Sliding table type sheet basket conveying device
By using a sliding tray conveyor, multiple carriers and elevators can be docked using linear modules and robotic arms. This solves the problems of difficult elevator docking and AGV operation in narrow spaces, reducing equipment costs and complexity, and improving conveying efficiency and safety.
Patent Information
- Application Number
- CN202423038352.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-10
- Publication Date
- 2025-11-18
- Estimated Expiration
- 2034-12-10
AI Technical Summary
In existing silicon wafer production technology, the hoist cannot be directly connected to the production equipment, resulting in a large number of robotic arms and high costs. AGV vehicles also have difficulty avoiding obstacles and charging in narrow spaces, increasing the complexity of the equipment and the difficulty of operation.
The slide-type basket conveyor system includes a base and a slide. A linear module drives the slide to move. The robotic arm and gripper can extend out of the base to connect multiple loading positions with the hoist, reducing the need for robotic arms and utilizing fixed power supplies and narrow spaces.
It reduces equipment costs, simplifies spatial layout, reduces the need for obstacle avoidance planning and charging piles, and improves transmission efficiency and safety.
Smart Images
Figure CN223560697U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the technical field of silicon wafer production, especially to a sliding table type wafer basket conveying device. BACKGROUND
[0002] In the production of silicon wafers, in order to improve the utilization rate of factory space and the efficiency of material transfer, an overhead transportation line is usually added, which requires the use of an elevator. However, due to the limitations of the profile structure of the upload and download positions of the production equipment, the elevator sometimes cannot directly interface with the production equipment for material transfer.
[0003] To improve production efficiency, the commonly used production equipment does not have only one upload position and one download position. For example, a commonly used sorting machine has two upload positions and eight download positions. If fixed clamps or mechanical hands are arranged at each upload and download position to interface with the conveying belt and then interface with the elevator, the number of additional clamps or mechanical hands required is too large, and the cost is huge.
[0004] Using AGV vehicles to transfer wafer baskets may slightly reduce the number of mechanical equipment, but the cost of a single AGV vehicle is high, and the space required for the cross-activity operation of the AGV vehicle on the ground is relatively large. In some narrow spaces, the AGV vehicle cannot turn around, not to mention how to avoid each other and smoothly transfer wafer baskets. Moreover, the wafer basket transfer operation is frequent, and the wafer basket transfer distance is relatively short. The AGV vehicle needs to be calibrated every time it moves to a position. In a narrow space, the route planning of the AGV vehicle is also a very tricky problem. Moreover, the AGV vehicle needs an independent charging pile. It is not easy to install multiple independent charging piles that are easy for the AGV vehicle to connect in a factory building with complex links of silicon wafer production equipment. SUMMARY
[0005] The utility model aims at providing a sliding table type wafer basket conveying device to solve the problems in the above background technology.
[0006] The technical scheme of the utility model comprises: a sliding table type wafer basket conveying device, which comprises a base platform and a sliding table, wherein,
[0007] A linear module is arranged on the base platform, which can drive the sliding table to move along the length direction of the base platform;
[0008] A mechanical arm and a gripper are arranged on the sliding table. The mechanical arm can extend out of the wide end of the base platform, and the gripper can be lifted, moved horizontally, and / or rotated.
[0009] Further, the gripper comprises a clamp cylinder and a clamp arm, the clamp arm is connected to the clamp cylinder through a slide rod, the clamp cylinder is provided with a fixed shield, and the slide rod is provided with a corrugated pipe.
[0010] Further, the clamping arm is provided with a wafer basket clamping groove and an obstacle avoidance sensor, the wafer basket clamping groove and the slide rod are located on the same side of the clamping arm, and the obstacle avoidance sensor and the slide rod are located on the opposite side of the clamping arm.
[0011] Further, the fixed shroud is provided with a clamping position sensor and a releasing position sensor, the slide rod is connected with a clamping and releasing trigger, when the clamping and releasing trigger triggers the clamping position sensor, the air claw of the clamping claw cylinder stops contraction, and when the clamping and releasing trigger triggers the releasing position sensor, the air claw of the clamping claw cylinder stops elongation.
[0012] Further, the base table is a closed shell, and a long guide hole in the same direction as the linear module is arranged on the bottom surface of the base table; the bottom end of the slide table penetrates through the long guide hole and is connected with the linear module located in the base table.
[0013] Further, the slide table is provided with a control box, and the mechanical arm is arranged on the control box and is controlled to work by the control box.
[0014] Further, the linear module comprises a following module and a power module connected with a driving motor, the following module is arranged in the same direction as the power module, and a first limiting block and a second limiting block are arranged on the long sides of the following module, respectively; the slide table is connected with the following module and / or the power module and moves between the first limiting block and the second limiting block.
[0015] Further, the long end of the guide rail in the power module is provided with an anti-falling sensor, and the slide seat is provided with an anti-falling trigger, when the anti-falling trigger triggers the anti-falling sensor, the driving motor stops working.
[0016] Further, the base table is provided with a plurality of movable wheels and a detachable supporting leg, and the detachable supporting leg can be telescoped along the thickness direction of the base table.
[0017] The utility model has the beneficial effect that: utilize a gripper to butt joint production equipment along linear distribution's multiple load positions and the elevator, can reduce the configuration quantity of manipulator, reduce equipment cost, simultaneously, the base table only serves as the support and guide component, its size can be adjusted according to the existing space layout of production party, can satisfy the installation in narrow space, the operation is not harmful, its structure is square, regular, compact, need not like AGV car's planning obstacle avoidance transmission route, also need not add specially made charging pile, can directly use the fixed power supply in workshop, greatly reduced the difficulty and cost of use, overhaul. BRIEF DESCRIPTION OF DRAWINGS
[0018] Figure 1 It is the first perspective solid drawing of the utility model embodiment;
[0019] Figure 2is a second perspective view of the embodiment of the utility model;
[0020] Figure 3 is the structure diagram inside the base station in the embodiment of the utility model;
[0021] Figure 4 is the first perspective view of the gripper in the embodiment of the utility model;
[0022] Figure 5 is the second perspective view of the gripper in the embodiment of the utility model;
[0023] Figure 6 is the overhead view of the utility model in use state;
[0024] In the figure,
[0025] 1, base station, 1.1 long guide hole,
[0026] 2, slide table, 2.1 C-shaped frame, 2.2 connecting plate, 2.3 stiffening rib,
[0027] 3, accompanying module,
[0028] 4, power module,
[0029] 5, drive motor,
[0030] 6, control box,
[0031] 7, mechanical arm,
[0032] 8, gripper, 8.1, clamping jaw cylinder, 8.2, clamping arm, 8.3, slide rod, 8.4, fixed shield, 8.5, corrugated protection pipe, 8.6, piece basket slot,
[0033] 9, upper loading position,
[0034] 10, download position,
[0035] 11, elevator,
[0036] 12, sorting machine,
[0037] 13, first limit block,
[0038] 14, second limit block,
[0039] 15, anti-drop sensor,
[0040] 16, anti-drop trigger,
[0041] 17, moving wheel,
[0042] 18, detachable supporting leg, 18.1, screw rod, 18.2, foot pad, 18.3, nut,
[0043] 19, obstacle avoidance sensor;
[0044] 20, clamping position sensor;
[0045] 21, releasing position sensor;
[0046] 22, clamping and releasing trigger. DETAILED DESCRIPTION
[0047] The technical solutions of the present application will be described clearly and completely below in combination with the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.
[0048] In the description of the present application, it should be understood that the orientations or positional relationships indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements indicated must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second" and the like are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features limited by "first", "second" and the like can explicitly or implicitly include one or more of the features. In the description of the present application, unless otherwise specified, the meaning of "a plurality of" is two or more.
[0049] In the description of the present application, it should be noted that, unless otherwise specified and limited, the terms "mounting", "connection", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be the communication between two elements inside. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.
[0050] Reference is made to the accompanying drawings Figures 1-6The embodiment provides a slide table 2 type wafer basket conveying device which comprises a base table 1, a slide table 2, a linear module, a driving motor 5, a control box 6, a mechanical arm 7 and a gripper 8; the slide table 2 is slidably arranged on the top of the base table 1; the control box 6 is fixedly arranged on the top of the slide table 2 and used for regulating and controlling the operation of the mechanical arm 7; the mechanical arm 7 is fixedly arranged on the top of the slide table 2, and the gripper 8 is fixedly arranged on the end of the mechanical arm 7 away from the control box 6; the linear module is arranged on the base table 1 and connected with the slide table 2 and the driving motor 5, and drives the slide table 2 to move along the length direction of the base table 1; the end of the mechanical arm 7 away from the control box 6 can extend out of the wide end of the base table 1, and the gripper 8 can be lifted, transversely moved or rotated.
[0051] Generally, a plurality of uploading positions 9 or a plurality of downloading positions 10 of a production device are dispersed along a straight line direction, and more uploading positions 9 and downloading positions 10 are dispersed along the same straight line direction; when the conveying device is used, the length direction of the base table 1 can be arranged in the same direction as the dispersion direction of the uploading positions 9 or the dispersion direction of the downloading positions 10 of the production device, the linear module is used to drive the gripper 8 to move along the dispersion direction of the uploading positions 9 or the dispersion direction of the downloading positions 10, and then the plurality of uploading positions and the lifting machine 11 of the production device are docked; and the mechanical arm 7 which can extend out of the wide end of the base table 1 can extend the gripper 8 into the uploading positions 9 or the downloading positions 10 from above, place or pick up the wafer basket, and realize material conveying.
[0052] When the conveying device is used, one gripper 8 is used to dock the plurality of uploading positions and the lifting machine 11 of the production device which are distributed along a straight line, the number of mechanical hands is reduced, the equipment cost is reduced, meanwhile, the base table 1 is only used as a support and guide member, the size of the base table 1 can be adjusted according to the existing space layout of the production side, the installation and operation in a narrow space can be realized without any obstacle, the structure is square, regular and compact, the conveying device does not need to plan an obstacle avoiding transmission route like an AGV vehicle, and does not need to additionally add a specially designed charging pile, and can directly use the fixed power supply in a factory building, so that the difficulty and cost of use and maintenance are greatly reduced.
[0053] The embodiment takes a sorting machine 12 with 10 uploading positions as an example, and specifically describes the arrangement and use of the wafer basket conveying device, as shown in the accompanying drawings. Figure 6As shown, the sorting machine 12 has 2 upper loading positions 9 and 8 lower loading positions 10, and is divided into two columns along a straight line at the end of the sorting machine 12. The lifting machine 11 is arranged outside the upper loading position 9 or the lower loading position 10. The base 1 is arranged on the outside of the sorting machine 12 and is arranged in the same direction as the loading position of the sorting machine 12. The sliding table 2 is slidingly arranged on the base 1. When it is necessary to transfer the wafer basket from the lifting machine 11 outside the upper loading position 9 to the upper loading position 9 of the sorting machine 12, or to transfer the wafer basket on the lower loading position 10 of the sorting machine 12 to the lifting machine 11 outside the lower loading position 10, the driving motor 5 drives the linear module to move, drives the sliding table 2, the mechanical arm 7 and the gripper 8 to the position of the wafer basket, the mechanical arm 7 lowers the gripper 8, the gripper 8 grabs the wafer basket, the mechanical arm 7 lifts the gripper 8, the driving motor 5 drives the linear module again, drives the sliding table 2, the mechanical arm 7 and the gripper 8 to the target position, and the mechanical arm 7 and the gripper 8 act to drop the wafer basket.
[0054] In order to protect the linear module and other structures due to the complex equipment in the factory building, the linear module and the driving motor 5 are arranged inside the base 1 in the embodiment, the base 1 is arranged as a closed shell, a long guide hole 1.1 is formed in the bottom surface of the base 1 in the same direction as the linear module, and the bottom end of the sliding table 2 penetrates through the long guide hole 1.1 and is connected to the linear module inside the base 1. In this way, falling objects or dust are prevented from falling into the base 1, damaging or clogging the linear module or the driving motor 5.
[0055] The linear module in the embodiment includes a following module 3 and a power module 4 connected to the driving motor 5. The following module 3 can be arranged in several groups and arranged in the same direction as the power module 4. The long sides of the following module 3 are respectively provided with first and second limit blocks 13 and 14. The sliding table 2 is connected to the following module 3 and the power module 4 and moves between the first and second limit blocks 13 and 14 to avoid sliding off the machine. Through the guidance and load sharing of the following module 3 and the power module 4, the stability of wafer basket transfer is improved, the friction loss of each part is reduced, and the service life is prolonged.
[0056] The shape of the sliding table 2 can be configured according to actual use requirements. The embodiment only exemplarily indicates some feasible or better schemes, and the specific shape of the sliding table 2 can be understood with reference to the drawings. Figure 3 The sliding table 2 includes a C-shaped frame 2.1 and a connecting plate 2.2. The opening of the C-shaped frame 2.1 is horizontal and faces the base 1. The inner surface of the C-shaped frame 2.1 slidingly abuts against the top surface, side surface and bottom surface of the base 1. The control box 6 is arranged on the outer top surface of the C-shaped frame 2.1. The connecting plate 2.2 is arranged on the inner bottom surface of the C-shaped frame 2.1 and extends towards the control box 6 for penetrating through the long guide hole 1.1 and connecting the linear module. The connecting plate 2.2 can be arranged as a vertical plate and connected to the side surface of the sliding seat in the linear module. In order to balance the load borne by each part of the sliding seat and reduce skew wear, the connecting plate 2.2 can be arranged as a detachable L-shaped plate. The horizontal part of the L-shaped plate is arranged on the top of the sliding seat, and the vertical part is connected to the C-shaped frame 2.1.
[0057] The following group, or two groups, can be set up, set up when the two sides of the power module 4 can be set apart, and the power module 4 and one of the groups of the following group 3 are connected with the connecting plate 2.2 to realize power transmission. The embodiment also provides a stiffener 2.3 at the connecting part of the C-shaped frame 2.1 and the connecting plate 2.2. The stiffener 2.3 can increase the connecting area of the C-shaped frame 2.1 and the connecting plate 2.2, and improve the stability of the slide table 2 structure.
[0058] In order to further protect the safe operation of the device, refer to the attached Figure 3 The embodiment provides a anti-falling sensor 15 at the long end of the guide rail in the power module 4, and an anti-falling trigger 16 on the slide seat. When the anti-falling trigger 16 triggers the anti-falling sensor 15, the driving motor 5 stops working, so as to prevent the slide table 2 from falling off and causing a safety accident. Through the multiple protection of the first limiting block 13, the second limiting block 14, the anti-falling trigger 16 and the anti-falling sensor 15, the safety of the slice basket conveying is improved.
[0059] In addition, the bottom of the base 1 is provided with a plurality of moving wheels 17 and a detachable support leg 18. The detachable support leg 18 can be telescoped in the thickness direction of the base 1. When it is necessary to move the device to other areas for use, the detachable support leg 18 can be detached, and the moving wheels 17 are used to transfer the base 1 and the equipment on the base 1. When the device is placed in place, the detachable support leg 18 can be installed, and the length of each detachable support leg 18 extending out of the base 1 is adjusted to level the top surface of the base 1, so that the equipment above runs smoothly. Refer to the attached Figure 3 The detachable support leg 18 can include a screw rod 18.1 and a foot pad 18.2 at the bottom end of the screw rod 18.1. The top end of the screw rod 18.1 is provided in the base 1 and limited by a nut 18.3.
[0060] The mechanical arm 7 used in the embodiment is a mature product in the field, and its structure and operating principle are not described here. A three-axis, four-axis or more-axis mechanical arm 7 can be selected according to the needs.
[0061] Refer to the attached Figures 4-5The gripper 8 of the embodiment comprises a clamping jaw cylinder 8.1, clamping arms 8.2, slide rods 8.3, a fixed shroud 8.4 and a corrugated shroud pipe 8.5. The clamping jaw cylinder 8.1 has two transversely arranged air jaws with opposite moving directions, and each air jaw is connected with a set of slide rods 8.3. The other end of the slide rods 8.3 is connected with the clamping arms 8.2. The fixed shroud 8.4 is sleeved outside the clamping jaw cylinder 8.1, and the slide rods 8.3 slide through the fixed shroud 8.4. The end of the slide rods 8.3 extending out of the fixed shroud 8.4 is surrounded by the corrugated shroud pipe 8.5. The action principle is as follows: when the clamping jaw cylinder 8.1 is actuated to extend the air jaw, the two sets of slide rods 8.3 are separated from each other, the corrugated shroud pipe 8.5 is extended, and the two sets of clamping arms 8.2 are separated from each other to be wider than the clamped part of the wafer basket. Then the mechanical arm 7 lowers the gripper 8 to the clamped part of the wafer basket. The clamping jaw cylinder 8.1 is reversely actuated to shorten the air jaw, the two sets of slide rods 8.3 are close to each other, the corrugated shroud pipe 8.5 is shortened, and the two sets of clamping arms 8.2 are close to each other to clamp the wafer basket. A plurality of parallel slide rods 8.3 can be arranged in each set of slide rods 8.3 to improve the load capacity. The corrugated shroud pipe 8.5 sleeved outside the slide rods 8.3 can be extended and retracted with the slide of the slide rods 8.3. Dust and damage protection can be provided for the slide rods 8.3 and the gap between the slide rods 8.3 during the whole use of the equipment.
[0062] To improve the clamping effect on the wafer basket, the clamping arms 8.2 are provided with wafer basket clamping grooves 8.6. The wafer basket clamping grooves 8.6 and the slide rods 8.3 are located on the same side of the clamping arms 8.2, and the openings of the wafer basket clamping grooves 8.6 on the two sets of clamping arms 8.2 are opposite. To prevent collision with other machines during the operation of the gripper 8, the clamping arms 8.2 are provided with obstacle avoidance sensors 19. The obstacle avoidance sensors 19 and the slide rods 8.3 are located on the opposite side of the clamping arms 8.2, and the obstacle avoidance sensors 19 can detect whether there is an obstacle outside the clamping arms 8.2.
[0063] Reference is made to the accompanying drawings Figure 4 The fixed shroud 8.4 is provided with clamping position sensors 20 and releasing position sensors 21. The slide rods 8.3 are connected with clamping and releasing triggers 22. When the clamping jaw cylinder 8.1 moves the slide rods 8.3, the clamping and releasing triggers 22 move with the slide rods 8.3. When the clamping and releasing triggers 22 trigger the clamping position sensors 20, it indicates that the clamping arms 8.2 have stably clamped the wafer basket, and the air jaw of the clamping jaw cylinder 8.1 stops contraction. When the clamping and releasing triggers 22 trigger the releasing position sensors 21, it indicates that the distance between the two sets of clamping arms 8.2 is greater than the width of the clamped part of the wafer basket, and the wafer basket can be released. The air jaw of the clamping jaw cylinder 8.1 stops extension.
[0064] During implementation, the clamping and releasing triggers 22 can be arranged on the same side of the slide rods 8.3, or can be arranged on different sides of the slide rods 8.3. The positions of the clamping position sensors 20 and the releasing position sensors 21 can be adaptively adjusted according to the positions of the clamping and releasing triggers 22.
[0065] The above-mentioned content omits part of the conventional structure support, connecting bolt and the like, the driving motor 5 and the power module 4 can adopt chain transmission or mesh transmission and the like prior art scheme, and the person skilled in the art can design and configure according to common sense and experience, the above-mentioned obstacle avoidance sensor 19 can adopt infrared sensor and the like, the anti-dropping sensor 15, the clamping sensor 20, the releasing sensor 21 and the like can adopt groove type photoelectric switch, the anti-dropping trigger 16, the clamping and releasing trigger 22 respectively select the light shielding piece structure adapted to them.
[0066] Compared with the prior art, the beneficial effects of the utility model lie in: using a gripper 8 to butt joint a plurality of carrying positions distributed along a straight line on a production equipment and an elevator 11, the configuration number of the mechanical hand can be reduced, and the equipment cost is reduced, at the same time, the base 1 is only used as a support and guide member, the size thereof can be adjusted according to the existing space layout of the production party, the installation and operation in a narrow space can be met, the structure is square, regular and compact, it is unnecessary to plan an obstacle avoidance transmission route like an AGV car, and it is unnecessary to additionally add a specially-made charging pile, the fixed power supply in a factory building can be directly used, the difficulty and cost of use and maintenance are greatly reduced.
[0067] The above is the preferred embodiment of the utility model, it should be pointed out that, for the person skilled in the art, on the premise of not departing from the principle of the utility model, a number of improvements and refinements can be made, these improvements and refinements should also be regarded as the protection scope of the utility model.
Claims
1. A sliding table type tray conveying device, characterized in that, Includes a base and a slide, among which, A linear module is configured on the base, which can drive the slide to move along the longitudinal direction of the base; The slide is equipped with a robotic arm and a gripper. The robotic arm can extend beyond the wide end of the base and move, lift, lateralize, and / or rotate the gripper.
2. The sliding table type tray conveyor according to claim 1, characterized in that, The gripper includes a gripper cylinder and a gripper arm. The gripper arm is connected to the gripper cylinder via a slide rod. The gripper cylinder is fitted with a fixed protective cover, and the slide rod is fitted with a corrugated protective tube.
3. The sliding table type tray conveyor according to claim 2, characterized in that, The clamping arm is provided with a tray slot and an obstacle avoidance sensor. The tray slot and the slide rod are located on the same side of the clamping arm, and the obstacle avoidance sensor and the slide rod are located on opposite sides of the clamping arm.
4. The sliding table type tray conveyor according to claim 2, characterized in that, The fixed protective cover is equipped with a clamping sensor and a placement sensor. The slide rod is connected to a clamping and placement trigger. When the clamping and placement trigger triggers the clamping sensor, the gripper of the gripper cylinder stops retracting. When the clamping and placement trigger triggers the placement sensor, the gripper of the gripper cylinder stops extending.
5. The sliding table type tray conveyor according to any one of claims 1-4, characterized in that, The base is a closed shell with a long guide hole on its bottom surface that is in the same direction as the linear module; the bottom end of the slide passes through the long guide hole and connects to the linear module located inside the base.
6. The sliding table type tray conveyor according to claim 5, characterized in that, The slide is equipped with a control box, and the robotic arm is mounted on the control box and is controlled by the control box.
7. The sliding table type tray conveyor according to any one of claims 1-4, 6, characterized in that, The linear module includes a follower module and a power module connected to a drive motor. The follower module and the power module are configured in the same direction, and a first limiting block and a second limiting block are respectively provided on both sides along its length. The slide connects the follower module and / or the power module and moves between the first limiting block and the second limiting block.
8. The sliding table type tray conveyor according to claim 7, characterized in that, The long end of the guide rail in the power module is equipped with an anti-detachment sensor, and the slide is equipped with an anti-detachment trigger. When the anti-detachment trigger triggers the anti-detachment sensor, the drive motor stops operating.
9. The sliding table type tray conveyor according to any one of claims 1-4, 6, and 8, characterized in that, The base is equipped with several casters and detachable legs at its bottom, and the detachable legs can extend and retract along the thickness direction of the base.