Double-layer spraying plate structure

Abstract

The utility model discloses a double-layer spraying plate structure which comprises an upper spraying plate, a lower spraying plate and a sealing structure, and the upper spraying plate is detachably connected with the lower spraying plate. And a sealing structure is connected between the upper spraying plate and the lower spraying plate. By means of the structure, the problems of planeness deformation of the spraying plate, inaccuracy of small hole roundness and hole diameter and the like caused by a traditional welding technology can be solved, and meanwhile long-time machining cycle and high machining cost caused by welding are avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to thin film deposition technical field especially relates to a double -deck shower plate structure. BACKGROUND

[0002] In the prior art, the atomic layer deposition equipment in semiconductor process usually adopts double -deck shower plate design to ensure that two different reaction gases enter the shower device according to predetermined proportion, and after gas, mixing and spraying to wafer surface again.This design improves the distribution efficiency of reaction gas to a certain extent, but there are some technical problems, the upper and lower two layers of double -deck shower plate usually are sealed by EB welding or brazing etc..Although the sealing effect is good after welding, but in the high-temperature welding process, the planeness and aperture of the shower plate are prone to deformation.This deformation will affect the structure precision of the shower plate, thereby negatively affecting the stability of process and gas distribution uniformity, and further affecting the quality and stability of atomic layer deposition process.The welding process usually needs a long time, which not only increases the production cycle, but also is limited by structure.When the distance between the two welding columns is close, the stability of welding is more difficult to guarantee, and the stress generated in the welding process may be too large, further intensifying the deformation of the plate.In addition, defects that may occur in the welding process, such as pores, cracks, etc., will also affect the sealing and reliability of the device.The double -deck shower plate manufactured by welding method often leaves particles or other contaminants between the two layers during the welding process and the use process.These particles may be difficult to completely remove by conventional cleaning methods, causing the interlayer position to become a potential source of pollution.The presence of particles may cause unnecessary deposition during atomic layer deposition, affecting the quality of thin film, and even interfering with the subsequent process.Due to the deformation and interlayer pollution problems in the welding process, the double -deck shower plate needs to be frequently disassembled and cleaned.Each time disassembling and cleaning will increase the maintenance difficulty of the equipment, and may cause damage or wear of the equipment.Therefore, the maintenance of the shower plate is cumbersome and time -consuming, which brings inconvenience to production and operation, and further affects the overall production efficiency and long -term stability of the equipment.

[0003] Therefore, it is necessary to design a new structure to avoid the problems of shower plate flatness deformation, small hole roundness and inaccurate aperture caused by traditional welding process, and at the same time avoid the long processing cycle and high processing cost brought by welding. UTILITY MODEL CONTENTS

[0004] The utility model aims at overcoming the defects of prior art, provides a double -deck shower plate structure.

[0005] The utility model discloses a double -deck spray plate structure, including: spray upper plate, spray lower plate and sealing structure, spray upper plate with spray lower plate detachable connection, the sealing structure is connected between spray upper plate with spray lower plate.

[0006] Further technical solutions are as follows: the sealing structure includes a groove and a protrusion, the spray upper plate is provided with a plurality of grooves, the groove is provided with a first gas channel, the spray lower plate is provided with a plurality of protrusions, the protrusion is provided with a second gas channel, and the protrusion is embedded in the groove.

[0007] Further technical solutions are as follows: the outer wall of the protrusion is inclined from top to bottom and inclined towards the spray lower plate.

[0008] Further technical solutions are as follows: the inclination angle of the outer wall of the protrusion is 5 to 10 degrees.

[0009] Further technical solutions are as follows: the sealing structure further includes a sealing ring, the end face of the spray upper plate close to the spray lower plate is recessed in the direction away from the spray lower plate, forming a mounting groove, and the sealing ring is placed in the mounting groove.

[0010] Further technical solutions are as follows: the mounting groove is located at the outer periphery of the groove.

[0011] Further technical solutions are as follows: the sealing structure further includes a contact block, the contact block is arranged on the end face of the spray lower plate close to the spray upper plate, and the protrusion is located above the contact block.

[0012] Further technical solutions are as follows: the end face of the spray upper plate close to the spray lower plate abuts against the upper end face of the contact block.

[0013] Further technical solutions are as follows: further including a detachable structure, and the spray upper plate and the spray lower plate are connected through the detachable structure.

[0014] Further technical solutions are as follows: the detachable structure includes a fastener, a first mounting hole arranged on the spray upper plate, and a second mounting hole arranged on the spray lower plate, and the fastener is assembled in the first mounting hole and the second mounting hole.

[0015] The utility model discloses a beneficial effect compared with prior art is: the utility model discloses a plurality of sealed sealing structures are arranged between the upper spray plate and the lower spray plate, avoid the problem such as spray plate flatness deformation, small hole roundness and inaccuracy of aperture caused by traditional welding process, and long processing cycle and high processing cost caused by welding are avoided at the same time, and the connection mode of the upper spray plate and the lower spray plate is detachable connection mode, so that the cleaning effect of the middle interlayer area of the spray plate is optimized, thereby prolonging the service life of the spray plate.

[0016] The utility model will be further described below in combination with the drawings and specific embodiments. DRAWINGS

[0017] In order to more clearly illustrate the technical scheme of the embodiment of the utility model, the drawings needed to be used in the embodiment description will be briefly introduced below, and obviously, the drawings in the following description are some embodiments of the utility model, and for those skilled in the art, other drawings can also be obtained according to these drawings without creative labor.

[0018] Figure 1 The utility model provides a kind of double-layer spray plate structure's three-dimensional structure schematic diagram for embodiment of the utility model;

[0019] Figure 2 The utility model provides a kind of double-layer spray plate structure's sectional structure schematic diagram for embodiment of the utility model;

[0020] Figure 3 The utility model provides the three-dimensional structure schematic diagram of upper spray plate for embodiment of the utility model;

[0021] Figure 4 For Figure 3 The local structure enlarged schematic diagram of A of

[0022] Figure 5 The structure schematic diagram of lower spray plate for embodiment of the utility model is provided;

[0023] Identification in drawing:

[0024] 10, upper spray plate;11, recess;12, first gas passage;13, installation groove;20, lower spray plate;21, lug;22, second gas passage;30, sealing ring;40, contact block;50, fastener. DETAILED DESCRIPTION

[0025] With reference to the drawings of the embodiments of the present application, the technical solutions in the embodiments of the present application will be clearly and completely described, obviously, the described embodiments are some of the embodiments of the present application, rather than all the embodiments. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0026] It should be understood that the terms "comprising" and "including" as used in the specification and the appended claims indicate the presence of the described features, integers, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups thereof.

[0027] It should also be understood that the terms used in the present application specification are only for the purpose of describing specific embodiments and are not intended to limit the present application. As used in the present application specification and the appended claims, "a", "an", and "the" in singular form are intended to include plural forms unless the context clearly indicates otherwise.

[0028] It should be further understood that the term "and / or" as used in the present application specification and the appended claims means any combination of one or more of the associated listed items and all possible combinations, and includes these combinations.

[0029] In existing semiconductor processes, the double-layer spray plate design improves the reaction gas distribution efficiency, but the welding process can easily cause the spray plate plane and the hole diameter to deform, affecting the process stability and gas distribution uniformity. The stress and defects that may be generated during the welding process can further reduce the sealing and reliability of the device. The particles or contaminants that may be left over during the welding process are difficult to remove and become potential sources of contamination, affecting the quality of the thin film. The double-layer spray plate needs to be frequently disassembled and cleaned, increasing the difficulty of equipment maintenance and may cause equipment damage or wear. Overall, the spray plate manufactured by welding method brings additional maintenance burden in use, affecting the production efficiency and equipment stability.

[0030] Therefore, the embodiments of the present application provide a double-layer spray plate structure, which can avoid the problems of spray plate flatness deformation, small hole roundness and inaccurate hole diameter caused by traditional welding process, and at the same time avoid the long processing cycle and high processing cost caused by welding.

[0031] Specifically, the spray upper plate 10 and the spray lower plate 20 of the double-layer spray plate structure are matched with each other through the grooves 11 and the protrusions 21, avoiding the planeness deformation and the inaccuracy of the hole diameter that may be caused in the welding process. The side wall of the protrusion 21 of the spray lower plate 20 is designed with an inclined surface, so that the spray upper plate 10 realizes self-docking sealing through the gravity, avoiding the geometric deformation caused by welding. The spray upper plate 10 and the spray lower plate 20 are matched through the sealing ring 30, ensuring the second sealing and reducing the leakage problem caused by poor welding. The spray upper plate 10 and the spray lower plate 20 are connected through the detachable structure such as the bolt, without the need of welding, avoiding the long-time processing and high cost in the welding process. The detachable design makes the middle sandwiched area of the structure easy to clean, eliminating the dead angle that is difficult to clean in the welding process, prolonging the service life of the spray plate. The bolt connection design reduces the thermal deformation caused by temperature change in the welding process. Through the precise matching and the detachable structure, the dependence on high-precision welding is reduced, the processing cost is saved, the long period and the complex process caused by the welding process are avoided, and the overall production efficiency is improved.

[0032] In order to better understand the above technical solutions, the above technical solutions will be described in detail in combination with the drawings of the specification and the specific embodiments.

[0033] Please refer to Figures 1 to 2 The double-layer spray plate structure comprises a spray upper plate 10, a spray lower plate 20 and a sealing structure, and the spray upper plate 10 and the spray lower plate 20 are detachably connected.

[0034] In this embodiment, the sealing structure with multiple layers of sealing is arranged between the spray upper plate 10 and the spray lower plate 20, which can effectively avoid the problems such as the planeness deformation of the spray plate, the small hole roundness and the inaccuracy of the hole diameter caused by the traditional welding process, and at the same time, the long processing period and the high processing cost caused by welding are avoided.

[0035] In an embodiment, please refer to Figures 2 to 5 The sealing structure comprises grooves 11 and protrusions 21, the spray upper plate 10 is provided with a plurality of grooves 11, the groove 11 is provided with a first gas passage 12, the spray lower plate 20 is provided with a plurality of protrusions 21, the protrusion 21 is provided with a second gas passage 22, and the protrusion 21 is embedded in the groove 11.

[0036] In this embodiment, the grooves 11 are located inside the spray upper plate 10 and are designed as a plurality of grooves, and each groove 11 is provided with a first gas passage 12. These grooves 11 not only serve as part of the gas flow path, but also are used to accommodate the protrusions 21 from the spray lower plate 20, forming a close fitting relationship.

[0037] The protrusions 21 are arranged on the lower shower plate 20, and each of the protrusions 21 contains a second gas passage 22. The protrusions 21 not only precisely match the recesses 11 in the upper shower plate 10, but also have the second gas passages 22 inside them connected to the first gas passages 12 in the recesses 11, so that the gas can smoothly pass through the entire shower plate.

[0038] In an embodiment, referring to Figure 5 The outer wall of the protrusion 21 is inclined from top to bottom and inclined towards the lower shower plate 20.

[0039] In an embodiment, referring to Figure 5 The inclination angle of the outer wall of the protrusion 21 is 5 to 10 degrees.

[0040] In this embodiment, the outer wall of the protrusion 21 has a certain angle of inclination from top to bottom, and the inclination angle is 5 to 10 degrees, so that the protrusion 21 can be more tightly embedded in the recess 11. When the upper shower plate 10 and the lower shower plate 20 are assembled, the inclined surface helps to guide the protrusion 21 to the correct position, and increases the contact area and improves the sealing performance. Of course, the recess 11 is matched with the shape of the protrusion 21, so the inner side wall of the recess 11 is also inclined.

[0041] In an embodiment, referring to Figures 2 to 3 The sealing structure further comprises a sealing ring 30, and the end face of the upper shower plate 10 close to the lower shower plate 20 is recessed away from the lower shower plate 20 to form a mounting groove 13, and the sealing ring 30 is arranged in the mounting groove 13.

[0042] In an embodiment, referring to Figure 3 And Figure 4 The mounting groove 13 is located on the outer periphery of the recess 11.

[0043] In this embodiment, in order to further strengthen the sealing effect, a mounting groove 13 is arranged on the side of the upper shower plate 10 close to the lower shower plate 20, and the mounting groove 13 is located on the outer periphery of the recess 11. The sealing ring 30 is arranged in the mounting groove 13, and when the upper shower plate 10 and the lower shower plate 20 are combined, the sealing ring 30 is compressed and deformed to fill the small gap between them, thereby achieving excellent air tightness.

[0044] In an embodiment, referring to Figure 5 The sealing structure further comprises a contact block 40, and the contact block 40 is arranged on the end face of the lower shower plate 20 close to the upper shower plate 10; and the protrusion 21 is located above the contact block 40.

[0045] In an embodiment, referring to Figure 2 The end face of the upper shower plate 10 close to the lower shower plate 20 abuts against the upper end face of the contact block 40.

[0046] In this embodiment, a contact block 40 is provided on the end face of the lower plate 20 close to the upper plate 10, and the protrusion 21 is located above the contact block 40. The upper end face of the contact block 40 directly contacts the upper plate 10, providing a stable support platform and also helping to achieve better sealing effect.

[0047] In this embodiment, the contact surface between the upper plate 10 and the lower plate 20 is processed by machining or grinding to ensure that the roughness reaches Ra 0.4mm, thereby improving the contact effect of the sealing surface and ensuring the sealing reliability. The contact surface here is also the sealing surface, specifically including the surface formed by the direct contact between the upper end face of the contact block 40 and the upper plate 10, and the surface formed by the contact between the protrusion 21 and the groove 11. Moreover, the diameter of the groove 11 of the upper plate 10 can be designed differently according to different process requirements, generally φ0.8mm to φ1.5mm.

[0048] Through the precise cooperation of the groove 11 and the protrusion 21 and the application of multi-layer sealing means, the overall sealing performance and reliability of the double-layer spray plate are significantly improved. Compared with the traditional welding method, this method not only reduces the manufacturing difficulty, but also facilitates the later maintenance and component replacement, adapting to the demand of modern industrial production for efficient and flexible assembly.

[0049] In an embodiment, please refer to Figure 2 The double-layer spray plate structure described above further includes a detachable structure, and the upper plate 10 and the lower plate 20 are connected through the detachable structure.

[0050] In an embodiment, please refer to Figure 2 The detachable structure described above includes a fastener 50, a first mounting hole provided on the upper plate 10, and a second mounting hole provided on the lower plate 20, and the fastener 50 is assembled in the first mounting hole and the second mounting hole.

[0051] In this embodiment, the fastener 50 described above includes but is not limited to a bolt.

[0052] In this embodiment, the upper plate 10 and the lower plate 20 are connected through the detachable structure, specifically through the connection system composed of the fastener 50 such as but not limited to a bolt, the first mounting hole on the upper plate 10, and the second mounting hole on the lower plate 20. This design not only facilitates assembly and disassembly, but also allows adjustment or replacement of components as needed, greatly facilitating the maintenance and upgrading of the equipment. The detachable design optimizes the cleaning effect of the middle interlayer area of the spray plate, thereby prolonging the service life of the spray plate.

[0053] In the double-layer spray plate structure of the embodiment, first, the spray upper plate 10 and the spray lower plate 20 are connected through a sealing structure, avoiding thermal deformation in the welding process. Second, the sealing structure of the groove 11 and the protrusion 21 is adopted, ensuring precise fitting of the structure and reducing errors. Third, the inclined design of the outer wall of the protrusion 21 makes the plate joint more accurate, reducing unevenness in processing. Fourth, through the detachable structure design, the spray plate is convenient to disassemble and assemble, simplifying the process flow. Finally, the overall design avoids long processing cycle and high cost in the welding process, thereby improving production efficiency and reducing manufacturing cost.

[0054] The double-layer spray plate structure avoids the problems of spray plate flatness deformation, small hole roundness and inaccurate hole diameter caused by traditional welding process, and avoids long processing cycle and high processing cost caused by welding. The connection mode of the spray upper plate 10 and the spray lower plate 20 is a detachable connection mode, so that the cleaning effect of the middle layer area of the spray plate is optimized, thereby prolonging the service life of the spray plate.

[0055] The above is only a specific embodiment of the present application, but the protection scope of the present application is not limited thereto. Any skilled person in the art can easily think of various equivalent modifications or replacements within the technical range disclosed by the present application, and these modifications or replacements should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A double-layer spray plate structure, characterized in that, include: The system includes an upper spray plate, a lower spray plate, and a sealing structure, wherein the upper spray plate and the lower spray plate are detachably connected. The sealing structure connects the upper spray plate and the lower spray plate.

2. The double-layer spray plate structure according to claim 1, characterized in that, The sealing structure includes grooves and protrusions. The upper spray plate is provided with a plurality of grooves, and a first gas channel is provided in the grooves. The lower spray plate is provided with a plurality of protrusions, and a second gas channel is provided in the protrusions. The protrusions are embedded in the grooves.

3. The double-layer spray plate structure according to claim 2, characterized in that, The outer wall of the protrusion slopes from top to bottom and towards the lower spray plate.

4. The double-layer spray plate structure according to claim 3, characterized in that, The outer wall of the protrusion is inclined at an angle of 5 to 10 degrees.

5. A double-layer spray plate structure according to claim 2, characterized in that, The sealing structure also includes a sealing ring. The end face of the upper spray plate near the lower spray plate is recessed in the direction away from the lower spray plate to form a mounting groove, and the sealing ring is placed in the mounting groove.

6. A double-layer spray plate structure according to claim 5, characterized in that, The mounting slot is located on the outer periphery of the groove.

7. A double-layer spray plate structure according to any one of claims 2 to 6, characterized in that, The sealing structure also includes a contact block, which is disposed on the end face of the lower spray plate near the upper spray plate; the protrusion is located above the contact block.

8. A double-layer spray plate structure according to claim 7, characterized in that, The end face of the upper spray plate near the lower spray plate abuts against the upper end face of the contact block.

9. A double-layer spray plate structure according to claim 1, characterized in that, It also includes a detachable structure, through which the upper spray plate and the lower spray plate are connected.

10. A double-layer spray plate structure according to claim 9, characterized in that, The detachable structure includes fasteners, a first mounting hole provided on the upper spray plate, and a second mounting hole provided on the lower spray plate. The fasteners are assembled into the first mounting hole and the second mounting hole.

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