Boat piece and boat structure
By designing a conductive material body and a groove structure surrounding the bearing area on the boat sheet, the problem of uneven film thickness during the sheet coating process was solved, thereby achieving uniformity of film thickness and improvement of sheet properties.
Patent Information
- Application Number
- CN202423313887.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-30
- Publication Date
- 2025-11-25
- Estimated Expiration
- 2034-12-30
AI Technical Summary
Existing fixtures cause uneven film thickness on the sheet surface during the sheet coating process, resulting in edge color difference and affecting electrical and optical properties.
Design a boat sheet with a main body made of conductive material and a surface having a bearing area and a groove structure surrounding it. By adjusting the parameters of the grooves to achieve a uniform electric field distribution, the difference in process gas concentration between the center and the edge of the sheet can be reduced.
It improves the uniformity of film thickness on the sheet surface, reduces or eliminates edge color difference, and enhances the electrical and optical properties of the sheet.
Smart Images
Figure CN223592825U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the fields of semiconductor and photovoltaic technology, and specifically to a boat wafer and a boat structure. Background Technology
[0002] Plasma-enhanced chemical vapor deposition (PECVD) technology is widely used in surface coating of semiconductors, photovoltaics, optics, food packaging, medical devices, and electronic products. The coating primarily aims to alter the properties of sheet surfaces, allowing for the deposition of functional layers such as conductive, insulating, optical, corrosion-resistant, and wear-resistant films. In PECVD equipment, the fixture (boat) used to load the sheet plays a crucial role in supporting the sheet, ensuring electrical and thermal conductivity, and participating in plasma generation. The feasibility and quality stability of sheet coating largely depend on the structural features and function of the fixture.
[0003] However, when using existing fixtures to coat sheets, the film thickness on the sheet surface is uneven, resulting in color differences at the edges of the sheet and affecting the electrical and optical properties of the sheet. Utility Model Content
[0004] In view of this, embodiments of the present disclosure provide a boat sheet and a boat structure to solve the problem of uneven film thickness on the surface of the sheet.
[0005] In a first aspect, embodiments of this application provide a boat sheet, comprising: a main body, the main body being electrically connected to an electrode to enable the main body to be energized, wherein the main body is made of a conductive material; wherein the upper surface of the main body has at least one bearing area and at least one first groove, the bearing area being configured as a bearing sheet, and the first groove being disposed outside the bearing area.
[0006] In some embodiments, there are multiple first slots, and the multiple first slots are arranged around the bearing area.
[0007] In some embodiments, the shape of the bearing area includes a polygon, a plurality of first grooves correspond one-to-one with a plurality of sides of the bearing area, the first grooves extend along the edge of the bearing area, and two adjacent first grooves are disconnected at the corners of the bearing area.
[0008] In some embodiments, the first groove extends vertically through the body.
[0009] In some embodiments, the bearing area has at least one second groove; wherein the second groove comprises a ring-shaped groove extending along the edge of the bearing area; or the second groove comprises a long groove, and the number of the second grooves is multiple, and the multiple second grooves are uniformly distributed along the edge of the bearing area.
[0010] In some embodiments, the upper surface of the main body has a bearing groove, and the groove bottom of the bearing groove forms the bearing area.
[0011] In some embodiments, the depth of the bearing groove is less than the depth of the first groove, and the depth of the bearing groove is less than the depth of the second groove.
[0012] In some embodiments, the bearing area further has at least one vacuum breaking groove extending from the edge of the bearing area to the center of the bearing area.
[0013] In some embodiments, the material of the main body is graphite or aluminum.
[0014] In a second aspect, embodiments of the present application provide a boat structure, comprising: the boat sheet of the first aspect; and a connecting piece connecting a plurality of the boat sheets.
[0015] The inventor has found that, in the process of coating the surface of the sheet, the sheet is placed on the bearing area, and the contact resistance between the sheet and the main body causes the electric field transmitted to the surface of the sheet to weaken, and the electric field intensity generated in the area of the main body without bearing the sheet is larger, that is, the electric field intensity of the surface of the sheet is smaller than the electric field intensity of the outside of the sheet. By arranging the first groove outside the bearing area, the electric field intensity outside the bearing area can be reduced, so that the concentration of the process gas outside the sheet is reduced, and the concentration of the process gas in the central area and the edge area of the sheet is closer, so that the deposition rate of the process gas in the central area and the edge area of the sheet is basically consistent, the uniformity of the film thickness of the surface of the sheet is improved, the color difference of the edge of the sheet is reduced or even eliminated, and the electrical and optical properties of the sheet are improved. BRIEF DESCRIPTION OF DRAWINGS
[0016] The above and other objects, features and advantages of the present disclosure will become more apparent from the following detailed description taken in conjunction with the accompanying drawings. The drawings provided in the present application are used to provide further understanding of the embodiments of the present application, and constitute a part of the specification. The drawings provided in the present application are used to explain the present application together with the embodiments of the present application, and do not constitute a limitation of the present application. In the drawings, the same reference numerals generally represent the same components or steps.
[0017] Figure 1 The structure schematic diagram of the boat sheet provided by an embodiment of the present application is shown.
[0018] Figure 2A schematic view of a boat structure provided by an embodiment of the present disclosure is shown. Figure 1 An enlarged view of the boat sheet in the A area is shown.
[0019] Figure 3 A top view of a boat sheet provided by an embodiment of the present disclosure is shown.
[0020] Figure 4 A schematic view of a boat structure provided by an embodiment of the present disclosure is shown. Figure 3 An enlarged view of the boat sheet in the B area is shown.
[0021] Figure 5 A schematic view of a boat structure provided by another embodiment of the present disclosure is shown. Figure 3 An enlarged view of the boat sheet in the B area is shown.
[0022] Figure 6 A schematic view of a boat structure provided by an embodiment of the present disclosure is shown. Figure 4 A schematic view of a cross section of the boat sheet in the C-C direction is shown.
[0023] Figure 7 A schematic view of a boat structure provided by an embodiment of the present disclosure is shown.
[0024] Reference signs:
[0025] 1, boat structure; 10, boat sheet; 100, main body; 101, upper surface of the main body; 20, electrode; 110, bearing groove; 111, bearing area; 120, first groove; 130, second groove; 131, annular groove; 132, long groove; 140, vacuum breaking groove; 30, connecting piece; d1, depth of the bearing groove; d2, depth of the first groove; d3, depth of the second groove. DETAILED DESCRIPTION
[0026] The technical solutions in the embodiments of the present disclosure will be clearly and completely described below with reference to the drawings in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, rather than all the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present disclosure.
[0027] Figure 1 A schematic view of a boat structure provided by an embodiment of the present disclosure is shown. Figure 2 A schematic view of a boat structure provided by an embodiment of the present disclosure is shown. Figure 1 An enlarged view of the boat sheet in the A area is shown. Figure 3 A top view of a boat sheet provided by an embodiment of the present disclosure is shown. Figure 4 A schematic view of a boat structure provided by an embodiment of the present disclosure is shown. Figure 3 An enlarged view of the boat sheet in the B area is shown. Figure 5 A schematic view of a boat structure provided by another embodiment of the present disclosure is shown. Figure 3An enlarged view of the boat piece shown in area B. Figure 6 An enlarged view of the boat piece shown in area B. Figure 4 An enlarged view of the boat piece shown in area B. Figures 1 to 6 As shown in the drawings, the boat piece 10 provided by an embodiment of the present application comprises a main body 100, and the upper surface 101 of the main body has at least one bearing area 111 and at least one first groove 120.
[0028] Specifically, as shown in the drawings, the main body 100 can be electrically connected with the electrode 20, so that the main body 100 can be electrified. The material of the main body 100 is a conductive material. For example, the material of the main body 100 can be graphite or aluminum. For example, the material of the main body 100 can be other conductive materials, such as iron, copper, etc., which are not limited in the present application. For example, the main body 100 can be a plate structure, or a combination of a rod structure and a plate structure, and the shape of the main body 100 is not limited in the present application. Figure 3 As shown in the drawings, the upper surface 101 of the main body has at least one bearing area 111 and at least one first groove 120, and the bearing area 111 is configured to bear the sheet, and the first groove 120 is arranged outside the bearing area 111.
[0029] Figures 2 to 5 As shown in the drawings, the upper surface 101 of the main body has at least one bearing area 111 and at least one first groove 120, and the bearing area 111 is configured to bear the sheet, and the first groove 120 is arranged outside the bearing area 111.
[0030] For example, the first groove 120 does not penetrate the main body 100 in the thickness direction of the main body 100, so the first groove 120 has a groove bottom and is a blind groove. For example, the first groove 120 penetrates the main body 100 in the thickness direction of the main body 100, so the first groove 120 is a through groove, also known as a through hole, etc.
[0031] The inventors have found that when the sheet is placed on the bearing area 111, a contact resistance is generated between the sheet and the main body 100, which reduces the electric field on the surface of the sheet. The area of the main body 100 without bearing the sheet has a larger electric field strength, that is, the electric field strength on the surface of the sheet is smaller than that outside the sheet. Since the larger the electric field strength, the greater the concentration of ionized process gas, and the greater the thickness of the film, the film thickness of the central and edge regions of the sheet is not uniform, and color difference occurs at the edge of the sheet. By arranging the first groove 120 outside the bearing area 111, the electric field strength outside the bearing area 111 can be reduced, thereby reducing the concentration of process gas outside the sheet, so that the deposition rate of process gas in the central and edge regions of the sheet is basically the same, the uniformity of the film thickness on the surface of the sheet is improved, the color difference at the edge of the sheet is reduced or even eliminated, and the electrical and optical properties of the sheet are improved.
[0032] Exemplarily, the edge region of the sheet surrounds the center region of the sheet. The sheet can be a silicon sheet, a glass substrate, a wafer, or the like sheet-shaped material that needs to be coated.
[0033] Specifically, the inventors have found that the parameters of the first groove 120, such as the depth, width, length, and the like of the first groove 120, can be determined by experiments. Exemplarily, a first groove 120 can be initially set according to experience, and then the electric field strengths of the center region and the edge region of the sheet are detected. If the electric field strengths of the center region and the edge region of the sheet are not substantially equal, the parameters of the first groove 120 are adjusted until the electric field strengths of the center region and the edge region of the sheet are substantially equal.
[0034] In some embodiments, the parameters of the first groove 120 can be determined by using ANSYS software. Specifically, a three-dimensional model of the boat piece 10 can be initially established, and then the three-dimensional model of the boat piece 10 is input into the ANSYS software. The ANSYS software is used to determine the electric field strengths of the center region and the edge region of the sheet corresponding to the three-dimensional model of the boat piece 10. According to the experimental results of the electric field strengths of the center region and the edge region of the sheet corresponding to the three-dimensional model of the boat piece 10 determined by the ANSYS software, the parameters of the first groove 120 in the three-dimensional model of the boat piece 10 are adjusted, and then the adjusted three-dimensional model of the boat piece 10 is input into the ANSYS software for testing again. In this way, the parameters of the first groove 120 in the three-dimensional model of the boat piece 10 are adjusted until the electric field strengths of the center region and the edge region of the sheet are substantially equal. The parameters of the first groove 120 in the three-dimensional model of the boat piece 10 in the case where the electric field strengths of the center region and the edge region of the sheet are substantially equal are taken as the final parameters of the first groove 120 of the boat piece 10.
[0035] In some embodiments, the number of the first grooves 120 is multiple, and the multiple first grooves 120 are arranged around the carrying region 111, so as to uniformly reduce the color difference of all edges of the sheet.
[0036] Exemplarily, the first groove 120 can be a long groove, a circular groove, or a polygonal groove, which is not limited in the present application. For example, the first groove 120 is a long groove, and the first groove 120 extends along the edge of the carrying region 111. For another example, the first groove 120 is a circular groove, and the number of the first grooves 120 is multiple, and the multiple first grooves 120 are arranged around the carrying region 111. Specifically, the multiple first grooves 120 are arranged at equal intervals around the carrying region 111.
[0037] In some embodiments, the shape of the bearing area 111 comprises a polygon, such as a triangle, a rectangle, a pentagon, a hexagon, a trapezoid, etc. The plurality of first grooves 120 corresponds to the plurality of edges of the bearing area 111 one by one, i.e., one first groove 120 is arranged corresponding to each edge of the bearing area 111. In some embodiments, a plurality of first grooves 120 can also be arranged corresponding to each edge of the bearing area 111. The first grooves 120 extend along the edges of the bearing area 111, and two adjacent first grooves 120 are disconnected at the corner positions of the bearing area 111.
[0038] The inventors have found that the electric field outside the corner positions of the bearing area 111 is smaller than the electric field at other positions of the bearing area 111, and the electric field outside the corner positions of the bearing area 111 is approximately equal to the electric field at the positions of the bearing area 111 in contact with the central area of the sheet, so the first grooves 120 can not be arranged outside the corner positions of the bearing area 111.
[0039] In some embodiments, as shown in FIG. 1B, the first grooves 120 extend along the edges of the bearing area 111 in the horizontal direction, thereby weakening the electric field to the greatest extent. Figure 6
[0040] In some embodiments, as shown in FIG. 1C, the first grooves 120 extend along the edges of the bearing area 111 in the vertical direction, thereby weakening the electric field to the greatest extent. Figure 4 Figure 5 In some embodiments, as shown in FIG. 1D, the bearing area 111 has at least one second groove 130, which can both reduce the electric field at the edges of the bearing area 111 and reduce the contact area between the sheet and the bearing area 111, thereby reducing the pollution to the sheet.
[0041] Exemplarily, as shown in FIG. 2A, the second groove 130 comprises a ring-shaped groove 131 extending along the edges of the bearing area 111. Specifically, as shown in FIG. 2B, the shape of the bearing area 111 is a square, and the ring-shaped groove 131 can be a square ring. In some embodiments, if the shape of the bearing area 111 is a circle, the ring-shaped groove 131 can be a circular ring. In some embodiments, if the shape of the bearing area 111 is a trapezoid, the ring-shaped groove 131 can be a trapezoidal ring. Figure 4 Figure 4 Exemplarily, as shown in FIG. 3A, the second groove 130 comprises a plurality of long grooves 132, and the plurality of long grooves 132 are uniformly distributed along the edges of the bearing area 111. Specifically, as shown in FIG. 3B, the shape of the bearing area 111 is a square, and the long grooves 132 are distributed along the edges of the bearing area 111. In some embodiments, if the shape of the bearing area 111 is a circle, the long grooves 132 can be uniformly distributed along the circumference of the bearing area 111. In some embodiments, if the shape of the bearing area 111 is a trapezoid, the long grooves 132 can be uniformly distributed around each edge of the bearing area 111.
[0042] Figure 5 Figure 5
[0043] In some embodiments, as shown in FIG. 1, the carrier area 111 is a polygon, and the long slot 132 is disconnected at the corner position of the carrier area 111. Figure 5
[0044] In some embodiments, as shown in FIG. 1, the upper surface 101 of the main body has a carrier slot 110, and the bottom of the carrier slot 110 forms a carrier area 111 for positioning the sheet through the carrier slot 110. Figures 3 to 5
[0045] Exemplarily, the bottom of the carrier slot 110 forms a carrier area 111 for carrying the sheet. The sidewall of the carrier slot 110 is used to limit the sheet in the horizontal direction to prevent the sheet from floating in the horizontal direction.
[0046] In some embodiments, as shown in FIG. 1, the depth d1 of the carrier slot is less than the depth d2 of the first slot and the depth d3 of the second slot. Since the depth d2 of the first slot and the depth d3 of the second slot are both greater than the depth d1 of the carrier slot, the electric field at the edge of the sheet and the outer side can be weakened. Figure 6
[0047] In some embodiments, as shown in FIG. 1, the carrier area 111 also has at least one vacuum breaking slot 140 extending from the edge of the carrier area 111 to the center of the carrier area 111. Figures 1 to 5 Exemplarily, the boat sheet 10 carries the sheet during the film coating process, which is generally carried out in a film coating chamber. Before film coating, the film coating chamber is generally evacuated to reduce the influence of impurity gas on the film coating gas. During the vacuumizing process, the sheet is adsorbed on the boat sheet 10, that is, negative pressure is generated between the boat sheet 10 and the sheet, which makes it difficult to take the sheet from the boat sheet 10 after the sheet is coated. By providing the vacuum breaking slot 140, gas can enter between the boat sheet 10 and the sheet through the vacuum breaking slot 140, thereby eliminating the negative pressure between the boat sheet 10 and the sheet, facilitating the taking of the sheet.
[0048]
[0049] As shown in FIG. 2, the boat structure 1 includes a boat sheet 10 and a connecting piece 30, and the connecting piece 30 connects multiple boat sheets 10. Figure 7 Figure 7 Specifically, the connecting piece 30 can be a connecting rod, a bolt and nut structure, or the like, as long as it can connect multiple boat sheets 10, and the structure of the connecting piece 30 is not limited in the present application.
[0050] Specifically, the connecting piece 30 can be a connecting rod, a bolt and nut structure, or the like, as long as it can connect multiple boat sheets 10, and the structure of the connecting piece 30 is not limited in the present application.
[0051] Exemplarily, an insulating piece can also be placed between adjacent boat pieces 10 to prevent short circuit between adjacent boat pieces 10.
[0052] Since the boat structure 1 comprises the boat pieces 10 mentioned in the above embodiments, the boat structure 1 has all the technical features and technical effects of the boat pieces 10, which will not be repeated here.
[0053] In the embodiments of the present application, if the form of connection is not explicitly limited, the form of connection can be detachable connection forms such as bolts and nuts, screws, buckles, magnetic attraction, etc. In some connections, if there is no special requirement for the form of non-detachable cooperation, non-detachable connection can be achieved by welding, bonding, gluing, etc.
[0054] The above describes the basic principles of the present disclosure in combination with specific embodiments, but it should be pointed out that the advantages, advantages, effects, etc. mentioned in the present disclosure are only examples and not limitations, and these advantages, advantages, effects, etc. cannot be considered as the must-have of each embodiment of the present disclosure. In addition, the above specific details of the disclosure are only for the purpose of example and for the purpose of understanding, and not for the purpose of limitation, and the above details do not limit the present disclosure to the must-use specific details.
[0055] The block diagrams of the devices, apparatuses, equipment, systems involved in the present disclosure are only illustrative examples and are not intended to require or imply the connection, arrangement, configuration shown in the block diagram. As those skilled in the art will recognize, these devices, apparatuses, equipment, systems can be connected, arranged, configured in any manner. Words such as "include", "contain", "have", etc. are open-ended words, mean "include but not limited to", and can be used interchangeably. The words "or" and "and" used herein mean the word "and / or", and can be used interchangeably unless the context clearly indicates otherwise. The word "such as" used herein means the phrase "such as but not limited to", and can be used interchangeably.
[0056] It should also be noted that in the devices, equipment and methods of the present disclosure, each component or each step can be decomposed and / or recombined. These decompositions and / or recombinations should be considered as equivalent solutions of the present disclosure.
[0057] The above description of the disclosed aspects is provided so that any person skilled in the art can make or use the present disclosure. Various modifications to these aspects will be apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of the present disclosure. Therefore, the present disclosure is not intended to be limited to the aspects shown herein, but rather is to be accorded the broadest scope consistent with the principles and novel features disclosed herein.
[0058] The foregoing description has been presented for the purposes of illustration and description. Furthermore, the description is not intended to limit the embodiments of the disclosure to the forms disclosed herein. Although the various example aspects and embodiments have been described herein with regard to particular aspects and embodiments, those skilled in the art will recognize that certain modifications, changes, substitutions, additions and sub-combinations can be made without departing from the spirit of the disclosure.
Claims
1. A boat piece, characterized in that, Comprising: a body, the body being electrically connectable with an electrode to enable the body to be energized, wherein the body is of an electrically conductive material; wherein an upper surface of the body has at least one loading area configured to load a sheet and at least one first slot disposed outside the loading area.
2. The boat as claimed in claim 1, wherein The number of the first slots is plural, and the plural first slots are disposed around the loading area.
3. The boat as claimed in claim 2, wherein The shape of the loading area comprises a polygon, and the plural first slots correspond to the plural sides of the loading area one by one, the first slots extend along the edges of the loading area, and adjacent two first slots are disconnected at the corner positions of the loading area.
4. The boat as claimed in claim 3, wherein The first slots penetrate the body in the vertical direction.
5. The paddle according to any one of claims 1 to 4, characterized in that The loading area has at least one second slot; wherein the second slot comprises a ring-shaped slot extending along the edge of the loading area, or the second slot comprises a long slot, and the number of the second slots is plural, and the plural second slots are uniformly distributed along the edge of the loading area.
6. The boat as claimed in claim 5, wherein The upper surface of the body has a loading slot, and the bottom of the loading slot forms the loading area.
7. The boat as claimed in claim 6, wherein The depth of the loading slot is less than the depth of the first slot, and the depth of the loading slot is less than the depth of the second slot.
8. The paddle according to any one of claims 1 to 4, wherein The loading area further has at least one vacuum-breaking slot, and the vacuum-breaking slot extends from the edge of the loading area to the center of the loading area.
9. The paddle according to any one of claims 1 to 4, wherein The material of the body is graphite or aluminum.
10. A boat structure characterized by, Comprising: a plurality of the boat pieces according to any one of claims 1 to 9; a connecting piece connecting the plurality of boat pieces.