Air flotation transportation device for substrates

Abstract

The utility model discloses an air flotation transportation device for a substrate. The air flotation transportation device comprises a positive pressure area, a positive pressure air distribution channel and a positive pressure throttling structure. Wherein the positive pressure area is connected with an air outlet section of the positive pressure throttling structure, and an air inlet section of the positive pressure throttling structure is connected with the positive pressure air distribution channel; the air outlets of the positive pressure areas and the positive pressure air distribution channels are not located on the same plane, one positive pressure area corresponds to one positive pressure air distribution channel, and one positive pressure area comprises a plurality of air outlets. The device is simple in structure, and the manufacturing cost of the air flotation device can be reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the conveying technology field of display panels, in particular to a substrate air floating conveying device. BACKGROUND

[0002] At present, in the conveying process of substrate (including glass substrate, flexible substrate, etc.) production and manufacturing, the traditional contact type (such as roller drive) conveying mode is prone to damage such as scratch, deformation and local stress concentration. Therefore, the current non-contact air floating conveying mode is adopted, and the air floating conveying is the conveying of the substrate in a suspended state by air outlet of the air outlet hole.

[0003] However, the requirement of the substrate suspension height is in microns, and the gas stability of the air floating device is required to be high. In order to meet the substrate conveying requirement in microns, the structure of the existing air floating device is relatively complex, which also leads to high manufacturing cost of the existing air floating device.

[0004] Therefore, there is a need for an air floating conveying device of substrate to solve the above problems. SUMMARY

[0005] The present application discloses an air floating conveying device of substrate, which has simple structure and can reduce the manufacturing cost of the air floating device.

[0006] The first aspect of the present application discloses an air floating conveying device of substrate, which comprises a positive pressure area, a positive pressure air distribution channel and a positive pressure throttling structure; wherein one positive pressure area corresponds to one positive pressure air distribution channel, and one positive pressure area comprises a plurality of air outlets; the positive pressure area is connected with the air outlet section of the positive pressure throttling structure, and the air inlet section of the positive pressure throttling structure is connected with the positive pressure air distribution channel; the air outlet of the positive pressure area is not in the same plane as the positive pressure air distribution channel.

[0007] In the above scheme, one positive pressure air distribution channel can supply air to the plurality of air outlets of one positive pressure area; and the positive pressure air distribution channel and the positive pressure area are separated by the positive pressure throttling structure, and the positive pressure throttling structure fully plays a role in limiting the speed and flow of air flow; it can adapt to substrates of various sizes, and the width of the air floating conveying device can be adjusted according to actual conditions. The air floating conveying device can also be directly manufactured with a single layer plate, or can be manufactured with a double layer plate and a three layer plate, and the above scheme does not limit this.

[0008] In a possible implementation, the air floating conveying device comprises an upper layer plate; wherein the positive pressure areas are distributed on the upper layer plate.

[0009] In the above scheme, the ventilation openings of the positive pressure area are arranged on the upper layer plate, which is directly opposite to the base plate. In this scheme, the ventilation openings of the positive pressure area are arranged on the upper layer plate in the multi-layer plate structure, which further reduces the manufacturing cost on the basis of simple structure.

[0010] In a possible implementation, the air floating transportation device comprises a lower layer plate; wherein the positive pressure air distribution channels are all in groove-shaped structure, and the positive pressure air distribution channels are arranged on the lower layer plate; one positive pressure air distribution channel is connected with multiple positive pressure throttling structures, and one positive pressure throttling structure corresponds to the air outlet of one positive pressure area.

[0011] In the above scheme, it is disclosed that the positive pressure air distribution channel can be arranged on the lower layer plate and on the side opposite to the upper layer plate; and an implementation structure of the positive pressure air distribution channel is given. Of course, the positive pressure air distribution channel can also be arranged on the bottom end of the upper layer plate, and then the ventilation openings of the positive pressure air distribution channel are arranged on the lower layer plate.

[0012] In a possible implementation, multiple air outlets of the positive pressure air source are arranged on one positive pressure air distribution channel.

[0013] In the above scheme, the multiple air outlets of the positive pressure air distribution channel are to make the gas pressure in the positive pressure air distribution channel more uniform; if only one air outlet is used, the gas pressure of the positive pressure air distribution channel will be uneven, that is, the gas pressure near the air outlet will be larger, and the gas pressure far from the air outlet will be smaller, especially when the length of the positive pressure air distribution channel is longer, the uneven gas pressure will be more obvious. The air outlets of the positive pressure air source can be arranged on the bottom end of the lower layer plate, that is, on the side of the lower layer plate far from the upper layer plate. There are many electronic circuits between the air source and the air outlet of the positive pressure air distribution channel (the air outlet of the positive pressure air distribution channel), which will not be described here.

[0014] In a possible implementation, the positive pressure throttling structure is in a shallow groove-shaped structure; and the positive pressure throttling structure is arranged on the upper layer plate or the lower layer plate.

[0015] In the above scheme, the shallow groove-shaped structure of the positive pressure throttling structure is convenient to process; and the cross-sectional area of the throttling structure (the positive pressure throttling structure) is much smaller than the cross-sectional area of the air outlet (the air outlet of the positive pressure area) on the upper layer plate, so that the throttling structure has a significant effect on the gas pressure regulation of the air flow. The positive pressure throttling structure can be arranged on the bottom end of the upper layer plate, that is, on the side of the upper layer plate far from the base plate, which directly cooperates with the air distribution channel of the lower layer plate to form the air flow passage; the positive pressure throttling structure can also be directly arranged on the lower layer plate, which cooperates with the air distribution channel of the lower layer plate to form the air flow passage. The specific arrangement position of the positive pressure throttling structure is not limited, and the positive pressure throttling structure can also be arranged on a middle layer plate alone and cooperates with the upper layer plate and the lower layer plate to form the air flow passage. These arrangements can be selected according to the processing technology in practice.

[0016] In a possible implementation, the positive pressure throttling structure comprises an air outlet section, an air inlet section and a positive pressure intermediate structure; wherein the air outlet section and the air inlet section of the positive pressure throttling structure are both linear structures; and the positive pressure intermediate structure comprises one or more linear structures and one or more curved structures.

[0017] In the above scheme, the air inlet section and the air outlet section are directly connected to the air supply channel or the air vent of the upper layer plate and are provided as linear structures; and the positive pressure intermediate structure is not limited and can only limit the speed and flow of the air flow.

[0018] In a possible implementation, the air floating transportation device further comprises an edge subarea; wherein the edge subarea is arranged at the front end and the rear end of the transportation platform; and the edge subarea comprises at least one air inlet connected to the air outlet of the air source through at least one edge throttling structure.

[0019] In the above scheme, when the substrate is transported on the air floating transportation device, the substrate is less covered by the air flow when it is about to enter the air floating transportation platform and when it is about to leave the air floating transportation platform, and the air flow pressure of the positive pressure area is lost or reduced due to the substrate being at the edge of the air floating transportation platform, thereby causing the flying height of the substrate to fluctuate (e.g., causing the substrate to sag); in order to reduce or eliminate such fluctuations, the edge throttling structure is separately arranged in the edge area, and the edge area is preferably controlled separately by the negative pressure passage, which can be adjusted to be smaller or stopped, so that the substrate in the edge area can obtain more air flow pressure of the positive pressure area and be smoothly transported. In addition, the edge area can also be controlled separately by the positive pressure passage, at which time the edge area appropriately compensates for the air flow pressure of the positive pressure area, so that the substrate in the edge area can be smoothly transported. The edge throttling structure also comprises an air outlet section, an air inlet section and an edge intermediate section; and the specific structure of the edge throttling structure is not limited. The edge throttling structure can be the same as or different from the positive pressure throttling structure.

[0020] In a possible implementation, the air floating transportation device further comprises a leveling structure 2, which comprises a first mounting seat 201, a first adjusting rod 202, a locking nut 203, a second adjusting rod 204 and a second mounting seat 205; wherein the first adjusting rod 202 is threadedly mounted on the first mounting seat 201, the locking nut 203 is threadedly mounted on the first adjusting rod 202 extending above the first mounting seat 201, the second adjusting rod 204 is threadedly mounted in the top port of the first adjusting rod 202, the second mounting seat 205 is sleeved on the second adjusting rod 204, and the second mounting seat 205 is connected to the first adjusting rod 202 through a spring 206.

[0021] In the above scheme, the leveling structure has two ways of coarse leveling and fine leveling, the coarse leveling is used for leveling the transport platform when installing the air floating transport device through the first adjusting rod; the fine leveling can achieve micron-level leveling, and the second adjusting rod can be used for further adjusting the fine transport platform.

[0022] In a possible implementation, the second adjusting rod 204 is a cylindrical body, and threads are arranged at two ends of the second adjusting rod 204 respectively, and an operation hole 208 is arranged at a port of the second adjusting rod 204.

[0023] In the above scheme, the operation hole 208 is arranged on the second adjusting rod, and a leveling operation hole is arranged on the plane of the transport platform to be used in cooperation, so as to facilitate the user to fine-tune the flatness of the transport platform in the vertical direction. However, the number of leveling structures is not limited.

[0024] In a possible implementation, the positive pressure throttling structure includes at least one straight line structure and one or more curved line structures.

[0025] In the above scheme, a structure setting mode of the positive pressure throttling structure is given. Thus, the structure setting diversity of the positive pressure throttling structure is illustrated.

[0026] The air floating transport device disclosed in the application has simple structure and can reduce the manufacturing cost of the air floating device. BRIEF DESCRIPTION OF DRAWINGS

[0027] Figure 1 A schematic view of a transport platform of a substrate air floating transport device disclosed in the application;

[0028] Figure 2 A schematic view of a throttling structure of a substrate air floating transport device disclosed in the application;

[0029] Figure 3 A schematic view of another substrate air floating transport device structure disclosed in the application;

[0030] Figure 4 A schematic view of a whole structure of a substrate air floating transport device disclosed in the application;

[0031] Figure 5 A schematic view of a whole structure of another substrate air floating transport device disclosed in the application;

[0032] Figure 6 A schematic view of a cross-section structure of a substrate air floating transport device disclosed in the application;

[0033] Figure 7 A schematic view of a gas distribution passage structure of a substrate air floating transport device disclosed in the application;

[0034] Figure 8 A leveling structure schematic diagram of a substrate air floating transportation device disclosed in the specification of the present application;

[0035] Figure 9 A leveling structure cross-sectional schematic diagram of a substrate air floating transportation device disclosed in the specification of the present application;

[0036] Figure 10 A leveling structure part schematic diagram of a substrate air floating transportation device disclosed in the specification of the present application;

[0037] Figure 11 A throttling structure schematic diagram of a substrate air floating transportation device disclosed in the specification of the present application.

[0038] Figures 1-11 : air floating transportation platform 1, upper layer plate 101, lower layer plate 102, first positive pressure air outlet 103, second positive pressure air outlet 104, first positive pressure air distribution channel 105, second positive pressure air distribution channel 106, air outlet of air source 107, leveling structure 2, first mounting seat 201, first adjusting rod 202, locking nut 203, second adjusting rod 204, second mounting seat 205, spring 206, working outer edge 207, operation hole 208, positive pressure connector 3, positive pressure connector 4, edge connector 5, first positive pressure area 100, second positive pressure area 200, first positive pressure throttling structure 300, second positive pressure throttling structure 400, edge throttling structure 500, edge air inlet 600, mounting hole 700, leveling operation hole 800, throttling structure 900, throttling structure first section 901, throttling structure middle structure 902, throttling structure tail section 903. DETAILED DESCRIPTION

[0039] In order for those skilled in the art to better understand the technical solutions in the specification, the technical solutions in the embodiments of the specification will be clearly and completely described below in conjunction with the drawings in the embodiments of the specification. Obviously, the described embodiments are only some of the embodiments of the present application, not all the embodiments.

[0040] In the description of the embodiments of the present application, the words such as "for example" or "for instance" are used to represent an example, illustration or description. Any embodiment or design scheme described as "for example" or "for instance" in the embodiments of the present application should not be interpreted as more preferred or more advantageous than other embodiments or design schemes. Rather, the words such as "for example" or "for instance" are intended to present the relevant concept in a specific way.

[0041] This application discloses an air-floating transport device for substrates, which is mainly used in the transport process of substrates. For example, the transport requirements for OLED substrates are micrometer-level flight altitudes, such as 150±30μm. How to ensure precise transport of substrates while reducing the cost of the air-floating platform is a problem faced in this field.

[0042] This specification discloses an air-floating transport device for a substrate. The air-floating transport device includes a positive pressure zone, a positive pressure air distribution channel, and a positive pressure throttling structure. Each positive pressure zone corresponds to one positive pressure air distribution channel, and each positive pressure zone includes multiple air outlets. The positive pressure zone is connected to the air outlet section of the positive pressure throttling structure, and the air inlet section of the positive pressure throttling structure is connected to the positive pressure air distribution channel. The air outlets of the positive pressure zone and the positive pressure air distribution channel are not on the same plane.

[0043] At this point, the positive pressure air distribution channel and the positive pressure zone are separated by the positive pressure throttling structure, which effectively limits the speed and flow rate of the airflow. For ease of understanding, this manual will also refer to the positive pressure throttling structure as a general term for this structure.

[0044] Furthermore, the air flotation transport device described in this specification can be manufactured directly using a single-layer plate, or it can be manufactured using a double-layer plate or a triple-layer plate; there are no restrictions on this. The positive pressure zone is distributed along the longitudinal or transverse direction of the transport platform; the longitudinal direction is the transport direction of the substrate. Single-layer plate manufacturing involves placing all the structures on a single layer (e.g., using 3D printing). Double-layer plate manufacturing uses an upper and lower layer plate. Triple-layer plate manufacturing, based on a double-layer plate, places the throttling structure separately on the intermediate layer plate between the upper and lower layer plates. For ease of description, this specification uses a transverse distribution of the positive pressure zone as an example for explanation and discussion; and unless otherwise specified, a double-layer plate is used as an example.

[0045] Furthermore, the air outlet and vent in this instruction manual can take various shapes, including circular and square. For ease of understanding, the air outlet and vent in this instruction manual are described using a circular through hole.

[0046] like Figure 1 As shown, Figure 1 An example is shown in which a first positive pressure zone 100 and a second positive pressure zone 200 are distributed on an air flotation transport platform 1; and a first positive pressure zone 100 includes multiple air outlets, and a second positive pressure zone 200 includes multiple air outlets. Figure 1The example uses five positive pressure zones, but other numbers are also possible. For ease of description, this manual will use three positive pressure zones as an example. This distribution of positive pressure zones allows for adjustment of the area size according to the substrate dimensions. The first positive pressure zone 100 and the second positive pressure zone 200 can have the same or different vent sizes. The vent sizes in the first and second positive pressure zones can be adjusted according to actual conditions. When the vent sizes in the first and second positive pressure zones are the same, the substrate's flight altitude is stable when carrying it. When the vent sizes in the first and second positive pressure zones are different, a larger vent can be used to provide greater buoyancy for heavier loads, while a smaller vent can be used for lighter loads or loads requiring more precise control.

[0047] Figure 1 The number of air outlets in the first positive pressure zone 100 may be the same as or different from the number of air outlets in the second positive pressure zone 200. This specification provides an example where both numbers are the same. One positive pressure throttling structure corresponds to one air outlet in one positive pressure zone.

[0048] like Figure 3 As shown, Figure 3 As an example of a double-layer plate, the overall structure of the air flotation transport device is described. The air outlet 103 of the first positive pressure zone is located on the upper plate 101 (not marked in the figure), and the first positive pressure air distribution channel 105 is located on the lower plate 102 (not marked in the figure). One end of the positive pressure throttling structure 300 is connected to the air outlet 103 of the first positive pressure zone, and the other end is connected to the first positive pressure air distribution channel 105. The first positive pressure throttling structure 300 also separates the air outlet (also called positive pressure outlet) 103 of the first positive pressure zone from the first positive pressure air distribution channel 105. The second positive pressure outlet 104 is located on the upper plate 101, and the second positive pressure distribution channel 106 is located on the lower plate 102. One end of the second positive pressure throttling structure 400 is connected to the second positive pressure outlet 104, and the other end is connected to the second positive pressure distribution channel 106. The second positive pressure throttling structure 400 separates the second positive pressure outlet (also called the outlet of the positive pressure zone) 104 and the second positive pressure distribution channel 106. The first positive pressure distribution channel 105 and the outlet 103 of the first positive pressure zone are neither on the same horizontal plane nor on the same vertical plane; the second positive pressure distribution channel 106 and the second positive pressure outlet 104 are neither on the same horizontal plane nor on the same vertical plane.

[0049] In addition, such as Figure 2 700mm mounting hole, such as Figure 3 The mounting holes 700 are provided in the upper and lower plates to ensure a tight connection between the upper and lower plates and reduce and avoid air leakage between them.

[0050] In one example, the air floating transportation device comprises an upper layer plate; wherein the positive pressure zones are distributed on the upper layer plate.

[0051] At this time, the positive pressure zones are distributed on the upper layer plate, and the upper layer plate serves as a layer plate opposite to the substrate.

[0052] In one example, the air floating transportation device comprises a lower layer plate; wherein the positive pressure air distribution channels are all groove-shaped structures, and the positive pressure air distribution channels are located on the lower layer plate; one positive pressure air distribution channel is connected to multiple positive pressure throttling structures, and one positive pressure throttling structure corresponds to the gas outlet of one positive pressure zone.

[0053] As shown in the lower layer plate 102 abutting the layer plate surface of the upper layer plate, the first positive pressure air distribution channel 105 and the second positive pressure air distribution channel 106 are all located on the lower layer plate. One positive pressure air distribution channel can be connected to multiple positive pressure throttling structures, which can reduce costs and facilitate air ventilation. Figure 7 In one example, multiple gas outlets of the positive air source are arranged on one positive pressure air distribution channel.

[0054] As shown in the lower layer plate 102 abutting the layer plate surface of the upper layer plate, the first positive pressure air distribution channel 105 and the second positive pressure air distribution channel 106 are all located on the lower layer plate. One positive pressure air distribution channel can be connected to multiple positive pressure throttling structures, which can reduce costs and facilitate air ventilation.

[0055] Figure 7 As shown in the lower layer plate 102 abutting the layer plate surface of the upper layer plate, the first positive pressure air distribution channel 105 and the second positive pressure air distribution channel 106 are all located on the lower layer plate. One positive pressure air distribution channel can be connected to multiple positive pressure throttling structures, which can reduce costs and facilitate air ventilation.

[0056] At this time, the multiple gas outlets of the positive pressure air distribution channel are to make the gas pressure in the positive pressure air distribution channel more uniform; if only one gas outlet is used, it will cause uneven gas pressure in the positive pressure air distribution channel, that is, the gas pressure near the gas outlet will be larger, and the gas pressure far from the gas outlet will be smaller, especially when the length of the positive pressure air distribution channel is longer, the uneven gas pressure will be more obvious. The gas outlets of the positive air source can be arranged at the bottom end of the lower layer plate, that is, the surface of the lower layer plate away from the upper layer plate.

[0057] In addition, as shown in the lower layer plate 102 abutting the layer plate surface of the upper layer plate, the first positive pressure air distribution channel 105 and the second positive pressure air distribution channel 106 are all located on the lower layer plate. One positive pressure air distribution channel can be connected to multiple positive pressure throttling structures, which can reduce costs and facilitate air ventilation. Figure 5 Figure 6 As shown in the lower layer plate 102 abutting the layer plate surface of the upper layer plate, the first positive pressure air distribution channel 105 and the second positive pressure air distribution channel 106 are all located on the lower layer plate. One positive pressure air distribution channel can be connected to multiple positive pressure throttling structures, which can reduce costs and facilitate air ventilation.

[0058] In one example, the positive pressure throttling structure is a shallow groove-shaped structure; and the positive pressure throttling structure is located on the upper layer plate or the lower layer plate.

[0059] As shown in the lower layer plate 102 abutting the layer plate surface of the upper layer plate, the first positive pressure air distribution channel 105 and the second positive pressure air distribution channel 106 are all located on the lower layer plate. One positive pressure air distribution channel can be connected to multiple positive pressure throttling structures, which can reduce costs and facilitate air ventilation. Figure 3 ​​As shown, the cross-sectional area of the first positive pressure throttling structure 300 is much smaller than the cross-sectional area of the air outlet of the first positive pressure area air outlet 103; the cross-sectional area of the second positive pressure throttling structure 400 is smaller than the cross-sectional area of the air outlet 104 of the second positive pressure area. The shallow groove structure of the positive pressure throttling structure is convenient to process and can further reduce the cost.

[0060] In one example, the positive pressure throttling structure includes an air outlet section, an air inlet section, and a positive pressure intermediate structure; wherein the air outlet section and the air inlet section of the positive pressure throttling structure are both linear structures; the positive pressure intermediate structure includes one or more linear structures and one or more curved structures.

[0061] It should be noted that, for the convenience of description, the same throttling structure is used as an example for the positive pressure throttling structure and the edge throttling structure, but the throttling structure is not limited. Figure 11 For example, the throttling structure of the present description is described. Figure 11 The intermediate throttling structure 900 includes a throttling structure first section 901, a throttling structure intermediate structure 902, and a throttling structure tail section 903; the throttling structure first section 901 and the throttling structure tail section 903 are both directly communicated with the air vent (air outlet) and the air distribution channel (positive air distribution channel) and are set as linear structures; the throttling structure intermediate structure 902 plays a role in limiting the speed and flow of the airflow, so as not to let the speed of the airflow be too fast and the flow be too large, thereby saving the airflow and also making the suspension airflow of the substrate more uniform and stable. The throttling structure intermediate structure 902 is only an example of the intermediate structure of the throttling structure, and those skilled in the art can easily think of a combination of one or more linear structures and one or more curved structures; here, they are not described one by one.

[0062] The present description does not limit the positive pressure intermediate structure, which can only play a role in limiting the speed and flow of the airflow. The size of the shallow groove structure of the positive pressure throttling structure, the size of the positive pressure air outlet, the size of the edge air inlet, and the size of the positive pressure air distribution channel groove are not limited and can be adjusted according to the actual situation.

[0063] In this example, the throttling structure can be located at the bottom end of the upper plate, i.e., the plate surface of the upper plate away from the substrate, which directly cooperates with the air distribution channel of the lower plate to form the airflow passage; the throttling structure can also be directly arranged on the lower plate and cooperate with the air distribution channel of the lower plate to form the airflow passage. The specific arrangement position of the positive pressure throttling structure is not limited, and the throttling structure can also be located on a middle layer plate alone and cooperate with the upper plate and the lower plate to form the airflow passage. These settings can be selected according to the processing technology in practice.

[0064] For the convenience of description, the throttling structure is located on the upper plate in the present description and is described as an example. For example, Figure 2As shown, the positive pressure throttling structure is located at the bottom of the upper plate. The first positive pressure throttling structure 300 is connected to the air outlet 103 of the first positive pressure zone; the second positive pressure throttling structure 400 is connected to the air outlet 104 of the second positive pressure zone.

[0065] In one possible implementation, the positive pressure throttling structure includes at least one linear structure and one or more curved structures.

[0066] This paper aims to present a structural configuration for a positive pressure throttling structure. This illustrates the diversity of structural configurations for positive pressure throttling structures. There are no restrictions on the combination or number of linear and curved structures; selection can be made according to needs. The positive pressure throttling structure can still be divided into three sections, but the inlet and outlet ends do not necessarily need to be linear; they can also be curved.

[0067] In one example, the air flotation transport device further includes an edge partition; wherein the edge partition is located at the front and rear ends of the transport platform in the longitudinal direction (preferred direction in this example, but it can also be located in the transverse direction of the transport platform), the longitudinal direction of the transport platform being the transport direction of the substrate; the edge partition includes at least one air outlet, the at least one air outlet being connected to the air outlet of the air source through at least one edge throttling structure.

[0068] like Figure 1 As shown, the Y direction is the longitudinal direction of the transport platform (air-float platform), and the X direction is the transverse direction of the air-float platform. Figure 2 As shown, the edge throttling structure 500 is connected to the edge air inlet 600. Figure 3 The 3D diagram shows that the edge throttling structure 500 is connected to the edge air intake 600. For example... Figure 4 As shown, the edge air inlet 600 is connected to the edge connector 5, which also serves as the air outlet of the air source. The edge region is also called the compensation region. By individually adjusting the airflow in the edge region, the fluctuation of the flight altitude of the substrate is reduced when passing through the edge region, thus allowing it to pass smoothly. One edge throttling structure corresponds to one edge air inlet. In addition, when multiple edge air inlets are provided, edge air distribution channels can be provided; one edge air distribution channel corresponds to multiple edge air inlets.

[0069] In the above example, the transport of the substrate on the air-floating transport device is considered. In both cases—when the substrate is preparing to enter the air-floating transport platform and when it is preparing to leave the platform—the portion of the substrate covered by airflow is relatively small. Excessive airflow pressure in the positive pressure zone can cause fluctuations in the substrate's flight altitude. To reduce or eliminate these fluctuations, a separate edge throttling structure is provided in the edge region, preferably using a negative pressure path. The edge throttling structure also employs an exhaust section, an intake section, and an edge intermediate section; and the specific structure of the edge throttling structure is not limited.

[0070] In one example, the air floating transportation device further comprises a leveling structure 2. As shown, the leveling structure 2 comprises a first mounting seat 201, a first adjusting rod 202, a locking nut 203, a second adjusting rod 204 and a second mounting seat 205; wherein the first adjusting rod 202 is threadedly mounted on the first mounting seat 201, the locking nut 203 is threadedly mounted on the first adjusting rod 202 extending above the first mounting seat 201, the second adjusting rod 204 is threadedly mounted in the top port of the first adjusting rod 202, the second mounting seat 205 is sleeved on the second adjusting rod 204, and the second mounting seat 205 is connected with the first adjusting rod 202 through a spring 206. Figures 8-10

[0071] At this time, the leveling structure has two ways of coarse leveling and fine leveling, the coarse leveling is used for leveling the transportation platform when the air floating transportation device is installed through the working outer edge 207 on the first adjusting rod; the fine leveling can be micron-level leveling, and the second adjusting rod can be used for further adjusting the fine transportation platform.

[0072] In one example, the second adjusting rod 204 is a cylindrical body, the two ends of the second adjusting rod 204 are respectively provided with threads, and the port of the second adjusting rod 204 is provided with an operation hole 208. As shown, the leveling operation hole 800 is reserved for the fine leveling stage of the leveling structure, and the user can directly adjust the flatness of the air floating transportation platform 1 in the vertical direction; as shown, the upper plate 101 and the lower plate 102 are both provided with leveling operation holes 800 in communication with the operation holes 208; as shown, the second mounting seat 205 is provided with a through hole in the center to form an adjusting structure as shown, and the second mounting seat 205 can be threadedly fastened and connected with the lower plate 102. Figure 2 Figure 3 At this time, the second adjusting rod is provided with the operation hole 208, and the leveling operation hole is provided on the plane of the transportation platform for use in cooperation, which facilitates the user to fine-tune the flatness of the transportation platform in the vertical direction. However, the number of leveling structures is not limited, and generally speaking, the more the number of adjusting structures 2, the higher the precision of leveling. Figure 10 Figure 8 The principle of the air floating transportation device of the present specification is that the positive pressure gas is connected to the positive pressure distribution channel of the lower plate through a plurality of positive pressure joints, the positive pressure distribution channel flows into a plurality of positive pressure gas outlets in the positive pressure area through the positive pressure throttling structure located in the upper plate, and the positive pressure joint is connected with the air compressor pipeline; the edge negative pressure gas enters the edge throttling structure from the air inlet of the edge area and flows out from the edge joint, and the edge joint is connected with the air compressor.

[0073]

[0074]

[0075] ​​​​​The air floating transportation device disclosed in the application has simple structure and can reduce manufacturing cost of the air floating device.

[0076] In the description of the application, it should be understood that the positive direction of "X" in the drawings represents the front, and correspondingly, the reverse direction of "X" represents the rear; the positive direction of "Y" represents the right, and correspondingly, the reverse direction of "Y" represents the left; the positive direction of "Z" represents the upper, and correspondingly, the reverse direction of "Z" represents the lower; the directions or positional relationships indicated by the terms "X", "Y", "Z" and the like are based on the directions or positional relationships shown in the drawings of the specification, and are only for the convenience of describing the application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the application. Moreover, specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0077] In the description of the application, it should be noted that the directions or positional relationships indicated by the terms "upper", "lower" and the like are based on the directions or positional relationships shown in the drawings, and are only for the convenience of describing the application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the application. Unless otherwise specifically defined and limited, the terms "mounting", "connecting", "connecting" should be broadly understood, for example, it can be fixed connection, or detachable connection, or integrally connected; it can be mechanical connection, or electrical connection; it can be directly connected, or indirectly connected through intermediate medium, or it can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the application can be understood according to the specific circumstances.

[0078] It should be noted that in the present application, relational terms such as "first" and "second" and the like are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply that there is any such actual relationship or order between these entities or operations. Moreover, the terms "include", "contain" or any other variants thereof are intended to cover non-exclusive inclusion, so that the process, method, article or device including a series of elements not only includes those elements, but also includes other elements not explicitly listed or inherent to such process, method, article or device. Without more limitation, the element defined by the sentence "including a" does not exclude the presence of other identical elements in the process, method, article or device including the element.

[0079] The foregoing detailed description of the application has been presented for purposes of illustration and description. Various modifications and changes can be made to these embodiments without departing from the spirit and scope of the application. It is intended that the scope of the application should not be limited by the particular representative embodiments described above.

Claims

1. An air floatation transport device of a substrate, characterized by, The air floating transportation device comprises a positive pressure area, a positive pressure air distribution channel and a positive pressure throttling structure. The positive pressure area is connected with the air outlet section of the positive pressure throttling structure, and the air inlet section of the positive pressure throttling structure is connected with the positive pressure air distribution channel. The air outlet of the positive pressure area is not in the same plane as the positive pressure air distribution channel, one positive pressure area corresponds to one positive pressure air distribution channel, and one positive pressure area comprises a plurality of air outlets.

2. The air floatation transport device according to claim 1, wherein The air floating transportation device comprises an upper layer plate. The positive pressure area is distributed on the upper layer plate.

3. The air floatation transport device of claim 2, wherein, The air floating transportation device comprises a lower layer plate. The positive pressure air distribution channel is a groove-shaped structure, and the positive pressure air distribution channel is located on the lower layer plate. One positive pressure air distribution channel is connected with a plurality of positive pressure throttling structures, and one positive pressure throttling structure corresponds to the air outlet of one positive pressure area.

4. The air floatation transport device of claim 3, wherein, A plurality of air outlets of the positive air source are arranged on one positive pressure air distribution channel.

5. The air floatation transport device of claim 3, wherein, The positive pressure throttling structure is a shallow groove-shaped structure, and the positive pressure throttling structure is located on the upper layer plate or the lower layer plate.

6. The air floatation transport device of claim 5, wherein, The positive pressure throttling structure comprises an air outlet section, an air inlet section and a positive pressure intermediate structure. The air outlet section and the air inlet section of the positive pressure throttling structure are both linear structures, and the positive pressure intermediate structure comprises one or more linear structures and one or more curved structures.

7. The air floatation transport device of claim 1, wherein, The air floating transportation device further comprises an edge partition. The edge partition is arranged at the front end and the rear end of the longitudinal direction of the transportation platform. The edge partition comprises at least one air inlet, and the at least one air inlet is connected with the air outlet of the air source through at least one edge throttling structure.

8. The air floatation transport device of claim 1, wherein, The air floating transportation device further comprises a leveling structure (2), and the leveling structure (2) comprises a first mounting seat (201), a first adjusting rod (202), a locking nut (203), a second adjusting rod (204) and a second mounting seat (205). The first adjusting rod (202) is threadedly installed on the first mounting seat (201), the locking nut (203) is threadedly installed on the first adjusting rod (202) extending above the first mounting seat (201), the second adjusting rod (204) is threadedly installed in the top port of the first adjusting rod (202), the second mounting seat (205) is sleeved on the second adjusting rod (204), and the second mounting seat (205) is connected with the first adjusting rod (202) through a spring (206).

9. The air floatation transport device of claim 8, wherein, The second adjusting rod (204) is a cylindrical body, and threads are arranged at both ends of the second adjusting rod (204), and an operation hole (208) is arranged at the port of the second adjusting rod (204).

10. The air floatation transport device of claim 5, wherein, The positive pressure throttling structure comprises at least one linear structure and one or more curved structures.

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