Reaction device and treatment equipment

Abstract

The utility model relates to a reaction device and treatment equipment, the reaction device comprises a cavity, a gas inlet pipe and a first blocking piece, the cavity is internally provided with a reaction chamber, a gas inlet channel and a gas inlet hole, the reaction chamber is communicated with the gas inlet channel and the gas inlet pipe, the gas inlet hole is communicated with the gas inlet channel and the gas inlet pipe, and the gas inlet pipe is at least partially arranged in the gas inlet channel; a gap is formed between the gas inlet pipe and the gas inlet channel, and the first blocking piece is arranged in the gap and used for blocking gas deposited in the gap from entering the reaction chamber. According to the reaction device provided by the invention, the first blocking piece is arranged in the gap between the gas inlet pipe and the gas inlet channel, so that gas is effectively prevented from entering the reaction chamber through the gap, and the purity of reaction in the reaction chamber is further improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor processing, in particular, to a reaction device and a processing equipment. BACKGROUND

[0002] In the related art field, reaction devices, as the core part of processing equipment, play a crucial role in a variety of industrial and scientific applications. These devices are widely used to drive chemical reactions, physical changes or other key processes, and their core function is to accurately introduce gas into the reaction chamber and promote the reaction of the gas with other substances in the reaction chamber.

[0003] The reaction device of the conventional design usually includes the following key components: a reaction chamber, a gas inlet channel, a gas inlet pipe built in the channel, and a gas inlet hole for conveying gas to the gas inlet pipe. In the working process, the gas enters the gas inlet pipe through the gas inlet hole, and then enters the reaction chamber from the gas inlet pipe to react with the substances in the reaction chamber. In order to facilitate cleaning and replacement of the gas inlet pipe, the gas inlet pipe is usually detachably arranged in the gas inlet channel, so that a certain space is left between the two.

[0004] However, in the process of injecting gas from the gas inlet hole into the gas inlet pipe, since the gas inlet hole is communicated with the gas inlet channel, part of the gas will enter the above-mentioned space and then enter the reaction chamber through the above-mentioned space. With the passage of time, these gases will also deposit in the above-mentioned space, and when the reaction chamber is heated, these deposits will be converted into gas and diffuse into the reaction chamber, thereby bringing in impurities and causing certain interference to the normal reaction of the reaction chamber. CONTENT OF THE INVENTION

[0005] The present application discloses a reaction device and a processing equipment, which are used to solve the problem that gas enters the reaction chamber through the above-mentioned space, affecting the purity of the reaction chamber.

[0006] In a first aspect, the present application provides a reaction device, comprising: a cavity, the cavity being provided with a reaction chamber, a gas inlet channel and a gas inlet hole, the reaction chamber being communicated with the gas inlet channel, and the gas inlet channel being communicated with the gas inlet hole; a gas inlet pipe, the gas inlet pipe being communicated with the reaction chamber, and the gas inlet pipe being communicated with the gas inlet hole, the gas inlet pipe being at least partially arranged in the gas inlet channel, and the gas inlet pipe and the gas inlet channel having a gap therebetween; and a first blocking member, the first blocking member being arranged in the gap and being used to block gas from entering the reaction chamber through the gap. Since the gas inlet hole is communicated with the gas inlet channel and the gas inlet pipe, and the reaction chamber is communicated with the gas inlet channel and the gas inlet pipe, after injecting gas into the gas inlet hole, a first flow path from the gas inlet hole, the gas inlet pipe and the reaction chamber and a second flow path from the gas inlet hole, the gap and the reaction chamber are formed. The first blocking member is arranged in the gap between the gas inlet pipe and the gas inlet channel, and since the second flow path is blocked by the first blocking member, the gas can be blocked from flowing into the reaction chamber through the gap, thereby improving the purity of the reaction in the reaction chamber.

[0007] In a possible implementation, the first blocking member separates the gap into a first gap close to the gas inlet hole and a second gap away from the gas inlet hole, and the first blocking member blocks the gas in the first gap from entering the reaction chamber. In this implementation, after the gas is injected into the gas inlet hole, the gas first enters the first gap, and due to the presence of the first blocking member, the gas is blocked in the first gap and cannot enter the second gap, and thus cannot enter the reaction chamber, thereby preventing the gas from entering the reaction chamber through the gap, ensuring the uniformity and stability of the gas distribution in the reaction chamber, and improving the reaction efficiency and reaction effect.

[0008] In a possible implementation, the first gap has a first end away from the gas inlet hole, and the distance between the first end and the gas inlet hole in the first direction is within the range of (0 cm, 1 cm]. This implementation limits the gap distance, on the one hand, reducing the accumulation space of the deposition gas in the first gap, and on the other hand, reducing the amount of gas entering the gap, improving the gas inlet efficiency.

[0009] In a possible implementation, the gas inlet pipe is provided with a gas outlet, the gas inlet channel is provided with an opening for the gas inlet pipe to enter and exit, and the opening is provided with a second blocking member. After the gas flows out of the gas outlet, the second blocking member blocks the gas from flowing into the second gap. This implementation can effectively avoid the deposition of gas in the second gap by arranging the second blocking member at the opening of the gas inlet channel, thereby improving the purity of the reaction.

[0010] In a possible implementation, the second blocking member is arranged on one of the outer side wall of the gas inlet pipe, the inner side wall of the gas inlet channel, and the opening. This implementation specifies the installation position of the second blocking member, simplifies the structure on the basis of ensuring that the gas flows in a predetermined path and manner.

[0011] In a possible implementation, the first blocking member allows the gas inlet pipe and the gas inlet channel to move relative to each other in the first direction. Since the first blocking member can block the gas from flowing into the reaction chamber through the gap while allowing the gas inlet pipe to slide in the gas inlet channel, it can block the gas from flowing into the reaction chamber through the gap, improve the purity of the reaction in the reaction chamber, and also consider the convenience of operation.

[0012] In a possible implementation, the first blocking member is an elastic member, and the inner diameter of the first blocking member is smaller than the outer diameter of the gas inlet pipe, or / and the outer diameter of the first blocking member is larger than the inner diameter of the gas inlet channel. This implementation ensures the close contact between the first blocking member and the gas inlet pipe or / and the gas inlet channel by arranging the elastic blocking member in the gap, improves the blocking effect, and further reduces the possibility of the gas entering the reaction chamber.

[0013] In a possible implementation, the first blocking member is fixed to one of the air inlet pipe and the air inlet passage. This implementation provides a specific fixing manner of the first blocking member, and enables the first blocking member to closely adhere to the inner wall of the air inlet pipe and / or the air inlet passage, thereby forming a reliable blocking layer and improving the blocking effect.

[0014] In a possible implementation, the first blocking member is fixed to the air inlet pipe, and the first blocking member is fixed to the outer side wall of the air inlet pipe. This implementation specifies the fixing position of the first blocking member, facilitates installation and maintenance, and improves the stability of the first blocking member.

[0015] In a possible implementation, the outer side wall of the air inlet pipe is provided with a first fixing position, and the first blocking member is arranged at the first fixing position. This implementation provides a specific fixing position of the first blocking member on the air inlet pipe, and ensures that the first blocking member does not fall off during the movement of the air inlet pipe into and out of the air inlet passage, thereby improving the fixing strength of the first blocking member.

[0016] In a possible implementation, the first fixing position is at least one of a groove and a protrusion. This implementation provides a specific form of the first fixing position, facilitates processing and installation, and improves the installation flexibility and stability of the first blocking member through diversified fixing position forms.

[0017] In a possible implementation, the first blocking member is fixed to the air inlet passage, and the first blocking member is fixed to the inner side wall of the air inlet passage. Since the first blocking member only generates resistance to the air inlet pipe during part of the movement of the air inlet pipe, the through resistance of the air inlet pipe is reduced, and the operation convenience is improved.

[0018] In a possible implementation, the inner side wall of the air inlet passage is provided with a second fixing position, and the first blocking member is arranged at the second fixing position. This implementation provides a specific fixing position of the first blocking member on the air inlet passage, and ensures accurate installation of the first blocking member through the second fixing position, so that the first blocking member is prevented from moving with the air inlet pipe, and the risk of falling off of the first blocking member is reduced.

[0019] In a possible implementation, the second fixing position is at least one of a groove and a protrusion. This implementation provides a specific form of the first fixing position, facilitates processing and installation, and improves the installation flexibility and stability of the first blocking member through diversified fixing position forms.

[0020] In a possible implementation, the first blocking member comprises a fixing part and a blocking part, the fixing part is fixed to the air inlet pipe or the air inlet channel, the blocking part extends from the fixing part to the second direction, and the blocking part is arranged protruding relative to the fixing part. In this implementation, by arranging the blocking part protruding relative to the fixing part instead of arranging the fixing part and the blocking part flush, the resistance of the air inlet pipe entering or exiting the air inlet channel can be reduced, and the difficulty of the air inlet pipe entering or exiting the air inlet channel is reduced.

[0021] In a possible implementation, a clearance slot is arranged between the fixing part and the blocking part, and the clearance slot is used for giving way to the blocking part when the air inlet pipe enters or exits the air inlet channel. In this implementation, by arranging the clearance slot between the fixing part and the blocking part, the clearance slot gives way to the blocking part when the air inlet pipe enters or exits the air inlet channel, so that the blocking effect of the first blocking member is maintained while allowing the air inlet pipe to enter or exit the air inlet channel, and the flexibility of the reaction device is improved.

[0022] In a second aspect, the application provides a processing device comprising the reaction device provided in the above embodiments. The processing device provided in the embodiments of the application can make the process gas enter the reaction device along the preset path, and ensure the purity of the reaction inside the reaction device. BRIEF DESCRIPTION OF DRAWINGS

[0023] In order to more clearly illustrate the technical solutions in the embodiments of the application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description are only some embodiments of the application, and for those skilled in the art, other drawings can also be obtained without creative labor based on these drawings.

[0024] Figure 1 is a plan view of the reaction device in the embodiments of the application;

[0025] Figure 2 is a sectional view along the line I-I in Figure 1

[0026] Figure 3 is a structural view of the air inlet pipe in the embodiments of the application;

[0027] Figure 4 is a structural view of the first blocking member in the embodiments of the application;

[0028] Figure 5 is a local enlarged view of part A in Figure 2

[0029] Figure 6 is a structural diagram of the processing device.

[0030] Explanation of reference signs:

[0031] 1 - processing device;​​

[0032] 10-Reaction apparatus; 101-Cavity; 102-Inlet pipe; 103-First blocking component; 104-Second blocking component; 105-Gap;

[0033] 1011-Reaction chamber; 1012-Inlet channel; 1013-Inlet hole; 1021-Inlet; 1022-Outlet; 1023-First fixed position; 1024-First inlet section; 1025-Second inlet section; 1031-Fixing section; 1032-Baffle section; 1033-Relief groove; 1051-First gap; 1052-Second gap;

[0034] 10121 - Opening;

[0035] 20 - Gas supply device;

[0036] 30 - Control device. Detailed Implementation

[0037] This application provides a reaction apparatus applicable to processing equipment such as CVD (Chemical Vapor Deposition) equipment, PVD (Physical Vapor Deposition) equipment, etching equipment, and EPI (Epitaphing) equipment. Figure 6 As shown, the processing equipment 1 includes a reaction unit 10, a gas supply unit 20, and a control unit 30. The reaction unit 10 is responsible for performing the required processing on the workpiece, such as heat treatment, chemical vapor deposition, and etching. The gas supply unit 20 provides the necessary gas input to the reaction unit 10, such as reactant gases and carrier gases, to support the processing. The gas supply unit 20 typically includes components such as a gas source, gas flow controller, and valves to ensure precise control and stable gas supply. The control unit 30 is responsible for the operation control, parameter setting, status monitoring, and fault diagnosis of the processing equipment 1. Employing advanced control systems and algorithms, it can achieve precise control of the reaction unit 10 and the gas supply unit 20, ensuring the stability and consistency of the processing.

[0038] When processing equipment 1 is operating, control device 30 sends instructions to gas supply device 20 according to preset process parameters and programs to control the gas flow rate and pressure. Gas supply device 20 then inputs precisely controlled gas into reaction device 10. Reaction device 10 uses these gases to perform process treatments on the workpiece, such as heating or chemical reactions. Throughout the process, control device 30 continuously monitors the operating status and process parameters of the equipment to ensure the stability and accuracy of the processing.

[0039] With reference to the drawings and the embodiments of the present application, the technical solutions in the embodiments of the present application will be described clearly and completely. Obviously, the described embodiments are some of the embodiments of the present application, but not all of the embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts are within the scope of the present application.

[0040] The term "and / or" used in the present application is only used to describe an association relationship of associated objects, and means that three relationships can exist, for example, A and / or B can mean that A exists alone, A and B exist together, and B exists alone.

[0041] The terms "first" and "second" and the like in the specification and claims of the embodiments of the present application are used to distinguish different objects, and are not used to describe a specific order of the objects. For example, the first target object and the second target object are used to distinguish different target objects, and are not used to describe a specific order of the target objects.

[0042] In the embodiments of the present application, the words "exemplary" or "for example" are used to mean serving as an example, instance, or illustration. Any embodiment or design solution described as "exemplary" or "for example" in the embodiments of the present application should not be interpreted as being more preferred or advantageous than other embodiments or design solutions. Rather, the use of the words "exemplary" or "for example" is intended to present relevant concepts in a specific way.

[0043] In the description of the embodiments of the present application, unless otherwise specified, the meaning of "a plurality of" is two or more. For example, a plurality of processing units means two or more processing units; a plurality of systems means two or more systems.

[0044] The embodiments of the present application provide a reaction device, which is designed to reduce the gap flow and deposition of gas between the gas inlet channel and the gas inlet pipe, and prevent the gas from entering the reaction chamber through the gap, so as to ensure the purity of the reaction in the reaction device. The following is a detailed description of the specific embodiments of the present application.

[0045] As Figure 1 , Figure 2 and Figure 3As shown, the reaction device 10 of the embodiment of the present application comprises a cavity 101, a gas inlet pipe 102 and a first blocking member 103. The cavity 101 is provided with a gas inlet hole 1013, a gas inlet channel 1012 and a reaction chamber 1011. The gas inlet hole 1013 is in communication with the gas inlet channel 1012, and the gas inlet channel 1012 is in communication with the reaction chamber 1011. The gas inlet pipe 102 is at least partially arranged in the gas inlet channel 1012. The gas inlet pipe 102 is in communication with the gas inlet hole 1013 and the reaction chamber 1011. The gas inlet pipe 102 and the gas inlet channel 1012 have a gap 105 therebetween. The first blocking member 103 is arranged in the gap 105 to block the gas from entering the reaction chamber 1011 through the gap 105.

[0046] Specifically, the cavity 101 provides a gas inlet space and a reaction space for the reaction device 10. The gas inlet space comprises the gas inlet hole 1013 and the gas inlet channel 1012, and the reaction space comprises the reaction chamber 1011. The cavity 101 has two states of being closed or semi-closed. When the reaction device 10 is undergoing a reaction, the cavity 101 is in the closed state. When the reaction device 10 is being supplied with gas, the cavity 101 is in the semi-closed state.

[0047] In some embodiments, the cavity 101 is made of metal material, which can ensure the structural integrity and functional stability of the cavity 101 during the reaction process.

[0048] Specifically, the gas inlet hole 1013 is the entrance for the gas to enter the gas inlet channel 1012 and is in communication with the gas inlet channel 1012, so as to introduce the gas required for the reaction into the gas inlet channel 1012.

[0049] Specifically, since the gas inlet channel 1012 is inconvenient to clean and replace, the gas inlet pipe 102 which can be detached from and installed in the gas inlet channel 1012 is arranged in the gas inlet channel 1012, so as to allow the gas to flow from the gas inlet pipe 102 into the reaction chamber 1011. In order to facilitate the gas inlet pipe 102 to enter and exit the gas inlet channel 1012, a gap 105 is arranged between the outer side wall of the gas inlet pipe 102 and the inner side wall of the gas inlet channel 1012 (i.e. the outer diameter of the gas inlet pipe 102 is smaller than the inner diameter of the gas inlet channel 1012). The gap 105 can reduce the friction generated when the gas inlet pipe 102 is detached and installed, thereby facilitating the gas inlet pipe 102 to enter and exit the gas inlet channel 1012. The gas inlet pipe 102 has a gas inlet port 1021 and a gas outlet port 1022 at two ends thereof. The gas inlet pipe 102 is in communication with the gas inlet hole 1013 through the gas inlet port 1021, and the gas inlet pipe 102 is in communication with the reaction chamber 1011 through the gas outlet port 1022. Since the gas inlet port 1021 is larger than the gas inlet hole 1013, the gas entering from the gas inlet hole 1013 can easily flow into the gap 105 from the gas inlet port 1021.

[0050] In some embodiments, the gas inlet tube 102 has at least one, at least one gas inlet tube 102 is arranged in the gas inlet channel 1012, the gas inlet tube 102 includes Figure 2 or Figure 3 The first gas inlet part 1024 (the part on the right of the dashed line) and the second gas inlet part 1025 (the part on the left of the dashed line) are separated by a dashed line, the first gas inlet part 1024 communicates with the second gas inlet part 1025. The first gas inlet part 1024 is close to the gas inlet hole 1013 and communicates with the gas inlet hole 1013, and the second gas inlet part 1025 is close to the reaction chamber 1011 and communicates with the reaction chamber 1011. The second gas inlet part 1025 is arranged outside the gas inlet channel 1012, on the one hand, it is convenient for the operator to hold the second gas inlet part 1025, and the gas inlet tube 102 can be quickly disassembled and installed from the gas inlet channel 1012, on the other hand, it is convenient for the gas to flow into the reaction chamber 1011 from a specific direction to meet the needs of the reaction. The first gas inlet part 1024 is arranged in the gas inlet channel 1012, and the first gas inlet part 1024 and the gas inlet channel 1012 have a gap 105.

[0051] In some embodiments, the gas flow path in the gas inlet tube 102 is in the shape of "L", and the L-shaped gas inlet tube 102 helps to more evenly distribute the gas into the reaction chamber 1011, because in the process of gas turning, the gas flow can form vortex or turbulent flow.

[0052] In some embodiments, the gas inlet tube 102 is a transparent piece. Specifically, the gas inlet tube 102 is a quartz tube. Since the reaction device 10 needs to be heated during operation, the quartz tube can withstand high temperature environment without deformation or damage, and the gas introduced and the substances generated in the reaction chamber 1011 during the reaction are often corrosive. Using a quartz tube can effectively prevent corrosion of the pipeline by the gas and the reaction products, prolong the service life of the pipeline, and ensure the stability and safety of the reaction process. In addition, after the gas inlet tube 102 is removed, the transparent arrangement can help the operator to timely discover potential safety hazards such as foreign matter, cracks or corrosion in the pipeline, so as to take timely measures to avoid accidents.

[0053] In some embodiments, if the gas inlet tube 102 has a bottom wall close to the gas inlet hole 1013, the gap 105 in the present embodiment includes the gap between the outer side wall of the gas inlet tube 102 and the inner side wall of the gas inlet channel 1012, and the gap between the bottom wall of the gas inlet tube 102 and the bottom wall of the gas inlet channel 1012.

[0054] In order to ensure the purity of the reaction in the reaction chamber 1011, the first blocking member 103 is arranged in the gap 105 between the gas inlet pipe 102 and the gas inlet passage 1012 to block the gas (or possible impurities, deposits, etc.) deposited in the gap 105 from entering the reaction chamber 1011 and to block the gas entering from the gas inlet hole 1013 from entering the reaction chamber 1011 through the gap 105. The first blocking member 103 can fill the entire gap 105 or fill part of the gap 105. If the first blocking member 103 fills the entire gap 105, it has a larger contact area with the gas inlet passage 1012 or the gas inlet pipe 102, which will introduce a larger frictional force during the process of the gas inlet pipe 102 entering and exiting the gas inlet passage 1012. Therefore, in actual application, the first blocking member 103 is arranged to be able to fill part of the gap 105. If the gas inlet pipe 102 has a bottom wall and a side wall, the first blocking member 103 can be arranged between the bottom wall of the gas inlet pipe 102 and the bottom wall of the gas inlet passage 1012, or arranged between the side wall of the gas inlet pipe 102 and the side wall of the gas inlet passage 1012. If the gas inlet pipe 102 only has a side wall, the first blocking member 103 is only arranged between the outer side wall of the first gas inlet part 1024 and the inner side wall of the gas inlet passage 1012.

[0055] In some embodiments, the first blocking member 103 needs to be interference-fitted with the gas inlet passage 1012 or / and the gas inlet pipe 102. Since the first blocking member 103 needs to ensure that the gas inlet pipe 102 can enter the gas inlet passage 1012 and block the gas from entering the reaction chamber 1011 through the gap 105, the first blocking member 103 is tightly fitted with the gas inlet passage 1012 or / and the gas inlet pipe 102 to avoid the gas or deposits from entering the reaction chamber 1011, thereby improving the blocking effect.

[0056] In some embodiments, the first blocking member 103 is a structural member that deforms under external force, which can reduce the friction between itself and the side wall during the process of putting in or taking out the gas inlet pipe 102, thereby facilitating the smoother putting in and taking out of the gas inlet pipe 102.

[0057] In some embodiments, the cross-sectional shape of the first blocking member 103 is "mountain" type, which facilitates the installation and disassembly of the gas inlet pipe 102.

[0058] In the embodiment of the present application, since the gas inlet hole 1013 is in communication with the gas inlet channel 1012 and the gas inlet pipe 102, and the reaction chamber 1011 is in communication with the gas inlet channel 1012 and the gas inlet pipe 102, after the gas is injected into the gas inlet hole 1013, a first flow path from the gas inlet hole 1013, the gas inlet pipe 102 and the reaction chamber 1011 and a second flow path from the gas inlet hole 1013, the gap 105 and the reaction chamber 1011 are formed. The first blocking piece 103 is arranged in the gap 105 between the gas inlet pipe 102 and the gas inlet channel 1012. Since the second flow path is blocked by the first blocking piece 103, the gas is prevented from flowing into the reaction chamber 1011 from the gap 105, and the gas deposited in the gap 105 is prevented from entering the reaction chamber 1011, thereby improving the reaction purity.

[0059] Further, as shown in Figure 1 、 Figure 2 and Figure 5 , the first blocking piece 103 is used to divide the gap 105 into a first gap 1051 close to the gas inlet hole 1013 and a second gap 1052 close to the reaction chamber 1011, and the first blocking piece 103 is used to prevent the gas in the first gap 1051 from entering the reaction chamber 1011.

[0060] Specifically, taking the case that the first blocking piece 103 is arranged in the gap 105 between the outer side wall of the gas inlet pipe 102 and the inner side wall of the gas inlet channel 1012 as an example. The first blocking piece 103 divides the outer side wall of the gas inlet pipe 102 into a first outer side wall close to the gas inlet hole 1013 and a second outer side wall close to the reaction chamber 1011, and divides the side wall of the gas inlet channel 1012 into a first inner side wall close to the gas inlet hole 1013 and a second inner side wall close to the reaction chamber 1011. The first gap 1051 is a first space surrounded by the first blocking piece 103, the first outer side wall close to the gas inlet hole 1013, the first inner side wall close to the gas inlet hole 1013 and the bottom wall of the gas inlet channel 1012, and the second gap 1052 is a second space surrounded by the first blocking piece 103, the second outer side close to the reaction chamber 1011 and the second inner side wall close to the reaction chamber 1011. The first blocking piece 103 prevents the gas from flowing from the first space into the second space, thereby preventing the gas from entering the reaction chamber 1011 through the second gap 1052.

[0061] In the embodiment of the present application, after the gas enters from the gas inlet hole 1013, it first enters the first gap 1051. Due to the presence of the first blocking piece 103, the gas is blocked in the first gap 1051 and cannot enter the second gap 1052, and thus cannot enter the reaction chamber 1011, thereby preventing the gas from entering the reaction chamber 1011 through the gap 105, ensuring the uniformity and stability of the gas distribution in the reaction chamber 1011, and improving the reaction efficiency and reaction effect.

[0062] Further, as shown inFigure 1 and Figure 5 As shown in FIG. 1 1, the first gap 1051 has a first end away from the air inlet hole 1013, and the distance between the first end and the air inlet hole 1013 in the first direction is within the range of (0cm, 1cm].

[0063] Specifically, the first direction is the flow direction of the gas in the air inlet channel 1012. Alternatively, the first direction is the horizontal direction. It can be understood that if the first blocking piece 103 is arranged in the gap 105 between the outer side wall of the air inlet pipe 102 and the inner side wall of the air inlet channel 1012, the first gap 1051 is a first space surrounded by the first blocking piece 103, the first outer side wall close to the air inlet hole 1013, the first inner side wall close to the air inlet hole 1013, and the bottom wall of the air inlet channel 1012, and the first space has a first end away from the air inlet hole 1013 (i.e., the first end is the side of the first blocking piece 103 close to the air inlet hole 1013), and the distance between the first end and the air inlet hole 1013 in the first direction is within the range of (0cm, 1cm].

[0064] In the embodiment of the present application, since the air inlet hole 1013 and the air inlet channel 1012 are in communication with the air inlet pipe 102, and the gap 105 is arranged between the air inlet hole 1013 and the air inlet channel 1012, the first blocking piece 103 divides the gap 105 into the first gap 1051 close to the air inlet hole 1013 and the second gap 1052 close to the reaction chamber 1011. Since the first gap 1051 is close to the air inlet hole 1013, after the gas enters from the air inlet hole 1013, it is easy to enter the first gap 1051. In order to make less gas enter the first gap 1051, the first space formed by the first gap 1051 needs to be small enough, so the distance between the first end and the air inlet hole 1013 in the first direction is set to be greater than 0cm and less than or equal to 1cm, so that less gas enters the first gap 1051 and the deposition of the gas in the first gap 1051 is reduced, and the gas inlet efficiency is improved.

[0065] Further, as shown in FIG. 1 1 and FIG. 12, Figure 1 , Figure 2 , Figure 3 , Figure 5 As shown in FIG. 1 1 and FIG. 12, since the air inlet pipe 102 is provided with an air outlet 1022, the air inlet channel 1012 is provided with an opening 10121 for the air inlet pipe 102 to enter and exit, and the second blocking piece 104 is arranged at the opening 10121. After the gas flows out from the air outlet 1022, the second blocking piece 104 blocks the gas from flowing into the second gap 1052.

[0066] Specifically, the gas inlet pipe 102 includes a gas inlet 1021 close to the gas inlet hole 1013 and a gas outlet 1022 close to the reaction chamber 1011. The gas inlet pipe 102 communicates with the gas inlet hole 1013 through the gas inlet 1021, and the gas inlet pipe 102 communicates with the reaction chamber 1011 through the gas outlet 1022. When the gas enters from the gas inlet hole 1013, the gas enters the reaction chamber 1011 through the gas inlet 1021, the gas inlet pipe 102 and the gas outlet 1022. Since the opening 10121 for the gas inlet pipe 102 to enter and exit is arranged on the gas inlet channel 1012, the gas reaching the reaction chamber 1011 will flow back to the second gap 1052. In order to avoid the backflow of the gas to the second gap 1052, a second blocking piece 104 is arranged at the opening 10121 of the gas inlet channel 1012. The second blocking piece 104 blocks the gas from flowing into the second gap 1052.

[0067] It should be noted that the second blocking piece 104 is arranged at a position such that the gas no longer flows back to the second gap 1052. Therefore, the second blocking piece 104 is arranged at the position of the opening 10121. For example, the second blocking piece 104 can be arranged on the opening 10121, or arranged in the gap 105 between the gas inlet pipe 102 and the gas inlet channel 1012 and flush with the opening 10121, or arranged in the gap 105 between the gas inlet pipe 102 and the gas inlet channel 1012 and protruding from the opening 10121.

[0068] In some embodiments, the second blocking piece 104 can be parallel to the first blocking piece 103, and the shape and material of the second blocking piece 104 can be the same as those of the first blocking piece 103, which is not limited here.

[0069] In some embodiments, the second blocking piece 104 is an elastic piece, or the part of the second blocking piece 104 located in the gap 105 is an elastic piece.

[0070] In the embodiments of the present application, since the first blocking piece 103 divides the gap 105 into the first gap 1051 and the second gap 1052, although the first blocking piece 103 blocks the gas from flowing from the first gap 1051 to the second gap 1052, since the second gap 1052 communicates with the reaction chamber 1011, the gas flowing into the reaction chamber 1011 will still flow back to the second gap 1052, which will cause the gas to deposit in the second gap 1052. The deposited gas will enter the reaction chamber 1011 under certain conditions, affecting the purity of the reaction chamber 1011. Therefore, by arranging the second blocking piece 104 at the opening 10121 of the gas inlet channel 1012, the deposition of the gas in the second gap 1052 can be effectively avoided, and the purity of the reaction is improved.

[0071] Further, as Figure 1 , Figure 2 and Figure 5As shown, the second blocking member 104 is arranged on one of the outer side wall of the air inlet pipe 102, the inner side wall of the air inlet passage 1012 and the opening 10121.

[0072] Specifically, if the second blocking member 104 is arranged on the outer side wall of the air inlet pipe 102, the second blocking member 104 can be arranged at the position of the opening 10121 of the air inlet pipe 102, in which case the second blocking member 104 is flush with or protrudes from the opening 10121, and the second blocking member 104 is in interference fit with the inner side wall of the air inlet passage 1012. If the second blocking member 104 is arranged on the inner side wall of the air inlet passage 1012, the second blocking member 104 can be arranged at the position of the opening 10121, in which case the second blocking member 104 is flush with or protrudes from the opening 10121, and the second blocking member 104 is in interference fit with the outer side wall of the air inlet pipe 102.

[0073] In the embodiment of the present application, since the gas needs to be blocked from entering the second gap 1052 from the reaction chamber 1011, the second blocking member 104 is arranged at the opening 10121, and on the basis of the second gap 1052 formed by the air inlet pipe 102 and the air inlet passage 1012, the second blocking member 104 is arranged on the air inlet pipe 102 or / and the air inlet passage 1012, which simplifies the structure on the basis of ensuring the gas to flow in a predetermined path and manner.

[0074] Further, as shown, Figure 1 The first blocking member 103 allows the air inlet pipe 102 and the air inlet passage 1012 to move relatively in the first direction.

[0075] Specifically, the first blocking member 103 needs to have a dual role, one is to block the gas from flowing into the reaction chamber 1011 from the gap 105 between the air inlet pipe 102 and the air inlet passage 1012, and the other is to allow the air inlet pipe 102 and the air inlet passage 1012 to move relatively in the first direction (i.e. the air inlet pipe 102 can be easily installed or removed from the air inlet passage 1012 under the action of an external force). Under this premise, when the first blocking member 103 is installed or removed from the air inlet passage 1012, the first blocking member 103 needs to be subjected to a smaller frictional force (such as less than 20N), and therefore the connection mode of the first blocking member 103 with the air inlet pipe 102 or / and the air inlet passage 1012 can be set as a sliding seal connection.

[0076] In the embodiment of the present application, since the first blocking member 103 can not only block the gas from entering the reaction chamber 1011 through the gap 105 between the air inlet pipe 102 and the air inlet passage 1012, but also allow the air inlet pipe 102 to enter and exit the air inlet passage 1012, the first blocking member 103 can slide in the air inlet passage 1012 while achieving blocking, which improves the operation convenience while improving the reaction sealing degree.

[0077] Further, as shown in Figure 1 and Figure 2 , the first blocking member 103 is an elastic member, and the inner diameter of the first blocking member 103 is smaller than the outer diameter of the air inlet pipe 102, or / and the outer diameter of the first blocking member 103 is larger than the inner diameter of the air inlet passage 1012.

[0078] Specifically, since the gap 105 needs to be sealed and the air inlet pipe 102 needs to be able to enter and exit the air inlet passage 1012, the first blocking member 103 is an elastic member, and the size of the first blocking member 103 is set to be slightly larger than the size of the gap 105. To achieve the above purpose, the inner diameter of the first blocking member 103 can be set to be smaller than the outer diameter of the air inlet pipe 102, so that the side of the blocking member close to the air inlet pipe 102 can tightly fit the outer sidewall of the air inlet pipe 102. The outer diameter of the first blocking member 103 can also be set to be larger than the inner diameter of the air inlet passage 1012, so that the side of the blocking member close to the air inlet passage 1012 can tightly fit the inner sidewall of the air inlet passage 1012.

[0079] In some embodiments, the first blocking member 103 is a rubber member or a silicone member. Since rubber or silicone has both elasticity and durability, the service life of the first blocking member 103 can be guaranteed. Optionally, the first blocking member 103 is a silicone sealing ring.

[0080] In some embodiments, since the air inlet pipe 102 is arranged in the air inlet passage 1012, the gap 105 formed by the air inlet pipe 102 and the air inlet passage 1012 is annular, and therefore the first blocking member 103 is annular. Since the annular shape fits the shape of the gap 105, the first blocking member 103 can more tightly fit the air inlet pipe 102 and the air inlet passage 1012, and the blocking effect can be improved.

[0081] In the embodiments of the present application, by setting the first blocking member 103 as an elastic member, it can be ensured that the air inlet pipe 102 can enter and exit the air inlet passage 1012. By setting the inner diameter of the first blocking member 103 to be smaller than the outer diameter of the air inlet pipe 102, or / and setting the outer diameter of the first blocking member 103 to be larger than the inner diameter of the air inlet passage 1012, the first blocking member 103 can be in interference fit with the air inlet pipe 102 or / and the air inlet passage 1012, ensuring the tight contact between the first blocking member 103 and the air inlet pipe 102 or the air inlet passage 1012, thereby guaranteeing the blocking effect and further reducing the possibility of gas entering the reaction chamber 1011.

[0082] Further, as shown in Figure 1 and Figure 2 , the first blocking member 103 is fixed to one of the air inlet pipe 102 or the air inlet passage 1012.

[0083] Specifically, when the first blocking member 103 is fixed to the intake pipe 102, if the intake pipe 102 has a bottom wall and a side wall, the first blocking member 103 is fixed to the bottom wall or the side wall of the intake pipe 102; if the intake pipe 102 only has a side wall, the first blocking member 103 can only be fixed to the side wall of the intake pipe 102. When the first blocking member 103 is fixed to the intake channel 1012, the first blocking member 103 can be fixed to the side wall or the bottom wall of the intake channel 1012.

[0084] In this embodiment, the first blocking member 103 is fixed to either the intake pipe 102 or the intake channel 1012 to effectively block the gas. Since the first blocking member 103 can fit tightly against the inner wall of the intake pipe 102 and / or the intake channel 1012 after being fixed, a reliable blocking layer is formed, thereby improving the blocking effect.

[0085] Furthermore, the first blocking member 103 is fixed to the air intake pipe 102, and the first blocking member 103 is fixed to the outer wall of the air intake pipe 102.

[0086] Specifically, the first blocking member 103 can be fixed to the outer wall of the intake pipe 102 in the following ways: the first blocking member 103 is directly pressed onto the outer wall of the intake pipe 102, and fixed by its own elasticity and friction; a snap-fit ​​structure is designed on the outer wall of the intake pipe 102, and the first blocking member 103 is fixedly connected to the intake pipe 102 by snap-fit; a threaded hole is designed on the outer wall of the intake pipe 102, and the first blocking member 103 is threadedly connected to the intake pipe 102 by a threaded fastener (such as a bolt or nut).

[0087] In this embodiment, since the first blocking member 103 is tightly fitted onto the outer wall of the air intake pipe 102, the first blocking member 103 can move with the air intake pipe 102 when the air intake pipe 102 enters and exits the air intake channel 1012, which facilitates cleaning and replacement of the first blocking member 103 and improves the convenience of operation.

[0088] Furthermore, such as Figure 1 , Figure 2 and Figure 3 As shown, the outer wall of the intake pipe 102 is provided with a first fixing position 1023, and the first blocking member 103 is provided at the first fixing position 1023.

[0089] Specifically, the first fixing position 1023 is used to fix the first blocking member 103. The position of the first fixing position 1023 corresponds to the position of the first blocking member 103. The first fixing position 1023 can make the first blocking member 103 firmly fixed on the intake pipe 102, so that it will not fall off even when the intake pipe 102 enters and exits the intake channel 1012.

[0090] In the embodiment of the present application, the first fixed position 1023 is arranged on the air inlet pipe 102, so that the first blocking piece 103 cannot fall off during the process of the air inlet pipe 102 entering and leaving the air inlet channel 1012, and the fixing strength of the first blocking piece 103 is improved.

[0091] Further, the first fixed position 1023 is at least one of a groove and a protrusion.

[0092] Specifically, when the first fixed position 1023 is a groove, the thickness of the air inlet pipe 102 is greater than the depth of the groove, so as to avoid forming a ring-shaped opening due to the groove and increasing the probability of gas entering the gap 105; when the first fixed position 1023 is a protrusion, the size of the protrusion in the second direction is less than the size of the gap 105 in the second direction, so as to provide a containing space for the first blocking piece 103. The second direction is the radial direction of the air inlet channel 1012 and is perpendicular to the first direction.

[0093] In the embodiment of the present application, if the first fixed position 1023 is a groove, a protrusion corresponding to the groove is arranged on the first blocking piece 103, and the fixing strength can be improved by arranging the first fixed position 1023 not to exceed the outer diameter of the air inlet pipe 102. If the first fixed position 1023 is a protrusion, a groove corresponding to the protrusion is arranged on the first blocking piece 103, and the air inlet efficiency of the air inlet pipe 102 is improved by arranging the protrusion on the first fixed position 1023, because the first fixed position does not reduce the air inlet size of the air inlet pipe 102. The present application provides various forms of fixed positions, so as to improve the installation flexibility and stability of the first blocking piece 103.

[0094] Further, the first blocking piece 103 is fixed to the air inlet channel 1012, and the first blocking piece 103 is fixed to the inner side wall of the air inlet channel 1012.

[0095] Specifically, arranging the first blocking piece 103 on the inner side wall of the air inlet channel 1012 includes arranging the first blocking piece 103 in the gap 105 or arranging the first blocking piece 103 at the end of the gap 105. If the first blocking piece 103 is arranged in the gap 105, the first blocking piece 103 is not easy to fall off from the end of the air inlet channel 1012 when the air inlet pipe 102 is installed or dismounted on the air inlet channel 1012, so the fixing strength of the first blocking piece 103 is improved. When the first blocking piece 103 is arranged at the end of the gap 105, the first blocking piece 103 is fixed at the opening 10121 of the air inlet channel 1012, and since there is no second gap 1052, the second blocking piece 104 does not need to be arranged, so that a better blocking effect can be achieved while ensuring a simple structure.

[0096] Specifically, the manner in which the first blocking piece 103 is fixed to the inner side wall of the air inlet channel 1012 includes the following: the first blocking piece 103 is directly press-fitted onto the inner side wall of the air inlet channel 1012, and is fixed by using its own elasticity and friction; the inner side wall of the air inlet channel 1012 is designed with a clamping structure, and the first blocking piece 103 is fixedly connected to the air inlet channel 1012 by clamping; or a threaded hole is designed on the outer side wall of the air inlet pipe 102, and the first blocking piece 103 is threadedly connected to the air inlet pipe 102 by using a threaded fixing piece (such as a bolt, a nut, etc.).

[0097] In the embodiment of the present application, by fixing the first blocking piece 103 to the inner side wall of the air inlet channel 1012, since the first blocking piece 103 does not move with the air inlet pipe 102 during the process of the air inlet pipe 102 entering and exiting the air inlet channel 1012, the first blocking piece 103 only generates resistance to the air inlet pipe 102 during part of the movement of the air inlet pipe 102, and thus the through resistance of the air inlet pipe 102 can be reduced, and the operation convenience is improved.

[0098] Further, the inner side wall of the air inlet channel 1012 is provided with a second fixing position, and the first blocking piece 103 is arranged at the second fixing position.

[0099] Specifically, the second fixing position is used for fixing the first blocking piece 103, the position of the second fixing position corresponds to the position at which the first blocking piece 103 is arranged, and the second fixing position can firmly fix the first blocking piece 103 on the air inlet channel 1012, so that the first blocking piece 103 does not fall off even during the process of the air inlet pipe 102 entering and exiting the air inlet channel 1012.

[0100] In the embodiment of the present application, by arranging the second fixing position in the air inlet channel 1012, the first blocking piece 103 can be prevented from moving with the air inlet pipe 102, and the risk of the first blocking piece 103 falling off is reduced.

[0101] Further, the second fixing position is at least one of a groove and a protrusion.

[0102] Specifically, when the second fixing position is a groove, the first blocking piece 103 is embedded in the groove, at this time, the first blocking piece 103 needs to be larger than the size of the groove, and is pressed into the groove by an external force. Once installed in place, the first blocking piece 103 will return to its original state or remain in a deformed state to provide stable fixing and blocking effects. When the first fixing position 1023 is a protrusion, the height of the protrusion is less than the width of the gap 105, so as to provide a containing space for the first blocking piece 103.

[0103] In the embodiments of the present application, the second fixing position is a groove or a protrusion, which can tightly fix the first blocking piece 103 in the groove or the protrusion, and can improve the fixing strength of the first blocking piece 103. Through various forms of the fixing position, the installation flexibility and stability of the first blocking piece 103 are improved.

[0104] Further, as shown in Figure 1 、 Figure 2 、 Figure 4 and Figure 5 , the first blocking piece 103 includes a fixing part 1031 and a blocking part 1032. The fixing part 1031 is fixed to the air inlet pipe 102 or the air inlet passage 1012. The blocking part 1032 extends from the fixing part 1031 to the second direction. The blocking part 1032 is protrudingly arranged relative to the fixing part 1031.

[0105] Specifically, if the first blocking piece 103 is arranged in the air inlet pipe 102, the fixing part 1031 is fixed to the air inlet pipe 102, and the blocking part 1032 extends from the air inlet pipe 102 to the air inlet passage 1012. The distance from the end of the blocking part 1032 to the central axis of the air inlet pipe 102 is greater than the distance from the fixing part 1031 to the central axis of the air inlet pipe 102. If the first blocking piece 103 is arranged in the air inlet passage 1012, the fixing part 1031 is arranged in the air inlet passage 1012, and the blocking part 1032 extends from the air inlet passage 1012 to the air inlet pipe 102. The distance from the end of the blocking part 1032 to the central axis of the air inlet pipe 102 is less than the distance from the fixing part 1031 to the central axis of the air inlet pipe 102.

[0106] In the embodiments of the present application, the blocking part 1032 is protrudingly arranged relative to the fixing part 1031. When the first blocking piece 103 is fixed by the fixing part 1031, the gap 105 is filled by the blocking part 1032. The stable support of the fixing part 1031 and the effective blocking design of the blocking part 1032 together enhance the stability and durability of the first blocking piece 103. At the same time, by protrudingly arranging the blocking part 1032 relative to the fixing part 1031 instead of arranging the fixing part 1031 and the blocking part 1032 to be flush, the resistance of the air inlet pipe 102 to enter or exit the air inlet passage 1012 can be reduced, and the difficulty of the air inlet pipe 102 to enter or exit is reduced.

[0107] Further, a gap slot 1033 is arranged between the fixing part 1031 and the blocking part 1032. When the air inlet pipe 102 enters or exits the air inlet passage 1012, the gap slot 1033 is used to give way to the blocking part 1032.

[0108] Specifically, the gap slot 1033 is arranged between the fixed part 1031 and the blocking part 1032, which mainly provides a gap space for the blocking part 1032 during the process of the air inlet pipe 102 entering and leaving the air inlet channel 1012. Specifically, when the air inlet pipe 102 enters the air inlet channel 1012, the blocking part 1032 may interfere with the inner wall of the air inlet channel 1012 or other components due to space limitations. At this time, the gap slot 1033 allows the blocking part 1032 to deform or displace to a certain extent, thereby avoiding hard collision with the surrounding structure, ensuring that the air inlet pipe 102 can smoothly enter and leave the air inlet channel 1012. In addition, after the air inlet pipe 102 enters and leaves, the blocking part 1032 can quickly return to its original position with the elastic restoring force of the gap slot 1033, and continue to play the role of blocking and guiding.

[0109] In the embodiment of the present application, the gap slot 1033 is arranged between the fixed part 1031 and the blocking part 1032. Since the size of the first blocking piece 103 in the second direction is greater than the gap 105, when the air inlet pipe 102 enters and leaves the air inlet channel 1012, the blocking part 1032 is bent. At this time, if the gap slot 1033 is arranged between the blocking part 1032, the resistance of the air inlet pipe 102 to enter and leave can be reduced. In this way, while allowing the air inlet pipe 102 to enter and leave the air inlet channel 1012, the blocking effect of the first blocking piece 103 is maintained, and the flexibility of the reaction device 10 is improved.

[0110] As shown in Figure 1 , Figure 2 and Figure 6 , the embodiment of the present application also provides a processing device 1, which comprises the reaction device 10 provided by the above-mentioned embodiments of the present application, and the reaction device 10 is used for processing the workpiece in the processing device 1.

[0111] The processing device 1 provided by the embodiment of the present application can make the gas enter the reaction device 10 along the preset path, ensuring the purity of the reaction in the reaction chamber 1011.

[0112] The above preferred embodiments further illustrate the purpose, technical solutions and advantages of the present application. It should be understood that the above description is only a preferred embodiment of the present application, and is not intended to limit the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A reaction apparatus characterized by comprising: The reaction device comprises: a cavity, which is provided with an air inlet hole, an air inlet channel and a reaction chamber, the air inlet hole being communicated with the air inlet channel, and the air inlet channel being communicated with the reaction chamber; an air inlet pipe, which is arranged at least partially in the air inlet channel, the air inlet pipe being communicated with the air inlet hole and the reaction chamber, and the air inlet pipe and the air inlet channel having a gap therebetween; a first blocking member, which is arranged in the gap and is used for blocking the gas in the gap from entering the reaction chamber.

2. The reaction apparatus according to claim 1, wherein The first blocking member is used for separating the gap into a first gap close to the air inlet hole and a second gap close to the reaction chamber, and the first blocking member is used for blocking the gas in the first gap from entering the reaction chamber.

3. The reaction apparatus of claim 2, wherein The first gap has a first end away from the air inlet hole, and the distance between the first end and the air inlet hole in a first direction is within a range of (0 cm, 1 cm].

4. The reaction apparatus of claim 2, wherein The air inlet pipe is provided with an air outlet, the air inlet channel is provided with an opening for the air inlet pipe to enter and exit, and a second blocking member is arranged at the opening and is used for blocking the gas from flowing into the second gap after the gas flows out of the air outlet.

5. The reaction apparatus of claim 4, wherein The second blocking member is arranged on one of the outer side wall of the air inlet pipe, the inner side wall of the air inlet channel and the opening.

6. The reaction apparatus of claim 1, wherein The first blocking member allows the air inlet pipe and the air inlet channel to move relatively in the first direction.

7. The reaction apparatus of claim 6, wherein The first blocking member is an elastic member, and the inner diameter of the first blocking member is smaller than the outer diameter of the air inlet pipe, or / and the outer diameter of the first blocking member is larger than the inner diameter of the air inlet channel.

8. The reactor of any one of claims 1 to 7, wherein The first blocking member is fixed to one of the air inlet pipe and the air inlet channel.

9. The reaction apparatus of claim 8, wherein The first blocking member is fixed to the air inlet pipe, and the first blocking member is fixed to the outer side wall of the air inlet pipe.

10. The reaction apparatus of claim 9, wherein The outer side wall of the air inlet pipe is provided with a first fixing position, and the first blocking member is arranged at the first fixing position.

11. The reaction apparatus of claim 10, wherein The first fixing position is at least one of a groove and a protrusion.

12. The reaction apparatus of claim 8, wherein The first blocking member is fixed to the air inlet channel, and the first blocking member is fixed to the inner side wall of the air inlet channel.

13. The reaction apparatus of claim 12, wherein The inner side wall of the air inlet channel is provided with a second fixing position, and the first blocking member is arranged at the second fixing position.

14. The reaction apparatus of claim 13, wherein The second fixing position is at least one of a groove and a protrusion.

15. The reactor of any one of claims 1 to 7, wherein The first blocking member comprises a fixing part and a blocking part, the fixing part is fixed to the air inlet pipe or the air inlet channel, the blocking part extends from the fixing part to a second direction, and the blocking part is arranged protruding relative to the fixing part.

16. The reaction apparatus of claim 15, wherein A clearance groove is arranged between the fixing part and the blocking part, and the clearance groove is used for giving clearance to the blocking part when the air inlet pipe enters and exits the air inlet channel.

17. A processing device, characterized by The reaction device as claimed in any one of claims 1 to 16. ​

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