electronic expansion valve (140) being communicated with a first inlet of the heat exchanger (150), a first outlet of the heat exchanger (150) being communicated with an inlet of the gas-liquid separator (160), a second outlet of the heat exchanger (150) being communicated with an inlet of the buffer water tank (170).

3. Temperature control device according to claim 2, characterized in that The temperature control device (1000) further comprises a plurality of control valves (300) for controlling the flow of cooling water, at least one control valve (300) being arranged between an outlet of the buffer water tank (170) and each circulation system (200).

4. The temperature-controlled device of claim 2, wherein, The temperature control device (1000) further comprises a return water pipeline (180) connected with a second outlet of the condenser (120), each circulation system (200) comprising a heat exchanger (240) and a load, a first inlet of the heat exchanger (240) being connected with an outlet end of the load, a first outlet of the heat exchanger (240) being connected with an inlet end of the load, a second inlet of the heat exchanger (240) being connected with an outlet of the buffer water tank (170), and a second outlet of the heat exchanger (240) being connected to the return water pipeline (180).

5. The temperature-controlled device of claim 4, wherein, Each circulation system further comprises a water tank, a water pump and a heater connected between the heat exchanger (240) and the load in sequence, a first outlet of the heat exchanger (240) being connected with an inlet of the water tank, and an outlet of the heater being connected with an inlet end of the load.

6. The temperature-controlled device of claim 5, wherein, The at least one circulation system further comprises a heat exchange device (212) and a three-way valve (216), a first inlet of the heat exchange device (212) is connected with a first outlet of the heat exchanger (240), a first outlet of the heat exchange device (212) is connected with an inlet end of the load, a second inlet of the heat exchange device (212) is connected with an outlet of the liquid accumulator (130), a second outlet of the heat exchange device (212) is connected with an inlet of the gas-liquid separator (160), and the three-way valve (216) is connected with an outlet end of the load, the first inlet of the heat exchange device (212) and the first inlet of the heat exchanger (240) respectively.

7. The temperature-controlled device of claim 6, wherein, A third electronic expansion valve (500) is further arranged between the second inlet of the heat exchange device (212) and the outlet of the liquid accumulator (130).

8. The temperature-controlled device of claim 6, wherein, The circulation system comprises a first circulation system (210), a second circulation system (220) and a third circulation system (230); The first circulation system (210) comprises a first load (211), a first heat exchanger (241), a heat exchange device (212), a first water tank (213), a first water pump (214), a first heater (215) and a three-way valve (216), the three-way valve (216) comprises a first valve port (2161), a second valve port (2162) and a third valve port (2163), an outlet end of the first load (211) is communicated with the first valve port (2161), the second valve port (2162) is communicated with a first inlet of the first heat exchanger (241), a first outlet of the first heat exchanger (241) is communicated with a first inlet of the heat exchange device (212), a first outlet of the heat exchange device (212) is communicated with an inlet of the first water tank (213), an outlet of the first water tank (213) is communicated with an inlet of the first water pump (214), an outlet of the first water pump (214) is communicated with an inlet of the first heater (215), and an outlet of the first heater (215) is communicated with an inlet end of the first load (211); A second inlet of the first heat exchanger (241) is communicated with an outlet of the buffer water tank (170), and a second outlet of the first heat exchanger (241) is communicated with the backwater pipeline (180); The third valve port (2163) is communicated with the first inlet of the heat exchange device (212), a second inlet of the heat exchange device (212) is communicated with an outlet of the liquid accumulator (130), and a second outlet of the heat exchange device (212) is communicated with an inlet of the gas-liquid separator (160). The second circulation system (220) comprises a second load (221) and a second heat exchanger (242), an outlet end of the second load (221) is communicated with a first inlet of the second heat exchanger (242), a first outlet of the second heat exchanger (242) is communicated with an inlet end of the second load (221), a second inlet of the second heat exchanger (242) is communicated with an outlet of the buffer water tank (170), and a second outlet of the second heat exchanger (242) is communicated with the return water pipeline (180); The third circulation system (230) comprises a third load (231) and a third heat exchanger (243), an outlet end of the third load (231) is communicated with a first inlet of the third heat exchanger (243), a first outlet of the third heat exchanger (243) is communicated with an inlet end of the third load (231), a second inlet of the third heat exchanger (243) is communicated with an outlet of the buffer water tank (170), and a second outlet of the third heat exchanger (243) is communicated with the return water pipeline (180).

9. Temperature control device according to any of claims 2-8, characterized in that The refrigeration system (100) further comprises a cooling pipeline (190) connected with an outlet of the liquid accumulator (130) and a cooling inlet of the compressor (110) respectively, and the cooling pipeline (190) is provided with a fourth electronic expansion valve (700).

10. Temperature control device according to any of claims 2-8, characterized in that The temperature control device (1000) further comprises a first temperature sensor (410) and a first pressure sensor (600), and the first temperature sensor (410) and the first pressure sensor (600) are arranged between an outlet of the compressor (110) and a first inlet of the condenser (120).

11. Temperature control apparatus according to any of claims 2 to 8, characterised in that, The temperature control device (1000) further comprises a second temperature sensor (420) arranged at an outlet of the buffer water tank (170).

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