Grinding equipment for machining anti-abrasion and anti-corrosion magnetron sputtering target material

Abstract

The utility model discloses an anti-wear anti-corrosion magnetron sputtering target material processing polishing equipment, which comprises a bottom plate, the top of the bottom plate is fixedly connected with two symmetrically distributed fixed seats, the outer sides of the fixed seats are fixedly connected with electric push rods, the output ends of the electric push rods are in sliding connection with the fixed seats, and the output ends of the electric push rods are connected with the fixed seats. And the outer side of the output end of the electric push rod is fixedly connected with a mounting seat. The protective cover is designed to protect the polishing process, pollution caused by splashing of chippings to the external environment can be effectively avoided, the workpiece polishing efficiency can be improved under the action of the two sets of abrasive paper, polishing smoke dust can be collected under the action of the air pump, and the polishing efficiency is improved. Smoke dust can be filtered and purified under the action of the filter screen, pollution to the external environment caused by overflowing of the smoke dust during grinding is avoided, the filter screen can shake in the horizontal direction by matching with work of the motor during filtering, and the situation that the smoke dust collecting effect is affected due to the fact that the filter screen is blocked by particulate matter is avoided.

Description

Technical Field

[0001] This utility model relates to the field of grinding equipment technology, specifically a grinding equipment for processing wear-resistant and corrosion-resistant magnetron sputtering targets. Background Technology

[0002] Wear-resistant and corrosion-resistant magnetron sputtering targets are materials used for surface coating preparation, typically in industrial and scientific research fields to improve the surface properties of materials. These targets possess wear-resistant and corrosion-resistant properties, providing excellent performance in the preparation of thin film coatings. The processing of wear-resistant and corrosion-resistant magnetron sputtering targets requires grinding using grinding equipment.

[0003] Utility model patent CN221185835U discloses a grinding device for a magnetron sputtering target, including a grinding table, a positioning component for fixing the target, and a collection component for processing waste. The positioning component includes an adjustment groove on the top of the grinding table, an adjustment block connected to the adjustment groove, a first screw connected to the adjustment block, a first support connected to the top of the adjustment block, a second support connected to one side of the top of the grinding table, a first rotating shaft connected to the first support, and a second rotating shaft connected to the second support. This utility model solves the problem that existing grinding devices, while able to fix and grind the target, require manually tightening the positioning pin to fix the second support when fixing targets of different lengths, which is cumbersome and generates waste that pollutes the grinding environment, thus reducing practicality.

[0004] In existing technology, during the use of grinding devices, some particles can clog the filter pores when waste is collected through a filter screen, affecting air permeability and subsequent collection efficiency. Therefore, improvements are needed. Utility Model Content

[0005] The purpose of this invention is to provide a grinding device for processing wear-resistant and corrosion-resistant magnetron sputtering targets, which solves the problem that some particles will clog the filter screen and filter holes, affecting the collection effect.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a grinding device for processing wear-resistant and corrosion-resistant magnetron sputtering targets, comprising a base plate, two symmetrically distributed fixed seats fixedly connected to the top of the base plate, an electric push rod fixedly connected to the outer side of the fixed seats, the output end of the electric push rod being slidably connected to the fixed seat, a mounting seat fixedly connected to the outer side of the output end of the electric push rod, the mounting seat being slidably connected to the base plate, sandpaper fixedly connected to the outer side of the mounting seat, a support rod fixedly connected to the top of the base plate, a support plate fixedly connected to the top of the support rod, and a... The device includes a hydraulic cylinder, the output end of which is slidably connected to a support plate. A protective cover is fixedly connected to the lower end of the hydraulic cylinder's output end. A housing is fixedly connected to the upper end of the base plate. An air pump is fixedly connected inside the housing. An elastic hose is fixedly connected inside the housing. The elastic hose is fixedly connected to both the support plate and the protective cover. A fixing pipe is fixedly connected to the lower end of the elastic hose. The fixing pipe is fixedly connected to the protective cover. Multiple evenly distributed air inlets are fixedly connected to the lower end of the fixing pipe. A filter screen is slidably connected inside the housing. An anti-clogging mechanism and a connecting mechanism are provided on the filter screen.

[0007] Preferably, a guide rod is fixedly connected to the outer side of the mounting base, and the guide rod is slidably connected to the fixed base. By designing the guide rod, the movement of the mounting base can be guided.

[0008] Preferably, the air pump has an exhaust port on its right end, and the exhaust port is fixedly connected to the housing. By designing the exhaust port, the gas inside the housing can be discharged.

[0009] Preferably, the anti-clogging mechanism includes a motor. The motor is fixedly connected to the upper end of the housing. The output end of the motor is rotatably connected to the housing. A rotating shaft is fixedly connected to the lower end of the motor output end. The rotating shaft is rotatably connected to the housing. A top block is fixedly connected to the left end of the rotating shaft. A fixing block is contacted at the left end of the top block. A slide block is fixedly connected to the outer side of the fixing block. The slide block is slidably connected to the housing and to the filter screen. A sliding rod is fixedly connected to the left end of the slide block. A first spring is provided on the outer side of the sliding rod. A fixing strip is slidably sleeved on the outer side of the sliding rod. The fixing strip is fixedly connected to the housing. By designing the anti-clogging mechanism, filter screen clogging can be prevented.

[0010] Preferably, one end of the first spring is fixedly connected to the slide, and the other end of the first spring is fixedly connected to the fixing strip. By designing the first spring, the force of the first spring can be applied to the slide.

[0011] Preferably, the connecting mechanism includes a groove, the interior of the filter screen has a groove, a ball bearing is movably fitted inside the groove, the ball bearing is movably connected to a slide block, a slider is movably fitted outside the ball bearing, the slider is slidably connected to the slide block, a fixing rod is slidably fitted inside the slider, the fixing rod is fixedly connected to the slide block, and a second spring is provided on the outside of the fixing rod. This connecting mechanism facilitates the disassembly of the filter screen.

[0012] Preferably, one end of the second spring is fixedly connected to the slider, and the other end of the second spring is fixedly connected to the slide block. By designing the second spring, the force of the second spring can be applied to the slider.

[0013] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0014] 1. This utility model, through the design of a protective cover, can protect the grinding process and effectively prevent debris from splashing and polluting the external environment. With the action of two sets of sandpaper, the grinding efficiency of the workpiece can be improved. Through the action of the air pump, grinding fumes can be collected and filtered and purified by the action of the filter screen, preventing the overflow of fumes during grinding from polluting the external environment. In addition, when the motor works during filtration, the filter screen can be shaken in the horizontal direction to prevent particulate matter from clogging the filter screen and affecting the fumes collection effect.

[0015] 2. This utility model, through the design of the insertion of the ball and the groove, can limit the position of the filter screen, so as to achieve the purpose of combining the filter screen and the slide. When a lot of dust and impurities are attached to the surface of the filter screen, the internal groove and the ball can be separated by pulling the filter screen outward, which can easily remove the filter screen and facilitate cleaning, maintenance or replacement of the filter screen. Attached Figure Description

[0016] Figure 1 This is a three-dimensional view of the overall structure of this utility model;

[0017] Figure 2 This utility model Figure 1 A partial three-dimensional sectional view of the structure;

[0018] Figure 3 This utility model Figure 2 A front sectional view of the enclosure;

[0019] Figure 4 This utility model Figure 3 Enlarged view of point A.

[0020] In the diagram: 1. Base plate; 2. Fixed seat; 3. Electric push rod; 4. Mounting seat; 5. Sandpaper; 6. Guide rod; 7. Support rod; 8. Anti-clogging mechanism; 9. Connecting mechanism; 10. Support plate; 11. Hydraulic cylinder; 12. Protective cover; 13. Box body; 14. Air pump; 15. Exhaust port; 16. Elastic hose; 17. Fixed pipe; 18. Air inlet; 19. Filter screen; 81. Motor; 82. Rotating shaft; 83. Top block; 84. Fixed block; 85. Slide seat; 86. Slide rod; 87. First spring; 88. Fixed strip; 91. Groove; 92. Ball bearing; 93. Slider; 94. Fixed rod; 95. Second spring. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] Please see Figure 1 , Figure 2 , Figure 3 A grinding device for processing wear-resistant and corrosion-resistant magnetron sputtering targets includes a base plate 1. Two symmetrically distributed fixed seats 2 are fixedly connected to the top of the base plate 1. An electric push rod 3 is fixedly connected to the outer side of each fixed seat 2, with its output end slidably connected to the fixed seat 2. A mounting seat 4 is fixedly connected to the outer side of the output end of the electric push rod 3, and is slidably connected to the base plate 1. Sandpaper 5 is fixedly connected to the outer side of the mounting seat 4, and a guide rod 6 is fixedly connected to the outer side of the mounting seat 4, slidably connected to the fixed seat 2. The guide rod 6 guides the movement of the mounting seat 4. A support rod 7 is fixedly connected to the top of the base plate 1, and a support plate 10 is fixedly connected to the top of the support rod 7. A hydraulic cylinder 11 is fixedly connected to the top of the support plate 10, with its output end slidably connected to the support plate 10. The lower end of the output end of the hydraulic cylinder 11 is fixedly connected to a protective cover 12. The upper end of the base plate 1 is fixedly connected to a housing 13. An air pump 14 is fixedly connected inside the housing 13. An exhaust port 15 is provided at the right end of the air pump 14. The exhaust port 15 is fixedly connected to the housing 13. By designing the exhaust port 15, the gas inside the housing 13 can be discharged. An elastic hose 16 is fixedly connected inside the housing 13. The elastic hose 16 is fixedly connected to the support plate 10 and the protective cover 12 respectively. A fixed pipe 17 is fixedly connected at the lower end of the elastic hose 16. The fixed pipe 17 is fixedly connected to the protective cover 12. Multiple evenly distributed air inlets 18 are fixedly connected at the lower end of the fixed pipe 17. A filter screen 19 is slidably connected inside the housing 13. An anti-clogging mechanism 8 is provided on the filter screen 19. A connecting mechanism 9 is provided on the filter screen 19.

[0023] Please see Figure 1 , Figure 2 , Figure 3 , Figure 4 The anti-clogging mechanism 8 includes a motor 81. The motor 81 is fixedly connected to the upper end of the housing 13. The output end of the motor 81 is rotatably connected to the housing 13. The lower end of the output end of the motor 81 is fixedly connected to a rotating shaft 82, which is rotatably connected to the housing 13. A top block 83 is fixedly connected to the left end of the rotating shaft 82. A fixing block 84 is in contact with the left end of the top block 83. A slide block 85 is fixedly connected to the outer side of the fixing block 84. The slide block 85 is slidably connected to the housing 13 and to the filter screen 19. A slide rod 86 is fixedly connected to the left end of the slide block 85. A first spring 87 is provided on the outside of the slide rod 86. One end of the first spring 87 is fixedly connected to the slide block 85, and the other end of the first spring 87 is fixedly connected to the fixing strip 88. By designing the first spring 87, the force of the first spring 87 can be applied to the slide block 85. The fixing strip 88 is slidably sleeved on the outside of the slide rod 86. The fixing strip 88 is fixedly connected to the housing 13. By designing the anti-clogging mechanism 8, the clogging of the filter screen 19 can be prevented.

[0024] Please see Figure 1 , Figure 2 , Figure 3 , Figure 4 The connecting mechanism 9 includes a groove 91. The filter screen 19 has a groove 91 inside. A ball bearing 92 is movably sleeved inside the groove 91. The ball bearing 92 is movably connected to the slide block 85. A slider 93 is movably sleeved outside the ball bearing 92. The slider 93 is slidably connected to the slide block 85. A fixing rod 94 is slidably sleeved inside the slider 93. The fixing rod 94 is fixedly connected to the slide block 85. A second spring 95 is provided on the outside of the fixing rod 94. One end of the second spring 95 is fixedly connected to the slider 93, and the other end of the second spring 95 is fixedly connected to the slide block 85. By designing the second spring 95, the force of the second spring 95 can be applied to the slider 93. By designing the connecting mechanism 9, it is convenient to disassemble the filter screen 19.

[0025] The specific implementation process of this utility model is as follows: When in use, before grinding, the output end of the hydraulic cylinder 11 can drive the protective cover 12 to move down through the action of the hydraulic cylinder 11, so that the protective cover 12 contacts the base plate 1. The protective cover 12 can protect the grinding process and effectively prevent the flying of debris from polluting the external environment. Moreover, the grinding efficiency of the workpiece can be improved under the action of the two sets of sandpaper 5.

[0026] During the polishing process, the air pump 14 works simultaneously and draws air into the chamber 13, creating a negative pressure inside the chamber 13. This negative pressure then draws air out through the flexible hose 16, causing the dust generated during polishing to be drawn in through the air inlet 18 and the fixed pipe 17. The dust enters the chamber 13 and is filtered and purified by the filter screen 19. Particulate impurities are retained inside the chamber 13, while the gas is finally discharged through the exhaust port 15.

[0027] During the use of filter 19, motor 81 works simultaneously. The output of motor 81 drives shaft 82 and top block 83 to rotate. Top block 83 rotates and presses fixed block 84. Fixed block 84 drives slide 85 to move horizontally. Slide 85 drives filter 19 to move. At the same time, slide 85 drives slide rod 86 to slide along fixed bar 88. Slide 85 presses first spring 87. When top block 83 separates from fixed block 84, the elastic action of first spring 87 pushes slide 85 to reset. This allows slide 85 to swing horizontally, preventing particulate matter from clogging filter 19 and affecting dust collection.

[0028] When it is necessary to disassemble the filter screen 19, simply pull the filter screen 19 outwards. The filter screen 19 and the ball bearing 92 will slide relative to each other. The arc surface of the groove 91 inside the filter screen 19 will squeeze and push the ball bearing 92 to move horizontally. The ball bearing 92 will drive the slider 93 to slide along the fixed rod 94. The slider 93 will squeeze the second spring 95, which can separate the groove 91 from the ball bearing 92. Then the filter screen 19 can be pulled out from the slide block 85, and the filter screen 19 can be disassembled for easy cleaning, maintenance or replacement.

[0029] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A grinding device for processing wear-resistant and corrosion-resistant magnetron sputtering targets, comprising a base plate (1), characterized in that: The top of the base plate (1) is fixedly connected to two symmetrically distributed fixed seats (2). An electric push rod (3) is fixedly connected to the outside of the fixed seat (2). The output end of the electric push rod (3) is slidably connected to the fixed seat (2). An mounting seat (4) is fixedly connected to the outside of the output end of the electric push rod (3). The mounting seat (4) is slidably connected to the base plate (1). Sandpaper (5) is fixedly connected to the outside of the mounting seat (4). A support rod (7) is fixedly connected to the top of the base plate (1). A support plate (10) is fixedly connected to the top of the support rod (7). A hydraulic cylinder (11) is fixedly connected to the top of the support plate (10). The output end of the hydraulic cylinder (11) is slidably connected to the support plate (10). The lower part of the output end of the hydraulic cylinder (11) is... A protective cover (12) is fixedly connected to the end of the base plate (1). A box body (13) is fixedly connected to the upper end of the base plate (1). An air pump (14) is fixedly connected inside the box body (13). An elastic hose (16) is fixedly connected inside the box body (13). The elastic hose (16) is fixedly connected to the support plate (10) and the protective cover (12) respectively. A fixing pipe (17) is fixedly connected to the lower end of the elastic hose (16). The fixing pipe (17) is fixedly connected to the protective cover (12). A plurality of evenly distributed air inlets (18) are fixedly connected to the lower end of the fixing pipe (17). A filter screen (19) is slidably connected inside the box body (13). An anti-clogging mechanism (8) is provided on the filter screen (19). A connecting mechanism (9) is provided on the filter screen (19).

2. The grinding equipment for processing wear-resistant and corrosion-resistant magnetron sputtering targets according to claim 1, characterized in that: A guide rod (6) is fixedly connected to the outside of the mounting base (4), and the guide rod (6) is slidably connected to the fixed base (2).

3. The grinding equipment for processing wear-resistant and corrosion-resistant magnetron sputtering targets according to claim 1, characterized in that: The air pump (14) is provided with an exhaust port (15) at its right end, and the exhaust port (15) is fixedly connected to the housing (13).

4. The grinding equipment for processing wear-resistant and corrosion-resistant magnetron sputtering targets according to claim 1, characterized in that: The anti-blocking mechanism (8) includes a motor (81). The upper end of the housing (13) is fixedly connected to the motor (81). The output end of the motor (81) is rotatably connected to the housing (13). The lower end of the output end of the motor (81) is fixedly connected to a rotating shaft (82). The rotating shaft (82) is rotatably connected to the housing (13). The left end of the rotating shaft (82) is fixedly connected to a top block (83). The left end of the top block (83) contacts a fixing block (84). A slide block (85) is fixedly connected to the outside of the fixed block (84). The slide block (85) is slidably connected to the box body (13). The slide block (85) is slidably connected to the filter screen (19). A slide rod (86) is fixedly connected to the left end of the slide block (85). A first spring (87) is provided on the outside of the slide rod (86). A fixing strip (88) is slidably sleeved on the outside of the slide rod (86). The fixing strip (88) is fixedly connected to the box body (13).

5. The grinding equipment for processing wear-resistant and corrosion-resistant magnetron sputtering targets according to claim 4, characterized in that: One end of the first spring (87) is fixedly connected to the slide (85), and the other end of the first spring (87) is fixedly connected to the fixing bar (88).

6. The grinding equipment for processing wear-resistant and corrosion-resistant magnetron sputtering targets according to claim 4, characterized in that: The connecting mechanism (9) includes a groove (91). The filter screen (19) has a groove (91) inside. A ball (92) is movably sleeved inside the groove (91). The ball (92) is movably connected to the slide block (85). A slider (93) is movably sleeved outside the ball (92). The slider (93) is slidably connected to the slide block (85). A fixing rod (94) is slidably sleeved inside the slider (93). The fixing rod (94) is fixedly connected to the slide block (85). A second spring (95) is provided on the outside of the fixing rod (94).

7. The grinding equipment for processing wear-resistant and corrosion-resistant magnetron sputtering targets according to claim 6, characterized in that: One end of the second spring (95) is fixedly connected to the slider (93), and the other end of the second spring (95) is fixedly connected to the slide block (85).

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