Improved crucible upper
By improving the crucible side design, adopting a cylindrical and R-arc structure to connect the crucible side and the crucible support, and combining the design of the inner groove and the crucible base, the problem of silicon leakage caused by corrosion at the joint between the crucible side and the crucible support is solved, improving the sealing performance and the efficiency of impurity gas discharge, and reducing material costs and operating difficulty.
Patent Information
- Application Number
- CN202422918349.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-28
- Publication Date
- 2025-11-11
- Estimated Expiration
- 2034-11-28
AI Technical Summary
In the Czochralski process for single-crystal silicon, the joint between the crucible side and the crucible support is prone to corrosion and enlargement after long-term operation, posing a risk of silicon leakage.
An improved crucible side was designed, including an upper crucible side and a lower crucible side, which adopts a cylindrical and R-arc structure. It is connected by an arc-shaped groove and a protrusion. The inner side wall of the crucible side has crisscrossing slots. Combined with the threaded connection of the crucible base, an anti-bulging coating is used to improve the sealing and the efficiency of impurity gas discharge.
It effectively reduces the risk of silicon leakage at the joints, reduces the accumulation of impurity gases, lowers material costs, and facilitates the removal of the quartz crucible.
Smart Images

Figure CN223535287U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of crucible technology, and in particular to an improved crucible side. Background Technology
[0002] With the continuous development of the world economy, the demand for efficient energy is constantly increasing in modernization. Photovoltaic power generation, as a green energy source and a major energy source for human sustainable development, is receiving increasing attention and vigorous development from countries around the world. Monocrystalline silicon wafers, as a fundamental material for photovoltaic power generation, have a wide market demand. Currently, when pulling monocrystalline silicon rods in a monocrystalline furnace, a crucible is needed to protect the molten silicon formed from the polycrystalline silicon raw material by adding a crucible side.
[0003] The crucible side plays a crucial role in the crystal pulling thermal field, primarily supporting the weight of the quartz crucible and silicon material, making it an indispensable component. However, in the Czochralski process for single-crystal silicon, the crucible side typically needs to be used in conjunction with the crucible support. After prolonged operation, the joint between the crucible side and the support can corrode and widen, posing a risk of silicon leakage.
[0004] Therefore, it is necessary to propose an improved crucible side to solve the above problems. Utility Model Content
[0005] The purpose of this invention is to provide an improved crucible side to solve the problem mentioned in the background art that in the existing Czochralski single crystal silicon process, the crucible side usually needs to be used in conjunction with the crucible support. After long-term operation, the joint between the crucible side and the crucible support will corrode and enlarge, posing a risk of silicon leakage.
[0006] To achieve the above objectives, the present invention provides the following technical solution:
[0007] An improved crucible side includes an upper crucible side and a lower crucible side adapted to the upper crucible side;
[0008] The upper crucible side is a cylindrical structure, with a slot on its inner side wall and an arc-shaped groove along the circumference at the bottom.
[0009] The lower crucible side has an R-arc structure, with an arc-shaped protrusion at the top that matches the arc-shaped groove, and a crucible base connected to the bottom by a thread.
[0010] The arc-shaped protrusion can be engaged in the arc-shaped groove;
[0011] The groove includes a first groove and a second groove. The first groove is horizontally and annularly chiseled, and the second groove is vertically chiseled from the top of the upper crucible side and intersects with the first groove.
[0012] Preferably, the arc-shaped groove is a plurality of arc-shaped grooves that are evenly distributed and interspersed along the circumference, and the arc-shaped protrusion is a plurality of arc-shaped plug-in blocks that are evenly distributed and interspersed along the circumference; the number of arc-shaped grooves and arc-shaped protrusions are the same and they correspond one-to-one.
[0013] Preferably, the arc-shaped groove and the arc-shaped protrusion are integrated with the upper and lower crucible sides, respectively.
[0014] Preferably, multiple slots are provided for both the first and second slots, and the second slots intersect with the first slots one by one.
[0015] Preferably, the width and depth of both the first and second slots are 2 mm.
[0016] Preferably, the bottom of the crucible is provided with a support.
[0017] Preferably, the inner surfaces of the upper and lower sides of the crucible and the bottom plate are all coated with an anti-bulging coating.
[0018] Preferably, the anti-bulging coating is a silicon nitride coating.
[0019] Compared with the prior art, the beneficial effects of this utility model are:
[0020] 1. The bottom of the crucible side is threaded to the crucible base plate, which ensures the stability and sealing of the connection and effectively reduces the risk of silicon leakage at the joint, thereby reducing silicon leakage loss. Since the presence of the crucible base plate seals the bottom of the crucible side, it will affect the removal of the quartz crucible after the furnace is opened. By splicing the crucible side into upper and lower parts, which consists of the upper crucible side and the lower crucible side being inserted, it is convenient to remove the quartz crucible.
[0021] 2. By chiseling crisscrossing grooves on the inner side wall of the upper crucible, gaps can be left between the quartz crucible and the crucible side, allowing impurity gases to be discharged from the grooves in a timely manner, reducing the accumulation of impurity gases, and preventing silicon leakage caused by bulging of the quartz crucible.
[0022] Third, the improved crucible side is divided into upper and lower crucible sides, separating the cylindrical structure and the R-arc structure, giving the crucible side the advantages of simple structure and easy processing; this assembly structure means that if a certain part is damaged, the entire crucible side does not need to be scrapped, thereby reducing material costs. Attached Figure Description
[0023] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0024] Figure 1 This is a schematic diagram of the overall structure of an embodiment of the present utility model;
[0025] Figure 2 This is a schematic diagram of the internal structure of the upper crucible side in an embodiment of this utility model;
[0026] Figure 3 This is a top view of the crucible side in an embodiment of this utility model.
[0027] Figure label:
[0028] 1. Upper crucible side; 11. Arc-shaped groove; 12. Groove opening; 121. First groove opening; 122. Second groove opening;
[0029] 2. Lower crucible side; 21. Arc-shaped protrusion;
[0030] 3. Bottom plate of the crucible;
[0031] 4. Support;
[0032] 5. Anti-bulging coating. Detailed Implementation
[0033] In the following description, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments can be modified in various ways without departing from the spirit or scope of this invention. Therefore, the drawings and description are considered exemplary in nature and not restrictive.
[0034] In the description of this utility model, it should be understood that the terms "longitudinal", "horizontal", "upper", "lower", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use, or the orientation or positional relationship commonly understood by those skilled in the art. They are only used to facilitate the description of this utility model and to simplify the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.
[0035] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.
[0036] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances.
[0037] The following disclosure provides many different embodiments or examples for implementing various structures of this invention. To simplify the disclosure, specific examples of components and arrangements are described below. These are merely examples and are not intended to limit the scope of the invention. Furthermore, reference numerals and / or letters may be repeated in different examples; such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. In addition, examples of various specific processes and materials are provided in this invention, but those skilled in the art will recognize the application of other processes and / or the use of other materials.
[0038] The embodiments of this utility model will now be described in detail with reference to the accompanying drawings.
[0039] like Figures 1-3 As shown, this utility model embodiment provides an improved crucible side, including an upper crucible side 1 and a lower crucible side 2 adapted to the upper crucible side 1;
[0040] The upper crucible side 1 is a cylindrical structure, with a groove 12 on its inner side wall and an arc-shaped groove 11 on the bottom along the circumference;
[0041] The lower crucible side 2 has an R-arc structure, with an arc-shaped protrusion 21 at the top that matches the arc-shaped groove 11, and a crucible base plate 3 threadedly connected to the bottom.
[0042] Among them, the arc-shaped protrusion 21 can be engaged in the arc-shaped groove 11, so that the upper crucible side 1 and the lower crucible side 2 are inserted and fixed.
[0043] The slot 12 includes a first slot 121 and a second slot 122. The first slot 121 is horizontally and annularly chiseled, and the second slot 122 is vertically chiseled from the top of the upper crucible side 1 and intersects with the first slot 121.
[0044] The crucible base 3 and the lower crucible side 2 are connected by threads, which ensures the stability and sealing of the connection and prevents silicon leakage at the joint, thereby reducing silicon leakage loss. Since the presence of the crucible base 3 seals the bottom of the crucible side, it will affect the removal of the quartz crucible after the furnace is opened. In this embodiment, the crucible side is spliced together from top to bottom, consisting of the upper crucible side 1 and the lower crucible side 2, which facilitates the removal of the quartz crucible.
[0045] During crystal pulling, SiO2 in the quartz crucible undergoes a displacement reaction with carbon in the crucible walls at a high temperature of 1500℃~1600℃, generating impurity gases such as CO and CO2. Simultaneously, the softened quartz crucible adheres tightly to the crucible walls, preventing the aforementioned gases from escaping. This leads to frequent bulging of the quartz crucible, posing a risk of silicon leakage. In this embodiment, the crisscrossing grooves 12 on the inner wall of the upper crucible wall 1 create gaps between the quartz crucible and the crucible walls, allowing impurity gases to escape promptly through the grooves 12, reducing their accumulation and preventing silicon leakage caused by bulging of the quartz crucible.
[0046] It should be noted that the groove 12 is only opened on the inner side wall of the upper crucible side 1 in order to reduce the impact of the groove 12 on the crucible side in terms of its performance.
[0047] The improved crucible side is divided into upper crucible side 1 and lower crucible side 2, separating the cylindrical structure and the R-arc structure, giving the crucible side the advantages of simple structure and easy processing; this assembly structure means that if a certain part is damaged, the entire crucible side does not need to be scrapped, thereby reducing material costs.
[0048] In addition, to prevent the gap between the upper and lower crucible sides 1 and 2 from affecting the performance of the crucible sides, the arc-shaped groove 11 consists of multiple arc-shaped grooves that are evenly distributed and intersect each other along the circumference, and the arc-shaped protrusion 21 consists of multiple arc-shaped insertion blocks that are evenly distributed and intersect each other along the circumference. The number of arc-shaped grooves 11 and arc-shaped protrusions 21 is the same and they correspond one-to-one, thus realizing the insertion and fixing of the upper and lower crucible sides 1 and 2.
[0049] Of course, in addition to the above-mentioned insertion method, there can be other insertion methods, such as the bottom of the upper crucible side 1 and the top of the lower crucible side 2 having arc-shaped grooves 11 and arc-shaped protrusions 21 evenly distributed along the circumference, so that the upper crucible side 1 and the lower crucible side 2 can be inserted into each other.
[0050] Specifically, the arc-shaped groove 11 and the arc-shaped protrusion 21 are integrated with the upper crucible side 1 and the lower crucible side 2, respectively, to ensure the stability of the insertion.
[0051] In order to ensure that the impurity gas can be discharged in a timely and sufficient manner, multiple first slots 121 and second slots 122 are provided, and the second slots 122 intersect with the first slots 121 one by one. The impurity gas at the lower end of the crucible can be collected through multiple second slots 122 and discharged into the first slot 121.
[0052] It should be noted that the width and depth of the groove 12 should not be too large or too small. If it is too large, it will affect the use of the crucible side. If it is too small, it will cause impurity gas to be unable to be discharged in time, which will also cause the crucible to bulge and lead to silicon leakage. In this embodiment, the width and depth of the first groove 121 and the second groove 122 are both 2 mm.
[0053] To further prevent silicon leakage caused by bulging of the quartz crucible, the inner surfaces of the upper crucible side 1, lower crucible side 2, and crucible base 3 are coated with an anti-bulging coating 5, thereby isolating the quartz crucible and crucible side and reducing the generation of impurity gases at the source.
[0054] Specifically, the anti-bulging coating 5 is a silicon nitride coating; after the coated crucible side is left to stand and dry, it can be used.
[0055] To facilitate the installation and removal of the crucible base plate 3, and also to support the crucible sides, a support 4 is provided at the bottom of the crucible base plate 3; when installing or removing the crucible base plate 3, the operator can easily tighten or loosen the crucible base plate 3 by holding the support 4.
[0056] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.
Claims
1. An improved crucible side, comprising an upper crucible side (1) and a lower crucible side (2) adapted to said upper crucible side (1), characterized in that: The upper crucible side (1) is a cylindrical structure with a groove (12) on its inner side wall and an arc-shaped groove (11) on the bottom along the circumference. The lower crucible side (2) has an R-arc structure, with an arc protrusion (21) at the top that matches the arc groove (11), and a crucible base plate (3) threaded to the bottom. The arc-shaped protrusion (21) can be engaged in the arc-shaped groove (11); The slot (12) includes a first slot (121) and a second slot (122). The first slot (121) is horizontally and annularly chiseled, and the second slot (122) is vertically chiseled from the top of the upper crucible side (1) and intersects with the first slot (121).
2. The improved crucible side according to claim 1, characterized in that: The arc-shaped groove (11) is a plurality of arc-shaped grooves that are evenly distributed and interspersed along the circumference, and the arc-shaped protrusion (21) is a plurality of arc-shaped plug-in blocks that are evenly distributed and interspersed along the circumference; the number of arc-shaped grooves (11) and arc-shaped protrusions (21) is the same and they correspond one-to-one.
3. The improved crucible side according to claim 2, characterized in that: The arc-shaped groove (11) and arc-shaped protrusion (21) are integrated with the upper crucible side (1) and the lower crucible side (2), respectively.
4. The improved crucible side according to claim 1, characterized in that: The first slot (121) and the second slot (122) each have multiple slots, and the second slot (122) intersects with the first slot (121) one by one.
5. The improved crucible side according to claim 4, characterized in that: The width and depth of the first slot (121) and the second slot (122) are both 2 mm.
6. The improved crucible side according to claim 1, characterized in that: The bottom of the crucible base (3) is provided with a support (4).
7. The improved crucible side according to claim 1, characterized in that: The inner surfaces of the upper crucible side (1), lower crucible side (2) and crucible bottom plate (3) are coated with an anti-bulging coating (5).
8. The improved crucible side according to claim 7, characterized in that: The anti-bulging coating (5) is a silicon nitride coating.