Corrugated pipe heat insulation structure of crucible shaft of single crystal furnace

Abstract

The utility model relates to the technical field of single crystal furnaces, and provides a corrugated pipe heat insulation structure of a crucible shaft of a single crystal furnace, which comprises a support ring supported on a flange plate of an existing corrugated pipe; the heat insulation sleeve is fixedly connected below the supporting ring; wherein the heat insulation sleeves are arranged between the existing crucible shaft and the corrugated pipe at intervals. The arranged heat insulation sleeve can separate the crucible shaft from the corrugated pipe, so that the high temperature of the supporting rod cannot directly act on the corrugated pipe in the lifting process of the crucible position, and the phenomena of annealing weakness, oxidation coloration and irreversible plastic deformation damage of the corrugated pipe caused by high-temperature baking of the supporting rod can be completely eradicated; therefore, the service life of the corrugated pipe is effectively prolonged.

Description

TECHNICAL FIELD

[0001] The utility model relates to single crystal furnace technical field, concretely relates to a corrugated pipe heat insulation structure of single crystal furnace crucible axle. BACKGROUND

[0002] The single crystal furnace draws the work mode of the crystal bar and is to rely on the crucible system movement assembly crucible axle to drive the support rod to lift the crucible to realize the crystal drawing, and under the condition that the crystal drawing process is in the vacuum state, needs to configure the corrugated pipe with the tensile compression characteristic and the main material is 304L stainless steel as the protection structure of the crucible axle, namely the corrugated pipe is an important part of the single crystal furnace crucible system.

[0003] The structure of the above-mentioned crucible axle corrugated pipe is as shown in Figure 1 The support rod 1 is fixed on the upper end of the crucible axle 2, the corrugated pipe 3 is sleeved on the outer side of the crucibble axle 2 and is connected with the bottom surface of the single crystal furnace bottom (not shown in the drawing) through the flange plate 31 on its upper end, and the lower end of the corrugated pipe 3 is connected with the power unit (not shown in the drawing) of the crucible axle 2; during the process of drawing the crystal on the furnace table, the power unit drives the crucible axle 2 to act and drives the support rod 1 to lift, and the corrugated pipe 3 is repeatedly stretched and compressed.

[0004] However, the corrugated pipe with the above installation structure has the following defects:

[0005] 1. During the process of lifting the crucible, the temperature of the support rod is raised to about 1400 DEG C. The high temperature of the support rod repeatedly bakes the corrugated pipe to the interval section of about 15 cm of the upper end flange plate, and since there is no any temperature-resistant heat insulation protection measure between the two, the corrugated pipe is heated and oxidized under the high temperature baking of the support rod. After repeated heating and oxidation, the corrugated pipe produces thermal fatigue phenomenon. When the crucible is lowered to the lowest process specified position, the corrugated pipe is easily deformed after reaching the maximum stretching limit, which causes the corrugated pipe to be damaged and cause air leakage, resulting in the oxidation and whitening of the crystal bar in the furnace, and the serious one will cause the risk of silicon leakage due to the oxidation and corrosion of the support rod.

[0006] 2. When the crucible is lifted, the high temperature of the support rod no longer bakes the corrugated pipe, and the corrugated pipe starts to cool naturally. The intergranular segregation of stainless steel will occur when it is heated or slowly cooled through the temperature interval between 425 DEG C and 815 DEG C, that is, the corrugated pipe will be annealed and soft due to heating and cooling, and the corrugated pipe is a 0.2 mm thick thin-walled part, which will accelerate the process.

[0007] 3. The temperature-resistant distance between the outer cylindrical surface of the support rod and the inner side wall of the corrugated pipe is small (about 30 mm), and the high temperature of the support rod directly acts on the corrugated pipe, which will accelerate the service life of the corrugated pipe. UTILITY MODEL CONTENTS

[0008] The utility model discloses a bellows heat insulation structure of single crystal furnace crucible axle to solve the problem of the heat fatigue of bellows, annealing soft failure and accelerated consumption of service life caused by the absence of any temperature resistant heat insulation protection measure between bellows and crucible axle in the prior art.

[0009] To realize above-mentioned purpose, the utility model provides following technical scheme:

[0010] A bellows heat insulation structure of single crystal furnace crucible axle, comprising:

[0011] Support ring, bear on the flange plate of existing bellows, and

[0012] Heat insulation sleeve, fixedly connected below the support ring,

[0013] Wherein, the heat insulation sleeve is spaced apart between the existing crucible axle and bellows.

[0014] In one embodiment of the present application, the flange plate inner hole is provided with an annular step downward from its top surface;

[0015] The support ring is embedded in the annular step, and its top surface is flush with the top surface of the flange plate.

[0016] In one embodiment of the present application, the outer cylindrical surface of the support ring is gap fitted with the inner side surface of the annular step.

[0017] In one embodiment of the present application, the support ring and the heat insulation sleeve are welded.

[0018] In one embodiment of the present application, the heat insulation sleeve is in cylindrical structure, and its wall thickness is 2-3mm.

[0019] In one embodiment of the present application, the length of the heat insulation sleeve is greater than 150mm.

[0020] In one embodiment of the present application, the annular spacing width between the inner side wall of the heat insulation sleeve and the outer cylindrical surface of the supporting rod is 20mm.

[0021] The annular spacing width between the outer side wall of the heat insulation sleeve and the inner side wall of the bellows is 7mm.

[0022] In one embodiment of the present application, the material of the support ring and the heat insulation sleeve is stainless steel.

[0023] Compared with the prior art, the utility model has the beneficial effects that:

[0024] 1. The heat insulation sleeve can separate the crucible shaft from the bellows, so that the high temperature of the support rod during the lifting and lowering of the crucible will not directly act on the bellows. This can completely prevent the bellows from being damaged by annealing, softening, oxidation and discoloration, and irreversible plastic deformation due to the high temperature of the support rod, thus effectively extending the service life of the bellows.

[0025] 2. During the lifting and lowering of the crucible, the heat insulation sleeve can completely separate the corrugated pipe from the high-heat area of ​​the support rod and protect it from repeated baking by the high temperature of the support rod, thereby avoiding thermal fatigue failure of the corrugated pipe and accelerated consumption of its service life.

[0026] 3. Appropriate gaps are left between the heat insulation sleeve and the outer surface of the support rod, as well as the inner wall of the corrugated pipe, so as to isolate the high temperature of the support rod from being directly transferred to the corrugated pipe, thereby reducing the phenomenon of thermal fatigue caused by repeated heating of the corrugated pipe. Attached Figure Description

[0027] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0028] Figure 1 This is a schematic diagram of the structure of the support rod, crucible shaft, and bellows in the prior art;

[0029] Figure 2 This is a schematic diagram of the structure of this utility model;

[0030] Figure 3 for Figure 2 A magnified schematic diagram of part A in the middle. Detailed Implementation

[0031] In the following description, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments can be modified in various ways without departing from the spirit or scope of this invention. Therefore, the drawings and description are considered to be exemplary in nature and not restrictive.

[0032] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0033] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0034] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances.

[0035] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0036] The following disclosure provides many different embodiments or examples for implementing various structures of this invention. To simplify the disclosure, specific examples of components and arrangements are described below. Of course, these are merely examples and are not intended to limit the scope of this invention.

[0037] The embodiments of this utility model will now be described in detail with reference to the accompanying drawings.

[0038] Referring to Figure 2 and Figure 3 The utility model provides a corrugated pipe heat insulation structure 10 of single crystal furnace crucible axle, including:

[0039] Support ring 11 bears on the flange plate 31 of existing corrugated pipe 3, and

[0040] Heat insulation sleeve 12 is fixedly connected below support ring 11;

[0041] Wherein, heat insulation sleeve 12 is spaced apart between existing crucible axle 2 and corrugated pipe 3.

[0042] Specifically, the annular step is sunk from the top surface of flange plate 31 downwards at the inner hole of flange plate 31, and support ring 11 is embedded in the annular step, and the top surface of support ring 11 is flush with the top surface of flange plate 31 (that is, the thickness of support ring 11 is equal to the height of annular step). In this way, after flange plate 31 is connected with the bottom surface of single crystal furnace bottom, support ring 11 will be in contact with the bottom surface of single crystal furnace bottom to realize axial positioning. That is to say, heat insulation sleeve 12 can separate crucible axle 2 and corrugated pipe 3, so that the high temperature of support rod 1 will not directly act on corrugated pipe 3 during the lifting of crucible position, and the phenomenon that corrugated pipe 3 is annealed, oxidized, colored and irreversibly deformed and damaged due to the high temperature baking of support rod 1 can be completely eliminated, thereby effectively prolonging the service life of corrugated pipe 3.

[0043] The outer cylindrical surface of support ring 11 is gap-fitted with the inner side surface of annular step. The gap-fitting is conducive to the placement, taking and maintenance of the above-mentioned corrugated pipe heat insulation structure 10.

[0044] Support ring 11 is welded with heat insulation sleeve 12. The welded connection makes the above-mentioned corrugated pipe heat insulation structure 10 have low manufacturing cost, and compared with the water cooling sleeve structure, it has no water leakage hidden danger and is safer.

[0045] Heat insulation sleeve 12 is in a cylindrical structure, and the wall thickness thereof is 2-3mm. The structure is simple and easy to process.

[0046] The length of heat insulation sleeve 12 needs to be greater than the high heat area of existing support rod 1. Specifically, the axial length of the high heat area of existing support rod 1 is about 150mm, that is, the length of heat insulation sleeve 12 is greater than 150mm. In this way, during the lifting of crucible position, heat insulation sleeve 12 can completely separate corrugated pipe 3 from the high heat area of support rod 1 to protect it, so that it is protected from repeated baking of high temperature of support rod 1, thereby avoiding thermal fatigue failure of corrugated pipe 3 and accelerating consumption of service life.

[0047] The annular interval width between the inner side wall of the heat insulation sleeve 12 and the outer circular surface of the supporting rod 1 is about 20mm, and the annular interval width between the outer side wall of the heat insulation sleeve 12 and the inner side wall of the corrugated pipe 3 is about 7mm. That is to say, the inner diameter of the heat insulation sleeve 12 is about 40mm larger than the diameter of the supporting rod 1, and the outer diameter of the heat insulation sleeve 12 is about 14mm smaller than the inner diameter of the corrugated pipe 3 (the outer side wall of the heat insulation sleeve 12 close to the supporting ring 11 does not contact the inner hole of the flange plate 31). In this way, the heat insulation sleeve 12 is kept at a proper interval from the outer circular surface of the supporting rod 1 and the inner side wall of the corrugated pipe 3, so that the high temperature of the supporting rod 1 is not directly transmitted to the corrugated pipe 3, and the phenomenon of thermal fatigue of the corrugated pipe 3 caused by repeated heating can be reduced.

[0048] In the embodiment, the supporting ring 11 and the heat insulation sleeve 12 are made of 304 or 310S stainless steel, which has good high temperature resistance.

[0049] The above embodiment is only a preferred embodiment of the present application, and is not a limitation on the technical scheme of the present application. Any technical scheme that can be realized on the basis of the above embodiment without creative labor should be considered as falling within the protection scope of the present application.

Claims

1. A bellows insulation structure for a single crystal furnace crucible shaft, characterized by, It comprises: a support ring, which is arranged on the flange of the existing bellows; and a heat insulation sleeve, which is fixedly connected below the support ring; wherein the heat insulation sleeve is arranged between the existing crucible shaft and the bellows; the heat insulation sleeve has a cylindrical structure, a wall thickness of 2-3 mm, a length greater than 150 mm, an annular gap width of 20 mm between the inner side wall of the heat insulation sleeve and the outer cylindrical surface of the existing support rod, and an annular gap width of 7 mm between the outer side wall of the heat insulation sleeve and the inner side wall of the bellows.

2. The bellows heat insulation structure of the crucible shaft of a single crystal furnace according to claim 1, characterized in that: an annular step is arranged in the inner hole of the flange and sunken downward from the top surface thereof; the support ring is embedded in the annular step and has a top surface flush with the top surface of the flange.

3. The bellows insulation of a single crystal furnace crucible shaft according to claim 2, wherein, the outer cylindrical surface of the support ring is in clearance fit with the inner side surface of the annular step.

4. The bellows insulation of a single crystal furnace crucible shaft according to any one of claims 1 to 3, characterized in that the support ring and the heat insulation sleeve are welded.

5. The bellows insulation structure for a single crystal furnace crucible shaft according to any one of claims 1 to 3, characterized by the support ring and the heat insulation sleeve are made of stainless steel.

Images