Self-tuning microwave three-pin

Abstract

The utility model discloses a microwave three-pin capable of being automatically tuned, and belongs to the field of MPCVD. Comprising a waveguide cavity, a pin, a shell, a driving assembly and a sealing assembly, the pin is movably arranged in the shell, one end of the pin is connected to the output end of the driving assembly, and the other end of the pin movably enters and exits the waveguide cavity; the sealing assembly is arranged between the waveguide cavity and the pin. Compared with the prior art, the driving assembly is arranged to drive the pin to move up and down, the extending length of the pin in the waveguide cavity is adjusted, manual participation is not needed, and the device has the advantages of being high in automation degree and adjusting efficiency; meanwhile, microwaves can be prevented from leaking in the pin adjusting process, and then injury to personnel is avoided; in addition, in the up-down moving process of the pin, the pin can be guided and protected through the shell. And sealing is carried out through the sealing assembly, microwave leakage is prevented, and the safety of workers is guaranteed.

Description

Technical Field

[0001] This utility model belongs to the field of MPCVD, and specifically relates to an automatically tuned microwave three-pin. Background Technology

[0002] In the field of synthetic diamond, microwave plasma chemical vapor deposition (MPCVD) is commonly used to prepare single-crystal or polycrystalline diamonds, with the plasma generated by microwave excitation. In MPCVD equipment, microwaves are generated by a magnetron and pass sequentially through microwave devices such as a circulator and three pins, ultimately forming a strong electric field within the cavity, which excites the gas to form plasma. During transmission, microwaves inevitably reflect back to the microwave generator (magnetron), potentially damaging it. The circulator's role is to block the reflected microwaves and absorb them in a water-loaded environment. Ideally, reflection should be as low as possible, or even nonexistent. The three pins, by changing the length of the pins extending into the rectangular waveguide, alter the resonant frequency of the rectangular waveguide cavity or the entire microwave system. Combined with other microwave transmission line structures, this enables various tuning functions, minimizing system reflection power.

[0003] However, the existing three-pin adjustment function in rectangular waveguides can only be manually operated by staff, which has the disadvantages of low automation and low adjustment efficiency; and microwave leakage during manual adjustment of the pins can also cause harm to personnel. Utility Model Content

[0004] To solve the above problems, the primary objective of this utility model is to provide an automatically tuned microwave three-pin pin with a high degree of automation and adjustment efficiency.

[0005] Another objective of this invention is to provide an automatically adjustable microwave three-pin pin, which can prevent microwave leakage from causing harm to personnel during pin adjustment.

[0006] Another objective of this invention is to provide an automatically adjustable microwave three-pin mechanism that can prevent microwave leakage during pin adjustment.

[0007] To achieve the above objectives, the technical solution of this utility model is as follows:

[0008] This utility model provides an automatically tuned microwave three-pin pin, comprising:

[0009] Waveguide cavities used for transmitting microwaves;

[0010] Pins used to adjust the resonant frequency of the waveguide cavity;

[0011] A housing used to protect and guide the movement of the pin;

[0012] A drive assembly used to adjust the length of the pin inserted into the waveguide cavity;

[0013] Sealing assembly used for sealing between the pin and the waveguide cavity;

[0014] The pin is movably disposed on the housing, with one end connected to the output end of the drive assembly and the other end movably moving in and out of the waveguide cavity; the sealing assembly is disposed between the waveguide cavity and the pin.

[0015] Furthermore, the housing is provided with a movable cavity, the pin is disposed in the movable cavity, the side wall of the pin is provided with a limiting groove, the side wall of the movable cavity is provided with a mounting hole, and a limiting member is provided in the mounting hole to limit the movement stroke of the pin. The end of the limiting member extends into the limiting groove and can move relative to the limiting groove.

[0016] Furthermore, the limiting groove is a vertically arranged strip groove, and the direction of the strip groove is the same as the direction of movement of the pin.

[0017] Furthermore, the mounting hole is a screw hole, and the limiting member is a screw, which facilitates the installation and removal of the limiting member.

[0018] Furthermore, the sealing assembly includes a first sealing sleeve and a second sealing sleeve. A through hole for the pin to enter and exit is provided on the side wall of the waveguide cavity. The first sealing sleeve is disposed between the through hole and the pin. The second sealing sleeve is disposed in the movable cavity and between the waveguide cavity, the first sealing sleeve, and the housing.

[0019] Furthermore, both the first sealing sleeve and the second sealing sleeve have a through-hole structure, and the pin passes through the first sealing sleeve and the second sealing sleeve vertically and is movably connected to the first sealing sleeve and the second sealing sleeve.

[0020] Furthermore, a positioning step is provided on the side wall of the through hole, and a positioning boss is provided on the outer side wall of the first sealing sleeve. The positioning boss is held in place on the positioning step. The above structure can facilitate the disassembly and assembly of the first sealing sleeve and prevent the first sealing sleeve from sliding into the waveguide cavity.

[0021] Furthermore, the second sealing sleeve is provided with a first sealing end and a second sealing end at one end near the waveguide cavity. The first sealing end is disposed between the first sealing sleeve and the through hole, and the second sealing end is disposed between the outer wall of the waveguide cavity and the shell.

[0022] Furthermore, the first sealing sleeve is made of PTFE material.

[0023] Furthermore, the second sealing sleeve is made of aluminum.

[0024] Furthermore, the drive assembly includes a motor, a motor connecting rod, a support platform, and a support column. One end of the support column is fixedly connected to the support platform, and the other end is connected to the waveguide cavity and the housing. The motor is mounted on the support platform. One end of the motor connecting rod is connected to the output shaft of the motor, and the other end is connected to a pin. The support platform supports the motor, motor connecting rod, and pin, while the support column secures the waveguide cavity, housing, and support platform together, improving the structural stability.

[0025] Furthermore, the motor connecting rod is threadedly connected to the pin, which facilitates the adjustment of the pin's up and down position, thereby controlling the maximum and minimum length of the pin extending into the waveguide cavity.

[0026] Furthermore, the waveguide cavity is a microwave transmission cavity of a rectangular waveguide.

[0027] Compared with the prior art, the advantages of this utility model are: by setting a driving component to move the pin up and down and adjust the length of the pin inserted into the waveguide cavity, no manual intervention is required, which has the advantages of high automation and adjustment efficiency; at the same time, it can also prevent microwave leakage during the pin adjustment process, thereby avoiding injury to personnel; in addition, during the up and down movement of the pin, it can also be guided and protected by the shell; and sealed by the sealing component to prevent microwave leakage and ensure the safety of the staff. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of the microwave three-pin structure.

[0029] Figure 2 This is an exploded view of a microwave three-pin connector.

[0030] Figure 3 This is a cross-sectional view of a microwave three-pin.

[0031] Figure 4 yes Figure 3 A magnified view of a portion of point A in the middle.

[0032] Figure 5 This is a schematic diagram of the microwave three-pin structure.

[0033] In the figure: 1. Waveguide cavity; 11. Through hole; 12. Positioning step; 2. Pin; 21. Limiting groove; 3. Housing; 31. Movable cavity; 32. Mounting hole; 4. Drive assembly; 41. Motor; 42. Motor connecting rod; 43. Support platform; 44. Support column; 5. Sealing assembly; 51. First sealing sleeve; 511. Positioning boss; 52. Second sealing sleeve; 521. First sealing end; 522. Second sealing end. Detailed Implementation

[0034] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0035] To achieve the above objectives, the technical solution of this utility model is as follows:

[0036] See Figure 1-5 As shown, this embodiment provides an automatically tuned microwave three-pin connector, comprising:

[0037] Waveguide cavity 1 for transmitting microwaves;

[0038] Pin 2 used to adjust the resonant frequency of waveguide cavity 1;

[0039] Housing 3 is used to protect and guide the movement of pin 2;

[0040] A drive assembly 4 for adjusting the length of the pin 2 extending into the waveguide cavity 1;

[0041] Sealing assembly 5 for sealing between pin 2 and waveguide cavity 1;

[0042] The pin 2 is movably disposed on the housing 3, and one end of the pin 2 is connected to the output end of the drive assembly 4, while the other end moves in and out of the waveguide cavity 1; the sealing assembly 5 is disposed between the waveguide cavity 1 and the pin 2.

[0043] In this application, the drive component 4 can move the pin 2 up and down to adjust the length of the pin 2 inserted into the waveguide cavity 1 without manual intervention, which has the advantages of high automation and adjustment efficiency; at the same time, it can also prevent microwave leakage during the adjustment of the pin 2, thereby avoiding injury to personnel.

[0044] In addition, during the up-and-down movement of the pin 2, it can be guided and protected by the housing 3; and sealed by the sealing component 5 to prevent microwave leakage and ensure the safety of the staff.

[0045] Furthermore, a movable cavity 31 is provided inside the housing 3, and the pin 2 is disposed within the movable cavity 31. A limiting groove 21 is provided on the side wall of the pin 2, and a mounting hole 32 is provided on the side wall of the movable cavity 31. A limiting member (not shown in the figure) is provided in the mounting hole 32 to limit the movement of the pin 2. The end of the limiting member extends into the limiting groove 21 and can move relative to the limiting groove 21. With the above structure, when the pin 2 enters the waveguide cavity 1 by adjusting its length through lifting and lowering, the limiting member can move relative to the limiting groove 21 to limit the movement of the pin 2, thereby preventing the pin 2 from rising and falling too much within the waveguide cavity 1, and thus preventing the pin 2 from falling out of the waveguide cavity 1 or touching the wall of the waveguide cavity 1.

[0046] Furthermore, the limiting groove 21 is a vertically arranged strip groove, and the direction of the strip groove is the same as the direction of movement of the pin 2.

[0047] Furthermore, the mounting hole 32 is a screw hole, and the limiting component is a screw, which facilitates the installation and removal of the limiting component.

[0048] Furthermore, the sealing assembly 5 includes a first sealing sleeve 51 and a second sealing sleeve 52. A through hole 11 for the pin 2 to enter and exit is provided on the side wall of the waveguide cavity 1. The first sealing sleeve 51 is disposed between the through hole 11 and the pin 2. The second sealing sleeve 52 is disposed within the movable cavity 31 and between the waveguide cavity 1, the first sealing sleeve 51, and the housing 3. In this application, the first sealing sleeve 51 can be used to achieve dynamic sealing between the waveguide cavity 1 and the pin 2; the second sealing sleeve 52 can be used to seal between the waveguide cavity 1, the first sealing sleeve 51, and the housing 3; when there is a gap between the first sealing sleeve 51 and the through hole 11, the second sealing sleeve 52 can also be used for supplementary protection, providing a double sealing effect and effectively preventing microwave leakage.

[0049] Furthermore, both the first sealing sleeve 51 and the second sealing sleeve 52 are vertically continuous structures, with the pin 2 passing through both the first sealing sleeve 51 and the second sealing sleeve 52 vertically and being movably connected to them. The first sealing sleeve 51 and the second sealing sleeve 52 not only prevent microwave leakage but also guide the movement of the pin 2.

[0050] Furthermore, a positioning step 12 is provided on the side wall of the through hole 11, and a positioning boss 511 is provided on the outer side wall of the first sealing sleeve 51. The positioning boss 511 is held on the positioning step 12. The above structure can facilitate the disassembly and assembly of the first sealing sleeve 51 and prevent the first sealing sleeve 51 from sliding into the waveguide cavity 1.

[0051] Furthermore, the second sealing sleeve 52 is provided with a first sealing end 521 and a second sealing end 522 at one end near the waveguide cavity 1. The first sealing end 521 is disposed between the first sealing sleeve 51 and the through hole 11, and the second sealing end 522 is disposed between the outer wall of the waveguide cavity 1 and the housing 3.

[0052] Furthermore, the first sealing sleeve 51 is made of PTFE material, which not only has a sealing effect, but also serves as the dielectric part of the microwave choke structure, used to insulate the end of the pin 2 from the inner wall of the through hole 11, and maintain the wavelength open short path in the choke structure.

[0053] Furthermore, the second sealing sleeve 52 is made of aluminum, which has good toughness and can be better matched with PTFE material.

[0054] Furthermore, the drive assembly 4 includes a motor 41, a motor connecting rod 42, a support platform 43, and a support column 44. One end of the support column 44 is fixedly connected to the support platform 43, and the other end is connected to the waveguide cavity 1 and the housing 3. The motor is mounted on the support platform 43. One end of the motor connecting rod 42 is connected to the output shaft of the motor 41, and the other end passes through the housing 3 and is connected to the pin 2. The support platform 43 supports the motor 41, the motor connecting rod 42, and the pin 2, while the support column 44 can fix the waveguide cavity 1, the housing 3, and the support platform 43 together, improving the stability of the structure.

[0055] Furthermore, the motor connecting rod 42 is threadedly connected to the pin 2, which facilitates the adjustment of the up and down position of the pin 2, thereby controlling the maximum and minimum length of the pin 2 extending into the waveguide cavity 1.

[0056] Furthermore, waveguide cavity 1 is a microwave transmission cavity of a rectangular waveguide.

[0057] The process of automatic resonant frequency adjustment using the microwave three-pin in this embodiment is as follows:

[0058] 1. The program sends signals to the motor;

[0059] 2. The motor lead screw starts to move, which drives the motor connecting rod, and the motor connecting rod drives the pin to move synchronously;

[0060] 3. The depth to which the pin extends into the waveguide changes accordingly;

[0061] 4. Changes in reflected power.

[0062] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A microwave three-pin automatic tuning pin, characterized in that, include: Waveguide cavities used for transmitting microwaves; Pins used to adjust the resonant frequency of the waveguide cavity; A housing used to protect and guide the movement of the pin; A drive assembly used to adjust the length of the pin inserted into the waveguide cavity; Sealing assembly used for sealing between the pin and the waveguide cavity; The pin is movably disposed within the housing, with one end connected to the output end of the drive assembly and the other end movably moving in and out of the waveguide cavity; the sealing assembly is disposed between the waveguide cavity and the pin.

2. The automatically tuned microwave three-pin as described in claim 1, characterized in that, The housing has a movable cavity, the pin is disposed in the movable cavity, the side wall of the pin has a limiting groove, the side wall of the movable cavity has a mounting hole, the mounting hole has a limiting member that can limit the movement of the pin, the end of the limiting member extends into the limiting groove and can move relative to the limiting groove.

3. The automatically tuned microwave three-pin as described in claim 2, characterized in that, The limiting groove is a vertically arranged strip groove, and the direction of the strip groove is the same as the direction of movement of the pin.

4. The automatically tuned microwave three-pin as described in claim 1, characterized in that, The sealing assembly includes a first sealing sleeve and a second sealing sleeve. A through hole for the pin to enter and exit is provided on the side wall of the waveguide cavity. The first sealing sleeve is disposed between the through hole and the pin. The second sealing sleeve is disposed in the movable cavity and between the waveguide cavity, the first sealing sleeve, and the housing.

5. The automatically tuned microwave three-pin as described in claim 4, characterized in that, Both the first sealing sleeve and the second sealing sleeve have a through-hole structure, and the pin passes through the first sealing sleeve and the second sealing sleeve vertically and is movably connected to the first sealing sleeve and the second sealing sleeve.

6. The automatically tuned microwave three-pin as described in claim 4, characterized in that, A positioning step is provided on the side wall of the through hole, and a positioning boss is provided on the outer side wall of the first sealing sleeve. The positioning boss is held in place on the positioning step.

7. The automatically tuned microwave three-pin as described in claim 4, characterized in that, The second sealing sleeve has a first sealing end and a second sealing end at one end near the waveguide cavity. The first sealing end is located between the first sealing sleeve and the through hole, and the second sealing end is located between the outer wall of the waveguide cavity and the shell.

8. The automatically tuned microwave three-pin as described in claim 4, characterized in that, The first sealing sleeve is made of PTFE material.

9. The automatically tuned microwave three-pin as described in claim 1, characterized in that, The drive assembly includes a motor, a motor connecting rod, a support platform, and a support column. One end of the support column is fixedly connected to the support platform, and the other end is connected to the waveguide cavity and the housing. The motor is mounted on the support platform. One end of the motor connecting rod is connected to the output shaft of the motor, and the other end is connected to a pin.

10. The automatically tuned microwave three-pin as described in claim 9, characterized in that, The motor connecting rod is threadedly connected to the pin, which facilitates adjustment of the pin's vertical position.

Images