Drip-proof valve suitable for conveying semiconductor chemical liquid medicine

Abstract

The utility model relates to a drip-proof valve suitable for semiconductor chemical liquid delivery, which comprises a valve body, a conduction control cavity is distributed in the valve body, an inflow mechanism and an outflow mechanism are distributed on two sides of the conduction control cavity on the valve body, and an actuator body is mounted at the upper end of the valve body. The lower end of the valve body is provided with an automatic back-suction lower actuator, and air source connectors are distributed on the side face of the actuator body. An upper execution body is installed at the upper end of the actuator body, a control shaft is installed in the actuator body, an upper diaphragm is installed on the combined end face of the actuator body and the valve body, and the upper end of the upper diaphragm makes contact with the control shaft. A lower diaphragm is installed in the automatic back-suction lower execution body, a sealing cone is connected to the lower diaphragm, the upper end of the sealing cone makes contact with the upper diaphragm, and the upper end of the sealing cone is located in the conduction control cavity. And the lower diaphragm and the upper diaphragm are matched with each other, so that the pressure difference in the cavity can be controlled through the inflow of an air source so as to carry out conduction control, and the response is quick.

Description

TECHNICAL FIELD

[0001] The utility model relates to a kind of drip-proof valves, in particular to a kind of drip-proof valves suitable for semiconductor chemical liquid conveying. BACKGROUND

[0002] Pneumatic three-way diaphragm valve, as a kind of switching control valve, has three valve ports, usually a valve inlet and two valve outlets (usually called one-in two-out), switches fluid to different pipelines. In the application of semiconductor production equipment, based on the limited space of precision equipment, the number of pipelines in the equipment, the number of fluid controllers, etc. are also limited. Therefore, the pneumatic three-way diaphragm valve can be used in the form of one valve inlet and two valve outlets to reduce the number of pipeline connection ends of the equipment, thereby saving equipment space.

[0003] After a large amount of retrieval, it was found that Chinese patent publication No. CN2236058Y disclosed a new three-way shunt regulating valve, which included a valve body, a shunt, a regulating rod, and a hand wheel. The shunt regulator has a connected water outlet hole on the front and rear sides of a cylindrical body. By rotating the shunt regulator, the flow direction of the fluid is changed. This structure is the principle of reversing for most three-way valves. Due to the need to rotate the internal regulator, friction occurs between the internal regulator and the valve body, which may generate particulate matter. This structure is not suitable for application in the semiconductor equipment production field.

[0004] After a large amount of retrieval, it was found that Chinese patent publication No. CN217784275U disclosed a wellhead control system hand-operated and automatic pneumatic two-position three-way valve, which included a valve body, an end cap on the top of the valve body, a pressure rod in the center of the top of the end cap, a piston rod slidingly penetrating the end cap at the bottom of the pressure rod, a first spring sleeved on the surface of the bottom of the piston rod, and a first steel ball installed at the bottom of the piston rod. A striker was installed at the bottom of the first steel ball, a second steel ball was installed at the bottom of the striker, a valve core sleeve was installed below the striker and above the second steel ball, a plug was inserted into the bottom of the valve body, and the top of the plug was attached to the bottom of the second steel ball. The middle of the valve body is an outlet, the lower part is an inlet, and the upper part is a discharge port. The three-way valve structure of this patent is only suitable for gaseous media. The three interfaces of the three-way valve mentioned in this patent are arranged in an upper-middle-lower structure, with the upper end as the exhaust port, the middle as the outlet, and the lower part as the inlet. This structure may affect the flow capacity of the valve due to the viscosity coefficient of the fluid and the factors of fluid mechanics for fluid media. At the same time, the spring and other elastic components of this three-way valve structure are exposed to the medium. For chemical liquid media, corrosion, particulate matter, and metal ions may be generated, which is also not suitable for the semiconductor field.

[0005] After a large amount of retrieval, it is found that the Chinese patent publication No. CN114949579B discloses a three-way valve, including a three-way valve body, a plug and a sheet, in this patent, the structure of the three-way valve mentioned, because the material is metal material, it cannot be used in the semiconductor field, secondly, the reversing of the fluid is realized by rotating the plug, there is a risk of generating particulate matter, it is also not suitable for the semiconductor field.

[0006] In summary, the existing three-way valve has the problems of structure design, sealing structure design and material itself, which are not suitable for the semiconductor field. At the same time, the existing three-way valve has the problems of difficult processing of some parts, difficult to achieve the ideal processing level, and the cleanliness inside the valve body does not meet the standard, which is easy to contaminate the chemical liquid. In addition, the existing valve is easy to cause the chemical liquid to flow out during the stop period, which affects the final cleaning effect.

[0007] In view of the above-mentioned defects, the present inventor actively researches and innovates to create a drip-proof valve suitable for semiconductor chemical liquid conveying, so as to make it more useful in industry. Content of the utility model

[0008] To solve the above technical problems, the purpose of the present utility model is to provide a drip-proof valve suitable for semiconductor chemical liquid conveying.

[0009] The drip-proof valve suitable for semiconductor chemical liquid conveying of the present utility model comprises a valve body, a conduction control cavity is distributed in the valve body, an inflow mechanism and an outflow mechanism are distributed on both sides of the conduction control cavity in the valve body, wherein: an actuator body is installed at the upper end of the valve body, an automatic back-suction lower executive body is installed at the lower end of the valve body, and a gas source interface is distributed on the side surface of the actuator body; an upper executive body is installed at the upper end of the actuator body, a control shaft is installed in the actuator body, an upper diaphragm is installed on the combined end surface of the actuator body and the valve body, and the upper end of the upper diaphragm is in contact with the control shaft; a lower diaphragm is installed in the automatic back-suction lower executive body, a sealing cone is connected to the lower diaphragm, the upper end of the sealing cone is in contact with the upper diaphragm, and the upper end of the sealing cone is located in the conduction control cavity.

[0010] Further, the drip-proof valve suitable for semiconductor chemical liquid conveying, wherein the inflow mechanism and the outflow mechanism both comprise an extension joint, an extension joint is externally threaded connected with a connecting nut, an impact ring in contact with the extension joint is distributed on the inner side of the connecting nut, and a lock ring is sleeved on the rear end of the extension joint located in the connecting nut.

[0011] Further, the drip-proof valve for semiconductor chemical liquid delivery has the following further improvements: the actuator body comprises an actuator cavity in the actuator body, the lower end of the actuator cavity is provided with a guide seat, the upper spring is sleeved on the guide seat, the control shaft is connected to the upper spring, and the bottom of the control shaft is in contact with the upper diaphragm.

[0012] Further, the drip-proof valve for semiconductor chemical liquid delivery has the following further improvements: the control shaft has a contact protrusion extending outward from the middle section, the contact protrusion is in contact with the inner wall of the actuator cavity, the contact protrusion is provided with a contact groove, and the contact sealing ring is sleeved in the contact groove.

[0013] Further, the drip-proof valve for semiconductor chemical liquid delivery has the following further improvements: the contact end surface of the actuator body and the upper actuator body is distributed with the upper sealing ring.

[0014] Further, the drip-proof valve for semiconductor chemical liquid delivery has the following further improvements: the automatic back-suction lower actuator body is provided with a receiving groove, the lower diaphragm is located above the receiving groove, the receiving groove is distributed with a limiting plug, the lower spring is connected to the limiting plug, the contact guide column is sleeved on the lower spring, and the contact guide column is in contact with the lower diaphragm.

[0015] Further, the drip-proof valve for semiconductor chemical liquid delivery has the following further improvements: the automatic back-suction lower actuator body is provided with a receiving groove, the lower diaphragm is located above the receiving groove, the receiving groove is distributed with a limiting plug, the lower spring is connected to the limiting plug, the contact guide column is sleeved on the lower spring, and the contact guide column is in contact with the lower diaphragm.

[0016] Further, the drip-proof valve for semiconductor chemical liquid delivery has the following further improvements: the upper actuator body comprises a contact shaft extending into the actuator body, the upper end of the actuator body is distributed with a guide channel, the auxiliary sealing ring is sleeved on the contact shaft, the auxiliary sealing ring is in contact with the guide channel, and the contact shaft is connected to the knob through the connecting mechanism.

[0017] Further, the drip-proof valve for semiconductor chemical liquid delivery has the following further improvements: the contact shaft is sleeved with a stop ring, the stop ring is located between the knob and the actuator body, the connecting mechanism comprises a connecting bolt, the connecting bolt is connected to the contact shaft after being connected to the knob, and the spring washer and the flat washer are respectively arranged on the connecting bolt.

[0018] By the above scheme, the drip-proof valve for semiconductor chemical liquid delivery has at least the following advantages:

[0019] 1. The electronic components are not required to participate in the control of the opening and closing of the valve, the space of the valve body is not occupied, and more installation pipelines can be adapted.

[0020] 2. The cooperation of the lower diaphragm and the upper diaphragm can control the pressure difference in the cavity by the inflow of the air source to control the conduction, and the response is rapid.

[0021] 3. The deformation and reset cooperation of different springs can assist in controlling the deformation of the corresponding diaphragm to realize the accurate control of the pressure in the cavity. The liquid reflux can be performed when the air source stops, and the valve can be closed in time.

[0022] 4. The valve has good integrity, and can ensure the liquid tightness and air tightness during use.

[0023] 5. The overall structure is simple, and is convenient for assembly and installation.

[0024] The above description is only a summary of the technical scheme of the utility model, in order to more clearly understand the technical means of the utility model, and can be implemented according to the content of the specification, the following is the preferred embodiment of the utility model and the detailed description of the drawings as follows. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 It is a structure diagram of the anti-dripping valve suitable for semiconductor chemical liquid conveying.

[0026] The meanings of various reference signs in the drawings are as follows.

[0027] 1. Valve body 2. Conduction control cavity

[0028] 3. Actuator body 4. Automatic back suction lower actuator

[0029] 5. Air source interface 6. Upper actuator

[0030] 7. Control shaft 8. Upper diaphragm

[0031] 9. Lower diaphragm 10. Sealing cone

[0032] 11. Connecting nut 12. Impact ring

[0033] 13. Lock ring 14. Lead-in seat

[0034] 15. Upper spring 16. Contact sealing ring

[0035] 17. Upper sealing ring 18. Lower spring

[0036] 19. Contact guide column 20. Bottom plate

[0037] 21. Contact shaft 22. Auxiliary sealing ring

[0038] 23. Knob 24. Stop ring

[0039] 25. Connecting bolt DETAILED DESCRIPTION

[0040] The specific embodiments of the present application will be further described in detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate the present application, but not to limit the scope of the present application.

[0041] As Figure 1 The anti-dripping valve for semiconductor chemical liquid conveying from to the anti-dripping valve for semiconductor chemical liquid conveying, including valve body 1, valve body 1 in distribution has the control cavity 2, the control cavity 2 is located in the two sides of valve body 1 distribution has inflow mechanism and outflow mechanism, for the guidance of chemical liquid. It is different from the others: the upper end of valve body 1 is provided with actuator body 3, because the control of the execution tube is carried out. At the same time, the lower end of valve body 1 is provided with automatic back suction lower execution body 4, which is used for participating in the actual control of the release. Specifically, the side surface of actuator body 3 is provided with gas source interface 5, and the upper end of actuator body 3 is provided with upper execution body 6. In this way, the control of the execution tube can be carried out by the gas source, and the control of the flow can be realized by relying on the upper execution body 6. Furthermore, the control shaft 7 is installed in the actuator body 3, and the upper end of the upper diaphragm 8 is in contact with the control shaft 7, which satisfies the pressure control of the cavity at the upper end. During implementation, the lower diaphragm 9 is installed in the automatic back suction lower execution body 4, and the lower diaphragm 9 is connected with the sealing cone 10. During assembly, the contact guide column 19 or the connecting screw can be used to realize the close combination of the two without damaging the air tightness. In addition, the upper end of the sealing cone 10 is in contact with the upper diaphragm 8, and the upper end of the sealing cone 10 is located in the control cavity 2. In this way, the actual control degree of the control cavity 2 can be controlled by the position of the sealing cone 10. Considering the convenience of subsequent assembly, the bottom plate 20 can be installed on the outside of the automatic back suction lower execution body 4. During implementation, the number and position of the gas source interface 5 can be customized according to the response rate of the valve body opening and closing control.

[0042] In combination with a preferred embodiment of the present application, in order to effectively liquid-tightly connect with the corresponding pipeline, the inflow mechanism and the outflow mechanism both include an extension joint. Specifically, the extension joint is externally threadedly connected with a connecting nut 11, the inner side of the connecting nut 11 is provided with an impact ring 12 in contact with the extension joint, and the extension joint is provided with a lock ring 13 at the rear end of the connecting nut 11. In this way, the combination gap in the inner side of the connecting nut 11 can be filled by the impact ring 12, so as to avoid shaking in a high liquid pressure environment. Relying on the existence of the lock ring 13, the connecting nut 11 can realize more stable thread combination.

[0043] Further, in order to meet the effective control of the cavity pressure, the actuator body 3 comprises an execution cavity in the actuator body 3, the lower end of the execution cavity is provided with a guide seat 14, and the upper spring 15 is sleeved on the guide seat 14. Meanwhile, the control shaft 7 is connected to the upper spring 15, and the bottom of the control shaft 7 is in contact with the upper diaphragm 8. In this way, the position of the control shaft 7 is used to limit the limit deformation position of the upper diaphragm 8, and the actual conduction state of the control cavity 2 is controlled by the upper diaphragm 8. Moreover, in order to meet the effective air tightness, the middle section of the control shaft 7 outwardly extends a contact protrusion, the contact protrusion is in contact with the inner wall of the execution cavity, the contact protrusion is provided with a contact groove, and the contact sealing ring 16 is sleeved in the contact groove. Furthermore, in view of the air tightness of the mounting joint, the contact end surface of the actuator body 3 and the upper execution body 6 is distributed with the upper sealing ring 17.

[0044] In combination with the actual implementation, in order to meet the effective automatic back suction and avoid dripping, the utility model adopts the automatic back suction lower execution body 4, which is provided with a receiving groove, and the lower diaphragm 9 is located above the receiving groove. Meanwhile, the receiving groove is distributed with a limiting plug column, the limiting plug column is connected with the lower spring 18, the lower spring 18 is sleeved with the contact guide column 19, and the contact guide column 19 is in contact with the lower diaphragm 9. In this way, the deformation and reset of the lower spring 18 can effectively control the deformation state of the lower diaphragm 9, and meet the back suction effect after self-resetting.

[0045] Further, the upper execution body 6 comprises a contact shaft 21 extending into the actuator body 3. Meanwhile, the upper end of the actuator body 3 is distributed with a guide channel. In order to meet the sealing effect of the contact surface, the contact shaft 21 is sleeved with an auxiliary sealing ring 22, and the auxiliary sealing ring 22 is in contact with the guide channel. Moreover, in order to realize the stroke adjustment of the contact shaft 21, the contact shaft 21 is connected with the knob 23 through the connecting mechanism outside the upper execution body 6. Specifically, the contact shaft 21 is sleeved with a stop ring 24, and the stop ring 24 is located between the knob 23 and the actuator body 3. The stop ring 24 can realize the maximum limit of the stroke adjusted by the knob 23. The connecting mechanism comprises a connecting bolt 25, and the connecting bolt 25 is connected to the contact shaft 21 after being connected to the knob 23. Furthermore, the connecting bolt 25 is respectively provided with a spring washer and a flat washer. In this way, the spring washer can be deformed to press, and the flat washer is matched, so that the connecting bolt 25 drives the knob 23 to be effectively connected to the contact shaft 21.

[0046] The working principle of the utility model is as follows:

[0047] If there is no gas source, the sealing cone 10 makes the lower diaphragm 9 in the original position, and the valve body 1 is in the sealing device.

[0048] If the gas source flows in, the control shaft 7 presses the sealing cone 10 under the control of the gas pressure, and the sealing cone 10 moves downward.

[0049] During this period, if the gas source stops supplying, the upper spring 15 pushes the control shaft 7 upward to reset it.

[0050] At this time, the liquid medicine flows back, and the lower spring 18 pushes the sealing cone 10 body to synchronously push the lower diaphragm 9 to form an effective bottom seal.

[0051] As can be seen from the above description and in combination with the drawings, the valve has the following advantages after the utility model is adopted:

[0052] 1. The valve opening and closing control does not need to participate in electronic components, reduces the occupation of the valve body space, and can adapt to more installation pipelines.

[0053] 2. The mutual cooperation of the lower diaphragm and the upper diaphragm can control the pressure difference in the cavity through the inflow of the gas source to control the conduction, and the response is rapid.

[0054] 3. Through the deformation and reset cooperation of different springs, the corresponding diaphragm deformation can be assisted to control, the pressure in the cavity can be accurately controlled, the liquid medicine can be backflowed when the gas source stops, and the valve can be closed in time.

[0055] 4. The valve has better integrity, and can guarantee the liquid-tight and air-tight effects during use.

[0056] 5. The overall structure is simple, and is convenient to assemble and install.

[0057] In addition, the indicated direction or position relationship described in the utility model is based on the direction or position relationship shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the indicated device or structure must have a specific direction or be operated in a specific direction, so it cannot be understood as a limitation on the utility model.

[0058] The above description is only the preferred embodiment of the utility model, and is not used to limit the utility model, and it should be pointed out that for ordinary skilled persons in the technical field, without departing from the technical principles of the utility model, a plurality of improvements and modifications can be made, and these improvements and modifications should be regarded as the protection range of the utility model.

Claims

1. A drip-proof valve suitable for conveying semiconductor chemical solutions, comprising a valve body, wherein a flow control chamber is distributed within the valve body, and an inflow mechanism and an outflow mechanism are distributed on both sides of the flow control chamber, characterized in that: An actuator body is installed at the upper end of the valve body, an automatic back suction actuator is installed at the lower end of the valve body, and air source interfaces are distributed on the side of the actuator body. An upper actuator is installed at the upper end of the actuator body, a control shaft is installed inside the actuator body, and an upper diaphragm is installed at the joint end face of the actuator body and the valve body, with the upper end of the upper diaphragm in contact with the control shaft. The automatic back suction actuator is equipped with a lower diaphragm, and a sealing cone is connected to the lower diaphragm. The upper end of the sealing cone is in contact with the upper diaphragm, and the upper end of the sealing cone is located in the conduction control cavity.

2. The anti-drip valve for semiconductor chemical liquid delivery according to claim 1, characterized in that: Both the inflow mechanism and the outflow mechanism include an extended connector. The extended connector is externally threaded with a connecting nut. Impact rings that contact the extended connector are distributed on the inner side of the connecting nut. A locking ring is sleeved on the extended connector at the rear end of the connecting nut.

3. The anti-drip valve for semiconductor chemical liquid delivery according to claim 1, characterized in that: The actuator body includes an actuator cavity located within the actuator body. A guide seat is provided at the lower end of the actuator cavity. An upper spring is sleeved on the guide seat. A control shaft is inserted into the upper spring. The bottom of the control shaft is in contact with the upper diaphragm.

4. The anti-drip valve for semiconductor chemical liquid delivery according to claim 3, characterized in that: The control shaft has a contact protrusion extending outward from the middle section. The contact protrusion contacts the inner wall of the execution cavity. A contact groove is provided on the contact protrusion, and a contact sealing ring is fitted in the contact groove.

5. The anti-drip valve for semiconductor chemical liquid delivery according to claim 1, characterized in that: The contact surfaces between the actuator body and the upper actuator are provided with upper sealing rings.

6. The anti-drip valve for semiconductor chemical liquid delivery according to claim 1, characterized in that: The automatic retraction actuator has a storage groove, the lower diaphragm is located above the storage groove, the storage groove is distributed with limiting posts, the limiting posts are connected to a lower spring, the lower spring is fitted with a contact guide post, and the contact guide post is in contact with the lower diaphragm.

7. The anti-drip valve for semiconductor chemical liquid delivery according to claim 1, characterized in that: A base plate is installed on the outside of the automatic retraction actuator.

8. The anti-drip valve for semiconductor chemical liquid delivery according to claim 1, characterized in that: The upper actuator includes a contact shaft that extends into the actuator body. The upper end of the actuator body has a guide channel. An auxiliary sealing ring is fitted on the contact shaft. The auxiliary sealing ring contacts the guide channel. The contact shaft is located on the outside of the upper actuator and is connected to a knob via a connecting mechanism.

9. The anti-drip valve for semiconductor chemical liquid delivery according to claim 8, characterized in that: A stop ring is fitted on the contact shaft. The stop ring is located between the knob and the actuator body. The connecting mechanism includes a connecting bolt. The connecting bolt is connected to the contact shaft after being inserted into the knob. A spring washer and a flat washer are respectively threaded through the connecting bolt.

Images