Intelligent acceleration sensor based on micro electro mechanical system
By integrating MEMS sensor chips and TEDS chips, the intelligent accelerometer solves the problems of poor low-frequency response and low information management efficiency of traditional IEPE accelerometers, achieving low noise, low-frequency response and intelligent information management, thus improving user efficiency.
Patent Information
- Application Number
- CN202423156871.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-20
- Publication Date
- 2025-11-14
- Estimated Expiration
- 2034-12-20
AI Technical Summary
Traditional IEPE accelerometers have poor frequency response in the low-frequency range and lack TEDS smart sensor functionality, resulting in difficulties in low-frequency measurement and low information management efficiency.
It employs MEMS sensor chips and TEDS chips, combined with voltage regulation circuits and signal amplification circuits, all integrated on an integrated PCB circuit board, achieving low noise, good low-frequency response, and intelligent information management.
It improves the low-frequency response performance of the sensor, simplifies information management, and increases user work efficiency.
Smart Images
Figure CN223551747U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of sensor technology, and in particular to an IEPE accelerometer with TEDS smart sensor function based on MEMS microelectromechanical systems. Background Technology
[0002] Traditional accelerometers utilize the piezoelectric effect of piezoelectric materials to measure the acceleration of objects. Piezoelectric materials possess excellent mechanical properties, good time stability, and good temperature stability. However, IEPE accelerometers using piezoelectric materials exhibit poor frequency response when measuring frequencies below 0.5 Hz, failing to meet the requirements for low-frequency measurements. Furthermore, traditional sensors rarely possess TEDS (Intelligent Technology for Measurement) smart sensor functionality. In projects requiring testing a large number of measurement points, testers must spend considerable time compiling measurement data and recording sensor information, significantly reducing user efficiency. Therefore, designing an accelerometer with good low-frequency response, high stability, and intelligent information management capabilities has significant application value. Summary of the Invention
[0003] The purpose of this invention is to provide an IEPE accelerometer with TEDS intelligent sensor function based on MEMS (Micro-Electro-Mechanical Systems), which solves the problem of poor low-frequency response of traditional IEPE accelerometers and provides an intelligent sensor with TEDS function.
[0004] To achieve the above technical objectives and meet the above technical requirements, the technical solution adopted by this utility model is: an intelligent acceleration sensor based on microelectromechanical systems (MEMS), comprising a voltage regulator circuit, a MEMS sensor chip, a signal amplification circuit, and a TEDS chip. The input terminal of the voltage regulator circuit is connected to the positive terminal of the sensor input terminal, the output terminal of the voltage regulator circuit is connected to the power supply terminal of the MEMS sensor chip, the MEMS sensor chip is connected to the signal amplification circuit, the ground terminals of the MEMS sensor chip and the signal amplification circuit are connected to the negative terminal of the sensor input terminal, the output terminal of the TEDS chip is connected to the positive terminal of the sensor input terminal, and the ground terminal of the TEDS chip is connected to the negative terminal of the sensor input terminal.
[0005] Preferably, the voltage regulator circuit includes a first diode, a first resistor, a Zener diode, and a first capacitor. An external constant current power supply is input and connected to the Zener diode through the first diode and the first resistor. The Zener diode output is connected in parallel with the first capacitor to filter out power supply noise and output a constant power supply voltage.
[0006] Preferably, the signal amplification circuit includes a low-pass filter circuit and an operational amplifier. The output of the MEMS sensor chip passes through the low-pass filter circuit and is then converted to the required voltage range by the operational amplifier.
[0007] Preferably, the low-pass filter circuit includes a second resistor and a third resistor connected in series. The third resistor is connected to an operational amplifier, and the two ends of the third resistor are respectively connected to a second capacitor and a third capacitor and then grounded.
[0008] Preferably, the TEDS chip is connected to the output terminal via a second diode.
[0009] Compared with the traditional structure, the beneficial effects of this utility model are:
[0010] 1. This utility model has a reasonable design and is easy to use. The sensor adopts an integrated design, integrating the MEMS sensor chip, TEDS chip, power conversion and signal amplification circuit onto a single PCB circuit board. The sensor output is connected to the acquisition device, making it plug-and-play and allowing users to configure and read sensor information independently.
[0011] 2. To improve the low-frequency acquisition performance of the IEPE accelerometer, this invention uses a MEMS sensor chip instead of traditional piezoelectric materials, which has advantages such as low noise, good low-frequency response, and high temperature sensitivity. The TEDS chip, due to its small size, simple connection method, and intelligent information management, saves users a lot of time and improves work efficiency in intelligent sensor applications. Attached Figure Description
[0012] Figure 1 This is a schematic diagram of the sensor connection of this utility model;
[0013] Figure 2 This is a schematic diagram of the voltage regulator circuit of this utility model;
[0014] Figure 3 This is a schematic diagram of the signal amplification circuit of this utility model;
[0015] In the diagram: 1. First diode, 2. First resistor, 3. Zener diode, 4. First capacitor, 5. Low-pass filter circuit, 51. Second resistor, 52. Third resistor, 53. Second capacitor, 54. Third capacitor, 6. Operational amplifier, 7. Second diode. Detailed Implementation
[0016] The present invention will be further described below.
[0017] See attached document Figure 1A smart accelerometer based on microelectromechanical systems (MEMS) includes a voltage regulator circuit, a MEMS sensor chip, a signal amplification circuit, and a TEDS chip. The input terminal of the voltage regulator circuit is connected to the positive terminal of the sensor input terminal, the output terminal of the voltage regulator circuit is connected to the power supply terminal of the MEMS sensor chip, the MEMS sensor chip is connected to the signal amplification circuit, the ground terminals of the MEMS sensor chip and the signal amplification circuit are connected to the negative terminal of the sensor input terminal, the output terminal of the TEDS chip is connected to the positive terminal of the sensor input terminal, and the ground terminal of the TEDS chip is connected to the negative terminal of the sensor input terminal.
[0018] In this preferred embodiment, the voltage regulator circuit includes a first diode 1, a first resistor 2, a Zener diode 3, and a first capacitor 4. An external constant current power supply is input and connected to the Zener diode 3 through the first diode 1 and the first resistor 2. The output of the Zener diode 3 is connected in parallel with the first capacitor 4 to filter out power supply noise and output a constant power supply voltage.
[0019] In this preferred embodiment, the signal amplification circuit includes a low-pass filter circuit 5 and an operational amplifier 6. The output of the MEMS sensor chip passes through the RC low-pass filter circuit 5 and is converted to the required voltage range by the operational amplifier 6.
[0020] In this preferred embodiment, the RC low-pass filter circuit 5 includes a second resistor 51 and a third resistor 52 connected in series. The third resistor 52 is connected to the operational amplifier 6, and the two ends of the third resistor 52 are respectively connected to the second capacitor 53 and the third capacitor 54 and then grounded.
[0021] In this preferred embodiment, the TEDS chip is connected to the output terminal through the second diode 7. The TEDS chip stores basic information about the sensor, such as manufacturer, serial number, sensor type, sensitivity, etc.
[0022] In practical implementation, the IEPE constant current excitation is typically 24V / 4mA, which usually requires a step-down voltage regulator circuit to provide a stable power supply voltage to the MEMS sensor chip. Such a voltage regulator circuit would be... Figure 2 As shown.
[0023] like Figure 3 As shown, the MEMS sensor chip operates at a low voltage, and its output sensitivity is also low. An operational amplifier circuit can amplify the low-voltage signal to the required voltage range. The operational amplifier output is connected in series with a Zener diode, introducing a DC bias current of approximately a few volts.
[0024] When the TEDS smart sensor function of the sensor is needed, the input provides digital constant current excitation to configure or read sensor information within the TEDS smart sensor.
[0025] The above embodiments of this utility model are merely examples to clearly illustrate this utility model, and are not intended to limit the scope of protection of this utility model. All equivalent technical solutions also fall within the scope of this utility model, and the patent protection scope of this utility model should be defined by each claim.
Claims
1. A smart accelerometer based on microelectromechanical systems, characterized in that: The device includes a voltage regulator circuit, a MEMS sensor chip, a signal amplification circuit, and a TEDS chip. The input terminal of the voltage regulator circuit is connected to the positive terminal of the sensor input terminal, and the output terminal of the voltage regulator circuit is connected to the power supply terminal of the MEMS sensor chip. The MEMS sensor chip is connected to the signal amplification circuit, and the ground terminals of the MEMS sensor chip and the signal amplification circuit are connected to the negative terminal of the sensor input terminal. The output terminal of the TEDS chip is connected to the positive terminal of the sensor input terminal, and the ground terminal of the TEDS chip is connected to the negative terminal of the sensor input terminal.
2. The intelligent accelerometer based on microelectromechanical systems according to claim 1, characterized in that: The voltage regulator circuit includes a first diode (1), a first resistor (2), a Zener diode (3), and a first capacitor (4). An external constant current power supply is connected to the Zener diode (3) through the first diode (1) and the first resistor (2). The Zener diode (3) outputs a parallel first capacitor (4) to filter out power supply noise and output a constant power supply voltage.
3. The intelligent accelerometer based on microelectromechanical systems according to claim 1, characterized in that: The signal amplification circuit includes a low-pass filter circuit (5) and an operational amplifier (6). The output of the MEMS sensor chip passes through the low-pass filter circuit (5) and is converted to the required voltage range by the operational amplifier (6).
4. The intelligent accelerometer based on microelectromechanical systems according to claim 3, characterized in that: The low-pass filter circuit (5) includes a second resistor (51) and a third resistor (52) connected in series. The third resistor (52) is connected to the operational amplifier (6). The two ends of the third resistor (52) are connected to the second capacitor (53) and the third capacitor (54) respectively and then grounded.
5. The intelligent accelerometer based on microelectromechanical systems according to claim 1, characterized in that: The TEDS chip is connected to the output terminal via a second diode (7).