Low-diffraction coating clamp

Abstract

The utility model relates to the technical field of vacuum coating, in particular to a low-diffraction coating clamp, which comprises a protection ring, a first ring body, a second ring body, a third ring body, a fourth ring body, a fourth ring body and a fifth ring body, a supporting plane is arranged between the edge of the bottom of the inner side of the first ring body and the edge of the top of the inner side of the second ring body, a workpiece to be evaporated is placed on the supporting plane, a chamfer is formed in the edge of the bottom of the inner side of the second ring body, and the surface of the chamfer is in a rough surface shape; the surface of the chamfer is designed into a rough surface type, so that the accumulation of a coating material on the edge of the coating surface is effectively reduced, the generation of diffraction edges is reduced, the overall quality of the coating surface is improved, the surface is smoother, the performance is more stable, and the clear aperture of an evaporated workpiece is effectively increased.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum coating technology field, concretely relates to a low diffraction coating fixture. BACKGROUND

[0002] Vacuum evaporation, simply called evaporation, refers to the process of evaporating and vaporizing the coating material (or film material) by a certain heating evaporation method under vacuum conditions, and the particles fly to the substrate surface to condense into a film. Evaporation is an early and widely used vapor deposition technology. Vacuum evaporation is mainly used for optical lens coating processing, and the vacuum evaporation equipment is usually a vertical cabinet type, with the workpiece to be evaporated placed above and the film material placed below. The vaporized film material is evaporated from the bottom to the top of the workpiece surface. Therefore, in the vacuum evaporation process, the optical elements to be coated are fixed, and a fixture is often used. In the optical industry, the main methods for fixing optical elements are adhesive method, three-legged clamping method and shielding method. However, the adhesive method and clamping method may leave a glue mark and damage the surface, so the shielding method is commonly used for high-precision optical elements, i.e. placing the optical element in the concave part of the ring-shaped fixture.

[0003] In order to deposit film material on the optical element, the fixture using the shielding method needs to be designed according to the specific coating environment and substrate characteristics, with an opening, a step or a baffle plate set at the opening to load the optical element to prevent it from falling. The presence of the step or baffle plate will interfere with the movement trajectory of the film material particles during the coating process, resulting in less coating in the step or baffle plate area relative to the central area, and obvious diffraction edges, which will greatly reduce the clear aperture after coating.

[0004] Currently, in the vacuum coating process, the coating material will stack at the edge of the coating surface through the smooth inclined chamfer of the ring-shaped fixture, resulting in diffraction edges. Although there are existing technologies such as the adsorption fixture (Patent No. CN201922101810.7), there are still disadvantages such as complex coating method, high processing difficulty and difficult implementation. UTILITY MODEL CONTENT

[0005] In view of the shortcomings of the prior art, the utility model provides a low diffraction coating fixture to solve the problem of obvious diffraction edges in the existing shielding method coating method.

[0006] To achieve the above-mentioned purpose, the utility model adopts the following technical solutions:

[0007] A low diffraction coating fixture, comprising: a protective ring, the protective ring is divided into a first ring body and a second ring body from top to bottom, the inner diameter of the first ring body is larger than the inner diameter of the second ring body, a support plane is provided between the inner side bottom edge of the first ring body and the inner side top edge of the second ring body, the workpiece to be evaporated is placed on the support plane, a chamfer is provided at the inner side bottom edge of the second ring body, and the surface of the chamfer is a rough surface.

[0008] Further, the material of the protection ring is aluminum.

[0009] Further, the support plane is parallel to the horizontal plane.

[0010] Further, the outer sidewall of the protection ring is further provided with a horizontally outward extending boss.

[0011] Further, the angle of the chamfer is 60 degrees.

[0012] The low-diffraction coating fixture and the control method thereof have the beneficial effects that the surface of the chamfer is designed as a rough surface type, the accumulation of the coating material at the edge of the coating surface is effectively reduced, the generation of the diffraction edge is reduced, the overall quality of the coating surface is improved, the surface is more flat, the performance is more stable, the light aperture of the evaporated workpiece is effectively increased. BRIEF DESCRIPTION OF DRAWINGS

[0013] Fig. 1 is a schematic diagram of the three-dimensional structure of the embodiment of the utility model;

[0014] Fig. 2 is a schematic diagram of the cross-sectional structure of the embodiment of the utility model.

[0015] Reference signs: 1, protection ring; 11, first ring body; 12, second ring body; 13, support plane; 14, boss; 15, chamfer. DETAILED DESCRIPTION

[0016] The typical embodiment embodying the features and advantages of the utility model will be described in detail in the following description. It should be understood that the utility model can have various changes on different embodiments, which do not deviate from the scope of the utility model, and the description and drawings in essence are used as the description, not to limit the utility model.

[0017] In the description of this application, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of the stated features. In the description of this application, "a plurality of" means two or more, unless otherwise explicitly specified.

[0018] To further illustrate the principle and structure of this utility model, the preferred embodiments of this utility model will now be described in detail with reference to the accompanying drawings.

[0019] like Figs. 1-2 As shown, this utility model embodiment provides a low diffraction coating fixture, including: a protective ring 1, on which the workpiece to be vaporized is placed, and vaporized film material is vaporized from bottom to top through the protective ring 1 onto the surface of the workpiece. The protective ring 1 has a chamfer 15 on its inner bottom edge, and the surface of the chamfer 15 is roughened to form a rough surface.

[0020] During the coating process, when the coating material evaporates from below and moves upward, it encounters the rough chamfer 15 of the second ring 12. This rough surface hinders the smooth movement of the coating material, reducing its continued upward evaporation and accumulation at the edge of the coating surface. Due to the roughness of the chamfer 15, the coating material is more likely to scatter or accumulate at this point, rather than continuing to move along the original path to the edge of the coating surface. Through the roughening treatment of the chamfer 15, the accumulation of coating material at the edge of the coating surface is effectively reduced, thereby reducing the generation of diffraction edges, improving the overall quality of the coating surface, making the surface smoother, the performance more stable, and effectively increasing the light transmission aperture of the workpiece being vapor-deposited.

[0021] Further, the protection ring 1 is divided into a first ring body 11 and a second ring body 12 from top to bottom, the inner diameter of the first ring body 11 is larger than that of the second ring body 12, the inner diameter of the first ring body 11 is the same as the diameter of the workpiece to be evaporated, a support plane 13 is arranged between the inner bottom edge of the first ring body 11 and the inner top edge of the second ring body 12, the workpiece to be evaporated is placed on the support plane 13, a chamfer 15 is opened at the bottom edge of the second ring body 12, the surface of the chamfer 15 of the second ring body 12 is roughened, and the arrangement of the first ring body 11 and the second ring body 12 provides a clear and stable positioning point for the workpiece to be evaporated, facilitating positioning of the workpiece to be evaporated.

[0022] Further, the protection ring 1 is made of aluminum, which is a non-magnetic material and does not interfere with the magnetic field during the plating process, ensuring the quality and stability of the plating.

[0023] Further, the support plane 13 is parallel to the horizontal plane, and the parallel support plane 13 provides a stable support basis for the workpiece to be evaporated, reducing the shaking or displacement of the workpiece during the plating process due to external factors such as vibration, airflow, etc., which helps to ensure the smooth progress of the plating process and the stability of the plating quality.

[0024] Further, the outer wall of the protection ring 1 is also provided with a horizontally outwardly extending boss 14, which is part of the protection ring 1, and the outwardly extending design helps to achieve more accurate positioning when placing the protection ring 1 on the plating equipment or other external components; and the presence of the boss 14 makes it easier to grasp and move the protection ring 1 during installation and disassembly of the plating equipment, and during maintenance, the boss 14 can serve as a convenient point of leverage to help technicians more conveniently check and replace the protection ring 1.

[0025] Further, the angle of the chamfer 15 is 60 degrees.

[0026] The above is only a preferred embodiment of the present application, and does not limit the technical scope of the present application, so any slight modification, equivalent change and modification of the above embodiment according to the technical essence of the present application still belongs to the scope of the technical scheme of the present application.

Claims

1. A low-diffraction coating fixture, characterized in that, include: The protective ring is divided into a first ring body and a second ring body from top to bottom. The inner diameter of the first ring body is larger than that of the second ring body. A support plane is provided between the inner bottom edge of the first ring body and the inner top edge of the second ring body. The workpiece to be vapor-deposited is placed on the support plane. A chamfer is provided on the inner bottom edge of the second ring body. The chamfer surface is rough.

2. The low-diffraction coating fixture according to claim 1, characterized in that, The protective ring is made of aluminum.

3. The low-diffraction coating fixture according to claim 1, characterized in that, The supporting plane is parallel to the horizontal plane.

4. The low-diffraction coating fixture according to claim 1, characterized in that, The outer wall of the protective ring is also provided with a horizontally extending protrusion.

5. The low-diffraction coating fixture according to claim 1, characterized in that, The chamfer angle is 60 degrees.

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