Residue scraping machine for multi-specification single crystal material seats

Abstract

The utility model discloses a multi-specification single crystal material seat residue scraper which comprises a frame assembly, a driving assembly and a driven assembly, the driving assembly and the driven assembly are arranged on the frame assembly, the driving assembly and the driven assembly are connected through a chain, and a scraper assembly is connected to the chain. A scraper top plate assembly is connected to the position, close to one end, of the frame assembly, an air cylinder clamping assembly used for clamping single crystal material bases is arranged on the frame assembly, the air cylinder clamping assembly comprises a plurality of sets of air cylinders, the positions of the multiple sets of air cylinders are different, and clamping of the single crystal material bases of different specifications is achieved. The single crystal material base residue scraping device can be suitable for automatic scraping of single crystal material base residues of multiple specifications, and high-precision stable operation of the single crystal material base residue scraping device in the operation process can be guaranteed by adopting a motor driving and linear guide rail mechanism.

Description

Technical Field

[0001] This utility model relates to the field of scraping residue from a material holder, and in particular to a scraping machine for residue from a multi-specification single crystal material holder. Background Technology

[0002] In the monocrystalline silicon production process, the form of the monocrystalline silicon substrate used is not standardized, and the thickness of the residual monocrystalline silicon on the substrate varies greatly. Because the residual monocrystalline silicon needs to be repeatedly recycled, and due to the lack of standardized substrate form, there is no usable equipment for scraping off the substrate residue. Generally, the residual monocrystalline silicon is removed manually, significantly increasing the number of workers and the labor intensity. This production method with residual monocrystalline silicon not only has poor implementation results but also greatly increases labor costs and the risk of worker injury. Utility Model Content

[0003] The purpose of this invention is to overcome the shortcomings and defects of the existing technology and to provide a multi-specification single crystal material holder residue scraper.

[0004] A multi-specification single crystal substrate residue scraper includes a frame assembly and a drive assembly and a driven assembly arranged on the frame assembly. The drive assembly and the driven assembly are connected by a chain. A scraper assembly is connected to the chain. A scraper top plate assembly is connected to one end of the frame assembly. A cylinder clamping assembly for clamping the single crystal substrate is arranged on the frame assembly. The cylinder clamping assembly includes multiple sets of cylinders in different positions to achieve clamping of single crystal substrates of different specifications.

[0005] The scraper assembly includes a scraper mounting base, which is mounted on a slider of a linear guide rail on the frame assembly. A set of scrapers is mounted on each side of the scraper mounting base for repeatedly scraping off the single crystal material residue twice.

[0006] The scraper mounting base has two ends connected to chain connectors for connecting the chain via chain connecting shafts and secured with nuts; slider blocks are arranged at both ends of the scraper mounting base.

[0007] The scraper top plate assembly includes a buffer plate, a spring, and a spring fixing seat. One end of the spring, which is installed in the bushing seat, is connected to the buffer plate, and the other end is connected to the upper surface of the buffer plate. Both sides of the upper surface of the buffer plate are connected to the guide rod fixing plate of the guide rod. The guide rod passes through the linear bearings in the holes on both sides of the bushing seat and is connected to the guide rod limiting block. Linear bearings are installed in the bearing mounting holes on both sides of the bushing seat in a centrally positioned manner.

[0008] The spring fixing seat and the bushing seat are mounted on the buffer mounting plate; bushing baffles are installed on both sides of the bushing seat, and the buffer mounting plate is mounted on the linear guide rail.

[0009] The drive assembly includes a main drive shaft and a motor located on the left side of the frame assembly, and a drive sprocket. The motor is connected to the main drive shaft, the main drive shaft is connected to the drive sprocket, and the drive sprocket is connected to the chain. The drive assembly also includes a motor overload protection device and a micro switch.

[0010] The driven component includes a driven shaft on the right end of the frame component. The driven shaft is arranged radially apart from the main drive shaft. The driven shaft has a driven sprocket, which is connected to the chain.

[0011] The framework components include:

[0012] Dead stop, connected to the upper surface of the base frame, is used to limit the position of the single crystal material holder as it moves with the scraper during scraping;

[0013] Limiting block A is installed on both sides of the linear guide rail on the base frame to limit the left side of the slider of the linear guide rail;

[0014] Limiting block B is installed on both sides of the linear guide rail on the base frame to limit the right side of the slider of the linear guide rail.

[0015] The frame assembly includes a centering block for aligning the robot's material base, which is mounted on a block connector. The block connector is mounted on both sides of the base frame.

[0016] The framework components include:

[0017] A residue box, installed in the middle of the stop block connector, is used to collect water stains and residues dripping from the material seat;

[0018] The collection box, connected to the middle position of the base frame via a material box connector, is used to collect material residue.

[0019] This invention can automatically scrape residue from single crystal material holders of various specifications. The motor drive and linear guide mechanism it adopts can ensure high-precision and stable operation during the process.

[0020] This utility model features a material seat centering mechanism, which ensures secondary precision positioning of the robot during the transfer process. The device also incorporates a scraper top plate assembly, adding the function of removing single-crystal auxiliary stickers. The scraper assembly is a double-sided scraper, which can effectively improve the scraping effect of residues. Furthermore, the device occupies little space and can be integrated with AGV carts, saving significant labor costs. Attached Figure Description

[0021] Figure 1 This is an isometric schematic diagram of the entire utility model.

[0022] Figure 2 This is a front view schematic diagram of the frame component of this utility model.

[0023] Figure 3 This is a front view schematic diagram of the drive component of this utility model.

[0024] Figure 4 This is a side view of the driven component of this utility model.

[0025] Figure 5 This is a bottom view of the scraper top plate assembly of this utility model.

[0026] Figure 6 This is a top view of the scraper assembly of this utility model.

[0027] Figure 7 This is a top view schematic diagram of the cylinder clamping assembly of this utility model.

[0028] Figure 8 This is an isometric perspective view of the protective cover assembly of this utility model.

[0029] Figure 9 This is an isometric schematic diagram of the protective cover assembly of this utility model.

[0030] In the picture:

[0031] 1. Framework Components:

[0032] 1-1 Residue box, 1-2 Base frame, 1-3 Centering block, 1-4 Block connector, 1-5 Collection box, 1-6 Collection box connector, 1-7 Dead block, 1-8 Limit block A, 1-9 Limit block B, 1-10 Linear guide rail, 1-11 Switch bracket, 1-12 Proximity switch;

[0033] 2. Driver components:

[0034] 2-1 Motor swing limit block, 2-2 Motor connecting shaft, 2-3 Shim, 2-4 Spacer A, 2-5 Spacer B, 2-6 Drive sprocket, 2-7 Shaft end baffle, 2-8 Shaft limit piece, 2-9 Main motor mounting base, 2-10 Main drive shaft, 2-11 Overload protection switch bracket, 2-12 Micro switch, 2-13 Flat key A, 2-14 Flat key B, 2-15 Motor, 2-16 Spring, 2-17 Bearing with seat;

[0035] 3 Slave Components:

[0036] 3-1 Driven wheel support, 3-2 Driven shaft, 3-3 Spacer, 3-4 Driven sprocket, 3-5 Shaft end baffle, 3-6 Elastic retaining ring for hole, 3-7 Bearing;

[0037] 4. Scraper top plate assembly:

[0038] 4-1 Spring fixing seat, 4-2 Guide rod fixing plate, 4-3 Guide rod limiting block, 4-4 Guide rod, 4-5 Adjusting shim, 4-6 Buffer plate, 4-7 Buffer mounting plate, 4-8 Material seat limiting block, 4-9 Shaft sleeve baffle, 4-10 Shaft sleeve seat, 4-11 Spring, 4-12 Linear bearing.

[0039] 5. Scraper assembly: 5-1 Scraper, 5-2 Scraper mounting base, 5-3 Slider stop, 5-4 Chain connector, 5-5 Chain connecting shaft;

[0040] 6-cylinder clamping assembly: 6-1 gripper transition plate, 6-2 gasket A, 6-3 gasket B, 6-4 gripper A, 6-5 gripper B, 6-6 cylinder mounting base, 6-7 cylinder;

[0041] 7. Protective Cover Components: 7-1 Protective Cover A, 7-2 Protective Cover B, 7-3 Protective Cover C, 7-4 Protective Cover Bracket A, 7-5 Protective Cover Bracket B, 7-6 Protective Cover Bracket C, 7-7 Cylinder Protective Cover. Detailed Implementation

[0042] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and are not intended to limit the present invention.

[0043] Please refer to the attached drawings. An automatic scraper for residue from multi-specification monocrystalline substrates includes a frame assembly 1, a drive assembly 2, a driven assembly 3, a scraper top plate assembly 4, a scraper assembly 5, a cylinder clamping assembly 6, and a chain 8. The drive assembly and the driven assembly are connected by the chain 8. The scraper assembly 5 is connected to the chain. A scraper top plate assembly 4 is connected to one end of the frame assembly. A cylinder clamping assembly 6 is arranged on the frame assembly for clamping monocrystalline substrates. The cylinder clamping assembly includes multiple sets of cylinders in different positions to achieve clamping of monocrystalline substrates of different specifications.

[0044] In some embodiments, the scraper top plate assembly 4 includes a buffer plate 4-6, a spring 4-11, and a spring fixing seat 4-1. One end of the spring is connected to the buffer plate, and the other end is connected to the upper surface of the buffer plate. The upper surface of the buffer plate is connected to the guide rod fixing plate 4-2 of the guide rod 4-4 on both sides. The guide rod passes through the linear bearings 4-12 in the holes on both sides of the bushing seat 4-10 and is connected to the guide rod limiting block 4-3. The linear bearings 4-12 are installed in the bearing mounting holes on both sides of the bushing seat in a centrally positioned manner.

[0045] In some embodiments, the spring fixing seat 4-1 and the bushing seat 4-10 are mounted on the buffer mounting plate 4-7; bushing baffles 4-9 are mounted on both sides of the bushing seat 4-10, and the buffer mounting plate 4-7 is mounted on the linear guide rail 1-10. In addition, the scraper top plate assembly 4 also includes an adjusting shim 4-5, which is placed between the buffer mounting plate 4-7 and the material seat limiting block 4-8 ​​for adjusting the position of the material seat limiting block 4-8.

[0046] Furthermore, the scraper top plate assembly 4 also includes a material seat limiting block 4-8, located on the side of the buffer mounting plate 4-7.

[0047] In this embodiment of the application, the scraper top plate assembly 4 is used to push the scraper fragments against the buffer plate 4-6 when the scraper scrapes off the material seat fragments. The clamping force of the spring 4-11 is used to clamp the material seat fragments and tape scraped up by the scraper, so as to break the tape between the fragments and the material seat and prevent the tape from sticking to the material seat with the residue, thereby achieving the function of removing the residue and tape.

[0048] Specifically, in the scraper top plate assembly 4, the spring fixing seat 4-1 and the bushing seat 4-10 are bolted to the underside of the buffer mounting plate 4-7, and the bushing baffle 4-9 is bolted to both sides of the bushing seat 4-10; the guide rod 4-4 is fixed to the buffer plate 4-6 by the guide rod fixing plate 4-2 and bolts; the guide rod 4-4 passes through the linear bearing 4-12 by center positioning and is installed inside the linear bearing 4-12; the end of the guide rod 4-4 is positioned by the guide rod limiting block 4-3 and the guide rod limiting block 4-3 is fastened with bolts; the material seat limiting block 4-8 ​​is bolted to the side of the buffer mounting plate 4-7; the spring fixing seat 4-1 is bolted to the buffer mounting plate 4-7. Below: Guide rod fixing plate 4-2 is fixed to buffer plate 4-6 by bolts; guide rod limiting block 4-3 is fixed to the end of guide rod 4-4 by bolts; buffer plate 4-6 is connected to guide rod fixing plate 4-2 by bolts and installed to the end of guide rod 4-4; buffer mounting plate 4-7 is installed to slider of linear guide rail 1-10 by bolts; material seat limiting block 4-8 ​​is installed to the side of buffer mounting plate 4-7 by bolts; bushing baffle 4-9 is installed to both sides of bushing seat by bolts; bushing seat 4-10 is installed under buffer mounting plate 4-7 by bolts; spring 4-11 is placed in the center hole of bushing seat 4-10 by center hole positioning.

[0049] In some embodiments, the scraper assembly includes a scraper mounting base 5-2, which is mounted on the slider of the linear guide rail 1-10 on the frame assembly 1. A set of scrapers 5-1 are mounted on each side of the scraper mounting base for repeatedly scraping the single crystal material residue twice.

[0050] The scraper mounting base 5-2 is connected at both ends to the chain connector 5-4 for connecting the chain via the chain connecting shaft 5-5 and is secured with nuts; slider blocks 5-3 are arranged at both ends of the scraper mounting base 5-2.

[0051] Specifically, in this application, the scraper 5-1 and the slider block 5-3 are installed on both sides of the scraper mounting base 5-2 by bolts. The chain connector 5-4 is threaded to both sides of the scraper mounting base 5-2 through the chain connecting shaft 5-5 and tightened with nuts. The scraper mounting base 5-2 is installed on the slider of the linear guide rail 1-10 by bolts. The chain connecting shaft 5-5 is threaded to both sides of the scraper mounting base 5-2 and tightened with nuts, connecting the chain connector 5-4.

[0052] In this embodiment, the scraper assembly 5 has a scraper mounting base 5-2 mounted on the slider of the linear guide rail 1-10. The scraper has high positioning accuracy and smooth sliding. A set of scrapers 5-1 are installed on each side of the scraper mounting base 5-2, which can repeatedly scrape off the material residue twice, thereby improving the scraping effect.

[0053] In this embodiment, the cylinder clamping assembly 6 is provided with multiple sets of cylinders 6-7. Through different arrangements of the sets of cylinders 6-7, clamping of material seats of various specifications can be achieved, thereby realizing the function of automatic scraping of single crystal residue from material seats of various specifications.

[0054] In some embodiments, the cylinder clamping assembly 6 includes a jaw transition plate 6-1, a gasket A6-2, a gasket B6-3, jaws A6-4 and B6-5, a cylinder mounting base 6-6, and a cylinder 6-7. The cylinder 6-7 is bolted to both sides of the cylinder mounting base 6-6 for clamping the material seat. Jaws A6-4 and B6-5 are bolted to the jaw transition plate 6-1 and mounted to the cylinder flange plate. Gasket A6-2 is placed on the mounting surface of jaw A6-4 for position adjustment, and gasket B6-3 is placed on the mounting surface of jaw B6-5 for position adjustment. The cylinder mounting base 6-6 is bolted to the base frame 1-2.

[0055] In some embodiments, the frame assembly 1 includes a residue box 1-1, a base frame 1-2, a centering block 1-3, a block connector 1-4, a collection box 1-5, a collection box connector 1-6, a dead block 1-7, a limit block A1-8, a limit block B1-9, a linear guide rail 1-10, a switch bracket 1-11, and a proximity switch 1-12.

[0056] The linear guide rail 1-10 is bolted to the upper part of the base frame 1-2; the limit blocks A1-8 and B1-9 are bolted to both sides of the linear guide rail 1-10 on the base frame 1-2 to limit the slider of the linear guide rail 1-10; the dead block 1-7 and the switch bracket 1-11 are bolted to the upper part of the base frame 1-2, and the proximity switch 1-12 is fastened to the switch bracket 1-11 with a nut; the centering connector 1-4 is bolted to both sides of the base frame 1-2, and the centering block 1-3 and the collection box 1-5 are bolted to the top and middle of the block connector 1-4, respectively; the dead block 1-7 is used to limit the position of the material seat when scraping material, following the movement of the scraper; the centering block 1-3 is used for the robot to center the material seat and is bolted to the upper part of the block connector 1-4.

[0057] In this embodiment, the residue box 1-1 is installed in the middle of the stop block connector 1-4 by bolt fastening, and is used to collect water stains and residues dripping from the material seat; the stop block connector 1-4 is installed on both sides of the base frame 1-2 by bolt fastening, and the base frame 1-2 serves to support the device.

[0058] In this embodiment of the application, the material collection box 1-5 is connected to the middle position of the base frame 1-2 by the material collection box connection 1-6 fastened with bolts, and is used to collect material residue.

[0059] In this embodiment of the application, the collection box connection 1-6 is connected to the middle position of the base frame 1-2 by bolt fastening to the collection box 1-5.

[0060] In this embodiment, the base frame 1-2 of the frame component 1 is a high-strength square tube welded part, which strengthens the rigidity and strength of the overall equipment. The running track is a linear guide rail 1-10, which ensures the stability of the equipment during operation. The equipment is equipped with a material seat centering block 1-3. After the robot grabs the material seat, it uses the centering block 1-3 for secondary positioning, which greatly reduces the occurrence of accidents where the material seat crashes into the equipment.

[0061] In some embodiments, the drive assembly 2 includes a motor swing limit block 2-1, a motor connecting shaft 2-2, a gasket 2-3, a spacer A 2-4, a spacer B 2-5, a drive sprocket 2-6, a shaft end baffle 2-7, a shaft limiter 2-8, a main motor mounting base 2-9, a main drive shaft 2-10, an overload protection switch bracket 2-11, a micro switch 2-12, a flat key A 2-13, a flat key B 2-14, a motor 2-15, a spring 2-16, and a bearing with a mounting seat 2-17; Motor 2-15 and main drive shaft 2-10 are installed with axial center positioning. Main motor mounting base 2-9 is connected to motor 2-15 by bolt fastening. Spacer A2-4 is installed on one side of main motor mounting base 2-9 with center positioning. Bearing 2-17, spacer B2-5, and drive sprocket 2-6 are installed sequentially at one end of main drive shaft with center positioning, and the other end is the same. Both ends of main drive shaft 2-10 are fastened with shaft end baffles 2-7 by bolt fastening. Shaft limiting component 2-8 is fastened to main motor mounting base 2-9 by bolt fastening. A set of springs 2-16 and washers 2-3 are installed on the upper and lower sides of the oblong hole of main motor mounting base 2-9, and springs 2-16 are compressed by nuts. Motor connecting shaft 2-2 is connected in series with the mounting hole center positioning and fixed at the opening position of motor swing limiting block 2-1 by nuts.

[0062] In the drive assembly 2, the motor swing limit block 2-1 is installed on the side of the base frame 1-2 by bolt fastening; the motor connecting shaft 2-2 is connected in series by center positioning through mounting holes and fixed at the opening position of the motor swing limit block 2-1 by nuts; the gasket 2-3 is connected in series with the spring through the motor connecting shaft 2-2 to adjust the spring height; the spacer A2-4 is installed on the main drive shaft 2-10 between the motor 2-15 and the bearing 2-17 to limit the motor 2-15; spacer B... 2-5 is sequentially installed on the outer end of the bearing 2-17 with the main drive shaft 2-10 centered; the drive sprocket 2-6 is installed in the middle position of the main drive shaft 2-10 with the shaft center centered; the shaft end baffles 2-7 are installed on both ends of the main drive shaft 2-10 by bolt fastening; the shaft limiter 2-8 is used for collision micro switch and overload protection of motor 2-15; the main motor mounting seat 2-9 is connected to motor 2-15 by bolt fastening; the main drive shaft 2-10 connects motor 2-15, spacer A2-4, bearing 2-17, spacer B2-5 and drive sprocket 2-6 in series with the main drive shaft 2-10 with axial center centered positioning.

[0063] In the drive assembly 2, the overload protection switch bracket 2-11 is connected to the motor swing limit block 2-1 by bolt fastening; the micro switch 2-12 is connected to the overload protection switch bracket 2-11 by bolt fastening; the flat key A 2-13 is placed between the motor 2-15 and the main drive shaft 2-10; the flat key B 2-14 is placed between the drive sprocket 2-6 and the main drive shaft 2-10; the springs 2-16 are respectively placed on both sides of the waist-shaped hole of the main motor mounting seat 2-9, and are connected to the motor swing limit block 2-1 through the motor connecting shaft 2-2; the seated bearing 2-17 is installed on the end face of the base frame 1-2 by bolt fastening.

[0064] In this embodiment, the drive component 2 uses a motor 2-15 and a main drive shaft 2-10 to drive the drive sprocket 2-6, which can stably provide power to the equipment and has a long service life. It is also equipped with a motor overload protection device and a micro switch 2-12, which can effectively reduce the possibility of the motor 2-15 burning out due to current overload, and improve the safety and stability of the equipment.

[0065] In some embodiments, the driven assembly 3 includes a driven wheel support 3-1, a driven shaft 3-2, a spacer 3-3, a driven sprocket 3-4, a shaft end baffle 3-5, a retaining ring for the bore 3-6, and a bearing 3-7. The bearing 3-7 and the retaining ring for the bore 3-6 are installed sequentially in a centrally positioned manner inside the driven sprocket 3-4. A spacer 3-3 is placed on each side of the driven sprocket 3-4, and the driven shaft 3-2 is fixed to the center position of the driven wheel support 3-1 in a centrally positioned manner. One end of the driven shaft 3-2 is fastened to the driven wheel support 3-1 with screws using the shaft end baffle 3-5.

[0066] In the aforementioned driven assembly 3, the driven wheel support 3-1 is installed on the side of the base frame 1-2 by bolt fastening; the driven shaft 3-2 is placed on the driven wheel support 3-1 by center positioning of the shaft hole, and is fixed by bolt fastening through the shaft end baffle 3-5; the spacer 3-3 is placed on the outside of the driven sprocket 3-4 by center positioning; the driven sprocket 3-4 is installed in the middle position of the driven wheel support 3-1 by shaft center positioning; the shaft end baffle 3-5 is used to fix the driven shaft 3-2; the elastic retaining ring 3-6 is placed in the inner groove of the driven sprocket 3-4 to restrict and fix the bearing 3-7; the bearing 3-7 is placed in the groove of the driven sprocket 3-4 by center positioning.

[0067] In this embodiment, the driven component 3 adopts a structure in which a driven sprocket 3-4 is installed on each shaft, which can eliminate the error caused by the tooth profile when matching with the driving sprocket 2-6, and keep the force on the chains on both sides of the equipment consistent.

[0068] In some embodiments, see Figure 8-9As shown, it also includes a protective cover assembly 7, which is arranged at the upper end of the equipment to cover the upper working area, providing protection and dust prevention. It is formed by connecting multiple covers, each corresponding to a specific mechanism, forming a whole. It is installed on the upper end of the frame assembly via cover brackets arranged in corresponding positions. Examples include covers A7-1, B7-2, C7-3, cover bracket A7-4, cover bracket B7-5, cover bracket C7-6, and cylinder cover 7-7. This provides protection for the cylinder clamping assembly, drive assembly, driven assembly, scraper assembly, and scraper top plate assembly. The shape of the covers is arranged according to the shape of the protected components, with the principle of covering the protected components. For example, corresponding to the position of the cylinder clamping assembly are four raised rectangular covers (cylinder cover 7-7), with lower covers B7-2 between and on the outside of the raised rectangular covers. One side of cover B7-2 has cover A7-7 on its outer side. 7-1, the opposite side is the protective cover C7-3. Except for the cylinder protective cover 7-7, the upper ends of the other protective covers and the cylinder protective cover 7-7 are the same. The space for the material feeding seat is reserved in the middle. It can be installed by bolting the bracket and frame assembly. Of course, the protective cover can also be omitted.

[0069] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. It is obvious to those skilled in the art that this utility model is not limited to the details of the above exemplary embodiments, and that it can be implemented in other specific forms without departing from the spirit or basic features of this utility model.

[0070] Therefore, the embodiments should be regarded as exemplary and non-limiting in all respects, and the scope of the present invention is defined by the appended claims rather than the foregoing description. Thus, it is intended to encompass all variations falling within the meaning and scope of the equivalents of the claims within the present invention.

[0071] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A multi-specification single crystal material holder residue scraper, characterized in that, The device includes a frame assembly and a drive assembly and a driven assembly arranged on the frame assembly. The drive assembly and the driven assembly are connected by a chain. A scraper assembly is connected to the chain. A scraper top plate assembly is connected to one end of the frame assembly. A cylinder clamping assembly for clamping the monocrystalline material holder is arranged on the frame assembly. The cylinder clamping assembly includes multiple sets of cylinders in different positions to achieve clamping of monocrystalline material holders of different specifications.

2. The multi-specification single crystal material holder residue scraper according to claim 1, characterized in that, The scraper assembly includes a scraper mounting base, which is mounted on a slider of a linear guide rail on the frame assembly. A set of scrapers is mounted on each side of the scraper mounting base for repeatedly scraping off the single crystal material residue twice.

3. The multi-specification single crystal material holder residue scraper according to claim 2, characterized in that, Both ends of the scraper mounting base are connected to chain connectors for connecting the chain via chain connecting shafts and secured with nuts; slider blocks are arranged at both ends of the scraper mounting base.

4. The multi-specification single crystal material holder residue scraper according to claim 1, characterized in that, The scraper top plate assembly includes a buffer plate, a spring, and a spring fixing seat. One end of the spring, which is installed in the bushing seat, is connected to the buffer plate, and the other end is connected to the upper surface of the buffer plate. Both sides of the upper surface of the buffer plate are connected to the guide rod fixing plate of the guide rod. The guide rod passes through the linear bearings in the holes on both sides of the bushing seat and is connected to the guide rod limiting block. Linear bearings are installed in the bearing mounting holes on both sides of the bushing seat in a centrally positioned manner.

5. The multi-specification single crystal material holder residue scraper according to claim 4, characterized in that, The spring fixing seat and the bushing seat are mounted on the buffer mounting plate; bushing baffles are installed on both sides of the bushing seat, and the buffer mounting plate is mounted on the linear guide rail.

6. The multi-specification single crystal material holder residue scraper according to claim 1, characterized in that, The drive assembly includes a main drive shaft and a motor located on the left side of the frame assembly, and a drive sprocket. The motor is connected to the main drive shaft, the main drive shaft is connected to the drive sprocket, and the drive sprocket is connected to the chain. The drive assembly includes a motor overload protection device and a micro switch.

7. The multi-specification single crystal material holder residue scraper according to claim 6, characterized in that, The driven component includes a driven shaft on the right end of the frame assembly. The driven shaft is arranged radially spaced from the main drive shaft. The driven shaft has a driven sprocket, which is connected to the chain.

8. The multi-specification single crystal material holder residue scraper according to claim 1, characterized in that, The framework components include: Dead stop, connected to the upper surface of the base frame, is used to limit the position of the single crystal material holder as it moves with the scraper during scraping; Limiting block A is installed on both sides of the linear guide rail on the base frame to limit the left side of the slider of the linear guide rail; Limiting block B is installed on both sides of the linear guide rail on the base frame to limit the right side of the slider of the linear guide rail.

9. The multi-specification single crystal material holder residue scraper according to claim 8, characterized in that, The frame assembly includes a centering block for aligning the robot's material holder, which is mounted on a block connector, and the block connector is mounted on both sides of the base frame.

10. The multi-specification single crystal material holder residue scraper according to claim 9, characterized in that, The framework components include: A residue box, installed in the middle of the stop block connector, is used to collect water stains and residues dripping from the material seat; The collection box, connected to the middle position of the base frame via a material box connector, is used to collect material residue.

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