Mass spectrum detector

Abstract

The utility model relates to the field of mass spectrum detectors, and particularly provides a mass spectrum detector which comprises a shell, a vacuum pump is arranged in the shell, and a damping structure is arranged between the vacuum pump and the inner bottom of the shell; the vacuum pump and the shell are directly connected through the damping structure, so that vibration generated when the vacuum pump works is reduced by the damping structure, noise is reduced, vibration can be prevented from being transmitted to other components through the shell as much as possible, too much installation space is not occupied, and meanwhile the service life of the vacuum pump is prolonged. Resonance of other components in the mass spectrum inspection equipment is prevented, and the detection precision of the equipment and the service life of each component are guaranteed.

Description

TECHNICAL FIELD

[0001] The utility model relates to mass spectrometer field, specifically provide a mass spectrometer. BACKGROUND

[0002] Mass spectrometer is an instrument for separating and detecting different isotopes. That is, according to the principle that charged particles can be deflected in an electromagnetic field, it separates and detects the composition of substances according to the mass difference of atoms, molecules or molecular fragments. Using this principle, mass spectrometers are also used to detect the tightness of lithium ion batteries in a high vacuum environment, and can qualitatively and quantitatively detect the electrolyte flowing out of the detection object and display the leakage rate.

[0003] With the development of mass spectrometers, their portability has become a development trend. The pump body, gas path and detection unit in the mass spectrometer are miniaturized and modularized in a box body. The existing portable mass spectrometer produces high-frequency vibration when working, generates noise and affects measurement accuracy. The existing mass spectrometer usually sets a shock-absorbing pad at the bottom of the mass spectrometer to reduce the vibration between the overall mass spectrometer and the placement surface. Although this setting can reduce noise and enhance the protection of the mass spectrometer to some extent, the resonance between the internal components of the mass spectrometer is not eliminated, and the detection accuracy cannot be guaranteed. At the same time, the internal components are also prone to damage due to long-term vibration or resonance. UTILITY MODEL CONTENT

[0004] The utility model provides a mass spectrometer, through shock absorption and shock avoidance to the vibration source, directly avoid the vibration to other components and generate resonance, solve the precision problem and service life problem caused by resonance.

[0005] The technical scheme of the utility model is as follows:

[0006] A mass spectrometer comprises a shell, a vacuum pump is arranged inside the shell, and a shock-absorbing structure is arranged between the vacuum pump and the inner bottom of the shell.

[0007] In the mass spectrometer, vibration is mainly generated when the vacuum pump is working. By directly connecting the vacuum pump and the shell through a shock-absorbing structure, the vibration generated by the vacuum pump when working is reduced by the shock-absorbing structure, and noise is also reduced. The vibration can be avoided as much as possible through the shell to other components, the generation of resonance is prevented, and the stability of the detection unit, such as a quadrupole rod, in the mass spectrometer is ensured, and the detection accuracy of the equipment is ensured.

[0008] Preferably, the shock-absorbing structure comprises a mounting plate, the vacuum pump is arranged on the mounting plate, and a plurality of first shock-absorbing support columns are arranged between the mounting plate and the shell.

[0009] In the scheme, the shock absorbing structure is arranged between the vacuum pump and the bottom surface of the shell, which is equivalent to raising the vacuum pump, so that the internal components of the portable gas leak detection device are installed compactly and the available space is small. Since the vacuum pump needs to be connected to a controller for control, the controller of the vacuum pump is installed on the mounting plate to reduce the distance between the controller and the vacuum pump, avoid long wiring between the two, and save space. The vibration of the vacuum pump is fully absorbed by the plurality of first shock absorbing columns, so that the vibration is not transmitted to the shell.

[0010] Preferably, the first shock absorbing column includes a mounting column arranged on the inner bottom of the shell, a supporting spring is sleeved on the mounting column, one end of the supporting spring abuts against the shell, and the other end abuts against the mounting plate. A plug screw is threadedly connected to the top of the mounting column, the plug screw slides through the mounting plate, and the upward displacement of the mounting plate is limited.

[0011] In the scheme, the supporting spring supports the mounting plate, and the mounting plate slides on the optical axis of the plug screw arranged on the mounting column, so that the mounting plate and the vacuum pump on the mounting plate are suspended relative to the shell. When the vacuum pump works and vibrates, the mounting plate slides on the first shock absorbing columns accordingly, so that the vibration is not transmitted to the shell. Since the first shock absorbing columns only need to have a shock absorbing effect and do not need to have a shock absorbing effect, a damping structure is not needed. Since the vacuum pump itself is a vibration source, the vibration of the vacuum pump can be avoided by only deforming the spring. The height of each first shock absorbing column is adjusted by rotating the plug screw on each first shock absorbing column, so that the level of the mounting plate in the initial state is ensured.

[0012] Preferably, the shock absorbing structure further includes a second shock absorbing column arranged on the upper surface of the mounting plate, and a connecting plate arranged at the head and tail of the vacuum pump. The vacuum pump is placed on the second shock absorbing column through the connecting plate.

[0013] In the scheme, the second shock absorbing column on the surface of the mounting plate further supports the vacuum pump, so that the vacuum pump has more space for heat dissipation. The controller bracket of the vacuum pump can be arranged in the space below the vacuum pump, so that the space utilization rate is improved. Since the second shock absorbing column is directly connected to the vacuum pump and supports the vacuum pump through rubber, part of the vibration of the vacuum pump can be absorbed, the collision of the supported part of the vacuum pump can be reduced, the vibration noise of the vacuum pump during work can be reduced, and the support of the second shock absorbing column is ensured to be firm.

[0014] Preferably, the mounting column is detachably connected to the bottom of the shell by a bolt. Holes are arranged at the corresponding positions of the bottom of the shell, so that the mounting column can be fixed in the inner bottom of the shell by the bolt. The mounting column can be directly detached from the bottom of the shell, so that the vacuum pump and the shock absorbing structure can be taken out together for maintenance and other operations.

[0015] Since the shell needs to be integrally formed, and the overall portability of the mass spectrometer is to be ensured, the thickness of the outer shell is generally thin, so the radial supporting force provided by the shell hole for the mounting column bolt is limited, and the bolt almost entirely relies on extrusion and clamping of the shell bottom plate with the bottom surface of the mounting column to maintain the stability of the mounting column, and the connection between the mounting column and the base is easily damaged when the overall mass spectrometer shakes, therefore, preferably, a support plate part is arranged at the bottom of the shell, and the bolt passes through the support plate part. By adding a support plate part at the bottom, the thickness of the bottom bolt hole is increased, and the bolt connection is more stable.

[0016] Preferably, the support plate part is a "N" type structure, and the front and rear corners of the support plate part extend out of the bottom surface of the shell. The side surface of the support plate part can protect the side surface and the four corners of the outer shell, so as to avoid damage to these relatively fragile parts of the outer shell.

[0017] Preferably, a three-stage buffer supporting leg is arranged on the bottom plate of the shell.

[0018] In this scheme, the three-stage buffer supporting leg raises the shell, so that the bottom of the shell is suspended, and has a certain heat dissipation and moisture prevention effect. At the same time, the three-stage buffer supporting leg can overall shock-absorb the shell, so that the entire mass spectrometer can achieve a multi-stage shock-absorbing effect, and effectively avoid the influence of the vibration of the vacuum pump during work.

[0019] Preferably, the three-stage buffer supporting leg is a rubber pad, and the three-stage buffer supporting leg is arranged below the support plate part through bolt connection. The three-stage buffer supporting leg in this scheme is installed in the same way as the mounting column, and the thickness of the bottom surface of the shell is increased by the support plate part, so that the three-stage buffer supporting leg is more stable.

[0020] Preferably, a bent plate is arranged on the side surface of the mounting plate. The bent plate can provide a mounting surface for the fan, so that the fan can be directly close to the vacuum pump to work, and the heat dissipation efficiency of the vacuum pump is improved.

[0021] The beneficial effects of the utility model are as follows:

[0022] The utility model directly connects the vacuum pump and the shell through the shock-absorbing structure, so that the vibration generated by the vacuum pump during work is reduced by the shock-absorbing structure, noise is also reduced, vibration can be avoided as much as possible from being transmitted to other components through the shell, without occupying too much installation space, resonance of other components in the mass spectrometer inspection equipment is prevented, and the detection accuracy of the equipment and the service life of each component are ensured. BRIEF DESCRIPTION OF DRAWINGS

[0023] To more clearly illustrate the technical solution of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This is a schematic diagram of the internal structure of this utility model;

[0025] Figure 2 This is a schematic diagram of the shock absorption structure of this utility model;

[0026] Figure 3 This is a side view of the shock-absorbing structure of this utility model;

[0027] Figure 4 This utility model Figure 3 Enlarged view of point A in the middle.

[0028] In the above figures, the corresponding reference numerals are as follows:

[0029] 1-Shell, 11-Support plate, 12-Third-stage buffer support, 2-Vacuum pump, 3-Detection unit, 4-Air circuit module, 5-Shock absorption structure, 51-Mounting plate, 52-First-stage shock absorption support column, 521-Mounting column, 522-Support spring, 523-Plug screw, 524-Washer, 53-Second-stage shock absorption column, 54-Connecting plate, 55-Bolt. Detailed Implementation

[0030] The technical solution of the present invention will be clearly and completely described in conjunction with the accompanying drawings and through specific implementation methods of the embodiments of the present invention.

[0031] Example 1:

[0032] A mass spectrometer, such as Figure 1 As shown, the device includes a housing 1, inside which are a vacuum pump 2, a molecular pump, a detection unit 3, a gas path module 4, and solenoid valves that control the opening and closing of each gas path in the gas path module 4. A shock-absorbing structure 5 is provided between the vacuum pump 2 and the inner bottom of the housing 1.

[0033] Specifically, such as Figures 2 to 4As shown, the damping structure 5 includes a mounting plate 51, the vacuum pump 2 is arranged on the mounting plate 51, and a plurality of first shock-absorbing support columns 52 are arranged between the mounting plate 51 and the shell 1. The first shock-absorbing support column 52 includes a mounting column 521 arranged on the bottom of the shell 1, a support spring 522 is sleeved on the mounting column 521, one end of the support spring 522 abuts against the shell 1, and the other end abuts against the mounting plate 51. The mounting column 521 is provided with a threaded hole in the length direction, and a plug screw 523 is threadedly connected to the top of the mounting column 521. The plug screw 523 slides through the mounting plate 51, and limits the upward displacement of the mounting plate 51. In addition, a gasket 524 is arranged between the support spring 522 and the mounting plate 51, so that when high-frequency vibration occurs, the rigidity between the support spring 522 and the mounting plate 51 is reduced, and noise and vibration are reduced.

[0034] It should be noted that the vibration in the mass spectrometry detection device is mainly generated when the vacuum pump 2 is working. The vacuum pump 2 generates heat and vibration when working, and transmits the vibration to the shell 1 through the fixed connection structure, thereby driving other components to vibrate. In the embodiment, the vacuum pump 2 is directly connected to the shell 1 through the damping structure 5, so that the vibration generated by the vacuum pump 2 when working is reduced by the damping structure 5, and the noise is also reduced. The vibration is transmitted to other components through the shell 1 as much as possible, the generation of resonance is prevented, the stability of the detection unit 3 such as the quadrupole rod in the mass spectrometry detection device is ensured, and the detection accuracy of the device is ensured.

[0035] Further, since the damping structure 5 is arranged between the vacuum pump 2 and the bottom surface of the shell 1, the vacuum pump 2 is equivalent to being raised, the internal components of the portable gas leak detection device are installed compactly, and the available space is small. Since the vacuum pump 2 needs to be connected to a controller for control, the controller of the vacuum pump 2 is installed on the mounting plate 51 to reduce the distance between the controller and the vacuum pump 2, avoid long wiring between the two, and save space. The first shock-absorbing support column 52 is preferably arranged at the four corners of the mounting plate 51, and is adapted to the shape of the horizontally placed vacuum pump 2 on the mounting plate 51. The vibration generated by the vacuum pump 2 is transmitted to the shock-absorbing support column 52 as evenly as possible. When the mounting plate 51 vibrates with the vacuum pump 2, the mounting plate 51 slides on the optical axis of the plug screw 523 arranged on the mounting column 521. The mounting plate 51 slides on each first shock-absorbing support column 52. The amplitude of the mounting plate 51 on the four first shock-absorbing support columns 52 is the same, which ensures the stability of the vacuum pump 2 and avoids transmitting the vibration to the shell 1. At the same time, the height of each first shock-absorbing support column 52 is adjusted by rotating the plug screw 523 on each first shock-absorbing support column 52, thereby controlling the height of each first shock-absorbing support column 52 to ensure the horizontal state of the mounting plate 51 in the initial state.

[0036] Embodiment two:

[0037] On the basis of embodiment one, as shown in Figure 2 The damping structure 5 further comprises a secondary damping column 53, the secondary damping column 53 is provided with four mounting plates 51 upper surfaces, the vacuum pump 2 head and tail is provided with a connecting plate 54, the vacuum pump 2 is placed on the secondary damping column 53 as far as possible parallel to the mounting plate 51 through the connecting plate 54.

[0038] Specifically, the secondary damping column 53 on the surface of the mounting plate 51 further supports the vacuum pump 2, so that the vacuum pump 2 has more space for heat dissipation, and the controller support of the vacuum pump 2 can be arranged in the space below the vacuum pump 2, thereby improving the space utilization rate. The secondary damping column 53 is provided with different heights according to the shape of the vacuum pump 2 to ensure that the vacuum pump 2 can be parallel to the mounting plate 51. Since the secondary damping column 53 is directly connected with the vacuum pump 2 and supports the vacuum pump 2 through rubber, it can absorb part of the vibration of the vacuum pump 2, reduce the impact on the supported part of the vacuum pump 2, reduce the vibration noise of the vacuum pump 2 during operation, and ensure the stability of the secondary damping column 53.

[0039] Embodiment two:

[0040] On the basis of embodiment one and embodiment two, as shown in Figure 1 The mounting column 521 is detachably connected to the bottom of the shell 1 through a bolt 55. In order to ensure the stability and reliability of the connection of the mounting column 521, the bolt 55 and the bottom of the shell 1 are provided with a support plate part 11. The bolt 55 passes through the support plate part 11, and the thickness of the bottom bolt hole is increased by additionally providing a support plate part 11 at the bottom, so that the connection of the bolt 55 is more stable.

[0041] Meanwhile, the support plate part 11 is in the shape of a "N" type structure, and the front and rear corners of the support plate part 11 extend out of the bottom of the shell 1. The side surface of the support plate part 11 can protect the side surface and four corners of the shell 1, avoiding damage to these relatively fragile parts of the shell 1.

[0042] Further, the bottom plate of the shell 1 is provided with a third level buffer supporting leg 12, and the bottom of the shell 1 is provided with a third level buffer supporting leg 12. The third level buffer supporting leg 12 is preferably made of rubber pad which is easy to install. The third level buffer supporting leg 12 raises the shell 1, so that the bottom of the shell 1 is suspended, having a certain heat dissipation and moisture-proof effect. Meanwhile, the third level buffer supporting leg 12 can overall dampen the shell 1, so that the entire mass spectrometer can achieve the effect of multi-level damping, effectively avoiding the influence of the vibration of the vacuum pump 2 during operation.

[0043] Specifically, as shown in Figure 3As shown, the tertiary buffering support leg 12 can be connected to the mounting column 521 of the first embodiment by the bolt 55 and arranged below the support plate part 11, and the thickness of the bottom surface of the shell 1 is thickened by the support plate part 11, so that the tertiary buffering support leg 12 is more stable.

[0044] Furthermore, the mounting plate 51 is provided with a bent plate on the side surface, which can provide a mounting surface for the fan, so that the fan can work close to the vacuum pump 2 directly, and the heat dissipation efficiency of the vacuum pump 2 is improved.

[0045] The basic principle, main features and advantages of the present application are shown and described above. It should be understood by those skilled in the art that the present application is not limited by the above embodiments, and the above embodiments and descriptions in the specification are only to illustrate the principles of the present application. Without departing from the spirit and scope of the present application, various changes and improvements can be made to the present application, and these changes and improvements all fall within the scope of the present application.

Claims

1. A mass spectrometer, characterized in that: It includes a housing (1), a vacuum pump (2) is arranged inside the housing (1), and a shock absorption structure (5) is arranged between the vacuum pump (2) and the inner bottom of the housing (1); The shock absorption structure (5) includes a mounting plate (51), the vacuum pump (2) is arranged on the mounting plate (51), and a plurality of primary shock absorption struts (52) are arranged between the mounting plate (51) and the housing (1); The shock absorption structure (5) further includes a secondary shock absorption column (53), the secondary shock absorption column (53) is arranged on the upper surface of the mounting plate (51), a connecting plate (54) is arranged on the vacuum pump (2), and the vacuum pump (2) is placed on the secondary shock absorption column (53) through the connecting plate (54).

2. The mass spectrometer according to claim 1, characterized in that: The primary shock absorption strut (52) includes a mounting column (521) arranged on the inner bottom of the housing (1), a support spring (522) is sleeved on the mounting column (521), one end of the support spring (522) abuts against the housing (1), the other end abuts against the mounting plate (51), a set screw (523) is threadedly connected to the top of the mounting column (521), and the set screw (523) slidably penetrates through the mounting plate (51) to limit the upward displacement of the mounting plate (51).

3. The mass spectrometer according to claim 2, characterized in that: The mounting column (521) is detachably connected to the bottom of the housing (1) through a bolt (55).

4. A mass spectrometer according to claim 3, characterized in that: A support plate portion (11) is arranged at the bottom of the housing (1), and the bolt (55) penetrates through the support plate portion (11).

5. A mass spectrometer according to claim 4, characterized in that: The support plate portion (11) is of a "U" - shaped structure, and the front and rear corners of the support plate portion (11) extend out of the bottom surface of the housing (1).

6. A mass spectrometer according to claim 5, characterized in that: A tertiary buffer support foot (12) is arranged on the bottom plate of the housing (1).

7. A mass spectrometer according to claim 6, characterized in that: The tertiary buffer support foot (12) is a rubber gasket, and the tertiary buffer support foot (12) is connected and arranged below the support plate portion (11) through a bolt (55).

8. A mass spectrometer according to claim 2, characterized in that: ​

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