Photomask normal position code scanning equipment

Abstract

The utility model discloses a photo mask plate normal position code scanning device which is characterized in that the photo mask plate normal position code scanning device comprises a base, a rotating motor is arranged on the base, the rotating motor is connected with a photo mask plate clamping jaw, and a scanning camera and a detection sensor are arranged on the two sides of the photo mask plate clamping jaw respectively; the rotating motor is used for driving the photomask clamping jaw to adjust the position of the photomask, the detection sensor is used for detecting a positioning point on the photomask, and the scanning camera reads a bar code on the photomask, so that the photomask can be placed on the equipment through a robot; the equipment has the functions of detecting whether the photomask is placed on the equipment or not, detecting the side line where the bar code is located and reading the bar code.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor lithography equipment, specifically a photomask positioning and scanning device. Background Technology

[0002] A photomask is a pattern master used in photolithography. It consists of an opaque light-blocking film forming a mask pattern structure on a transparent substrate, and then the pattern information is transferred to the product substrate through an exposure process.

[0003] Before chip processing, photomasks used in lithography machines need to be cleaned to remove dust from their surfaces. Since there are many photomasks in a fab, they need to be classified and cleaned. When connecting to photomask cleaning equipment, the placement of photomasks on the equipment is subject to strict requirements, and the barcodes on the photomasks need to be read.

[0004] Traditional equipment requires staff to use a barcode reader to read the barcode on the photomask. The photomask is a cuboid, and the barcode is located on one side of the rectangle. The barcode position needs to be identified manually by visual inspection, which not only increases the workload of the operators, but also requires the photomask to be extremely clean. Manual operation can cause contamination and reduce the overall applicability of the equipment. Utility Model Content

[0005] To address the shortcomings of existing technologies, this invention provides a photomask alignment scanning device. This invention uses a robot to place the photomask onto the device. The device is capable of detecting whether the photomask is placed on the device, detecting the edge of the barcode, and reading the barcode.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] A photomask positioning and barcode scanning device includes a base, on which a rotary motor is mounted. The rotary motor is connected to a photomask gripper, and a scanning camera and a detection sensor are respectively mounted on both sides of the photomask gripper. The rotary motor is used to drive the photomask gripper to adjust the position of the photomask, the detection sensor is used to detect positioning points on the photomask, and the scanning camera reads the barcode on the photomask.

[0008] As a further embodiment of this utility model, the scanning camera is connected to the base via a camera bracket; the photomask jaws are connected to a jaw cylinder.

[0009] As a further embodiment of this invention, the rotary motor drives the photomask clamp to rotate via a synchronous belt; the synchronous belt is equipped with a limit sensor.

[0010] As a further embodiment of this utility model, the photomask clamp includes a deep groove ball bearing, a rotating shaft, and clamps. The rotating shaft is connected to the synchronous belt and the deep groove ball bearing, respectively, and the clamps are connected to the clamp cylinder.

[0011] As a further embodiment of this utility model, the gripper is also connected to a gripper guide rail; the gripper cylinder drives the gripper to move on the gripper guide rail.

[0012] As a further embodiment of this utility model, it also includes an operation panel, which is located on the side of the base.

[0013] As a further embodiment of this utility model, the photomask clamp includes four clamps for clamping the photomask around its perimeter, and the clamp cylinder is a four-jaw cylinder.

[0014] As a further embodiment of this utility model, the four-claw cylinder is provided with a cylinder shell and connected to an air pipe connector.

[0015] This utility model has the following beneficial effects:

[0016] This invention uses a photomask gripper to position the photomask, a sensor to detect the angle and position of the photomask, a motor to drive a four-jaw cylinder to rotate, and a barcode reader to read the barcode. This greatly reduces the complexity of manual operation.

[0017] To more clearly illustrate the structural features and effects of this utility model, the following detailed description of this utility model is provided in conjunction with the accompanying drawings and specific embodiments. Attached Figure Description

[0018] Figure 1 This is a partial structural schematic diagram of the three-dimensional view of the photomask-aligned barcode scanning device of this utility model.

[0019] Figure 2 This is a cross-sectional structural diagram of the photomask-based positive positioning scanning device of this utility model.

[0020] Figure 3 This is a schematic diagram of the structure of the photomask clamp mentioned in this utility model.

[0021] Figure 4 This is a partial structural schematic diagram of the photomask-based positive positioning scanning device of this utility model.

[0022] Figure 5 This is a schematic diagram of the overall structure of the photomask-based scanning device of this utility model. Detailed Implementation

[0023] The present invention will be further described below with reference to the accompanying drawings and relevant knowledge. Obviously, the described applications are only some embodiments of the present invention, and not all embodiments.

[0024] Reference Figures 1-5 As shown, this utility model provides a photomask positioning and barcode scanning device, including a base 1, a rotary motor 2 mounted on the base 1, a photomask gripper 3 connected to the rotary motor 2, and a scanning camera 4 and a detection sensor 5 respectively mounted on both sides of the photomask gripper 3. The rotary motor 2 drives the photomask gripper 3 to adjust the position of the photomask 100, the detection sensor 5 detects the positioning points on the photomask 100, and the scanning camera 4 reads the barcode on the photomask. The working process of this utility model is as follows: first, the photomask 100 is placed on the photomask gripper 3, the rotary motor 2 drives the photomask to rotate, the detection sensor 5 detects the positioning points on the photomask, and the scanning camera 4 reads the barcode on the photomask, thereby completing the center positioning of the photomask and the reading of the barcode.

[0025] In this invention, the scanning camera 4 is connected to the base 1 via a camera bracket 6; a gripper cylinder 7 is connected to the photomask clamp. (See reference...) Figure 2 As shown, the scanning camera 4 is located directly above the photomask 100, and the gripper cylinder 7 drives the gripper to clamp the photomask 100.

[0026] Reference Figure 3 As shown, in this utility model, the rotary motor 2 drives the photomask gripper 3 to rotate via the synchronous belt 8. More preferably, the photomask gripper 3 includes a deep groove ball bearing 9, a rotating shaft 10, and grippers 11. The rotating shaft 10 is connected to both the synchronous belt 8 and the deep groove ball bearing 9, and the grippers 11 are connected to the gripper cylinder 7. The synchronous belt 8 is equipped with a limit sensor 12, which is used to limit the rotation angle of the photomask gripper 3. The rotary motor 2 is connected to the synchronous belt 8, and the rotation of the gripper cylinder is driven by the rotating synchronous belt. The rotation is limited by detecting the origin position of the rotation using the rotation limit sensor. The gripper cylinder 7 drives the photomask gripper to clamp and position it. (Refer to...) Figure 2 As shown, the detection sensor 5 is fixed to the base, and the scanning camera 4 is connected and fixed to the base through the camera bracket, which facilitates the stable installation of the scanning camera 4 and the detection sensor 5.

[0027] In this utility model, reference is made to Figure 3As shown, the gripper 11 is also connected to a gripper guide rail 13; the gripper cylinder 7 drives the gripper to move on the gripper guide rail 13, facilitating the clamping of the photomask. More preferably, the photomask gripper includes four grippers for clamping the photomask around its perimeter. The gripper cylinder is a four-jaw cylinder, and the four-jaw cylinder has a cylinder housing 14 and is connected to an air pipe connector 15. The working process of the photomask gripper 3 is as follows: the gripper 11 is connected to the gripper guide rail 13 (linear guide rail), the four-jaw cylinder drives the gripper guide rail 13 through a slider, the four-jaw cylinder is fixed to the rotating shaft 10, and rotates relative to the base. Figure 3 17 is a rotating base; 18 is a magnetic switch used to open the four-jaw cylinder.

[0028] This invention also includes an operation panel 16, which is located on the side of the base for easy operation of the device. (See reference...) Figure 5 As shown in the figure, in this utility model, it is preferable to use two detection sensors, which makes it easier to detect the angle information of the photomask.

[0029] The working principle of this photomask alignment and barcode scanning device is as follows: First, the photomask is placed onto the device manually or by a robot. Initially, the positional accuracy requirement is not high, and the four-jaw cylinder has a high fault tolerance rate, allowing for center positioning of the photomask. Then, sensors detect the angle information of the photomask, and a motor drives the four-jaw cylinder to rotate. Simultaneously, the barcode reader camera reads the barcode. This device has communication capabilities with upstream and downstream equipment and is flexible in its use with other devices. The device boasts high self-centering accuracy, better particle suppression, and can also expand into more application functions and scenarios.

[0030] This invention utilizes photomask grippers 3 to center-position the photomask. Specifically, a four-jaw cylinder is used to center-position the photomask. Since the four-jaw cylinder moves each gripper 11 by the same displacement, center-positioning of the photomask is achieved. (Refer to...) Figure 4 As shown, the photomask is placed on the photomask gripper 3, and then the four grippers clamp the photomask. The detection sensor 5 can detect the angle and position information of the photomask to determine whether the photomask is aligned correctly. The position of the photomask is adjusted by rotating the four-jaw cylinder driven by the rotary motor 2 to ensure that it is aligned or adjusted to the required angle. At the same time, the barcode is read by the scanning camera 4. This utility model can also realize the communication function between the device and upstream and downstream devices by setting a conventional signal transmission structure, and can be flexibly used with other devices.

[0031] The technical principles of this utility model have been described above with reference to specific embodiments, which are merely preferred embodiments of this utility model. The protection scope of this utility model is not limited to the above embodiments; all technical solutions falling within the scope of this utility model's concept are protected. Those skilled in the art can conceive of other specific embodiments of this utility model without creative effort, and these embodiments will all fall within the protection scope of this utility model.

Claims

1. A photomask alignment scanning device, characterized in that, The device includes a base on which a rotary motor is mounted. The rotary motor is connected to a photomask gripper. A scanning camera and a detection sensor are respectively mounted on both sides of the photomask gripper. The rotary motor is used to drive the photomask gripper to adjust the position of the photomask. The detection sensor is used to detect positioning points on the photomask. The scanning camera reads the barcode on the photomask.

2. The photomask alignment scanning device as described in claim 1, characterized in that, The scanning camera is connected to the base via a camera bracket; the photomask gripper is connected to a gripper cylinder.

3. The photomask alignment scanning device as described in claim 2, characterized in that, The rotary motor drives the photomask clamp to rotate via a synchronous belt; the synchronous belt is equipped with a limit sensor.

4. The photomask alignment scanning device as described in claim 3, characterized in that, The photomask gripper includes a deep groove ball bearing, a rotating shaft, and grippers. The rotating shaft is connected to the synchronous belt and the deep groove ball bearing, respectively, and the grippers are connected to the gripper cylinder.

5. The photomask alignment scanning device as described in claim 4, characterized in that, The gripper is also connected to a gripper guide rail; the gripper cylinder drives the gripper to move on the gripper guide rail.

6. The photomask alignment scanning device as described in claim 5, characterized in that, It also includes an operation panel, which is located on the side of the base.

7. The photomask alignment scanning device as described in claim 5, characterized in that, The photomask gripper includes four grippers for clamping the photomask around its perimeter, and the gripper cylinder is a four-jaw cylinder.

8. The photomask alignment scanning device as described in claim 7, characterized in that, The four-claw cylinder is provided with a cylinder shell and a connecting pipe joint.

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