Grating and lens coupling system

Abstract

The utility model discloses a grating and lens coupling system, which relates to the technical field of semiconductor optical devices and comprises a working table, a lens grating coupling assembly used for chip coupling is arranged on the working table, a visual imaging assembly is arranged above the lens grating coupling assembly, a position adjusting assembly is arranged on the working table, and the position adjusting assembly is arranged on the working table. The position adjusting assembly is connected with the visual imaging assembly. The visual imaging assembly on the workbench is connected through the position adjusting assembly, the position of the visual imaging assembly is adjusted through the position adjusting assembly, the visual imaging assembly can be adjusted to a proper position, a picture amplified and imaged on a displayer through the lens and grating coupling table top is clearer, and then the coupling effect is improved; the technical problems that the position of an imaging assembly in an existing coupling system cannot be adjusted, and the coupling effect cannot be improved easily are solved.

Description

Technical Field

[0001] This utility model relates to the technical field of semiconductor optical devices, and in particular to a grating and lens coupling system. Background Technology

[0002] Chinese patent CN219476627U discloses a chip coupling system, including a test coupling stage, a chip clamping device, and an imaging system. The test coupling stage includes a chip base, a base adjustment module, a probe module, a chip carrier for supporting a silicon photonic chip, and a fixing module for fixing the chip carrier. The chip base is mounted on the base adjustment module, and the chip carrier and fixing module are mounted on the chip base. The probe module includes a probe and a support base. The support base is located on one side of the chip carrier, and the probe is hinged to the support base. A light-emitting module is disposed on the side of the chip carrier near the support base, and a light power monitoring module corresponding to the light-emitting module is disposed on the other side of the chip carrier. The chip clamping device is located on one side of the test coupling stage and includes a three-dimensional adjustment frame and a swing slide connected to the three-dimensional adjustment frame. The swing slide is connected to grippers for clamping the silicon photonic chip. The imaging system is located above the grippers.

[0003] However, the imaging system on this chip coupling system cannot be adjusted or moved. The position of the imaging system is fixed, and the angle at which the lens and grating coupling stage magnify the image on the display is fixed. It is impossible to adjust the imaging system to a suitable position so that the image magnified by the lens and grating coupling stage on the display is clearer, which is not conducive to improving the coupling effect. Utility Model Content

[0004] To address the shortcomings in the aforementioned background technology, this utility model proposes a grating and lens coupling system, which solves the technical problem that the imaging components in existing coupling systems cannot be positioned, thus hindering the improvement of coupling effects.

[0005] The technical solution of this utility model is implemented as follows: a grating and lens coupling system includes a worktable, on which a lens grating coupling assembly for chip coupling is provided, a visual imaging assembly is provided above the lens grating coupling assembly, and a position adjustment assembly is provided on the worktable, the position adjustment assembly being connected to the visual imaging assembly.

[0006] Preferably, the visual imaging component is a CCD camera module, and the position adjustment component includes a gantry connected to the worktable. The gantry is provided with a first adjustment platform that can move laterally, and a second adjustment platform that can move longitudinally is connected to the first adjustment platform. The second adjustment platform is connected to the CCD camera module.

[0007] Preferably, a third adjustable platform that can move longitudinally is connected to the first adjustable platform, and a UV curing lamp is connected to the third adjustable platform.

[0008] Preferably, the lens grating coupling assembly includes a coupling stage, a probe, a position fixing module, and a beam quality analyzer, all of which are arranged around the coupling stage on the worktable.

[0009] Preferably, the coupling platform includes a heat dissipation base, a temperature control module, and a pad. The heat dissipation base is connected to the workbench, and the temperature control module is located between the heat dissipation base and the pad. The temperature control module includes a heating unit and a cooling unit. The pad is provided with a fixing plate for pre-fixing devices.

[0010] Preferably, a three-axis adjustment frame is connected to the worktable, and the three-axis adjustment frame is connected to the probe.

[0011] Preferably, the position fixing module includes two six-dimensional adjustment frames, which are spaced apart, and a coupling fixture is provided between the two six-dimensional adjustment frames.

[0012] Preferably, the coupling fixtures are a first coupling fixture and a second coupling fixture, which are respectively connected to two six-dimensional adjustment frames.

[0013] Preferably, the workbench is provided with a linear adjustment platform, and a horizontally movable linear slide rail is slidably connected to the linear adjustment platform, and the beam quality analyzer is connected to the linear slide rail.

[0014] Preferably, the workbench is a vibration isolation platform.

[0015] The beneficial effects of this utility model are as follows: The visual imaging component on the worktable is connected by a position adjustment component. By adjusting the position of the visual imaging component through the position adjustment component, the visual imaging component can be adjusted to a suitable position, so that the image magnified on the display by the lens and grating coupling platform is clearer, thereby improving the coupling effect. Attached Figure Description

[0016] To more clearly illustrate the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a perspective view of the present invention.

[0018] Figure 2This is a schematic diagram showing the connection between the visual imaging component and the position adjustment component of this utility model.

[0019] Figure 3 This is a schematic diagram showing the connection between the triaxial adjustment frame and the probe of this utility model.

[0020] Figure 4 This is a schematic diagram of the position fixing module of this utility model.

[0021] Figure 5 This is a schematic diagram showing the connection between the linear adjustment table, linear slide rail, and beam quality analyzer of this utility model.

[0022] Figure 6 This is a schematic diagram of the coupling stage of this utility model.

[0023] In the diagram, 1 is the worktable, 2 is the coupling stage, 3 is the vision imaging component, 4 is the position adjustment component, 5 is the gantry, 6 is the first adjustment stage, 7 is the second adjustment stage, 8 is the UV curing lamp, 9 is the probe, 10 is the position fixing module, 11 is the beam quality analyzer, 12 is the heat dissipation base, 13 is the temperature control module, 14 is the pad, 15 is the three-axis adjustment frame, 16 is the six-dimensional adjustment frame, 17 is the first coupling fixture, 18 is the second coupling fixture, 19 is the linear adjustment stage, 20 is the linear slide rail, 21 is the third adjustment stage, and 22 is the fixing plate. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] Example 1: A grating-lens coupling system, such as Figure 1 and Figure 2 As shown, the system includes a worktable 1, on which a lens grating coupling assembly for chip coupling is mounted. A visual imaging assembly 3 is positioned above the lens grating coupling assembly. A position adjustment assembly 4 is also mounted on the worktable 1 and connected to the visual imaging assembly 3. The visual imaging assembly 3 on the worktable 1 is connected via the position adjustment assembly 4. By adjusting the position of the visual imaging assembly 3 using the position adjustment assembly 4, it can be positioned appropriately, resulting in a clearer image magnified by the lens and grating coupling stage on the display. This improves the coupling effect and solves the technical problem in existing coupling systems where the imaging assembly cannot be positionally adjusted, hindering the improvement of coupling performance.

[0026] Example 2, based on Example 1, provides a grating and lens coupling system, such as... Figure 1 and Figure 2 As shown, the visual imaging component 3 is a CCD camera module, and the position adjustment component 4 includes a gantry 5 connected to the worktable 1. The gantry 5 is equipped with a first adjustment platform 6 that can move laterally, and a second adjustment platform 7 that can move longitudinally is connected to the first adjustment platform 6. The second adjustment platform 7 is connected to the CCD camera module. The photos taken by the CCD camera module are clearer and have higher sensitivity.

[0027] The gantry 5 is set up to provide support for the CCD camera module. The first adjustment platform 6 is set up to allow the CCD camera module to move laterally, and the second adjustment platform 7 is set up to allow the CCD camera module to move longitudinally. The first adjustment platform 6 and the second adjustment platform 7 work together to achieve the lateral and longitudinal position adjustment of the CCD camera module.

[0028] In this application, two second adjustment stages 7 are provided on the first adjustment stage 6, and a CCD camera module is connected to each of the two second adjustment stages 7. The two CCD camera modules magnify and image the lens grating coupling assembly in two vertical directions, so that the magnified image of the lens and grating coupling stage on the display is clearer.

[0029] Example 3, based on Example 2, provides a grating and lens coupling system, such as... Figure 1 and Figure 2 As shown, a third adjustable platform 21, which can move longitudinally, is connected to the first adjusting platform 6. A UV curing lamp 8 is connected to the third adjusting platform 21. The UV curing lamp 8 uses ultraviolet light to rapidly cure UV-curable resin, thus achieving the effects of drying and curing. The UV curing lamp 8 emits ultraviolet light of a specific wavelength, triggering a photosensitive chemical reaction in the material, and is typically used for the rapid curing of photosensitive adhesives. The third adjusting platform 21 is designed to work in conjunction with the first adjusting platform 6 for position adjustment. The first adjusting platform 6 and the third adjusting platform 21 work together to adjust the position of the UV curing lamp 8 both laterally and longitudinally.

[0030] Example 4, based on Example 1 or 3, provides a grating and lens coupling system, such as... Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 and Figure 6As shown, the lens grating coupling assembly includes a coupling stage 2, a probe 9, a position fixing module 10, and a beam quality analyzer 11. The probe 9, position fixing module 10, and beam quality analyzer 11 are all arranged around the coupling stage 2 on the worktable 1. The coupling stage 2 is used to support and place the product to be coupled; the probe 9 is used to apply positive and negative power to the product; the position fixing module 10 is used to fix related components during product coupling and to adjust the position of the components to be coupled for product operation; the beam quality analyzer 11 is used to detect the light output quality of the product during coupling and to determine whether the components have reached the optimal position by evaluating the light output quality.

[0031] Example 5, based on Example 4, provides a grating and lens coupling system, such as... Figure 1 and Figure 6 As shown, the coupling platform 2 includes a heat dissipation base 12, a temperature control module 13, and a pad 14. The heat dissipation base 12 is connected to the workbench 1. The temperature control module 13 is located between the heat dissipation base 12 and the pad 14. The temperature control module 13 includes a heating unit and a cooling unit. The pad 14 is provided with a fixing plate 22 for pre-fixing components. The temperature control module 13 includes a heating unit and a cooling unit. The heating unit is a heating element, and the cooling unit is a thermoelectric cooler. The thermoelectric cooler utilizes the Peltier effect of semiconductor materials. When direct current passes through a thermocouple composed of two different semiconductor materials connected in series, heat can be absorbed and released at the two ends of the thermocouple, respectively, achieving the purpose of cooling. It is a cooling technology that generates negative thermal resistance. Its characteristics are that there are no moving parts and the reliability is relatively high. The heating element is a ceramic flat heating element. When the ceramic heating element is powered on, the surface temperature of the ceramic flat heating element can reach over 200 degrees Celsius through heat conduction. The thermoelectric cooler and heating element are bonded to the heat sink base 12 using thermally conductive silicone. A pad 14 is located on top of the thermoelectric cooler and heating element. The cooling energy generated by the thermoelectric cooler is transferred through the pad 14, as is the heat generated by the heating element. A fixing plate 22 is connected to the top of the pad 14, thus transferring the heat or cooling energy transferred by the pad 14 to the pre-fixed components on the fixing plate 22.

[0032] Example 6, based on Example 5, provides a grating and lens coupling system, such as... Figure 1 and Figure 3As shown, a three-axis adjustment frame 15 is connected to the worktable 1, and the three-axis adjustment frame 15 is connected to the probe 9. In this application, two three-axis adjustment frames 15 are spaced apart on the worktable 1, and each three-axis adjustment frame 15 is connected to a probe 9. The two probes 9 correspond to the positive and negative terminals of the power supply, respectively, and the two probes 9 corresponding to the positive and negative terminals of the power supply are used to apply positive and negative power to the product. The three-axis adjustment frame 15 can be independently adjusted in the X, Y, and Z axes to achieve precise positioning at the micron or even nanometer level. By connecting the probe 9 to the three-axis adjustment frame 15 and adjusting the angle of the probe 9 through the three-axis adjustment frame 15, the angle of the probe 9 can be adjusted in the X, Y, and Z axes, thereby adjusting the angle of the positive and negative power supply, which is beneficial for applying positive and negative power to the product.

[0033] Example 7, based on Example 6, provides a grating and lens coupling system, such as... Figure 1 and Figure 4 As shown, the position fixing module 10 includes two six-dimensional adjustment frames 16, which are spaced apart and a coupling fixture is provided between them. The angle of the coupling fixture can be adjusted independently and precisely using the two six-dimensional adjustment frames 16, as well as rotations around the X, Y, and Z axes, meeting complex adjustment requirements and suitable for various precision operations. Adjusting the angle of the coupling fixture via the six-dimensional adjustment frames 16 allows for adjustment of the angle of the coupling fixture along the X, Y, and Z axes, as well as rotations around the X, Y, and Z axes, thereby facilitating product coupling.

[0034] Example 8, based on Example 7, provides a grating and lens coupling system, such as... Figure 4 As shown, the coupling fixtures include a first coupling fixture 17 and a second coupling fixture 18, which are respectively connected to two six-dimensional adjustment frames 16. The first coupling fixture 17 and the second coupling fixture 18 work together to couple the product, and the angle of the first coupling fixture 17 or the second coupling fixture 18 can be adjusted by the six-dimensional adjustment frames 16.

[0035] Example 9, based on Example 8, provides a grating and lens coupling system, such as... Figure 1 and Figure 5 As shown, the worktable 1 is equipped with a linear adjustment platform 19, and a laterally movable linear slide rail 20 is slidably connected to the linear adjustment platform 19. The beam quality analyzer 11 is connected to the linear slide rail 20. The linear slide rail 20 can move laterally along the linear adjustment platform 19, thereby moving the beam quality analyzer 11 fixed on the linear slide rail 20 laterally. This facilitates adjusting the beam quality analyzer 11 to the optimal position, ensuring the output light quality when testing coupled products.

[0036] Example 10, based on Example 3 or 9, provides a grating and lens coupling system, such as... Figure 1 As shown, the workbench 1 is a vibration isolation platform. The vibration isolation platform mainly consists of a support frame, supports, pads, blocks, and supporting components. The supporting components can be made of metal, wood, or concrete, etc. The supports and frames are the main components of the vibration isolation platform; they are used to support the entire platform, while the pads and blocks are used to prevent vibration propagation, thus achieving a better vibration isolation effect.

[0037] In Example 10, a coupling stage 2 and a gantry frame 5 are sequentially installed on the workbench 1. A first adjustment stage 6 is then installed on the gantry frame 5. A second adjustment stage 7 and a third adjustment stage 23 are slidably connected to the first adjustment stage 6. A visual imaging component 3 is connected to the second adjustment stage 7, and a UV curing lamp 8 is connected to the third adjustment stage 23. Two three-axis adjustment frames 15, two six-dimensional adjustment frames 16, and a linear adjustment stage 19 are connected to the workbench 1. Two probes 9 are connected to the two three-axis adjustment frames 15, and a first coupling fixture 17 and a second coupling fixture 18 are connected to the two six-dimensional adjustment frames 16. A linear slide rail 20 is slidably connected to the linear adjustment stage 19, and a beam quality analyzer 11 is connected to the linear slide rail 20. The visual imaging component 3 is then connected to the second adjustment stage 19. Components such as component 3, UV curing lamp 8, probe 9, beam quality analyzer 11, first coupling fixture 17, and second coupling fixture 18 are adjusted according to the coupling stage 2. Then, the product is placed on the fixing plate 22 on the coupling stage 2, and then the product is fixed by the first coupling fixture 17 and the second coupling fixture 18. Then, the temperature control module 13 is activated, and the heating function of the heating element is used to pre-fix the device coupled to the product. Then, the probe 9 is used to apply positive and negative power to the product. The beam quality analyzer 11 is used to detect the light quality of the product during coupling. By evaluating the light quality, it is determined whether the device has reached the optimal position. And the cooling function of the semiconductor cooling chip is used to cool the device coupled to the product to prevent damage to the device.

[0038] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A grating and lens coupling system, comprising a stage (1), characterized in that: The worktable (1) is provided with a lens grating coupling assembly for chip coupling, and a visual imaging assembly (3) is provided above the lens grating coupling assembly. The worktable (1) is provided with a position adjustment assembly (4), and the position adjustment assembly (4) is connected to the visual imaging assembly (3).

2. The grating and lens coupling system according to claim 1, characterized in that: The visual imaging component (3) is a CCD camera module. The position adjustment component (4) includes a gantry (5) connected to the worktable (1). The gantry (5) is provided with a first adjustment platform (6) that can move laterally. The first adjustment platform (6) is connected to a second adjustment platform (7) that can move longitudinally. The second adjustment platform (7) is connected to the CCD camera module.

3. The grating and lens coupling system according to claim 2, characterized in that: A third adjustment platform (21) that can move longitudinally is connected to the first adjustment platform (6), and a UV curing lamp (8) is connected to the third adjustment platform (21).

4. The grating and lens coupling system according to claim 1 or 3, characterized in that: The lens grating coupling assembly includes a coupling stage (2), a probe (9), a position fixing module (10), and a beam quality analyzer (11). The probe (9), the position fixing module (10), and the beam quality analyzer (11) are all arranged around the coupling stage (2) on the worktable (1).

5. The grating and lens coupling system according to claim 4, characterized in that: The coupling platform (2) includes a heat dissipation base (12), a temperature control module (13) and a pad (14). The heat dissipation base (12) is connected to the workbench (1). The temperature control module (13) is located between the heat dissipation base (12) and the pad (14). The temperature control module (13) includes a heating unit and a cooling unit. The pad (14) is provided with a fixing plate (22) for pre-fixing devices.

6. The grating and lens coupling system according to claim 5, characterized in that: A three-axis adjustment frame (15) is connected to the worktable (1), and the three-axis adjustment frame (15) is connected to the probe (9).

7. The grating and lens coupling system according to claim 6, characterized in that: The position fixing module (10) includes two six-dimensional adjustment frames (16), which are spaced apart and a coupling fixture is provided between the two six-dimensional adjustment frames (16).

8. The grating and lens coupling system according to claim 7, characterized in that: The coupling fixtures are a first coupling fixture (17) and a second coupling fixture (18), which are respectively connected to two six-dimensional adjustment frames (16).

9. The grating and lens coupling system according to claim 8, characterized in that: The workbench (1) is provided with a linear adjustment table (19), and a linear slide rail (20) that can move laterally is slidably connected to the linear adjustment table (19). The beam quality analyzer (11) is connected to the linear slide rail (20).

10. The grating and lens coupling system according to claim 3 or 9, characterized in that: The workbench (1) is a vibration isolation platform.

Images