Tubular structure and tubular equipment

Abstract

The utility model relates to the technical field of battery piece preparation, in particular to a tubular structure and tubular equipment. The tubular structure comprises a furnace tube, a first air inlet structure and a second air inlet structure; the furnace tube is provided with a furnace chamber; the furnace chamber is provided with a first gas inlet structure and a second gas inlet structure, in the first direction, the first gas inlet structure is used for introducing source-carrying gas into the top or the tail of the furnace chamber, and the second gas inlet structure is used for introducing the source-carrying gas into the side face of the furnace chamber. The first gas inlet structure and the second gas inlet structure are used for introducing the source-carrying gas into the furnace cavity together, the uniformity degree of the source-carrying gas in the furnace cavity can be increased, the source-carrying gas can make uniform contact with the to-be-machined part, and therefore the quality of the to-be-machined part is effectively improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of battery piece preparation, especially a tubular structure and a tubular equipment. BACKGROUND

[0002] In the production process of silicon wafers, the silicon wafers need to go through diffusion processes or chemical vapor deposition processes.

[0003] In these processes, the silicon wafers are placed in a tubular structure, and a carrier gas is introduced into the tubular structure. The elements in the carrier gas are doped into the silicon wafers or deposited as a thin film. In a conventional tubular structure, the carrier gas and the silicon wafers do not uniformly contact, resulting in poor quality of the silicon wafers. SUMMARY

[0004] Therefore, the utility model provides a tubular structure and a tubular equipment to partially or completely solve the technical problem of poor quality of silicon wafers caused by uneven contact between the carrier gas and the silicon wafers in the conventional tubular structure.

[0005] To achieve the above-mentioned purpose, the technical solution of the utility model is as follows:

[0006] In a first aspect, the utility model provides a tubular structure, which includes a furnace tube, a first gas inlet structure, and a second gas inlet structure. The furnace tube is provided with a furnace cavity. The first gas inlet structure and the second gas inlet structure are used to introduce a carrier gas into the top or tail of the furnace cavity in the first direction.

[0007] Optionally, the first gas inlet structure includes a first gas inlet pipe, one end of which is arranged in the furnace cavity, and the other end of which extends to the top of the furnace cavity. The first gas inlet pipe is used to introduce the carrier gas into the top.

[0008] Optionally, the first gas inlet structure further includes a flow uniformizing plate provided with flow uniformizing holes. In the first direction, the flow uniformizing plate divides the furnace cavity into a first sub-furnace cavity and a second sub-furnace cavity. The first sub-furnace cavity is located on the side of the second sub-furnace cavity away from the tail.

[0009] A furnace boat is arranged in the furnace.

[0010] One end of the first gas inlet pipe extends into the first sub-furnace cavity, and the first gas inlet pipe is used to introduce the carrier gas into the first sub-furnace cavity. The carrier gas flows into the second sub-furnace cavity through the flow uniformizing holes.

[0011] Optionally, from the middle of the uniform flow plate to the edge of the uniform flow plate, the cross-sectional area of the uniform flow hole gradually decreases in the direction perpendicular to the first direction.

[0012] Optionally, the first gas inlet structure comprises a first gas inlet pipe, one end of the first gas inlet pipe is arranged in the furnace cavity, and the other end of the first gas inlet pipe extends to the tail of the furnace cavity, and the first gas inlet pipe is used for introducing the source carrying gas into the tail of the furnace tube.

[0013] Optionally, the second gas inlet structure comprises a second gas inlet pipe, one end of the second gas inlet pipe is arranged in the furnace cavity, and the side wall of the second gas inlet pipe is provided with a second gas inlet hole, and the second gas inlet pipe is used for introducing the source carrying gas into the side of the furnace cavity through the second gas inlet hole.

[0014] Optionally, when the first gas inlet pipe introduces the source carrying gas into the top of the furnace cavity, the density of the second gas inlet hole on the second gas inlet pipe gradually increases from the top of the furnace tube to the tail of the furnace tube, and / or the cross-sectional area of the second gas inlet hole on the second gas inlet pipe increases.

[0015] When the first gas inlet pipe introduces the source carrying gas into the tail of the furnace cavity, the density of the second gas inlet hole on the second gas inlet pipe gradually decreases from the top of the furnace tube to the tail of the furnace tube, and / or the cross-sectional area of the second gas inlet hole on the second gas inlet pipe decreases.

[0016] Optionally, the first gas inlet pipe and the second gas inlet pipe are respectively provided with a plurality of first gas inlet pipes and a plurality of second gas inlet pipes, and the plurality of first gas inlet pipes and the plurality of second gas inlet pipes are arranged at intervals around the axis of the furnace tube, and each first gas inlet pipe is located between two adjacent second gas inlet pipes.

[0017] Optionally, the first gas inlet pipe and the second gas inlet pipe are respectively provided with a plurality of first gas inlet pipes and a plurality of second gas inlet pipes, and each first gas inlet pipe has another first gas inlet pipe arranged symmetrically with respect to the axis of the furnace tube, and / or each second gas inlet pipe has another second gas inlet pipe arranged symmetrically with respect to the axis of the furnace tube.

[0018] Optionally, the furnace cavity is used for arranging a plurality of furnace boats, and two adjacent furnace boats are arranged at intervals, and a first gas inlet pipe is arranged at an interval position between two adjacent furnace boats.

[0019] Optionally, each furnace boat is provided with a first gas inlet pipe, and / or each furnace boat is provided with a second gas inlet pipe, and / or each furnace boat is provided with a first gas inlet pipe and a second gas inlet pipe.

[0020] Optionally, the furnace tube comprises an outer tube and an inner tube, a sandwich cavity is formed between the outer tube and the inner tube, the furnace cavity is arranged in the inner tube, and the inner tube gas inlet holes are arranged on the side wall of the inner tube;

[0021] The second gas inlet structure comprises the inner tube, and the source carrying gas in the sandwich cavity enters the side of the furnace cavity through the inner tube gas inlet holes.

[0022] Optionally, the density of the inner tube gas inlet holes gradually increases from the top of the furnace tube to the tail of the furnace tube, and / or the sectional area of the inner tube gas inlet holes decreases.

[0023] Optionally, the inner tube gas inlet holes are arranged in a plurality of groups, the groups of inner tube gas inlet holes are arranged in the first direction, and / or the groups of inner tube gas inlet holes are arranged around the axis of the furnace tube.

[0024] Optionally, the tubular structure further comprises a furnace door, the furnace door is arranged at the tube opening of the furnace tube, and the furnace door is connected with the furnace tube to cover the furnace cavity.

[0025] The furnace door is provided with an exhaust passage, the inlet of the exhaust passage is communicated with the furnace cavity, and the outlet of the exhaust passage is communicated with the outside.

[0026] Optionally, the furnace tube comprises an outer tube and an inner tube, a sandwich cavity is formed between the outer tube and the inner tube, and the top of the inner tube is provided with a flow uniformizing hole.

[0027] The source carrying gas in the furnace cavity is discharged to the outside through the flow uniformizing hole and the sandwich cavity.

[0028] Optionally, the inner tube comprises an inner tube body and a flow uniformizing plate, the inner tube body is in a cylindrical structure, one end of the inner tube body located at the tail is connected with the outer tube, the other end of the inner tube body located at the top is connected with the flow uniformizing plate, the inner tube body and the flow uniformizing plate are connected to form the furnace cavity, and the flow uniformizing hole is arranged on the flow uniformizing plate.

[0029] Optionally, the tubular structure further comprises a furnace door, the furnace door is arranged at the tube opening of the furnace tube, and the furnace door is connected with the furnace tube to cover the furnace cavity.

[0030] The furnace door is provided with an exhaust passage, the inlet of the exhaust passage is communicated with the sandwich cavity, and the outlet of the exhaust passage is communicated with the outside.

[0031] In a second aspect, the utility model also provides a tubular equipment, the tubular equipment comprises the tubular structure as above.

[0032] Optionally, the tubular structure further comprises a furnace door, the furnace door is arranged at the tube opening of the furnace tube, and the furnace door is connected with the furnace tube to cover the furnace cavity.

[0033] The utility model discloses a tubular structure, first air inlet structure is used for the top or tail of furnace cavity is passed in and carries source gas, second air inlet structure is used for the side of furnace cavity is passed in and carries source gas, uses first air inlet structure and second air inlet structure to pass in and carry source gas to furnace cavity together, can increase the uniformity of the source gas in the furnace cavity, and the source gas can be more uniform with the workpiece that processes and contacts to improve the quality of the workpiece that processes effectively.

[0034] The above description is only a summary of the technical scheme of the utility model, in order to more clearly understand the technical means of the utility model, can be implemented according to the content of the specification, and in order to let the above and other purposes, characteristics and advantages of the utility model can be more obvious and easy to understand, the following specific embodiment of the utility model is described. BRIEF DESCRIPTION OF DRAWINGS

[0035] In order to more clearly illustrate the technical scheme in the embodiment of the utility model or prior art, the following will briefly introduce the drawing needed to be used in the embodiment description.

[0036] Figure 1 The structure schematic diagram of the perspective view when the tubular structure of an embodiment of the utility model is not provided with first air inlet pipe and second air inlet pipe;

[0037] Figure 2 The structure schematic diagram of the perspective view when the furnace tube, first air inlet pipe and second air inlet pipe of an embodiment of the utility model are assembled;

[0038] Figure 3 The structure schematic diagram of the perspective view of outer tube and not the perspective of inner tube of another embodiment of the utility model Figure 1 ;

[0039] Figure 4 The layout schematic diagram of the furnace tube, first air inlet pipe and second air inlet pipe of the embodiment of the utility model;

[0040] Figure 5 The structure schematic diagram of the second air inlet pipe of an embodiment of the utility model;

[0041] Figure 6 The structure schematic diagram of the inner tube of an embodiment of the utility model;

[0042] Figure 7 The structure schematic diagram of the furnace door of the embodiment of the utility model;

[0043] Figure 8 The structure schematic diagram of the tray of an embodiment of the utility model.

[0044] BRIEF DESCRIPTION OF DRAWINGS

[0045] 10, furnace tube; 11, furnace cavity; 124, outlet of air guide channel; 13, outer tube; 14, inner tube; 141, air inlet hole of inner tube; 15, interlayer cavity;

[0046] 21, tray; 211, flow guide groove; 212, central tray through hole; 23, air guide cover; 24, furnace door plate; 25, flange; 251, flange air outlet; 26, sealing ring;

[0047] 40, first air inlet tube; 50, flow uniformizing plate; 51, flow uniformizing hole; 60, second air inlet tube; 61, second air inlet hole; 70, furnace boat;

[0048] Z, first direction. DETAILED DESCRIPTION

[0049] Exemplary embodiments of the present application will be described in detail with reference to the drawings. Although exemplary embodiments of the present application are shown in the drawings, it is understood that the present application can be implemented in various forms and should not be limited by the embodiments set forth herein. Rather, these embodiments are provided so that this application will be thoroughly and completely understood, and will fully convey the scope of the application to those skilled in the art.

[0050] Referring to Figure 1 It shows a perspective view of a tubular structure provided by the embodiments of the present application, which can be applied in the fields of semiconductors, photovoltaics, etc. to process workpieces such as battery pieces and silicon wafers.

[0051] Referring to Figures 1 to 8 As shown in the drawings, the tubular structure of the embodiments of the present application includes a furnace tube 10, a first air inlet structure, and a second air inlet structure. The furnace tube 10 is provided with a furnace cavity 11. In a first direction Z, the first air inlet structure is used to introduce source-carrying gas into the top or tail of the furnace cavity 11, and the second air inlet structure is used to introduce source-carrying gas into the side of the furnace cavity 11.

[0052] In the tubular structure, the furnace cavity 11 of the furnace tube 10 is used to set the workpiece to be processed, for example, a silicon wafer.

[0053] In the tubular structure of the embodiments of the present application, the first air inlet structure is used to introduce source-carrying gas into the top or tail of the furnace cavity 11, and the second air inlet structure is used to introduce source-carrying gas into the side of the furnace cavity 11. The use of the first air inlet structure and the second air inlet structure to jointly introduce source-carrying gas into the furnace cavity 11 can increase the uniformity of the source-carrying gas in the furnace cavity 11, and the source-carrying gas can be more uniformly in contact with the workpiece to be processed, thereby effectively improving the quality of the workpiece to be processed.

[0054] In some embodiments, the first gas inlet structure comprises a first gas inlet pipe 40, one end of the first gas inlet pipe 40 is arranged in the furnace cavity 11, and the one end of the first gas inlet pipe 40 extends to the top of the furnace cavity 11, and the first gas inlet pipe 40 is used for introducing the source gas to the top of the furnace tube 10. In the embodiments of the present application, one end of the first gas inlet pipe 40 is arranged in the furnace cavity 11, and the one end of the first gas inlet pipe 40 extends to the top of the furnace cavity 11 along the length direction of the furnace tube 10, and the first gas inlet pipe 40 is used for introducing the source gas to the top of the furnace tube 10. At this time, the tubular structure is a top gas inlet.

[0055] In other embodiments, the first gas inlet pipe 40 can also be arranged outside the furnace tube 10 along the length direction of the furnace tube 10, one end of the first gas inlet pipe 40 is arranged in the furnace cavity 11 through the top of the furnace cavity 11, and the one end of the first gas inlet pipe 40 is located at the top of the furnace cavity 11. Wherein, the length direction of the furnace tube 10 is the first direction Z.

[0056] In some embodiments, the first gas inlet structure further comprises a flow uniformizing plate 50, the flow uniformizing plate 50 is provided with flow uniformizing holes 51; in the first direction Z, the flow uniformizing plate 50 divides the furnace cavity 11 into a first sub-furnace cavity and a second sub-furnace cavity, the first sub-furnace cavity is located on the side of the second sub-furnace cavity away from the tail, and the second sub-furnace cavity is used for arranging the furnace boat; one end of the first gas inlet pipe 40 extends into the first sub-furnace cavity, the first gas inlet pipe 40 is used for introducing the source gas into the first sub-furnace cavity, and the source gas flows into the second sub-furnace cavity through the flow uniformizing holes 51.

[0057] In the embodiments of the present application, in use, the flow process of the source gas through the tubular structure is: entering the first sub-furnace cavity through the first gas inlet pipe 40, and then flowing into the second sub-furnace cavity through the flow uniformizing holes 51. The flow uniformizing plate 50 has the function of uniformizing the gas, so that the source gas flows relatively uniformly into the second sub-furnace cavity after passing through the flow uniformizing holes 51 of the flow uniformizing plate 50, thereby improving the uniformity of the source gas in the furnace cavity 11, and the source gas can be in contact with the workpiece to be processed more uniformly, thereby effectively improving the quality of the workpiece to be processed. Moreover, the flow uniformizing plate 50 can reduce the disturbance to the gas in the second sub-furnace cavity, avoid the influence of the gas disturbance on the quality of the workpiece to be processed, and further improve the quality of the workpiece to be processed.

[0058] In the embodiments of the present application, by arranging the flow uniformizing plate 50, the top of the furnace tube 10 can be realized to spray gas.

[0059] In some embodiments, from the middle of the flow uniformizing plate 50 to the edge of the flow uniformizing plate 50, the cross-sectional area of the flow uniformizing hole 51 decreases in turn perpendicularly to the first direction Z.

[0060] In the above structure of the embodiment of the present application, the cross-sectional area of the uniform flow hole 51 decreases from the middle of the uniform flow plate 50 to the edge of the uniform flow plate 50, which is perpendicular to the first direction Z. The uniform flow hole 51 can meet the gas inlet requirement in the second sub-chamber, so that the source gas can enter the second sub-chamber uniformly, and disturbance to the gas in the second sub-chamber is avoided, and the uniformity of the gas flow in the second sub-chamber is ensured.

[0061] In some embodiments, the plurality of uniform flow holes 51 are arranged in a plurality of annular rings, and the plurality of annular rings are arranged around the axis of the tubular structure. The plurality of annular rings are arranged at intervals and the radii increase in sequence from the middle of the uniform flow plate 50 to the edge of the uniform flow plate 50.

[0062] The annular ring can be a circular ring, or a square, pentagon, etc., and the specific shape of the annular ring is not limited.

[0063] It can be understood that the plurality of uniform flow holes 51 can also be irregularly arranged according to the gas inlet requirement in the second sub-chamber, and the use requirement can be met.

[0064] In some embodiments, the second gas inlet structure includes a second gas inlet pipe 60, one end of the second gas inlet pipe 60 is arranged in the chamber 11, and the side wall of the second gas inlet pipe 60 is provided with a second gas inlet hole 61. The second gas inlet pipe 60 is used for introducing the source gas to the side of the chamber 11 through the second gas inlet hole 61. In the embodiment of the present application, one end of the second gas inlet hole 61 is arranged in the chamber 11, and the other end of the second gas inlet hole 61 extends from the tail of the furnace tube 10 to the top of the chamber 11 along the length direction of the furnace tube 10. The second gas inlet hole 61 is used for introducing the source gas to the side of the chamber 11 through the second gas inlet hole 61. The second gas inlet hole 61 can increase the uniformity of the source gas in the chamber 11, and the source gas can be in contact with the workpiece to be processed more uniformly, thereby effectively improving the quality of the workpiece to be processed.

[0065] It can be understood that in order to increase the uniformity of the source gas in the chamber 11, the side wall of each second gas inlet pipe 60 is provided with a plurality of second gas inlet holes 61.

[0066] In the embodiment of the present application, when the first gas inlet pipe 40 is used for introducing the source gas to the top of the furnace tube 10, the second gas inlet hole 61 is arranged, and the tubular structure can realize the structure form of top gas inlet and side air supplement.

[0067] In some embodiments, when the first gas inlet pipe 40 is used for introducing the source gas to the top of the chamber 11, the density of the second gas inlet hole 61 on the second gas inlet pipe 60 gradually increases from the top of the furnace tube 10 to the tail of the furnace tube 10.

[0068] In the embodiment, the first gas inlet pipe 40 introduces the source gas to the top of the furnace cavity 11, the concentration of the elements in the source gas at the top of the furnace cavity 11 is relatively large, and the concentration of the elements in the source gas at the tail of the furnace cavity 11 is relatively small. Therefore, the density of the second gas inlet holes 61 on the second gas inlet pipe 60 gradually increases from the top of the furnace tube 10 to the tail of the furnace tube 10, the source gas introduced by the second gas inlet pipe 60 through the second gas inlet holes 61 increases, and the uniformity of the source gas in the furnace cavity 11 can be further improved. The source gas can be more uniformly contacted with the workpiece to be processed, thereby effectively improving the quality of the workpiece to be processed.

[0069]

[0070] In some embodiments, the first gas inlet pipe 40 introduces the source gas to the top of the furnace cavity 11, and the cross-sectional area of the second gas inlet holes 61 on the second gas inlet pipe 60 increases from the top of the furnace tube 10 to the tail of the furnace tube 10.

[0071] In the embodiment, the first gas inlet pipe 40 introduces the source gas to the top of the furnace cavity 11, the concentration of the elements in the source gas at the top of the furnace cavity 11 is relatively large, and the concentration of the elements in the source gas at the tail of the furnace cavity 11 is relatively small. Therefore, the density of the second gas inlet holes 61 on the second gas inlet pipe 60 gradually increases from the top of the furnace tube 10 to the tail of the furnace tube 10, the source gas introduced by the second gas inlet pipe 60 through the second gas inlet holes 61 increases, and the uniformity of the source gas in the furnace cavity 11 can be further improved. The source gas can be more uniformly contacted with the workpiece to be processed, thereby effectively improving the quality of the workpiece to be processed.

[0072] In some embodiments, a plurality of first gas inlet pipes 40 and a plurality of second gas inlet pipes 60 are provided, the plurality of first gas inlet pipes 40 and the plurality of second gas inlet pipes 60 are arranged at intervals around the axis of the furnace tube 10, and each first gas inlet pipe 40 is located between two adjacent second gas inlet pipes 60. In the above structure of the embodiment, the plurality of first gas inlet pipes 40 and the plurality of second gas inlet pipes 60 are staggered around the axis of the furnace tube 10, and the plurality of first gas inlet pipes 40 and the plurality of second gas inlet pipes 60 can more uniformly introduce the source gas into the furnace cavity 11.

[0073] It can be understood that the plurality of first gas inlet pipes 40 and the plurality of second gas inlet pipes 60 are staggered around the axis of the furnace tube 10, the distance between each first gas inlet pipe 40 and an adjacent second gas inlet pipe 60 is equal, that is, the plurality of first gas inlet pipes 40 and the plurality of second gas inlet pipes 60 are uniformly spaced around the axis of the furnace tube 10. Of course, the plurality of first gas inlet pipes 40 and the plurality of second gas inlet pipes 60 can also be non-uniformly spaced around the axis of the furnace tube 10. In addition, each first gas inlet pipe 40 can be connected to an adjacent second gas inlet pipe 60.

[0074] ​In some embodiments, the first gas inlet pipe 40 is provided in plurality; each first gas inlet pipe 40 has another first gas inlet pipe 40 symmetrically arranged relative to the axis of the furnace tube 10. In the above structure of the embodiments of the present application, each two first gas inlet pipes 40 are symmetrically arranged relative to the axis of the furnace tube 10, and then the plurality of first gas inlet pipes 40 can more evenly introduce the source gas into the furnace cavity 11.

[0075] In some embodiments, the second gas inlet pipe 60 is provided in plurality respectively; each second gas inlet pipe 60 has another second gas inlet pipe 60 symmetrically arranged relative to the axis of the furnace tube 10. In the above structure of the embodiments of the present application, each two second gas inlet pipes 60 are symmetrically arranged relative to the axis of the furnace tube 10, and then the plurality of second gas inlet pipes 60 can more evenly introduce the source gas into the furnace cavity 11.

[0076] In some embodiments, the furnace cavity 11 is used to arrange a plurality of in-furnace boats 70, and adjacent two in-furnace boats 70 are arranged at intervals, and a first gas inlet pipe 40 is arranged at the interval position between the adjacent two in-furnace boats 70. In the above structure of the embodiments of the present application, the source gas introduced into the furnace cavity 11 by the first gas inlet pipe 40 can more evenly flow to the adjacent two in-furnace boats 70 of the first gas inlet pipe 40, so that the silicon wafers on the in-furnace boats 70 are uniformly contacted with the source gas.

[0077] In some embodiments, the furnace cavity 11 is used to arrange a plurality of in-furnace boats 70, and adjacent two in-furnace boats 70 are arranged at intervals, and a second gas inlet pipe 60 is arranged at the interval position between the adjacent two in-furnace boats 70. In the above structure of the embodiments of the present application, the source gas introduced into the furnace cavity 11 by the second gas inlet pipe 60 can more evenly flow to the adjacent two in-furnace boats 70 of the second gas inlet pipe 60, so that the silicon wafers on the in-furnace boats 70 are uniformly contacted with the source gas.

[0078] In some embodiments, each in-furnace boat 70 has a plurality of positional relationships between one first gas inlet pipe 40 and one second gas inlet pipe 60, which is arranged according to the use requirement, for example, one first gas inlet pipe 40 is arranged correspondingly; and / or one second gas inlet pipe 60 is arranged correspondingly for each in-furnace boat 70; and / or one first gas inlet pipe 40 and one second gas inlet pipe 60 are arranged correspondingly for each in-furnace boat 70.

[0079] In some embodiments, the furnace tube 10 comprises an outer tube 13 and an inner tube 14, the outer tube 13 is arranged at intervals around the outer periphery of the inner tube 14, a sandwich cavity 15 is formed between the outer tube 13 and the inner tube 14, the furnace cavity 11 is arranged in the inner tube 14, and an inner tube gas inlet hole 141 is arranged on the side wall of the inner tube 14; the second gas inlet structure comprises the inner tube 14, and the source gas introduced into the sandwich cavity 15 enters the side of the furnace cavity 11 through the inner tube gas inlet hole 141.

[0080] In the embodiment of the present application, the source-carrying gas introduced into the interlayer cavity 15 enters the side of the furnace cavity 11 through the inner tube gas inlet hole 141, which can increase the uniformity of the source-carrying gas in the furnace cavity 11, so that the source-carrying gas can be more uniformly in contact with the workpiece to be processed, thereby effectively improving the quality of the workpiece to be processed.

[0081] In the embodiment of the present application, the inner tube gas inlet hole 141 is arranged on the inner tube 14 for the case that the first gas inlet pipe 40 is used to introduce the source-carrying gas into the top of the furnace pipe 10, and the tubular structure can realize the structure form of top gas inlet and side air supplement.

[0082] In some embodiments, the density of the inner tube gas inlet hole 141 on the inner tube 14 gradually increases from the top of the furnace pipe 10 to the tail of the furnace pipe 10. In the embodiment of the present application, for the case that the first gas inlet pipe 40 is used to introduce the source-carrying gas into the top of the furnace cavity 11, the density of the inner tube gas inlet hole 141 on the inner tube 14 gradually increases from the top of the furnace pipe 10 to the tail of the furnace pipe 10. The density of the inner tube gas inlet hole 141 on the inner tube 14 is related to the gas inlet direction of the furnace cavity 11, and the density of the inner tube gas inlet hole 141 on the inner tube 14 cooperates with the first gas inlet pipe 40 to introduce the source-carrying gas into the furnace cavity 11, which can increase the uniformity of the source-carrying gas in the furnace cavity 11, so that the source-carrying gas can be more uniformly in contact with the workpiece to be processed, thereby effectively improving the quality of the workpiece to be processed.

[0083] In some embodiments, the cross-sectional area of the inner tube gas inlet hole 141 on the inner tube 14 decreases from the top of the furnace pipe 10 to the tail of the furnace pipe 10. Similarly, in the embodiment of the present application for the case that the first gas inlet pipe 40 is used to introduce the source-carrying gas into the top of the furnace cavity 11, the cross-sectional area of the inner tube gas inlet hole 141 on the inner tube 14 is related to the gas inlet direction of the furnace cavity 11, and the cross-sectional area of the inner tube gas inlet hole 141 on the inner tube 14 cooperates with the first gas inlet pipe 40 to introduce the source-carrying gas into the furnace cavity 11, which can increase the uniformity of the source-carrying gas in the furnace cavity 11, so that the source-carrying gas can be more uniformly in contact with the workpiece to be processed, thereby effectively improving the quality of the workpiece to be processed.

[0084] In some embodiments, in order to increase the uniformity of the source-carrying gas in the furnace cavity 11, a plurality of inner tube gas inlet holes 141 are arranged on the side wall of the inner tube 14. The plurality of inner tube gas inlet holes 141 are arranged at intervals along the first direction Z, or the plurality of inner tube gas inlet holes 141 are arranged at intervals around the axis of the furnace pipe 10, or the plurality of inner tube gas inlet holes 141 are arranged at intervals along the first direction Z and around the axis of the furnace pipe 10.

[0085] In some embodiments, the tubular structure further comprises a furnace door arranged at the pipe opening of the furnace pipe 10, the furnace door being connected with the furnace pipe 10 to cover the furnace cavity 11; the furnace door is provided with an air extraction channel, the inlet of the air extraction channel being in communication with the furnace cavity 11, and the outlet of the air extraction channel being in communication with the outside.

[0086] In the embodiment of the present application, the furnace door covers the furnace cavity 11 to avoid temperature leakage in the furnace cavity 11, and ensure the temperature in the furnace cavity 11 and the range of the constant temperature zone in the furnace cavity 11.

[0087] In use, the gas in the furnace cavity 11 is discharged to the outside of the tubular structure through the inlet of the gas extraction channel and the outlet of the gas extraction channel.

[0088] In some embodiments, the furnace door includes a tray 21 and a gas guide assembly, the tray 21 is arranged on the side of the gas guide assembly facing the furnace cavity 11, and the tray 21 is provided with a tray through hole; the inlet of the gas extraction channel in the gas guide assembly is in communication with the tray through hole, and the outlet 124 of the gas extraction channel is used for communication with the outside.

[0089] In the embodiment of the present application, the surface of the tray 21 facing the furnace cavity 11 is used to connect with the furnace boat 70, and when the tubular structure is used vertically, the lower end of the furnace boat 70 is connected with the tray 21. The specific connection structure between the tray 21 and the furnace boat 70 can be set according to the use requirement, for example, the tray 21 is provided with a mounting groove, and the furnace boat 70 is inserted into the mounting groove, which will not be described in detail in the embodiment of the present application.

[0090] Further, the furnace boat 70 is a component for placing silicon wafers and other workpieces. It can be understood that the appropriate furnace boat 70 can be selected according to the use requirement, for example, the furnace boat 70 is a quartz boat, a silicon carbide boat, etc.

[0091] In the embodiment of the present application, the gas in the furnace cavity 11 passes through the tray through hole on the tray 21 and the inlet of the gas extraction channel in sequence, and is discharged from the outlet of the gas extraction channel. The tray 21 is used to set the furnace boat 70, which is perpendicular to the first direction Z, and the tray 21 is located in the middle of the furnace cavity 11. The gas in the furnace cavity 11 first passes through the tray through hole arranged on the tray 21, and the gas in the furnace cavity 11 can be relatively uniformly discharged from the furnace cavity 11. The gas flow uniformity when the gas flows out of the furnace cavity 11 is good, which helps to improve the quality of the workpiece.

[0092] In some embodiments, the surface of the tray 21 facing the furnace cavity 11 is provided with a plurality of mounting areas, each mounting area is arranged at intervals with other mounting areas, and a tray through hole is arranged between adjacent two mounting areas, and the mounting area is used to set the furnace boat 70.

[0093] In the embodiments of the present application, each mounting area is used to arrange one in-furnace boat 70. Each mounting area can be provided with a mounting groove or the like for mounting the in-furnace boat 70 to facilitate and stabilize the connection of the in-furnace boat 70 and the tray 21. It can be understood that each mounting area can be arranged with an in-furnace boat 70, or one or more mounting areas can be selected to arrange the in-furnace boat 70 according to the use requirements. The number of in-furnace boats 70 arranged is flexible, and a plurality of in-furnace boats 70 can be arranged to improve the production capacity of the tubular structure.

[0094] In the embodiments of the present application, the tray through hole is arranged between the adjacent two mounting areas, and the in-furnace boat 70 does not interfere with the tray through hole, thereby avoiding affecting the outflow of the gas in the furnace cavity 11 through the tray through hole and improving the airflow uniformity when the gas in the furnace cavity 11 flows out.

[0095] In some embodiments, the surface of the tray 21 facing the furnace cavity 11 is provided with a plurality of flow guide grooves 211, and each flow guide groove 211 is in communication with at least one tray through hole; the plurality of flow guide grooves 211 divide the surface of the tray 21 facing the furnace cavity 11 into a plurality of mounting areas.

[0096] The surface of the tray 21 facing the furnace cavity 11 is divided into a plurality of mounting areas.

[0097] In the embodiments of the present application, the plurality of flow guide grooves 211 divide the surface of the tray 21 facing the furnace cavity 11 into a plurality of mounting areas to realize the division of each mounting area. The arrangement of the flow guide grooves 211 can play a role in guiding the flow, so that the gas in the furnace cavity 11 is uniformly discharged through the flow guide grooves 211 and at least one tray through hole connected with the flow guide grooves 211.

[0098] In some embodiments, the tray through hole includes a central tray through hole 212, and the central tray through hole 212 is arranged at the middle portion of the tray 21 perpendicular to the first direction Z.

[0099] In the embodiments of the present application, the central tray through hole 212 is located at the middle portion of the tray 21 perpendicular to the first direction Z, and the central tray through hole 212 helps to uniformly discharge the gas in the furnace cavity 11 to ensure the airflow uniformity when the gas in the furnace cavity 11 flows out.

[0100] In some embodiments, the surface of the tray 21 facing the furnace cavity 11 is provided with a plurality of flow guide grooves 211, and the plurality of flow guide grooves 211 are respectively in communication with the central tray through hole 212, and the plurality of flow guide grooves 211 extend radially outward from the central tray through hole 212. In the above structure of the embodiments of the present application, each flow guide groove 211 is in communication with the central tray through hole 212. When the tubular structure is in use, part of the gas in the furnace cavity 11 can sequentially pass through the flow guide grooves 211, the central tray through hole 212, and the inlet of the gas extraction channel, and be discharged from the outlet of the gas extraction channel.

[0101] Further referring to Figure 8As shown, the tray 21 is provided with four flow guide grooves 211, which extend radially from the center tray through hole 212 to the outer periphery of the tray 21 and form four mounting areas, each of which is provided with an inner furnace boat 70. At this time, the tubular structure adopts the center gas extraction of the tray 21 to realize the uniformity of the airflow between the four inner furnace boats 70 and achieve better airflow guidance.

[0102] In some embodiments, the tray through hole further comprises a plurality of outer periphery tray through holes, which are arranged at intervals around the axis of the furnace tube 10. In the above structure of the embodiments of the present application, the arrangement of the outer periphery tray through hole can improve the uniformity of the airflow when the gas in the furnace cavity 11 flows out.

[0103] In some embodiments, the outer periphery tray through hole is arranged at the groove bottom of the flow guide groove 211. At this time, part of the gas in the furnace cavity 11 can be discharged in turn through the flow guide groove 211 and the outer periphery tray through hole arranged at the groove bottom of the flow guide groove 211.

[0104] In some embodiments, the outer periphery tray through hole is arranged at the groove bottom of the flow guide groove 211. At this time, part of the gas in the furnace cavity 11 can be discharged in turn through the flow guide groove 211 and the outer periphery tray through hole arranged at the groove bottom of the flow guide groove 211.

[0105] The tray through hole discharges.

[0106] In some embodiments, the outer periphery tray through hole is adjacent to the flow guide groove 211 and communicates with the flow guide groove 211. At this time, part of the gas in the furnace cavity 11 can be discharged in turn through the flow guide groove 211 and the outer periphery tray through hole adjacent to the flow guide groove 211, and part of the gas in the furnace cavity 11 can also be directly discharged through the outer periphery tray through hole.

[0107] It can be understood that the relationship between the outer periphery tray through hole and the flow guide groove 211 can be set according to the use requirements, for example, at least one of the outer periphery tray through hole arranged at the groove bottom of the flow guide groove 211, the outer periphery tray through hole arranged at intervals with the flow guide groove 211, and the outer periphery tray through hole adjacent to and communicating with the flow guide groove 211.

[0108] Similarly, part of the gas in the furnace cavity 11 can be directly discharged through the center tray through hole 212, or directly discharged through the outer periphery tray through hole, or discharged in turn through the flow guide groove 211 and the center tray through hole 212, or discharged in turn through the flow guide groove 211 and the outer periphery tray through hole, etc. The discharge of the gas in the furnace cavity 11 has multiple paths to improve the uniformity of the airflow when the gas in the furnace cavity 11 flows out.

[0109] In some embodiments, the air guide assembly comprises the air guide cover 23 and the furnace door plate 24, the air guide cover 23 is buckled on the side of the furnace door plate 24 facing the furnace cavity 11, and the air guide cover 23 and the furnace door plate 24 form an air guide channel. The air guide cover 23 is provided with an air guide channel inlet and an air guide channel outlet 124; the tray 21 is arranged on the side of the air guide cover 23 facing the furnace cavity 11. In the above structure of the embodiment of the present application, the furnace cavity 11 is capped by the furnace door plate 24 to prevent the temperature in the furnace cavity 11 from leaking out.

[0110] In some embodiments, the air guide cover 23 is provided with an air guide channel inlet on the side facing the tray 21; the tray has at least one through hole, and each through hole corresponds to an air guide channel inlet. In the above structure of the embodiment of the present application, the gas in the furnace cavity 11 passes through the tray through hole on the tray 21, the air guide channel inlet, and then enters the air guide channel. Each tray through hole corresponds to an air guide channel inlet to ensure that the gas passing through each tray through hole effectively enters the air guide channel.

[0111] In some embodiments, in the first direction, the outer periphery of the air guide cover 23 is provided with an air guide channel outlet 124; the air guide assembly further comprises a flange 25, the flange 25 is arranged around the axis of the furnace tube 10, and the flange 25 connects the furnace door plate 24 and the furnace tube 10; the flange 25 is provided with a flange air outlet 251, the flange air outlet 251 corresponds to and communicates with the air guide channel outlet 124, and the gas discharged from the air guide channel outlet 124 is transported to the outside through the flange air outlet 251.

[0112]

[0113] In the above structure of the embodiment of the present application, the gas in the furnace cavity 11 passes through the tray through hole on the tray 21, the air guide channel inlet, and then enters the air guide channel, and the gas in the air guide channel is discharged to the outside of the tubular structure through the air guide channel outlet 124 and the flange air outlet 251 in turn.

[0114] In the embodiment of the present application, the flange 25 is used to connect the furnace door plate 24 and the furnace tube 10, which has the advantages of simple and reliable connection. The flange 25 is an annular structure, which facilitates the arrangement of the flange air outlet 251, and makes the arrangement of the flange air outlet 251 in the tubular structure relatively simple.

[0115] In some embodiments, the first air inlet structure comprises a first air inlet pipe 40, one end of the first air inlet pipe 40 is arranged in the furnace cavity 11, and the other end of the first air inlet pipe 40 extends to the tail of the furnace cavity 11, and the first air inlet pipe 40 is used to introduce source gas to the tail of the furnace tube 10. In the embodiment of the present application, one end of the first air inlet pipe 40 extends from the tail of the furnace tube 10 to the tail of the furnace cavity 11, and the first air inlet pipe 40 is used to introduce source gas to the tail of the furnace tube 10. At this time, the tubular structure is a tail air inlet. ​

[0116] In some embodiments, when the first air inlet pipe 40 introduces source-carrying gas into the tail of the furnace cavity 11, the second air inlet structure includes a second air inlet pipe 60, one end of which is disposed inside the furnace cavity 11; a second air inlet hole 61 is provided on the side wall of the second air inlet pipe 60, and the second air inlet pipe 60 is used to introduce source-carrying gas into the side of the furnace cavity 11 through the second air inlet hole 61 to increase the uniformity of the source-carrying gas in the furnace cavity 11.

[0117] In this embodiment of the application, when the first air inlet pipe 40 introduces source gas into the tail of the furnace cavity 11, the setting of the second air inlet 61, the tubular structure can realize the structure of tail air intake and side air replenishment.

[0118] In some embodiments, when the first inlet pipe 40 introduces source gas into the tail of the furnace chamber 11, the density of the second inlet holes 61 on the second inlet pipe 60 gradually decreases from the top to the tail of the furnace tube 10. In this embodiment, when the first inlet pipe 40 introduces source gas into the tail of the furnace chamber 11, the element concentration in the source gas at the top of the furnace chamber 11 is lower, while the element concentration at the tail of the furnace chamber 11 is higher. Therefore, from the top to the tail of the furnace tube 10, the density of the second inlet holes 61 on the second inlet pipe 60 gradually decreases, and the amount of source gas introduced into the furnace chamber 11 through the second inlet holes 61 decreases. This increases the uniformity of the source gas within the furnace chamber 11, allowing the source gas to contact the workpiece more evenly, thereby achieving…

[0119] This effectively improves the quality of the parts to be processed.

[0120] In some embodiments, when the first inlet pipe 40 introduces source gas into the tail of the furnace chamber 11, the cross-sectional area of ​​the second inlet hole 61 on the second inlet pipe 60 decreases from the top to the tail of the furnace tube 10. In this embodiment, when the first inlet pipe 40 introduces source gas into the tail of the furnace chamber 11, the concentration of elements in the source gas at the top of the furnace chamber 11 is lower, and the concentration of elements in the source gas at the tail of the furnace chamber 11 is higher. Therefore, the cross-sectional area of ​​the second inlet hole 61 on the second inlet pipe 60 decreases from the top to the tail of the furnace tube 10, and the amount of source gas introduced into the furnace chamber 11 through the second inlet hole 61 decreases. This increases the uniformity of the source gas in the furnace chamber 11, allowing the source gas to contact the workpiece more evenly, thereby effectively improving the quality of the workpiece.

[0121] In some embodiments, the furnace tube 10 comprises an outer tube 13 and an inner tube 14, the outer tube 13 is sleeved on the outer periphery of the inner tube 14 at intervals, a sandwich cavity 15 is formed between the outer tube 13 and the inner tube 14, and a top of the inner tube 14 is provided with a flow uniforming hole 51; the source carrying gas in the furnace cavity 11 is discharged to the outside through the flow uniforming hole 51 and the sandwich cavity 15.

[0122] The furnace tube 10 of the embodiment of the present application is a double-layer tube, which can increase the structural strength and service life of the furnace tube 10.

[0123] In the embodiment of the present application, in use, the flow process of the source carrying gas is that the source carrying gas flows to the tail of the furnace cavity 11 through the first gas inlet tube 40, and the gas in the furnace cavity 11 is discharged in turn through the flow uniforming hole 51 and the sandwich cavity 15. The gas entering the sandwich cavity 15 from the furnace cavity 11 through the flow uniforming hole 51 has a certain temperature, and the gas with the certain temperature can also play a role of temperature equalization, improving the uniformity of the temperature field of the furnace cavity 11 in the inner tube 14, and realizing stable heat energy and reducing the heat exchange loss between the inside and outside of the inner tube 14.

[0124] In the vertical use of the tubular structure, the tubular structure is used from the lower part of the inner tube 14 to the upper part of the inner tube 14, and the gas is discharged through the sandwich cavity 15 and the flange gas outlet 251.

[0125] In some embodiments, the outer tube 13 is a tube made of a material with large strength, for example, a metal tube or a quartz tube, etc., to ensure the structural strength of the furnace tube 10. The inner tube 14 is a tube made of a material suitable for the processing environment of the furnace cavity 11, for example, a material that can withstand the temperature of the heat field and does not react with the source carrying gas, etc., for example, a silicon carbide tube. The furnace tube 10 is a double-layer tube and cooperates with the performance of the above-mentioned material tube, so that the furnace tube 10 has the advantage of long service life.

[0126] In some embodiments, the inner tube 14 comprises an inner tube body and a flow uniforming plate 50, the inner tube body is in a cylindrical structure, one end of the inner tube body located at the tail is connected with the outer tube 13, the other end of the inner tube body located at the top is connected with the flow uniforming plate 50, the inner tube body and the flow uniforming plate 50 are connected to form the furnace cavity 11, and the flow uniforming plate 50 is provided with the flow uniforming hole 51.

[0127] In the embodiment of the present application, the inner tube body is a cylindrical structure penetrating from top to bottom, the end of the inner tube body close to the furnace door is connected with the end of the outer tube 13 close to the furnace door, and the end of the inner tube body away from the furnace door is connected with the flow uniforming plate 50. The flow uniforming plate 50 is provided with a plurality of flow uniforming holes 51, and the flow uniforming plate 50 can make the gas in the furnace cavity 11 flow out more uniformly, avoid disturbing the gas in the furnace cavity 11, and ensure the uniformity of the gas flow in the furnace cavity 11.

[0128] In some embodiments, the tubular structure further comprises a furnace door, which is arranged at the pipe opening of the furnace pipe 10 and is connected with the furnace pipe 10 to cover the furnace cavity 11; the furnace door is provided with an air extraction channel, an inlet of the air extraction channel is communicated with the interlayer cavity 15, and an outlet of the air extraction channel is communicated with the outside.

[0129] In use of the tubular structure, the flow process of the source gas is as follows: the source gas flows to the tail of the furnace cavity 11 through the first gas inlet pipe 40, and the gas in the furnace cavity 11 is sequentially discharged through the uniform flow hole 51, the interlayer cavity 15, the inlet of the air extraction channel, and the outlet of the air extraction channel.

[0130] In some embodiments, the tubular structure comprises a flange 25, which is arranged around the axis of the furnace pipe 10 and connects the furnace door and the furnace pipe 10; the air extraction channel is arranged on the flange 25. In the embodiments, the flange 25 is used to connect the furnace door and the furnace pipe 10, which has the advantages of simple and reliable connection. The flange 25 is an annular structure, which is convenient for arranging the air extraction channel and makes the arrangement of the air extraction channel in the tubular structure simple. The air extraction channel can be a hole structure to facilitate processing and manufacturing.

[0131] In some embodiments, the flange 25 is further provided with a cooling channel, which is suitable for passing the cooling medium.

[0132] In the embodiments, in use of the tubular structure, the cooling medium is passed into the cooling channel of the flange 25, and the cooling medium flows out of the cooling channel after absorbing heat to take away heat and achieve the purpose of cooling. Moreover, the cooling channel for passing the cooling medium is arranged in the flange 25, and the separate cooling assembly can save the number of components in the tubular structure and save the cost of the tubular structure.

[0133] In some embodiments, in order to increase the sealing performance of the furnace cavity 11, the furnace door plate 24 is further provided with a sealing ring 26, and the furnace door plate 24 is sealed and connected with the furnace pipe 10 by using the sealing ring 26; after the furnace door plate 24 is connected with the furnace pipe 10, the sealing of the furnace cavity 11 can be realized to ensure the temperature and temperature field uniformity in the furnace cavity 11. The arrangement of the cooling channel in the flange 25 can avoid the aging and failure of the sealing ring 26 caused by the temperature in the furnace cavity 11.

[0134] The embodiments of the present application further provide a tubular equipment, which comprises the tubular structure as described above.

[0135] The first gas inlet structure of the tubular structure is used for introducing the carrier source gas to the top or tail of the furnace cavity 11, and the second gas inlet structure is used for introducing the carrier source gas to the side of the furnace cavity 11, the carrier source gas in the furnace cavity 11 can be increased in uniformity by using the first gas inlet structure and the second gas inlet structure to introduce the carrier source gas into the furnace cavity 11 together, the carrier source gas can be more uniformly contacted with the workpiece to be processed, thereby effectively improving the quality of the workpiece to be processed, and therefore, the tubular equipment has the advantages of high production quality.

[0136] The tubular equipment can have various application places, for example, the tubular equipment can be used as a low-pressure deposition equipment, a diffusion equipment, etc.

[0137] It should be noted that the relational terms herein such as first and second and the like are used only to differentiate one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between or among the entities or operations. Moreover, the terms "comprises", "comprising", or any other variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can include other elements not expressly listed or inherent to such process, method, article, or apparatus. An element proceeded by "comprises... a" does not, without more constraints, exclude the existence of additional identical elements in the process, method, article, or apparatus that comprises the element.

[0138] Each of the embodiments in the specification is described in a relevant manner, and the same and similar parts of each of the embodiments can be referred to each other, and each of the embodiments mainly describes the difference from other embodiments. For the embodiments of the device, the electronic device, the computer readable storage medium and the computer program product comprising instructions, since they are basically similar to the method embodiments, the description is relatively simple, and the relevant parts can be referred to the part of the method embodiments.

[0139] The above only describes the preferred embodiments of the present application, and is not used to limit the protection scope of the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application is included in the protection scope of the present application.

Claims

1. A tubular structure, characterized by, Comprising, a furnace tube (10) provided with a furnace cavity (11); a first gas inlet structure and a second gas inlet structure, in a first direction (Z), the first gas inlet structure is used for introducing a carrier gas into a top or tail of the furnace cavity (11), and the second gas inlet structure is used for introducing the carrier gas into a side of the furnace cavity (11).

2. The tubular structure of claim 1, wherein, The first gas inlet structure includes a first gas inlet pipe (40), one end of the first gas inlet pipe (40) is arranged in the furnace cavity (11), and the other end of the first gas inlet pipe (40) extends to the top of the furnace cavity (11), and the first gas inlet pipe (40) is used for introducing the carrier gas into the top of the furnace tube (10).

3. The tubular structure of claim 2, wherein, The first gas inlet structure further includes a flow uniformizing plate (50), the flow uniformizing plate (50) is provided with a flow uniformizing hole (51); in the first direction (Z), the flow uniformizing plate (50) divides the furnace cavity (11) into a first sub-furnace cavity and a second sub-furnace cavity, the first sub-furnace cavity is located on a side of the second sub-furnace cavity away from the tail, and the second sub-furnace cavity is used for arranging an in-furnace boat; One end of the first gas inlet pipe (40) extends into the first sub-furnace cavity, and the first gas inlet pipe (40) is used for introducing the carrier gas into the first sub-furnace cavity, and the carrier gas flows into the second sub-furnace cavity through the flow uniformizing hole (51).

4. The tubular structure of claim 3, wherein, From the middle of the flow uniformizing plate (50) to the edge of the flow uniformizing plate (50), the cross-sectional area of the flow uniformizing hole (51) decreases in turn perpendicularly to the first direction (Z).

5. The tubular structure of claim 1, wherein, The first gas inlet structure includes a first gas inlet pipe (40), one end of the first gas inlet pipe (40) is arranged in the furnace cavity (11), and the other end of the first gas inlet pipe (40) extends to the tail of the furnace cavity (11), and the first gas inlet pipe (40) is used for introducing the carrier gas into the tail of the furnace tube (10).

6. The tubular structure according to any one of claims 2-5, characterized in that, The second gas inlet structure includes a second gas inlet pipe (60), one end of the second gas inlet pipe (60) is arranged in the furnace cavity (11); a side wall of the second gas inlet pipe (60) is provided with a second gas inlet hole (61), and the second gas inlet pipe (60) is used for introducing the carrier gas into the side of the furnace cavity (11) through the second gas inlet hole (61).

7. The tubular structure of claim 6, wherein, In the case that the first gas inlet pipe (40) introduces the carrier gas into the top of the furnace cavity (11), the density of the second gas inlet hole (61) on the second gas inlet pipe (60) gradually increases from the top of the furnace tube (10) to the tail of the furnace tube (10), and / or the cross-sectional area of the second gas inlet hole (61) on the second gas inlet pipe (60) increases; In the case that the first gas inlet pipe (40) introduces the carrier gas into the tail of the furnace cavity (11), the density of the second gas inlet hole (61) on the second gas inlet pipe (60) gradually decreases from the top of the furnace tube (10) to the tail of the furnace tube (10), and / or the cross-sectional area of the second gas inlet hole (61) on the second gas inlet pipe (60) decreases.

8. The tubular structure of claim 6, wherein, The first air inlet pipe (40) and the second air inlet pipe (60) are respectively provided with a plurality of first air inlet pipes (40) and a plurality of second air inlet pipes (60), which are arranged at intervals around the axis of the furnace tube (10), and each first air inlet pipe (40) is located between two adjacent second air inlet pipes (60).

9. The tubular structure of claim 6, wherein, The first air inlet pipe (40) and the second air inlet pipe (60) are respectively provided with a plurality of first air inlet pipes (40) and a plurality of second air inlet pipes (60); each first air inlet pipe (40) has another first air inlet pipe (40) arranged symmetrically relative to the axis of the furnace tube (10); and / or, each second air inlet pipe (60) has another second air inlet pipe (60) arranged symmetrically relative to the axis of the furnace tube (10).

10. The tubular structure of claim 6, wherein, The furnace cavity (11) is used to arrange a plurality of in-furnace boats (70), and two adjacent in-furnace boats (70) are arranged at intervals, and a first air inlet pipe (40) is arranged at the interval position between the two adjacent in-furnace boats (70).

11. The tubular structure of claim 10, wherein, Each in-furnace boat (70) is correspondingly arranged with a first air inlet pipe (40); and / or, each in-furnace boat (70) is correspondingly arranged with a second air inlet pipe (60); and / or, each in-furnace boat (70) is correspondingly arranged with a first air inlet pipe (40) and a second air inlet pipe (60).

12. The tubular structure of claim 2, wherein, The furnace tube (10) comprises an outer tube (13) and an inner tube (14), a sandwich cavity (15) is formed between the outer tube (13) and the inner tube (14), the furnace cavity (11) is arranged in the inner tube (14), and an inner tube air inlet hole (141) is arranged on the side wall of the inner tube (14); The second air inlet structure comprises the inner tube (14), and the source-carrying gas introduced into the sandwich cavity (15) enters the side of the furnace cavity (11) through the inner tube air inlet hole (141).

13. The tubular structure of claim 12, wherein, From the top of the furnace tube (10) to the tail of the furnace tube (10), the density of the inner tube air inlet hole (141) on the inner tube (14) gradually increases; and / or, the cross-sectional area of the inner tube air inlet hole (141) on the inner tube (14) decreases.

14. The tubular structure of claim 12, wherein, The inner tube air inlet hole (141) has a plurality of inner tube air inlet holes (141) arranged at intervals along the first direction (Z) and / or around the axis of the furnace tube (10).

15. The tubular structure of claim 2, wherein, The tubular structure further comprises a furnace door arranged at the pipe opening of the furnace tube (10), and the furnace door is connected with the furnace tube (10) to cover the furnace cavity (11). The furnace door is provided with an air extraction channel, the inlet of the air extraction channel communicates with the furnace cavity (11), and the outlet of the air extraction channel communicates with the outside.

16. The tubular structure of claim 4, wherein, The furnace tube (10) comprises an outer tube (13) and an inner tube (14), a sandwich cavity (15) is formed between the outer tube (13) and the inner tube (14), and a uniform flow hole (51) is arranged at the top of the inner tube (14); The source-carrying gas in the furnace cavity (11) is discharged to the outside through the uniform flow hole (51) and the sandwich cavity (15).

17. The tubular structure of claim 16, wherein, The inner tube (14) comprises an inner tube body and a flow uniforming plate (50), the inner tube body is in a cylindrical structure, the inner tube body is connected with the outer tube (13) at one end of the tail part, the inner tube body is connected with the flow uniforming plate (50) at the other end of the top part, the inner tube body and the flow uniforming plate (50) are connected to form the furnace cavity (11), and the flow uniforming plate (50) is provided with the flow uniforming holes (51).

18. The tubular structure of claim 16, wherein, The tubular structure further comprises a furnace door, the furnace door is arranged at a pipe opening of the furnace pipe (10), and the furnace door is connected with the furnace pipe (10) to cover the furnace cavity (11). The furnace door is provided with an air extraction channel, an inlet of the air extraction channel is communicated with the interlayer cavity (15), and an outlet of the air extraction channel is communicated with the outside.

19. A tubular apparatus, characterized by The tubular structure comprises the tubular structure according to any one of claims 1-18.

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