Heater for single crystal furnace

Abstract

The utility model provides a heater for a single crystal furnace, and aims to solve the technical problem that the heater is easy to crack due to the fact that a foot plate of the existing heater for the single crystal furnace is connected with a heating area through a carbon-carbon bolt. The heater includes: a heating coil; the foot plate is connected with the heating ring through a plurality of connecting assemblies; wherein the heating ring is provided with a plurality of first through holes, the upper part of the foot plate is provided with a plurality of second through holes, and the first through holes and the second through holes are in one-to-one correspondence to form a plurality of groups of connecting holes for accommodating the connecting assemblies; the connecting assembly comprises a connecting piece, an open groove is formed in the connecting piece, and the open groove is located in the connecting hole. The heating ring and the foot plate are connected through the connecting pieces with the grooves in the middles, the heating ring and the foot plate are in non-threaded fit, the problem of supporting crack and damage can be avoided, the middle grooves can counteract overlarge stress of the foot plate of the heater caused by thermal expansion, and the service life of the heater is effectively prolonged.

Description

TECHNICAL FIELD

[0001] The utility model relates to single crystal furnace technical field especially is single crystal furnace with heater. BACKGROUND

[0002] The graphite heater for the existing single crystal furnace is all split type, and the heater footboard and the heating area are connected by carbon-carbon bolts, because the thermal expansion coefficients of the carbon-carbon composite material and the isostatic pressure graphite are inconsistent, the carbon-carbon bolts expand and collide and extrude the graphite heating area under high temperature, thereby causing the heater to crack, leading to early scrap, and increasing the production cost. SUMMARY

[0003] In view of the above problems, the utility model discloses a single crystal furnace with heater, which solves the technical problem that the heater is prone to cracking due to the connection of the heater footboard and the heating area of the existing single crystal furnace by carbon-carbon bolts.

[0004] To achieve the above object, the utility model provides the following technical scheme:

[0005] A single crystal furnace with heater, comprising: a heating ring; a footboard connected to the heating ring by a plurality of connecting components; wherein a plurality of first through holes are provided on the heating ring, a plurality of second through holes are provided on the upper part of the footboard, and the first through holes and the second through holes form a plurality of connecting holes accommodating the connecting components in one-to-one correspondence; the connecting component comprises a connecting piece, and a slot is provided on the connecting piece, and the slot is located in the connecting hole.

[0006] The heating ring and the footboard are connected by a plurality of connecting pieces with slots in the middle, and the heating ring and the footboard are not threadedly matched, which can avoid extrusion and hidden cracking caused by tapping screw holes, avoid cracking caused by the connection of the bolt and the screw hole, and avoid damage caused by thermal expansion, and on the other hand, the slot in the middle of the connecting piece can offset the excessive stress on the heater footboard caused by thermal expansion, effectively prolonging the service life of the heater.

[0007] Optionally, a first connecting part is arranged on the lower part of the heating ring, a first step is formed on one side of the first connecting part, and the first through hole is arranged on the first connecting part; the footboard has an L-shaped structure, a second connecting part is arranged on the top of the footboard and abuts against the first step, a second step is arranged on one side of the second connecting part and abuts against the first connecting part, and the second through hole is arranged on the second connecting part.

[0008] Optionally, the connecting piece comprises a first circular table and a connecting head arranged on one side of the first circular table and having a smaller diameter than the first circular table, a slot is arranged on the connecting head, and the connecting head is matched with the connecting hole.

[0009] Optionally, a first annular step with a diameter larger than the first through hole is arranged on the side of the first through hole away from the second through hole, and the first annular step is matched with the first circular platform.

[0010] Optionally, the connecting assembly further comprises a matching piece matched with the connecting piece; the matching piece comprises a second circular platform and a boss arranged on one side of the second circular platform and having a diameter smaller than the second circular platform, and a groove is arranged on the boss; the connecting piece comprises a first circular platform and a connecting head arranged on one side of the first circular platform and having a diameter smaller than the first circular platform, and a groove is arranged on the connecting head; the connecting head is matched with the groove, and the boss is matched with the connecting hole.

[0011] Optionally, a first annular step with a diameter larger than the first through hole is arranged on the side of the first through hole away from the second through hole, and the first annular step is matched with the first circular platform; a second annular step with a diameter larger than the second through hole is arranged on the end of the second through hole away from the first through hole, and the second annular step is matched with the second circular platform.

[0012] Optionally, the connecting piece and the matching piece are made of carbon-carbon material.

[0013] Optionally, the heating ring comprises a plurality of V-shaped grooves and a plurality of U-shaped grooves, the plurality of V-shaped grooves are arranged at intervals in the circumferential direction, and the opening of the V-shaped groove faces upward, and the U-shaped groove is arranged in a staggered manner with the V-shaped groove, and the opening of the U-shaped groove faces downward.

[0014] Optionally, the heating ring comprises a first heating lobe having two U-shaped grooves in the lower part, a second heating lobe, a third heating lobe and a fourth heating lobe, the first heating lobe, the second heating lobe, the third heating lobe and the fourth heating lobe are arranged in pairs in a symmetrical manner, a first step is arranged on the lower part of one group of heating lobes, a first connecting part is formed on one side of the first step, and the adjacent two heating lobes are connected through a heating lobe group, a plurality of V-shaped grooves with openings facing upward are arranged above the heating lobe group, and a U-shaped groove with an opening facing downward is arranged between the adjacent two V-shaped grooves.

[0015] Compared with the prior art, the utility model has the advantages that:

[0016] The heating ring and the foot plate are connected through a plurality of connecting pieces with grooves in the middle, and the heating ring and the foot plate are not threadedly matched, on one hand, the problem of extrusion and hidden cracking caused by tapping screw holes can be avoided, the problem of cracking caused by the connection of bolts and screw holes can be avoided, and the damage caused by thermal expansion can be avoided, on the other hand, the stress of the heater foot plate caused by thermal expansion can be offset through the grooves in the middle of the connecting pieces, and the service life of the heater is effectively prolonged. BRIEF DESCRIPTION OF DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiments description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without any creative effort based on these drawings.

[0018] Figure 1 It is an embodiment structure schematic view of the heater for the single crystal furnace in the present application.

[0019] Figure 2 It is a sectional structure schematic view of an embodiment of the heater for the single crystal furnace in the present application.

[0020] Figure 3 It is an enlarged view of structure A in the present application. Figure 2

[0021] Figure 4 It is a structure schematic view of the heating ring in the present application.

[0022] Figure 5 It is a structure schematic view of the foot plate in the present application.

[0023] Figure 6 It is a structure schematic view of the connecting piece in the present application.

[0024] Figure 7 It is a structure schematic view of the embodiment 3.

[0025] Figure 8 It is an enlarged view of structure B in the present application. Figure 7

[0026] It is a structure schematic view of an embodiment of the connecting assembly in the present application. Figure 9 Reference signs:

[0027] 1, heating ring; 1a, first heating petal; 1b, second heating petal; 1c, third heating petal; 1d, fourth heating petal; 1e, heating petal group; 11, first connecting part; 12, first step; 13, first through hole; 14, first annular step; 15, V-shaped groove; 16, U-shaped groove;

[0028] 2, foot plate; 21, second connecting part; 22, second step; 23, second through hole; 24, second annular step;

[0029] 3, connecting assembly; 31, connecting piece; 311, first circular table; 312, connecting head; 313, slotted; 32, matching piece; 321, second circular table; 322, boss; 323, groove.

[0030] DETAILED DESCRIPTION ​​

[0031] In the following, only certain exemplary embodiments are simply described. As those skilled in the art can recognize, the described embodiments can be modified in various different manners without departing from the spirit or scope of the embodiments of the present application. Therefore, the drawings and the description are considered to be exemplary in nature rather than limiting.

[0032] In the description of the embodiments of the present application, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", "end", "side" and the like indicate the orientation or positional relationship shown in the drawings based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the embodiments of the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements indicated must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the embodiments of the present application.

[0033] In addition, the terms "first", "second" are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the embodiments of the present application, the meaning of "multiple" is two or more, unless otherwise specifically limited.

[0034] In the embodiments of the present application, unless otherwise specifically defined and limited, the terms "mounting", "connecting", "connecting", "fixing" and the like should be broadly understood, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected, or it can be communicated; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication or interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the embodiments of the present application can be understood according to the specific circumstances.

[0035] In the embodiments of the present application, unless otherwise explicitly specified and limited, the first feature is "on" or "under" the second feature, which can include that the first and second features are in direct contact, or can include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, the first feature "on", "above" and "on the surface of" the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "under", "below" and "under" the second feature includes that the first feature is directly below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0036] The following disclosure provides many different embodiments or examples for implementing different structures of the embodiments of the present application. In order to simplify the disclosure of the embodiments of the present application, the components and settings of specific examples are described below. Of course, they are only examples, and the purpose is not to limit the embodiments of the present application. In addition, the embodiments of the present application can repeatedly refer to numbers and / or letters in different examples, and such repetition is for the purpose of simplification and clarity, which itself does not indicate the relationship between the various embodiments and / or settings discussed.

[0037] The embodiments of the present application will be described in detail below with reference to the accompanying drawings.

[0038] Embodiment 1

[0039] As Figures 1-6 shown, the embodiments of the present application provide a heater for a single crystal furnace, which comprises a heating ring 1, a foot plate 2, and a plurality of connecting pieces 31. The foot plate 2 is at least two, which are symmetrically arranged below the heating ring 1 respectively, and the upper part of each foot plate 2 is connected with the heating ring 1 through a plurality of connecting assemblies 3. In use, the heating ring 1 is supported on the bottom of the single crystal furnace through the two foot plates 2.

[0040] Specifically,

[0041] The lower part of the heating ring 1 is provided with a first connecting part 11, one side of the first connecting part 11 is formed with a first step 12, and a plurality of first through holes 13 are formed on the first connecting part 11. The foot plate 2 is in L-shaped structure, the top of the foot plate 2 is provided with a second connecting part 21 and a second step 22, and a plurality of second through holes 23 are formed on the second connecting part 21. In use, the second connecting part 21 abuts against the first step 12, the first connecting part 11 abuts against the second step 22, the second through holes 23 and the first through holes 13 form a plurality of groups of connecting holes for accommodating the connecting assemblies 3 one by one, and one group of connecting assemblies 3 is arranged in each group of connecting holes respectively, so as to fixedly connect the heating ring 1 and the foot plate 2 through the connecting assemblies 3.

[0042] Optionally, the first step 12 is formed on the inner side of the heat circle 1, and correspondingly, the second step 22 is formed on the outer side wall of the foot plate 2.

[0043] Embodiment 2

[0044] On the basis of the embodiment 1, the utility model discloses an application embodiment provides a kind of connecting assembly, reference Figure 3 And Figure 6 As shown in the figure, the connecting assembly 3 includes a connecting piece 31, and the connecting piece 31 includes a first circular platform 311 and a connecting head 312 disposed on one side of the first circular platform 311 and having a smaller diameter than the first circular platform 311. The connecting head 312 is provided with a slot 313, which extends from one end away from the first circular platform 311 to the other end. The bottom of the slot 313 is disposed close to the first circular platform 311. In this embodiment, the diameter and length of the connecting head 312 are adapted to the through hole.

[0045] Optionally, the first through hole 13 is provided with a first annular step 14 having a larger diameter than the through hole on the side away from the second through hole 23, and the first circular platform 311 is adapted to the first annular step 14. That is, the outer side of the first connecting part 11 of the heat circle 1 is provided with a first annular step 14 connected to the first through hole 13. By providing the annular step, the area of contact between the through hole and the connecting head is reduced, further reducing the risk of cracking of the heater.

[0046] In use, the connecting parts of the foot plate 2 and the heat circle 1 are first docked with the steps, so that the through holes of the two correspond one by one to form a plurality of connecting holes, and then the connecting piece 31 is inserted into each connecting hole to fix the foot plate 2 and the heat circle 1. The through holes in the heat circle 1 and the foot plate 2 can avoid extrusion, hidden cracking caused by tapping screw holes, and cracking caused by the connection of bolts and screw holes. At the same time, by providing the slot 313 in the middle of the connecting head 312, the stress on the heater foot plate caused by thermal expansion can be offset, effectively reducing the cracking of the heater.

[0047] Embodiment 3

[0048] On the basis of the embodiment 1, the utility model discloses an application embodiment provides a kind of connecting assembly, reference Figures 7-9 As shown in the figure, the connecting assembly 3 includes a connecting piece 31, and the connecting piece 31 includes a first circular platform 311 and a connecting head 312 disposed on one side of the first circular platform 311 and having a smaller diameter than the first circular platform 311. The connecting head 312 is provided with a slot 313, which extends from one end away from the first circular platform 311 to the other end. The bottom of the slot 313 is disposed close to the first circular platform 311. In this embodiment, the diameter and length of the connecting head 312 are adapted to the through hole.

[0049] The connecting piece 31 comprises a first circular table 311 and a connecting head 312 arranged on one side of the first circular table 311 and having a diameter smaller than that of the first circular table 311, and a slot 313 is formed in the connecting head 312 and extends from one end away from the first circular table 311 to the other end, and the bottom of the slot 313 is arranged close to the first circular table 311. The cooperating piece 32 comprises a second circular table 321 and a convex table 322 arranged on one side of the second circular table 321 and having a diameter smaller than that of the second circular table 321, and a groove 323 is formed in the convex table 322.

[0050] In the embodiment, the diameter and length of the connecting head 312 are adapted to the groove 323, and the diameter of the convex table 322 is adapted to the through hole. In use, the connecting piece 31 and the cooperating piece 32 are fixedly connected by the connecting head 312 arranged in the groove 323, and the connecting head 312 and the groove 323 can be inserted or threadedly connected, that is, the outer wall of the connecting head 312 has external threads, and the inner wall of the groove 323 has internal threads adapted to the external threads.

[0051] Optionally, the cooperating piece 32 and the connecting piece 31 are both made of carbon-carbon material. As an implementation scenario, the connecting piece 31 can be a carbon-carbon bolt with a slot formed in the middle, and the cooperating piece 32 can be a carbon-carbon nut adapted to the carbon-carbon bolt.

[0052] Optionally, the side of the first through hole 13 away from the second through hole 23 is provided with a first annular step 14 having a diameter larger than that of the first through hole 13, and the first circular table 311 is adapted to the first annular step 14; and the end of the second through hole 23 away from the first through hole 13 is provided with a second annular step 24 having a diameter larger than that of the second through hole 23. The second annular step 24 is adapted to the second circular table 321. That is, the outer side of the first connecting part 11 of the heating ring 1 is provided with the first annular step 14 in communication with the first through hole 13, and the inner side of the second connecting part 21 of the foot plate 2 is provided with the second annular step 24 in communication with the second through hole 23. Optionally, the first annular step 14 and the second annular step 24 have the same size, and the first circular table 311 and the second circular table 321 have the same size. By arranging the two annular steps, the area of the through hole in contact with the connecting assembly can be reduced, and the risk of cracking of the heater can be further reduced.

[0053] In use, the connecting parts of the foot plate 2 and the heating ring 1 are first butt-jointed with the steps, so that the through holes of the two are correspondingly formed into a plurality of groups of connecting holes, and then the connecting piece 31 is used to fix the foot plate 2 and the heating ring 1 through each group of connecting holes. Specifically, the connecting piece 31 is first arranged in the hole from one end of the connecting hole, and then the cooperating piece 32 is arranged in the other end of the connecting hole and is butt-jointed with the first connecting piece 31, that is, the connecting head 312 is inserted into the groove 323. In the embodiment, the arrangement of the cooperating piece 32 can enhance the stability of the connection.

[0054] The utility model discloses a change heating ring and footboard connection mode, through the connection of connecting piece and cooperation piece instead of the integral bolt connection of prior art, the expansion of carbon carbon connection assembly under high temperature will not produce extrusion with the heating area of heater in this connection scheme, effectively reduce the risk of heater damage.

[0055] Example 4

[0056] On the basis of any of the above embodiments, in the present embodiment, as shown in Figure 1 and Figure 4 The heating ring 1 includes a plurality of V-shaped grooves 15 and a plurality of U-shaped grooves 16, the plurality of V-shaped grooves 15 are arranged at intervals along the circumference, the openings of the V-shaped grooves 15 face upwards, and the plurality of U-shaped grooves 16 are arranged in a staggered manner with the V-shaped grooves 15, and the openings of the U-shaped grooves 16 face downwards. Since the width of the V-shaped groove 15 gradually decreases from top to bottom, the area of the upper end of the heating ring 1 is reduced, increasing the resistance of the upper end of the heating ring 1. When the heating ring 1 is powered on, the heating efficiency of the heating ring 1 gradually increases along the axial direction of the heating ring 1, and the high-temperature area of the heating ring 1 is concentrated on the melt-crystal interface, which can not only ensure the stability and crystal formation efficiency of crystal pulling, but also reduce the reaction between the melt and the quartz crucible, thereby realizing oxygen reduction.

[0057] As an implementation scenario, in the present scenario, the heating ring 1 includes a first heating lobe 1a, a second heating lobe 1b, a third heating lobe 1c, and a fourth heating lobe 1d, and two adjacent heating lobes are integrally connected by a heating lobe group 1e to form a circular ring structure.

[0058] Specifically, the first heating lobe 1a, the second heating lobe 1b, the third heating lobe 1c, and the fourth heating lobe 1d are arranged in pairs in a symmetrical manner, and a first step 12 is formed in the lower part of one group of heating lobes, one side of the first step 12 forms a first connecting part 11, and a first through hole 13 is formed in the first connecting part 11, for example, as shown in Figure 2 The lower part of the first heating lobe 1a and the third heating lobe 1c is provided with a first step 12 respectively. The lower part of the first heating lobe 1a, the second heating lobe 1b, the third heating lobe 1c, and the fourth heating lobe 1d is provided with two U-shaped grooves 16, and the U-shaped grooves 16 of the first heating lobe 1a and the third heating lobe 1c are located on both sides of the first connecting part 11. The heating lobe group 1e is located between the two heating lobes 1a, and the heating lobe group 1e has a plurality of V-shaped grooves 15 with openings facing upwards above it, and a U-shaped groove 16 with an opening facing downwards is arranged between two adjacent V-shaped grooves 15. The area of the upper end of the heating lobe group 1e is reduced by the arrangement of the V-shaped grooves 15, while the area of the upper end of the first, second, third, and fourth heating lobes is larger.

[0059] The places not described in detail in the present embodiment are known in the art.

[0060] The above merely describes a specific implementation of the present application, but the protection scope of the present application is not limited thereto, and any skilled person in the art can easily think of various changes or replacements within the technical range disclosed by the present application, which should be encompassed in the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A heater for a single crystal furnace, characterized in that, The utility model relates to a heating circle (1) and a foot plate (2) connected by a plurality of connecting components (3), wherein the heating circle (1) is provided with a plurality of first through holes (13), and the foot plate (2) is provided with a plurality of second through holes (23) on the upper portion; the first through holes (13) and the second through holes (23) correspond to each other to form a plurality of connecting holes for accommodating the connecting components (3); the connecting component (3) comprises a connecting piece (31) provided with a slot (313) on the connecting piece (31), and the slot (313) is located in the connecting hole. The lower portion of the heating circle (1) is provided with a first connecting portion (11), one side of the first connecting portion (11) is formed with a first step (12), and the first through hole (13) is arranged on the first connecting portion (11); the foot plate (2) has an L-shaped structure, the top of the foot plate (2) is provided with a second connecting portion (21) abutting against the first step (12), one side of the second connecting portion (21) has a second step (22) abutting against the first connecting portion (11), and the second through hole (23) is arranged on the second connecting portion (21). The connecting piece (31) comprises a first circular table (311) and a connecting head (312) provided on one side of the first circular table (311) and having a smaller diameter than the first circular table (311), the connecting head (312) is provided with a slot (313), and the connecting head (312) is matched with the connecting hole. The side of the first through hole (13) away from the second through hole (23) is provided with a first annular step (14) having a larger diameter than the first through hole (13), and the first annular step (14) is matched with the first circular table (311).

2. The heater for a single crystal furnace according to claim 1, wherein The connecting component (3) further comprises a matching piece (32) matched with the connecting piece (31); the matching piece (32) comprises a second circular table (321) and a convex table (322) provided on one side of the second circular table (321) and having a smaller diameter than the second circular table (321), the convex table (322) is provided with a groove (323), the connecting piece (31) comprises a first circular table (311) and a connecting head (312) provided on one side of the first circular table (311) and having a smaller diameter than the first circular table (311), the connecting head (312) is provided with a slot (313), the connecting head (312) is matched with the groove (323), and the convex table (322) is matched with the connecting hole.

3. The heater for a single crystal furnace according to claim 1 or 2, characterized by The side of the first through hole (13) away from the second through hole (23) is provided with a first annular step (14) having a larger diameter than the first through hole (13), and the first annular step (14) is matched with the first circular table (311); the end of the second through hole (23) away from the first through hole (13) is provided with a second annular step (24) having a larger diameter than the second through hole (23), and the second annular step (24) is matched with the second circular table (321).

4. The heater for a single crystal furnace according to claim 3, wherein The connecting piece (31) and the matching piece (32) are made of carbon-carbon material.

5. The heater for a single crystal furnace according to claim 1 or 2, characterized by ​ 6. The heater for a single crystal furnace according to claim 5, wherein ​ 7. The heater for a single crystal furnace according to claim 5, wherein ​ 8. The heater for a single crystal furnace according to claim 1, wherein The heating ring (1) comprises a plurality of V-shaped grooves (15) and a plurality of U-shaped grooves (16), the plurality of V-shaped grooves (15) are arranged at intervals in the circumferential direction, and the openings of the V-shaped grooves (15) face upwards, the U-shaped grooves (16) are arranged in a staggered manner with the V-shaped grooves (15), and the openings of the U-shaped grooves (16) face downwards.

9. The heater for a single crystal furnace according to claim 8, wherein The heating ring (1) comprises a first heating lobe (1a) having two U-shaped grooves (16) at the lower part, a second heating lobe (1b), a third heating lobe (1c) and a fourth heating lobe (1d), the first heating lobe (1a), the second heating lobe (1b), the third heating lobe (1c) and the fourth heating lobe (1d) are arranged in pairs in a symmetrical manner, wherein the lower part of one group of heating lobes is provided with a first step (12), one side of the first step (12) forms a first connecting part (11), the adjacent two heating lobes are connected through a heating lobe group (1e) respectively, the heating lobe group (1e) is provided with a plurality of V-shaped grooves (15) with openings facing upwards above, and a U-shaped groove (16) with an opening facing downwards is arranged between the adjacent two V-shaped grooves (15).

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