Positioning tool jig and packaging equipment
By designing positioning fixtures and using limiting components in conjunction with robotic arms, the problem of accurate positioning of wafer panels in packaging equipment was solved, enabling fast and convenient wafer panel positioning and improving wafer loading efficiency.
Patent Information
- Application Number
- CN202422994529.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-05
- Publication Date
- 2025-11-18
- Estimated Expiration
- 2034-12-05
AI Technical Summary
When manually loading wafer panels, existing wafer panel packaging equipment is difficult to center due to the small size of the wafer panels, resulting in high manual operation difficulty and low efficiency.
Design a positioning fixture, including a limiting component and a limiting plate. The limiting component cooperates with the limiting components on the robot arm, and the limiting plate is used to position the wafer panel to the center position, reducing the difficulty of manual positioning.
It enables rapid and easy positioning of wafer panels, improves wafer loading efficiency, and reduces the difficulty of manual operation.
Smart Images
Figure CN223566600U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to wafer production equipment, especially positioning tooling fixture and packaging equipment. BACKGROUND
[0002] The wafer panel packaging equipment at present is composed of multiple vacuum process chambers, wherein when manually loading the wafer panel, if the size of the wafer panel is smaller than the positionable size range of the mechanical hand, the wafer panel needs to be placed in the center position of the loading clamp of the wafer panel packaging equipment, but it is difficult to manually place the wafer panel in the center position, and the efficiency is low. SUMMARY
[0003] The utility model discloses at least one of the technical problems in the prior art. To this end, the utility model provides a positioning tooling fixture and packaging equipment, which positions the wafer panel to the center position, reduces the difficulty of manual loading, and improves the efficiency.
[0004] The positioning tooling fixture according to the first aspect of the utility model comprises: a limiting piece, comprising a first positioning rod, two ends of the first positioning rod are symmetrically provided with a second positioning rod, the first positioning rod is connected with the second positioning rod, and the first positioning rod and the second positioning rod are perpendicular to each other; a limiting sheet is provided with a screw, the screw is threadedly connected with the limiting piece through the limiting sheet, the limiting sheet is provided with multiple limiting sheets, the multiple limiting sheets are respectively arranged on the first positioning rod and the second positioning rod, and the limiting sheet can abut against the wafer panel.
[0005] The positioning tooling fixture according to the first aspect of the utility model has at least the following beneficial effects: the limiting piece is placed on the mechanical hand, the limiting sheet on the first positioning rod cooperates with the limiting assembly on the mechanical hand, the wafer panel is positioned on the mechanical hand, and the limiting sheet on the second positioning rod positions the wafer panel to the center position, which is convenient and fast, reduces the difficulty of manual positioning operation, and improves the efficiency.
[0006] According to some embodiments of the utility model, the limiting sheet comprises a connecting part and a limiting part, the connecting part is connected with the limiting piece through the screw, the connecting part and the limiting part are perpendicular to each other, and the limiting part is used for positioning the wafer panel to abut.
[0007] According to some embodiments of the utility model, the connecting part is provided with an elongated hole, and the screw is threadedly connected with the limiting sheet through the elongated hole.
[0008] According to some embodiments of the utility model, the connecting part and the limiting part are integrally formed.
[0009] According to some embodiments of the present application, the first positioning rod and the second positioning rod are integrally formed.
[0010] According to some embodiments of the present application, the screw is provided with at least two.
[0011] According to the packaging equipment of the second aspect of the present application, the positioning tool jig of the first aspect of the present application is provided.
[0012] According to the packaging equipment of the second aspect of the present application, the positioning tool jig of the first aspect of the present application is provided.
[0013] According to some embodiments of the present application, the packaging equipment comprises a mechanical hand base body, the mechanical hand base body is provided with two support plates symmetrically, the support plate is provided with a limiting component, and the limiting component cooperates with the limiting piece to position the wafer panel.
[0014] According to some embodiments of the present application, the limiting component comprises a first limiting block, a second limiting block and a third limiting block, the first limiting block and the third limiting block cooperate to position the wafer panel in a first direction, and the second limiting block positions the wafer panel in a second direction.
[0015] According to some embodiments of the present application, the positioning piece is placed on the first limiting block and the second limiting block, and the limiting piece respectively abuts against the first limiting block and the second limiting block.
[0016] The additional aspects and advantages of the present application will be partially given in the following description, partially will become obvious from the following description, or will be understood by the practice of the present application. BRIEF DESCRIPTION OF DRAWINGS
[0017] The above and / or additional aspects and advantages of the present application will become apparent and more readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings, in which:
[0018] Figure 1 It is a schematic view of the positioning tool jig of the first aspect of the present application;
[0019] Figure 2 It is an exploded view of the positioning tool jig of the first aspect of the present application;
[0020] Figure 3A schematic view of a mechanical hand base body in the packaging equipment of the second aspect embodiment of the utility model;
[0021] Figure 4 A cooperation schematic view of the mechanical hand base body and the positioning tool jig in the packaging equipment of the second aspect embodiment of the utility model;
[0022] Figure 5 A schematic view of the packaging equipment of the second aspect embodiment of the utility model.
[0023] Mark explanation:
[0024] Limiting piece 100, first positioning rod 111, second positioning rod 112, limiting sheet 120, connecting part 121, positioning part 122, screw 123, long hole 124;
[0025] Mechanical hand 200, mechanical hand base body 210, support plate 220, first limiting block 231, second limiting block 232, third limiting block 233;
[0026] Panel wafer 300;
[0027] Sheet feeding chamber 400. Specific implementation
[0028] The embodiments of the utility model are described in detail below, the examples of the embodiments are shown in the drawings, wherein the same or similar signs represent the same or similar elements or elements with the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary, only for explaining the utility model, and cannot be understood as limiting the utility model.
[0029] In the description of the utility model, it is understood that the orientation description, such as up, down, front, back, left, right and the like, is based on the orientation or positional relationship shown in the drawings, only for the convenience of describing the utility model and simplifying the description, and is not indicative or implied that the indicated device or element must have a specific orientation, a specific orientation and operation, therefore, it cannot be understood as limiting the utility model.
[0030] In the description of the utility model, the meaning of several is one or more, the meaning of multiple is two or more, greater than, less than, more than and the like are not included in the number, above, below, within and the like are included in the number. If the first, the second is described, it is only used for distinguishing the technical features for the purpose, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features or implicitly indicating the sequence of indicated technical features.
[0031] In the description of the utility model, unless otherwise explicitly limited, the words such as setting, installing, connecting should be understood in a broad sense, and the skilled in the art can determine the specific meaning of the above words in the utility model in combination with the specific content of the technical scheme.
[0032] The current wafer panel packaging equipment is composed of multiple vacuum process chambers, wherein when manually loading the wafer panel, if the size of the wafer panel is smaller than the positionable size range of the robot 200, the wafer panel needs to be placed in the center position of the loading fixture of the wafer panel packaging equipment, but it is difficult to manually place the wafer panel in the center position, and the efficiency is low.
[0033] Therefore, the first aspect embodiment of the utility model provides a positioning tool jig, referring to Figure 1 The positioning tool jig comprises: a limiting piece 100, comprising a first positioning rod 111, the two ends of the first positioning rod 111 are symmetrically provided with a second positioning rod 112, the first positioning rod 111 is connected with the second positioning rod 112, and the first positioning rod 111 and the second positioning rod 112 are perpendicular to each other; a limiting sheet 120, provided with a screw 123, the screw 123 is threadedly connected with the limiting piece 100 through the limiting sheet 120, the limiting sheet 120 is provided with multiple pieces, the multiple limiting sheets 120 are respectively arranged on the first positioning rod 111 and the second positioning rod 112, and the limiting sheet 120 can abut against the wafer panel.
[0034] The limiting piece 100 is placed on the robot 200, the limiting sheet 120 on the first positioning rod 111 cooperates with the limiting assembly on the robot 200, the wafer panel is positioned on the robot 200, and the limiting sheet 120 on the second positioning rod 112 positions the wafer panel to the center position, which is convenient and fast, reduces the difficulty of manual positioning operation, and improves the efficiency.
[0035] It can be understood that, referring to Figure 1 and Figure 2 The limiting sheet 120 comprises a connecting part 121 and a limiting part 122, the connecting part 121 is connected with the limiting piece 100 through the screw 123, the connecting part 121 and the limiting part 122 are perpendicular to each other, and the limiting part 122 is used for positioning the wafer panel to abut. The screw 123 is threadedly connected with the limiting piece 100 through the connecting part 121, the limiting sheet 120 is locked on the limiting piece 100, the limiting part 122 is arranged in the U-shaped position surrounded by the first positioning rod 111 and the second positioning rod 112, the limiting sheet 120 positions the wafer panel from three sides, the second positioning rod 112 is symmetrically arranged, the limiting sheet 120 on the second positioning rod 112 positions the wafer panel to the center position, which is convenient for quickly completing the positioning of the wafer panel, and the operation is simple and the efficiency is improved.
[0036] It can also be understood that, referring to Figure 1 andFigure 2 The connecting portion 121 and the limiting portion 122 are integrally formed, the connecting strength of the connecting portion 121 and the limiting portion 122 is enhanced, the service life of the limiting sheet 120 is improved, the deformation resistance of the limiting sheet 120 is improved, and the positioning accuracy is improved.
[0037] In addition, it can also be understood that, with reference to Figure 1 and Figure 2 The first positioning rod 111 and the second positioning rod 112 are integrally formed, the connecting strength of the first positioning rod 111 and the second positioning rod 112 is improved, and the service life of the limiting piece 100 is prolonged.
[0038] With reference to Figures 3 to 5 The packaging equipment of the second aspect of the utility model comprises the positioning tool jig of the first aspect of the utility model. The limiting piece 100 is placed on the mechanical hand 200, the limiting sheet 120 on the first positioning rod 111 is matched with the limiting assembly on the mechanical hand 200, the wafer panel is positioned on the mechanical hand 200, and the limiting sheet 120 on the second positioning rod 112 makes the wafer panel be positioned to the center position, which is convenient and fast, reduces the difficulty of manual positioning operation, and improves the efficiency.
[0039] It can be understood that, with reference to Figure 3 and Figure 4 The packaging equipment comprises a mechanical hand 200 base body, the mechanical hand 200 base body is provided with two support plates 220, the support plate 220 is provided with a limiting assembly, the limiting assembly is matched with the limiting piece 100, and the limiting assembly and the limiting piece 100 are matched to position the wafer panel. The two support plates 220 protrude from the mechanical hand 200 base body, the support plate 220 is used for placing the wafer panel, the limiting assembly is used for positioning the wafer panel, when the size of the wafer panel is smaller than the positionable size of the limiting assembly, the limiting piece is placed on the limiting assembly, the limiting sheet 120 is abutted with the limiting assembly, the positioning of the limiting piece 100 is realized, then the wafer panel is placed on the support plate 220, the gap between the wafer panel and the limiting assembly is filled by the limiting sheet 120, the wafer panel is centrally positioned on the mechanical hand 200, then the limiting piece 100 is taken away, and the packaging equipment can process the wafer panel, which is simple and fast.
[0040] It can be understood that, with reference to Figure 3The limiting assembly includes a first limiting block 231, a second limiting block 232, and a third limiting block 233. The first limiting block 231 and the third limiting block 233 cooperate to position the wafer panel in the first direction, and the second limiting block 232 positions the wafer panel in the second direction. When the robot 200 is applied to position the wafer panel conforming to the specification, the wafer panel is placed on the support plate 220, and the wafer panel is positioned between the first limiting block 231 and the second limiting block 232. The first limiting block 231 and the second limiting block 232 abut the two sides of the wafer panel in the first direction, respectively, to realize the positioning of the wafer panel in the first direction. Then, the second limiting block 232 abuts the two sides of the wafer panel in the second direction, to realize the positioning of the wafer panel in the second direction.
[0041] Based on this, referring to Figure 3 and Figure 4 , when the size of the wafer panel to be positioned is smaller than the positionable size of the limiting assembly of the robot 200, the wafer panel is placed on the support plate 220 and abuts the third limiting block 233. At this time, there is a gap between the wafer panel and the first limiting block 231 and the second limiting block 232, and the first limiting block 231 and the second limiting block 232 cannot directly position the wafer panel. The positioning piece is placed on the first limiting block 231 and the second limiting block 232. The first positioning rod 111 is correspondingly arranged with the first limiting block 231, and the second positioning rod 112 is correspondingly arranged with the second limiting block 232. The limiting piece 120 on the first positioning rod 111 and the second positioning rod 112 abuts the first limiting block 231 and the second limiting block 232, respectively, to complete the positioning of the limiting piece 100. The gap between the wafer panel and the first limiting block 231 and the second limiting block 232 is filled by the limiting piece 120, the limiting piece 120 abuts the wafer panel, and the positioning of the wafer panel smaller than the positionable size is realized.
[0042] It should be noted that the thickness of the limiting piece 120 can be selected according to the difference between the size of the wafer panel to be positioned and the positionable size of the limiting assembly of the robot 200.
[0043] It can be understood that, referring to Figures 1 to 4 , the connecting part 121 is provided with an elongated hole 124, and the screw 123 is threadedly connected with the limiting piece 120 through the elongated hole 124. When the limiting piece 100 is placed on the first limiting block 231 and the second limiting block 232, the screw 123 is loosened, the position of the limiting piece 120 is adjusted along the elongated hole 124, the limiting piece 120 on the first positioning rod 111 and the second positioning rod 112 abuts the first limiting block 231 and the second limiting block 232, respectively, and then the screw 123 is locked, so as to quickly adjust the position of the limiting piece 120 and realize the quick positioning of the limiting piece 100.
[0044] It can also be understood that, with reference to Figures 1 to 4 Screws 123 are provided at least two, and the screws 123 correspond to the long hole 124 one by one, by setting multiple screws 123, avoid the limit piece 120 when tightening the screw 123 occurs rotation, reduce the deviation, improve the stability of the limit piece 120, thereby improving the positioning accuracy of the limit piece 120.
[0045] The above embodiment of the utility model is explained in detail in combination with the drawings, but the utility model is not limited to the above embodiment, within the knowledge range possessed by the ordinary skilled in the art, various changes can also be made without departing from the purpose of the utility model.
Claims
1. A positioning fixture, characterized by, The application relates to a positioning tooling jig. The positioning tooling jig comprises a limiting piece, a limiting sheet and a mechanical hand base body. The limiting piece comprises a first positioning rod, second positioning rods symmetrically arranged at both ends of the first positioning rod, and a connecting portion and a limiting portion.
2. The positioning fixture of claim 1, wherein The connecting portion is connected with the limiting piece through a screw.
3. The positioning fixture of claim 2, wherein The connecting portion and the limiting portion are integrally formed.
4. The positioning fixture of claim 2, wherein The first positioning rod and the second positioning rod are integrally formed.
5. The positioning fixture of claim 1, wherein The screw is provided with at least two.
6. The positioning fixture of claim 1, wherein The positioning tooling jig comprises the limiting piece, the limiting sheet and the mechanical hand base body.
7. Packaging apparatus, characterized in that The mechanical hand base body is symmetrically provided with two supporting plates.
8. The packaging apparatus of claim 7, wherein, The supporting plates are provided with limiting assemblies.
9. The packaging apparatus of claim 8, wherein, The limiting assemblies are matched with the limiting piece to position the wafer panel.
10. The packaging apparatus of claim 9, wherein, The limiting assemblies comprise a first limiting block, a second limiting block and a third limiting block. The first limiting block and the third limiting block are matched to position the wafer panel along a first direction. The second limiting block positions the wafer panel along a second direction. The positioning piece is arranged on the first limiting block and the second limiting block. The limiting sheet is matched with the first limiting block and the second limiting block.