Ion implanter exhaust line with extended service life

Abstract

The utility model relates to a tail gas discharge pipeline for ion implanter with prolongable service period, its characterized in that, including the first manifold pipe and the second manifold pipe that set up each other interval, first manifold pipe one end is connected with dry pump, one end is connected with first shunt, second manifold pipe one end is connected with tail gas treatment device, one end is connected with second shunt, first shunt both ends respectively extend to both sides as first connecting end, second shunt both ends respectively extend to both sides as second connecting end, both sides second connecting end and both sides first connecting end are connected with detachable Teflon pipe respectively, to form first pipeline and second pipeline in this way, the open and close state of first pipeline and second pipeline can switch, and the open and close state is opposite each other. The utility model has the advantages and effects that: can not need frequent replacement Teflon pipe, to reduce the downtime of equipment when replacing Teflon pipe, to improve the overall processing efficiency of semiconductor.

Description

TECHNICAL FIELD

[0001] The utility model relates to ion implantation machine tail gas emission technical field, concretely relates to a tail gas emission pipeline for ion implantation machine with prolonged service period. BACKGROUND

[0002] In the field of semiconductor manufacturing, most of the semiconductor processing equipment (such as ion implanters) need to be discharged. When discharging, the tail gas (arsine, phosphine, boranes, etc.) in the ion source is mainly pumped into the tail gas treatment device through the pipeline by the dry pump for treatment.

[0003] For example, Figure 4 The commonly used tail gas emission pipeline structure is shown in the figure, which mainly includes a main pipe 100 connected with the dry pump and a secondary pipe 200 connected with the tail gas treatment device, wherein the secondary pipe 200 is a Teflon pipe. Because the Teflon pipe has a certain toughness, it can make the secondary pipe 200 move and twist to facilitate connection with the tail gas treatment device.

[0004] However, in the actual use process, when the tail gas is transported to the tail gas treatment device through the pipeline, the tail gas (arsine, phosphine, boranes, etc.) is easy to react with the gas in the pipeline to produce solid byproducts, which are attached to the inner wall of the Teflon pipe. Therefore, after a certain period of use, the Teflon pipe needs to be replaced. When replacing, the equipment needs to be shut down, and the environment in the pipeline needs to be purified with inert gas in a vacuum environment before replacement. After replacement is completed, the internal particle size needs to be detected. Therefore, the time required for replacement is long. In the prior art, the emission pipeline is a single path, which leads to frequent replacement and affects the overall processing efficiency of the semiconductor. SUMMARY

[0005] In view of the deficiencies in the prior art, the utility model aims to provide a tail gas emission pipeline for ion implantation machine with prolonged service period, which can reduce the replacement of Teflon pipe and reduce the downtime of the equipment during replacement, thereby improving the overall processing efficiency of the semiconductor.

[0006] In order to achieve the above object, the utility model provides the following technical scheme: A tail gas exhaust pipeline of ion implanter with prolonged service life, first and second collecting pipes are arranged at intervals, one end of the first collecting pipe is connected with a dry pump, one end is connected with a first shunt pipe, one end of the second collecting pipe is connected with a tail gas treatment device, one end is connected with a second shunt pipe, the first shunt pipe extends to both sides as a first connecting end, the second shunt pipe extends to both sides as a second connecting end, detachable Teflon pipes are connected to both sides of the second connecting end and the first connecting end, thereby forming a first pipeline and a second pipeline, the opening and closing state of the first pipeline and the second pipeline can be switched, and the opening and closing state is opposite to each other.

[0007] The utility model further sets up: the first connecting end and the second connecting end are equipped with pipeline opening and closing device, and the pipeline opening and closing device is used for realizing the switching of the opening and closing state of the first pipeline and the second pipeline.

[0008] The utility model further sets up: the pipeline opening and closing device includes a transition pipe, the transition pipe is connected with a solenoid valve, the solenoid valve is used for controlling the opening and closing of the transition pipe to realize the opening and closing of the first pipeline and the second pipeline respectively, a conductivity detector is connected on the first collecting pipe, and the conductivity detector is electrically connected with the solenoid valve.

[0009] The utility model further sets up: the transition pipe and the Teflon pipe are equipped with the first flange fixed in the end of the transition pipe and the second flange fixed in the end of the Teflon pipe respectively, the first flange is equipped with the downward recessed positioning groove, the positioning groove is equipped with the sealing ring matched with the positioning groove, the second flange is equipped with the outward protruding positioning convex, and the positioning convex is matched with the positioning groove.

[0010] The utility model further sets up: one end of the transition pipe towards the Teflon pipe is equipped with the coupling portion extending to the inside of the Teflon pipe, the coupling portion is attached to the inner wall of the Teflon pipe, and the Teflon pipe is externally sleeved with a clamp.

[0011] Compared with the prior art, the utility model has the beneficial effects that:

[0012] Due to the first shunt pipe and the second shunt pipe, the Teflon pipe can be connected between the first connecting end and the second connecting end of the first shunt pipe and the second shunt pipe, so that the first pipeline and the second pipeline are formed, and in actual use, any pipeline is in an open state, and the other pipeline is in a closed state, and in a long time use process, only the pipeline in the closed state is opened, and the pipeline in the open state is closed, so that the Teflon pipe can be quickly switched, so that the replacement cycle of the Teflon pipe in the exhaust pipeline can be effectively prolonged, that is, when the Teflon pipes in the first pipeline and the second pipeline cannot be normally used, the Teflon pipes are replaced, so that the Teflon pipes do not need to be frequently replaced, the downtime of the equipment when the Teflon pipes are replaced is indirectly reduced, and the overall processing efficiency of the semiconductor is improved. BRIEF DESCRIPTION OF DRAWINGS

[0013] Figure 1 It is a whole structure schematic view of the utility model;

[0014] Figure 2 It is an explosion view of connection of the Teflon pipe and the transition pipe (one) in the utility model;

[0015] Figure 3 It is an explosion view of connection of the Teflon pipe and the transition pipe (two) in the utility model;

[0016] Figure 4 It is a structure schematic view of the exhaust pipeline in the prior art. DETAILED DESCRIPTION

[0017] The technical solutions of the present application will be described clearly and completely below with reference to the drawings. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0018] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore it cannot be understood as a limitation on the present application. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0019] As Figures 1 to 3The utility model discloses a tail gas discharge pipeline of ion implanter with prolonged service life, which comprises a first manifold 1 and a second manifold 2 arranged at intervals, and is connected with a dry pump and a tail gas treatment device through the first manifold 1 and the second manifold 2, so that the tail gas drawn from the ion source into the dry pump can be transported to the tail gas treatment device.

[0020] The first manifold 1 and the second manifold 2 are respectively provided with a first shunt 3 and a second shunt 4, and one side of the first manifold 1 and the second manifold 2 is respectively communicated with the first shunt 3 and the second shunt 4. The first shunt 3 extends to both sides as a first connecting end 31, and the second shunt 4 extends to both sides as a second connecting end 41. The two sides of the second connecting end 41 and the first connecting end 31 are respectively connected with a detachable Teflon pipe 8, so as to form a first pipeline and a second pipeline. The opening and closing state of the first pipeline and the second pipeline can be switched, and the opening and closing state is opposite to each other. In the actual use process, any pipeline is in an open state, and the other pipeline is in a closed state. In the long-term use process, only the pipeline in the closed state is opened, and the pipeline in the open state is closed, so as to realize the rapid switching of the Teflon pipe 8. The replacement period of the Teflon pipe 8 in the discharge pipeline can be effectively prolonged. When the Teflon pipes 8 in the first pipeline and the second pipeline cannot be normally used, the Teflon pipes 8 are replaced, so that the Teflon pipe 8 does not need to be frequently replaced, the downtime of the equipment during the replacement of the Teflon pipe 8 is reduced, and the overall processing efficiency of the semiconductor is improved.

[0021] In the embodiment, the structure for opening and closing the first pipeline and the second pipeline is that the pipeline opening and closing device is arranged on the first connecting end 31 and the second connecting end 41, and the specific structure of the pipeline opening and closing device comprises a transition pipe 5, the transition pipe 5 is connected with an electromagnetic valve 6, the electromagnetic valve 6 is used for controlling the opening and closing of the transition pipe 5, since the Teflon pipe 8 in the first pipeline and the second pipeline is connected with the transition pipe 5 at both ends, the opening and closing of the Teflon pipe 8 at both ends with the connecting positions of the first connecting end 31 and the second connecting end 41 can be realized by controlling the opening and closing of the transition pipe 5 through the electromagnetic valve 6, so that the opening and closing of the first pipeline and the second pipeline can be realized respectively, and the electric conductivity detector 7 is connected on the first manifold 1, the electric conductivity detector 7 is internally provided with a PCB, and is electrically connected with the electromagnetic valve 6 through a signal line, when the electric conductivity detector 7 detects that the ion concentration in the opened pipeline, for example, the first pipeline, is higher than the set value, the detection signal can be sent to the PCB, after the PCB receives the detection signal, the control signal can be sent to the electromagnetic valve 6 connected with the first pipeline and the electromagnetic valve 6 connected with the second pipeline, that is, the electromagnetic valve 6 connected with the first pipeline is closed, and the electromagnetic valve 6 connected with the second pipeline is opened, so that the first pipeline is closed, the second pipeline is opened, and the rapid switching of the Teflon pipe 8 is realized.

[0022] In the embodiment, the specific connection structure between the transition pipe 5 and the Teflon pipe 8 is that the first flange 51 fixed to the end of the transition pipe 5 and the second flange 81 fixed to the end of the Teflon pipe 8 are arranged at the connecting positions of the transition pipe 5 and the Teflon pipe 8, so that the flange holes on the first flange 51 and the flange holes on the second flange 81 are opposite after the first flange 51 and the second flange 81 are connected, and the locking piece is screwed in to realize the rapid connection between the transition pipe 5 and the Teflon pipe 8, so that the detachable connection of the Teflon pipe 8 is realized;

[0023] In addition, the positioning groove 511 recessed downward is arranged on the first flange 51, the sealing ring 9 matched with the positioning groove 511 is arranged in the positioning groove 511, the positioning protrusion 811 protruding outward is arranged on the second flange 81, and the positioning protrusion 811 is matched with the positioning groove 511, so that the first flange 51 and the second flange 81 are positioned when the first flange 51 and the second flange 81 are connected by inserting the positioning protrusion 811 into the positioning groove 511, the connection convenience is improved, the sealing ring 9 is extruded after the positioning protrusion 811 is inserted into the positioning groove 511, the sealing ring 9 is tightly pressed between the positioning protrusion 811 and the positioning groove 511, and the stability of the connection of the first flange 51 and the second flange 81 is improved;

[0024] In addition, the transition pipe 5 is provided with a coupling portion 52 extending into the interior of the Teflon pipe 8 at one end thereof facing the Teflon pipe 8, and the Teflon pipe 8 is externally sleeved with the clamp 10, when the first flange 51 is connected with the second flange 81, the coupling portion 52 can be inserted into the Teflon pipe 8 and abut against the inner wall of the port of the Teflon pipe 8, so that the coupling portion 52 can provide a connection for clamping of the clamp 10, that is, by sleeving the clamp 10 on the outer periphery of the Teflon pipe 8, the Teflon pipe 8 can be clamped with the coupling portion 52, so that the stability of the connection between the Teflon pipe 8 and the transition pipe 5 can be further improved.

[0025] The specific embodiment is only an explanation of the utility model, and is not a limitation of the utility model, and a person skilled in the art can make a modification without creative contribution according to the need after reading the specification, but as long as it is within the scope of the claims of the utility model, it is protected by the patent law.

Claims

1. An exhaust gas discharge line for an ion implanter which can extend the service life, characterized by, The application relates to a first manifold and a second manifold which are arranged apart from each other, one end of the first manifold is connected with a dry pump, one end of the first manifold is connected with a first branch pipe, one end of the second manifold is connected with a tail gas treatment device, one end of the second manifold is connected with a second branch pipe, the two ends of the first branch pipe respectively extend to two sides as first connecting ends, the two ends of the second branch pipe respectively extend to two sides as second connecting ends, detachable Teflon pipes are respectively connected to the two-side second connecting ends and the two-side first connecting ends, so as to form a first pipeline and a second pipeline, the opening and closing states of the first pipeline and the second pipeline can be switched, and the opening and closing states are opposite to each other.

2. The tail gas exhaust line of the ion implanter with an extended service life according to claim 1, wherein, The first connecting end and the second connecting end are respectively provided with pipeline opening and closing devices, and the pipeline opening and closing devices are used for realizing the switching of the opening and closing states of the first pipeline and the second pipeline.

3. The tail gas exhaust line of the ion implanter with an extended service life according to claim 2, wherein, The pipeline opening and closing device comprises a transition pipe, an electromagnetic valve is connected with the transition pipe, the electromagnetic valve is used for controlling the opening and closing of the transition pipe, so as to realize the opening and closing of the first pipeline and the second pipeline, and a conductivity detector is connected with the first manifold, the conductivity detector is electrically connected with the electromagnetic valve.

4. The tail gas exhaust line of ion implanter with prolonged service life according to claim 3, characterized in that, The transition pipe and the Teflon pipe are respectively provided with a first flange fixed to the end of the transition pipe and a second flange fixed to the end of the Teflon pipe, the first flange is provided with a downwardly recessed positioning groove, a sealing ring matched with the positioning groove is arranged in the positioning groove, the second flange is provided with an outwardly protruding positioning protrusion matched with the positioning groove.

5. The tail gas exhaust line of ion implanter with prolonged service life according to claim 4, characterized in that, One end of the transition pipe towards the Teflon pipe is provided with a coupling part extending into the Teflon pipe, the coupling part is attached to the inner wall of the Teflon pipe, and a clamp is arranged outside the Teflon pipe.

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