Exhaust device for stainless steel silane combustion purification tower

Abstract

The utility model relates to the technical field of purification towers, in particular to an exhaust device for a stainless steel silane combustion purification tower, which comprises a water tank, a cooling mechanism is arranged at the lower part in the water tank, a bracket is arranged outside the left side of the water tank, and a conveying mechanism is arranged at the upper end of the bracket; and a coiled pipe is arranged in the water tank and is matched with the conveying mechanism. The gas exhausted from the gas outlet end of the purification tower can be detected during gas exhausting, if it is detected that unburned silane exists in the exhausted gas, the gas can be fed into the coiled pipe, and the gas can be exhausted through the second reversing valve and the straight pipe which are arranged on the coiled pipe. The sodium hydroxide solution in the water tank is used for carrying out primary treatment on silane which is not completely combusted, and the treated gas flows back to the purification tower through the reversing valve I and the inner connecting pipe for secondary combustion, so that the condition that the discharged gas does not contain silane is ensured, the discharge safety is greatly improved, and the environmental protection requirement is met.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of purification tower, concretely is a kind of exhaust device for stainless steel silane combustion purification tower. BACKGROUND

[0002] Stainless steel silane combustion purification tower is a kind of equipment for processing silane-containing waste gas.Silane is a flammable, toxic gas, which is produced in the production process of semiconductor manufacturing, photovoltaic industry and other fields.The main role of the purification tower is to convert silane waste gas into harmless substances by burning, to meet environmental protection requirements and protect the safety of production environment.

[0003] The existing silane combustion purification tower exhaust device, often simply discharge the gas treated by purification tower to external environment, for example, some exhaust devices only rely on simple pipeline to lead out the purified gas, lack secondary detection and processing mechanism of gas.

[0004] Due to lack of detection and processing of incomplete combustion silane, if silane in purification tower is not completely combusted, silane-containing gas is directly discharged to the outside, silane is flammable and potentially explosive, which can bring great security risks to the surrounding environment, and once encountering fire or suitable conditions, it may cause explosion accident. INVENTION CONTENTS

[0005] The utility model aims at providing a kind of exhaust device for stainless steel silane combustion purification tower, to solve the problems raised in the above background.

[0006] To achieve the above object, the utility model provides the following technical scheme:

[0007] A kind of exhaust device for stainless steel silane combustion purification tower, comprising

[0008] Water tank, cooling mechanism is arranged in the lower part of the inside of the water tank, support is arranged on the left side of the outside of the water tank, conveying mechanism is arranged on the upper end of the support;

[0009] Snake-shaped pipe is arranged in the inside of the water tank, the snake-shaped pipe is matched with conveying mechanism, switching mechanism is arranged on the upper part of the snake-shaped pipe.

[0010] Preferably, the cooling mechanism includes U-shaped pipe, the U-shaped pipe is arranged horizontally in the lower part of the inside of the water tank, the two ends of the U-shaped pipe are connected with cold water inlet and hot water inlet respectively;

[0011] Preferably, the conveying mechanism comprises an air pump, the air pump is arranged at the upper end of the support, a reversing valve I is communicated with the air inlet end of the air pump, an air inlet pipe is communicated with the air inlet end of the reversing valve I, a serpentine pipe and an inner connecting pipe are connected to the other two ends of the reversing valve I respectively, the other end of the serpentine pipe is communicated with the right upper end outside of the water tank, and a gas sensor is communicated with the middle upper end of the air inlet pipe;

[0012] Preferably, the switching mechanism comprises a reversing valve II, a plurality of reversing valves II are arranged at the upper end of the serpentine pipe, a straight pipe is communicated with the bottom end of the reversing valve II, and a plurality of spray holes are regularly arranged on the wall of the straight pipe.

[0013] Preferably, a maintenance window is arranged at the top end of the water tank, and a cover plate is fixedly arranged at the upper end of the maintenance window through bolts.

[0014] Preferably, a sewage pipe is arranged below the left side of the water tank, and a temperature sensor and a liquid level sensor are sequentially arranged below the right side of the water tank.

[0015] Compared with the prior art, the utility model has the advantages that:

[0016] 1. The exhaust device for the stainless steel silane combustion purification tower can detect the gas drawn out from the gas outlet end of the purification tower during exhaust, and if the undecomposed silane exists in the exhaust gas, the gas is sent into the serpentine pipe, the undecomposed silane is treated by the sodium hydroxide solution in the water tank through the reversing valve II and the straight pipe arranged on the serpentine pipe, the treated gas is returned to the purification tower through the reversing valve I and the inner connecting pipe for secondary combustion, so that the exhaust gas does not contain silane, the safety of exhaust is greatly improved, and the environmental protection requirement is met.

[0017] 2. The exhaust device for the stainless steel silane combustion purification tower, the U-shaped pipe in the cooling mechanism realizes the circulation of cooling water through the cold water inlet and the hot water inlet, the serpentine pipe is partially immersed in the sodium hydroxide solution in the water tank, and the sodium hydroxide solution is cooled by the cooling water flowing in the U-shaped pipe, so that when the gas passes through the serpentine pipe, the silane treatment and the cooling treatment of the exhaust gas can be realized. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 It is a whole front view structural schematic diagram of the utility model;

[0019] Figure 2 It is a whole sectional view structural schematic diagram of the utility model;

[0020] Figure 3 It is a whole sectional view structural schematic diagram of the utility model; Figure 2 It is an enlarged schematic diagram of A in the middle;

[0021] Figure 4 The utility model discloses a Figure 2 Amplification schematic view of B place.

[0022] In the drawing: 1, water tank; 2, support; 3, serpentine pipe; 4, U-shaped pipe; 5, cold water inlet; 6, hot water inlet; 7, air pump; 8, reversing valve one; 9, air inlet pipe; 10, inner connecting pipe; 11, reversing valve two; 12, straight pipe; 13, spray hole; 14, maintenance window; 15, cover plate; 16, blow-off pipe; 17, temperature sensor; 18, liquid level sensor; 19, gas sensor. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the utility model.

[0024] As Figures 1-4 shown, a technical scheme provided by the utility model:

[0025] A kind of exhaust device for stainless steel silane combustion purification tower, including water tank 1, cooling mechanism is below in the inside of water tank 1, cooling mechanism includes U-shaped pipe 4, U-shaped pipe 4 is arranged horizontally below in the inside of water tank 1, the two ends of U-shaped pipe 4 are communicated with cold water inlet 5 and hot water inlet 6 respectively by penetrating water tank 1, support 2 is arranged at the left side outside of water tank 1, conveying mechanism is arranged at the upper end of support 2, conveying mechanism includes air pump 7, air pump 7 is arranged at the upper end of support 2, reversing valve one 8 is communicated with the air inlet end of air pump 7, air inlet pipe 9 is communicated with the air inlet end of reversing valve one 8, reversing valve one 8 other two ends are connected with serpentine pipe 3 and inner connecting pipe 10 respectively, the other end of serpentine pipe 3 is communicated with the right side upper end outside of water tank 1, gas sensor 19 is communicated with the middle upper end of air inlet pipe 9;

[0026] In the embodiment, U-shaped pipe 4 in cooling mechanism realizes the circulation of cooling water by cold water inlet 5 and hot water inlet 6, serpentine pipe 3 is partially immersed in sodium hydroxide solution in water tank 1, and sodium hydroxide solution is cooled by cooling water flowing in the inside of U-shaped pipe 4, so that, when gas passes through serpentine pipe 3, not only silane treatment can be carried out, but also cooling treatment of exhaust gas can be realized.

[0027] As Figure 2 and Figure 4As shown, the inside of the water tank 1 is provided with a serpentine pipe 3, which cooperates with the conveying mechanism, and a switching mechanism is arranged on the upper end of the serpentine pipe 3, the switching mechanism comprises a plurality of reversing valves two 11, a plurality of reversing valves two 11 are arranged on the upper end of the serpentine pipe 3, a straight pipe 12 is communicated with the bottom end of the reversing valve two 11, a plurality of spray holes 13 are regularly arranged on the wall surface of the straight pipe 12, a maintenance window 14 is arranged on the top end of the water tank 1, a cover plate 15 is fixedly installed on the upper end of the maintenance window 14 through bolts, a blowdown pipe 16 is arranged below the left side of the water tank 1, and a temperature sensor 17 and a liquid level sensor 18 are sequentially arranged below the right side of the water tank 1;

[0028] In the embodiment, the gas drawn out from the gas outlet end of the purification tower can be detected during exhaust, and if unburned silane exists in the exhaust gas, the gas is sent into the serpentine pipe 3, the unburned silane is treated by the sodium hydroxide solution in the water tank 1 through the reversing valve two 11 and the straight pipe 12 arranged on the serpentine pipe 3, and the treated gas is returned to the purification tower through the reversing valve one 8 and the inner connecting pipe 10 for secondary combustion, so that the exhaust gas does not contain silane, the safety of exhaust is greatly improved, and the environmental protection requirement is met.

[0029] Working principle: during exhaust, the gas pump 7 is started, the gas pump 7 draws out the gas from the gas outlet end of the purification tower, and the gas sensor 19 is used for detection, if unburned silane exists in the exhaust gas, the gas is sent into the serpentine pipe 3, the reversing valve two 11 is started, the gas in the serpentine pipe 3 is introduced into the straight pipe 12, and the gas is treated by the sodium hydroxide solution in the water tank 1 once, at this time, the reversing valve one 8 is started, the reversing valve one 8 connects the gas inlet pipe 9 and the inner connecting pipe 10, the once-treated gas enters the gas inlet pipe 9 from the inner connecting pipe 10, the gas pump 7 is reversed, the gas entering the inner connecting pipe 10 is returned to the purification tower from the gas inlet pipe 9 for secondary combustion, if the gas entering the gas inlet pipe 9 does not contain silane, the gas directly enters from the serpentine pipe 3 and is then discharged from the other end, since the serpentine pipe 3 has a serpentine structure, part of the pipeline is immersed in the sodium hydroxide solution, and the sodium hydroxide solution is cooled by the cooling water flowing in the U-shaped pipe 4, so that the exhaust gas can be cooled.

[0030] The basic principle, main features and advantages of the present application are shown and described above. Those skilled in the art should understand that the present application is not limited to the above embodiments, and the above embodiments and descriptions in the specification are only preferred examples of the present application and do not limit the present application. Without departing from the spirit and scope of the present application, various changes and improvements can be made to the present application, and these changes and improvements all fall within the scope of the present application. The scope of protection of the present application is defined by the appended claims and their equivalents.

Claims

1. An exhaust device for a stainless steel silane combustion purification column, characterized by: Include Water tank (1), the inside of the water tank (1) has a cooling mechanism below, the left side of the water tank (1) is provided with a support (2) outside, the upper end of the support (2) is provided with a conveying mechanism; The inside of the water tank (1) is provided with a serpentine pipe (3), which cooperates with the conveying mechanism, and the upper end of the serpentine pipe (3) is provided with a switching mechanism.

2. The exhaust device for a stainless steel silane combustion purification column according to claim 1, characterized by: The cooling mechanism includes a U-shaped pipe (4), which is horizontally arranged below the inside of the water tank (1), and the two ends of the U-shaped pipe (4) penetrate the water tank (1) and are respectively connected with a cold water inlet (5) and a hot water inlet (6).

3. The exhaust device for a stainless steel silane combustion purification column according to claim 1, characterized by: The conveying mechanism includes an air pump (7), which is arranged at the upper end of the support (2), an air inlet valve (8) is connected to the air inlet end of the air pump (7), an air inlet pipe (9) is connected to the air inlet end of the air inlet valve (8), and the other two ends of the air inlet valve (8) are respectively connected with the serpentine pipe (3) and the inner connecting pipe (10), the other end of the serpentine pipe (3) is connected to the right side of the water tank (1) outside the upper end, and the gas sensor (19) is connected to the middle upper end of the air inlet pipe (9).

4. The exhaust device for a stainless steel silane combustion purification column according to claim 2, characterized by: The switching mechanism includes a reversing valve (11), a plurality of reversing valves (11) are arranged at the upper end of the serpentine pipe (3), a straight pipe (12) is connected to the bottom end of the reversing valve (11), and a plurality of spray holes (13) are regularly arranged on the wall of the straight pipe (12).

5. The exhaust apparatus for a stainless steel silane combustion purification column of claim 1, wherein: A maintenance window (14) is arranged at the top end of the water tank (1), and a cover plate (15) is fixedly installed at the upper end of the maintenance window (14) through bolts.

6. The exhaust apparatus for a stainless steel silane combustion purification column of claim 1, wherein: A sewage pipe (16) is arranged below the left side of the water tank (1), and a temperature sensor (17) and a liquid level sensor (18) are arranged below the right side of the water tank (1) in sequence.

Images