Cooling water conveying pipeline

Abstract

The utility model discloses a cooling water conveying pipeline which comprises a water pipe, the water pipe is communicated with an ionization table, the water pipe comprises a telescopic steel pipe, the telescopic steel pipe is located in a vacuum cavity, the telescopic steel pipe is provided with a first connecting part and a second connecting part, a telescopic part is arranged between the first connecting part and the second connecting part, and the telescopic part is a corrugated steel pipe. According to the extreme ultraviolet generator, before the extreme ultraviolet generator is used, the position of the ionization table needs to be adjusted, so that the position of the ionization table is changed, the telescopic part of the telescopic steel pipe can stretch out and draw back along with the height change of the ionization table, and when the ionization table moves in a plane, the telescopic part can also be twisted to adapt to the ionization table; the cooling water conveying pipeline can prevent leakage and can adapt to the position movement of the ionization table, and pipelines with different lengths do not need to be replaced along with the movement of the ionization table.

Description

TECHNICAL FIELD

[0001] The utility model relates to extreme ultraviolet light generator cooling technical field, specifically related to a cooling water delivery pipeline. BACKGROUND

[0002] The extreme ultraviolet light generator is a kind of equipment for generating extreme ultraviolet light (EUV). EUV light usually refers to ultraviolet light with wavelength between 10 and 121 nanometers, with shorter wavelength and higher energy than deep ultraviolet light (DUV). In the extreme ultraviolet light generator, extreme ultraviolet light needs to be generated by ionizing inert gas with red laser beam. In the ionization process, the ionization platform will emit heat, causing temperature rise, which will affect the transmission of extreme ultraviolet light, so the ionization platform needs to be cooled. But the cavity where the extreme ultraviolet light generator assembly is located is a vacuum environment. Directly connecting the cooling water pipe to the ionization platform will cause the connection between the water pipe and the cavity shell and the connection between the water pipe and the ionization platform to leak due to pressure difference.

[0003] The skilled person in the art usually replaces the water pipe from the soft pipeline with the stainless steel hard pipeline, which solves the leakage problem caused by pressure difference to some extent, but the installation position of the stainless steel hard pipeline on the cavity shell is fixed. Compared with the soft water pipe, the stainless steel hard pipeline cannot adapt to the ionization platform with real-time adjustable position. After adjusting the position of the ionization platform, the steel pipe with appropriate length needs to be replaced, which is very inconvenient to operate, so it is difficult to balance the adaptability and anti-leakage function. UTILITY MODEL CONTENT

[0004] The purpose of the utility model is to solve the problems in the above background art, and a cooling water delivery pipeline is proposed.

[0005] The purpose of the utility model can be realized by the following technical solutions:

[0006] A cooling water delivery pipeline is suitable for a cooling system, the cooling system is applied to an extreme ultraviolet light generator, the extreme ultraviolet light generator is internally provided with an atmospheric pressure cavity and a vacuum cavity, the ionization platform is arranged in the vacuum cavity, and the cooling water delivery pipeline comprises a water pipe, the water pipe is in communication with the ionization platform, the water pipe comprises a telescopic steel pipe, the telescopic steel pipe is located in the vacuum cavity, the telescopic steel pipe is provided with a first connecting portion and a second connecting portion, a telescopic portion is arranged between the first connecting portion and the second connecting portion, and the telescopic portion is a corrugated steel pipe.

[0007] As a further scheme of the utility model: the water pipe is provided with two, one is an inlet pipe, and the other is an outlet pipe, the ionization platform is provided with a water flow channel, the inlet pipe is connected with the input end of the water flow channel, and the outlet pipe is connected with the output end of the water flow channel.

[0008] As a further scheme of the utility model: the water pipe further includes a hose, the hose is arranged in the normal pressure cavity and extends to outside of the extreme ultraviolet light generator.

[0009] As a further scheme of the utility model: the normal pressure cavity and the vacuum cavity are separated by a partition plate, the partition plate is provided with a through hole, the telescopic steel pipe and the hose are communicated through the through hole.

[0010] As a further scheme of the utility model: the hose and the through hole of the partition plate are provided with a first quick connector, and the first quick connector is used for assembling the hose.

[0011] As a further scheme of the utility model: one end of the first connecting part is provided with a second quick connector, and the first connecting part is connected with the partition plate through the second quick connector.

[0012] As a further scheme of the utility model: one end of the second connecting part is also provided with the second quick connector, and the second connecting part is connected with the ionization platform through the second quick connector.

[0013] As a further scheme of the utility model: the vacuum cavity is further provided with a reflux steel pipe.

[0014] As a further scheme of the utility model: the two ends of the reflux steel pipe are provided with the second quick connector.

[0015] As a further scheme of the utility model: the reflux steel pipe is connected with the ionization platform through the second quick connector.

[0016] The utility model discloses the beneficial effects of:

[0017] In the utility model, the position of the ionization platform is adjusted before the extreme ultraviolet light generator is used, the position of the ionization platform changes, the telescopic part of the telescopic steel pipe can be telescopic along with the height change of the ionization platform, and when the ionization platform moves in the plane, the telescopic part can also be twisted to adapt to the ionization platform, so that the cooling water conveying pipeline can be adapted to the position movement of the ionization platform while preventing leakage, and different length pipelines need not be replaced along with the movement of the ionization platform. DETAILED DESCRIPTION

[0018] The utility model will be further described below in combination with the drawings.

[0019] Figure 1 It is the structural schematic diagram of the extreme ultraviolet light generator of the utility model,

[0020] Figure 2 It is Figure 1 The structural schematic diagram in the inside of the protective cover in the utility model,

[0021] Figure 3 is Figure 2 the structure diagram of the inner part of the middle shell;

[0022] Figure 4 is the partial structure diagram of the cooling water conveying pipeline of the utility model;

[0023] Figure 5 is the connection diagram of the cooling water conveying pipeline and Figure 3 the ionization platform in the middle;

[0024] Figure 6 is Figure 5 the structure diagram of the telescopic steel pipe.

[0025] In the drawing:

[0026] 1, protective cover; 2, shell; 21, normal pressure cavity; 22, vacuum cavity; 23, partition; 3, ionization platform; 4, hose; 5, first quick connector; 6, telescopic steel pipe; 61, first connecting part; 62, second connecting part; 63, telescopic part; 7, second quick connector; 8, backflow steel pipe. DETAILED DESCRIPTION

[0027] The technical solutions in the embodiments of the utility model will be apparently and completely described in combination with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the person skilled in the art without creative labor fall within the protection scope of the utility model.

[0028] Please refer to Figures 1-3 the utility model is a kind of cooling water conveying pipeline, it is applicable to extreme ultraviolet light generator. Extreme ultraviolet light generator includes protective cover 1, protective cover 1 is provided with shell 2 in it, shell 2 is provided with normal pressure cavity 21 and vacuum cavity 22 inside. Normal pressure cavity 21 and vacuum cavity 22 are separated by partition 23. Vacuum cavity 22 is extreme ultraviolet light generation cavity, vacuum cavity 22 is also provided with ionization platform 3, the generation of extreme ultraviolet light needs to pass into inert gas in optical fiber on ionization platform 3, inert gas can cause the gas content in vacuum cavity 22 gradually increases, so in the generation process of extreme ultraviolet light, vacuum cavity 22 also needs to be continuously evacuated, so that vacuum cavity 22 always maintains negative pressure.

[0029] Please refer to Figure 1 , Figures 4-6As shown, the cooling water conveying pipeline comprises a water pipe arranged in communication with the ionization table 3. The water pipe is provided with two water pipes, one is an inlet pipe and the other is an outlet pipe, and the inlet pipe and the outlet pipe can be replaced with each other. The ionization table 3 is provided with a water flow channel, the inlet pipe is connected with the input end of the water flow channel, and the outlet pipe is connected with the output end of the water flow channel.

[0030] The water pipe comprises a flexible pipe 4 and a telescopic steel pipe 6, the partition plate 23 is provided with a through hole, and the telescopic steel pipe 6 is connected with the flexible pipe 4 through the through hole.

[0031] Specifically, the flexible pipe 4 is arranged in the normal pressure cavity 21 and extends to the outside of the extreme ultraviolet light generator. The flexible pipe 4 is provided with a first quick connector 5 at the through hole of the partition plate 23, and the first quick connector 5 is used to assemble the flexible pipe 4.

[0032] Please refer to Figures 4-6 As shown, the telescopic steel pipe 6 is located in the vacuum cavity 22, the telescopic steel pipe 6 is provided with a first connecting part 61 and a second connecting part 62, and a telescopic part 63 is arranged between the first connecting part 61 and the second connecting part 62. The telescopic part 63 is a corrugated steel pipe. One end of the first connecting part 61 is provided with a second quick connector 7, and the first connecting part 61 is connected with the partition plate 23 through the second quick connector 7. One end of the second connecting part 62 is also provided with a second quick connector 7, and the second connecting part 62 is connected with the ionization table 3 through the second quick connector 7.

[0033] The vacuum cavity 22 is also provided with a backflow steel pipe 8, both ends of the backflow steel pipe 8 are provided with a second quick connector 7, and the backflow steel pipe 8 is connected with the ionization table 3 through the second quick connector 7.

[0034] In this embodiment, a sealing ring is arranged between the first quick connector 5 and the partition plate 23, between the second quick connector 7 and the partition plate 23, and between the second quick connector 7 and the ionization table 3. By extruding the sealing ring to deform, the sealing of the flexible pipe 4 and the telescopic steel pipe 6 at the connecting end is realized. If the cooling water leaks into the vacuum cavity 22, it will quickly vaporize and destroy the vacuum environment. The cooperation between the sealing ring and the quick connector (the first quick connector 5 and the second quick connector 7) can prevent the leakage of cooling water.

[0035] Before use, the position of the ionization table 3 needs to be adjusted to make the optical fiber on the ionization table 3 keep coaxial with the infrared laser beam. During the adjustment process, the position of the ionization table 3 changes, the telescopic part 63 of the telescopic steel pipe 6 can stretch and shrink with the change of the height of the ionization table 3, and when the ionization table 3 moves in the plane, the telescopic part 63 can also twist to adapt to the ionization table 3. Therefore, the telescopic steel pipe 6 can adapt to the position movement of the ionization table 3, and there is no need to replace the pipeline with different lengths with the movement of the ionization table 3.

[0036] After the position adjustment of the ionization platform 3 is completed, the extreme ultraviolet light generator starts to work, and in the working process, the temperature of the ionization platform 3 in the vacuum cavity 22 is increased, the cooling water is introduced into the hose 4 in the water pipe (water inlet pipe) through the external water source, the cooling water is introduced into the telescopic steel pipe 6 from the hose 4, and then flows into the ionization platform 3, so that the heat in the ionization platform 3 is taken out, and then the cooling water flows into the ionization platform 3 again through the return flow steel pipe 8, and then flows out to the outside through the telescopic steel pipe 6 and the hose 4 in the water outlet pipe. In the process that the cooling water flows through the ionization platform 3, the heat is taken away, and the ionization platform 3 is cooled, so that the temperature of the ionization platform 3 is prevented from being too high to affect the transmission of the extreme ultraviolet light, and the reliability of the extreme ultraviolet light generator is improved.

[0037] Compared with the mode that all steel pipes are used, the split type water pipe that the hose 4 in the embodiment is added to the telescopic steel pipe 6 and the return flow steel pipe 8 can reduce the self weight and the production cost of the entire extreme ultraviolet light generator. The telescopic steel pipe 6 and the return flow steel pipe 8 located in the vacuum cavity 22 are hard pipes, and compared with ordinary water pipes, the cooling water leakage problem caused by the pressure difference can be avoided.

[0038] It can be understood that the water flow channel in the ionization platform 3 is a through hole, and the water flow channel is convenient for early processing, and in some embodiments, the water flow channel can also be processed into a U-shaped non-through hole, and at this time, the return flow steel pipe 8 can be omitted.

[0039] The working principle of the utility model is: before the extreme ultraviolet light generator is used, the position of the ionization platform 3 needs to be adjusted, so that the optical fiber on the ionization platform 3 and the infrared laser beam remain coaxial. During the adjustment process of the ionization platform 3, the telescopic part 63 of the telescopic steel pipe 6 can be telescoped with the height change of the ionization platform 3, and when the ionization platform 3 moves in the plane, the telescopic part 63 can also be twisted to adapt to the ionization platform 3, and after the adjustment of the ionization platform 3 is completed, the extreme ultraviolet light generator starts to work.

[0040] The above embodiment of the utility model is described in detail, but the content described can only be the preferred embodiment of the utility model, and cannot be considered as limiting the implementation range of the utility model. Any equivalent change and improvement within the scope of the utility model application should still belong to the scope of the claims of the utility model.

Claims

1. A cooling water delivery pipe suitable for a cooling system, the cooling system being applied to an extreme ultraviolet light generator, the extreme ultraviolet light generator being internally provided with an atmospheric pressure cavity (21) and a vacuum cavity (22), the vacuum cavity (22) being internally provided with an ionization platform (3), characterized in that, The water pipe is arranged in communication with the ionization platform (3); The water pipe comprises a telescopic steel pipe (6) located in the vacuum cavity (22), the telescopic steel pipe (6) is provided with a first connecting part (61) and a second connecting part (62), and a telescopic part (63) is arranged between the first connecting part (61) and the second connecting part (62), the telescopic part (63) is a corrugated steel pipe.

2. A cooling water delivery conduit according to claim 1, characterized in that The water pipe is provided with two water pipes, one is an inlet pipe and the other is an outlet pipe, the ionization platform (3) is provided with a water flow channel, the inlet pipe is connected with an input end of the water flow channel, and the outlet pipe is connected with an output end of the water flow channel.

3. A cooling water delivery conduit according to claim 1, wherein, The water pipe further comprises a hose (4), the hose (4) is arranged in the normal pressure cavity (21) and extends to the outside of the extreme ultraviolet light generator.

4. A cooling water delivery conduit according to claim 3, wherein, The normal pressure cavity (21) and the vacuum cavity (22) are separated by a partition plate (23), the partition plate (23) is provided with a through hole, and the telescopic steel pipe (6) and the hose (4) are connected through the through hole.

5. A cooling water delivery conduit according to claim 4, wherein, The hose (4) is provided with a first quick connector (5) at the through hole of the partition plate (23), and the first quick connector (5) is used for assembling the hose (4).

6. A cooling water delivery conduit according to claim 4, wherein, One end of the first connecting part (61) is provided with a second quick connector (7), and the first connecting part (61) is connected with the partition plate (23) through the second quick connector (7).

7. A cooling water delivery conduit according to claim 6, wherein, One end of the second connecting part (62) is also provided with the second quick connector (7), and the second connecting part (62) is connected with the ionization platform (3) through the second quick connector (7).

8. A cooling water delivery conduit according to claim 6, wherein, The vacuum cavity (22) is further provided with a return steel pipe (8).

9. A cooling water delivery conduit according to claim 8, wherein, Both ends of the return steel pipe (8) are provided with the second quick connector (7).

10. A cooling water delivery conduit according to claim 9, wherein, The return steel pipe (8) is connected with the ionization platform (3) through the second quick connector (7).

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