Spraying device and semiconductor equipment

Abstract

The utility model provides a spraying device and a semiconductor device, the spraying device comprises a spraying cavity, a plurality of splitter plates and a driving mechanism, the interior of the spraying cavity is hollow and comprises a spraying plate located at the bottom of the spraying cavity, and the spraying plate is provided with a plurality of spraying holes at intervals. The plurality of splitter plates are rotatably arranged in the plurality of spraying holes respectively, the splitter plates and the spraying holes are arranged in a one-to-one correspondence mode, and the splitter plates are matched with the spraying holes. The driving mechanism is in driving connection with the splitter plates and used for driving the splitter plates to rotate. According to the utility model, the splitter plate is rotatably arranged in each spraying hole. The splitter plate is driven by the driving mechanism to rotate, the splitter plate can be rotated to a vertical state (namely, the spraying holes are completely opened), a horizontal state (namely, the spraying holes are closed) or an inclined state at different angles (namely, the spraying holes are partially shielded at different degrees), and therefore the flow and / or the direction of fluid sprayed out of the spraying holes can be accurately controlled and adjusted.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor manufacturing, especially to a spraying device and semiconductor equipment. BACKGROUND

[0002] The semiconductor equipment (for example, etching machine, coating equipment) is provided with a spraying device for spraying fluid, in the prior art, a plurality of perforations are arranged on the spraying device, the perforations only play a role of conducting fluid, but cannot adjust the direction and / or flow of fluid sprayed from the perforations, so the fluid distribution sprayed to the wafer surface cannot be adjusted.

[0003] Therefore, it is necessary to provide a spraying device and semiconductor equipment to solve the above problems. SUMMARY

[0004] The utility model discloses a kind of spraying devices and semiconductor equipment, to improve the problem that current spraying device cannot adjust the direction and / or flow of fluid sprayed from perforation.

[0005] The utility model provides a kind of spraying device, comprising:

[0006] Spraying cavity, hollow inside and including the spraying plate at the bottom of the spraying cavity, a plurality of spraying holes are arranged at intervals on the spraying plate;

[0007] A plurality of shunt plates are rotatably arranged in a plurality of spraying holes respectively, the shunt plate and the spraying hole are one-to-one correspondence, and the shunt plate is matched with the spraying hole.

[0008] Driving mechanism, driving connection with a plurality of shunt plates and used to drive the rotation of the shunt plate, to open, close and partially shield the spraying hole, so as to adjust the flow and / or direction of fluid sprayed from the spraying hole.

[0009] In a possible embodiment, the driving mechanism includes a plurality of first driving members drivingly connected with a plurality of shunt plates respectively, and the first driving members are one-to-one correspondence with the shunt plates;Or,

[0010] The driving mechanism includes a plurality of second driving members and a plurality of transmission assemblies, the transmission assemblies are one-to-one correspondence with the second driving members, the shunt plates are divided into a plurality of groups, and the second driving members are drivingly connected with a corresponding group of shunt plates through a corresponding transmission assembly.

[0011] In a possible embodiment, the spraying device further includes a connecting shaft arranged on the shunt plate, and the shunt plate is rotatably arranged in the corresponding spraying hole through the connecting shaft.

[0012] In a possible embodiment, for the case that the driving mechanism comprises a plurality of first driving members, the first driving members are arranged on the top surface of the spray plate, or the spray plate is provided with mounting grooves, and the first driving members are arranged in the mounting grooves.

[0013] In a possible embodiment, for the case that the first driving members are arranged on the top surface of the spray plate, the first driving members are arranged on the top surface of the spray plate, the top surface of the spray plate is provided with a plurality of mounting seats, the mounting seats are arranged one-to-one with the first driving members and are respectively located on two sides of the corresponding spray holes, the first driving members and the mounting seats are arranged close to the corresponding spray holes, one end of the connecting shaft is connected with the corresponding first driving member, and the other end is rotatably arranged in the corresponding mounting seat, and the shunt plate is partially located in the spray hole and partially located in the spray cavity.

[0014] For the case that the first driving members are arranged in the mounting grooves, the opposite two side walls of the spray hole are respectively provided with a first through hole and a second through hole, the top surface of the spray plate is provided with a mounting groove in communication with the first through hole, the mounting groove is arranged one-to-one with the first through hole, the first driving member is arranged in the corresponding mounting groove, one end of the connecting shaft is rotatably arranged in the corresponding first through hole and extends into the corresponding mounting groove, and the other end is rotatably arranged in the corresponding second through hole.

[0015] In a possible embodiment, for the case that the driving mechanism comprises a plurality of second driving members and a plurality of transmission assemblies, the spray holes are arranged in groups, each group of the spray holes is arranged in a ring array, and a plurality of groups of the spray holes are arranged in a radial direction of the spray cavity.

[0016] In a possible embodiment, the transmission assembly comprises a plurality of bevel gear rings rotatably arranged on the spray plate, a first bevel gear arranged on the driving end of the second driving member, and a plurality of groups of second bevel gears, each group of the second bevel gears is arranged on the connecting shaft of the corresponding group of the shunt plates.

[0017] The bevel gear ring surrounds the corresponding group of the spray holes, the second bevel gear on the connecting shaft of each group of the shunt plates is meshingly connected to the corresponding bevel gear ring, the first bevel gear is arranged one-to-one with the bevel gear ring and is meshingly connected to the corresponding bevel gear ring, the corresponding first bevel gear is driven to rotate by the second driving member, the corresponding bevel gear ring is driven to rotate, and then a group of the second bevel gears on the bevel gear ring are driven to rotate, so as to realize the rotation adjustment of a group of the shunt plates.

[0018] In a possible embodiment, the bevel gear ring is rotatably arranged on the top surface of the spray plate; or,

[0019] The top surface of the spray plate is provided with a plurality of annular grooves at intervals along the radial direction of the spray cavity, each annular groove is arranged around a corresponding group of spray holes, and the bevel gear ring is rotatably arranged on the bottom wall of the corresponding annular groove.

[0020] In a possible embodiment, for the case that the bevel gear ring is rotatably arranged on the top surface of the spray plate, the top surface of the spray plate is provided with a plurality of connecting seats, the connecting seats are arranged one by one with the flow distribution plate, one end of the connecting shaft away from the bevel gear ring is rotatably arranged in the corresponding connecting seat, and the second driving member is arranged on the top surface of the spray plate.

[0021] For the case that the bevel gear ring is rotatably arranged on the bottom wall of the annular groove, first mounting holes arranged close to the center of the spray cavity and second mounting holes arranged away from the center of the spray cavity are arranged on the opposite two side walls of the spray hole respectively, the annular groove is in communication with the first mounting hole on a corresponding group of spray holes, one end of the connecting shaft is rotatably arranged in the corresponding first mounting hole and extends into the corresponding annular groove, the second bevel gear is arranged at the end of the connecting shaft located in the annular groove, the other end of the connecting shaft is rotatably arranged in the second mounting hole, and the second driving member is arranged in the corresponding annular groove.

[0022] The utility model also provides a kind of semiconductor equipment, comprising: the spray device in any embodiment as above.

[0023] The spray device has the advantages that: by arranging flow distribution plate in each spray hole, the angle and shielding degree of flow distribution plate relative to spray hole can be flexibly adjusted by driving mechanism driving flow distribution plate to rotate, so that the flow and / or direction of fluid sprayed from spray hole can be adjusted.In one scheme, by arranging one first driving member for each flow distribution plate, the flow and / or direction of fluid sprayed from each spray hole can be individually adjusted, so that the flow of each region of spray device can be individually adjusted.In another scheme, one second driving member and one transmission assembly are arranged for each group of flow distribution plate, the flow and / or direction of fluid sprayed from corresponding group of spray hole can be adjusted by one second driving member, so that the flow of each region of spray device can be individually adjusted. BRIEF DESCRIPTION OF DRAWINGS

[0024] Figure 1 It is a partial sectional view of the first driving member arranged on the top surface of the spray plate in the first embodiment of the spray device of the utility model.

[0025] Figure 2 A partial sectional view of the spraying device of the utility model in the first embodiment in which the first driving member is arranged in the local part of the mounting groove.

[0026] Figure 3 A partial sectional view of the spraying device of the utility model in the second embodiment in which the bevel gear ring is rotatably arranged on the top surface of the spraying plate.

[0027] Figure 4 A partial sectional view of the spraying device of the utility model in the second embodiment in which the bevel gear ring is rotatably arranged in the ring groove.

[0028] Figure 5 A schematic view of the transmission assembly in the spraying device of the utility model.

[0029] Figure 6 A schematic view of the spraying device of the utility model.

[0030] Figure 7 A schematic view of the spraying device of the utility model in which the shunt plate is rotated to different angles.

[0031] Figure 8 A schematic view of the spraying plate and the shunt plate in the spraying device of the utility model.

[0032] Explanation of reference numerals: 110, spraying cavity; 111, spraying plate; 1111, spraying hole; 1112, mounting groove; 1113, first through hole; 1114, second through hole; 1115, ring groove; 1116, first mounting hole; 1117, second mounting hole; 120, shunt plate; 121, connecting shaft; 131, first driving member; 132, second driving member; 133, transmission assembly; 1331, bevel gear ring; 13311, first tooth surface; 13312, second tooth surface; 1332, first bevel gear; 1333, second bevel gear; 140, mounting seat; 150, connecting seat; 160, sliding rail; 200, wafer. DETAILED DESCRIPTION

[0033] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be described clearly and completely below. Obviously, the described embodiments are part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0034] In view of the problems in the prior art, the embodiments of the utility model provide a spraying device, which is described as follows. Figure 1 , Figure 6 and Figure 7The spraying device comprises a spraying cavity 110, a plurality of shunt plates 120 and a driving mechanism. The spraying cavity 110 is hollow and comprises a spraying plate 111 at the bottom of the spraying cavity 110. A plurality of spraying holes 1111 are arranged at intervals on the spraying plate 111. The plurality of shunt plates 120 are respectively rotatably arranged in the plurality of spraying holes 1111. The shunt plates 120 are arranged in one-to-one correspondence with the spraying holes 1111 and are adapted to the spraying holes 1111. The driving mechanism is drivingly connected with the plurality of shunt plates 120 and is used to drive the rotation of the shunt plates 120 to open, close and partially shield the spraying holes 1111, so as to adjust the flow and / or direction of the fluid sprayed from the spraying holes 1111.

[0035] In this embodiment, the shunt plate 120 is respectively arranged in each spraying hole 1111. The shunt plate 120 is driven to rotate by the driving mechanism. The shunt plate 120 can be rotated to a vertical state (i.e. completely open the spraying hole 1111), a horizontal state (i.e. close the spraying hole 1111) or an inclined state at different angles (i.e. partially shield the spraying hole 1111) at different degrees, as shown in Figure 7 Thus, the direction of the fluid sprayed from the spraying hole 1111 can be accurately controlled. When the shunt plate 120 is completely opened, the fluid flow is the largest. When the shunt plate 120 is partially shielded, the fluid flow is correspondingly reduced. When the shunt plate 120 is closed and shielded, the corresponding spraying hole 1111 does not emit fluid, so as to realize the adjustment of the fluid flow emitted from the spraying hole 1111.

[0036] It should be noted that the fluid can be gas or liquid. In the dry process, the spraying device can be used to spray gas. In the wet process, the spraying device can be used to spray liquid.

[0037] In addition, the spraying device is usually divided into at least two areas. One supply system is used to supply fluid to the at least two areas. Since the total amount of supply of the at least two areas is constant, when the supply amount of one area is reduced, the supply amount of the other area will increase, so that the supply amount of each area cannot be adjusted individually.

[0038] To solve the above problems, the driving mechanism is further improved in the present application, and the following two embodiments are explained in detail.

[0039] In the first embodiment, referring to Figure 1 and Figure 2The driving mechanism includes a plurality of first driving members 131 respectively drivingly connected with the plurality of flow distribution plates 120. The first driving member 131 is arranged in one-to-one correspondence with the flow distribution plate 120. In this embodiment, each flow distribution plate 120 is controlled by a corresponding first driving member 131. By accurately controlling the rotation angle of each flow distribution plate 120, the flow and / or direction of the fluid sprayed by each spray hole 1111 can be individually adjusted, so that the flow of the fluid sprayed by the spray holes 1111 in different regions of the spray device can be accurately controlled. For example, each spray hole 1111 in one region of the spray device can be closed, and each spray hole 1111 in other regions can be opened or partially blocked.

[0040] In a second embodiment, referring to Figure 3 and Figure 4 , the driving mechanism includes a plurality of second driving members 132 and a plurality of transmission assemblies 133. The transmission assembly 133 is arranged in one-to-one correspondence with the second driving member. The flow distribution plates 120 are divided into groups. The second driving member 132 is drivingly connected with a corresponding group of flow distribution plates 120 through a corresponding transmission assembly 133. In this embodiment, the flow distribution plates 120 are divided into groups, i.e., the spray holes 1111 are divided into groups. Through the transmission assembly 133, one second driving member 132 can simultaneously drive a group of flow distribution plates 120 to rotate and adjust synchronously, thereby adjusting the flow and / or direction of the fluid sprayed by a group of spray holes 1111 synchronously, so that the flow of the fluid sprayed by the spray holes 1111 in different regions of the spray device can be accurately controlled. For example, all the spray holes 1111 in all the groups in one region of the spray device can be closed, and all the spray holes 1111 in all the groups in other regions can be opened or partially blocked. In addition, compared with the design of providing an independent driving member for each flow distribution plate 120, the group control method can greatly reduce the number of driving members, simplify the complexity of the driving mechanism, and reduce the cost and maintenance difficulty of the driving mechanism.

[0041] In a specific embodiment, referring to Figure 1 and Figure 3 , the spray device further includes a connecting shaft 121 arranged on the flow distribution plate 120. The flow distribution plate 120 is rotatably arranged in the corresponding spray hole 1111 through the connecting shaft 121.

[0042] In some embodiments, for the case where the driving mechanism includes a plurality of first driving members 131, the first driving member 131 is arranged on the top surface of the spray plate 111, as shown in Figure 1 , or the spray plate 111 is provided with a mounting groove 1112, and the first driving member 131 is arranged in the mounting groove 1112, as shown in Figure 2 .

[0043] In an embodiment, referring to Figure 1, for the case that the first driving member 131 is arranged on the top surface of the spray plate 111, the first driving member 131 is arranged on the top surface of the spray plate 111, the top surface of the spray plate 111 is provided with a plurality of mounting seats 140, the mounting seats 140 are arranged one by one corresponding to the first driving members 131 and are respectively located on two sides of the corresponding spray holes 1111, the first driving member 131 and the mounting seat 140 are arranged close to the corresponding spray hole 1111, one end of the connecting shaft 121 is connected with the corresponding first driving member 131, and the other end is rotatably arranged in the corresponding mounting seat 140, and the baffle plate 120 is partially located in the spray hole 1111 and partially located in the spray cavity 110. In this embodiment, the connecting shaft 121 and the baffle plate 120 thereon are supported by the first driving member 131 and the mounting seat 140, the first driving member 131 provides power and directly drives one end of the connecting shaft 121 to rotate, the other end of the connecting shaft 121 rotates in the mounting seat 140, and the stability of the connecting shaft 121 and the baffle plate 120 in the rotating process is ensured. The mounting mode of directly mounting the first driving member 131 and the mounting seat 140 on the top surface of the spray plate 111 is simpler.

[0044] In another embodiment, referring to Figure 2 , for the case that the first driving member 131 is arranged in the mounting groove 1112, the opposite two side walls of the spray hole 1111 are respectively provided with a first perforation 1113 and a second perforation 1114, the top surface of the spray plate 111 is provided with a mounting groove 1112 in communication with the first perforation 1113, the mounting groove 1112 is arranged one by one corresponding to the first perforation 1113, the first driving member 131 is arranged in the corresponding mounting groove 1112, one end of the connecting shaft 121 is rotatably arranged in the corresponding first perforation 1113 and extends into the corresponding mounting groove 1112, and is connected with the corresponding first driving member 131, and the other end of the connecting shaft 121 is rotatably arranged in the corresponding second perforation 1114. In this embodiment, the first perforation 1113 and the second perforation 1114 are arranged on the opposite two side walls of the spray hole 1111 to mount and support the connecting shaft 121, without the need to additionally arrange a support component for the connecting shaft 121, and the mounting groove 1112 in communication with the first perforation 1113 is arranged on the top surface of the spray plate 111, so that the first driving member 131 is accommodated in the mounting groove 1112, and the occupation of the internal space of the spray device is reduced.

[0045] Referring to Figure 6For example, the etching machine is taken as an example, the spraying device is usually divided into three regions to correspondingly adjust the fluid distribution of the middle, intermediate and edge of the wafer 200, the total fluid amount of the three regions of the spraying device is 100%, but the upper limit and lower limit of the fluid proportion of each region needs to be adjusted, for example, the fluid amount of the middle region is adjusted to 20% at the lowest or 80% at the highest, and further adjustment cannot be realized, which means that the process problem cannot be improved by adjusting the fluid amount proportion of the middle, intermediate and edge of the spraying device.

[0046] The utility model further provides an improvement aiming at the technical problem, in one embodiment, referring to Figure 3 and Figure 6 , aiming at the case that the driving mechanism comprises a plurality of second driving members 132 and a plurality of transmission assemblies 133, the spray holes 1111 are a plurality of groups, each group of spray holes 1111 is distributed in a ring array, and the plurality of groups of spray holes 1111 are distributed along the radial direction of the spraying cavity 110.In this embodiment, the spray holes 1111 distributed in a ring array can be located in the middle region in a circular shape, the intermediate region in a ring shape and the edge region, and each group of spray holes 1111 is located in the same region of the spraying device, that is, by adjusting a group of flow distribution plates 120, the fluid flow of the region where the group of flow distribution plates 120 is located can be adjusted.

[0047] In one specific embodiment, referring to Figure 3 , Figure 4 and Figure 5 , the transmission assembly 133 comprises a plurality of bevel gear rings 1331 rotatably arranged on the spraying plate 111, a first bevel gear 1332 arranged on the driving end of the second driving member 132 and a plurality of groups of second bevel gears 1333, each group of second bevel gears 1333 is arranged on the connecting shaft 121 of a corresponding group of flow distribution plates 120.The bevel gear ring 1331 is arranged around a corresponding group of spray holes 1111, the second bevel gear 1333 on the connecting shaft 121 of each group of flow distribution plates 120 is engaged with a corresponding bevel gear ring 1331, the first bevel gear 1332 is arranged one by one corresponding to the bevel gear ring 1331 and the first bevel gear 1332 is engaged with the corresponding bevel gear ring 1331, the corresponding first bevel gear 1332 is driven to rotate by the second driving member 132, which drives the corresponding bevel gear ring 1331 to rotate, and further drives a group of second bevel gears 1333 on the bevel gear ring 1331 to rotate, thereby realizing the rotational adjustment of a group of flow distribution plates 120.

[0048] In this embodiment, each group of the distribution plates 120 is driven by only one second driving member 132, the second driving member 132 drives the first bevel gear 1332 at the driving end of the second driving member 132 to rotate, the rotation of the first bevel gear 1332 drives the bevel gear ring 1331 meshing with the first bevel gear 1332 to rotate, the rotation of the bevel gear ring 1331 drives the second bevel gear 1333 meshing and connected with the bevel gear ring 1331 to rotate, so that the group of the distribution plates 120 corresponding to the group of the second bevel gears 1333 synchronously rotate, thereby the flow and / or direction of the fluid sprayed by the group of the spray holes 1111 corresponding to the group of the distribution plates 120 can be adjusted.

[0049] In an embodiment, referring to Figure 3 and Figure 4 , the cross section of the bevel gear ring 1331 is trapezoidal and includes the first tooth surface 13311 and the second tooth surface 13312 oppositely arranged and in an inclined shape, the first tooth surface 13311 is the outer ring surface of the bevel gear ring 1331, and the second tooth surface 13312 is the inner ring surface of the bevel gear ring 1331, the first bevel gear 1332 is meshing and connected on the first tooth surface 13311 of the corresponding bevel gear ring 1331, and the second bevel gear 1333 is meshing and connected on the second tooth surface 13312 of the corresponding bevel gear ring 1331.

[0050] In an embodiment, referring to Figure 3 and Figure 4 , the spray plate 111 is provided with the slide rail 160 in a ring shape and matched with the bevel gear ring 1331, the bevel gear ring 1331 is arranged on the slide rail 160, the bevel gear ring 1331 is concentrically arranged with the slide rail 160, and the bevel gear ring 1331 can rotate along the slide rail 160.

[0051] In some embodiments, referring to Figure 3 , the bevel gear ring 1331 is rotatably arranged on the top surface of the spray plate 111; or, referring to Figure 4 , the top surface of the spray plate 111 is provided with a plurality of ring grooves 1115 spaced apart along the radial direction of the spray cavity 110, each ring groove 1115 is arranged around the corresponding group of the spray holes 1111, and the bevel gear ring 1331 is rotatably arranged on the bottom wall of the corresponding ring groove 1115.

[0052] In an embodiment, referring to Figure 3, for the case that the bevel gear ring 1331 is rotatably arranged on the top surface of the spray plate 111, the top surface of the spray plate 111 is provided with a plurality of connecting seats 150, the connecting seats 150 are arranged in one-to-one correspondence with the distribution plates 120, one end of the connecting shaft 121 away from the bevel gear ring 1331 is rotatably arranged in the corresponding connecting seat 150, and the second driving member 132 is arranged on the top surface of the spray plate 111. In this embodiment, the second driving member 132 supports the connecting shaft 121 and the distribution plate 120 thereon through the connecting seat 150, the second driving member 132 provides power and directly drives one end of the connecting shaft 121 to rotate, the other end of the connecting shaft 121 rotates in the connecting seat 150, and the stability of the connecting shaft 121 and the distribution plate 120 during rotation is ensured. The installation mode of the bevel gear ring 1331, the second driving member 132 and the mounting seat 140 on the top surface of the spray plate 111 is simpler.

[0053] In another embodiment, referring to Figure 4 , for the case that the bevel gear ring 1331 is rotatably arranged on the bottom wall of the ring groove 1115, the opposite two side walls of the spray hole 1111 are respectively provided with a first mounting hole 1116 arranged close to the center of the spray cavity 110 and a second mounting hole 1117 arranged away from the center of the spray cavity 110, the ring groove 1115 communicates with the first mounting hole 1116 on the corresponding group of spray holes 1111, one end of the connecting shaft 121 is rotatably arranged in the corresponding first mounting hole 1116 and extends into the corresponding ring groove 1115, the second bevel gear 1333 is arranged at the end of the connecting shaft 121 located in the ring groove 1115, the other end of the connecting shaft 121 is rotatably arranged in the second mounting hole 1117, and the second driving member 132 is arranged in the corresponding ring groove 1115. In this embodiment, the first mounting hole 1116 and the second mounting hole 1117 are arranged on the opposite two side walls of the spray hole 1111 to install and support the connecting shaft 121, without the need to additionally arrange a support component for the connecting shaft 121, and the ring groove 1115 communicating with the first mounting hole 1116 is arranged on the top surface of the spray plate 111, so that the bevel gear ring 1331, the second bevel gear 1333, the first bevel gear 1332 and the second driving member 132 are all accommodated in the ring groove 1115, and the occupation of the internal space of the spray device is reduced.

[0054] In some embodiments, the first driving member 131 and the second driving member 132 can be micro driving members such as micro motors or micro rotary air cylinders, which are small in size and light in weight, can avoid occupying the limited space in the spray device, ensure smooth flow of fluid, and are more suitable for narrow space in the spray device.

[0055] In a specific embodiment, the spray hole 1111 and the distribution plate 120 are circular, and the setting direction of the connecting shaft 121 is consistent with the radial direction of the distribution plate 120.

[0056] In one embodiment, the spraying device further comprises a controller connected with the driving mechanism for controlling the operation of the driving mechanism.

[0057] The utility model further provides a kind of semiconductor equipment, comprising: as any embodiment in the above spraying device.

[0058] The technical effects of the spraying device and semiconductor equipment of the utility model are explained in detail as follows.

[0059] 1. By setting a plurality of spray holes 1111 on the spray plate 111, and setting a rotatable flow distribution plate 120 in each spray hole 1111, the rotation of the flow distribution plate 120 is controlled by the driving mechanism, which can realize accurate adjustment of the fluid flow rate sprayed by each spray hole 1111, so that the fluid flow rate of each area can be independently and accurately adjusted. The rotation of the flow distribution plate 120 can not only adjust the flow rate, but also change the direction of the fluid sprayed from the spray hole 1111.

[0060] 2. By setting a first driving member 131 for each flow distribution plate 120, the flow rate and / or direction of the fluid sprayed by each spray hole 1111 can be adjusted individually, thereby realizing individual adjustment of the fluid flow rate of each area of the spraying device.

[0061] 3. A first driving member 131 and a transmission assembly 133 are provided for each group of flow distribution plates 120, and the flow rate and / or direction of the fluid sprayed by the corresponding group of spray holes 1111 can be adjusted by one first driving member 131, thereby realizing individual adjustment of the fluid flow rate of each area of the spraying device.

[0062] Although the embodiments of the utility model have been described in detail above, it is obvious for those skilled in the art that various modifications and changes can be made to these embodiments. However, it should be understood that such modifications and changes are within the scope and spirit of the utility model described in the claims. Moreover, the utility model described herein can have other embodiments, and can be implemented or realized in various ways. Unless otherwise defined, the technical terms or scientific terms used herein should be understood as the usual meaning understood by persons skilled in the art in the field to which the utility model belongs.

Claims

1. A spray device, characterized in that The utility model relates to a shower cavity, internally hollow and comprising a shower plate at the bottom of the shower cavity, the shower plate being provided with a plurality of spray holes at intervals; a plurality of shunt plates, each rotatably provided in a corresponding one of the spray holes, the shunt plates and the spray holes being one-to-one corresponding, the shunt plates being adapted to the spray holes; a driving mechanism drivingly connected to the shunt plates and configured to drive the rotation of the shunt plates to open, close and partially block the spray holes, thereby adjusting the flow rate and / or direction of fluid sprayed from the spray holes. The driving mechanism comprises a plurality of first driving members drivingly connected to the shunt plates, respectively, the first driving members being one-to-one corresponding to the shunt plates; or, 2. The spray device of claim 1, wherein The driving mechanism comprises a plurality of second driving members and a plurality of transmission assemblies, the transmission assemblies being one-to-one corresponding to the second driving members, the shunt plates being divided into a plurality of groups, the second driving members being drivingly connected to a corresponding group of shunt plates through a corresponding transmission assembly. Further comprising a connecting shaft provided on the shunt plate, the shunt plate being rotatably provided in the corresponding spray hole through the connecting shaft.

3. The spray device of claim 2, wherein For the case that the driving mechanism comprises a plurality of first driving members, the first driving members are provided on the top surface of the shower plate, or the shower plate is provided with a mounting groove, and the first driving members are provided in the mounting groove.

4. The spray device of claim 3, wherein For the case that the first driving members are provided on the top surface of the shower plate, the first driving members are provided on the top surface of the shower plate, the top surface of the shower plate is provided with a plurality of mounting seats, the mounting seats being one-to-one corresponding to the first driving members and respectively located on both sides of the corresponding spray holes, one end of the connecting shaft being connected to the corresponding first driving member, the other end being rotatably provided in the corresponding mounting seat; 5. The shower assembly of claim 4, wherein, For the case that the first driving members are provided in the mounting groove, the opposite side walls of the spray hole are respectively provided with a first perforation and a second perforation, the top surface of the shower plate is provided with a mounting groove in communication with the first perforation, the mounting groove being one-to-one corresponding to the first perforation, the first driving member being provided in the corresponding mounting groove, one end of the connecting shaft being rotatably provided in the corresponding first perforation and extending into the corresponding mounting groove, and the other end being rotatably provided in the corresponding second perforation. For the case that the driving mechanism comprises a plurality of second driving members and a plurality of transmission assemblies, the spray holes are divided into a plurality of groups, each group of spray holes being arranged in a ring array, and a plurality of groups of spray holes being distributed along the radial direction of the shower cavity.

6. The spray device of claim 3, wherein The transmission assembly comprises a plurality of bevel gear rings rotatably provided on the shower plate, a first bevel gear provided on the driving end of the second driving member, and a plurality of groups of second bevel gears, each group of second bevel gears being provided on the connecting shaft of a corresponding group of shunt plates; 7. The shower assembly of claim 6, wherein, ​ The bevel gear ring is rotatably arranged on the top surface of the spray plate; or, 8. The spray device of claim 7, wherein The top surface of the spray plate is provided with a plurality of annular grooves at intervals along the radial direction of the spray cavity, each annular groove is arranged around a corresponding group of spray holes, and the bevel gear ring is rotatably arranged on the bottom wall of the corresponding annular groove. For the case that the bevel gear ring is rotatably arranged on the top surface of the spray plate, the top surface of the spray plate is provided with a plurality of connecting seats, the connecting seats are arranged one-to-one with the shunt plates, and one end of the connecting shaft away from the bevel gear ring is rotatably arranged in the corresponding connecting seat; 9. The shower assembly of claim 8, wherein, For the case that the bevel gear ring is rotatably arranged on the bottom wall of the annular groove, the opposite two side walls of the spray hole are respectively provided with a first mounting hole arranged close to the center of the spray cavity and a second mounting hole arranged away from the center of the spray cavity, the annular groove is communicated with the first mounting hole of a corresponding group of spray holes, one end of the connecting shaft is rotatably arranged in the corresponding first mounting hole and extends into the corresponding annular groove, the second bevel gear is arranged at the end of the connecting shaft in the annular groove, and the other end of the connecting shaft is rotatably arranged in the second mounting hole. The spray device according to any one of claims 1-9.

10. A semiconductor device, characterized by comprising: The spray device according to any one of claims 1-9. ​

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