Wafer carrying mechanism

Abstract

The utility model discloses a wafer carrying mechanism which comprises an in-out bin arm, an in-out bin arm translation driving device, a central sucker, a first inspection carrying arm, a second inspection carrying arm, an inspection carrying arm lifting driving device and an inspection carrying arm translation driving device. The wafer feeding and discharging carrying and microscopic detection alternate carrying can be completed, the operation is stable and reliable, the problems of wafer falling, collision and the like cannot occur in the wafer moving process, and the efficiency is greatly improved. In addition, the wafer turnover device is further provided with a turnover arm, a turnover arm lifting and turnover driving device, a suction cup lifting driving device, a suction cup horizontal adjusting device, a suction cup turnover driving device and a suction cup rotation driving device, and the wafer turnover device can drive the wafer to turn over and rotate at a preset angle. The device can assist an operator in wafer surface detection, wafer back edge detection and wafer back center detection, is convenient to operate, and improves the efficiency.

Description

TECHNICAL FIELD

[0001] The utility model relates to wafer detection equipment technical field more specifically, it is a kind of wafer handling mechanism. BACKGROUND

[0002] In wafer production procedure, the defects on its surface and reverse need to be checked, otherwise the defects generated on the wafer will affect the final performance of chip. Among them, the defect inspection of wafer can adopt artificial visual inspection mode, and the operator can manually place the wafer in the magazine under the light source to visually inspect macroscopically, and manually place the wafer in the magazine under the microscope to rejudge microscopically, but the inspection efficiency of the inspection mode is low, and the wafer is prone to knock, increase the damage rate, and the wafer surface is also prone to be dirty, which affects the quality of wafer. UTILITY MODEL CONTENT

[0003] The utility model aims at overcoming the above-mentioned defects in the prior art, and provides a wafer handling mechanism which is compact in structure, saves floor space, is high in efficiency, can complete the alternate handling of wafer feeding and discharging and microscopic detection, and will not cause wafer falling, knocking and other problems during wafer movement.

[0004] To achieve the above-mentioned purpose, the utility model provides a wafer handling mechanism, which comprises an in-out magazine arm for taking out the wafer to be detected in the wafer magazine to a center suction cup and sending the detected wafer back to the wafer magazine, an in-out magazine arm translation driving device for driving the in-out magazine arm to move, a center suction cup for sucking the middle part of the reverse of the wafer, a first inspection handling arm and a second inspection handling arm for alternately handling the front and rear two wafers on the center suction cup to the microscope detection area and alternately handling the front and rear two wafers from the microscope observation area back to the center suction cup, an inspection handling arm lifting driving device for driving the first inspection handling arm and the second inspection handling arm to lift, an inspection handling arm translation driving device for driving the first inspection handling arm and the second inspection handling arm to move alternately horizontally, the in-out magazine arm translation driving device and the inspection handling arm lifting driving device are arranged at the periphery of the center suction cup respectively, the in-out magazine arm is installed on the in-out magazine arm translation driving device, the inspection handling arm translation driving device is installed on the inspection handling arm lifting driving device, the first inspection handling arm and the second inspection handling arm are installed on the inspection handling arm translation driving device respectively, and the in-out magazine arm, the first inspection handling arm and the second inspection handling arm are respectively provided with an arm suction cup for sucking the wafer.

[0005] As preferred, the in-out warehouse arm translation driving device comprises an in-out warehouse translation bracket, a first in-out warehouse translation driving motor, an in-out warehouse translation driving belt, an in-out warehouse translation driving wheel, an in-out warehouse translation guide rail, an in-out warehouse driving belt connecting seat, a second in-out warehouse translation driving motor, a translation driving screw, a nut seat, a moving slide and an in-out warehouse arm connecting bracket, the in-out warehouse translation driving wheels are respectively located at two ends of the in-out warehouse translation bracket, the output shaft of the first in-out warehouse translation driving motor is connected with one of the in-out warehouse translation driving wheels, the in-out warehouse translation driving belt is sleeved between the two in-out warehouse translation driving wheels, the moving slide is slidably connected with the in-out warehouse translation bracket through the in-out warehouse translation guide rail, the lower end base part of the moving slide is connected with the in-out warehouse translation driving belt through the in-out warehouse driving belt connecting seat, the second in-out warehouse translation driving motor is installed at the lower end base part of the moving slide, the horizontal installation direction of the second in-out warehouse translation driving motor is perpendicular to the length direction of the in-out warehouse translation guide rail, the nut seat is installed on the upper end sliding part of the moving slide, the output shaft of the second in-out warehouse translation driving motor is drivingly connected with the nut seat through the translation driving screw, and the in-out warehouse arm is installed on the upper end sliding part of the moving slide through the in-out warehouse arm connecting bracket.

[0006] As preferred, the inspection carrying arm lifting driving device comprises an inspection carrying arm lifting motor, a lifting base, a lifting movable seat, a lifting driving swing block and a lifting driving bearing, the lifting movable seat is slidably installed on the lifting base through a slide rail assembly, the inspection carrying arm lifting motor is installed on the lifting base, the output shaft of the inspection carrying arm lifting motor is connected with one end of the lifting driving swing block, the lifting driving bearing is installed at the other end of the lifting driving swing block and movably installed in the bearing movable groove opened at the lower end of the lifting movable seat, and the inspection carrying arm lifting motor can drive the lifting movable seat to move up and down through the lifting driving swing block and the lifting driving bearing.

[0007] As preferred, the inspection carrying arm translation driving device comprises an arm translation mounting frame, an inspection carrying arm translation driving motor, an arm translation transmission belt, an arm translation transmission wheel, a first arm translation guide rail, a first inspection carrying arm mounting seat, a first arm translation transmission belt connecting seat, a second arm translation guide rail, a second inspection carrying arm mounting seat and a second arm translation transmission belt connecting seat, the arm translation mounting frame is mounted on the top of the lifting movable seat, the arm translation transmission wheels are located at both ends of the arm translation mounting frame, the output shaft of the inspection carrying arm translation driving motor is connected with one of the arm translation transmission wheels, the arm translation transmission belt is sleeved between the two arm translation transmission wheels, the first inspection carrying arm mounting seat is slidably connected with one surface of the arm translation mounting frame through the first arm translation guide rail, the first inspection carrying arm mounting seat is connected with one side belt body of the arm translation transmission belt through the first arm translation transmission belt connecting seat, the second inspection carrying arm mounting seat is slidably connected with the other surface of the arm translation mounting frame through the second arm translation guide rail, the second inspection carrying arm mounting seat is connected with the other side belt body of the arm translation transmission belt through the second arm translation transmission belt connecting seat, the first inspection carrying arm is mounted on the first inspection carrying arm mounting seat, the second inspection carrying arm is mounted on the second inspection carrying arm mounting seat, and the inspection carrying arm translation driving motor can drive the first inspection carrying arm mounted on the first inspection carrying arm mounting seat and the second inspection carrying arm mounted on the second inspection carrying arm mounting seat to move alternately through the arm translation transmission belt.

[0008] As preferred, the height of the first inspection carrying arm is higher than that of the second inspection carrying arm.

[0009] As preferred, the device further comprises a chuck lifting driving device for lifting the central chuck, a chuck horizontal adjusting device for adjusting the horizontal position of the wafer sucked by the central chuck, a chuck flipping driving device for flipping the wafer sucked by the central chuck, a chuck rotating driving device for rotating the wafer sucked by the central chuck during edge finding and / or after backside flipping, a flipping arm for sucking the edge of the wafer and flipping the wafer, a flipping arm lifting and flipping driving device for lifting and flipping the flipping arm, the chuck lifting driving device is connected with the chuck horizontal adjusting device and can drive the chuck horizontal adjusting device to move up and down, the chuck horizontal adjusting device is connected with the chuck flipping driving device and can drive the chuck flipping driving device to swing, the chuck flipping driving device is connected with the chuck rotating driving device and can drive the chuck rotating driving device to flip, the chuck rotating driving device is connected with the central chuck and can drive the central chuck to rotate, the flipping arm lifting and flipping driving device is located at one side of the central chuck, the flipping arm is installed on the flipping arm lifting and flipping driving device, and the flipping arm is provided with an arm chuck for sucking the wafer.

[0010] As preferred, the chuck lifting driving device comprises a chuck lifting back plate, a chuck lifting driving motor, a speed reducer, a chuck lifting transmission belt, a chuck lifting transmission wheel, a chuck lifting transmission belt connecting seat, a chuck lifting seat and a chuck lifting guide rail, the chuck lifting transmission wheel is installed at the upper and lower ends of the chuck lifting back plate, the chuck lifting driving motor is connected with the chuck lifting transmission wheel at the lower end of the chuck lifting back plate through the speed reducer, the chuck lifting transmission belt is sleeved between the two chuck lifting transmission wheels, the chuck lifting seat is slidably connected with the chuck lifting back plate through the chuck lifting guide rail, the chuck lifting seat is connected with the chuck lifting transmission belt through the chuck lifting transmission belt connecting seat, and the chuck lifting driving motor can drive the chuck lifting seat to move up and down.

[0011] As preferred, the chuck horizontal adjusting device comprises a motor mounting plate, a horizontal adjusting motor, a horizontal adjusting encoder, a first adjusting swing block, a second adjusting swing block, an adjusting transmission rod and a horizontal adjusting swing plate, the horizontal adjusting motor and the horizontal adjusting encoder are both mounted on the chuck lifting seat through the motor mounting plate, the output shaft of the horizontal adjusting motor is connected with one end of the first adjusting swing block, the other end of the first adjusting swing block is rotationally connected with the adjusting transmission rod, the shaft body of the horizontal adjusting encoder is connected with one end of the second adjusting swing block, the other end of the second adjusting swing block is rotationally connected with the adjusting transmission rod, the upper end of the adjusting transmission rod is rotationally connected with one side edge of the horizontal adjusting swing plate, the horizontal adjusting swing plate is rotationally connected with the upper end of the chuck lifting seat, and the horizontal adjusting motor can drive the horizontal adjusting swing plate to swing through the first adjusting swing block and the adjusting transmission rod.

[0012] As preferred, the chuck turning driving device comprises a chuck turning mounting frame, a chuck turning driving motor, a chuck turning encoder, a chuck turning transmission belt and a chuck turning transmission wheel, the chuck turning mounting frame is mounted on the horizontal adjusting swing plate, the chuck turning driving motor and the chuck turning encoder are both mounted on the chuck turning mounting frame, the chuck turning transmission wheel is respectively mounted on the output shaft of the chuck turning driving motor, the shaft body of the chuck turning encoder and one side of the chuck rotating driving device, the chuck turning transmission belt is sleeved between the three chuck turning transmission wheels, the chuck rotating driving device is rotationally connected on the chuck turning mounting frame, and the chuck turning driving motor can drive the chuck rotating driving device to turn through the chuck turning transmission belt and the chuck turning transmission wheel.

[0013] As preferred, the chuck rotating driving device comprises a chuck rotating driving motor, a chuck rotating mounting seat and a chuck rotating coupling, the chuck rotating mounting seat is rotationally connected on the chuck turning mounting frame, the chuck rotating driving motor is mounted on the bottom of the chuck rotating mounting seat, the central chuck is rotationally connected on the top of the chuck rotating mounting seat, and the output shaft of the chuck rotating driving motor is connected with the lower end of the central chuck through the chuck rotating coupling.

[0014] As preferred, the turning-over arm lifting and turning driving device comprises a lifting and turning support, a turning driving back plate, a turning-over arm lifting driving motor, a turning-over arm lifting transmission belt, a turning-over arm lifting transmission wheel, an arm lifting transmission belt connecting seat, a turning-over arm lifting seat, a turning-over arm lifting guide rail, a turning driving driving wheel, a turning driving driven wheel, a turning driving belt, a turning driving bearing, a turning bearing mounting block and a turning-over arm turning mounting seat, the turning driving back plate is mounted on the back of the lifting and turning support, a turning driving track groove is formed in the turning driving back plate, the lower end of the turning driving track groove extends longitudinally downward, the upper end of the turning driving track groove is bent to one side, the turning-over arm lifting driving motor is mounted on the lifting and turning support, the turning-over arm lifting transmission wheel is mounted on the back of the lifting and turning support and the output shaft of the turning-over arm lifting driving motor, the turning-over arm lifting transmission belt is sleeved between all the turning-over arm lifting transmission wheels, the turning-over arm lifting seat is slidably connected with the back of the lifting and turning support through the turning-over arm lifting guide rail and is located between the lifting and turning support and the turning driving back plate, the turning-over arm lifting seat is connected with the turning-over arm lifting transmission belt through the arm lifting transmission belt connecting seat, the turning-over arm turning mounting seat is rotationally connected with the upper end of the turning-over arm lifting seat, the turning driving driving wheel is mounted on the lower end of the turning-over arm lifting seat, the turning driving driven wheel is mounted on the turning-over arm turning mounting seat, the turning driving belt is sleeved between the turning driving driving wheel and the turning driving driven wheel, the turning driving bearing is mounted on the turning driving driving wheel through the turning bearing mounting block, the turning driving bearing is movably mounted in the turning driving track groove of the turning driving back plate, the turning-over arm is mounted on the turning-over arm turning mounting seat, the turning-over arm lifting driving motor can drive the turning-over arm lifting seat to move up and down through the turning-over arm lifting transmission belt and the turning-over arm lifting transmission wheel, and the turning driving bearing can drive the turning driving driving wheel to rotate under the guidance of the turning driving track groove during the lifting and lowering of the turning-over arm lifting seat, so that the turning-over arm mounted on the turning-over arm turning mounting seat is turned over through the turning driving belt and the turning driving driven wheel.

[0015] Compared with the prior art, the utility model has the advantages that:

[0016] 1、The utility model discloses a warehouse arm, a warehouse arm translation driving device, a center suction disc, a first check carrying arm, a second check carrying arm, check carrying arm lifting driving device and check carrying arm translation driving device, its compact structure saves the floor space, can complete wafer's loading and unloading carrying and microscopical detection's alternate type carrying, stable and reliable operation, in the wafer movement, will not take place wafer drop, knock and so on problem, greatly improves the efficiency.

[0017] 2, the utility model further has a suction cup lifting driving device, a suction cup horizontal adjusting device, a suction cup turning driving device, a suction cup rotating driving device, a turning arm and a turning arm lifting and turning driving device, which can drive the wafer to turn and rotate at a preset angle, assist the operator in detecting the wafer surface, the wafer back edge and the wafer back center, and are convenient to operate and improve the efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or the prior art, the drawings needed to be used in the following embodiment or prior art description will be briefly introduced, and obviously, the drawings in the following description are some embodiments of the utility model, and those skilled in the art can also obtain other drawings according to these drawings without creating labor.

[0019] Figure 1 It is the structure schematic drawing of wafer carrying mechanism provided by the utility model embodiment;

[0020] Figure 2 It is the structure schematic drawing of in-out warehouse arm and in-out warehouse arm translation driving device provided by the utility model embodiment Figure 1 ;

[0021] Figure 3 It is the structure schematic drawing of in-out warehouse arm and in-out warehouse arm translation driving device provided by the utility model embodiment Figure 2 ;

[0022] Figure 4 It is the structure schematic drawing of center suction cup, suction cup lifting driving device, suction cup horizontal adjusting device, suction cup turning driving device and suction cup rotating driving device provided by the utility model embodiment Figure 1 ;

[0023] Figure 2 It is the structure schematic drawing of center suction cup, suction cup lifting driving device, suction cup horizontal adjusting device, suction cup turning driving device and suction cup rotating driving device provided by the utility model embodiment Figure 6 ;

[0024] Figure 3 It is the structure schematic drawing of center suction cup, suction cup lifting driving device, suction cup horizontal adjusting device, suction cup turning driving device and suction cup rotating driving device provided by the utility model embodiment Figure 7 ;

[0025] Figure 8 It is the structure schematic drawing of center suction cup, suction cup turning driving device and suction cup rotating driving device provided by the utility model embodiment;

[0026] Figure 1The utility model embodiment provides a structure schematic diagram of a turning arm and a turning arm lifting and turning driving device Figure 9 ;

[0027] Figure 2 The utility model embodiment provides a structure schematic diagram of a turning arm and a turning arm lifting and turning driving device Figure 10 ;

[0028] Figure 3 The utility model embodiment provides a structure schematic diagram of a turning arm and a turning arm lifting and turning driving device Figure 11 ;

[0029] Figure 1 The utility model embodiment provides a structure schematic diagram of a first inspection carrying arm, a second inspection carrying arm, an inspection carrying arm lifting driving device and an inspection carrying arm translation driving device Figure 12 ;

[0030] Figure 2 The utility model embodiment provides a structure schematic diagram of a first inspection carrying arm, a second inspection carrying arm, an inspection carrying arm lifting driving device and an inspection carrying arm translation driving device Figure 13 ;

[0031] Figure 1 The utility model embodiment provides a structure schematic diagram of a first inspection carrying arm, a second inspection carrying arm, an inspection carrying arm lifting driving device and an inspection carrying arm translation driving device Specific implementation

[0032] In order to make the utility model embodiment's purpose, technical scheme and advantage more clear, the following will combine the drawing in the utility model embodiment, and the technical scheme in the utility model embodiment is clearly and completely described, obviously, the described embodiment is the part embodiment of the utility model, not all the embodiment. Based on the embodiment in the utility model, all other embodiments obtained by the ordinary skill in the art without making the creative labor all belong to the range of the utility model protection.

[0033] Please refer to Figure 4 And Figure 2The embodiment of the utility model provides a wafer carrying mechanism, including in and out warehouse arm 4, in and out warehouse arm translation drive arrangement 5, center suction disc 6, suction disc lifting drive arrangement 7, suction disc horizontal adjusting device 8, suction disc face turning drive arrangement 9, suction disc rotary drive arrangement 10, face turning arm 13, face turning arm lifting overturning drive arrangement 14, first check carrying arm 15, second check carrying arm 16, check carrying arm lifting drive arrangement 17 and check carrying arm translation drive arrangement 18, in and out warehouse arm translation drive arrangement 5 and face turning arm lifting overturning drive arrangement 14 are arranged at the periphery of center suction disc 6 respectively, in and out warehouse arm 4 is installed on in and out warehouse arm translation drive arrangement 5, face turning arm 13 is installed on face turning arm lifting overturning drive arrangement 14, suction disc lifting drive arrangement 7 is transmission connection with suction disc horizontal adjusting device 8 and can drive suction disc horizontal adjusting device 8 moves up and down, suction disc horizontal adjusting device 8 is transmission connection with suction disc face turning drive arrangement 9 and can drive suction disc face turning drive arrangement 9 swing, suction disc face turning drive arrangement 9 is transmission connection with suction disc rotary drive arrangement 10 and can drive suction disc rotary drive arrangement 10 overturn, suction disc rotary drive arrangement 10 is transmission connection with center suction disc 6 and can drive center suction disc 6 rotates, check carrying arm lifting drive arrangement 17 is located in the side of face turning arm lifting overturning drive arrangement 14, check carrying arm translation drive arrangement 18 is installed on check carrying arm lifting drive arrangement 17, first check carrying arm 15 and second check carrying arm 16 are installed on check carrying arm translation drive arrangement 18 respectively.

[0034] The various components of the embodiment will be described in detail below with reference to the accompanying drawings.

[0035] As Figure 3 And Figure 5As shown, the in-out warehouse arm translation driving device 5 can include an in-out warehouse translation bracket 51, a first in-out warehouse translation driving motor 52, an in-out warehouse translation driving belt 53, an in-out warehouse translation driving wheel 54, an in-out warehouse translation guide rail 55, an in-out warehouse driving belt connecting seat 56, a second in-out warehouse translation driving motor 57, a translation driving screw 58, a nut seat 59, a moving slide table 510, and an in-out warehouse arm connecting bracket 511. The in-out warehouse translation driving wheels 54 are respectively located at the two ends of the in-out warehouse translation bracket 51. The output shaft of the first in-out warehouse translation driving motor 52 is connected with one of the in-out warehouse translation driving wheels 54. The in-out warehouse translation driving belt 53 is sleeved between the two in-out warehouse translation driving wheels 54. The moving slide table 510 is slidingly connected with the in-out warehouse translation bracket 51 through the in-out warehouse translation guide rail 55. The lower end base part of the moving slide table 510 is connected with the in-out warehouse translation driving belt 53 through the in-out warehouse driving belt connecting seat 56. The second in-out warehouse translation driving motor 57 is installed at the lower end base part of the moving slide table 510. The horizontal installation direction of the second in-out warehouse translation driving motor 57 is perpendicular to the length direction of the in-out warehouse translation guide rail 55. The nut seat 59 is installed on the upper end sliding part of the moving slide table 510. The output shaft of the second in-out warehouse translation driving motor 57 is drivingly connected with the nut seat 59 through the translation driving screw 58. The in-out warehouse arm 4 is installed on the upper end sliding part of the moving slide table 510 through the in-out warehouse arm connecting bracket 511.

[0036] As shown in Figure 4 The in-out warehouse arm 4 is provided with a plurality of arm suction cups 41 for sucking the wafers.

[0037] When it is needed to move the wafers to the central suction cup 6, the first in-out warehouse translation driving motor 52 can drive the in-out warehouse arm 4 to move to the inside of the wafer warehouse. The arm suction cups 41 on the in-out warehouse arm 4 can suck the wafers. Under the driving of the first in-out warehouse translation driving motor 52, the in-out warehouse arm 4 can move the wafers to the central suction cup 6. The second in-out warehouse translation driving motor 57 can drive the moving slide table 510 to move through the translation driving screw 58 and the nut seat 59, so as to finely adjust the position of the in-out warehouse arm 4.

[0038] As shown in Figure 5 and Figure 4As shown, the chuck lifting driving device 7 can include a chuck lifting back plate 71, a chuck lifting driving motor 72, a speed reducer 73, a chuck lifting transmission belt 74, chuck lifting transmission wheels 75, a chuck lifting transmission belt connecting seat 76, a chuck lifting seat 77 and a chuck lifting guide rail 78. The chuck lifting transmission wheels 75 are installed at the upper and lower ends of the chuck lifting back plate 71. The output shaft of the chuck lifting driving motor 72 can be connected with the input shaft of the speed reducer 73 through a transmission belt + transmission wheel transmission assembly. The chuck lifting driving motor 72 is transmissionally connected with the chuck lifting transmission wheel 75 at the lower end of the chuck lifting back plate 71 through the speed reducer 73. The chuck lifting transmission belt 74 is sleeved between the two chuck lifting transmission wheels 75. The chuck lifting seat 77 is slidingly connected with the chuck lifting back plate 71 through the chuck lifting guide rail 78. The chuck lifting seat 77 is connected with the chuck lifting transmission belt 74 through the chuck lifting transmission belt connecting seat 76. The chuck lifting driving motor 72 can drive the chuck lifting seat 77 to move up and down.

[0039] As shown in Figure 6 and Figure 6 , the chuck horizontal adjusting device 8 can include a motor mounting plate 81, a horizontal adjusting motor 82, a horizontal adjusting encoder 83, a first adjusting swing block 84, a second adjusting swing block 85, an adjusting transmission rod 86 and a horizontal adjusting swing plate 87. The horizontal adjusting motor 82 and the horizontal adjusting encoder 83 are both mounted on the chuck lifting seat 77 through the motor mounting plate 81. The output shaft of the horizontal adjusting motor 82 is connected with one end of the first adjusting swing block 84. The other end of the first adjusting swing block 84 is rotationally connected with the adjusting transmission rod 86. The shaft body of the horizontal adjusting encoder 83 is connected with one end of the second adjusting swing block 85. The other end of the second adjusting swing block 85 is rotationally connected with the adjusting transmission rod 86. The upper end of the adjusting transmission rod 86 is rotationally connected with one side edge part of the horizontal adjusting swing plate 87. The horizontal adjusting swing plate 87 is rotationally connected with the upper end of the chuck lifting seat 77.

[0040] The horizontal adjusting motor 82 can drive the adjusting transmission rod 86 to lift through the first adjusting swing block 84, and drive the horizontal adjusting swing plate 87 to swing through the adjusting transmission rod 86, so as to adjust the horizontal position of the central chuck 6 and the wafer sucked by the central chuck 6. When the adjusting transmission rod 86 lifts, the second adjusting swing block 85 can also be driven to swing. At this time, the second adjusting swing block 85 can drive the shaft body of the horizontal adjusting encoder 83 to rotate. In this way, the horizontal adjusting encoder 83 can accurately detect the swing angle of the horizontal adjusting swing plate 87 (i.e. the swing angle of the central chuck).

[0041] As shown in Figure 7 and Figure 6As shown in the drawings, the suction cup turning driving device 9 can include a suction cup turning mounting frame 91, a suction cup turning driving motor 92, a suction cup turning encoder 93, a suction cup turning transmission belt 94 and a suction cup turning transmission wheel 95. The suction cup turning mounting frame 91 is mounted on the horizontal adjustment swing plate 87. The suction cup turning driving motor 92 and the suction cup turning encoder 93 are both mounted on the suction cup turning mounting frame 91. The suction cup turning transmission wheel 95 is mounted on the output shaft of the suction cup turning driving motor 92, the shaft body of the suction cup turning encoder 93 and one side of the suction cup rotating driving device 10 respectively. The suction cup turning transmission belt 94 is sleeved between the three suction cup turning transmission wheels 95. The suction cup rotating driving device 10 is rotationally connected to the suction cup turning mounting frame 91. The suction cup turning driving motor 92 can drive the suction cup rotating driving device 10 to turn through the suction cup turning transmission belt 94 and the suction cup turning transmission wheel 95. The suction cup turning encoder 93 can accurately detect the turning angle of the center suction cup.

[0042] As shown in the drawings, Figure 7 and Figure 5 The suction cup rotating driving device 10 can include a suction cup rotating driving motor 101, a suction cup rotating mounting seat 102 and a suction cup rotating shaft coupling 103. The suction cup rotating mounting seat 102 is rotationally connected to the suction cup turning mounting frame 91. The suction cup rotating driving motor 101 is mounted at the bottom of the suction cup rotating mounting seat 102. The center suction cup 6 is rotationally connected to the top of the suction cup rotating mounting seat 102. The output shaft of the suction cup rotating driving motor 101 is connected to the lower end rotating shaft of the center suction cup 6 through the suction cup rotating shaft coupling 103.

[0043] As a preferred embodiment, as shown in the drawings, Figure 6 and Figure 6 The other end of the first adjustment swing block 84 can also be provided with a first limit bearing 88. The side of the first limit bearing 88 is provided with a horizontally arranged horizontal adjustment limiting block 89. When the first limit bearing 88 is in rolling contact with the side of the horizontal adjustment limiting block 89, the horizontal adjustment limiting block 89 can limit the swing of the first adjustment swing block 84, so as to prevent unnecessary deflection of the center suction cup 6. When the suction cup lifting driving device 7 drives the suction cup lifting seat 77 and the suction cup horizontal adjustment device 8 to move upward, the first limit bearing 88 can move upward and be out of the limitation of the horizontal adjustment limiting block 89. At this time, the suction cup horizontal adjustment device 8 can drive the swing of the center suction cup 6 to adjust the position.

[0044] Similarly, as shown in the drawings, Figure 7 and Figure 8As shown, the suction disc overturning transmission wheel 95 on the shaft body of the suction disc overturning encoder 93 can also be connected with a limiting bearing mounting block 96, and the limiting bearing mounting block 96 is provided with a second limiting bearing 97, and the side of the second limiting bearing 97 is provided with a longitudinal overturning limiting block 98. When the second limiting bearing 97 is in rolling contact with the side of the overturning limiting block 98, the overturning limiting block 98 can limit the rotation of the suction disc overturning transmission wheel 95 connected with the shaft body of the suction disc overturning encoder 93, so that unnecessary overturning of the central suction disc 6 can be prevented. When the suction disc lifting driving device 7 drives the suction disc lifting seat 77 and the suction disc overturning driving device 9 to move upward, the second limiting bearing 97 can move upward together, and is out of the limitation of the overturning limiting block 98, at this time, the suction disc overturning driving device 9 can drive the central suction disc 6 to overturn in positive and negative directions.

[0045] As Figure 9 , Figure 10 and Figure 11As shown, the turnover arm lifting and overturning driving device 14 can include a lifting and overturning support 141, an overturning driving back plate 142, a turnover arm lifting driving motor 143, a turnover arm lifting transmission belt 144, a turnover arm lifting transmission wheel 145, an arm lifting transmission belt connecting seat 146, a turnover arm lifting seat 147, a turnover arm lifting guide rail 148, an overturning driving driving wheel 149, an overturning driving driven wheel 1410, an overturning driving belt 1411, an overturning driving bearing 1412, an overturning bearing mounting block 1413, and a turnover arm overturning mounting seat 1414. The overturning driving back plate 142 is mounted on the back of the lifting and overturning support 141, and the overturning driving track groove 1421 is formed in the overturning driving back plate 142. The lower end of the overturning driving track groove 1421 extends longitudinally downward, and the upper end of the overturning driving track groove 1421 bends to one side. The turnover arm lifting driving motor 143 is mounted on the lifting and overturning support 141. The turnover arm lifting transmission wheel 145 is mounted on the back of the lifting and overturning support 141 and the output shaft of the turnover arm lifting driving motor 143. The turnover arm lifting transmission belt 144 is sleeved between all the turnover arm lifting transmission wheels 145. The turnover arm lifting seat 147 is slidably connected to the back of the lifting and overturning support 141 through the turnover arm lifting guide rail 148 and is located between the lifting and overturning support 141 and the overturning driving back plate 142. The turnover arm lifting seat 147 is connected to the turnover arm lifting transmission belt 144 through the arm lifting transmission belt connecting seat 146. The turnover arm overturning mounting seat 1414 is rotatably connected to the upper end of the turnover arm lifting seat 147. The overturning driving driving wheel 149 is mounted on the lower end of the turnover arm lifting seat 147. The overturning driving driven wheel 1410 is mounted on the turnover arm overturning mounting seat 1414. The overturning driving belt 1411 is sleeved between the overturning driving driving wheel 149 and the overturning driving driven wheel 1410. The overturning driving bearing 1412 is mounted on the overturning driving driving wheel 149 through the overturning bearing mounting block 1413. The overturning driving bearing 1412 is movably mounted in the overturning driving track groove 1421 of the overturning driving back plate 142. The turnover arm 13 is mounted on the turnover arm overturning mounting seat 1414. The turnover arm 13 is provided with a plurality of arm suction cups 131 for sucking wafers.

[0046] The turnover arm lifting driving motor 143 can drive the turnover arm lifting seat 147 to move up and down through the turnover arm lifting transmission belt 144 and the turnover arm lifting transmission wheel 145. The overturning driving bearing 1412 can drive the overturning driving driving wheel 149 to rotate under the guidance of the overturning driving track groove 1421 during the lifting and lowering of the turnover arm lifting seat 147. Thus, the turnover arm 13 mounted on the turnover arm overturning mounting seat 1414 can be overturned through the overturning driving belt 1411 and the overturning driving driven wheel 1410.

[0047] The arm overturning and lifting operation of the overturning arm lifting overturning driving device 14 of the embodiment can be realized by using only one motor, which greatly reduces the energy consumption and the production cost of the equipment.

[0048] As shown in Figure 12 , Figure 13 and Figure 11 , the inspection carrying arm lifting driving device 17 can include an inspection carrying arm lifting motor 171, a lifting base 172, a lifting movable seat 173, a lifting driving swing block 174 and a lifting driving bearing 175. The lifting movable seat 173 is slidably installed on the lifting base 172 through a slide rail assembly 176. The inspection carrying arm lifting motor 171 is installed on the lifting base 172. The output shaft of the inspection carrying arm lifting motor 171 is connected with one end of the lifting driving swing block 174. The lifting driving bearing 175 is installed on the other end of the lifting driving swing block 174 and movably installed in a bearing movable groove 177 (a waist-shaped groove arranged horizontally) formed in the lower end of the lifting movable seat 173. The inspection carrying arm lifting motor 171 can drive the lifting driving swing block 174 to swing, so as to drive the lifting movable seat 173 to move up and down through the lifting driving bearing 175 on the lifting driving swing block 174.

[0049] As shown in Figure 12 and ​As shown, the inspection carrying arm translation driving device 18 can include an arm translation mounting frame 181, an inspection carrying arm translation driving motor 182, an arm translation transmission belt 183, an arm translation transmission wheel 184, a first arm translation guide rail 185, a first inspection carrying arm mounting seat 186, a first arm translation transmission belt connecting seat 187, a second arm translation guide rail 188, a second inspection carrying arm mounting seat 189, and a second arm translation transmission belt connecting seat 1810. The arm translation mounting frame 181 is mounted on the top of the lifting movable seat 173. The arm translation transmission wheels 184 are located at both ends of the arm translation mounting frame 181. The output shaft of the inspection carrying arm translation driving motor 182 is connected with one of the arm translation transmission wheels 184. The arm translation transmission belt 183 is sleeved between the two arm translation transmission wheels 184. The first inspection carrying arm mounting seat 186 is slidably connected with one surface of the arm translation mounting frame 181 through the first arm translation guide rail 185. The first inspection carrying arm mounting seat 186 is connected with one side belt body of the arm translation transmission belt 183 through the first arm translation transmission belt connecting seat 187. The second inspection carrying arm mounting seat 189 is slidably connected with the other surface of the arm translation mounting frame 181 through the second arm translation guide rail 188. The second inspection carrying arm mounting seat 189 is connected with the other side belt body of the arm translation transmission belt 183 through the second arm translation transmission belt connecting seat 1810. The first inspection carrying arm 15 is mounted on the first inspection carrying arm mounting seat 186. The second inspection carrying arm 16 is mounted on the second inspection carrying arm mounting seat 189. The height of the first inspection carrying arm 15 is higher than that of the second inspection carrying arm 16. The first inspection carrying arm 15 is provided with a plurality of arm suction cups 151 for sucking wafers. The second inspection carrying arm 16 is provided with a plurality of arm suction cups 161 for sucking wafers.

[0050] The inspection carrying arm translation driving motor 182 can drive the first inspection carrying arm 15 mounted on the first inspection carrying arm mounting seat 186 and the second inspection carrying arm 16 mounted on the second inspection carrying arm mounting seat 189 to move up and down alternately. In this embodiment, the double inspection carrying arms in an alternating mode are adopted, which can greatly improve the carrying efficiency of wafers.

[0051] The working principle of the wafer carrying mechanism is as follows:

[0052] When working, the in-out warehouse arm translation drive device 5 can drive the in-out warehouse arm 4 to take out the wafer to be detected from the wafer warehouse and move it to the center chuck 6, so that the center chuck 6 sucks the middle part of the back surface of the wafer, then the chuck lifting drive device 7 drives the center chuck 6 and the wafer sucked by the center chuck 6 to move upward, the chuck turning drive device 9 drives the wafer in the horizontal state to turn to a set angle to realize front surface turning detection (i.e. wafer surface detection) and back surface turning detection (i.e. wafer back edge detection), so as to facilitate the operator to macroscopically observe the front surface defects and back surface defects (except the middle part) of the wafer, then the chuck turning drive device 9 drives the wafer to turn to the horizontal state, the chuck lifting drive device 7 drives the wafer to descend and reset, the edge searching sensor in-out drive device 12 drives the edge searching sensor 11 to approach to the edge of the wafer, and the chuck rotation drive device 10 drives the wafer to rotate in the horizontal direction to assist the edge searching sensor to search the edge, subsequently, the arm lifting turning drive device 14 drives the turning arm 13 to move upward, the turning arm 13 sucks the edge part of the back surface of the wafer, when the turning arm 13 continues to rise to the position, the turning arm lifting turning drive device 14 drives the wafer sucked by the turning arm 13 to turn to a set angle to realize back surface turning detection (i.e. wafer back center detection), so as to facilitate the operator to macroscopically observe the defects of the middle part of the back surface of the wafer, then the turning arm lifting turning drive device 14 drives the wafer on the turning arm 13 to be horizontally placed back on the center chuck 6, and further, under the driving of the inspection carrying arm lifting drive device 17 and the inspection carrying arm translation drive device 18, the first inspection carrying arm 15 carries the wafer to the microscope detection station, at this time, the operator sitting at the microscope detection station can observe the defects of the wafer through the microscope, in the process of microscope detection by the operator, the in-out warehouse arm translation drive device 5 can drive the in-out warehouse arm 4 to take out the next wafer to be detected from the wafer warehouse and move it to the center chuck 6, the next wafer needs to repeat the above operation, when it needs to be carried to the microscope detection station, the second inspection carrying arm 16 is used for carrying.

[0053] After the detection of the previous wafer is completed, the first inspection carrying arm 15 takes away the previous wafer at the microscope detection station, under the driving of the inspection carrying arm lifting drive device 17 and the inspection carrying arm translation drive device 18, the first inspection carrying arm 15 drives the previous wafer to move back to the center chuck 6, and the second inspection carrying arm 16 drives the next wafer to be carried to the objective table chuck 601 of the objective table 60, at this time, the previous wafer and the next wafer can move up and down alternately.

[0054] After the current wafer returns to the center chuck 6, the chuck rotation driving device 10 can drive the wafer to rotate in the horizontal direction to assist the edge detection operation, and the in-out warehouse arm translation driving device 5 can drive the in-out warehouse arm 4 to send the detected wafer back to the wafer warehouse, and drive the in-out warehouse arm 4 to continue to take the next wafer for detection.

[0055] The above embodiment is the preferred embodiment of the present application, but the embodiment of the present application is not limited by the above embodiment, and any change, modification, replacement, combination, simplification made without departing from the spirit and principle of the present application should be an equivalent replacement mode, which is included in the protection scope of the present application.

Claims

1. A wafer handling mechanism, characterized in that: This includes an in / out arm for removing wafers to be inspected from the wafer hopper to a central chuck and returning inspected wafers to the wafer hopper; an in / out arm translation drive for moving the in / out arm; a central chuck for holding the center of the reverse side of the wafer; a first inspection transport arm and a second inspection transport arm for alternately transporting two wafers from the central chuck to the microscope inspection area and alternately transporting two wafers from the microscope observation area back to the central chuck; an inspection transport arm lifting drive for raising and lowering the first and second inspection transport arms; and a drive for raising the first inspection transport arm. The inspection and handling arm translation drive device performs alternating horizontal movement with the second inspection and handling arm. The in-and-out arm translation drive device and the inspection and handling arm lifting drive device are respectively arranged around the central suction cup. The in-and-out arm is mounted on the in-and-out arm translation drive device, and the inspection and handling arm translation drive device is mounted on the inspection and handling arm lifting drive device. The first inspection and handling arm and the second inspection and handling arm are respectively mounted on the inspection and handling arm translation drive device. The in-and-out arm, the first inspection and handling arm and the second inspection and handling arm are respectively provided with arm suction cups for holding the wafer.

2. The wafer handling mechanism according to claim 1, characterized in that: The in-and-out arm translation drive device includes an in-and-out arm translation bracket, a first in-and-out arm translation drive motor, an in-and-out arm translation transmission belt, in-and-out arm translation transmission wheels, an in-and-out arm translation guide rail, an in-and-out arm transmission belt connecting seat, a second in-and-out arm translation drive motor, a translation drive screw, a nut seat, a movable slide, and an in-and-out arm connecting bracket. The in-and-out arm translation transmission wheels are located at both ends of the in-and-out arm translation bracket. The output shaft of the first in-and-out arm translation drive motor is connected to one of the in-and-out arm translation transmission wheels. The in-and-out arm translation transmission belt is fitted between the two in-and-out arm translation transmission wheels. The movable slide is connected to the in-and-out arm translation guide rail. The guide rail is slidably connected to the in-and-out compartment translation bracket. The lower base of the movable slide is connected to the in-and-out compartment translation transmission belt via an in-and-out compartment transmission belt connecting seat. The second in-and-out compartment translation drive motor is installed on the lower base of the movable slide. The horizontal installation direction of the second in-and-out compartment translation drive motor is perpendicular to the length direction of the in-and-out compartment translation guide rail. The nut seat is installed on the upper sliding part of the movable slide. The output shaft of the second in-and-out compartment translation drive motor is connected to the nut seat via a translation drive screw. The in-and-out compartment arm is installed on the upper sliding part of the movable slide via an in-and-out compartment arm connecting bracket.

3. The wafer handling mechanism according to claim 1, characterized in that: The inspection and handling arm lifting drive device includes an inspection and handling arm lifting motor, a lifting base, a lifting movable seat, a lifting drive swing block, and a lifting drive bearing. The lifting movable seat is slidably mounted on the lifting base via a slide rail assembly. The inspection and handling arm lifting motor is mounted on the lifting base. The output shaft of the inspection and handling arm lifting motor is connected to one end of the lifting drive swing block. The lifting drive bearing is mounted on the other end of the lifting drive swing block and is movably mounted in a bearing movable groove opened at the lower end of the lifting movable seat. The inspection and handling arm lifting motor can drive the lifting movable seat to move up and down through the lifting drive swing block and the lifting drive bearing.

4. A wafer handling mechanism according to claim 3, characterized in that: The inspection and handling arm translation drive device includes an arm translation mounting frame, an inspection and handling arm translation drive motor, an arm translation transmission belt, an arm translation transmission wheel, a first arm translation guide rail, a first inspection and handling arm mounting seat, a first arm translation transmission belt connecting seat, a second arm translation guide rail, a second inspection and handling arm mounting seat, and a second arm translation transmission belt connecting seat. The arm translation mounting frame is mounted on top of the lifting movable seat. The arm translation transmission wheels are located at both ends of the arm translation mounting frame. The output shaft of the inspection and handling arm translation drive motor is connected to one of the arm translation transmission wheels. The arm translation transmission belt is fitted between the two arm translation transmission wheels. The first inspection and handling arm mounting seat is slidably connected to one surface of the arm translation mounting frame via the first arm translation guide rail. The first inspection and handling arm mounting base is connected to one side of the arm translation transmission belt via a first arm translation transmission belt connecting seat. The second inspection and handling arm mounting base is slidably connected to the other surface of the arm translation mounting frame via a second arm translation guide rail. The second inspection and handling arm mounting base is also connected to the other side of the arm translation transmission belt via a second arm translation transmission belt connecting seat. The first inspection and handling arm is mounted on the first inspection and handling arm mounting base, and the second inspection and handling arm is mounted on the second inspection and handling arm mounting base. The inspection and handling arm translation drive motor can drive the first inspection and handling arm mounted on the first inspection and handling arm mounting base and the second inspection and handling arm mounted on the second inspection and handling arm mounting base to move alternately via the arm translation transmission belt.

5. A wafer handling mechanism according to claim 1, characterized in that: The height of the first inspection and handling arm is higher than the height of the second inspection and handling arm.

6. A wafer handling mechanism according to any one of claims 1 to 5, characterized in that: It also includes a suction cup lifting drive device for raising and lowering the central suction cup, a suction cup leveling adjustment device for adjusting the horizontal position of the wafer held by the central suction cup, a suction cup flipping drive device for flipping the wafer held by the central suction cup to both sides, a suction cup rotation drive device for rotating the wafer held by the central suction cup during edge finding and / or after flipping, a flipping arm for holding the reverse edge of the wafer, flipping it, and placing the flipped wafer back into the central suction cup, and a flipping arm lifting and flipping drive device for raising, lowering, and flipping the flipping arm. The device is connected to the suction cup level adjustment device and can drive the suction cup level adjustment device to move up and down. The suction cup level adjustment device is connected to the suction cup flipping drive device and can drive the suction cup flipping drive device to swing. The suction cup flipping drive device is connected to the suction cup rotation drive device and can drive the suction cup rotation drive device to flip. The suction cup rotation drive device is connected to the center suction cup and can drive the center suction cup to rotate. The flipping arm lifting and flipping drive device is located on one side of the center suction cup. The flipping arm is mounted on the flipping arm lifting and flipping drive device. The flipping arm is equipped with an arm suction cup for holding the wafer.

7. A wafer handling mechanism according to claim 6, characterized in that: The suction cup lifting drive device includes a suction cup lifting back plate, a suction cup lifting drive motor, a reducer, a suction cup lifting transmission belt, a suction cup lifting transmission wheel, a suction cup lifting transmission belt connecting seat, a suction cup lifting seat, and a suction cup lifting guide rail. The suction cup lifting transmission wheel is installed at the upper and lower ends of the suction cup lifting back plate. The suction cup lifting drive motor is connected to the suction cup lifting transmission wheel located at the lower end of the suction cup lifting back plate through the reducer. The suction cup lifting transmission belt is fitted between the two suction cup lifting transmission wheels. The suction cup lifting seat is slidably connected to the suction cup lifting back plate through the suction cup lifting guide rail. The suction cup lifting seat is connected to the suction cup lifting transmission belt through the suction cup lifting transmission belt connecting seat. The suction cup lifting drive motor can drive the suction cup lifting seat to move up and down.

8. A wafer handling mechanism according to claim 7, characterized in that: The suction cup leveling device includes a motor mounting plate, a leveling motor, a leveling encoder, a first leveling swing block, a second leveling swing block, an adjusting transmission rod, and a leveling swing plate. The leveling motor and the leveling encoder are both mounted on the suction cup lifting base via the motor mounting plate. The output shaft of the leveling motor is connected to one end of the first leveling swing block, and the other end of the first leveling swing block is rotatably connected to the adjusting transmission rod. The shaft of the leveling encoder is connected to one end of the second leveling swing block, and the other end of the second leveling swing block is rotatably connected to the adjusting transmission rod. The upper end of the adjusting transmission rod is rotatably connected to one side of the leveling swing plate. The leveling swing plate is rotatably connected to the upper end of the suction cup lifting base. The leveling motor can drive the leveling swing plate to swing via the first leveling swing block and the adjusting transmission rod.

9. A wafer handling mechanism according to claim 8, characterized in that: The suction cup flipping drive device includes a suction cup flipping mounting frame, a suction cup flipping drive motor, a suction cup flipping encoder, a suction cup flipping transmission belt, and suction cup flipping transmission wheels. The suction cup flipping mounting frame is mounted on a horizontal adjustment swing plate. The suction cup flipping drive motor and the suction cup flipping encoder are both mounted on the suction cup flipping mounting frame. The suction cup flipping transmission wheels are respectively mounted on the output shaft of the suction cup flipping drive motor, the shaft of the suction cup flipping encoder, and one side of the suction cup rotation drive device. The suction cup flipping transmission belt is fitted between the three suction cup flipping transmission wheels. The suction cup rotation drive device is rotatably connected to the suction cup flipping mounting frame. The suction cup flipping drive motor can drive the suction cup rotation drive device to flip through the suction cup flipping transmission belt and the suction cup flipping transmission wheels. The suction cup rotation drive device includes a suction cup rotation drive motor, a suction cup rotation mounting base, and a suction cup rotation coupling. The suction cup rotation mounting base is rotatably connected to the suction cup flip mounting frame. The suction cup rotation drive motor is mounted at the bottom of the suction cup rotation mounting base. The central suction cup is rotatably connected to the top of the suction cup rotation mounting base. The output shaft of the suction cup rotation drive motor is connected to the lower end shaft of the central suction cup through the suction cup rotation coupling.

10. A wafer handling mechanism according to claim 6, characterized in that: The flipping arm lifting and tilting drive device includes a lifting and tilting bracket, a tilting drive back plate, a flipping arm lifting drive motor, a flipping arm lifting transmission belt, a flipping arm lifting transmission wheel, an arm lifting transmission belt connecting seat, a flipping arm lifting seat, a flipping arm lifting guide rail, a tilting drive driving wheel, a tilting drive driven wheel, a tilting drive belt, a tilting drive bearing, a tilting bearing mounting block, and a flipping arm tilting mounting seat. The tilting drive back plate is installed on the back of the lifting and tilting bracket. The tilting drive back plate has a tilting drive track groove, the lower end of which extends downward longitudinally, and the upper end of which bends to one side. The flipping arm lifting drive motor is installed on the lifting and tilting bracket. The flipping arm lifting transmission wheel is installed on the back of the lifting and tilting bracket and on the output shaft of the flipping arm lifting drive motor. The flipping arm lifting transmission belt is fitted between all the flipping arm lifting transmission wheels. The flipping arm lifting seat is slidably connected to the back of the lifting and tilting bracket through the flipping arm lifting guide rail and is located between the lifting and tilting bracket and the tilting drive back plate. The flipping arm lifting seat is connected to the flipping arm lifting transmission belt via an arm lifting transmission belt connecting seat. The flipping arm tilting mounting seat is rotatably connected to the upper end of the flipping arm lifting seat. The tilting drive drive wheel is installed at the lower end of the flipping arm lifting seat. The tilting drive driven wheel is installed on the flipping arm tilting mounting seat. The tilting drive belt is fitted between the tilting drive drive drive wheel and the tilting drive driven wheel. The tilting drive bearing is installed on the tilting drive drive drive wheel via a tilting bearing mounting block. The tilting drive bearing is movably installed in the tilting drive track groove of the tilting drive back plate. The flipping arm is installed on the flipping arm tilting mounting seat. The flipping arm lifting drive motor can drive the flipping arm lifting seat to move up and down via the flipping arm lifting transmission belt and the flipping arm lifting transmission wheel. During the lifting and lowering process following the flipping arm lifting seat, the tilting drive bearing can drive the tilting drive drive drive wheel to rotate under the guidance of the tilting drive track groove, thereby driving the flipping arm installed on the flipping arm tilting mounting seat to tilt through the tilting drive belt and the tilting drive driven wheel.

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