Exposure lens cooling device

Abstract

The utility model discloses an exposure lens cooling device which comprises a lens cone, a plurality of lens groups packaged in the lens cone and a cooling gas channel arranged in the lens cone, and the cooling gas channel comprises a gas inlet and a gas outlet which are arranged at the two ends of the outer wall of the lens cone. The air flow guide channel is arranged in the lens barrel and is used for guiding cooling air to flow along the surface of the lens group; after being treated by the freezing dryer, air enters the FRL for flow and pressure adjustment, the adjusted air passes through the three-stage filter, particulate matters are filtered step by step and enter the lens, and after entering the lens, the air uniformly flows through the surface of the lens through the air flow guide channel, so that efficient heat dissipation is realized.

Description

TECHNICAL FIELD

[0001] The utility model relates to exposure lens technical field especially, it relates to a cooling device for photolithography lens is applicable to the photolithography lens cooling in exposure system. BACKGROUND

[0002] The existing photolithography lens cooling technology mainly includes no cooling thermal compensation scheme, inert gas cooling scheme, water cooling or TEC heat dissipation scheme. However, these schemes have the following deficiencies: no cooling scheme: complex thermal compensation structure is needed, high cost, complex system. Inert gas cooling scheme: high use cost, gas source depends on liquid tank, insufficient gas flow, and additional gas recovery device is needed. Water cooling or TEC heat dissipation scheme: unable to effectively cool the center area of the lens.

[0003] Therefore, the prior art is difficult to balance between low cost, operational convenience and reliability, and a new cooling scheme is urgently needed. UTILITY MODEL CONTENT

[0004] The utility model provides a kind of exposure lens cooling device, by the reasonable airflow passage and adjusting system of design, utilize compressed air as cooling medium, realize the efficient heat dissipation of photolithography lens. The device is not only easy to operate, maintenance cost is low, can also significantly improve cooling effect. To achieve the above object, the utility model provides the following technical scheme:

[0005] A kind of exposure lens cooling device, including lens barrel, multiple lens groups encapsulated in the lens barrel, cooling gas passage is arranged in the interior of the lens barrel, the cooling gas passage includes: the gas inlet and gas outlet being arranged at the both ends of the outer wall of the lens barrel, airflow guide passage is arranged in the interior of the lens barrel for guiding cooling gas to flow along the surface of the lens group.

[0006] As a further scheme of the utility model: the lens barrel is split type structure, and the lens barrel includes air inlet shell and air outlet shell, and multiple groups of fixed supports are fixedly connected between the air inlet shell and the air outlet shell by bolts.

[0007] As a further scheme of the utility model: the fixed support includes support sleeve, fixed sleeve is arranged at the top of the support sleeve, the lens group includes lens cover and lens, and the lens cover is arranged inside the fixed sleeve.

[0008] As a further scheme of the utility model: the airflow guide passage includes a plurality of second passages being opened in the outer wall of the lens cover and being arranged equidistantly around the lens, a plurality of first passages being opened in the support sleeve and being communicated with the second passage, the first passage is vertically arranged, and the second passage is obliquely arranged, for guiding cooling gas to flow evenly through the surface of the lens.

[0009] As a further scheme of the utility model: the air outlet is arranged on the outer wall of the air outlet shell, and a filter layer is arranged in the air outlet.

[0010] As a further scheme of the utility model: further comprising a gas adjusting mechanism communicated with the air inlet, comprising: a cold dryer for adjusting the temperature and humidity of the gas, a three-way joint connected with the cold dryer for controlling the gas flow and pressure, and a three-stage filter connected with one end of the three-way joint and the other end of the air inlet.

[0011] Compared with the prior art, the utility model has the advantages that: 1. After the air is treated by the cold dryer, the air is adjusted in flow and pressure in the three-way joint, and the adjusted gas is filtered by the three-stage filter, and the particulate matter is gradually filtered into the lens, and after the gas enters the lens, the gas flows evenly through the lens surface through the airflow guide channel, so that efficient heat dissipation is realized; 2. The split structure is adopted in the lens barrel, the air inlet shell and the air outlet shell are connected through the support sleeve, and the annular air duct is arranged around the lens, so that the cooling gas flows along the lens surface, thereby improving the cooling effect. BRIEF DESCRIPTION OF DRAWINGS

[0012] Figure 1 It is a structural schematic view of an exposure lens cooling device.

[0013] Figure 2 It is a structural schematic view of a first channel and a second channel in an exposure lens cooling device.

[0014] Figure 3 It is a structural schematic view of a cooling gas channel in an exposure lens cooling device.

[0015] Figure 4 It is a flow schematic view of a gas adjusting mechanism in an exposure lens cooling device.

[0016] In the figure: 1, air inlet shell; 2, air inlet; 3, support sleeve; 4, bolt; 5, fixed sleeve; 6, first channel; 7, lens cover; 8, air outlet shell; 9, air outlet; 10, second channel. DETAILED DESCRIPTION

[0017] Please refer to Figures 1-4The utility model provides an exposure lens cooling device, including a lens barrel, a plurality of lens groups packed in the lens barrel, a cooling gas channel arranged in the lens barrel, the cooling gas channel includes: the gas inlet 2 and the gas outlet 9 arranged at the both ends of the outer wall of the lens barrel, the airflow guide channel for guiding the cooling gas to flow along the surface of the lens group is arranged in the lens barrel, and the utility model also includes a gas adjusting mechanism in communication with the gas inlet 2, which comprises: a cold dryer for adjusting the temperature and humidity of the gas, a three-way joint connected with the cold dryer for controlling the gas flow and pressure, and a three-stage filter connected with one end of the three-way joint and the other end of the gas inlet 2.

[0018] After the air is treated by the cold dryer, the cold dryer adjusts the temperature and humidity of the compressed air to obtain the required air, the air output by the cold dryer enters the three-way joint, the three-way joint adjusts the pressure and flow of the compressed air to obtain the gas meeting the flow and pressure requirements, the gas output by the three-way joint passes through the three-stage filter assembly, the first stage of the three-stage filter is a 10-micron filter, the second stage is a 3-micron filter, and the third stage is a 1-micron filter, so that the filtration of the gas can be efficiently and reliably completed, and the cooling gas meeting the lens cooling requirements is obtained, and the gas output from the three-stage filter assembly enters the lens through the gas inlet 2, the cooling gas uniformly flows through the surface of the lens through the airflow guide channel, efficient heat dissipation and cooling are realized, and the gas is finally discharged through the lens gas outlet 9.

[0019] The lens barrel is of a split structure, and the lens barrel comprises a gas inlet shell 1 and a gas outlet shell 8, a plurality of fixed supports are arranged between the gas inlet shell 1 and the gas outlet shell 8 and are fixedly connected through bolts 4, so that the lens barrel can be conveniently disassembled and maintained.

[0020] The fixed support comprises a supporting sleeve 3 and a fixed sleeve 5 arranged at the top of the supporting sleeve 3, the lens group comprises a lens cover 7 and a lens, and the lens cover 7 is arranged on the inner side of the fixed sleeve 5.

[0021] The airflow guide channel comprises a plurality of second channels 10 arranged equidistantly around the lens on the outer wall of the lens cover 7 and a plurality of first channels 6 arranged on the supporting sleeve 3 and in communication with the second channels 10, the first channels 6 are vertically arranged, and the second channels 10 are obliquely arranged and used for guiding the cooling gas to uniformly flow through the surface of the lens.

[0022] The gas outlet 9 is arranged on the outer wall of the gas outlet shell 8, and a filter layer is arranged in the gas outlet 9 to prevent external air from entering the lens.

[0023] After the cooling gas enters the air inlet shell 1, it enters the second channel 10 through a plurality of first channels 6. Since the first channels 6 and the second channels 10 are equidistantly distributed in a ring shape around the lens, a ring-shaped air flow is formed around the lens, the cooling gas is in full contact with the lens, fully convective along the lens surface, and can dissipate heat to the center and the whole. The air duct is arranged around the lens to be cooled to ensure that the lens system can achieve the expected cooling effect.

[0024] The above is only a preferred specific embodiment of the present application, but the protection scope of the present application is not limited to this. Any person skilled in the art can make equivalent replacements or changes according to the technical scheme and the inventive concept of the present application within the technical range disclosed by the present application, which should be covered within the protection scope of the present application.

Claims

1. An exposure lens cooling device characterized by comprising: The mirror barrel, a plurality of lens groups packaged in the mirror barrel, a cooling gas channel arranged inside the mirror barrel, the cooling gas channel comprising: gas inlets and outlets arranged at both ends of the outer wall of the mirror barrel, and an air flow guide channel arranged inside the mirror barrel for guiding the cooling gas to flow along the surface of the lens groups.

2. The exposure lens cooling device according to claim 1, wherein The mirror barrel is of a split structure, and comprises a gas inlet shell and a gas outlet shell, and a plurality of groups of fixing supports fixedly connected between the gas inlet shell and the gas outlet shell by bolts.

3. The exposure lens cooling device according to claim 2, wherein The fixing support comprises a support sleeve and a fixing sleeve arranged at the top of the support sleeve, the lens group comprises a lens cover and a lens, and the lens cover is arranged inside the fixing sleeve.

4. The exposure lens cooling device according to one of claims 1 to 3, wherein The air flow guide channel comprises a plurality of second channels opened in the outer wall of the lens cover and arranged equidistantly around the lens, and a plurality of first channels opened in the support sleeve and communicated with the second channels, the first channels are vertically arranged, and the second channels are arranged obliquely along the lens cover for guiding the cooling gas to flow evenly through the surface of the lens.

5. The exposure lens cooling device according to one or more of claims 2, wherein The gas outlet is arranged on the outer wall of the gas outlet shell, and a filter layer is arranged inside the gas outlet.

6. The exposure lens cooling device according to one of claims 1, wherein Further comprising a gas adjusting mechanism communicated with the gas inlet, comprising: a cold dryer for adjusting the temperature and humidity of the gas, a three-way joint connected with the cold dryer for controlling the flow and pressure of the gas, and a three-stage filter connected with one end of the three-way joint and the other end of the gas inlet.

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