Silicon wafer belt transmission mechanism

Abstract

The utility model discloses a silicon wafer belt conveying mechanism which comprises a frame body, a motor is fixedly connected to the outer wall of one side of the frame body, two connecting shafts are movably connected to the inner wall of one side of the frame body, one end of an output shaft of the motor is fixed to one end of each connecting shaft, and a guide rail is fixedly connected to one side of each connecting shaft. The outer side of the guide rail is movably connected with two belt wheels, a conveying belt is connected between the two belt wheels far away from each other in a wound mode, the outer side of the conveying belt is fixedly connected with a plurality of limiting plates, T-shaped frames are slidably connected to the two sides of the frame body in an inserted mode, and a power component for driving the T-shaped frames to move is arranged on the outer wall of the bottom of the frame body. According to the silicon wafer conveying device, the two sides of the silicon wafer can be positioned, so that the silicon wafer is kept stable in the conveying process, meanwhile, the conveying belt can be supported in an auxiliary mode through the first supporting wheel, and the silicon wafers of different sizes can be positioned through the silicon wafer conveying device.

Description

TECHNICAL FIELD

[0001] The utility model relates to silicon wafer transmission technical field especially relates to a silicon wafer belt transmission mechanism. BACKGROUND

[0002] The silicon wafer belt transmission mechanism is widely used in the production of silicon wafer, and on the production line of silicon wafer, the transmission mechanism is responsible for transmitting the silicon wafer from one process to the next process, ensuring the continuity of the production process.

[0003] Through the search, the belt transmission mechanism with the belt tensioning adjusting structure disclosed in the announcement No. CN218173568U has the advantages of small space occupation and no change of transmission distance when the belt is tensioned and adjusted, however, during the transmission of the silicon wafer, the silicon wafer is not fixed on both sides, and the silicon wafer is easy to slide out from both sides during the transmission process, resulting in the damage of the silicon wafer. UTILITY MODEL CONTENT

[0004] The utility model discloses a silicon wafer belt transmission mechanism to solve the shortcomings in the prior art.

[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme:

[0006] A silicon wafer belt transmission mechanism, including the frame body, the one side outer wall of frame body is fixedly connected with motor, the one side inner wall of frame body is movably connected with two connecting shafts, and one end of motor output shaft is fixed with one end of connecting shaft, one side of connecting shaft is fixedly connected with guide rail, the outer side of guide rail is movably connected with two pulleys, and the transmission belt is wound between the two pulleys far away from each other, a plurality of limit plates are fixedly connected to the outer side of the transmission belt, both sides of the frame body are slidably inserted with T-shaped frame, the bottom outer wall of the frame body is provided with a power component for moving the T-shaped frame, one side of the T-shaped frame is fixedly connected with a connecting frame, a plurality of second supporting wheels are movably connected in the connecting frame, and a clamping belt is wound between the plurality of second supporting wheels.

[0007] As a further scheme of the utility model, a plurality of auxiliary rods are movably connected in the frame body, and two first supporting wheels are key-connected to the outer side of the auxiliary rod.

[0008] As a further scheme of the utility model, the outer side of the first supporting wheel is in contact with the transmission belt.

[0009] As a further scheme of the utility model, the power component includes a double-acting cylinder, the double-acting cylinder is fixed on the bottom outer wall of the frame body through bolts, and the two piston rods of the double-acting cylinder are fixed with the T-shaped frame respectively.

[0010] As a further scheme of the utility model, the bottom of the connecting frame is fixedly connected with a moving frame, and the moving frame is rotatably connected with the first supporting wheel and the belt wheel.

[0011] As a further scheme of the utility model, the bottom of the moving frame is provided with an avoiding hole, and the auxiliary rod and the connecting shaft pass through the avoiding hole.

[0012] As a further scheme of the utility model, the top of the frame body is fixedly connected with a protective cover.

[0013] The utility model has the advantages of:

[0014] 1. The utility model discloses a limiting plate and clamping belt are used in cooperation, the both sides of the silicon wafer are positioned, and then the silicon wafer keeps stable in the process of transmission, avoids the silicon wafer from falling off the conveying belt and causing damage, and improves the stability of silicon wafer transmission.

[0015] 2. The utility model discloses a first supporting wheel can assist supporting the conveying belt, and the conveying belt stably conveys the silicon wafer, and improves the stability of conveying belt transmission.

[0016] 3. The utility model discloses a fixed frame moves and makes the belt wheel and the first supporting wheel move to the middle or both sides simultaneously, and then the device positions the silicon wafer of different sizes, and improves the flexibility of the device. DRAWINGS

[0017] Fig. 1 A kind of silicon wafer belt transmission mechanism's three-dimensional structure schematic view is proposed for the utility model;

[0018] Fig. 2 A kind of silicon wafer belt transmission mechanism's partial sectional structure schematic view is proposed for the utility model;

[0019] Fig. 3 A kind of silicon wafer belt transmission mechanism's partial enlarged structure schematic view is proposed for the utility model.

[0020] In the drawing: 1, frame body;2, motor;3, connecting shaft;4, belt wheel;5, conveying belt;6, limiting plate;7, protective cover;8, T-shaped frame;9, double-acting cylinder;10, moving frame;11, auxiliary rod;12, first supporting wheel;13, clamping belt;14, connecting frame;15, second supporting wheel;16, avoiding hole. DETAILED DESCRIPTION

[0021] The technical solutions in the embodiments of the present application will be clearly and completely described with reference to the drawings in the embodiments of the present application. The described embodiments are only some of the embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work are within the scope of the present application.

[0022] With reference to Figs. 1-3 The utility model discloses a silicon wafer belt transmission mechanism, including frame body 1, the one side outer wall of frame body 1 is fixed with motor 2 through bolt, the one side inner wall of frame body 1 is rotatably connected with two connecting shafts 3, and the one end of motor 2 output shaft is fixed with the one end of connecting shaft 3, and the one side of connecting shaft 3 is fixed with guide rail through bolt, and the outside of guide rail is slidably connected with two pulleys 4, and the transmission belt 5 is wound between the two pulleys 4 far away, and the motor 2 rotation makes connecting shaft 3 drive transmission belt 5 move, to make the silicon wafer isolated by spacing plate 6 be transmitted, and the outside of transmission belt 5 is fixed with a plurality of spacing plate 6 through bolt, and the both sides of frame body 1 are slidably inserted with T type frame 8, and the bottom outer wall of frame body 1 is equipped with the power component of driving T type frame 8 moves, and the one side of T type frame 8 is fixed with connecting frame 14 through bolt, and a plurality of second supporting pulleys 15 are rotatably connected in connecting frame 14, and clamping belt 13 is wound between a plurality of second supporting pulleys 15, and the silicon wafer is placed between the two spacing plate 6 of transmission belt 5, to make the silicon wafer be primarily positioned, and the power component makes T type frame 8 drive connecting frame 14 respectively towards the middle position moves, to make the clamping belt 13 supported by second supporting pulley 15 respectively towards the middle moves, until clamping belt 13 and the both sides of silicon wafer contact, to make the position of silicon wafer be further positioned, and then make the silicon wafer keep stable in the transmission process.

[0023] The utility model discloses, need explanation is, the inside rotation of frame body 1 is connected with a plurality of auxiliary rod 11, and the outside rotation of auxiliary rod 11 is connected with two first support wheel 12, and the outside of first support wheel 12 is contacted with conveying belt 5, and first support wheel 12 can assist support to conveying belt 5, make conveying belt 5 stable to the transmission of silicon wafer, and power component includes double -acting cylinder 9, and double -acting cylinder 9 is fixed on the bottom outer wall of frame body 1 through bolt, and the two piston rods of double -acting cylinder 9 are fixed with T type frame 8 respectively, and double -acting cylinder 9 telescopic makes T type frame 8 move, and the bottom of connecting frame 14 is fixed with moving frame 10 through bolt, and moving frame 10 is rotatably connected with first support wheel 12 and pulley 4, and the bottom of moving frame 10 is equipped with the hole 16 of avoiding position, and auxiliary rod 11 and connecting shaft 3 pass through the hole 16 of avoiding position, and connecting frame 14 moves simultaneously and makes moving frame 10 move to the inside along auxiliary rod 11 and connecting shaft 3, to make pulley 4 and first support wheel 12 move to the middle respectively, and further make the device to the positioning of silicon wafer of different size, and the top of frame body 1 is fixed with protective cover 7 through bolt, and protective cover 7 can protect the top of frame body 1, avoid the object of falling above to cause silicon wafer to be damaged.

[0024] Working principle: when needing to position silicon wafer, first place silicon wafer between the two limiting plates 6 on conveying belt 5, make silicon wafer get preliminary positioning, then start double -acting cylinder 9, and double -acting cylinder 9 elongation makes T type frame 8 drive connecting frame 14 move to the middle position respectively, to make the clamping belt 13 supported by second support wheel 15 move to the middle respectively, until clamping belt 13 is contacted with the both sides of silicon wafer, to make the position of silicon wafer get further positioning, and connecting frame 14 moves simultaneously and makes moving frame 10 move to the inside along auxiliary rod 11 and connecting shaft 3, to make pulley 4 and first support wheel 12 move to the middle respectively, and further make the device to the positioning of silicon wafer of different size, when needing to transmit silicon wafer, start motor 2, and motor 2 rotates and makes connecting shaft 3 drive conveying belt 5 to move, to make limiting plate 6 drive silicon wafer to move and transmit it.

[0025] Finally should be explained: for the person skilled in the art, it still can modify the technical scheme recorded in each embodiment described above, or equivalent replacement to part technical features. Any modification, equivalent replacement, improvement etc. that is made within the spirit and principle of the utility model, should be contained in the protection scope of the utility model.

Claims

1. A silicon wafer belt transport mechanism comprising a frame (1), characterized in that, The side outer wall of the frame body (1) is fixedly connected with a motor (2), the side inner wall of the frame body (1) is movably connected with two connecting shafts (3), one end of the output shaft of the motor (2) is fixedly connected with one end of the connecting shaft (3), one side of the connecting shaft (3) is fixedly connected with a guide rail, the outer side of the guide rail is movably connected with two pulleys (4), the transmission belt (5) is wound between the two pulleys (4) far away from each other, the outer side of the transmission belt (5) is fixedly connected with a plurality of limiting plates (6), the two sides of the frame body (1) are slidably inserted with T-shaped frames (8), the bottom outer wall of the frame body (1) is provided with a power component for moving the T-shaped frame (8), one side of the T-shaped frame (8) is fixedly connected with a connecting frame (14), a plurality of second supporting wheels (15) are movably connected in the connecting frame (14), and the clamping belt (13) is wound between the plurality of second supporting wheels (15).

2. A silicon wafer belt transport mechanism as claimed in claim 1, wherein, The inside of the frame body (1) is movably connected with a plurality of auxiliary rods (11), and the outer side of the auxiliary rod (11) is key-connected with two first supporting wheels (12).

3. A silicon wafer belt transport mechanism as claimed in claim 2, wherein, The outer side of the first supporting wheel (12) is in contact with the transmission belt (5).

4. A silicon wafer belt transport mechanism as claimed in claim 1, wherein, The power component comprises a double-acting cylinder (9), the double-acting cylinder (9) is fixed on the bottom outer wall of the frame body (1) through bolts, and the two piston rods of the double-acting cylinder (9) are fixed with the T-shaped frame (8) respectively.

5. A silicon wafer belt transport mechanism as claimed in claim 1, wherein, The bottom of the connecting frame (14) is fixedly connected with a moving frame (10), and the moving frame (10) is rotatably connected with the first supporting wheel (12) and the pulley (4).

6. A silicon slice belt transport mechanism as in claim 5 wherein, The bottom of the moving frame (10) is provided with an avoiding hole (16), and the auxiliary rod (11) and the connecting shaft (3) pass through the avoiding hole (16).

7. A silicon slice belt transport mechanism as in claim 1 wherein, The top of the frame body (1) is fixedly connected with a protective cover (7).

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