Image acquisition device and laser processing equipment

Abstract

The utility model discloses an image acquisition device and laser processing equipment. The image acquisition device comprises a mounting assembly, a camera shooting part, a light beam transmission assembly and a light path turning part, the light beam transmission assembly is provided with a light beam transmission channel extending in the first direction, the camera part and the light path turning part are arranged at the two ends of the light beam transmission channel respectively, and the light path turning part is used for refracting light rays incident in the second direction into the light beam transmission channel. The camera shooting part is used for capturing the light transmitted by the light beam transmission channel so as to obtain a target object image, and an included angle is formed between the first direction and the second direction. According to the utility model, the light path is turned through the arrangement of the light path turning part, so that the camera shooting part with a larger volume and related fixing structures do not need to be directly arranged right below the processing platform, the occupation of the space right below the processing platform is reduced, and the probability of interference with structures such as a gas path arranged right below the processing platform is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to wafer processing technical field more specifically, relate to an image acquisition device and laser processing equipment. BACKGROUND

[0002] When laser cutting is carried out on a wafer, according to process requirements, the cutting mode includes tangent and back cutting. Tangent cutting is cutting from the front surface of the wafer using laser energy, while back cutting is cutting from the back surface of the wafer. Regardless of which cutting mode is used, a camera is needed to position the cutting path so that subsequent accurate cutting can be carried out along this path.

[0003] At present, the wafer to be cut is placed on a processing platform, and most cameras directly aim the lens at the wafer surface for shooting. That is, for tangent operation, the camera needs to be installed directly above the processing platform; while for back cutting operation, the camera needs to be installed directly below the processing platform. However, for the latter, the space below the processing platform is limited due to the arrangement of air path structure, light source and other components, which brings inconvenience to the installation of the camera.

[0004] Therefore, how to arrange the image acquisition device in the limited space below the processing platform has become a technical problem to be solved by those skilled in the art. UTILITY MODEL CONTENTS

[0005] Therefore, the purpose of the utility model is to provide an image acquisition device to arrange the image acquisition device in the limited space below the processing platform.

[0006] Another purpose of the utility model is to provide a laser processing equipment comprising the above-mentioned image acquisition device.

[0007] To achieve the above-mentioned purpose, the utility model provides the following technical scheme:

[0008] An image acquisition device comprises a mounting assembly, a camera component, a light beam transmission assembly and a light path turning component.

[0009] The camera component, the light beam transmission assembly and the light path turning component are all arranged on the mounting assembly, and the light beam transmission assembly has a light beam transmission channel extending in a first direction, the camera component and the light path turning component are arranged at both ends of the light beam transmission channel respectively, the light path turning component is used to refract light rays incident in a second direction into the light beam transmission channel, the camera component is used to capture the light rays transmitted by the light beam transmission channel to realize the acquisition of the image of the target object, and the first direction and the second direction have an included angle.

[0010] Optionally, in the image acquisition device, the mounting assembly comprises a mounting platform and a mounting plate, the mounting plate is arranged on the mounting platform through an adjusting mechanism, the adjusting mechanism is used for adjusting the mounting position and / or mounting angle of the mounting plate on the mounting platform, and the image capturing component, the light beam transmission assembly and the light path turning component are arranged on the mounting plate.

[0011] Optionally, in the image acquisition device, the adjusting mechanism comprises a horizontal adjusting assembly, the horizontal adjusting assembly comprises:

[0012] a first horizontal adjusting block arranged on the mounting platform and opposite to a first side wall of the mounting plate, and provided with a first threaded hole, an axial direction of the first threaded hole being parallel to a plate surface of the mounting plate;

[0013] a second horizontal adjusting block arranged on the mounting platform and opposite to a second side wall of the mounting plate, and provided with a second threaded hole, an axial direction of the second threaded hole being parallel to the plate surface of the mounting plate, the first side wall and the second side wall being opposite side walls of the mounting plate;

[0014] a first adjusting screw threadedly matched with the first threaded hole and abutting against the first side wall;

[0015] a second adjusting screw threadedly matched with the second threaded hole and abutting against the second side wall.

[0016] Optionally, in the image acquisition device, the adjusting mechanism comprises a horizontal adjusting table, the horizontal adjusting table is arranged between the mounting platform and the mounting plate.

[0017] Optionally, in the image acquisition device, the light beam transmission assembly comprises:

[0018] a lens barrel extending along the first direction, one end of the lens barrel being connected with the image capturing component, and the lens barrel being slidably arranged on the mounting plate;

[0019] a sleeve extending along the first direction and connected with the mounting plate, one end of the sleeve being opposite to the lens barrel and forming the light beam transmission channel together with the lens barrel, and the other end of the sleeve being connected with the light path turning component.

[0020] Optionally, in the image acquisition device, a focusing gap is formed between the lens barrel and the sleeve, and the mounting assembly further comprises:

[0021] an extension plate arranged on the mounting plate and extending along the first direction, the sleeve being connected with the extension plate;

[0022] A locking assembly is arranged on the extension plate and has a sliding hole, and the lens barrel is slidably arranged in the sliding hole.

[0023] Optionally, the image acquisition device further comprises a focusing mechanism, and the focusing mechanism comprises:

[0024] A fixing member is connected with the image capturing component and has a waist-shaped hole extending along the first direction, and the extension plate has a third threaded hole;

[0025] A focusing screw is arranged through the waist-shaped hole and threadedly connected with the third threaded hole.

[0026] Optionally, the image acquisition device further comprises a positioning step arranged on the extension plate, and the fixing member is arranged to abut against the positioning step to limit the minimum value of the focusing gap.

[0027] Optionally, the mounting platform is made of marble.

[0028] Optionally, the first direction is perpendicular to the second direction.

[0029] A laser processing device comprises a processing platform, a light source assembly and the image acquisition device.

[0030] The material to be processed is arranged on a processing surface of the processing platform, and the material to be processed is a target object.

[0031] The light source assembly is arranged below the processing platform and faces the processing surface.

[0032] The first direction is parallel to the processing surface, the second direction is perpendicular to the processing surface, and the light path turning component is arranged opposite to the processing surface along the second direction.

[0033] The image acquisition device comprises a mounting assembly, an image capturing component, a light beam transmission assembly and a light path turning component.

[0034] Compared with the prior art, the image acquisition device provided by the utility model makes the light path turn through the setting of the light path turning component, so that only the light path turning component with small volume can be arranged at the position towards the machining platform, and the camera component with large volume and its related fixing structure do not need to be directly arranged right below the machining platform, the space right below the machining platform is reduced, and the interference probability with the gas path structure arranged right below the machining platform is reduced.

[0035] The laser machining equipment provided by the utility model comprises a machining platform, a light source assembly and the image acquisition device, the material to be machined is taken as a target object and is arranged on the machining surface of the machining platform, the light source assembly is arranged below the machining platform and faces the machining surface, the first direction is parallel to the plane extension direction of the machining platform, the second direction is perpendicular to the plane extension direction of the machining surface, and the light path turning component is arranged opposite to the machining surface along the second direction. BRIEF DESCRIPTION OF DRAWINGS

[0036] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced as follows. Obviously, the drawings in the following description are only some embodiments of the utility model, and other drawings can be obtained by those skilled in the art without creative labor on the basis of the drawings.

[0037] Figure 1 The structural schematic diagram of the image acquisition device disclosed by the embodiment of the utility model is shown in the figure.

[0038] Figure 2 The exploded view of the image acquisition device disclosed by the embodiment of the utility model is shown in the figure.

[0039] Figure 3 The first adjustment structure schematic diagram of the mounting plate disclosed by the embodiment of the utility model is shown in the figure.

[0040] Figure 4 The structural schematic diagram of the first horizontal adjusting block disclosed by the embodiment of the utility model is shown in the figure.

[0041] Figure 5 The second adjustment structure schematic diagram of the mounting plate disclosed by the embodiment of the utility model is shown in the figure.

[0042] Figure 6 The structural schematic diagram of the fixing part disclosed by the embodiment of the utility model is shown in the figure.

[0043] Figure 7 The structural schematic diagram of the laser machining equipment disclosed by the embodiment of the utility model is shown in the figure.Figure 1 ;

[0044] Figure 8 Structure diagram of the laser processing equipment Figure 2 ;

[0045] Figure 9 For Figure 8 Cross-sectional view at A-A in the middle.

[0046] Wherein, 100 is the installation platform, 110 is the mounting plate, 120 is the extension plate, 121 is the third threaded hole, 122 is the reinforcing block, 130 is the locking assembly, 140 is the fixing piece, 141 is the waist type hole, 150 is the horizontal adjustment table;

[0047] 200 is the camera component;

[0048] 300 is the lens barrel, 310 is the sleeve, 311 is the sleeve fixing block;

[0049] 400 is the light path turning part;

[0050] 500 is the first horizontal adjustment block, 501 is the first adjustment screw, 502 is the first threaded hole, 503 is the connecting hole, 510 is the second horizontal adjustment block, 511 is the second adjustment screw;

[0051] 600 is the light source assembly;

[0052] 700 is the processing platform. DETAILED DESCRIPTION

[0053] The core of the utility model lies in disclosing an image acquisition device to realize the arrangement of the image acquisition device in the limited space directly below the processing platform.

[0054] Another core of the utility model lies in disclosing a laser processing equipment comprising the above-mentioned image acquisition device.

[0055] Hereinafter, the embodiments will be described with reference to the drawings. In addition, the embodiments shown below do not have any limiting effect on the utility model content recited in the claims. In addition, the entire content of the constitution represented in the following embodiments is not limited to the solution necessary as the utility model recited in the claims. It should be noted that, for the convenience of description, only the parts related to the utility model are shown in the drawings. In the case of no conflict, the embodiments in the utility model and the features in the embodiments can be combined with each other.

[0056] In combination with Figures 1-9The utility model discloses an image acquisition device includes installation component, camera component 200, light beam transmission component and light path turning part 400, camera component 200, light beam transmission component and light path turning part 400 all are set up on installation component, and light beam transmission component has the light beam transmission channel of extending along the first direction, and camera component 200 and light path turning part 400 are set up respectively at both ends of light beam transmission channel, and light path turning part 400 is used to refract the light of incidence along the second direction to the light beam transmission channel, and camera component 200 is used to capture the light transmission by light beam transmission channel to realize the acquisition of target object (for example wafer) image, and the first direction and the second direction have the angle of inclusion.

[0057] Exemplarily, the angle between the first direction and the second direction can be 90°, that is, in combination with Figure 1 And Figure 8 The first direction is parallel to the Y direction, and the second direction is parallel to the Z direction, so as to realize the conversion of the field of view of the camera component 200 from the direction parallel to the processing platform 700 to the direction perpendicular to the processing platform 700 to perform image acquisition on the target object. The light path turning part 400 can be a prism, a mirror or the like capable of changing the direction of the light path; and the camera component 200 can be a CCD camera (Charge-Coupled Device) or other image sensor.

[0058] Compared with the prior art, the utility model discloses the setting of the light path turning part 400 to turn the light path, so that only the light path turning part 400 with small volume can be arranged at the position facing the processing platform 700, and the camera component 200 with large volume and its related fixing structure do not need to be directly arranged below the processing platform 700, thereby reducing the occupation of the space below the processing platform 700 and reducing the interference probability with the gas path structure arranged below the processing platform 700.

[0059] Specifically, the installation component includes an installation platform 100 and an installation plate 110, the installation plate 110 is arranged on the installation platform 100 through an adjusting mechanism, the camera component 200, the light beam transmission component and the light path turning part 400 are arranged on the installation plate 110, and the installation angle and / or the installation position of the installation plate 110 on the installation platform 100 can be adjusted through the adjusting mechanism, so as to realize the pose adjustment of the camera component 200, the light beam transmission component and the light path turning part 400.

[0060] In a specific embodiment of the utility model, in combination with Figure 2 And Figure 3The adjusting mechanism comprises a horizontal adjusting assembly, the horizontal adjusting assembly comprises a first horizontal adjusting block 500, a second horizontal adjusting block 510, a first adjusting screw 501 and a second adjusting screw 511, the first horizontal adjusting block 500 is arranged on the mounting platform 100 and opposite to the first side wall of the mounting plate 110, and a first threaded hole 502 is arranged on the first horizontal adjusting block 500, the axial direction of the first threaded hole 502 is parallel to the surface of the mounting plate 110; the second horizontal adjusting block 510 is arranged on the mounting platform 100 and opposite to the second side wall of the mounting plate 110, and a second threaded hole is arranged on the second horizontal adjusting block 510, the axial direction of the second threaded hole is parallel to the surface of the mounting plate 110, the first side wall and the second side wall are opposite side walls of the mounting plate 110; the first adjusting screw 501 is threadedly connected with the first threaded hole 502 and abuts against the first side wall; the second adjusting screw 511 is threadedly connected with the second threaded hole and abuts against the second side wall.

[0061] By adjusting the screwing depth of the first adjusting screw 501 and the second adjusting screw 511 in the first threaded hole 502 and the second threaded hole respectively, the horizontal placement angle of the mounting plate 110 on the mounting platform 100 can be adjusted, and then the pose adjustment of the camera component 200, the light beam transmission assembly and the light path turning component 400 can be performed.

[0062] In combination with Figure 3 and Figure 4 , the two ends of the first horizontal adjusting block 500 are of different thicknesses, one end of the thicker one is provided with a connecting hole 503 and is used for being bolted with the side wall of the mounting platform 100, and the other end of the thinner one is provided with the first threaded hole 502, the thickness difference between the two ends of the first horizontal adjusting block 500 forms a stepped structure, so as to provide a visible space for the end of the first adjusting screw 501 abutting against the mounting plate 110, and the adjustment is facilitated. The second horizontal adjusting block 510 is the same as the first horizontal adjusting block 500 in structure, and details are not described herein.

[0063] In an embodiment, in combination with Figure 5 , the adjusting mechanism comprises a horizontal adjusting table 150, the horizontal adjusting table 150 is arranged between the mounting platform 100 and the mounting plate 110, and the horizontal adjusting table 150 can adjust the placement angle of the mounting plate 110 on the mounting platform 100 along the direction shown by the arrow in Figure 5 , so as to realize the adjustment of the placement angle of the light path turning component 400. The specific structure and operation principle of the horizontal adjusting table 150 are both prior art, and details are not described herein.

[0064] The light beam transmission assembly is used for light transmission and realizes the misalignment of the camera component 200 relative to the machining platform 700, and comprises a lens barrel 300 and a sleeve 310, the lens barrel 300 extends along the first direction, and one end of the lens barrel 300 is connected with the camera component 200 and is slidably arranged on the mounting plate 110; the sleeve 310 extends along the first direction and is connected with the mounting plate 110, and one end of the sleeve 310 is opposite to the lens barrel 300 and forms a light beam transmission channel with the lens barrel 300, and the other end of the sleeve 310 is connected with the light path turning component 400. The light passes through the sleeve 310 and the lens barrel 300 in sequence after being refracted by the light path turning component 400, and finally enters the camera component 200.

[0065] In combination Figure 2 Since the optical path of the camera component 200 is a fixed value, in order to facilitate focusing, the lens barrel 300 and the sleeve 310 have a focusing gap therebetween, the mounting assembly further comprises an extension plate 120 and a locking assembly 130, the extension plate 120 is arranged on the mounting plate 110 and extends along the first direction, and the sleeve 310 is connected with the extension plate 120; the locking assembly 130 is arranged on the extension plate 120 and is provided with a sliding hole, and the lens barrel 300 is slidably arranged in the sliding hole. The position of the lens barrel 300 is adjusted by sliding, so that the size of the focusing gap between the lens barrel 300 and the sleeve 310 is adjusted, and then focusing is realized, so that stable and clear imaging can be ensured.

[0066] In combination Figure 1 And Figure 2 The locking assembly 130 is arranged in two groups along the first direction, and each group of the locking assembly 130 is formed by two locking blocks. The two sides of the extension plate 120 are reliably fixed with the mounting plate 110 through a plurality of reinforcing blocks 122. The sleeve 310 is reliably fixed with the extension plate 120 through a sleeve fixing block 311.

[0067] In an embodiment, the image acquisition device further comprises a focusing mechanism, in combination Figure 2 The focusing mechanism comprises a fixing member 140 and a focusing screw (not shown in the figure), the fixing member 140 is connected with the camera component 200 and is provided with a waist-shaped hole 141 extending along the first direction, the extension plate 120 is provided with a third threaded hole 121, and the number of the third threaded hole 121 is one or more; the focusing screw passes through the waist-shaped hole 141 and is threadedly connected with the third threaded hole 121, and by adjusting the position of the waist-shaped hole 141 relative to the third threaded hole 121, the camera component 200 drives the lens barrel 300 to slide along the first direction, and then focusing is realized.

[0068] In combination Figure 2The positioning step is arranged on the extension plate 120, and the fixing member 140 is used to abut against the positioning step to limit the limit position of the fixing member 140 during focusing, so that the lens barrel 300 and the sleeve 310 are prevented from colliding due to direct contact, that is, the minimum value of the focusing gap is limited.

[0069] The mounting platform 100 is made of marble material, and the marble material has stable performance, a small thermal expansion coefficient and a small influence of heat emitted by the light source at the bottom of the machining platform 700, so that the stability of imaging can be ensured.

[0070] The laser processing equipment disclosed by the utility model comprises a machining platform 700, a light source assembly 600 and the image acquisition device, the material to be processed is arranged on the machining surface of the machining platform 700, and the material to be processed is the target object; the light source assembly 600 is arranged below the machining platform 700 and faces the machining surface, the first direction is parallel to the plane extension direction of the machining platform 700, the second direction is perpendicular to the plane extension direction of the machining surface, and the light path turning part 400 is arranged opposite to the machining surface along the second direction. The horizontal light path of the camera part 200 is converted into the direction perpendicular to the machining platform 700 through the light path turning part 400, and the effect of reducing the space occupation directly below the machining platform 700 can be achieved. Since the image acquisition device is included, the structure and beneficial effects are the same, and other structures refer to the prior art, which will not be repeated here.

[0071] The laser processing equipment disclosed by the utility model can be a laser surface cutting machine.

[0072] The terms "first" and "second" in the specification and claims of the utility model are used to distinguish different objects, not to describe a specific order, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Therefore, the features limited by "first" and "second" can explicitly or implicitly include one or more features. In addition, the terms "include" and "have" and any variations thereof are intended to cover non-exclusive inclusion.

[0073] The above description of the disclosed embodiments enables a person skilled in the art to implement or use the utility model. Various modifications of these embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the utility model. The specific technical means in some embodiments can be partially or wholly combined into another embodiment without being explicitly excluded by another embodiment. Therefore, the utility model will not be limited to these embodiments shown in the text, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An image acquisition device, characterized in that, The installation assembly, the camera component (200), the light beam transmission assembly and the light path turning component (400) are arranged on the installation assembly, the light beam transmission assembly has a light beam transmission channel extending along a first direction, the camera component (200) and the light path turning component (400) are arranged at two ends of the light beam transmission channel respectively, the light path turning component (400) is used for refracting light rays incident along a second direction into the light beam transmission channel, the camera component (200) is used for capturing the light rays transmitted by the light beam transmission channel to realize acquisition of an image of a target object, and the first direction and the second direction have an included angle. The installation assembly comprises an installation platform (100) and an installation plate (110), the installation plate (110) is arranged on the installation platform (100) through an adjusting mechanism, the adjusting mechanism is used for adjusting an installation position and / or an installation angle of the installation plate (110) on the installation platform (100), and the camera component (200), the light beam transmission assembly and the light path turning component (400) are arranged on the installation plate (110).

2. The image acquisition apparatus of claim 1, wherein The adjusting mechanism comprises a horizontal adjusting assembly, and the horizontal adjusting assembly comprises:

3. The image acquisition apparatus of claim 2, wherein A first horizontal adjusting block (500) is arranged on the installation platform (100) and opposite to a first side wall of the installation plate (110), and a first threaded hole (502) is formed in the first horizontal adjusting block (500), and an axial direction of the first threaded hole (502) is parallel to a plate surface of the installation plate (110); A second horizontal adjusting block (510) is arranged on the installation platform (100) and opposite to a second side wall of the installation plate (110), and a second threaded hole is formed in the second horizontal adjusting block (510), and an axial direction of the second threaded hole is parallel to the plate surface of the installation plate (110), and the first side wall and the second side wall are opposite side walls of the installation plate (110); A first adjusting screw (501) is threadedly connected with the first threaded hole (502) and abuts against the first side wall; A second adjusting screw (511) is threadedly connected with the second threaded hole and abuts against the second side wall. The adjusting mechanism comprises a horizontal adjusting table (150), and the horizontal adjusting table (150) is arranged between the installation platform (100) and the installation plate (110).

4. The image acquisition apparatus of claim 2, wherein The light beam transmission assembly comprises:

5. The image acquisition apparatus of claim 2, wherein A lens barrel (300) extends along the first direction, one end of the lens barrel (300) is connected with the camera component (200), and the lens barrel (300) is slidably arranged on the installation plate (110); A sleeve (310) extends along the first direction and is connected with the installation plate (110), one end of the sleeve (310) is opposite to the lens barrel (300) and forms the light beam transmission channel together with the lens barrel (300), and the other end of the sleeve (310) is connected with the light path turning component (400). ​ 6. The image acquisition apparatus of claim 5, wherein The lens barrel (300) and the sleeve (310) have a focusing gap therebetween, and the mounting assembly further comprises: an extension plate (120) disposed on the mounting plate (110) and extending along the first direction, the sleeve (310) being connected with the extension plate (120); a locking assembly (130) disposed on the extension plate (120) and having a sliding hole, the lens barrel (300) being slidably arranged in the sliding hole.

7. The image acquisition apparatus of claim 6, wherein Further comprising a focusing mechanism, the focusing mechanism comprising: a fixing member (140) connected with the image capturing component (200) and having a waist-shaped hole (141) extending along the first direction, the extension plate (120) having a third threaded hole (121) formed therein; a focusing screw threadedly engaged with the third threaded hole (121) and passing through the waist-shaped hole (141).

8. The image acquisition apparatus of claim 7, wherein The extension plate (120) is provided with a positioning step, and the fixing member (140) is used to abut against the positioning step to limit a minimum value of the focusing gap.

9. The image acquisition apparatus of claim 2, wherein The mounting platform (100) is made of marble material.

10. The image acquisition apparatus of any one of claims 1-9, wherein, The first direction and the second direction are perpendicular.

11. A laser processing apparatus characterized by comprising: The image acquisition device as claimed in any one of claims 1-10, comprising a processing platform (700), a light source assembly (600), and the image acquisition device; a material to be processed is arranged on a processing surface of the processing platform (700), and the material to be processed is the target object; the light source assembly (600) is arranged below the processing platform (700) and faces the processing surface; the first direction is parallel to the processing surface, the second direction is perpendicular to the processing surface, and the light path turning component (400) is arranged opposite to the processing surface along the second direction.

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