Vacuum chuck

Abstract

The utility model discloses a vacuum suction cup which comprises a suction cup body. The suction cup body is connected with the vacuum pump through a pipeline. The sucker body comprises a first adsorption layer, a second adsorption layer and a third adsorption layer; valves are arranged on the inner sides of the first adsorption layer and the third adsorption layer; according to the actual product size, the conducting positions and the number of the valves at the first adsorption layer can be controlled for adsorption, when a product is located above the first through hole, the valve device is kept in an open state and generates suction force so as to adsorb the product, and when no product exists, the valve device is kept in a closed state and does not generate suction force, and it is guaranteed that the corresponding adsorption hole does not leak air.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing equipment, and in particular to a vacuum chuck. Background Technology

[0002] With the rapid development of the ceramic semiconductor industry, the demand for ceramic materials of different specifications is also increasing. Due to the characteristics of ceramic materials, the processing requirements are very high. According to surveys, the current methods for fixing ceramic products are: 1. adhesive fixing, 2. vacuum chuck fixing, and 3. magnetic fixing. Over 80% of the products use adhesive and magnetic fixing methods, while a small number use vacuum chuck fixing. Vacuum chuck fixing has advantages such as convenient clamping, avoiding product deformation during processing, and preventing product contamination. In comparison, vacuum chuck fixing is superior to the other two fixing methods.

[0003] However, the current use of suction cups still has the following problems: Firstly, the suction cups used are mainly designed based on the product, and one suction cup can only be used to process products of one size. When order demand increases and product types and specifications become more diverse, more suction cups need to be designed to process the corresponding products. This requires more time to purchase or independently design suction cups, resulting in high time costs. Such products suffer from excessively long production cycles and high production costs. At the same time, when the size and specifications change, different sizes of suction cups are required, which also causes great waste. Secondly, current vacuum suction cups have very high requirements for the flatness of the product surface. If the product flatness is too poor, the vacuum suction cup will leak air, causing instability in the adsorption of ceramic materials, making them prone to falling off, and in severe cases, leading to product quality problems. Utility Model Content

[0004] The purpose of this utility model is to solve the limitations of existing suction cups in processing products of different specifications, namely, that one suction cup can only process products of one size and specification and cannot process products of other specifications, as well as the high requirements for product flatness, and the high time cost of designing suction cups and the high cost of purchasing suction cups. Therefore, a vacuum suction cup is proposed.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: a vacuum suction cup, comprising:

[0006] The suction cup itself;

[0007] The suction cup body is connected to the vacuum pump via a pipe;

[0008] The suction cup body includes a first adsorption layer, a second adsorption layer, and a third adsorption layer;

[0009] Valves are provided on the inner sides of the first adsorption layer and the third adsorption layer.

[0010] As a further description of the above technical solution: one end face of the first adsorption layer is connected to the item, and the other end face is connected to the second adsorption layer; the other end face of the second adsorption layer is connected to the third adsorption layer; and the other end face of the third adsorption layer is connected to an external device.

[0011] As a further description of the above technical solution: the first adsorption layer has a plurality of first through holes on the side face away from the second adsorption layer, and the other end of the first through hole is provided with a first volume cavity.

[0012] As a further description of the above technical solution: a valve and a sensing device are provided on the inner side of the first volumetric cavity.

[0013] As a further description of the above technical solution: a plurality of second through holes are provided on the second adsorption layer, and the positions of the plurality of second through holes correspond to the positions of the valve outlets in the plurality of first volume cavities.

[0014] As a further description of the above technical solution: several adhesive grooves are formed on the end face of the second adsorption layer and the third adsorption layer near the first adsorption layer.

[0015] As a further description of the above technical solution: the third adsorption layer is provided with a second volume cavity, and the second through hole is connected to the second volume cavity.

[0016] As a further description of the above technical solution: a plurality of the first through holes are arranged in a circumferential array, and the number of such holes increases sequentially from the center outwards.

[0017] As a further description of the above technical solution: the first adsorption layer, the second adsorption layer and the third adsorption layer are provided with threaded holes and are connected by bolts.

[0018] As a further description of the above technical solution: the bolt is installed from the end face of the third adsorption layer away from the first adsorption layer, passes through the second adsorption layer and the third adsorption layer, and is installed inside the first adsorption layer.

[0019] The above technical solution has the following advantages or beneficial effects:

[0020] The valve position and number at the first adsorption layer can be controlled according to the actual product size. When there is a product above the first through hole, the valve device remains open to generate suction and adsorb the product. When there is no product, the valve device remains closed to generate no suction and ensure that the corresponding adsorption hole does not leak air. Attached Figure Description

[0021] Figure 1 This is a perspective view of the vacuum suction cup proposed in this utility model;

[0022] Figure 2 This is a cross-sectional view of the vacuum suction cup proposed in this utility model;

[0023] Figure 3 for Figure 2 A schematic diagram of the structure of the first adsorption layer in direction A;

[0024] Figure 4 for Figure 2 A schematic diagram of the structure of the second adsorption layer in the A direction;

[0025] Figure 5 for Figure 2 A schematic diagram of the structure of the third adsorption layer in the A direction;

[0026] Legend:

[0027] 1. First adsorption layer; 11. First through hole; 12. First volumetric cavity; 2. Second adsorption layer; 21. Second through hole; 3. Third adsorption layer; 31. Second volumetric cavity; 4. Threaded hole; 5. Adhesive groove. Detailed Implementation

[0028] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0029] Reference Figures 1-5 The present invention provides an embodiment of a vacuum suction cup, comprising: a suction cup body; the suction cup body is connected to a vacuum pump via a pipe; the suction cup body includes a first adsorption layer 1, a second adsorption layer 2 and a third adsorption layer 3; valves are provided on the inner sides of the first adsorption layer 1 and the third adsorption layer 3.

[0030] In this embodiment, the main material of the suction cup body is alumina ceramic. Compared with other materials, ceramic materials have the characteristics of high hardness, high melting point, and oxidation resistance. As a tooling, it has the advantages of good surface flatness and resistance to deformation, and the dimensional accuracy of the processed ceramic products can be higher. The suction cup body is connected to the vacuum pump through a gas pipe (existing technology, not shown in the figure). The vacuum pump requires 220V voltage to start and meets national standards. A gas storage tank is installed on the vacuum pump. The vacuum pump has the functions of gas extraction and pressure holding. The suction cup body is equipped with a main valve to control the gas flow. The conduction position and number of valves at the first adsorption layer 1 can be controlled according to the actual product size for adsorption. When there is a product above the first through hole, the valve device remains open, generating suction to adsorb the product. When there is no product, the valve device remains closed, no suction is generated, and the corresponding adsorption hole is airtight.

[0031] One end face of the first adsorption layer 1 is connected to the object, and the other end face is connected to the second adsorption layer 2. The other end face of the second adsorption layer is connected to the third adsorption layer 3, and the other end face of the third adsorption layer 3 is connected to an external device. The first adsorption layer 1, the second adsorption layer 2, and the third adsorption layer 3 are provided with threaded holes 4 for bolt connection. The bolts are installed from the end face of the third adsorption layer 3 away from the first adsorption layer 1, pass through the second adsorption layer 2 and the third adsorption layer 3, and pass through the inner side of the first adsorption layer 1.

[0032] In this embodiment, the first adsorption layer 1, the second adsorption layer 2 and the third adsorption layer 3 are connected by bolts. The installation position is the end face of the third adsorption layer 3 away from the first adsorption layer 1, and the threaded hole 4 of the first adsorption layer 1 is a countersunk hole to avoid air leakage. The suction cup body is designed in different positions according to the actual processing of the product. The third adsorption layer 3 is connected to external equipment by adding a rotatable valve, and it can be used in vertical and horizontal spindle machine tools.

[0033] A plurality of first through holes 11 are provided on the end face of the first adsorption layer 1 away from the second adsorption layer 2, and a first volume cavity 12 is provided at the other end of the first through hole 11; a valve and a sensing device are provided on the inner side of the first volume cavity 12.

[0034] In this embodiment, a protective film is attached to the end face of the first adsorption layer 1 near the product. The protective film can reduce the requirements for the flatness of the product surface and prevent the first adsorption layer 1 from leaking. The first adsorption layer 1 is provided with multiple first through holes 11, each of which is connected to the first volume cavity 12. The first volume cavity 12 is provided with an independent valve device, so that each first through hole 11 can work independently. Through the sensing device on the valve, when there is a product above the first through hole 11, the valve device of the first volume cavity 12 remains open, generating suction to adsorb the product. When there is no product above the first through hole 11, the valve device of the first volume cavity 12 remains closed, no suction is generated, and the corresponding first through hole 11 is guaranteed to be airtight.

[0035] The second adsorption layer 2 has a plurality of second through holes 21, the positions of which correspond to the positions of the valve outlets in the plurality of first volume chambers 12.

[0036] In this embodiment, the second adsorption layer 2 is provided with a plurality of second through holes 21. The second through holes 21 correspond to the air outlet of the valve of the first volume cavity 12 in the first adsorption layer 1. The air between the product and the suction cup is discharged into the second volume cavity 31 through the second through holes 21. The second adsorption layer 2 mainly plays a transition role, ensuring that the pressure at the first through hole 11 of the suction cup body is consistent, and avoiding the product from falling off due to inconsistent pressure when adsorbing the product.

[0037] Several adhesive grooves 5 are provided on the end faces of the second adsorption layer 2 and the third adsorption layer 3 near the first adsorption layer 1.

[0038] In this embodiment, the first adsorption layer 1, the second adsorption layer 2, and the third adsorption layer 3 are mainly connected by a glue groove 5 and bolts. Due to the material properties of the suction cup body, such as high hardness, high melting point, and oxidation resistance, the clamping process saves time and the product deformation is small.

[0039] The third adsorption layer 3 is provided with a second volume cavity 31, and the second through hole 21 is connected to the second volume cavity 31.

[0040] In this embodiment, the third adsorption layer 3 is provided with a second volume chamber 31. The air between the product and the suction cup eventually flows into the second volume chamber 31 and is then discharged through the main valve connected to the second volume chamber 31.

[0041] Several first through holes 11 are arranged in a circular array, with the number increasing sequentially from the center outwards.

[0042] In this embodiment, products of different sizes can be adsorbed. The larger the product size and the greater the mass, the greater the suction force required. In order to avoid the product from being deformed due to concentrated suction force, the number of first through holes 11 increases sequentially from the center outwards.

[0043] When using it, first fix the suction cup body on the workbench of the external device, connect the vacuum pump and the suction cup body, check whether there is any air leakage at the connection, set the pressure parameters of the vacuum pump, place the product on the suction cup body, adjust the position of the product, and turn on the vacuum pump to generate suction to adsorb the product.

[0044] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A vacuum suction cup, characterized in that, include: Suction cup body; The suction cup body is connected to the vacuum pump via a pipe; The suction cup body includes a first adsorption layer (1), a second adsorption layer (2), and a third adsorption layer (3); Valves are provided on the inner sides of the first adsorption layer (1) and the third adsorption layer (3).

2. The vacuum suction cup according to claim 1, characterized in that: One end face of the first adsorption layer (1) is connected to the item, and the other end face is connected to the second adsorption layer (2). The other end face of the second adsorption layer is connected to the third adsorption layer (3), and the other end face of the third adsorption layer (3) is connected to an external device.

3. The vacuum suction cup according to claim 1, characterized in that: The first adsorption layer (1) has a plurality of first through holes (11) on one end face away from the second adsorption layer (2), and a first volume cavity (12) is provided at the other end of the first through hole (11).

4. The vacuum suction cup according to claim 3, characterized in that: A valve and a sensing device are provided on the inner side of the first volume cavity (12).

5. The vacuum chuck according to claim 3, characterized in that: The second adsorption layer (2) has a plurality of second through holes (21), and the positions of the plurality of second through holes (21) correspond to the positions of the valve outlets in the plurality of first volume cavities (12).

6. The vacuum suction cup according to claim 1, characterized in that: The second adsorption layer (2) and the third adsorption layer (3) have several adhesive grooves (5) on the end face of the side close to the first adsorption layer (1).

7. The vacuum chuck according to claim 5, characterized in that: The third adsorption layer (3) is provided with a second volume cavity (31), and the second through hole (21) is connected to the second volume cavity (31).

8. The vacuum chuck according to claim 3, characterized in that: The first through holes (11) are arranged in a circular array, and the number of holes increases sequentially from the center outwards.

9. The vacuum chuck according to claim 1, characterized in that: The first adsorption layer (1), the second adsorption layer (2) and the third adsorption layer (3) are provided with threaded holes (4) and are connected by bolts.

10. The vacuum chuck according to claim 9, characterized in that: The bolt is installed from the end face of the third adsorption layer (3) away from the first adsorption layer (1), passes through the second adsorption layer (2) and the third adsorption layer (3), and passes through the inner side of the first adsorption layer (1).

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