ALD equipment double-screw-rod vertical transmission and horizontal transfer device

Abstract

The utility model relates to a double-screw vertical transmission and horizontal transfer device for ALD (atomic layer deposition) equipment, which structurally comprises a first lifting Y-axis component and a second lifting Y-axis component which are parallelly and adjacently mounted on two sides of the center of a stand column frame, linear guide rails are arranged on two sides of the stand column frame along the length direction, and limit stop blocks are arranged at the top ends of the linear guide rails. The two ends of the carrying X-axis assembly and the two ends of the push-pull X-axis assembly which are distributed up and down are slidably connected to the corresponding linear guide rails through sliding block mounting plates provided with sliding blocks correspondingly, and the first lifting Y-axis assembly and the second lifting Y-axis assembly are in driving connection with the carrying X-axis assembly and the push-pull X-axis assembly correspondingly. The gantry carrying assembly has the advantages that the structural design is reasonable, the independent movement of two loads in the vertical direction is realized, the positioning of the gantry carrying assembly in the ALD coating equipment at any position in the vertical direction is realized, the investment cost is low, the high-precision working condition requirement can be effectively met, the stability is high, and the maintenance is convenient.

Description

TECHNICAL FIELD

[0001] The utility model relates to a kind of ALD equipment double wire rod vertical transmission and horizontal removal and loading device, belong to solar coating technical field. BACKGROUND

[0002] In the field of solar coating, such as ALD atomic deposition coating equipment, the movement of gantry handling assembly in vertical direction in coating equipment is transmitted by screw rod, since the stroke of handling assembly in vertical direction is long, and the load in upper and lower directions is required to be moved separately, and for safety consideration, guard plate is required to be set above screw rod to protect and shield screw rod.

[0003] In prior art, single direction movement is mainly used, and one screw rod is used to realize transmission; if positioning in arbitrary position in vertical direction is required, gear and rack mechanism is generally used to realize it. The device designed by above mechanism in prior art is mostly used in the case that precision requirement is not high, and the engagement assembly of gear and rack is required to be high, and investment cost is high. It cannot meet the increasing high-precision working condition requirement. INVENTION CONTENTS

[0004] The utility model provides a kind of ALD equipment double wire rod vertical transmission and horizontal removal and loading device, which aims to overcome the above-mentioned deficiencies in prior art, and realizes positioning in arbitrary position in vertical direction by double screw rod.

[0005] The technical solution of the utility model: ALD equipment double wire rod vertical transmission and horizontal removal and loading device, its structure includes first lifting Y-axis assembly and second lifting Y-axis assembly that are installed on the both sides of the center of column frame parallel to each other, linear guide rails are arranged on the both sides of column frame along length direction, limit stoppers are arranged at the top of linear guide rails, carrying X-axis assembly and push-pull X-axis assembly distributed in upper and lower positions are slidably connected to corresponding linear guide rails through slide block mounting plate with slide block respectively, first lifting Y-axis assembly and second lifting Y-axis assembly are respectively drivingly connected to carrying X-axis assembly and push-pull X-axis assembly. Two independent lifting Y-axis assemblies are respectively connected to carrying X-axis assembly and push-pull X-axis assembly, which can realize the independent movement of two loads in vertical direction.

[0006] Preferably, the first lifting Y-axis assembly and the second lifting Y-axis assembly are the same in structure, including driver, transmission screw rod and screw nut, the driver is connected to coupling through flange connecting seat, the coupling is connected to flange mounting plate, the flange mounting plate is connected to screw rod fixing seat, the transmission screw rod is connected to coupling through screw rod fixing seat, flange mounting plate and coupling at one end, the transmission screw rod is connected to screw nut fixing seat through screw nut, the screw nut fixing seat of the first lifting Y-axis assembly and the second lifting Y-axis assembly is respectively connected to carrying X-axis assembly and push-pull X-axis assembly, the other end of the transmission screw rod is installed with screw rod support.

[0007] Preferably, the first lifting Y-axis assembly and the second lifting Y-axis assembly are fixed with the flange mounting plates of the second lifting Y-axis assembly and the first lifting Y-axis assembly respectively.

[0008] Preferably, the first lifting Y-axis assembly and the second lifting Y-axis assembly are fixed with the flange mounting plates of the second lifting Y-axis assembly and the first lifting Y-axis assembly respectively.

[0009] The utility model discloses the advantages are: the structure design is reasonable, realizes two load individual motion in vertical direction, realized the positioning of gantry transport component in ALD coating equipment in vertical direction arbitrary position, and the cost of investment is low, can effectively satisfy high-precision working condition requirement, and stability is high, and maintenance is convenient. BRIEF DESCRIPTION OF DRAWINGS

[0010] Figure 1 It is the structure schematic diagram of the utility model ALD equipment double screw rod vertical transmission and horizontal shift load device.

[0011] Figure 2 It is Figure 1 The structure schematic diagram of the utility model middle lifting Y-axis assembly.

[0012] Figure 3 It is Figure 1 The structure schematic diagram of the utility model protection component.

[0013] In the diagram, 0100 is the column frame, 0200 is the first lifting Y-axis assembly, 0201 is the driver, 0202 is the coupling, 0203 is the flange connection seat, 0204 is the flange mounting plate, 0205 is the transmission screw, 0206 is the screw fixing seat, 0207 is the screw nut, 0208 is the nut fixing seat, 0209 is the screw support, 0300 is the handling X-axis assembly, 0400 is the push-pull X-axis assembly, 0500 is the second lifting Y-axis assembly, 0600 is the limit stop, 0700 is the slider mounting plate, 0800 is the upper section cover, 0900 is the middle section cover, 1000 is the lower section cover, 1100 is the lower face sealing plate, 1200 is the upper face sealing plate, 1300 is the sealing plate docking plate, and 1400 is the linear guide rail. Detailed Implementation

[0014] The present invention will be further described in detail below with reference to embodiments and specific implementation methods.

[0015] like Figure 1 As shown, the ALD equipment's dual-screw vertical transmission and horizontal transfer device includes a first lifting Y-axis assembly 0200 and a second lifting Y-axis assembly 0500 installed parallel to each other on both sides of the center of the column frame 0100. Linear guide rails 1400 are provided on both sides of the column frame 0100 along the length direction. Limiting blocks 0600 are provided at the top of the linear guide rails 1400. The upper and lower distributed transport X-axis assembly 0300 and push-pull X-axis assembly 0400 are slidably connected at both ends to the corresponding linear guide rails 1400 through slider mounting plates 0700 equipped with sliders. The first lifting Y-axis assembly 0200 and the second lifting Y-axis assembly 0500 drive and connect the transport X-axis assembly 0300 and the push-pull X-axis assembly 0400, respectively.

[0016] like Figure 1 , 2As shown, the first lifting Y-axis assembly 0200 and the second lifting Y-axis assembly 0500 are structurally identical, including a driver 0201, a transmission screw rod 0205 and a screw nut 0207, the driver 0201 is connected to a shaft coupling 0202 through a flange connecting seat 0203, the shaft coupling 0202 is connected to a flange mounting plate 0204, the flange mounting plate 0204 is connected to a screw rod fixing seat 0206, one end of the transmission screw rod 0205 passes through the screw rod fixing seat 0206, the flange mounting plate 0204 and the shaft coupling 0202, the transmission screw rod 0205 is connected to a nut fixing seat 0208 through the screw nut 0207, the nut fixing seat 0208 of the first lifting Y-axis assembly 0200 and the second lifting Y-axis assembly 0500 is respectively connected to the carrying X-axis assembly 0300 and the push-pull X-axis assembly 0400, the other end of the transmission screw rod 0205 is installed with a screw rod support 0209, the screw rod support 0209 of the first lifting Y-axis assembly 0200 and the second lifting Y-axis assembly 0500 is respectively fixed with the flange mounting plate 0204 of the second lifting Y-axis assembly 0500 and the first lifting Y-axis assembly 0200.

[0017] As shown in Figure 1 , 3 , the first lifting Y-axis assembly 0200 and the second lifting Y-axis assembly 0500 are provided with a protection assembly outside, the protection assembly includes an upper cover 0800, a middle cover 0900, a lower cover 1000, a lower face sealing plate 1100, an upper face sealing plate 1200 and a sealing plate butt joint plate 1300, wherein the side of the transmission screw rod 0205 of the first lifting Y-axis assembly 0200 and the second lifting Y-axis assembly 0500 is respectively covered with the upper cover 0800, the middle cover 0900 and the lower cover 1000 connected to each other from top to bottom, the top end of the upper cover 0800 and the bottom end of the lower cover 1000 are respectively connected to the corresponding flange mounting plate 0204, the front of the transmission screw rod 0205 of the first lifting Y-axis assembly 0200 and the second lifting Y-axis assembly 0500 is respectively covered with the upper face sealing plate 1200 and the lower face sealing plate 1100 from top to bottom, the upper face sealing plate 1200 and the lower face sealing plate 1100 are connected through the sealing plate butt joint plate 1300, and the top end of the upper face sealing plate 1200 and the bottom end of the lower face sealing plate 1100 are respectively connected to the corresponding flange mounting plate 0204.

[0018] According to the above structure, the two independently moving lifting Y-axis assemblies 0200 are respectively connected to the carrying X-axis assembly 0300 and the push-pull X-axis assembly 0400, which can realize the independent movement of two loads in the vertical direction; a screw rod protection plate connected as a whole can protect the transmission screw rod 0205 in the two transmissions, and does not interfere with the screw nut 0207 in motion, the ends of the protection plate can be tightened through the preferred adjustable screws to ensure the deformation and shaking of the transmission screw rod 0205 during transmission, realizing the characteristics of high precision, high stability and convenient maintenance of the device.

[0019] Each of the above components is of the prior art, and a person skilled in the art can use any model and prior design that can achieve the corresponding function.

[0020] The above only describes the preferred embodiments of the present application, and it should be pointed out that, for those skilled in the art, without departing from the creative concept of the present application, a number of modifications and improvements can be made, which all belong to the protection scope of the present application.

Claims

1. A double rod vertical transmission and horizontal transfer device for ALD equipment, characterized in that, The first lifting Y-axis assembly (0200) and the second lifting Y-axis assembly (0500) are arranged on the two sides of the center of the column frame (0100) in parallel with each other, linear guides (1400) are arranged on the two sides of the column frame (0100) along the length direction, the top end of the linear guide (1400) is provided with a limiting block (0600), the carrying X-axis assembly (0300) and the push-pull X-axis assembly (0400) distributed in the up-down direction are both slidably connected to the corresponding linear guide (1400) through the slider mounting plate (0700) provided with a slider, and the first lifting Y-axis assembly (0200) and the second lifting Y-axis assembly (0500) are respectively drivingly connected to the carrying X-axis assembly (0300) and the push-pull X-axis assembly (0400).

2. The ALD apparatus dual-rod vertical transmission and horizontal transfer device of claim 1, wherein, The first lifting Y-axis assembly (0200) and the second lifting Y-axis assembly (0500) are the same in structure and comprise a driver (0201), a transmission screw rod (0205) and a screw nut (0207), the driver (0201) is connected to a coupling (0202) through a flange connecting seat (0203), the coupling (0202) is connected to a flange mounting plate (0204), the flange mounting plate (0204) is connected to a screw rod fixing seat (0206), one end of the transmission screw rod (0205) is connected to the coupling (0202) by penetrating through the screw rod fixing seat (0206) and the flange mounting plate (0204), the transmission screw rod (0205) is connected to a nut fixing seat (0208) through the screw nut (0207), the nut fixing seat (0208) of the first lifting Y-axis assembly (0200) and the second lifting Y-axis assembly (0500) is respectively connected to the carrying X-axis assembly (0300) and the push-pull X-axis assembly (0400), and the other end of the transmission screw rod (0205) is provided with a screw rod support (0209).

3. The ALD apparatus dual-rod vertical transmission and horizontal transfer device of claim 2, wherein, The screw rod support (0209) of the first lifting Y-axis assembly (0200) and the second lifting Y-axis assembly (0500) is respectively fixed with the flange mounting plate (0204) of the second lifting Y-axis assembly (0500) and the first lifting Y-axis assembly (0200).

4. The ALD apparatus dual-rod vertical transmission and horizontal transfer device of claim 3, wherein, The first lifting Y-axis assembly (0200) and the second lifting Y-axis assembly (0500) are provided with protective assemblies outside, the protective assemblies comprise an upper cover (0800), a middle cover (0900), a lower cover (1000), a lower face sealing plate (1100), an upper face sealing plate (1200) and a sealing plate butt joint plate (1300), wherein the transmission lead screw (0205) side of the first lifting Y-axis assembly (0200) and the second lifting Y-axis assembly (0500) is respectively covered from top to bottom with the upper cover (0800), the middle cover (0900) and the lower cover (1000) which are connected with each other, the top end of the upper cover (0800) and the bottom end of the lower cover (1000) are respectively connected with the corresponding flange mounting plate (0204), the transmission lead screw (0205) front of the first lifting Y-axis assembly (0200) and the second lifting Y-axis assembly (0500) is respectively covered from top to bottom with the upper face sealing plate (1200) and the lower face sealing plate (1100), the upper face sealing plate (1200) and the lower face sealing plate (1100) are connected through the sealing plate butt joint plate (1300), and the top end of the upper face sealing plate (1200) and the bottom end of the lower face sealing plate (1100) are respectively connected with the corresponding flange mounting plate (0204).

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