Optical system for guiding and monitoring light energy of EUV light source

Abstract

The utility model relates to an optical system for guiding and monitoring light energy of an EUV (Extreme Ultraviolet) light source, belonging to the technical field of an EUV photoetching process. According to the utility model, the optical system formed by a plurality of groups of different reflectors is constructed behind the light source, the optical system comprises a rectangular prism reflector group, a parabolic reflector and other reflector assemblies with various structures, and a total reflection system is adopted, so that the situation that EUV is absorbed in the transmission process is avoided, the EUV light path can split light, and the light splitting efficiency is improved. The effects of light energy real-time detection and light energy guide post-exposure are achieved, the detection result is accurate, and light emitting energy is accurately monitored.

Description

TECHNICAL FIELD

[0001] The utility model relates to a kind of optical systems for EUV light source light energy guide and monitoring, belong to EUV photolithography process technical field. BACKGROUND

[0002] EUV photolithography technology (extreme ultraviolet photolithography technology) is an important photolithography technology in modern semiconductor manufacturing, mainly used to manufacture smaller, more efficient integrated circuits (IC). Its principle is to use extreme ultraviolet light with a wavelength in the range of 10 to 14 nanometers to irradiate a photoresist coating, and transfer a circuit pattern onto a silicon wafer through a photomask, commonly used in 5nm wafer photolithography process.

[0003] However, since EUV absorbs a large amount of energy when passing through the transmission mirror, resulting in serious loss of light energy, it is difficult to accurately detect. Therefore, when EUV energy needs to be detected during the photolithography process, it is necessary to use a reflection system.

[0004] However, the existing EUV detection system is not perfect and has many defects. For example, in US20230400784A1, the energy of EUV is monitored by monitoring the energy of EUV during the exposure process. However, the proportion of the collected light to the total light source is unknown, and the detection result is not accurate. In addition, there is little related report on EUV energy detection technology. UTILITY MODEL CONTENT

[0005] To solve the above problems, the utility model provides an optical system for EUV light source light energy guide and monitoring, comprising:

[0006] A light source for emitting extreme ultraviolet light to form a first light path;

[0007] A first parabolic mirror is arranged on one side of the light source, and the center of the light emitted by the light source coincides with the focal point of the first parabolic mirror. The first light path can form a second light path after being reflected by the first parabolic mirror.

[0008] A right-angle prism mirror group is arranged on one side of the first parabolic mirror and located on the second light path. The right-angle prism mirror group includes a first right-angle prism module and a second right-angle prism module. The second light path is reflected by the first right-angle prism module and the second right-angle prism module to form a third light path and a fourth light path, respectively.

[0009] A detector is arranged on the third light path for receiving light from the third light path and detecting the energy of the light emitted by the light source.

[0010] An optical homogenization system is arranged on the fourth light path for receiving light from the fourth light path and emitting after optical homogenization.

[0011] Further, the first right-angle prism module and the second right-angle prism module are both isosceles right-angle triangles, and a certain right-angle side of the first right-angle prism module is fixedly connected with a certain right-angle side of the second right-angle prism module.

[0012] Further, the optical system further comprises a second parabolic mirror arranged on one side of the right-angle prism mirror group and on the fourth light path, and the fourth light path is reflected by the second parabolic mirror to form a fifth light path.

[0013] Further, the optical system further comprises a third parabolic mirror arranged on one side of the right-angle prism mirror group and on the third light path, and the third light path is reflected by the third parabolic mirror to form a sixth light path.

[0014] Further, the right-angle prism mirror group is a special-shaped right-angle prism mirror group, which comprises a first right-angle prism module and a second right-angle prism module connected in one body and both being right-angle triangular prisms, and the first right-angle prism module is provided with a light transmission hole parallel to the second light path; after the second light path passes through the special-shaped right-angle prism mirror group, a part of the second light path directly passes through the light transmission hole to form a second extended light path in the same direction as the second light path, and the other part of the second light path is reflected by the first right-angle prism module and the second right-angle prism module to form a third light path and a fourth light path respectively; and a detector is arranged on the second extended light path and the third light path.

[0015] Further, the fourth light path is provided with a detector.

[0016] Further, the light homogenizing system is an integrating rod.

[0017] Further, the optical system further comprises a primary right-angle prism mirror group arranged on the fourth light path, which comprises a third right-angle prism module and a fourth right-angle prism module having the same structure and being right-angle triangular prisms, and a certain right-angle side of the third right-angle prism module is fixedly connected with a certain right-angle side of the fourth right-angle prism module; the fourth light path is reflected by the third right-angle prism module and the fourth right-angle prism module to form a sixth light path and a seventh light path respectively, and a detector is arranged on the seventh light path.

[0018] Further, the fifth light path is provided with a second parabolic mirror, and the fifth light path can be reflected by the second parabolic mirror to form a sixth light path.

[0019] Further, the detector is a light power meter.

[0020] The utility model discloses the beneficial effect:

[0021] The utility model discloses a light source constructs the optical system by multiple different mirror groups, and the optical system includes the mirror assembly of multiple structures such as right prism mirror group, parabolic mirror, adopts total reflection system, avoids the condition of EUV being absorbed in the transmission process, makes EUV light path can be split, realizes the effect of light energy real -time detection and light energy guiding post -exposure, and the detection result is accurate, and the light energy of going out is carried out accurate monitoring. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 It is the schematic diagram of the whole structure of optical system (including the schematic diagram of light path) in one embodiment of the utility model;

[0023] Figure 2 It is the schematic diagram of the whole structure of optical system (including the schematic diagram of light path) in another embodiment of the utility model;

[0024] Figure 3 It is the schematic diagram of the whole structure of optical system (including the schematic diagram of light path) in another embodiment of the utility model;

[0025] Figure 4 It is the schematic diagram of the whole structure of optical system (including the schematic diagram of light path) in another embodiment of the utility model;

[0026] Figure 5 It is the schematic diagram of the whole structure of optical system (including the schematic diagram of light path) in another embodiment of the utility model;

[0027] Figure 6 It is the schematic diagram of the whole structure of optical system (including the schematic diagram of light path) in another embodiment of the utility model;

[0028] In the drawing: 1, light source;2, first parabolic mirror;31, first right angle prism module;32, second right angle prism module;4, detector;5, second parabolic mirror;61, third right angle prism module;62, fourth right angle prism module;7, homogenization system;8, third parabolic mirror;91, fifth right angle prism module;92, sixth right angle prism module;11, first light path;12, second light path;121, second extension light path;13, third light path;14, fourth light path;15, fifth light path;16, sixth light path;17, seventh light path;18, eighth light path;131, ninth light path;132, tenth light path. DETAILED DESCRIPTION

[0029] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0030] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. Specifically, the terms "first position" and "second position" refer to two different positions.

[0031] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections or detachable connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal connections between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0032] Example 1

[0033] like Figure 1 As shown, this utility model provides an optical system for guiding and monitoring the light energy of an EUV light source, comprising:

[0034] Light source 1 is used to emit extreme ultraviolet (EUV) light to form the first optical path 11;

[0035] The first parabolic reflector 2 is disposed on one side of the light source 1, and the center of the light emitted from the light source coincides with the focal point of the first parabolic reflector 2; the first light path 11 can be reflected by the first parabolic reflector 2 to form the second light path 12;

[0036] A right-angle prism mirror group is arranged on one side of the first parabolic mirror and on the second light path, and includes a first right-angle prism module 31 and a second right-angle prism module 32, both of which are right-angled triangles. One of the right-angle sides of the first right-angle prism module 31 is attached to and fixedly connected with one of the right-angle sides of the second right-angle prism module 32. The second light path 12 is reflected by the first right-angle prism module 31 and the second right-angle prism module 32 to form a third light path 13 and a fourth light path 14, respectively.

[0037] A detector 4 is arranged at the end of the third light path 13 to receive light of the third light path 13 and detect the energy of the light emitted by the light source 1. Specifically, the detector 4 is a light power meter.

[0038] A light homogenizing system 7 is arranged on the fourth light path 14 to receive light of the fourth light path 14 and emit after homogenization. Specifically, the light homogenizing system 7 is an integrating rod.

[0039] Based on the energy absorption characteristics of the transmission mirror for EUV, the full reflection system is adopted in the present application. The right-angle prism mirror group divides one light into two lights, which enter the detector and the light homogenizing system, respectively. The light entering the detector realizes energy detection of the extreme ultraviolet light, and the light entering the light homogenizing system realizes EUV exposure after homogenization. Through the full reflection system of the present application, the light energy guidance and light energy detection of EUV are realized, real-time monitoring can be achieved, and the detection result is more accurate.

[0040] In addition, the light emitting position of the light source of the present application is arranged at the focal point of the first parabolic mirror. The emitted light is reflected by the first parabolic mirror and irradiated to the right-angle prism mirror group. At this time, as shown in FIG. 1, Figure 1 the originally concentrated light forms collimated light after being reflected by the first parabolic mirror. The collimated light is beneficial to the light energy distribution of the light source. By adjusting the vertical position of the right-angle prism mirror group, the light irradiation area of the second light path to the first right-angle prism module and the second right-angle prism module can be adjusted, so that the proportion of the light power entering the detector and the light power entering the light homogenizing system can be adjusted. In some embodiments, the light spot area received by the first right-angle prism module 31 is 5% to 10% of the total light spot area. At this time, the light energy entering the power meter is also 5% to 10%, and the remaining 90% to 95% of the light enters the light homogenizing system for homogenization and exposure. The light intensity energy of the light source is determined by the detection value of the power meter and the proportion of the light spot area received by the detector to the total light spot. Specifically, the light area occupied by the first right-angle prism module is 5%, 7%, 8.5% or 10%.

[0041] In a preferred embodiment, the cross sections of the first and second right-angle prism modules 31 and 32 are isosceles right triangles, and the two endpoints of the two 45-degree acute angles adjacent to the bonding surface also coincide to form a new right angle facing the second light path 12. When the two 45-degree angles are used to emit light, the reflection angles of the third and fourth light paths 13 and 14 are also 45 degrees, which avoids the case where the new angle facing the second light path is obtuse, and the third and fourth light paths 13 and 14 interfere with each other. At the same time, compared with the case where the new angle facing the second light path is acute, the right-angle light is easier to install the subsequent detector and homogenization system. When the right angle is used, the reflected light is in the vertical direction, and at this time, the installed detector and homogenization system only need to be installed horizontally, which is more convenient for installation and debugging. When the acute angle is used, the reflected light is in the inclined direction, and at this time, the installed detector and homogenization system must have an inclination angle to accept the light path, which is more troublesome and difficult to install and debug.

[0042] In a preferred embodiment, the optical system further includes a second parabolic mirror 5 arranged on one side of the right-angle prism mirror group and located on the fourth light path 14. The fourth light path 14 is reflected by the second parabolic mirror 5 to form a fifth light path 15. After receiving the fourth light path, the second parabolic mirror 5 reflects the original vertical light path to form a horizontal light path, so that the subsequent homogenization system is also in the horizontal direction and is not on the same vertical axis as the right-angle prism mirror group, thereby saving vertical space and avoiding the case where the entire optical system is too long. Figure 1 On the other hand, due to the existence of the parabolic surface in the parabolic mirror, the original horizontal light converges and then enters the homogenization system, thereby avoiding the loss of light energy and the need for a larger diameter and larger cross-sectional area of the homogenization system.

[0043] In a preferred embodiment, the optical system further includes a third parabolic mirror 8 arranged on one side of the right-angle prism mirror group and located on the third light path 13. The third light path 13 is reflected by the third parabolic mirror to form a sixth light path 16. The third parabolic mirror 8 has the same effect as the second parabolic mirror 5, which changes the light path and converts the parallel light into convergent light. The converged light can be concentrated to irradiate the detection window of the detector 4, thereby avoiding the dispersion of light beyond the detection window of the detector 4 and the inaccuracy of the detection result.

[0044] Embodiment 2

[0045] As shown in FIG. 2, the embodiment provides an optical system for guiding and monitoring the light energy of an EUV light source, which includes: Figure 2

[0046] A light source 1 for emitting extreme ultraviolet (EUV) light to form a first light path 11.

[0047] ​The first parabolic mirror 2 is arranged on one side of the light source 1, and the light center of the light source is coincident with the focal point of the first parabolic mirror 2. The first light path 11 can form the second light path 12 after being reflected by the first parabolic mirror 2.

[0048] The right-angle prism mirror group is arranged on one side of the first parabolic mirror and located on the second light path. The right-angle prism mirror group comprises a first right-angle prism module 31 and a second right-angle prism module 32. One right-angle side of the first right-angle prism module 31 is fixedly connected with one right-angle side of the second right-angle prism module 32. The second light path 12 is reflected by the first right-angle prism module 31 and the second right-angle prism module 32 to form the third light path 13 and the fourth light path 14 respectively.

[0049] The detector 4 is arranged at the end of the third light path 13 to receive the light of the third light path 13 and detect the energy of the light emitted by the light source 1. Specifically, the detector 4 is a light power meter.

[0050] The original right-angle prism reflection group comprises a third right-angle prism module 61 and a fourth right-angle prism module 62 which have the same structure and are shaped as right-angle triangular prisms. One right-angle side of the third right-angle prism module 61 is fixedly connected with one right-angle side of the fourth right-angle prism module 62. The original right-angle prism reflection group is arranged on the fourth light path 14 to split the light of the fourth light path 14. After the fourth light path 14 is irradiated to the original right-angle prism reflection group, the fourth light path 14 is reflected by the third right-angle prism module 61 and the fourth right-angle prism module 62 to form the seventh light path 17 and the eighth light path 18 respectively. The detector 4 is arranged at the end of the eighth light path 18 to detect the extreme ultraviolet energy. The seventh light path 17 is irradiated to the second parabolic mirror 5, reflected by the second parabolic mirror 5, and then converges to form the fifth light path 15. Subsequently, the fifth light path 15 enters the light homogenizing system 7 and is emitted after being homogenized.

[0051] Compared with the embodiment shown in Figure 1 The original right-angle prism reflection group is added in the embodiment. The light is split and the energy is detected again before the light energy is guided into the light homogenizing system. The results of the two energy detections are compared to determine whether the light spot emitted by the light source is a uniform light spot. If the results of the light intensity calculated according to the light spot area are different after the two detections, it is considered that the light spot emitted by the light source is a non-uniform light spot, and the light intensity energy for exposure is not reliable, which may affect the exposure result. If the results of the light intensity calculated according to the light spot area are the same after the two detections, it is considered that the light spot emitted by the light source is a uniform light spot, and the light intensity energy for exposure is correct. The light intensity energy can be adjusted by adjusting the light source to perform exposure control.

[0052] Embodiment 3

[0053] Compared with the embodiment 1, as Figure 3As shown, in this embodiment, a third prototype right-angle prism reflector group is set on the third optical path 13. This group includes a fifth right-angle prism module 91 and a sixth right-angle prism module 92, both with identical structures and shapes of right-angled triangular prisms. The third prototype right-angle prism reflector group splits the third optical path 13 into a ninth optical path 131 and a tenth optical path 132. Detectors 4 are then placed at the ends of the ninth and tenth optical paths 131 and 132. This achieves the same effect as in Embodiment 2, detecting whether the EUV light spot emitted from the light source is uniform. The uniformity of the initial light spot can be compared by comparing the light intensity results calculated based on the light spot area after detection by the two detectors.

[0054] Example 4

[0055] like Figure 4 As shown, this embodiment provides an optical system for guiding and monitoring the light energy of an EUV light source, including:

[0056] Light source 1 is capable of emitting the first light path 11;

[0057] The first parabolic reflector 2 is disposed on one side of the light source 1 and the center of the light emitted from the light source coincides with the focal point of the first parabolic reflector 2. The first light path 11 can reflect the second light path 12 after passing through the first parabolic reflector 2.

[0058] An irregular right-angle prism reflector assembly is disposed on one side of the first parabolic reflector 2 and located on the second optical path 12. The irregular right-angle prism reflector assembly includes a first right-angle prism module 31 and a second right-angle prism module 32 connected as a whole and both being right-angled triangular prisms. The length of the hypotenuse of the cross-section of the first right-angle prism module 31 is less than the length of the hypotenuse of the cross-section of the second right-angle prism module 32. That is, at least one right-angle side of the cross-section of the first right-angle prism module 31 is also necessarily less than any right-angle side of the cross-section of the second right-angle prism module 32. The first right-angle prism module 31 is provided with a light-transmitting hole parallel to the second optical path 12.

[0059] After passing through the irregular right-angle prism reflection group, part of the second optical path 12 directly passes through the light-transmitting hole to form the second extended optical path 121 in the same direction as the second optical path 12; the other part is reflected by the non-light-transmitting hole part of the first right-angle prism module 31 and the second right-angle prism module 32 to form the third optical path 13 and the fourth optical path 14 respectively.

[0060] The second parabolic reflector 5 is disposed on one side of the irregular right-angle prism reflector group and located on the fourth optical path 14. The third optical path 13 is reflected by the second parabolic reflector 5 to the fifth optical path 15. A light-uniforming system 7 is provided on the fifth optical path 15.

[0061] Detector 4 is installed on the second extended optical path 121 and the third optical path 13.

[0062] In this embodiment, by setting the special-shaped right-angle prism mirror group, the outgoing light is divided into more beams without adding other emission modules; by using the mirror group, on the one hand, the cost is saved, and the space requirement is lower; on the other hand, the uniformity of the EUV light spot can be detected, in addition, by comparing the detection results of multiple detectors (such as Figure 4 three), the uniformity distribution of the EUV light spot can also be determined, that is, by comparing the results of each detector, it is determined where the light spot energy is higher and where the light spot energy is lower, thereby determining the uniformity distribution of the EUV light spot.

[0063] In another embodiment, the first right-angle prism module 31 of the special-shaped right-angle prism mirror group divides the detection beam into two beams, one of which is the second extended light path 121 through the light hole, and the other of which is the light beam irradiated to the bottom end of the first right-angle prism module 31. The light beam irradiated to the bottom end is reflected to form a third light path 13 after reflection. Detectors 4 are arranged at the ends of the second extended light path 121 and the third light path.

[0064] In another embodiment, the first right-angle prism module 31 of the special-shaped right-angle prism mirror group contains multiple light holes, such as two, three, or multiple light holes vertically distributed along the hypotenuse of the first right-angle prism module 31. After the second light path 12 irradiates the first right-angle prism module 31, part of the light passes through the multiple light holes to form multiple second extended light paths, and the other part of the light is reflected by the hypotenuse of the first right-angle prism module 31 to form multiple third light paths. Detectors are arranged at the ends of the multiple second extended light paths and the multiple third light paths.

[0065] Embodiment 5

[0066] As Figure 5 shown, compared with embodiment 4, the second parabolic mirror 5 in this embodiment is a special-shaped parabolic mirror, which only has a part of the traditional parabolic mirror, so that the light of the fourth light path 14 can pass through the second parabolic mirror 5, thereby the detector 4 can be arranged on the fourth light path 14, and the uniformity distribution of the EUV light spot can be detected, and the uniformity distribution is used to adjust the light source.

[0067] Embodiment 6

[0068] As Figure 6 shown, this embodiment provides an optical system for guiding and monitoring the light energy of an EUV light source, which comprises:

[0069] a light source 1 capable of emitting a first light path 11.

[0070] The first parabolic mirror 2 is arranged on one side of the light source 1, and the light center of the light source is coincided with the focal point of the first parabolic mirror 2, and the first light path 11 can reflect the second light path 12 after passing through the first parabolic mirror 2.

[0071] The special-shaped right-angle prism mirror group is arranged on one side of the first parabolic mirror 2 and is located on the second light path 12, and the special-shaped right-angle prism mirror group comprises a first right-angle prism module 31 and a second right-angle prism module 32 which are connected in one body and are all right-angle triangular prisms, the length of the hypotenuse of the cross section of the first right-angle prism module 31 is smaller than the length of the hypotenuse of the cross section of the second right-angle prism module 32, that is, at least one right-angle side of the cross section of the first right-angle prism module 31 is also smaller than any right-angle side of the cross section of the second right-angle prism module 32, and the first right-angle prism module 31 is provided with a light passing hole which is parallel to the second light path 12.

[0072] After the second light path 12 passes through the special-shaped right-angle prism mirror group, a part directly passes through the light passing hole to form a second extended light path 121 which is in the same direction as the second light path 12, and the other part is reflected by the non-light passing hole part of the first right-angle prism module 31 and the second right-angle prism module 32 to form a third light path 13 and a fourth light path 14 respectively. The detector 4 is arranged at the end of the second extended light path 121 and the third light path 13.

[0073] The original-shaped right-angle prism mirror group comprises a third right-angle prism module 61 and a fourth right-angle prism module 62 which are completely same in structure and are right-angle triangular prisms. One right-angle side of the third right-angle prism module 61 and one right-angle side of the fourth right-angle prism module 62 are abutted and fixedly connected. The original-shaped right-angle prism mirror group is arranged on the fourth light path 14 and is used for splitting the fourth light path 14, and after the fourth light path 14 is irradiated to the original-shaped right-angle prism mirror group, the third light path 17 and the eighth light path 18 are formed by being reflected by the third right-angle prism module 61 and the fourth right-angle prism module 62 respectively, and the detector 4 is arranged at the end of the eighth light path 18 and is used for detecting the extreme ultraviolet energy. The seventh light path 17 is irradiated to the second parabolic mirror 5, is reflected by the second parabolic mirror 5 to form the fifth light path 15, and then the fifth light path 15 enters the light homogenizing system 7 and is emitted after being homogenized.

[0074] Although the utility model has disclosed as above with preferred embodiments, it is not used to limit the utility model, and anyone familiar with the technology can make various changes and modifications without departing from the spirit and scope of the utility model, therefore the protection scope of the utility model should be defined by the claims.

Claims

1. An optical system for guiding and monitoring the light energy of an EUV light source, characterized in that, include: The light source is used to emit extreme ultraviolet light to form the first optical path; A first parabolic reflector is disposed on one side of the light source, and the center of the light emitted from the light source coincides with the focal point of the first parabolic reflector. The first optical path can be reflected by the first parabolic mirror to form the second optical path; A right-angle prism reflector assembly is disposed on one side of the first parabolic reflector and located in the second optical path. The right-angle prism reflector assembly includes a first right-angle prism module and a second right-angle prism module. The second optical path is reflected by the first right-angle prism module and the second right-angle prism module to form a third optical path and a fourth optical path, respectively. A detector, positioned in the third optical path, is used to receive light from the third optical path and detect the energy of light emitted by the light source; A light homogenizing system is installed on the fourth optical path to receive light from the fourth optical path, homogenize it, and then emit it.

2. The optical system according to claim 1, characterized in that, The cross-sections of the first right-angle prism module and the second right-angle prism module are both isosceles right triangles, and one right-angle side of the first right-angle prism module is attached to and fixedly connected to one right-angle side of the second right-angle prism module.

3. The optical system according to claim 1, characterized in that, The optical system also includes a second parabolic reflector, which is disposed on one side of the right-angle prism reflector group and located on the fourth optical path. The fourth optical path is reflected by the second parabolic reflector to form the fifth optical path.

4. The optical system according to claim 1, characterized in that, The optical system also includes a third parabolic reflector, which is disposed on one side of the right-angle prism reflector group and located on the third optical path. The third optical path is reflected by the third parabolic reflector to form a sixth optical path.

5. The optical system according to claim 1, characterized in that, The right-angle prism reflector group is an irregularly shaped right-angle prism reflector group, which is disposed on one side of the first parabolic reflector and located in the second optical path. The irregularly shaped right-angle prism reflector group includes a first right-angle prism module and a second right-angle prism module connected as a whole and both being right-angled triangular prisms. The first right-angle prism module is provided with a light-transmitting hole parallel to the second optical path. After the second optical path passes through the irregularly shaped right-angle prism reflector group, part of it directly passes through the light-transmitting hole to form a second extended optical path in the same direction as the second optical path, and the other part is reflected by the first right-angle prism module and the second right-angle prism module respectively to form a third optical path and a fourth optical path. The detector is located on the second extended optical path and the third optical path.

6. The optical system according to claim 5, characterized in that, A detector is installed on the fourth optical path.

7. The optical system according to claim 1, characterized in that, The homogenizing system is an integrating bar.

8. The optical system according to claim 3, characterized in that, The optical system also includes a prototype right-angle prism reflection group disposed on the fourth optical path, comprising a third right-angle prism module and a fourth right-angle prism module with identical structures and shapes of right-angled triangular prisms. A right-angled side of the third right-angle prism module and a right-angled side of the fourth right-angle prism module are attached and fixedly connected. After passing through the prototype right-angle prism reflection group, the fourth optical path is reflected by the third right-angle prism module and the fourth right-angle prism module respectively to form a seventh optical path and an eighth optical path. A detector is disposed on the eighth optical path.

9. The optical system according to claim 8, characterized in that, A second parabolic reflector is provided on the fifth optical path, and the fifth optical path can be reflected by the second parabolic reflector to form a sixth optical path.

10. The optical system according to claim 1, characterized in that, The detector is an optical power meter.

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