Lock catch assembly and reaction cavity

Abstract

The utility model discloses a lock catch assembly and a reaction chamber, the lock catch assembly is used for locking a first part and a second part of the reaction chamber, and the lock catch assembly comprises an adjusting part, a pressing part and an elastic part. The adjusting part is movably connected to the first part and can move in the direction close to or away from the second part. The pressing component is connected to the adjusting component in a sleeving mode, the two ends of the elastic component abut against the pressing component and the second component respectively, and the elastic component applies pressing force close to the first component to the second component. According to the lock catch assembly disclosed by the utility model, the first component and the second component are reliably pressed, so that reliable sealing when the air pressure in the reaction cavity is relatively low is ensured; when the pressure in the reaction cavity is too high, the high pressure in the reaction cavity is released through the elastic deformation of the elastic component, so that explosion caused by too high pressure in the reaction cavity is avoided; the sealing performance of the reaction cavity can be ensured when the pressure in the reaction cavity is low, the pressure can be released in time to avoid explosion when the pressure in the reaction cavity is high, and the air tightness and the safety of the reaction cavity are both considered.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment, and in particular to a locking assembly and a reaction chamber. Background Technology

[0002] In semiconductor processing, it is often necessary to fill the reaction chamber of the process equipment with various reactive gases and maintain the reaction under a low vacuum pressure. The reaction chamber consists of a chamber body and a chamber cover, with the cover fitting over the opening of the chamber body. Since the pressure inside the reaction chamber is low and close to a vacuum, in existing designs, atmospheric pressure is typically used to press the chamber cover onto the chamber body based on the pressure difference between the inside and outside of the reaction chamber, without the need for an additional locking device between the chamber body and the chamber cover.

[0003] However, with changes in processing technology and reaction products, the pressure requirements inside the reaction chamber also vary during the reaction process. As the pressure inside the reaction chamber gradually increases in some reactions, the pressure difference between the inside and outside of the reaction chamber gradually decreases, making it impossible to maintain a proper seal between the chamber cover and the chamber body simply by using atmospheric pressure and the pressure difference inside the reaction chamber. Furthermore, in some reactions, such as MOCVD (Metal-Organic Chemical Vapor Deposition), the temperature inside the reaction chamber is extremely high. This high temperature causes the chamber cover to deform, creating a gap between the cover and the chamber body, further reducing airtightness. If bolts or other fasteners are used to lock the chamber cover and body, the pressure inside the reaction chamber can sometimes exceed atmospheric pressure, depending on the reaction products. Other factors can also cause a rapid increase in pressure within the reaction chamber in a short period. If the chamber body and cover are completely locked in this situation, the high pressure inside the reaction chamber cannot be released in time, posing a risk of explosion. Therefore, a new locking assembly is needed to ensure a tight seal between the chamber body and the chamber cover while also allowing for timely pressure release when the pressure inside the reaction chamber is high. Utility Model Content

[0004] The purpose of this invention is to provide a locking assembly and a reaction chamber.

[0005] To achieve the above objectives, this utility model provides a locking assembly for locking a first component and a second component, the locking assembly comprising:

[0006] An adjusting component is movably connected to the first component and can move in a direction closer to or further away from the first component;

[0007] A connecting rod, the two ends of which are respectively connected to the first component and the adjusting component. The adjusting component is movably connected to the connecting rod and can move relative to the connecting rod in a direction that is closer to or farther from the first component.

[0008] A clamping component is fitted onto the adjusting component;

[0009] An elastic member has its two ends abutting against the clamping member and the second member, respectively, and the elastic member applies a clamping force to the second member toward the first member.

[0010] Optionally, the connecting rod is provided with a first threaded hole, and the adjusting component includes an adjusting bolt, which is engaged with the first threaded hole on the connecting rod.

[0011] Optionally, the locking assembly further includes a movable pin connected to the first component, a connecting rod sleeved on the movable pin, and the connecting rod being rotatable about the axis of the movable pin to switch between a first position connected to the second component and a second position disconnected from the second component.

[0012] Optionally, the locking assembly further includes a first connector, which is fixedly connected to the first component. The movable pin is mounted on the first connector, and the connecting rod is movably connected to the first connector via the movable pin.

[0013] Optionally, the locking assembly further includes a detection component connected to the second component to detect whether the connecting rod is in the first position.

[0014] Optionally, the locking assembly further includes a second connector, which is fixedly connected to the second component. The second connector has a notch that matches the connecting rod. When the connecting rod is inserted into the notch, it is in the first position. The detection component is used to detect whether the connecting rod is inserted into the notch of the second connector.

[0015] Optionally, a mounting through hole is provided on the second connector, the mounting through hole communicating with the notch, and the mounting through hole is used to install the detection component.

[0016] Optionally, the locking assembly further includes a locking component disposed between the connecting rod and the adjusting component to limit the adjusting component and the connecting rod.

[0017] Optionally, a locking component mounting portion is provided at the bottom of the adjusting component, one end of the locking component is connected to the locking component mounting portion of the adjusting component, and the other end of the locking component abuts against the connecting rod.

[0018] Optionally, a pre-tightening member is provided between the pressing member and the adjusting member, the pre-tightening member applying a pre-tightening force to the pressing member so that the pressing member presses the elastic member.

[0019] Optionally, the preload component includes an elastic washer.

[0020] Optionally, the locking assembly further includes a first pressure block that wraps around the periphery of the elastic member.

[0021] Optionally, the locking assembly further includes a second pressure block, which is detachably connected to the top of the first pressure block.

[0022] Optionally, a through hole is provided on the top of the second pressure block.

[0023] This utility model also provides a reaction chamber, comprising:

[0024] The first component has an opening;

[0025] The second component covers the opening on the first component;

[0026] As described above, the locking assembly is used to lock the first component and the second component.

[0027] Optionally, a plurality of the locking assemblies are distributed along the outer periphery of the second component.

[0028] In summary, compared with the prior art, the locking assembly and reaction chamber provided by this utility model have the following beneficial effects:

[0029] The locking assembly of this utility model features a pressing component fitted onto an adjusting component. The adjusting component is connected to the first component of the reaction chamber. An elastic component applies a pressing force to the second component of the reaction chamber, thereby reliably pressing the first and second components together to ensure a reliable seal when the gas pressure inside the reaction chamber is low. Furthermore, when the internal pressure of the reaction chamber is too high, the elastic deformation of the elastic component releases the high pressure inside the reaction chamber, preventing an explosion caused by excessive pressure and resulting in environmental pollution. It ensures the sealing of the reaction chamber at low pressure and promptly releases pressure to prevent an explosion when the pressure inside the reaction chamber is high, thus balancing the airtightness and safety of the reaction chamber. Attached Figure Description

[0030] Figure 1 This is a cross-sectional structural diagram of a locking assembly according to an embodiment of the present invention.

[0031] Figure 2 This is a schematic diagram showing the connecting rod of the locking assembly in the first position.

[0032] Figure 3 This is a schematic diagram showing the connecting rod of the locking assembly in the second position.

[0033] Figure 4This is a cross-sectional structural diagram of the locking assembly according to another embodiment of the present invention.

[0034] Figure 5 This is a schematic diagram of the overall structure of the reaction chamber of this utility model.

[0035] Explanation of reference numerals in the attached figures:

[0036] Locking assembly 10

[0037] Adjustment component 110

[0038] Clamping component 120

[0039] Elastic component 130

[0040] Connecting rod 140

[0041] Activity sales 150

[0042] First connector 160

[0043] Detection component 170

[0044] Second connector 180

[0045] Gap 181

[0046] Locking component 190

[0047] Pre-tightening component 200

[0048] First pressing block 210

[0049] Second pressing block 220

[0050] Reaction chamber 30

[0051] First component 310

[0052] Second component 320 Detailed Implementation

[0053] The following will be combined with the appendix in the embodiments of this utility model. Figure 1 ~Attached Figure 5 The technical solutions, structural features, objectives and effects achieved in the embodiments of this utility model are described in detail.

[0054] It should be noted that the accompanying drawings are in a very simplified form and use non-precise proportions. They are only used to facilitate and clarify the illustration of the embodiments of this utility model, and are not intended to limit the implementation conditions of this utility model. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportional relationship, or adjustments to the size should still fall within the scope of the technical content disclosed in this utility model, provided that they do not affect the effects and objectives that this utility model can produce.

[0055] It should be noted that in this invention, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only the expressly listed elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus.

[0056] like Figure 5 As shown, this utility model provides a locking assembly 10 for locking a first component 310 and a second component 320. In this embodiment, the first component 310 and the second component 320 are taken as the cavity and cavity cover of the reaction chamber 30, respectively. The first component 310 and the second component 320 are not limited to the cavity and cavity cover of the reaction chamber, but can also be any other two parts of the structure that need to be locked. In this embodiment, as... Figure 1 As shown, the locking assembly 10 includes an adjusting component 110, a connecting rod 140, a pressing component 120, and an elastic component 130. The adjusting component 110 is used to adjust the relative distance between the pressing component 120 and the first component 310. The two ends of the elastic component 130 abut against the pressing component 120 and the second component 320, respectively. During operation, the elastic component 130 is always in a compressed state, meaning that the elastic component 130 exerts a force from the pressing component 120 towards the second component 320, moving closer to the first component 310.

[0057] Adjusting member 110 is movably connected to first member 310, and pressing member 120 is sleeved on the outside of adjusting member 110. Second member 320 is located between first member 310 and pressing member 120. The upper end of elastic member 130 abuts against pressing member 120, and its lower end abuts directly or indirectly against second member 320, thereby applying a pressing force to second member 320 toward first member 310 to press second member 320 tightly against first member 310.

[0058] When the gas pressure inside the reaction chamber 30 is lower than the external atmospheric pressure, the second component 320 is pressed tightly against the first component 310 by the clamping action of the elastic component 130, thereby ensuring a good seal between the two and preventing environmental pollution caused by process gas leakage during the process, thus promoting green production in enterprises. Because the elastic component 130 is elastic, the first component 310 and the second component 320 are not rigidly locked together. As the reaction in the reaction chamber 30 proceeds, if the gas pressure in the reaction chamber 30 rises or even exceeds atmospheric pressure, the gas pressure in the reaction chamber 30 will cause the second component 320 to move away from the first component 310 to achieve pressure relief, preventing the high pressure in the reaction chamber 30 from failing to be relieved in time and causing an explosion.

[0059] The adjusting component 110 can move in a direction close to or away from the first component 310. By adjusting the component 110 relative to the first component 310, the preload applied by the elastic component 130 to the second component 320 and the pressing component 120 in the initial state can be changed. The required preload can be adjusted according to different processes in the reaction chamber 30, so that the locking assembly 10 of this invention can be applied to the air pressure conditions of different processes in the reaction chamber 30, thus expanding the applicability of the locking assembly 10.

[0060] The two ends of the connecting rod 140 are respectively connected to the first component 310 and the adjusting component 110. In this embodiment, the adjusting component 110 is indirectly connected to the first component 310. Since the adjusting component 110 needs to move relative to the first component 310 to adjust the preload of the elastic component 130, a movable connection structure between the adjusting component 110 and the connecting rod 140 is provided. The adjusting component 110 is movably connected to the connecting rod 140, and the adjusting component 110 can move along the axial direction of the connecting rod 140 to move closer to or further away from the first component 310. Since the adjusting component 110 needs to move relative to the first component 310, if the adjusting component 110 is directly connected to the first component 310, a structure that allows movement, such as a threaded hole, needs to be provided on the first component 310. However, in the embodiment where the adjusting component 110 and the first component 310 are connected via the connecting rod 140, there is no need to provide a connection structure between the adjusting component 110 and the first component 310 on the first component 310, thus simplifying the structure of the first component 310. The connecting rod 140 and the first component 310 can be fixedly connected, such as by welding; the connecting rod 140 and the first component 310 can also be movably connected, for example, the connecting rod 140 and the first component 310 can be movably connected by a pin. This is just an example and is not a limitation.

[0061] Specifically, in this embodiment, the connecting rod 140 is provided with a first threaded hole, and the adjusting component 110 includes an adjusting bolt, which is engaged with the first threaded hole on the connecting rod 140. The adjusting bolt can be moved along the axial direction of the connecting rod 140 by rotating it. The adjusting component 110 and the connecting rod 140 are connected by a threaded pair, resulting in a simple and reliable connection structure, and offering the advantage of high precision in adjusting the position of the adjusting component 110 relative to the connecting rod 140. Furthermore, the clamping member 120 is arranged around the adjusting member 110. When the adjusting member 110 moves along the axial direction of the connecting rod 140 to adjust the relative position between the two, the adjusting member 110 together with the clamping member 120 moves downward until the lower step surface of the clamping member 120 abuts against the upper end surface of the connecting rod 140. At this point, the adjusting member 110 and the clamping member 120 can no longer move downward along the axial direction of the connecting rod 140. That is, the relative position between the adjusting member 110 and the clamping member 120 and the connecting rod 140 is locked. After the position is locked, it can help improve the stability of the locking assembly when locking and avoid relative displacement between the clamping member 120 and the connecting rod 140 after locking, so that the preload of the elastic member 130 changes with the change of the relative position between the two.

[0062] In a preferred embodiment, the locking assembly 10 further includes a movable pin 150. Both ends of the movable pin 150 are directly or indirectly movably connected to the first component 310. For example... Figure 2 and Figure 3 As shown, in this embodiment, the movable pin 150 is indirectly connected to the first component 310. The connecting rod 140 is sleeved on the middle portion of the movable pin 150, allowing the connecting rod 140 to rotate about the axis of the movable pin 150, so that it can be in a first position connected to the second component 320 (e.g., ...). Figure 2 (as shown) and the second position detached from the second component 320 (as shown) Figure 3 Switch between (as shown).

[0063] As a preferred embodiment, continue as follows Figure 2 and Figure 3As shown, the locking assembly 10 also includes a first connector 160. The first connector 160 is fixedly connected to the first component 310, and the movable pin 150 is mounted on the first connector 160. This eliminates the need to drill a hole in the first component 310 for mounting the movable pin 150. Drilling a hole for the movable pin 150 would require penetrating the outer surface of the first component 310, which would require high precision and be difficult. Drilling a hole directly in the first component 310 would increase the processing cost of the first component 310, and if the hole does not meet the precision requirements, it would also lead to problems with the first component 310. 0 is scrapped due to drilling failure; by setting the first connector 160, only the connecting hole for installing the first connector 160 needs to be opened on the first component 310. The connecting hole can be a threaded hole, which can be directly drilled and tapped along the surface perpendicular to the first component 310. The drilling difficulty and precision requirements of the threaded hole for connecting with the first connector 160 are lower than those for drilling the movable pin 150. Therefore, by introducing the first connector 160 to connect the movable pin 150 and the first component 310, the manufacturing process of the first component 310 is simplified. The connecting rod 140 is movably connected to the first connector 160 through the movable pin 150, so that the connecting rod 140 can rotate around the movable pin 150 to change the relative position of the movable pin 150 and the second component 320, realizing a quick switch between the first position and the second position. In other embodiments, the connecting rod 140 can also be fixedly connected to the first component 310 or fixedly connected to the first connector 160, which is not limited here.

[0064] In this embodiment, the movable pin 150 is indirectly connected to the first component 310 via the first connector 160. In other embodiments, an opening for mounting the movable pin 150 may be directly formed on the first component 310, as long as the movable pin 150 can be connected to the first component 310, and no limitation is imposed here.

[0065] In a preferred embodiment, the locking assembly 10 further includes a detection component 170, which is directly or indirectly connected to the second component 320 to detect whether the connecting rod 140 is in the first position. In some reaction chambers 30, a drive assembly is typically used to drive the second component 320 and the first component 310 to open. When the detection component 170 detects that the second component 320 is in the first position, the locking assembly 10 is in a state of locking the first component 310 and the second component 320. At this time, the drive assembly receives a signal that it cannot drive the second component 320 away from the first component 310, so as to avoid damaging the locking assembly 10 or even the drive assembly or the reaction chamber 30 when forcibly opening the second component 320. By setting the detection component 170, the safety of the locking assembly 10 and the reaction chamber 30 as a whole is ensured.

[0066] The locking assembly 10 also includes a second connector 180. The second connector 180 is used for a fixed connection to the second component 320, wherein in this embodiment, as shown... Figure 3 As shown, multiple through holes are provided on the second connector 180, and corresponding threaded holes are provided on the second component 320, thereby realizing a detachable connection between the second connector 180 and the second component 320. In other embodiments, the second connector 180 may also be welded to the second component 320 or connected in other ways, which is not limited here, as long as the connection between the two can be achieved.

[0067] The second connector 180 has a notch 181 that matches the connecting rod 140 (e.g., Figure 3 (As shown). When the connecting rod 140 is inserted into the notch 181, it is in the first position to lock the first component 310 and the second component 320. The detection component 170 is used to detect whether the connecting rod 140 is inserted into the notch 181 of the second connector 180. The detection component 170 can be an infrared sensor or other sensors, as long as they can detect whether the connecting rod 140 is in the notch 181, and there is no limitation here. In this embodiment, a mounting through hole for the detection component 170 to be inserted is provided on one side of the notch 181 of the second connector 180, and the mounting through hole communicates with the notch 181. The detection component 170 is inserted into the mounting through hole to detect whether the connecting rod 140 is inserted into the notch 181. In other embodiments, the detection component 170 can also be installed on the second connector 180 in other ways, and there is no limitation here.

[0068] When the connecting rod 140 is located as follows Figure 2 In the first position shown, the connecting rod 140 is inserted into the notch 181 on the second connector 180, and the locking assembly 10 is in a state of locking the first component 310 and the second component 320. The adjusting component 110 and the pressing component 120 are connected to the first component 310 via the connecting rod 140, the movable pin 150, and the first connector 160. The upper end of the elastic component 130 abuts against the pressing component 120. The lower end of the elastic component 130 presses against the second connector 180, and the second connector 180 is connected to the second component 320 of the reaction chamber 30, thereby enabling the locking assembly 10 to press the second component 320 against the first component 310. And because the elastic component 130 is always in a compressed state, it can always ensure that the second component 320 is pressed against the first component 310. If the gas pressure in the reaction chamber 30 is too high, the high pressure will push the second component 320 to move away from the first component 310 to release the pressure, ensuring that the pressure in the reaction chamber 30 is released in time to avoid an explosion due to excessive pressure.

[0069] After the connecting rod 140 rotates around the movable pin 150 and disengages from the notch 181, the connecting rod 140 is now positioned as follows: Figure 3In the second position shown, the locking assembly 10 is not locking the first component 310 and the second component 320, and the reaction chamber 30 can be opened freely for maintenance or other operations.

[0070] like Figure 4 As shown in the embodiment, the locking assembly 10 further includes a locking member 190. The locking member 190 is disposed between the connecting rod 140 and the adjusting member 110 to limit the adjusting member 110 and the connecting rod 140. In embodiments where the locking member 190 is not provided between the adjusting member 110 and the connecting rod 140, the relative position between the adjusting member 110 and the connecting rod 140 cannot be determined if the pressing member 120 surrounding the adjusting member 110 does not move axially along the connecting rod 140 until the bottom of the pressing member 120 abuts against the upper end face of the connecting rod 140. The top of the elastic member 130 abuts against the pressing member 120 surrounding the adjusting member 110, and the relative position between the adjusting member 110 and the connecting rod 140 affects the degree to which the elastic member 130 is pressed, resulting in different magnitudes of the pressing force applied by the elastic member 130 to the second member 320.

[0071] Different processes in the reaction chamber 30 require different clamping forces on the elastic component 130. To ensure that the clamping force of the elastic component 130 is controllable, in this embodiment, a locking component 190 is provided between the adjusting component 110 and the connecting rod 140. The locking component 190 is arranged along the axial direction of the adjusting component 110. Locking components 190 of different lengths protruding from the adjusting component 110 are selected according to the required clamping force of the elastic component 130. When the locking component 190 located at the top of the adjusting component 110 abuts against the connecting rod 140, it means that the adjusting component 110 has reached the predetermined position. At this time, the degree of clamping of the elastic component 130 is also determined accordingly, and the output clamping force meets the expected requirements.

[0072] A locking component mounting part is provided at the bottom of the adjusting component 110. One end of the locking component 190 is connected to the adjusting component 110 through the locking component mounting part, and the other end of the locking component 190 abuts against the connecting rod 140 to achieve positioning between the adjusting component 110 and the connecting rod 140.

[0073] In a preferred embodiment, the locking component mounting portion is a second threaded hole located at the center of one end of the adjusting component 110. The locking component 190 is a stud capable of being inserted into the second threaded hole. The length of the locking component 190 protruding from the bottom of the adjusting component 110 is changed by rotating the locking component 190 and the adjusting component 110. One end of the locking component 190 is threadedly connected to the second threaded hole of the adjusting component 110, and the other end of the locking component 190 protrudes from the adjusting component 110 to extend into the first threaded hole of the connecting rod 140. The portion of the locking component 190 extending into the first threaded hole does not engage with the internal thread of the first threaded hole, but only abuts against the bottom of the first threaded hole to achieve position locking between the adjusting component 110 and the connecting rod 140. When the elastic component 130 needs to provide a larger clamping force, the locking component 190 is screwed into the adjusting component 110 along the axial direction, allowing the adjusting component 110 to be inserted deeper into the connecting rod 140. In this way, the elastic member 130 is compressed by a greater amount, resulting in a greater clamping force output by the elastic member 130. Conversely, when a smaller clamping force is required from the elastic member 130, the locking member 190 is screwed out of the adjusting member 110 along the axial direction of the adjusting member 110, making the overall assembly formed by the adjusting member 110 and the locking member 190 longer. As a result, when the locking member 190 abuts against the connecting rod 140, the elastic member 130 is compressed by a smaller amount, resulting in a smaller clamping force output by the elastic member 130.

[0074] Before the locking assembly 10 locks the first component 310 and the second component 320 of the reaction chamber 30, the inside of the reaction chamber 30 is under normal pressure. After the locking assembly 10 locks the first component 310 and the second component 320, air is evacuated from the reaction chamber 30, and the air pressure gradually decreases, while the air pressure outside the reaction chamber 30 remains at normal pressure. Under the action of atmospheric pressure, the second component 320 is pressed against the first component 310, increasing the distance between the second component 320 and the pressing component 120, and reducing the compression of the elastic component 130. In extreme cases, the elastic component 130 is not compressed at all. In this case, the locking assembly 10 does not apply a pressing force to the second component 320, and the sealing effect between the second component 320 and the first component 310 cannot be ensured. To avoid this situation, in a preferred embodiment, such as Figure 1 and Figure 4 As shown, a pre-tightening component 200 is provided between the pressing component 120 and the adjusting component 110. The pre-tightening component 200 applies a pre-tightening force to the pressing component 120 so that the pressing component 120 presses the elastic component 130. This ensures that when the second component 320 is pressed against the first component 310, the pre-tightening force applied by the pre-tightening component 200 to the pressing component 120 can still press the elastic component 130 against the second component 320, ensuring that the elastic component 130 is always in a compressed state and improving the reliability of the locking assembly 10 when locking.

[0075] In this embodiment, the pretensioning component 200 includes an elastic washer. As a standard part, the elastic washer can improve the versatility of the pretensioning component 200.

[0076] In this embodiment, the locking assembly 10 further includes a first pressing block 210, which is disposed around the elastic member 130. The first pressing block 210 increases the contact area between the elastic member 130 and the second member 320 or the second connector 180, making the transmission of the clamping force more stable. Specifically, the first pressing block 210 encloses the elastic member 130. The bottom of the first pressing block 210 extends to the area between the elastic member 130 and the second member 320 or the second connector 180; that is, the elastic member 130 is connected to the second member 320 or the second connector 180 through the first pressing block 210, but the elastic member 130 itself is not directly connected to the second member 320 or the second connector 180.

[0077] The locking assembly 10 also includes a second pressure block 220, which is detachably connected to the top of the first pressure block 210. The second pressure block 220 and the first pressure block 210 are connected to form an enclosing structure that surrounds the adjusting component 110, the pressing component 120, and the elastic component 130, thereby protecting these structures and improving the reliability of the locking assembly 10.

[0078] In this embodiment, a through hole is provided at the top of the second pressure block 220. When the second pressure block 220 is installed above the first pressure block 210, the through hole at the top of the second pressure block 220 is positioned opposite to the adjusting component 110. The adjusting component 110 can be adjusted through the through hole at the top of the second pressure block 220 to change the relative position between the adjusting component 110 and the connecting rod 140. For example, in an embodiment where the adjusting component 110 is an adjusting bolt, a wrench can be passed through the through hole at the top of the second pressure block 220 to rotate the adjusting bolt. By providing a through hole at the top of the second pressure block 220, the adjusting component 110 can be adjusted without removing the second pressure block 220 from the first pressure block 210, simplifying the adjustment operation and improving adjustment efficiency.

[0079] like Figure 5 As shown, the present invention also provides a reaction chamber 30, including a first component 310, a second component 320 and a locking assembly 10 as described above.

[0080] In this embodiment, the first component 310 is used as the cavity body of the reaction chamber 30, and the second component 320 is used as the cavity cover for illustration. In other embodiments, the first component 310 can also be used as the cavity cover of the reaction chamber 30, and the second component 320 can be used as the cavity body. Alternatively, the first component 310 and the second component 320 can be used as two parts that need to be connected in the reaction chamber 30, and there is no restriction on which component the first component 310 and the second component 320 are in the reaction chamber 30.

[0081] The first component 310, which serves as the cavity body, has an opening. The second component 320, which serves as the cavity cover, closes to the opening on the cavity body. The locking assembly 10 is used to lock the cavity body and the cavity cover. When it is necessary to insert or remove an object into the cavity through the opening, the locking assembly 10 is opened to release the lock between the cavity cover and the cavity body, allowing the cavity cover to detach from the cavity body.

[0082] In this embodiment, multiple locking assemblies 10 are distributed along the outer periphery of the cavity cover. Preferably, the multiple locking assemblies 10 are evenly distributed along the circumference of the cavity cover to press the cavity cover and the cavity body as uniformly as possible, thereby improving the airtightness between the cavity body and the cavity cover. In this embodiment, taking a circular cavity as an example, a locking assembly 10 is provided at 90° intervals along its circumference. In other embodiments, the cavity body can also be square or other shapes, which are not limited here. Three or five locking assemblies 10 can also be provided along the circumference of the cavity body, which are not limited here, as long as locking and sealing can be achieved.

[0083] Although the present invention has been described in detail through the above preferred embodiments, it should be understood that the above description should not be considered as a limitation of the present invention. Various modifications and substitutions to the present invention will be apparent to those skilled in the art after reading the above content. Therefore, the scope of protection of the present invention should be defined by the appended claims.

Claims

1. A locking assembly, characterized in that, For locking the first component and the second component, the locking assembly includes: An adjusting component is movably connected to the first component and can move in a direction closer to or further away from the first component; A connecting rod, the two ends of which are respectively connected to the first component and the adjusting component. The adjusting component is movably connected to the connecting rod and can move relative to the connecting rod in a direction that is closer to or farther from the first component. A clamping component is fitted onto the adjusting component; An elastic member has its two ends abutting against the clamping member and the second member, respectively, and the elastic member applies a clamping force to the second member toward the first member.

2. The locking assembly as described in claim 1, characterized in that, The connecting rod is provided with a first threaded hole, and the adjusting component includes an adjusting bolt, which is engaged with the first threaded hole on the connecting rod.

3. The locking assembly as described in claim 1, characterized in that, The locking assembly further includes a movable pin connected to the first component, a connecting rod sleeved on the movable pin, and the connecting rod being rotatable about the axis of the movable pin to switch between a first position connected to the second component and a second position disconnected from the second component.

4. The locking assembly as described in claim 3, characterized in that, The locking assembly further includes a first connector, which is fixedly connected to the first component. The movable pin is installed on the first connector, and the connecting rod is movably connected to the first connector through the movable pin.

5. The locking assembly as described in claim 3, characterized in that, The locking assembly further includes a detection component connected to the second component to detect whether the connecting rod is located in the first position.

6. The locking assembly as described in claim 5, characterized in that, The locking assembly further includes a second connector, which is fixedly connected to the second component. The second connector has a notch that matches the connecting rod. When the connecting rod is inserted into the notch, it is in the first position. The detection component is used to detect whether the connecting rod is inserted into the notch of the second connector.

7. The locking assembly as described in claim 6, characterized in that, A mounting through hole is provided on the second connector, which communicates with the notch and is used to install the detection component.

8. The locking assembly as claimed in claim 1, characterized in that, The locking assembly further includes a locking component, which is disposed between the connecting rod and the adjusting component to limit the adjusting component and the connecting rod.

9. The locking assembly as described in claim 8, characterized in that, A locking component mounting part is provided at the bottom of the adjusting component. One end of the locking component is connected to the locking component mounting part of the adjusting component, and the other end of the locking component abuts against the connecting rod.

10. The locking assembly as claimed in claim 1, characterized in that, A pre-tightening component is provided between the clamping component and the adjusting component. The pre-tightening component applies a pre-tightening force to the clamping component so that the clamping component presses against the elastic component.

11. The locking assembly as claimed in claim 10, characterized in that, The pre-tightening component includes an elastic washer.

12. The locking assembly as claimed in claim 1, characterized in that, The locking assembly further includes a first pressure block that wraps around the periphery of the elastic component.

13. The locking assembly as claimed in claim 12, characterized in that, The locking assembly further includes a second pressure block, which is detachably connected to the top of the first pressure block.

14. The locking assembly as claimed in claim 13, characterized in that, A through hole is provided at the top of the second pressure block.

15. A reaction chamber, characterized in that, include: The first component has an opening; The second component covers the opening on the first component; The locking assembly as described in any one of claims 1-14, wherein the locking assembly is used to lock the first component and the second component.

16. The reaction chamber as described in claim 15, characterized in that, Multiple locking assemblies are distributed along the outer periphery of the second component.

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