Glove box transition cabin and glove box
By installing electrostatic dust-adhesive pads and implementing automated control in the glove box transition chamber, the problem of particle residue in the glove box transition chamber was solved, achieving high cleanliness of the glove box and long service life of the vacuum pump, while reducing maintenance costs.
Patent Information
- Application Number
- CN202423146907.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-19
- Publication Date
- 2025-11-14
- Estimated Expiration
- 2034-12-19
AI Technical Summary
The existing glove box transition chamber still has particle residue during replacement treatment, which leads to experimental contamination and vacuum pump wear. In addition, the construction of clean rooms is expensive and cannot avoid contamination in ordinary environments.
Design a glove box transition chamber with an internal dust-adhesive plate and an electrostatic dust-adhesive pad. The electrostatic dust-adhesive pad adheres to particles in the transition chamber, reducing the amount of particles entering the glove box body and vacuum pump. The air intake and vacuuming processes are automatically controlled.
It effectively reduces particles in the glove box transition chamber and vacuum pump, improves the cleanliness of the glove box body, extends the service life of the vacuum pump, and reduces maintenance costs.
Smart Images
Figure CN223545263U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of glove box technology, specifically relating to a glove box transition compartment and a glove box. Background Technology
[0002] A glove box is a sealed device with an inert gas atmosphere, widely used in semiconductor, battery, and chemical industries. In semiconductor chemical production testing, glove boxes providing a low-oxygen, low-water atmosphere are frequently used. Semiconductor chemicals are generally ultra-pure, requiring very high cleanliness of the experimental equipment. Existing glove boxes typically consist of a main body and a transition chamber; experimental materials pass through the transition chamber before entering the main body.
[0003] During the process of placing experimental materials into the glove box transition chamber, airborne particles can enter. Typically, this is addressed by evacuating the transition chamber and then replenishing it with nitrogen (or other gases) to restore normal pressure. This process is repeated multiple times to replace the particles inside the transition chamber. However, even after replacement, some particles may remain and re-enter the glove box, contaminating the experiment. Furthermore, during the replacement process, the vacuum pump draws particles into the pump, causing wear and tear and increasing maintenance and repair costs.
[0004] While placing glove boxes in cleanrooms can prevent this type of contamination, the construction and maintenance costs of cleanrooms are high, making it impossible to place all glove boxes in such an environment. However, for glove boxes placed in ordinary environments, the aforementioned contamination cannot be avoided.
[0005] The information disclosed in this background section is intended only to enhance the understanding of the overall background of this utility model and should not be construed as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Utility Model Content
[0006] The purpose of this invention is to provide a glove box transition chamber and a glove box, which can significantly reduce particles in the glove box transition chamber and the vacuum pump.
[0007] To achieve the above objectives, a specific embodiment of this utility model provides the following technical solution: a glove box transition compartment, comprising:
[0008] The cabin has a transition cavity inside, the top of the cabin is provided with an air inlet communicating with the transition cavity, and the bottom of the cabin is provided with an air outlet communicating with the transition cavity.
[0009] A shelf is slidably disposed within the transition cavity and located between the air inlet and the air outlet;
[0010] A dust-adhesive plate is disposed in the transition cavity and located between the storage plate and the air outlet. An electrostatic dust-adhesive pad is provided on the side of the dust-adhesive plate facing the storage plate.
[0011] In one or more embodiments of this utility model, the shelf has a surface for supporting items, and the surface is provided with a plurality of through holes.
[0012] In one or more embodiments of this utility model, the electrostatic dust-adhesive mat includes a plurality of electrostatic dust-adhesive layers bonded together.
[0013] In one or more embodiments of this utility model, a limiting part is further provided inside the cabin, and the dust-adhesive plate is slidably connected to the limiting part.
[0014] In one or more embodiments of this utility model, a conical nozzle is provided at the air inlet, and the jetting area of the conical nozzle can cover the shelf.
[0015] In one or more embodiments of this utility model, the cabin is provided with a slide rail, and the shelf is slidably connected to the slide rail.
[0016] In one or more embodiments of this utility model, a plurality of support feet are provided on the side of the dust-adhesive plate away from the electrostatic dust-adhesive pad, and the support feet abut against the inner wall of the chamber.
[0017] In one or more embodiments of this utility model, the cabin has an inner door and an outer door at opposite ends, and the glove box transition compartment is equipped with sensors for sensing the opening and closing of the inner and outer doors to control whether air enters through the air inlet and whether air exits through the air outlet.
[0018] In one or more embodiments of the present invention, the glove box transition chamber further includes an air inlet pipe connected to an air source and an air outlet pipe connected to a vacuum pump. The air inlet pipe is connected to an air inlet, and the air outlet pipe is connected to an air outlet.
[0019] A specific embodiment of this utility model also provides a glove box, including a glove box body and a glove box transition compartment connected to the glove box body.
[0020] Compared with existing technologies, the glove box transition chamber and glove box of this invention utilize an electrostatic adhesive pad on an adhesive plate located between the storage plate and the air outlet within the transition cavity to adhere particles within the transition cavity. This reduces the amount of particles entering the glove box body and vacuum pump, thereby improving the cleanliness of the glove box body and extending the service life of the vacuum pump. Attached Figure Description
[0021] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0022] Figure 1 This is a cross-sectional view of the glove box transition compartment in one embodiment of the present invention;
[0023] Figure 2 This is a perspective view of the dust-adhesive plate in one embodiment of the present invention;
[0024] Figure 3 This is a top view of the shelf in one embodiment of the present invention.
[0025] Explanation of key figure labels:
[0026] 1. Cabin; 11. Transition cavity; 12. Air inlet; 13. Air outlet; 14. Limiting part; 15. Conical nozzle; 16. Slide rail; 2. Storage plate; 21. Loading surface; 22. Through hole; 3. Dust-adhesive plate; 31. Electrostatic dust-adhesive pad; 32. Support leg; 4. Air inlet pipe; 5. Air outlet pipe. Detailed Implementation
[0027] To enable those skilled in the art to better understand the technical solutions of this utility model, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.
[0028] like Figures 1-3 As shown, one embodiment of this utility model discloses a glove box, including a glove box body (not shown in the figure) and a glove box transition chamber connected to the glove box body; the glove box transition chamber includes a chamber body 1, a shelf 2, and a dust-adhesive plate 3; the chamber body 1 has a transition cavity 11, the top of the chamber body 1 is provided with an air inlet 12 communicating with the transition cavity 11, and the bottom of the chamber body 1 is provided with an air outlet 13 communicating with the transition cavity 11; the shelf 2 is slidably disposed in the transition cavity 11 and located between the air inlet 12 and the air outlet 13; the dust-adhesive plate 3 is disposed in the transition cavity 11 and located between the shelf 2 and the air outlet 13, and an electrostatic dust-adhesive pad 31 is provided on the side of the dust-adhesive plate 3 facing the shelf 2.
[0029] It is understood that the air inlet 12 is connected to an air source (not shown in the figure), and the air source blows air into the transition chamber 11 through the air inlet 12. The air outlet 13 is connected to a vacuum pump (not shown in the figure), and the vacuum pump extracts the gas from the transition chamber 11 through the air outlet 13 (vacuuming), thereby achieving the replacement treatment in the transition chamber of the glove box. By using an electrostatic dust-adhesive pad 31 on the dust-adhesive plate 3 located in the transition chamber 11 and between the shelf plate 2 and the air outlet 13 to adhere particles in the transition chamber 11, the amount of particles entering the glove box body and the vacuum pump can be reduced, thus extending the service life of the vacuum pump.
[0030] Among them, the electrostatic adhesive mat 31 can be a commercially available electrostatic adhesive mat. The particles can be considered as dust or other small-diameter impurities and contaminants. The gas supplied by the gas source can be an inert gas such as nitrogen or argon.
[0031] Specifically, such as Figure 1 and 2 As shown, the shelf 2 has a carrying surface 21 for supporting items, and the carrying surface 21 has several through holes 22. The air inlet 12 at the top blows air towards the shelf 2 and the items on the shelf 2, which can blow particles off the items and onto the electrostatic dust-removing pad 31 through the through holes 22, where they stick. The through holes 22 facilitate the direct landing of particles blown off the items onto the electrostatic dust-removing pad 31, improving the particle collection and processing process and enhancing the dust removal effect.
[0032] During the vacuuming process, the gas in the transition chamber 11 flows to the vacuum pump through the outlet 13. The dust-adhesive plate 3 is located above the outlet 13. Therefore, during the vacuuming process, most of the gas will enter the outlet 13 after passing through the electrostatic dust-adhesive pad 31 on the dust-adhesive plate 3. This process can also cause the particles in the gas to stick to the electrostatic dust-adhesive pad 31, thereby reducing the particles in the vacuum pump and extending the service life of the vacuum pump.
[0033] Preferably, the electrostatic dust-adhesive mat 31 includes several electrostatic dust-adhesive layers that are bonded to each other. When the uppermost electrostatic dust-adhesive layer is covered with particles, the dust-adhesive mat 3 is taken out of the glove box, the uppermost electrostatic dust-adhesive layer is torn off, and the dust-adhesive mat 3 is put back into the transition cavity 11, which facilitates continuous dust removal.
[0034] Furthermore, a limiting part 14 is also provided inside the chamber 1, and the dust-adhesive plate 3 is slidably connected to the limiting part 14. The limiting part 14 serves to restrict the position of the dust-adhesive plate 3, preventing the dust-adhesive plate 3 from shaking during vacuuming or blowing. Figure 1 As shown, in this embodiment, the limiting part 14 is a protrusion protruding from the inner wall of the cabin 1, and its cross-section is an inverted L-shape, so that the limiting part 14 and the inner wall of the cabin 1 cooperate to form a limiting area for the dust-adhesive plate 3.
[0035] Specifically, such as Figure 1 As shown, the limiting part 14, the dust-adhesive plate 3, and the electrostatic dust-adhesive pad 3 are in clearance fit, and there is a gap between the limiting part 14, the dust-adhesive plate 3, and the electrostatic dust-adhesive pad 3. When vacuuming is performed, the gas enters the outlet 13 through the gap. This arrangement can make the gas in the transition chamber 11 pass through the electrostatic dust-adhesive pad 3 before entering the outlet 13, thereby effectively reducing the amount of particles entering the vacuum pump and reducing the number of particles in the transition chamber 11.
[0036] like Figure 1 As shown, a conical nozzle 15 is provided at the air inlet 12, and the spray area of the conical nozzle 15 can cover the shelf 2. This arrangement is to blow as many particles as possible from the shelf 2 and the items on it onto the electrostatic adhesive pad 31 of the adhesive plate 3, so as to avoid subsequent contamination.
[0037] Specifically, the cabin 1 is equipped with a slide rail 16, and the shelf 2 is slidably connected to the slide rail 16, which facilitates the movement of the shelf 2 and the taking and placing of items. That is, when it is necessary to take or place items, the shelf 2 can be moved out of the transition cavity 11 in whole or in part first, and then the items can be taken or placed without the user having to put their body into the transition cavity 11 to take or place items, thus improving the user experience.
[0038] Specifically, such as Figure 3 As shown, the dust-adhesive plate 3 has several support feet 32 on the side opposite to the electrostatic dust-adhesive pad 31, and the support feet 32 abut against the inner wall of the chamber 1. The support feet 32 serve to support the dust-adhesive plate 3 and prevent the dust-adhesive plate 3 from shaking randomly.
[0039] In one specific embodiment, the cabin 1 has an inner hatch (not shown in the figure) and an outer hatch (not shown in the figure) at opposite ends. The glove box transition compartment is equipped with sensors for sensing the opening and closing of the inner and outer hatches to control whether air enters through the air inlet 12 and whether air exits through the air outlet 13. The sensors can be commercially available optical sensors or other sensors, as long as they can identify the opening and closing of the inner and outer hatches.
[0040] The inner hatch separates the glove box body from the glove box transition compartment, while the outer hatch separates the transition compartment from the external environment. Sensors, as well as the air source and vacuum pump, can be connected to a host computer. Based on the opening and closing data of the inner and outer hatches from the sensors, the air source and vacuum pump are controlled, i.e., whether air is blown or a vacuum is drawn into the transition chamber 11. The inner hatch separating the glove box body from the transition compartment can be understood as the inner hatch separating the space inside the glove box body from the transition chamber 11; that is, the inner hatch controls the connection or separation between the space inside the glove box body and the transition chamber 11.
[0041] For example, when the outer hatch is opened, the sensor detects that the outer hatch is open, and then the air source in the transition chamber 11 starts to intake (blow air) through the air inlet 12. The transition chamber 11 is under positive pressure, higher than the air pressure of the outside environment, which can also prevent external air and particles from entering the transition chamber. In addition, when items are sent from outside to the transition chamber, the gas sprayed from the air inlet 12 can also blow off the particles on the items, which fall onto the electrostatic dust-adhesive pad 31 through the through holes 22 on the shelf 2. When the items are placed and the outer hatch is closed, the sensor detects that the outer hatch is closed, and then the air inlet 12 or the air source is closed, realizing automatic control and preventing the air inlet nozzle from being forgotten to be turned on when the hatch is opened. In addition, after the outer hatch is closed, the sensor can also control the vacuum pump to start after detecting that the outer hatch is closed, and evacuate the transition chamber 11 through the air outlet 13.
[0042] Specifically, the glove box transition chamber also includes an air inlet pipe 4 connected to an air source and an air outlet pipe 5 connected to a vacuum pump. The air inlet pipe 4 is connected to an air inlet 12, and the air outlet pipe 5 is connected to an air outlet 13.
[0043] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.
[0044] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.
Claims
1. A glove box transition compartment, characterized in that, include: The cabin has a transition cavity inside, the top of the cabin is provided with an air inlet communicating with the transition cavity, and the bottom of the cabin is provided with an air outlet communicating with the transition cavity. A shelf is slidably disposed within the transition cavity and located between the air inlet and the air outlet; A dust-adhesive plate is disposed in the transition cavity and located between the storage plate and the air outlet. An electrostatic dust-adhesive pad is provided on the side of the dust-adhesive plate facing the storage plate.
2. The glove box transition compartment according to claim 1, characterized in that, The shelf has a surface for supporting items, and the surface is provided with several through holes.
3. The glove box transition compartment according to claim 1, characterized in that, The electrostatic adhesive mat comprises several electrostatic adhesive layers that are bonded together.
4. The glove box transition compartment according to claim 1, characterized in that, The cabin is also provided with a limiting part, and the dust-adhesive plate is slidably connected to the limiting part.
5. The glove box transition compartment according to claim 1, characterized in that, The air inlet is equipped with a conical nozzle, and the jet area of the conical nozzle can cover the shelf.
6. The glove box transition compartment according to claim 1, characterized in that, The cabin is equipped with a sliding rail, and the shelf is slidably connected to the sliding rail.
7. The glove box transition compartment according to claim 1, characterized in that, The adhesive board is provided with several support feet on the side opposite to the electrostatic adhesive pad, and the support feet abut against the inner wall of the cabin.
8. The glove box transition compartment according to claim 1, characterized in that, The cabin has an inner door and an outer door at opposite ends. The glove box transition compartment is equipped with sensors for opening and closing the inner and outer doors to control whether air enters through the air inlet and whether air exits through the air outlet.
9. The glove box transition compartment according to claim 1, characterized in that, The glove box transition chamber also includes an air inlet pipe connected to an air source and an air outlet pipe connected to a vacuum pump. The air inlet pipe is connected to an air inlet, and the air outlet pipe is connected to an air outlet.
10. A glove box, characterized in that, It includes a glove box body and a glove box transition compartment connected to the glove box body, wherein the glove box transition compartment is the glove box transition compartment as described in any one of claims 1 to 9.