Temperature control installation assembly and process chamber

Abstract

The utility model provides a temperature control installation assembly and a process chamber. The temperature control installation assembly comprises a fixing part used for being fixedly connected with a process chamber, a clamping part used for clamping an over-temperature switch, and an elastic part elastically connected with the clamping part and the fixing part. Wherein the over-temperature switch is used for closing a heating device of the process chamber when a preset temperature is reached; the elastic part can apply thrust towards the surface of the upper cover of the process chamber to the clamping part, and is used for abutting the over-temperature switch against the surface of the upper cover. According to the temperature control mounting assembly and the process chamber, the heating device can be controlled to be closed in time when the upper cover of the process chamber is overheated, and heating of the upper cover is stopped in time, so that the upper cover is prevented from being damaged due to overhigh temperature.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor process equipment, specifically relating to a temperature control mounting component and a process chamber. Background Technology

[0002] Existing process chambers typically consist of a chamber body and a top cover, such as a dielectric window, located on top of the chamber body. Furthermore, to ensure temperature balance within the process chamber, the dielectric window is often heated before the semiconductor process begins, reaching a preset temperature before the process commences. Currently, the circumferential end face of the dielectric window is usually equipped with an annular heating band for heating the dielectric window. Temperature monitoring of the dielectric window is achieved by measuring the temperature of the dielectric window using thermocouples around its outer ring. When the dielectric window temperature approaches the set value, the detected temperature value is fed back to the control unit, which then adjusts the heating power of the heating band accordingly. Specifically, if the temperature reaches or exceeds the set value, the heating power needs to be reduced to zero to ensure that the dielectric window temperature does not exceed the set value.

[0003] However, during the process, the pressure inside the process chamber may fluctuate, causing the medium window located at the top of the process chamber to float. This can lead to unstable connection between the thermocouple and the medium window, potentially resulting in the thermocouple signal loss. Consequently, the control unit may be unable to control the heating power of the heating element based on the medium window temperature. This can cause the heating element to continuously heat the medium window, leading to excessively high medium window temperature, which can affect the process and even damage the medium window and nearby components. Utility Model Content

[0004] This invention at least partially solves the problem that the existing process chamber cover floats, causing untimely temperature detection and resulting in the cover being heated to an excessively high temperature, and provides a temperature control installation component and a process chamber.

[0005] This utility model embodiment provides a temperature control installation component for a process chamber, which includes: a fixing part for fixedly connecting with the process chamber;

[0006] A clamping part is used to clamp an over-temperature switch, which is used to shut down the heating device of the process chamber when a preset temperature is reached.

[0007] The elastic part is elastically connected to the fixing part through the elastic part; the elastic part can apply a thrust toward the upper cover surface of the process chamber to the clamping part, so as to press the over-temperature switch against the upper cover surface of the process chamber.

[0008] Optionally, the clamping part includes a connecting post and a clamping component; the clamping component is used to clamp and fix the over-temperature switch; the connecting post and the fixing part are movably connected along the axial direction of the process chamber, and the connecting post and the clamping component are fixedly connected; the elastic part is sleeved on the connecting post and disposed between the fixing part and the clamping component, and is in a compressed state so as to apply an elastic force along the axial direction of the process chamber to the clamping component.

[0009] Optionally, the clamping component includes a first sub-clamping part, a second sub-clamping part, and a third sub-clamping part; wherein, a sliding connection hole is formed on the side surface of the first sub-clamping part facing the connecting post, and the sliding connection hole extends axially along the process chamber; the connecting post is slidably connected to the sliding connection hole;

[0010] The second sub-clamping part and the third sub-clamping part are respectively disposed on opposite sides of the over-temperature switch and abut against the surface of the over-temperature switch to clamp the over-temperature switch; the second sub-clamping part and the third sub-clamping part are both fixedly connected to the first sub-clamping part.

[0011] Optionally, the fixing part has a mounting through hole corresponding to the connecting post; the connecting post passes through the corresponding mounting through hole and slides in it;

[0012] The clamping part further includes a limiting member corresponding to the connecting post; the limiting member is connected to the end of the corresponding connecting post away from the clamping component, and is located on the side of the fixing part away from the clamping component.

[0013] Optionally, the first sub-clamping portion has adjacent first and second surfaces;

[0014] The first surface faces the second sub-clamping part and has a first threaded hole; the second surface faces the third sub-clamping part and has a second threaded hole.

[0015] The second sub-clamping part has a first through hole corresponding to the position of the first threaded hole; the third sub-clamping part has a second through hole corresponding to the position of the second threaded hole;

[0016] The clamping component further includes a first screw and a second screw; the first screw passes through the first through hole and is threadedly connected to the first threaded hole to fix the second sub-clamping part to the first sub-clamping part; the second screw passes through the second through hole and is threadedly connected to the second threaded hole to fix the third sub-clamping part to the first sub-clamping part.

[0017] Optionally, the second sub-clamping part has a first mating groove, which is disposed on the surface of the second sub-clamping part that abuts against the over-temperature switch, and the shape of the first mating groove corresponds to the shape of the outer surface of the over-temperature switch, so as to fit against the outer surface of the over-temperature switch.

[0018] The third sub-clamping part has a second mating groove, which is disposed on the surface of the third sub-clamping part that abuts against the over-temperature switch. The shape of the second mating groove corresponds to the shape of the outer surface of the over-temperature switch, so as to fit against the outer surface of the over-temperature switch.

[0019] As another technical solution, this utility model also provides a process chamber, which includes: a chamber body, a top cover, a heating device, an over-temperature switch, and a temperature control mounting assembly as described above.

[0020] The top of the chamber body has a chamber opening, and the top cover is pressed against the top surface of the chamber body to seal the process chamber. The heating device is used to heat the top cover. The over-temperature switch is used to control the opening and closing of the heating device. The temperature control mounting assembly is used to press the over-temperature switch against the surface of the top cover.

[0021] Optionally, the process chamber may further include a coil and a coil support; the coil support is used to fix the coil.

[0022] The coil support is pressed onto the upper surface of the upper cover;

[0023] The fixing part of the temperature control mounting assembly is fixedly connected to the coil bracket.

[0024] Optionally, the heating device includes a heating belt and connecting lines; wherein the connecting lines are connected to the heating belt and a power supply respectively, so that the power supply supplies power to the heating belt;

[0025] The heating band is connected to the upper cover and is used to heat the upper cover;

[0026] The over-temperature switch is connected in series in the connection line.

[0027] Optionally, the over-temperature switch includes a switch body, a heated end and two connecting ends disposed on the switch body;

[0028] The heated end is connected to the switch body and is used to contact the surface of the process chamber to conduct heat between the process chamber and the switch body.

[0029] The two connection terminals are respectively electrically connected to the switch body, and the two connection terminals are respectively electrically connected to the heating belt and the power supply.

[0030] The switch body remains conductive when its own temperature has not reached the preset temperature, and disconnects when its own temperature reaches the preset temperature, so as to control the on / off state of the heating belt and its power supply.

[0031] This utility model has the following beneficial effects:

[0032] The temperature control mounting assembly provided in this embodiment includes a fixing part, a clamping part, and an elastic part for connecting the fixing part and the clamping part. The elastic part can apply a pushing force toward the surface of the process chamber to the clamping part, so as to push the clamping part toward the upper cover surface of the process chamber, thereby pressing the over-temperature switch held by the clamping part against the upper cover surface of the process chamber. This ensures that the over-temperature switch can float with the floating of the upper cover, that is, the over-temperature switch can be kept in contact with the upper cover surface. This allows the heating device of the process chamber to be shut off in time when the contact area between the over-temperature switch and the upper cover reaches a preset temperature, thus preventing the upper cover temperature from becoming too high.

[0033] The process chamber provided in this embodiment includes a chamber body and its upper cover, a heating device, an over-temperature switch for controlling the opening and closing of the heating device, and the aforementioned temperature control mounting assembly. Because the temperature control mounting assembly ensures that the over-temperature switch remains in contact with the upper cover of the process chamber, it guarantees that the over-temperature switch will promptly disconnect the heating device and stop heating in a timely manner, thereby preventing damage to the upper cover due to excessive temperature. Attached Figure Description

[0034] Figure 1 A partial schematic diagram of the temperature control mounting assembly provided in an embodiment of this utility model;

[0035] Figure 2 A side view of the temperature control mounting assembly and over-temperature switch provided in an embodiment of this utility model;

[0036] Figure 3 Exploded view of the components of the temperature control mounting assembly provided in this embodiment of the utility model;

[0037] Figure 4 An exploded view of the clamping part provided in an embodiment of this utility model;

[0038] Figure 5 A simplified structural diagram of the process chamber provided in an embodiment of this utility model. Detailed Implementation

[0039] To enable those skilled in the art to better understand the technical solution of this utility model, the present utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0040] It is understood that the specific embodiments and accompanying drawings described herein are merely for explaining the present invention and are not intended to limit the present invention.

[0041] It is understood that, without conflict, the various embodiments of this utility model and the features thereof can be combined with each other.

[0042] It is understood that, for ease of description, the accompanying drawings of this utility model only show the parts related to the embodiments of this utility model, while the parts unrelated to the embodiments of this utility model are not shown in the drawings.

[0043] It is understood that, without conflict, the functions and steps marked in the flowcharts and block diagrams of the embodiments of this utility model may occur in a different order than that marked in the accompanying drawings.

[0044] It is understood that the above embodiments are merely exemplary implementations used to illustrate the principles of this utility model, and the utility model is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of this utility model, and these modifications and improvements are also considered to be within the protection scope of this utility model.

[0045] In order to at least solve one of the existing technical problems, such as Figure 1-4 As shown, this embodiment provides a temperature control mounting assembly 2 for use in a process chamber, which includes a fixing part 21, a clamping part 22, and an elastic part 23.

[0046] The fixing part 21 is used to fix it to the process chamber. The clamping part 22 is used to clamp the over-temperature switch 5, which is used to shut down the heating device of the process chamber when the preset temperature is reached.

[0047] The elastic part 23 is used to elastically connect the clamping part 22 and the fixing part 21. The elastic part 23 can apply a thrust toward the surface of the process chamber to the clamping part 22 to press the over-temperature switch 5 against the surface of the upper cover 1 (e.g., the medium window) of the process chamber, so as to ensure that the over-temperature switch 5 can float with the floating of the upper cover 1. That is, the over-temperature switch 5 can be kept in contact with the surface of the upper cover 1, so that the heating device of the process chamber can be shut off in time when the temperature of the upper cover 1 reaches the preset temperature, thus avoiding the temperature of the upper cover 1 from being too high.

[0048] Specifically, the temperature control mounting assembly 2 can fix the over-temperature switch 5 above the upper cover 1. During the process, the internal pressure of the process chamber changes, causing the upper cover 1, which is located at the top of the process chamber, to float vertically under the combined influence of the internal pressure and the atmospheric pressure. Therefore, in order to ensure that the over-temperature switch 5 is always in contact with the surface of the upper cover 1, the over-temperature switch 5 needs to float synchronously with the upper cover 1. The elastic part 23 proposed in this embodiment can apply a vertical thrust to the clamping part 22, so that the over-temperature switch 5 can move with the up and down floating of the upper cover 1, ensuring that the over-temperature switch 5 remains in contact with the surface of the upper cover 1. This ensures that the temperature of the upper cover 1 can be continuously and stably transferred to the over-temperature switch 5, and when the temperature of the upper cover 1 reaches the preset temperature, the over-temperature switch 5 can disconnect the heating circuit in time, preventing the upper cover 1 and the components near the upper cover 1 from being damaged due to excessive temperature.

[0049] Moreover, since the sealing requirements of the process chamber are high, it is not advisable to open holes on the top cover 1. However, the temperature control mounting component 2 proposed in this embodiment can be used to fasten the over-temperature switch 5 to the top cover 1 without the use of screws or other connecting parts. This can both enable the heating device to be shut off in time when the temperature of the top cover is too high and ensure the sealing of the process chamber.

[0050] Furthermore, in some embodiments, such as Figure 3 As shown, the clamping part 22 includes a connecting post 221 and a clamping member 222. The clamping member 222 clamps and fixes the over-temperature switch 5. The connecting post 221 is movably connected to the fixing part 21 along the axial direction of the process chamber, and the connecting post 221 is fixedly connected to the clamping member 222, allowing the clamping member 222 to move relative to the fixing part 21 along the axial direction of the process chamber. An elastic part 23 is sleeved on the connecting post 221 and disposed between the fixing part 21 and the clamping member 222, and is in a compressed state, so as to continuously apply an elastic force along the axial direction of the process chamber to the clamping member 222, thereby pressing the over-temperature switch 5 against the surface of the process chamber.

[0051] In some specific embodiments, the temperature control mounting assembly 2 can be used to fix the over-temperature switch 5 above the upper cover 1 of the process chamber. Accordingly, the connecting post 221 can be provided to extend vertically so as to be movably connected relative to the fixing part 21 in the vertical direction. Moreover, the elastic part 23 can apply an elastic force in the vertical direction to the clamping member 222, thereby pressing the over-temperature switch 5 against the surface of the upper cover 1.

[0052] In some specific implementation methods, such as Figure 3 As shown, the elastic part 23 is, for example, a spring.

[0053] Furthermore, in some embodiments, the fixing part 21 has mounting through holes corresponding to the connecting posts 221; the connecting posts 221 pass through the corresponding mounting through holes and slide in them. The clamping part 22 also includes limiting members, such as limiting nuts, corresponding to the connecting posts 221; the limiting nuts are connected to the end of the corresponding connecting post 221 away from the clamping member 222, and are located on the side of the fixing part 21 away from the clamping member 222, so as to prevent the connecting posts 221 from separating from the fixing part 21.

[0054] Furthermore, in some embodiments, such as Figure 4 As shown, the clamping component 222 includes a first sub-clamping part 222a, a second sub-clamping part 222b, and a third sub-clamping part 222c. The first sub-clamping part 222a has a sliding connection hole 2221 on its surface facing the connecting post 221, extending axially along the process chamber. The connecting post 221 is slidably connected to the sliding connection hole 2221. The second sub-clamping part 222b and the third sub-clamping part 222c are respectively disposed on opposite sides of the over-temperature switch 5 and abut against the surface of the over-temperature switch 5 to clamp the over-temperature switch 5, thereby restricting the translation of the over-temperature switch 5 in a direction parallel to the surface of the upper cover 1. Both the second sub-clamping part 222b and the third sub-clamping part 222c are fixedly connected to the first sub-clamping part 222a.

[0055] Specifically, such as Figure 3 As shown, the number of connecting posts 221 is, for example, two; correspondingly, the number of elastic parts 23 is also two, and the number of sliding connecting holes 2221 is also two. However, the embodiments of this application are not limited to this, and the number of the aforementioned components and structures can be determined according to actual process requirements.

[0056] Furthermore, in some embodiments, such as Figure 4As shown, the first sub-clamping portion 222a can be, for example, a cube, and has adjacent first and second surfaces. The first surface facing the second sub-clamping portion 222b has a first threaded hole 2222; the second surface facing the third sub-clamping portion 222c has a second threaded hole 2223. The second sub-clamping portion 222b has a first through hole 2224 corresponding to the position of the first threaded hole 2222; the third sub-clamping portion 222c has a second through hole 2225 corresponding to the position of the second threaded hole 2223. The clamping component 222 also includes a first screw 2226 and a second screw 2227; the first screw 2226 passes through the first through hole 2224 and is threadedly connected to the first threaded hole 2222 to fix the second sub-clamping part 222b to the first sub-clamping part 22; the second screw 2227 passes through the second through hole 2225 and is threadedly connected to the second threaded hole 2223 to fix the third sub-clamping part 222c to the first sub-clamping part 222a.

[0057] In some specific embodiments, the second sub-clamping part 222b has a first mating groove, which is disposed on the surface of the second sub-clamping part 222b that abuts against the over-temperature switch 5. The shape of the first mating groove corresponds to the shape of the outer surface of the over-temperature switch 5, so as to fit against the outer surface of the over-temperature switch 5. The third sub-clamping part 222c has a second mating groove, which is disposed on the surface of the third sub-clamping part 222c that abuts against the over-temperature switch 5. The shape of the second mating groove corresponds to the shape of the outer surface of the over-temperature switch 5, so as to fit against the outer surface of the over-temperature switch 5. In this way, when the second sub-clamping part 222b and the third sub-clamping part 222c jointly clamp the over-temperature switch 5, the contact area between the second sub-clamping part 222b and the third sub-clamping part 222c and the over-temperature switch 5 can be increased as much as possible, so as to improve the stability of clamping as much as possible and avoid the over-temperature switch being subjected to excessive clamping force, which could lead to damage to the over-temperature switch shell.

[0058] by Figure 3 Taking the over-temperature switch shown as an example, its main body is cylindrical. Correspondingly, the first mating groove and the second mating groove can be arc-shaped grooves with the same curvature as the outer circumference of the cylinder, so that they can fit against the outer surface of the over-temperature switch 5.

[0059] As another technical solution, this embodiment also provides a process chamber, such as... Figure 5As shown, it includes: a chamber body 3, a top cover 1, a heating device (not shown), an over-temperature switch 5, and a temperature control mounting assembly 2 as described above. The top of the chamber body 3 has a chamber opening; the top cover 1 is pressed against the top surface of the chamber body 3 and completely covers the chamber opening to seal the process chamber. The heating device is used to heat the top cover 1. The over-temperature switch 5 is used to control the opening and closing of the heating device; specifically, the over-temperature switch 5 can turn off the heating device when the temperature of the chamber body 3 reaches a preset temperature. The temperature control mounting assembly 2 is used to press the over-temperature switch 5 against the surface of the top cover 1, so that when the top cover floats up and down due to pressure fluctuations inside the chamber body 3, the over-temperature switch 5 can maintain contact with the top cover 1.

[0060] In some specific embodiments, the process chamber also includes a thermocouple 6 for real-time temperature detection. The sensing end of the thermocouple 6 is connected to the chamber body 3 to collect the temperature of the chamber body 3 and generate an electrical signal containing the temperature information of the chamber body 3. Under normal operating conditions, the transmitting end of the thermocouple 6 is connected to an external control device to send the electrical signal to the external control device, so that the external control device can control the opening and closing state and output power of the heating device according to the detected temperature of the upper cover 1. After the temperature control mounting assembly 2 has been working for a certain period of time, the thermocouple 6 may be damaged or may lose signal communication with the external control device. This would cause the external control device to be unable to control the opening and closing status and output power of the heating device according to the detected temperature of the upper cover 1, resulting in the heating device continuously outputting heat energy. In other words, the heating device would run out of control, causing the process chamber to be continuously heated and its temperature to rise. The over-temperature switch 5 proposed in this embodiment can shut down the heating device in time when the upper cover 1 is heated to the preset temperature. In this way, even if the thermocouple 6 is abnormal, the control of the heating device can be guaranteed, and the runaway of the heating device can be avoided. This can prevent the temperature of the upper cover 1 from becoming too high, so as to avoid damage to the upper cover 1 and the components near the upper cover 1 due to excessive temperature.

[0061] Furthermore, since the over-temperature switch 5 utilizes the inherent physical properties (i.e., thermal strain properties) of the thermistor metal sheet to control the opening and closing of the heating device in response to temperature conditions, compared to the aforementioned method of using thermocouple 6 and external control devices to control the opening and closing status and output power of the heating device, the over-temperature switch 5 has a faster response speed, enabling more timely control of the heating device to stop heating. Moreover, compared to the structure of thermocouple 6, the over-temperature switch 5 has a more stable structure and is less prone to damage; in other words, it can monitor the temperature of the top cover for extended periods.

[0062] In some embodiments, the process chamber further includes a coil and a coil support 4. The coil support 4 is used to fix the coil. The coil support 4 is pressed onto the upper surface of the upper cover 1; the fixing part 21 of the temperature control mounting assembly 2 is fixedly connected to the coil support 4.

[0063] Moreover, such as Figure 1 As shown, thermocouple 6 can also be fixed on coil bracket 4, and the detection end of thermocouple 6 extends to the surface of the upper cover 1.

[0064] Specifically, in some embodiments, the heating device includes a heating element, connecting lines, and a power supply. The connecting lines are connected to both the power supply and the heating element, enabling the power supply to the heating element. The heating element is connected to the upper cover 1 and converts electrical energy into heat energy to heat the upper cover 1 using the thermal effect of the current. An over-temperature switch 5 is connected in series in the connecting lines to control the on / off state of the connecting lines, thereby controlling the power supply to and from the heating element. Specifically, the two connecting terminals 52 of the over-temperature switch 5 are connected in series in the connecting lines.

[0065] In some specific embodiments, the heating band is disposed along the edge of the upper cover 1 and is used to heat the edge area of ​​the upper cover 1.

[0066] In some embodiments, the over-temperature switch 5 includes a switch body 51; specifically, the switch body 51 has two thermistor metal sheets inside; the two thermistor metal sheets remain in contact when their own temperature does not reach a preset temperature, and deform and separate when their own temperature reaches the preset temperature. The over-temperature switch 5 also includes a heated end 53 and two connecting ends 52 disposed on the switch body 51; wherein, the heated end 53 is connected to the two thermistor metal sheets, and the heated end 53 is used to contact the surface of the upper cover 1 to conduct heat between the upper cover 1 and the thermistor metal sheets. The two connecting ends 52 are electrically connected to the two thermistor metal sheets respectively, and the two connecting ends 52 are electrically connected to the heating band and its power supply respectively. In this way, when the temperature of the upper cover 1 is lower than the preset temperature, the two thermistor metal sheets remain closed to maintain the power supply to the heating band; when the temperature of the upper cover 1 is equal to or greater than the preset temperature, the two thermistor metal sheets separate to disconnect the heating band from the power supply. In this way, the opening and closing of the heating device can be controlled.

[0067] The temperature control mounting assembly and the process chamber using the temperature control mounting assembly provided in this embodiment can, by using the elastic part to press the over-temperature switch used to control the opening and closing of the heating device against the surface of the upper cover, realize timely control of the heating device to shut down when the upper cover reaches the preset temperature, and stop heating in time to avoid damage to the upper cover due to excessive temperature.

[0068] It is understood that the above embodiments are merely exemplary implementations used to illustrate the principles of this utility model, and the utility model is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of this utility model, and these modifications and improvements are also considered to be within the protection scope of this utility model.

Claims

1. A temperature control mounting assembly for a process chamber, characterized in that, include: The fixing part is used for fixed connection with the process chamber; A clamping part is used to clamp an over-temperature switch, which is used to shut down the heating device of the process chamber when a preset temperature is reached. The elastic part is elastically connected to the fixing part through the elastic part; the elastic part can apply a thrust toward the upper cover surface of the process chamber to the clamping part, so as to press the over-temperature switch against the upper cover surface of the process chamber.

2. The temperature control mounting assembly according to claim 1, characterized in that, The clamping part includes a connecting post and a clamping component; the clamping component is used to clamp and fix the over-temperature switch. The connecting column and the fixing part are movably connected along the axial direction of the process chamber, and the connecting column is fixedly connected to the clamping member; the elastic part is sleeved on the connecting column and disposed between the fixing part and the clamping member, and is in a compressed state so as to apply an elastic force along the axial direction of the process chamber to the clamping member.

3. The temperature control mounting assembly according to claim 2, characterized in that, The clamping component includes a first sub-clamping part, a second sub-clamping part, and a third sub-clamping part; wherein, a sliding connection hole is provided on the side surface of the first sub-clamping part facing the connecting post, and the sliding connection hole extends axially along the process chamber; the connecting post is slidably connected to the sliding connection hole; The second sub-clamping part and the third sub-clamping part are respectively disposed on opposite sides of the over-temperature switch and abut against the surface of the over-temperature switch to clamp the over-temperature switch; the second sub-clamping part and the third sub-clamping part are both fixedly connected to the first sub-clamping part.

4. The temperature control mounting assembly according to claim 2, characterized in that, The fixing part has a mounting through hole corresponding to the connecting post; the connecting post passes through the corresponding mounting through hole and slides with it. The clamping part further includes a limiting member corresponding to the connecting post; the limiting member is connected to the end of the corresponding connecting post away from the clamping component, and is located on the side of the fixing part away from the clamping component.

5. The temperature control mounting assembly according to claim 3, characterized in that, The first sub-clamping portion has adjacent first and second surfaces; The first surface faces the second sub-clamping part and has a first threaded hole; the second surface faces the third sub-clamping part and has a second threaded hole. The second sub-clamping part has a first through hole corresponding to the position of the first threaded hole; the third sub-clamping part has a second through hole corresponding to the position of the second threaded hole; The clamping component further includes a first screw and a second screw; the first screw passes through the first through hole and is threadedly connected to the first threaded hole to fix the second sub-clamping part to the first sub-clamping part; the second screw passes through the second through hole and is threadedly connected to the second threaded hole to fix the third sub-clamping part to the first sub-clamping part.

6. The temperature control mounting assembly according to claim 3, characterized in that, The second sub-clamping part has a first mating groove, which is disposed on the surface of the second sub-clamping part that abuts against the over-temperature switch, and the shape of the first mating groove corresponds to the shape of the outer surface of the over-temperature switch so as to fit against the outer surface of the over-temperature switch. The third sub-clamping part has a second mating groove, which is disposed on the surface of the third sub-clamping part that abuts against the over-temperature switch. The shape of the second mating groove corresponds to the shape of the outer surface of the over-temperature switch, so as to fit against the outer surface of the over-temperature switch.

7. A process chamber, characterized in that, include: The chamber body, the top cover, the heating device, the over-temperature switch, and the temperature control mounting assembly as described in any one of claims 1-6. The top of the chamber body has a chamber opening, and the top cover is pressed against the top surface of the chamber body to seal the process chamber. The heating device is used to heat the top cover. The over-temperature switch is used to control the opening and closing of the heating device. The temperature control mounting assembly is used to press the over-temperature switch against the surface of the top cover.

8. The process chamber according to claim 7, characterized in that, It also includes a coil and a coil support; the coil support is used to fix the coil. The coil support is pressed onto the upper surface of the upper cover; The fixing part of the temperature control mounting assembly is fixedly connected to the coil bracket.

9. The process chamber according to claim 7, characterized in that, The heating device includes a heating band and connecting lines; wherein the connecting lines are connected to the heating band and a power supply respectively, so that the power supply supplies power to the heating band; The heating band is connected to the upper cover and is used to heat the upper cover; The over-temperature switch is connected in series in the connection line.

10. The process chamber according to claim 9, characterized in that, The over-temperature switch includes a switch body, a heated end and two connecting ends disposed on the switch body; The heated end is connected to the switch body and is used to contact the surface of the process chamber to conduct heat between the process chamber and the switch body. The two connection terminals are respectively electrically connected to the switch body, and the two connection terminals are respectively electrically connected to the heating belt and the power supply. The switch body remains conductive when its own temperature has not reached the preset temperature, and disconnects when its own temperature reaches the preset temperature, so as to control the on / off state of the heating belt and its power supply.

Images