Furnace door assembly and reaction furnace

Abstract

The utility model relates to the technical field of semiconductors and photovoltaics, in particular to a furnace door assembly and a reaction furnace, and solves the problem that the performance of separating and sealing an inner cavity and an outer cavity in the reaction furnace with an inner furnace body and an outer furnace body cannot meet the requirements in the related technology. The furnace door assembly comprises an outer door which is configured to open or block an outer furnace opening; the inner door is configured to open or block the inner furnace opening; the at least one first pressing module is configured to press the inner door to the inner furnace body under the condition that the inner door blocks the inner furnace opening; and the at least one second pressing module is connected to at least one of the outer furnace body and the outer door, and the second pressing module is configured to press the outer door to the outer furnace body under the condition that the outer furnace opening is blocked by the outer door. According to the furnace door assembly and the reaction furnace, the inner cavity and the outer cavity can be separated and sealed, and the sealing stability and the sealing strength are improved.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to the field of semiconductor and photovoltaic technology, and in particular to a furnace door assembly and a reaction furnace. BACKGROUND

[0002] With the development of photovoltaic technology, solar cells are widely used in various fields. With the rise of new solar module technologies such as cut half module and shingled module, it is necessary to divide a cell into two or more pieces when manufacturing solar modules. The surface of the cutting section formed after the cell is cut has a high recombination rate, which can negatively affect the electrical performance of the solar cell. Therefore, the cutting section needs to be passivated.

[0003] In a solar cell, an aluminum oxide film is mainly used for surface passivation. Atomic layer deposition (ALD) aluminum oxide coating technology can effectively coat an aluminum oxide film on the cell. In the current tube-type aluminum oxide coating technology, the inner furnace body and the outer furnace body sleeved in the reaction furnace form an inner cavity and an outer cavity. It is necessary to ensure that the process gas in the inner cavity does not leak outside and that the process is affected by the external environment to the minimum. Therefore, the inner cavity and the outer cavity need to be sealed and separated, and good sealing performance needs to be ensured. The existing furnace door cannot meet the sealing requirements. UTILITY MODEL CONTENT

[0004] Therefore, the present disclosure provides a furnace door assembly and a reaction furnace to solve the problem that the sealing performance of the inner cavity and the outer cavity of the reaction furnace with an inner furnace body and an outer furnace body cannot meet the requirements in the related art.

[0005] In a first aspect, an embodiment of the present disclosure provides a furnace door assembly applied to a reaction furnace. The reaction furnace includes an inner furnace body and an outer furnace body sleeved together. The inner furnace body has an inner cavity and an inner furnace port. The outer furnace body has an outer cavity and an outer furnace port. The furnace door assembly includes: an outer door arranged on a side facing the outer furnace port. The outer door is configured to open or block the outer furnace port. An inner door is movably connected to a side of the outer door facing the outer furnace port. The inner door is configured to open or block the inner furnace port. At least one first pressing module is connected between the inner door and the outer door. The first pressing module is configured to press the inner door against the inner furnace body when the inner door blocks the inner furnace port. At least one second pressing module is connected to at least one of the outer furnace body and the outer door. The second pressing module is configured to press the outer door against the outer furnace body when the outer door blocks the outer furnace port.

[0006] In some embodiments, the second compression module comprises: a driving assembly connected to the outer side wall of the outer furnace body; a compression rod, one end of the compression rod being rotatably connected to the output end of the driving assembly, the driving assembly being capable of driving the compression rod to move along the extension direction of the outer cavity; a roller rotatably connected to the other end of the compression rod; and a connecting rod rotatably connected to the compression rod and the outer furnace body, respectively, in the case that the driving assembly drives the compression rod to move along the extension direction of the outer cavity, the connecting rod causes the compression rod to rotate about the output end of the connected driving assembly, so as to drive the roller to abut against the outer door and compress the outer door or drive the roller to move away from the outer door.

[0007] In some embodiments, the first compression module comprises: a fixed seat arranged on the side of the outer door facing the outer furnace opening; an adjusting block movably connected to the fixed seat, the adjusting block being connected to the inner door, the adjusting block being capable of moving along the extension direction of the outer cavity relative to the fixed seat; and an elastic member connecting the fixed seat and the adjusting block, in the case that the inner door blocks the inner cavity, the inner door drives the adjusting block to move towards the outer door, the elastic member is deformed under pressure, and the inner door is caused to abut against the end face of the inner furnace opening under the action of the elastic member.

[0008] In some embodiments, the fixed seat is provided with a through hole penetrating through the fixed seat along the extension direction of the outer cavity, the outer door is provided with a limiting groove in communication with the through hole, the elastic member is limited in the limiting groove, and the first compression module further comprises: a bearing assembly connected to the outer side wall of the adjusting block and the inner side wall of the through hole, respectively, the bearing assembly being configured to cause the adjusting block to move along the extension direction of the outer cavity, and in the case that the inner door is driven to move towards the outer door, the adjusting block is capable of abutting against the elastic member and causing the elastic member to be compressed and deformed.

[0009] In some embodiments, further comprising: a plurality of limiting members dispersedly arranged between the outer door and the inner door, and a gap being provided between the limiting members and the inner door, in the case that the inner door blocks the inner cavity, the inner door abuts against the limiting members.

[0010] In some embodiments, the number of the first compression modules comprises a plurality of first compression modules, and the plurality of first compression modules are arranged at intervals around the circumferential side of the inner door; and / or, the number of the second compression modules comprises a plurality of second compression modules, and the plurality of second compression modules are arranged at intervals around the circumferential side of the outer door.

[0011] In some embodiments, further comprising: a base arranged on the side close to the outer furnace opening; a first driving module connected to the base; and a second driving module slidably connected to the first driving module, the first driving module being capable of driving the second driving module to move along a first direction, the first direction being perpendicular to the extension direction of the outer cavity, and the second driving module being connected to the outer door, the second driving module being capable of driving the outer door to move along the extension direction of the outer cavity.

[0012] In some embodiments, further comprising: a bottom plate connected to the second driving module, the second driving module being capable of driving the bottom plate to move along the extension direction of the outer cavity; at least one support, one end of the support being fixedly connected to the bottom plate; and a hinge assembly connected to the other end of the support and connected to the outer door on the side away from the inner door.

[0013] In some embodiments, at least one of the inner door and the outer door is covered with a reflective layer on the side facing the outer furnace body; and / or, the side of the inner door away from the outer door is provided with a recess, and the bottom of the recess is provided with a plurality of uniformly distributed flow holes.

[0014] In a second aspect, the embodiments of the present disclosure provide a reaction furnace, comprising: an inner furnace body having an inner cavity and an inner furnace port; an outer furnace body sleeved on the outer side of the inner furnace body, the outer furnace body having an outer cavity and an outer furnace port; and the above-described furnace door assembly configured to open or block the inner furnace port and the outer furnace port.

[0015] The furnace door assembly and the reaction furnace provided by the embodiments of the present disclosure can separate the outer cavity and the inner cavity when the furnace door assembly closes the furnace port of the reaction furnace by using the outer door and the inner door to block the outer cavity and the inner cavity respectively, and can press the inner door against the inner furnace body and press the outer door against the outer furnace body by using the first pressing assembly and the second pressing assembly under the condition that the outer door and the inner door block the outer cavity and the inner cavity, thereby improving the stability and strength of the sealing and enhancing the sealing effect. BRIEF DESCRIPTION OF DRAWINGS

[0016] The above and other objects, features and advantages of the present disclosure will become more apparent from the following detailed description taken in conjunction with the accompanying drawings. The drawings provided herein are for illustrative purposes only and, therefore, are not to be construed as being prior art to the present disclosure. In the drawings, like reference numerals refer to like elements or steps throughout.

[0017] Figure 1 Fig. 1 shows a schematic view of a reaction furnace according to an embodiment of the present disclosure.

[0018] Figure 2 Fig. 2 shows a schematic view of a furnace door assembly according to an embodiment of the present disclosure.

[0019] Figure 3 Fig. 3 shows a partial enlarged view of the cooperation between the first driving module and the second driving module in the furnace door assembly according to an embodiment of the present disclosure.

[0020] Figure 4 Fig. 4 shows a front view of the furnace door assembly according to an embodiment of the present disclosure.

[0021] Figure 5Fig. 6 shows a side view of a furnace door assembly according to an embodiment of the present disclosure.

[0022] Figure 6 Fig. 7 shows a perspective view of a furnace door assembly according to an embodiment of the present disclosure. Figure 5 Fig. 8 shows an A-A sectional view of the furnace door assembly shown in Fig. 7.

[0023] Figure 7 Fig. 9 shows a schematic view of a second pressing die set in the furnace door assembly according to an embodiment of the present disclosure.

[0024] Reference signs:

[0025] 10, reaction furnace; 1, furnace door assembly; 11, outer door; 11a, limiting groove; 111, first sealing strip; 112, reflecting layer; 12, inner door; 121, second sealing strip; 122, recess; 123, uniform flow hole; 13, first pressing die set; 131, adjusting block; 131a, first bolt; 1311, shaft rod; 1312, sliding block; 132, fixed seat; 132a, through hole; 132b, second bolt; 133, elastic member; 134, bearing assembly; 14, second pressing die set; 141, air cylinder; 141a, ejector rod; 142, mounting seat; 143, first rotating shaft; 144, pressing rod; 145, connecting rod; 146, roller; 15, limiting member; 16, base; 17, first driving set; 171, first guide rail; 172, first sliding block; 173, fixed plate; 18, second driving set; 181, second guide rail; 182, second sliding block; 183, bottom plate; 184, support; 185, hinge assembly; 2, outer furnace body; 2a, outer cavity; 21, outer furnace mouth; 21a, first end face; 3, inner furnace body; 3a, inner cavity; 31, inner furnace mouth; 31a, second end face; X, second direction; Y, first direction. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the present disclosure will be clearly and completely described below with reference to the drawings in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, rather than all the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present disclosure.

[0027] The furnace door assembly according to an embodiment of the present disclosure is provided, as shown in Figure 1 and Figure 2 The furnace door assembly 1 is applied to the reaction furnace 10. The reaction furnace 10 includes the inner furnace body 3 and the outer furnace body 2 which are sleeved, the inner furnace body 3 has the inner cavity 3a and the inner furnace mouth 31, the outer furnace body 2 has the outer cavity 2a and the outer furnace mouth 21, and the furnace door assembly 1 is configured to open or block the inner furnace mouth 31 and the outer furnace mouth 21.

[0028] It can be understood that the reaction furnace 10 may, for example, be an ALD reaction furnace of an ALD device, and the inner cavity 3a is arranged to enclose a furnace body-shaped closed space in which a silicon wafer to be plated can be placed to complete plating by spraying a process gas to the surface of the silicon wafer to be plated in the closed space under high temperature conditions. In other embodiments, the reaction furnace 10 may, for example, be a chemical reaction furnace having a sleeved inner furnace body 3 and outer furnace body 2 and used for depositing a thin film, without specific limitation.

[0029] Optionally, the sleeved inner furnace body 3 and outer furnace body 2 may, for example, be arranged in a circular furnace body-shaped structure, or in a square furnace body-shaped structure, a rhombic furnace body-shaped structure, etc., and the furnace door assembly 1 may, for example, be matched according to the shape of the inner furnace body 3 and outer furnace body 2, without specific limitation. In the embodiments of the present disclosure, the inner furnace body 3 and outer furnace body 2 are arranged in a circular furnace body-shaped structure, and the furnace door assembly 1 is arranged in a matched circular structure.

[0030] Optionally, along the extension direction (as the second direction X) of the outer furnace body 2, the inner furnace port 31 and outer furnace port 21 may, for example, be arranged only at the same end of the inner furnace body 3 and outer furnace body 2, in which case the furnace door assembly 1 may, for example, be arranged in one group, or the inner furnace port 31 and outer furnace port 21 may, for example, be arranged at both ends of the inner furnace body 3 and outer furnace body 2, in which case the furnace door assembly 1 may, for example, be arranged in two groups, and the furnace door assembly 1 may, for example, be adaptively adjusted according to the number and position of the furnace ports, without specific limitation. In the embodiments of the present disclosure, the furnace ports are arranged in one, and the inner furnace port 31 and outer furnace port 21 are arranged at one end of the reaction furnace 10 along the extension direction of the outer furnace body 2.

[0031] The furnace door assembly 1 includes an outer door 11, an inner door 12, at least one first pressing module 13, and at least one second pressing module 14. The outer door 11 is arranged on the side facing the outer furnace port 21 and is configured to open or block the outer furnace port 21. The inner door 12 is movably connected to the side of the outer door 11 facing the outer furnace port 21 and is configured to open or block the inner furnace port 31. The first pressing module 13 is connected between the inner door 12 and the outer door 11 and is configured to press the inner door 12 against the inner furnace body 3 when the inner door 12 blocks the inner furnace port 31. The second pressing module 14 is connected to at least one of the outer furnace body 2 and the outer door 11 and is configured to press the outer door 11 against the outer furnace body 2 when the outer door 11 blocks the outer furnace port 21.

[0032] Optionally, when the furnace door assembly 1 seals the inner furnace port 31 and the outer furnace port 21, the outer door 11 can be attached to the end face of the outer furnace body 2 (as the first end face 21a), and the inner door 12 can be attached to the second end face 31a of the inner furnace body 3. In addition, the outer door 11 can be provided with a first sealing strip 111 at the position where it is attached to the end face of the outer furnace body 2, and the inner door 12 can be provided with a second sealing strip 121 at the position where it is attached to the second end face 31a of the inner furnace body 3, or the outer door 11 and the inner door 12 can be integrally provided with a rubber part having sealing performance on the side of the outer furnace body 2, and the specific structure of the inner door 12 and the outer door 11 can be adjusted as needed.

[0033] Optionally, the shapes of the inner door 12 and the outer door 11 can be circular structures matching the shapes of the inner furnace body 3 and the outer furnace body 2, and the circular size of the inner door 12 is at least greater than the inner diameter of the inner furnace body 3 and less than the inner diameter of the outer furnace body 2, and the circular size of the outer door 11 is at least greater than the inner diameter of the outer furnace body 2, so that when the outer door 11 seals the outer cavity 2a, the inner door 12 can extend into the outer cavity 2a to seal the inner cavity 3a. In addition, when the furnace door assembly 1 seals the inner furnace port 31 and the outer furnace port 21, the axis of the outer door 11, the axis of the inner door 12, the axis of the inner furnace body 3 and the axis of the outer furnace body 2 coincide.

[0034] In the embodiments of the present disclosure, when the furnace door assembly 1 closes the furnace port of the reaction furnace 10, the outer door 11 and the inner door 12 are used to seal the outer cavity 2a and the inner cavity 3a respectively to separate the outer cavity 2a and the inner cavity 3a, and the first pressing assembly and the second pressing assembly are used to press the inner door 12 against the inner furnace body 3 and press the outer door 11 against the outer furnace body 2 when the outer door 11 and the inner door 12 seal the outer cavity 2a and the inner cavity 3a, so that the outer cavity 2a and the inner cavity 3a can be separated and sealed, and the stability and strength of the sealing are improved, and the sealing effect is improved.

[0035] In an optional embodiment, the surface of the side of the inner door 12 away from the outer door 11 is provided with a recess 122, and the bottom of the recess 122 is provided with a plurality of uniformly distributed flow holes 123. When the inner door 12 seals the inner furnace port 31, the recess 122 communicates with the inner cavity 3a, and the size of the recess 122 is smaller than the size of the inner furnace port 31, so that the process gas can first contact the surface of the inner door 12, the surface of the inner door 12 disperses the process gas, and then the process gas enters the recess 122, so that the process gas can be more uniformly diffused from the flow holes 123.

[0036] Optionally, the shape of the recess 122 can match the shape of the inner cavity 3a, and the specific size of the recess 122 can be adjusted as needed, as long as the process gas in the inner cavity 3a can first hit the surface of the inner door 12 and then diffuse from the flow holes 123 of the recess 122, without specific limitation.

[0037] It can be understood that the shapes of the plurality of uniform flow holes 123 arranged at the bottom of the recess 122 can be circular, square, strip-shaped, etc., and the plurality of uniform flow holes 123 can be arranged in a scattered manner or in a certain arrangement manner, which can be adjusted adaptively according to actual requirements, and is not specifically limited.

[0038] In an optional embodiment, at least one of the inner door 12 and the outer door 11 is covered with a reflective layer 112 on the surface of the side facing the outer furnace body 2. By arranging the reflective layer 112, when the furnace door assembly 1 separates and seals the inner cavity 3a and the outer cavity 2a, the reflective layer 112 can reflect heat radiation into the corresponding sealed inner cavity 3a and / or outer cavity 2a, so as to reduce the heat loss in the corresponding cavity.

[0039] Optionally, the reflective layer 112 can be a reflective plate detachably connected to the inner door 12 and the outer door 11, respectively, and the thickness, material, etc. of the reflective plate can be selected according to actual requirements, and is not specifically limited.

[0040] In some embodiments, as Figure 1 , Figure 3 , Figure 4 and Figure 5The furnace door assembly 1 further comprises a base 16, a first driving module 17 and a second driving module 18. The base 16 is arranged at one side close to the outer furnace opening 21. The first driving module 17 is connected to the base 16. The second driving module 18 is slidingly connected to the first driving module 17. The first driving module 17 can drive the second driving module 18 to move along the first direction Y, which is perpendicular to the extension direction of the outer cavity 2a. That is, the first direction Y and the second direction X are perpendicular to each other. The second driving module 18 is connected to the outer door 11, and can drive the outer door 11 to move along the extension direction of the outer cavity 2a. In the state that the furnace door assembly 1 opens the inner furnace opening 31 and the outer furnace opening 21, the inner door 12 and the outer door 11 are arranged in a staggered manner along the first direction Y and the outer furnace body 2, so as to facilitate the access to the silicon wafer from the inner furnace opening 31. When the furnace door assembly 1 is switched from the open state to the sealing state, the first driving module 17 can drive the outer door 11 and the inner door 12 to move together along the first direction Y, until the axes of the outer door 11 and the inner door 12 coincide with the axis of the outer cavity 2a. At this time, the inner door 12 and the first end surface 21a of the outer furnace body 2 have a certain distance. The second driving module 18 is started to drive the outer door 11 and the inner door 12 to move towards the outer furnace body 2. The inner door 12 will first abut against the second end surface 31a of the inner furnace body 3, and in the process of continuing to move forward, the first pressing module 13 is pressed and deformed under the pushing force of the inner door 12 and the acting force of the second driving module 18. After the outer door 11 abuts against the first end surface 21a of the outer furnace opening 21, the second driving module 18 is stopped. At the same time, the second pressing module 14 arranged can press the outer door 11, so as to further improve the sealing strength of the inner door 12 sealing the inner furnace opening 31.

[0041] In addition, compared with the original scheme of opening and closing the furnace door by rotating the door, the scheme of opening and closing the furnace door by combination of lateral movement and forward and backward movement reduces the space occupied in the extension direction of the outer cavity 2a.

[0042] Optionally, the first driving module 17 and the second driving module 18 can be provided as the same linear driving mechanism, such as a mechanism in which a cylinder pushes a top rod to move linearly, a mechanism in which a motor drives a synchronous belt assembly to move, a mechanism in which a lead screw and a nut are matched, and the like, and a suitable driving mode and a matching structure can be selected according to actual requirements, without specific limitation. For example, the first driving module 17 includes a first motor, the base 16 is provided with a first guide rail 171 extending along the first direction Y, the first guide rail 171 is slidably connected with a first sliding block 172, a first stator of the first motor is arranged on the first guide rail 171, and a first rotor is arranged on the first sliding block 172. Movement of the first rotor and the first stator driven by the first motor enables the first sliding block 172 to move along the first guide rail 171. The second driving module 18 can be arranged on a fixed plate 173, the fixed plate 173 is connected to the first sliding block 172, and the second driving module 18 can include a second motor. The fixed plate 173 is provided with a second guide rail 181 extending along the second direction X, the second guide rail 181 is slidably connected with a second sliding block 182, a second stator of the second motor is arranged on the second guide rail 181, and a second rotor is arranged on the second sliding block 182. Movement of the second rotor and the second stator driven by the second motor enables the second sliding block 182 to move along the second guide rail 181.

[0043] In an optional embodiment, the second sliding block 182 of the second driving module 18 is connected with a bottom plate 183, and the bottom plate 183 and the outer door 11 can be connected through a support 184. One end of the support 184 can be fixedly connected or detachably connected with the bottom plate 183, and the other end of the support 184 is connected to one side of the outer door 11 away from the inner door 12 through a hinge assembly 185. During the process in which the second driving module 18 moves the inner door 12 and the outer door 11 together to block the inner furnace opening 31 and the outer furnace opening 21 respectively, the hinge assembly 185 enables the inner door 12 to be self-adapted to the second end surface 31a of the inner furnace body 3 and the outer door 11 to be self-adapted to the first end surface 21a of the outer furnace body 2, so as to ensure that the originally arranged sealing strips on the inner door 12 and the outer door 11 can be effectively attached to the corresponding end surfaces, thereby ensuring the sealing effect.

[0044] Optionally, the hinge assembly 185 can be provided as a structure matched with a hinge mounting seat arranged on the outer door 11 through a hinge shaft, or can be provided as other matching structures capable of realizing hinging, without specific limitation.

[0045] In some embodiments, as Figure 5 and Figure 6The first compression module 13 comprises a fixed seat 132, an adjusting block 131 and an elastic member 133. The fixed seat 132 is arranged on one side of the outer door 11 facing the outer furnace opening 21. The adjusting block 131 is movably connected to the fixed seat 132 and connected to the inner door 12. The adjusting block 131 can move along the extension direction of the outer cavity 2a relative to the fixed seat 132. The elastic member 133 is connected between the fixed seat 132 and the adjusting block 131. When the inner door 12 blocks the inner cavity 3a, the inner door 12 pushes the adjusting block 131 to move the inner door 12 towards the outer door 11. The elastic member 133 is deformed under pressure. The inner door 12 is abutted against the second end surface 31a of the inner furnace opening 31 under the action of the elastic member 133.

[0046] In an optional embodiment, the fixed seat 132 can be detachably connected to the outer door 11 by a second bolt 132b. The fixed seat 132 is provided with a through hole 132a penetrating the fixed seat 132 along the extension direction of the outer cavity 2a. The outer door 11 is provided with a limiting groove 11a in communication with the through hole 132a. The elastic member 133 is limited in the limiting groove 11a. The first compression module 13 further comprises a bearing assembly 134 connected to the outer side wall of the adjusting block 131 and the inner side wall of the through hole 132a respectively. The bearing assembly 134 is configured to enable the adjusting block 131 to move along the extension direction of the outer cavity 2a. When the inner door 12 is pushed to move towards the outer door 11, the adjusting block 131 can abut against the elastic member 133 and compress the elastic member 133. Part of the adjusting block 131 extends into the limiting groove 11a.

[0047] Optionally, the adjusting block 131 can specifically consist of a shaft 1311 and a sliding block 1312 arranged in sequence in the second direction X and fastened to the inner door 12 by a first bolt 131a. The shaft 1311 and the sliding block 1312 extend into the through hole 132a and are connected by the bearing assembly 134 arranged between the shaft 1311 and the inner side wall of the through hole 132a to enable the shaft 1311 to reciprocate in the through hole 132a along the second direction X. The sliding block 1312 can be slidably connected to the limiting groove 11a and fixedly connected or in contact with the end of the elastic member 133 in the limiting groove 11a. When the shaft 1311 moves towards the limiting groove 11a along the second direction X, the sliding block 1312 can slide towards the groove bottom of the limiting groove 11a along the second direction X. The movement of the sliding block 1312 causes the elastic member 133 to be deformed under pressure in the limiting groove 11a. The elastic member 133 generates a rebound force in the second direction X towards the inner door 12 under pressure, so as to compress the inner door 12 against the second end surface 31a of the inner furnace body 3 by the rebound force, thereby improving the stability and strength of the inner door 12 in sealing the inner furnace opening 31.

[0048] In addition, in the matching structure of the first compression module 13, the elastic member 133 is arranged in the limiting groove 11a by matching the adjusting block 131, the fixed seat 132 and the bearing assembly 134. When the inner door 12 blocks the inner furnace opening 31, the elastic member 133 is not exposed to the inner cavity 3a, and the elastic member 133 is protected to avoid failure caused by the high temperature of the inner cavity 3a.

[0049] Optionally, the elastic member 133 can be a spring, a rubber member, a spring piece or the like with deformation capability, which can be adjusted as required.

[0050] Optionally, the bearing assembly 134 can include a sleeve shaft seat and a shaft ring. The shaft seat can be provided with a through hole penetrating along the axis direction thereof. The outer side wall of the shaft seat is fixedly connected to the inner side wall of the corresponding through hole 132a of the fixed seat 132. The shaft ring is movably connected to the inner wall of the through hole in the shaft seat. The shaft rod 1311 passes through the shaft ring and has a matching gap therebetween. During the process that the inner door 12 is pushed to move towards the outer door 11, the shaft rod 1311 is pushed, and the shaft ring matched with the shaft rod can move along the second direction X relative to the shaft seat. The matching gap between the shaft ring and the shaft rod 1311 makes the axis direction of the shaft rod 1311 not completely parallel to the second direction X when the inner door 12 blocks the inner furnace opening 31, but can be inclined to a certain extent, which is beneficial to the self-adaptive adjustment of the inner door 12 according to the actual situation of the end face of the inner furnace opening 31, and improves the sealing effect of the inner door 12 on the inner furnace opening 31. The material of the bearing assembly 134 can be Teflon, tungsten steel, stainless steel or the like, which is not limited in particular.

[0051] Similarly, the first bolt 131a is threadedly connected with the inner door 12 and the shaft rod 1311 respectively, and the first bolt 131a has a matching gap between the inner door 12 and the shaft rod 1311 respectively, which is beneficial to the self-adaptive adjustment of the inner door 12 according to the actual situation of the end face of the inner furnace opening 31, and further improves the sealing effect of the inner door 12 on the inner furnace opening 31. In addition, the matching gap between the first bolt 131a and the inner door 12 and the shaft rod 1311 can be suitable for the deformation caused by thermal stress.

[0052] It should be emphasized that the first compression module 13 can be provided as a plurality of first compression modules 13, which are arranged at intervals around the circumferential side of the inner door 12, so that the stress on the inner door 12 is more uniform when the first compression module 13 compresses and seals the inner door 12, which is beneficial to improving the compression and sealing effect.

[0053] In an optional embodiment, as Figure 5The furnace door assembly 1 further comprises a plurality of limiting members 15, which are arranged between the outer door 11 and the inner door 12 in a scattered manner and have a gap between the limiting members 15 and the inner door 12. In the case that the inner door 12 blocks the inner cavity 3a, the inner door 12 abuts against the limiting members 15.

[0054] Optionally, the limiting members 15 can be bolts detachably connected to the outer door 11. The outer door 11 is provided with a fixing block threadedly connected with the bolts. The depth of the bolts screwed into the fixing block is adjustable, so as to pre-adjust the gap between the bolts and the inner door 12 according to requirements.

[0055] In some embodiments, as Figure 1 , Figure 2 and Figure 7 , the second pressing module 14 comprises a driving assembly, a pressing rod 144, a roller 146 and a connecting rod 145. The driving assembly is connected to the outer side wall of the outer furnace body 2. One end of the pressing rod 144 is rotationally connected to the output end of the driving assembly. The driving assembly can drive the pressing rod 144 to move along the extension direction of the outer cavity 2a. The roller 146 is rotationally connected to the other end of the pressing rod 144. The connecting rod 145 is rotationally connected to the pressing rod 144 and the outer furnace body 2, respectively. In the case that the driving assembly drives the pressing rod 144 to move along the extension direction of the outer cavity 2a, the connecting rod 145 makes the pressing rod 144 rotate around the output end of the connected driving assembly, so as to drive the roller 146 to abut against and press the outer door 11 or drive the roller 146 to move away from the outer door 11. By using the cooperation structure of the pressing rod 144 and the connecting rod 145, linear motion is converted into rotation of the pressing rod 144. In the case that the outer door 11 needs to be pressed and sealed, the pressing rod 144 can drive the roller 146 to rotate around the output end to the front of the outer door 11. Under the continuous rotation of the pressing rod 144, the roller 146 abuts against and presses the outer door 11 to realize the pressing and sealing of the outer door 11. When the outer door 11 is opened, the pressing rod 144 only needs to drive the roller 146 to reversely rotate around the output end to release the pressing and sealing, so that the roller 146 does not overlap with the outer door 11 in the extension direction of the outer cavity 2a. When the outer door 11 is opened along the extension direction of the outer cavity 2a, the second pressing module 14 does not interfere with the outer door 11.

[0056] In addition, by using the roller 146 rotationally connected to the pressing rod 144 to abut against and press the outer door 11, the roller 146 effectively avoids friction when contacting the outer door 11, so as to prevent damage to the outer door 11 when the outer door 11 is pressed and sealed.

[0057] The driving assembly can include a mounting seat 142 and a cylinder 141. The mounting seat 142 is fixedly connected to the outer side wall of the outer furnace body 2. The two ends of the connecting rod 145 are rotatably connected to the pressing rod 144 and the mounting seat 142, respectively. The cylinder 141 is detachably connected to the mounting seat 142. The cylinder 141 can drive the top rod 141a thereon to reciprocate along the extension direction of the outer cavity 2a. The top rod 141a is arranged on the side facing the furnace door assembly 1. The end of the top rod 141a is rotatably connected to the pressing rod 144 as an output end, so that when the cylinder 141 drives the top rod 141a to move along the extension direction of the outer cavity 2a, the pressing rod 144 can rotate around the output end under the driving of the connecting rod 145. It can be understood that the driving assembly can also be other structures that can realize reciprocating movement along the extension direction of the outer cavity 2a, which is not limited.

[0058] Optionally, the end of the pressing rod 144 and the top rod 141a can be rotatably connected through a first rotating shaft 143. The axis of the first rotating shaft 143 is perpendicular to the extension direction of the outer cavity 2a, and the axis of the first rotating shaft 143 is tangent to the circle enclosed by the outer furnace body 2. Similarly, the connecting rod 145 and the mounting seat 142, the connecting rod 145 and the pressing rod 144, and the pressing rod 144 and the roller 146 can also be rotatably connected through the first rotating shaft 143, which will not be described again.

[0059] It can be understood that when the furnace door assembly 1 blocks the inner furnace opening 31 and the outer furnace opening 21, the cylinder 141 can drive the top rod 141a to extend along the extension direction of the outer cavity 2a to drive the pressing rod 144 to rotate around the first rotating shaft 143, so that the projection of the roller 146 in the extension direction of the outer cavity 2a is located in the outer door 11, and the roller 146 is in abutment with the surface of the outer door 11 away from the inner door 12 in the continuous rotation of the pressing rod 144, so that the roller 146 presses the outer door 11. When the cylinder 141 drives the top rod 141a to retract along the extension direction of the outer cavity 2a, the roller 146 pressing the outer door 11 is reversely rotated around the first rotating shaft 143 under the driving of the pressing rod 144, so that the roller 146 is out of abutment with the outer door 11, and the roller 146 moves to the projection in the extension direction of the outer cavity 2a is located outside the outer door 11, so that the outer door 11 will not collide with the roller 146 in the process of moving along the extension direction of the outer cavity 2a to open the outer furnace opening 21.

[0060] It should be emphasized that the second pressing module 14 can also be other structures that can realize the pressing of the outer door 11, which is not limited.

[0061] Optionally, the second compression module 14 can be provided in plurality, and the plurality of second compression modules 14 are arranged at intervals around the periphery of the outer door 11. In the embodiment of the present disclosure, the plurality of second compression modules 14 are arranged evenly around the periphery of the outer furnace body 2. When the second compression module 14 compresses and seals the outer door 11, the force on the outer door 11 is more uniform, which is conducive to improving the compression and sealing effect and further avoiding damage to the outer door 11 by the second compression module 14 when compressing and sealing the outer door 11.

[0062] The embodiment of the present disclosure also provides a reaction furnace, which comprises a sleeved inner furnace body 3 and outer furnace body 2 and a furnace door assembly 1, the inner furnace body 3 has an inner cavity 3a and an inner furnace port 31; the outer furnace body 2 has an outer cavity 2a and an outer furnace port 21; and the furnace door assembly 1 is configured to open or block the inner furnace port 31 and the outer furnace port 21.

[0063] It can be understood that the furnace door assembly 1 can refer to the related description in the above embodiments, and will not be described again.

[0064] In the embodiments of the present disclosure, if not specifically limited, the form of connection can be bolt and nut, screw, buckle, magnetic attraction and the like for detachable connection. In some connections, if there is no special requirement for the form of detachable cooperation, the connection can be achieved by welding, bonding and the like for non-detachable connection.

[0065] The above describes the basic principles of the present disclosure in combination with specific embodiments, but it should be pointed out that the advantages, advantages, effects and the like mentioned in the present disclosure are only examples and not limitations, and these advantages, advantages, effects and the like cannot be considered as the must-have of the embodiments of the present disclosure. In addition, the above specific details are only for the purpose of example and for the purpose of understanding, and the above details do not limit the present disclosure to the above specific details.

[0066] The block diagram of the device, apparatus, equipment, system involved in the present disclosure is only an illustrative example and is not intended to require or imply that the connection, arrangement and configuration must be as shown in the block diagram. As those skilled in the art will recognize, these devices, apparatuses, equipment, systems can be connected, arranged and configured in any way. Words such as "include", "contain", "have" and the like are open-ended words, which mean "including but not limited to", and can be used interchangeably. The words "or" and "and" used herein mean the word "and / or", and can be used interchangeably unless the context clearly indicates otherwise. The word "such as" used herein means the phrase "such as but not limited to", and can be used interchangeably.

[0067] It should also be noted that in the devices, apparatuses and methods of the present disclosure, each component or each step can be decomposed and / or recombined. These decompositions and / or recombinations should be considered as equivalent solutions of the present disclosure.

[0068] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the disclosure. Various modifications to these aspects will be readily apparent to those skilled in the art, and the generic principles defined herein can be applied to other aspects without departing from the scope of the disclosure. Thus, the present disclosure is not intended to be limited to the aspects shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0069] The above description has been presented to enable any person skilled in the art to make or use the disclosure. Furthermore, the purpose of the above description is not intended to limit the embodiments of the present disclosure to the form disclosed herein. Although various example aspects and embodiments have been discussed above, those of ordinary skill in the art will appreciate a variety of modifications, alternatives, permutations, additions, and sub-combinations, which fall within the scope of the disclosed aspects.

Claims

1. A fire door assembly, characterized by, The application is applied to a reaction furnace, the reaction furnace comprises a sleeved inner furnace body and outer furnace body, the inner furnace body has an inner cavity and an inner furnace port, the outer furnace body has an outer cavity and an outer furnace port, and the furnace door assembly comprises: An outer door is arranged on a side facing the outer furnace port, and the outer door is configured to open or block the outer furnace port; An inner door is movably connected to a side of the outer door facing the outer furnace port, and the inner door is configured to open or block the inner furnace port; At least one first pressing module is connected between the inner door and the outer door, and the first pressing module is configured to press the inner door to the inner furnace body when the inner door blocks the inner furnace port; At least one second pressing module is connected to at least one of the outer furnace body and the outer door, and the second pressing module is configured to press the outer door to the outer furnace body when the outer door blocks the outer furnace port.

2. The fire door assembly of claim 1, wherein, The second pressing module comprises: A driving assembly is connected to the outer side wall of the outer furnace body; A pressing rod is rotatably connected to the output end of the driving assembly at one end, and the driving assembly can drive the pressing rod to move along the extension direction of the outer cavity; A roller is rotatably connected to the other end of the pressing rod; A connecting rod is rotatably connected to the pressing rod and the outer furnace body, respectively, and when the driving assembly drives the pressing rod to move along the extension direction of the outer cavity, the connecting rod makes the pressing rod rotate around the output end of the connected driving assembly to drive the roller to abut against the outer door and press the outer door or drive the roller away from the outer door.

3. The fire door assembly of claim 1, wherein, The first pressing module comprises: A fixed seat is arranged on a side of the outer door facing the outer furnace port; An adjusting block is movably connected to the fixed seat, and the adjusting block is connected to the inner door and can move along the extension direction of the outer cavity relative to the fixed seat; An elastic member connects the fixed seat and the adjusting block, and when the inner door blocks the inner cavity, the inner door drives the adjusting block to move the inner door towards the outer door, the elastic member is deformed under pressure, and the inner door abuts against the end face of the inner furnace port under the action of the elastic member.

4. The fire door assembly of claim 3, wherein, The fixed seat is provided with a through hole penetrating through the fixed seat along the extension direction of the outer cavity, the outer door is provided with a limiting groove in communication with the through hole, the elastic member is limited in the limiting groove, and the first pressing module further comprises: A bearing assembly is connected to the outer side wall of the adjusting block and the inner side wall of the through hole, respectively, and the bearing assembly is configured to make the adjusting block move along the extension direction of the outer cavity, and when the inner door is driven to move towards the outer door, the adjusting block can abut against the elastic member and make the elastic member compressively deform.

5. The fire door assembly of claim 3, wherein, Further comprising: A plurality of limiting members are dispersedly arranged between the outer door and the inner door, and there is a gap between the limiting members and the inner door, and when the inner door blocks the inner cavity, the inner door abuts against the limiting members.

6. The furnace door assembly according to claim 1, wherein The number of the first compression modules comprises a plurality of first compression modules, and the plurality of first compression modules are arranged at intervals around the periphery of the inner door; and / or, The number of the second compression modules comprises a plurality of second compression modules, and the plurality of second compression modules are arranged at intervals around the periphery of the outer door.

7. The fire door assembly of any one of claims 1-6, wherein, Further comprising: a base arranged on one side close to the outer furnace opening; a first driving module connected to the base; a second driving module slidingly connected to the first driving module, the first driving module being capable of driving the second driving module to move in a first direction, the first direction being perpendicular to the extension direction of the outer cavity, and the second driving module being connected to the outer door, the second driving module being capable of driving the outer door to move in the extension direction of the outer cavity.

8. The fire door assembly of claim 7, wherein, Further comprising: a base plate connected to the second driving module, the second driving module being capable of driving the base plate to move in the extension direction of the outer cavity; at least one support, one end of the support being fixedly connected to the base plate; a hinge assembly connected to the other end of the support, and the hinge assembly being connected to the side of the outer door away from the inner door.

9. The fire door assembly of any one of claims 1-6, wherein, At least one of the inner door and the outer door has a reflective layer on the surface of the side facing the outer furnace body; and / or, The side of the inner door away from the outer door is provided with a recess, and the bottom of the recess is provided with a plurality of uniformly distributed flow holes.

10. A reactor furnace characterized by, Comprising: an inner furnace body having an inner cavity and an inner furnace opening; an outer furnace body sleeved on the outer side of the inner furnace body, the outer furnace body having an outer cavity and an outer furnace opening; the furnace door assembly of any one of claims 1 to 9, configured to open or block the inner furnace opening and the outer furnace opening.

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