Alignment device and detection equipment

Abstract

The utility model discloses an alignment device and detection equipment, and relates to the technical field of semiconductors, and the alignment device comprises a bottom plate, a first lens assembly and a second lens assembly. The bottom plate is used for supporting the first lens assembly and the second lens assembly, and the bottom plate can drive the first lens assembly and the second lens assembly to move; the first lens assembly is fixed on the bottom plate through a first adjusting fixing frame; the second lens assembly is fixed on the bottom plate through a second adjusting fixing frame, the second adjusting fixing frame is provided with a holding piece used for holding the second lens assembly, and the second adjusting fixing frame limits an installation space for containing the second lens assembly. According to the alignment device provided by the invention, the two lens assemblies are adopted, so that the precision of the alignment device is improved. Meanwhile, the bottom plate drives the first lens assembly and the second lens assembly to integrally move, the number of parts can be reduced, gaps between the parts can be increased, heat of the first lens assembly and the second lens assembly can be fully discharged, and the stability of the alignment device is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor technology, and more particularly, to an alignment device and a detection equipment. BACKGROUND

[0002] In the field of semiconductors, the alignment device in the detection equipment plays a crucial role in the semiconductor manufacturing process. Through the alignment device, the position information of the pattern can be captured in real time, and these information can be fed back to the control system, so that the control system can automatically adjust to ensure the accurate performance of the subsequent process steps. The traditional alignment device usually uses an alignment camera to capture images, but its alignment accuracy is low and cannot meet the high-precision requirements of some products.

[0003] Therefore, how to improve the accuracy of the alignment device has become a technical problem to be solved by those skilled in the art. CONTENT OF THE UTILITY MODEL

[0004] Therefore, the purpose of the present application is to provide an alignment device to improve the accuracy of the alignment device.

[0005] Another purpose of the present application is to provide a detection equipment with the above-mentioned alignment device.

[0006] To achieve the above-mentioned purpose, the present application provides the following technical solutions:

[0007] An alignment device, comprising a bottom plate, a first lens assembly and a second lens assembly, wherein:

[0008] The bottom plate is used to support the first lens assembly and the second lens assembly, and the bottom plate can drive the first lens assembly and the second lens assembly to move;

[0009] The first lens assembly is fixed on the bottom plate through a first adjusting fixing frame;

[0010] The second lens assembly is fixed on the bottom plate through a second adjusting fixing frame, and the second adjusting fixing frame is provided with a clamping member for clamping the second lens assembly, and the second adjusting fixing frame limits an installation space for accommodating the first lens assembly.

[0011] Optionally, in the above-mentioned alignment device, the first adjusting fixing frame comprises a fixing block and a first adjusting seat, the first adjusting seat is movably arranged on the bottom plate, and the first adjusting seat is connected with the first lens assembly, the fixing block is installed on the bottom plate, and the fixing block is provided with a first adjusting bolt, the first adjusting bolt is used to abut against the first adjusting seat to adjust the position of the first adjusting seat.

[0012] Optionally, in the alignment device, at least one of the first adjusting seat and the bottom plate is provided with a first adjusting waist hole, and the other is provided with a first mounting hole, the first adjusting waist hole is matched with the first mounting hole, so that the first adjusting seat and the bottom plate are locked by a fastener.

[0013] Optionally, in the alignment device, at least one of the first adjusting seat and the bottom plate is further provided with a first positioning waist hole, and the other is provided with a first positioning pin, the first positioning pin is matched with the first positioning waist hole, and the mounting position of the first adjusting seat and the bottom plate is positioned.

[0014] Optionally, in the alignment device, the first adjusting screw is screwed into the first threaded hole.

[0015] Optionally, in the alignment device, the first threaded hole is a counterbore, and a first adjusting nut is arranged in the counterbore and screwed with the first adjusting screw; or,

[0016] The inner wall of the first threaded hole is provided with a first internal thread part matched with the first adjusting screw.

[0017] Optionally, in the alignment device, the second adjusting fixing frame includes a fixed seat and a second adjusting seat, the clamping member is connected with the second adjusting seat, the second adjusting seat is movably arranged on the fixed seat, the fixed seat is mounted on the bottom plate, and the fixed seat is provided with a second adjusting screw, the second adjusting screw is used for abutting with the second adjusting seat to adjust the position of the second adjusting seat.

[0018] Optionally, in the alignment device, the fixed seat includes a connecting portion and a mounting portion arranged perpendicularly with the connecting portion, the mounting portion is used for mounting on the bottom plate, at least one of the connecting portion and the second adjusting seat is provided with a second adjusting waist hole, and the other is provided with a second mounting hole, the second adjusting waist hole is matched with the second mounting hole, so that the second adjusting seat and the connecting portion are locked by a fastener.

[0019] Optionally, in the alignment device, at least one of the second adjusting seat and the connecting portion is further provided with a second positioning waist hole, and the other is provided with a second positioning pin, the second positioning pin is matched with the second positioning waist hole, and the mounting position of the second adjusting seat and the connecting portion is positioned.

[0020] Optionally, in the alignment device, the connecting portion of the fixed seat is provided with a bolt seat mounting the second adjusting screw, the bolt seat has a protruding portion extending towards the second adjusting seat side, and the protruding portion is provided with a second threaded hole matched with the second adjusting screw.

[0021] Optionally, in the alignment device, a second adjusting nut is arranged on one side of the convex part close to the second adjusting seat and threadedly matched with the second adjusting bolt.

[0022] A second internal thread part is arranged on the inner wall of the second through hole and threadedly matched with the second adjusting bolt.

[0023] Optionally, in the alignment device, the mounting space is formed between the connecting part and the mounting part, and an arc-shaped part is arranged on the connecting part and attached to the first lens assembly.

[0024] Optionally, in the alignment device, the holding part comprises a ring-shaped clamp and a sleeve arranged outside the second lens assembly, the ring-shaped clamp comprises two, and the two ring-shaped clamps are locked by a fastener to clamp the second lens assembly between the two ring-shaped clamps.

[0025] Optionally, in the alignment device, the first lens assembly comprises a first lens, a first camera, a first point light source and an objective lens, the first camera is arranged at the upper end of the first lens, the objective lens is arranged at the lower end of the first lens, and the first point light source is arranged on the first lens.

[0026] Optionally, in the alignment device, the second lens assembly comprises a second lens, a second camera and a second point light source, the second camera is arranged at the upper end of the second lens, and the second point light source is arranged on the second lens.

[0027] The detection device comprises the alignment device according to any one of the above.

[0028] The alignment device provided by the present application can fix the first lens assembly on the bottom plate through the first adjusting fixing frame and fix the second lens assembly on the bottom plate through the second adjusting fixing frame. Meanwhile, the holding part that can hold the second lens assembly is arranged on the second adjusting fixing frame, and the mounting space that can accommodate the first lens assembly is formed on the second adjusting fixing frame, so that the first lens assembly and the second lens assembly do not interfere with each other during installation. As can be seen from the above example, the alignment device provided by the present application can meet different measurement accuracy requirements by using two lens assemblies with different precision configurations, thereby improving the accuracy of the alignment device as a whole. Meanwhile, the first lens assembly and the second lens assembly can be moved as a whole by the bottom plate, which can reduce the number of parts, thereby increasing the gap between the first lens assembly and the second lens assembly, and further allowing the heat of the first lens assembly and the second lens assembly to be fully discharged, thereby improving the stability of the alignment device.

[0029] The technical features mentioned above, the technical features mentioned below, and the technical features shown in the drawings alone can be combined with each other arbitrarily, as long as the technical features combined are not contradictory to each other. All feasible combinations of features are explicitly described herein. Any one of the multiple sub-features included in the same sentence can be applied independently, and does not have to be applied together with other sub-features. BRIEF DESCRIPTION OF DRAWINGS

[0030] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or prior art description will be briefly introduced as follows. Obviously, the drawings in the following description are only embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative effort on the basis of the provided drawings.

[0031] Figure 1 A structural schematic diagram of an alignment device provided by the embodiments of the present application;

[0032] Figure 2 A sectional view of a first adjusting fixing frame provided by the embodiments of the present application Figure 1 ;

[0033] Figure 3 A sectional view of a first adjusting fixing frame provided by the embodiments of the present application Figure 2 ;

[0034] Figure 4 A sectional view of a first adjusting fixing frame provided by the embodiments of the present application Figure 3 ;

[0035] Figure 5 A partial view of a second adjusting fixing frame provided by the embodiments of the present application;

[0036] Figure 6 A sectional view of a second adjusting fixing frame provided by the embodiments of the present application Figure 1 ;

[0037] Figure 7 A sectional view of a second adjusting fixing frame provided by the embodiments of the present application Figure 2 ;

[0038] Figure 8 A sectional view of a second adjusting fixing frame provided by the embodiments of the present application Figure 3 .

[0039] In the drawings: 100 is a first lens assembly, 101 is a first lens, 102 is a first camera, 103 is a first point light source, and 104 is an objective lens.

[0040] 200 is a second lens assembly, 201 is a second lens, 202 is a second camera, and 203 is a second point light source;

[0041] 300 is a first adjusting fixing frame, 301 is a fixing block, 302 is a first adjusting seat, 3021 is an adjusting part, 3022 is a supporting part, 303 is a first adjusting bolt, 304 is a first adjusting waist hole, 305 is a first positioning waist hole, 306 is a first positioning pin, 307 is a first through hole, and 308 is a first adjusting nut;

[0042] 400 is a second adjusting fixing frame, 401 is a clamping part, 4011 is a ring-shaped clamp, 4012 is a sleeve, 402 is a mounting space, 403 is a fixing seat, 4031 is a connecting part, 4032 is a mounting part, 4033 is a bolt seat, 4034 is a protruding part, 4035 is a second through hole, 404 is a second adjusting seat, 405 is a second adjusting bolt, 406 is a second adjusting waist hole, 407 is a second positioning waist hole, 408 is a second positioning pin, 409 is a second adjusting nut, and 410 is an arc-shaped part. DETAILED DESCRIPTION

[0043] The core of the present application is to provide an alignment device to improve the accuracy of the alignment device.

[0044] Another core of the present application is to provide a detection device with the above-mentioned alignment device.

[0045] The technical solutions in the embodiments of the present application will be described clearly and completely in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0046] The alignment device in the detection device, especially the alignment device in the Overlay overlay measurement device, plays a crucial role in the semiconductor manufacturing process. Through the alignment device, the position information of the pattern can be captured in real time, and these information can be fed back to the control system, so that the control system can automatically adjust to ensure the accurate performance of the subsequent process steps. The traditional alignment device usually uses an alignment camera to capture images, but its alignment accuracy is low and cannot meet the high-precision requirements of some products.

[0047] Therefore, as Figure 1As shown in the illustration, this application discloses an alignment device, including a base plate, a first lens assembly 100, and a second lens assembly 200. By employing two lens assemblies, different measurement accuracy requirements can be met through different precision configurations, thereby improving the overall accuracy of the alignment device. Simultaneously, by moving the first lens assembly 100 and the second lens assembly 200 as a whole via the base plate, the number of parts can be reduced, thereby increasing the gap between the first lens assembly 100 and the second lens assembly 200. This allows for sufficient heat dissipation from the first lens assembly 100 and the second lens assembly 200, improving the stability of the alignment device.

[0048] The following will combine Figures 1 to 8 The alignment device disclosed in the embodiments of this application will be explained and described in detail.

[0049] Among them, such as Figure 1 As shown, the first lens assembly 100 and the second lens assembly 200 can be mounted on a base plate, providing support for both. The base plate can also be connected to a lifting mechanism on the testing equipment, allowing the first lens assembly 100 and the second lens assembly 200 to move along the Z-axis. This enables precise alignment with the target object and accurate image capture, effectively preventing the accuracy, stability, and consistency of alignment from being affected by factors such as the alignment device itself or the external environment. Furthermore, the two lens assemblies can employ different precision configurations to meet varying measurement accuracy requirements, thereby improving the overall precision of the alignment device. Simultaneously, moving the first lens assembly 100 and the second lens assembly 200 as a whole via the base plate reduces the number of parts and simplifies installation.

[0050] To further improve the alignment accuracy of the two lens components, such as Figure 1As shown, the first lens assembly 100 can be fixed on the bottom plate through the first adjusting fixing frame 300 to drive the first lens assembly 100 to move along the Z direction through the first adjusting fixing frame 300, so as to realize the precise adjustment of the first lens assembly 100 along the Z direction, thereby improving the capture accuracy of the first lens assembly 100. At the same time, the second lens assembly 200 can be fixed on the bottom plate through the second adjusting fixing frame 400 to drive the second lens assembly 200 to move along the Z direction through the second adjusting fixing frame 400, so as to realize the precise adjustment of the second lens assembly 200 along the Z direction, thereby improving the capture accuracy of the second lens assembly 200, and the second adjusting fixing frame 400 is provided with a clamping part 401 clamping the second lens assembly 200, and the clamping part 401 can adopt a ring-shaped notch structure, so that the clamping part 401 has elasticity when clamping, and can still maintain sufficient clamping force under long-term wear, thereby improving the service life of the alignment device. In addition, the second adjusting fixing frame 400 has a mounting space 402 accommodating the first lens assembly 100, so that the first lens assembly 100 and the second lens assembly 200 do not interfere with each other when mounted, and a larger heat dissipation space can be formed between the first lens assembly 100 and the second lens assembly 200, so that the heat of the first lens assembly 100 and the second lens assembly 200 is fully discharged, thereby improving the stability of the alignment device. It should be noted that the first adjusting fixing frame 300 and the second adjusting fixing frame 400 can be made of aluminum alloy material, so as to reduce the processing difficulty of the first adjusting fixing frame 300 and the second adjusting fixing frame 400.

[0051] In the above embodiment, as shown in Figure 1 The first lens assembly 100 can include a first lens 101, a first camera 102, a first point light source 103 and an objective lens 104, and the first camera 102 can be located at the upper end of the first lens 101, and the objective lens 104 can be located at the lower end of the first lens 101. The first point light source 103 is arranged on the first lens 101, and the first point light source 103 can be arranged parallel to the first lens 101. The first lens 101 can adopt an industrial microscope lens with high precision requirements for the flatness and parallelism of the mounting surface. The second lens assembly 200 can include a second lens 201, a second camera 202 and a second point light source 203, and the second camera 202 can be located at the upper end of the second lens 201. The second point light source 203 is arranged on the second lens 201, and the second point light source 203 can be arranged perpendicular to the second lens 201. The second lens 201 can adopt a telecentric lens to correct the parallax problem that may be generated in the imaging process of the industrial microscope lens, thereby further improving the accuracy of the alignment device.

[0052] In some embodiments, as shown in Figures 2 to 4As shown, the first adjustment fixing frame 300 may include a fixing block 301 and a first adjustment seat 302. The first adjustment seat 302 is movably disposed on the base plate and is connected to the first lens assembly 100. The fixing block 301 can be fixed to the base plate by fasteners such as bolts, and the fixing block 301 is provided with a first adjustment bolt 303, so that the first adjustment bolt 303 can abut against the first adjustment seat 302 to adjust the position of the first adjustment seat 302, thereby realizing precise adjustment of the first lens assembly 100 along the Z direction. Specifically, the first adjustment seat 302 may adopt a T-shaped structure, and the first adjustment seat 302 may include an adjustment part 3021 and a support part 3022 disposed perpendicular to the adjustment part 3021. The support part 3022 of the first adjustment seat 302 can be fixedly connected to the first lens 101 of the first lens assembly 100, while the adjustment part 3021 can be movably connected to the base plate.

[0053] In some embodiments, such as Figure 2 As shown, the fixing block 301 can be disposed on the lower side of the adjusting part 3021 of the first adjusting seat 302, so that the first adjusting bolt 303 on the fixing block 301 abuts against the lower surface of the adjusting part 3021 of the first adjusting seat 302. When adjusting the first lens assembly 100, the first adjusting bolt 303 on the fixing block 301 can be turned in the forward direction, causing the first adjusting bolt 303 to push the first adjusting seat 302 upward, thereby driving the first lens assembly 100 to move away from the target object. Conversely, the first adjusting bolt 303 on the fixing block 301 can also be turned in the reverse direction, and the first adjusting seat 302 can move downward under the action of gravity, thereby driving the first lens assembly 100 to move closer to the target object, until the first lens assembly 100 is adjusted to a suitable position, thereby achieving accurate image capture of the target object.

[0054] In some embodiments, the fixing block 301 can be arranged on the upper side of the adjusting part 3021 of the first adjusting seat 302, and the first adjusting bolt 303 can abut against the upper surface of the adjusting part 3021 of the first adjusting seat 302. When the first lens assembly 100 is adjusted, the first adjusting bolt 303 on the fixing block 301 can be screwed in a forward direction, so that the first adjusting bolt 303 pushes the first adjusting seat 302 to move downward, thereby driving the first lens assembly 100 to move towards the target object. Conversely, the first adjusting bolt 303 on the fixing block 301 can be screwed in a reverse direction, so that the first adjusting seat 302 moves upward, thereby driving the first lens assembly 100 to move away from the target object, until the first lens assembly 100 is adjusted to a suitable position, so as to accurately capture the image of the target object. It should be noted that when the first lens assembly 100 is moved away from the target object, the first adjusting bolt 303 on the fixing block 301 can be screwed in a reverse direction, so that the first adjusting bolt 303 moves away from the first adjusting seat 302. At this time, the operator can directly move the first lens assembly 100 upward.

[0055] In order to achieve precise adjustment of the first lens assembly 100, at least one of the first adjusting seat 302 and the bottom plate is provided with a first adjusting waist hole 304, and the other is provided with a first mounting hole, that is, the first adjusting waist hole 304 can be arranged on the first adjusting seat 302, and the first mounting hole is arranged on the bottom plate, or the first adjusting waist hole 304 can be arranged on the bottom plate, and the first mounting hole can be arranged on the first adjusting seat 302. At the same time, the first adjusting seat 302 and the bottom plate can be locked by bolts and other fasteners to achieve the active connection of the first adjusting seat 302 and the bottom plate, so as to achieve the precise adjustment of the first lens assembly 100.

[0056] In some embodiments, as shown in Figure 2 the first adjusting waist hole 304 can be arranged on the first adjusting seat 302, and the first mounting hole is arranged on the bottom plate. At this time, the first mounting hole can adopt a threaded hole, so that when the first lens assembly 100 is adjusted to a suitable position, the first adjusting waist hole 304 of the first adjusting seat 302 can be directly penetrated by a bolt or other fastener and locked and fixed with the first mounting hole on the bottom plate in threaded cooperation. Specifically, the first adjusting waist hole 304 can be arranged on the adjusting part 3021 of the first adjusting seat 302, and the number of the first adjusting waist hole 304 can be one, two, three, four or more. At the same time, the first mounting hole is matched with the first adjusting waist hole 304, that is, each first adjusting waist hole 304 corresponds to a first mounting hole, so as to ensure the reliability of the connection between the first adjusting seat 302 and the bottom plate.

[0057] In some embodiments, the first adjusting waist hole 304 can be arranged on the bottom plate, and the first mounting hole can be arranged on the first adjusting seat 302, at this time, the first mounting hole can adopt a light hole, so that when the first lens assembly 100 is adjusted to a suitable position, the first adjusting seat 302 and the bottom plate can be locked and fixed by sequentially passing the first mounting hole of the first adjusting seat 302 and the first adjusting waist hole 304 on the bottom plate through the fastener such as bolt, and threaded with the locking nut and the fastener such as bolt. Specifically, the first mounting hole can be arranged on the adjusting part 3021 of the first adjusting seat 302, and the number of the first adjusting waist hole 304 can be one, two, three, four or more, and the first mounting hole and the first adjusting waist hole 304 are matched to ensure the reliability of the connection between the first adjusting seat 302 and the bottom plate.

[0058] In order to facilitate the installation of the first adjusting seat 302 on the bottom plate, at least one of the first adjusting seat 302 and the bottom plate is provided with a first positioning waist hole 305, and the other is provided with a first positioning pin 306, that is, the first positioning waist hole 305 can be arranged on the first adjusting seat 302, and the first positioning pin 306 is arranged on the bottom plate, as shown in Figure 2 Alternatively, the first positioning waist hole 305 is arranged on the bottom plate, and the first positioning pin 306 is arranged on the first adjusting seat 302, so that the installation and positioning between the first adjusting seat 302 and the bottom plate can be realized by matching the first positioning pin 306 with the first positioning waist hole 305, and the movement of the first adjusting seat 302 can be guided. Among them, the first positioning waist hole 305 can adopt one, two or more, and the first positioning waist hole 305 can be arranged on the adjusting part 3021 of the first adjusting seat 302 or the bottom plate, and the first positioning pin 306 is matched with the first positioning waist hole 305, that is, each first positioning waist hole 305 corresponds to a first positioning pin 306, so as to ensure the accuracy of the positioning between the first adjusting seat 302 and the bottom plate, and the stability of the precise adjustment of the first lens assembly 100.

[0059] In order to facilitate the installation of the first adjusting screw 303, and at the same time realize the adjustability of the first adjusting screw 303, as shown in Figure 2 The first adjusting seat 302 can be arranged with a first through hole 307, and the first through hole 307 can be threaded with the first adjusting screw 303, so that the adjustment of the first adjusting seat 302 can be realized by rotating the first adjusting screw 303, and the precise adjustment of the first lens assembly 100 connected with the first adjusting seat 302 can be realized.

[0060] In some embodiments, as shown in Figure 2As shown, the first through hole 307 can adopt a counterbore, and a first adjusting nut 308 threadedly matched with the first adjusting bolt 303 can be arranged in the counterbore. The first adjusting nut 308 can be in interference fit with the inner wall of the counterbore to avoid rotation of the first adjusting nut 308. In order to facilitate installation of the first adjusting bolt 303 and the first adjusting nut 308, the first through hole 307 can be provided with a notch on the inner wall along the through hole direction, so as to install the first adjusting bolt 303 and the first adjusting nut 308 into the first through hole 307 from the side of the fixed block 301.

[0061] In some embodiments, the first through hole 307 can adopt a threaded hole, i.e. a first internal thread part threadedly matched with the first adjusting bolt 303 is arranged on the inner wall of the first through hole 307, so that the first adjusting bolt 303 can be matched with the first internal thread part of the first through hole 307 to realize adjustable property of the first adjusting bolt 303 while achieving installation fixation of the first adjusting bolt 303.

[0062] In some embodiments, as shown, Figures 5 to 8 The second adjusting fixed frame 400 can include a fixed seat 403 and a second adjusting seat 404, the clamping member 401 can be connected with the second adjusting seat 404 and clamp the second lens assembly 200, the second adjusting seat 404 can be movably arranged on the fixed seat 403, the fixed seat 403 can be fixed on the bottom plate by a bolt or other fastener, and the fixed seat 403 is provided with a second adjusting bolt 405, so that the second adjusting seat 404 can be abutted by the second adjusting bolt 405 to adjust the position of the second adjusting seat 404, thereby realizing precise adjustment of the second lens assembly 200 along the Z direction. Specifically, the fixed seat 403 can adopt an L-shaped structure, and the fixed seat 403 can include a connecting part 4031 and a mounting part 4032 arranged perpendicularly to the connecting part 4031, the connecting part 4031 of the fixed seat 403 can be movably connected with the second adjusting seat 404, and the mounting part 4032 of the fixed seat 403 can be fixed on the bottom plate by a bolt or other fastener.

[0063] In some embodiments, as shown, Figures 5 to 7As shown, the second adjusting bolt 405 can be arranged on the upper side of the connecting portion 4031 of the fixing seat 403, so that the second adjusting bolt 405 can abut against the upper surface of the second adjusting seat 404. When adjusting the second lens assembly 200, the second adjusting bolt 405 on the fixing seat 403 can be screwed in a forward direction, so that the second adjusting bolt 405 pushes the second adjusting seat 404 to move downward, thereby driving the second lens assembly 200 to move towards the target object. Conversely, the second adjusting bolt 405 on the fixing seat 403 can be screwed in a reverse direction, so that the second adjusting seat 404 moves upward, thereby driving the second lens assembly 200 to move away from the target object, until the second lens assembly 200 is adjusted to a suitable position, so as to accurately capture the image of the target object. It should be noted that when the second lens assembly 200 moves away from the target object, the second adjusting bolt 405 on the fixing seat 403 can be screwed in a reverse direction, so that the second adjusting bolt 405 moves away from the second adjusting seat 404, at this time, the operator can directly move the second lens assembly 200 upward.

[0064] In some embodiments, the second adjusting bolt 405 can be arranged on the lower side of the connecting portion 4031 of the fixing seat 403, so that the second adjusting bolt 405 can abut against the lower surface of the second adjusting seat 404. When adjusting the second lens assembly 200, the second adjusting bolt 405 on the fixing seat 403 can be screwed in a forward direction, so that the second adjusting bolt 405 pushes the second adjusting seat 404 to move upward, thereby driving the second lens assembly 200 to move away from the target object. Conversely, the second adjusting bolt 405 on the fixing seat 403 can be screwed in a reverse direction, so that the second adjusting seat 404 can move downward under the action of gravity, thereby driving the second lens assembly 200 to move towards the target object, until the second lens assembly 200 is adjusted to a suitable position, so as to accurately capture the image of the target object.

[0065] In order to achieve precise adjustment of the second lens assembly 200, at least one of the connecting portion 4031 of the fixing seat 403 and the second adjusting seat 404 is provided with a second adjusting waist hole 406, and the other is provided with a second mounting hole, that is, the second adjusting waist hole 406 can be arranged on the second adjusting seat 404, and the second mounting hole is arranged on the connecting portion 4031 of the fixing seat 403, or the second adjusting waist hole 406 can be arranged on the connecting portion 4031 of the fixing seat 403, and the second mounting hole is arranged on the second adjusting seat 404, and at the same time, the second adjusting seat 404 and the connecting portion 4031 of the fixing seat 403 can be locked by a fastener such as a bolt, so as to achieve the activity connection between the second adjusting seat 404 and the fixing seat 403, thereby achieving the precise adjustment of the second lens assembly 200.

[0066] In some embodiments, as shown in FIG. 6, the second adjusting seat 404 can be arranged on the connecting portion 4031 of the fixing seat 403, and the second adjusting bolt 405 can be arranged on the second adjusting seat 404, so that the second adjusting bolt 405 can abut against the upper surface of the fixing seat 403. When adjusting the second lens assembly 200, the second adjusting bolt 405 on the second adjusting seat 404 can be screwed in a forward direction, so that the second adjusting bolt 405 pushes the fixing seat 403 to move downward, thereby driving the second lens assembly 200 to move towards the target object. Conversely, the second adjusting bolt 405 on the second adjusting seat 404 can be screwed in a reverse direction, so that the fixing seat 403 moves upward, thereby driving the second lens assembly 200 to move away from the target object, until the second lens assembly 200 is adjusted to a suitable position, so as to accurately capture the image of the target object. Figure 5and Figure 6 As shown, the second adjustment waist hole 406 can be set on the second adjustment seat 404, and the second mounting hole is set on the connecting part 4031 of the fixed seat 403. At this time, the second mounting hole can be a threaded hole, so that when the second lens assembly 200 is adjusted to a suitable position, fasteners such as bolts can be directly passed through the second adjustment waist hole 406 of the second adjustment seat 404 and threadedly engaged with the second mounting hole on the connecting part 4031 of the fixed seat 403 to lock and fix it.

[0067] In some embodiments, the second adjustment waist hole 406 may be provided on the connecting portion 4031 of the fixed base 403, and the second mounting hole may be provided on the second adjustment base 404. In this case, the second mounting hole may be an optical hole, so that when the second lens assembly 200 is adjusted to a suitable position, fasteners such as bolts can pass through the second mounting hole of the second adjustment base 404 and the second adjustment waist hole 406 on the connecting portion 4031 of the fixed base 403 in sequence, and then the second adjustment base 404 and the connecting portion 4031 of the fixed base 403 can be locked and fixed by the threaded engagement of the locking nut and the fasteners such as bolts.

[0068] In the above embodiments, the number of second adjustment waist holes 406 can be one, two, three, four or more, and the second mounting hole is adapted to the second adjustment waist hole 406, that is, each second adjustment waist hole 406 corresponds to one second mounting hole, so as to ensure the reliability of the connection between the second adjustment seat 404 and the fixed seat 403.

[0069] To facilitate the installation of the second adjusting seat 404 onto the connecting portion 4031 of the fixed seat 403, at least one of the connecting portions 4031 of the second adjusting seat 404 and the fixed seat 403 is provided with a second positioning hole 407, and the other is provided with a second positioning pin 408. That is, the second positioning hole 407 can be provided on the second adjusting seat 404, and the second positioning pin 408 is provided on the connecting portion 4031 of the fixed seat 403. Figure 6 As shown, alternatively, the second positioning waist hole 407 is disposed on the connecting part 4031 of the fixed base 403, and the second positioning pin 408 is disposed on the second adjusting base 404. The second positioning pin 408 cooperates with the second positioning waist hole 407 to achieve the installation positioning between the connecting part 4031 of the fixed base 403 and the second adjusting base 404, and also guides the movement of the second adjusting base 404. One, two, or more second positioning waist holes 407 can be used, and the second positioning pin 408 is adapted to each second positioning waist hole 407, i.e., each second positioning waist hole 407 corresponds to one second positioning pin 408, to ensure the accuracy of positioning between the connecting part 4031 of the fixed base 404 and the second adjusting base 403, and to ensure the stability of the precision adjustment of the second lens assembly 200.

[0070] In order to facilitate the installation of the second adjusting screw 405 and achieve the adjustability of the second adjusting screw 405, as shown in Figures 5 to 7 The connecting portion 4031 of the fixing seat 403 can be provided with a screw seat 4033 for installing the second adjusting screw 405, and the screw seat 4033 can be arranged on the upper side or the lower side of the connecting portion 4031 of the fixing seat 403, so as to arrange the second adjusting screw 405 on the upper side or the lower side of the connecting portion 4031 of the fixing seat 403. Meanwhile, the second adjusting seat 404 can be attached to one side of the connecting portion 4031 of the fixing seat 403, and the screw seat 4033 has a protruding portion 4034 extending towards the side of the second adjusting seat 404, and the protruding portion 4034 can be provided with a second through hole 4035, and the second through hole 4035 can be threadedly connected with the second adjusting screw 405, so that the adjustment of the second adjusting seat 404 can be achieved by rotating the second adjusting screw 405, and the precise adjustment of the second lens assembly 200 connected with the second adjusting seat 404 can be achieved.

[0071] In some embodiments, as shown in Figure 6 The protruding portion 4034 is provided with a second adjusting nut 409 threadedly connected with the second adjusting screw 405 on the side close to the second adjusting seat 404, and the second adjusting nut 409 can be fixed to the position of the second through hole 4035 of the protruding portion 4034 by welding, and at this time, the second through hole 4035 can be a light hole. In order to facilitate the fixation of the second adjusting nut 409, a certain gap is required between the protruding portion 4034 of the screw seat 4033 and the second adjusting seat 404, so that the second adjusting nut 409 can be fixed between the protruding portion 4034 of the screw seat 4033 and the second adjusting seat 404. Meanwhile, in order to facilitate the installation of the second adjusting screw 405, the second through hole 4035 can be provided with a notch on the inner wall along the through hole direction, so as to install the second adjusting screw 405 from the side of the protruding portion 4034 into the second through hole 4035.

[0072] In some embodiments, the second through hole 4035 can be a threaded hole, that is, the inner wall of the second through hole 4035 is provided with a second internal thread portion threadedly connected with the second adjusting screw 405, so that the adjustability of the second adjusting screw 405 can be achieved by threadedly connecting the second adjusting screw 405 with the second internal thread portion of the second through hole 4035 while achieving the installation fixation of the second adjusting screw 405.

[0073] In some embodiments, as shown in Figure 8As shown, a mounting space 402 can be formed between the connecting portion 4031 and the mounting portion 4032, so as to accommodate the first lens assembly 100, so that the first lens assembly 100 and the second lens assembly 200 do not interfere with each other when mounted. Meanwhile, an arc-shaped portion 410 is arranged on the connecting portion 4031 and abuts against the first lens assembly 100, so as to avoid the edge of the connecting portion 4031 damaging the first lens assembly 100, thereby better protecting the first lens assembly 100.

[0074] In some embodiments, as shown in FIG. 1, the second adjusting fixture 400 can include a holding member 401 and a second adjusting member 402. Figures 5 to 7 As shown, the holding member 401 can include a ring-shaped clamp 4011 and a sleeve 4012 sleeved outside the second lens assembly 200, and the ring-shaped clamp 4011 can include two, which can be locked by fasteners such as bolts to clamp the second lens assembly 200 between the two ring-shaped clamps 4011. Meanwhile, the two ring-shaped clamps 4011 have elasticity when clamped, so that the holding member 401 can still maintain sufficient holding force under long-term wear, thereby prolonging the service life of the second adjusting fixture 400.

[0075] The application further discloses a detection device including the alignment device as disclosed in the above embodiments, and therefore has all the technical effects of the alignment device as described above, which will not be repeated here. The detection device can be an Overlay overlay measurement device, an image measurement device, etc.

[0076] The terms "first" and "second" and the like in the specification and claims of the application and the above drawings are used to distinguish different objects, and are not used to describe a specific order. In addition, the terms "include" and "have" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device including a series of steps or units is not limited to the listed steps or units, but can include steps or units not listed.

[0077] The above description of the disclosed embodiments enables a person skilled in the art to implement or use the application. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the application. Therefore, the application will not be limited to these embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An alignment device, characterized by The camera lens includes a bottom plate, a first lens assembly (100) and a second lens assembly (200), wherein: The bottom plate is used for supporting the first lens assembly (100) and the second lens assembly (200), and the bottom plate can drive the first lens assembly (100) and the second lens assembly (200) to move; The first lens assembly (100) is fixed on the bottom plate through a first adjusting fixing frame (300); The second lens assembly (200) is fixed on the bottom plate through a second adjusting fixing frame (400), and the second adjusting fixing frame (400) is provided with a clamping part (401) for clamping the second lens assembly (200), and the second adjusting fixing frame (400) limits an installation space (402) for accommodating the first lens assembly (100).

2. The alignment device of claim 1, wherein, The first adjusting fixing frame (300) includes a fixing block (301) and a first adjusting seat (302), the first adjusting seat (302) is movably arranged on the bottom plate, and the first adjusting seat (302) is connected with the first lens assembly (100), the fixing block (301) is installed on the bottom plate, and the fixing block (301) is provided with a first adjusting bolt (303), the first adjusting bolt (303) is used for abutting with the first adjusting seat (302) to adjust the position of the first adjusting seat (302).

3. The alignment device of claim 2, wherein, At least one of the first adjusting seat (302) and the bottom plate is provided with a first adjusting waist hole (304), and the other is provided with a first mounting hole, the first adjusting waist hole (304) is matched with the first mounting hole, so that the first adjusting seat (302) and the bottom plate are locked by a fastener.

4. The alignment device of claim 3, wherein, At least one of the first adjusting seat (302) and the bottom plate is further provided with a first positioning waist hole (305), and the other is provided with a first positioning pin (306), the first positioning pin (306) cooperates with the first positioning waist hole (305) to position the installation position of the first adjusting seat (302) and the bottom plate.

5. The alignment device of claim 2, wherein, The fixing block (301) is provided with a first through hole (307) threadedly matched with the first adjusting bolt (303).

6. The alignment device of claim 5, wherein, The first through hole (307) is a counterbore, and the counterbore is provided with a first adjusting nut (308) threadedly matched with the first adjusting bolt (303); or The inner wall of the first through hole (307) is provided with a first internal thread part threadedly matched with the first adjusting bolt (303).

7. The alignment device of claim 1, wherein The second adjusting fixing frame (400) includes a fixing seat (403) and a second adjusting seat (404), the clamping part (401) is connected with the second adjusting seat (404), the second adjusting seat (404) is movably arranged on the fixing seat (403), the fixing seat (403) is installed on the bottom plate, and the fixing seat (403) is provided with a second adjusting bolt (405), the second adjusting bolt (405) is used for abutting with the second adjusting seat (404) to adjust the position of the second adjusting seat (404).

8. The alignment device of claim 7, wherein, The fixing seat (403) comprises a connecting portion (4031) and a mounting portion (4032) vertically arranged with the connecting portion (4031), the mounting portion (4032) is used for mounting on the bottom plate, at least one of the connecting portion (4031) and the second adjusting seat (404) is provided with a second adjusting waist hole (406), and the other is provided with a second mounting hole, the second adjusting waist hole (406) is matched with the second mounting hole, so that the second adjusting seat (404) and the connecting portion (4031) are locked by a fastener.

9. The alignment device of claim 8, wherein, At least one of the second adjusting seat (404) and the connecting portion (4031) is further provided with a second positioning waist hole (407), and the other is provided with a second positioning pin (408), the second positioning pin (408) is matched with the second positioning waist hole (407), and the mounting position of the second adjusting seat (404) and the connecting portion (4031) is positioned.

10. The alignment device of claim 8, wherein, The connecting portion (4031) of the fixing seat (403) is provided with a bolt seat (4033) for mounting the second adjusting bolt (405), the bolt seat (4033) has a protruding portion (4034) extending towards the side of the second adjusting seat (404), and the protruding portion (4034) is provided with a second through hole (4035) threadedly matched with the second adjusting bolt (405).

11. The alignment device of claim 10, wherein, The protruding portion (4034) is provided with a second adjusting nut (409) threadedly matched with the second adjusting bolt (405) on the side close to the second adjusting seat (404); or, The inner wall of the second through hole (4035) is provided with a second internal thread portion threadedly matched with the second adjusting bolt (405).

12. The alignment device of claim 8, wherein, The connecting portion (4031) and the mounting portion (4032) form the mounting space (402) therebetween, and the connecting portion (4031) is provided with an arc-shaped portion (410) abutting the first lens assembly (100).

13. The alignment device of claim 1, wherein, The holding member (401) comprises a ring-shaped clamp (4011) and a sleeve (4012) sleeved outside the second lens assembly (200), the ring-shaped clamp (4011) comprises two, and the two ring-shaped clamps (4011) are locked by a fastener to clamp the second lens assembly (200) between the two ring-shaped clamps (4011).

14. The alignment device of claim 1, wherein, The first lens assembly (100) comprises a first lens (101), a first camera (102), a first point light source (103) and an objective lens (104), the first camera (102) is arranged at the upper end of the first lens (101), the objective lens (104) is arranged at the lower end of the first lens (101), and the first point light source (103) is arranged on the first lens (101).

15. The alignment device of claim 1, wherein, The second lens assembly (200) comprises a second lens (201), a second camera (202) and a second point light source (203), the second camera (202) is arranged at the upper end of the second lens (201), and the second point light source (203) is arranged on the second lens (201).

16. A detection device, characterized by An alignment device as claimed in any one of claims 1 to 15.

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