Sports table

Abstract

The utility model provides a motion platform. The motion platform comprises a motor mounting seat, a motor, a grating ruler seat, a decoupling structure, a grating ruler and a grating reading head, the length direction of the motor mounting base is the x direction, the width direction is the y direction, and the direction perpendicular to the xOy plane is the z direction. A stator of the motor is installed on the motor installation base and drives the rotor to linearly move in the x direction. The grating ruler base extends in the x direction and comprises a first installation part and a second installation part, the first installation part is fixed to the motor installation base, and the second installation part is connected with the motor installation base through a decoupling structure. The grating ruler is installed on the grating ruler base and extends in the x direction. The grating reading head is installed on the rotor and faces the grating ruler. And the decoupling structure has deformation or motion capability along the x direction. According to the motion platform, the influence of heat generated by motor operation on the positioning signal feedback device is effectively blocked through the decoupling structure, positioning errors caused by thermal drift are weakened, and the motion platform can still keep high-precision positioning in a temperature changing environment.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor manufacturing, and in particular, to a motion stage. BACKGROUND

[0002] In the field of semiconductor manufacturing, the precise transportation and positioning of silicon wafers are crucial for processing and testing. To achieve this goal, motion stage devices are widely used, which typically adopt an XY gantry structure, with the Y direction being the stepping axis and the X direction being the scanning axis. This structure plays a core role in the precise processing and testing of silicon wafers, ensuring high efficiency and high quality in the semiconductor manufacturing process.

[0003] In existing motion stage technology, the design of the X axis usually includes a motor mounting seat, a linear motor, and a signal feedback device (such as a grating ruler and a read head). There is a significant problem with this design: the linear motor generates heat during operation, causing the motor mounting seat to expand and contract due to thermal effects. This thermal expansion or contraction affects the readout of the read head in the X motion direction in the signal feedback device, affecting the positioning accuracy of the mover in the X direction. This parameter change caused by temperature changes is called thermal drift, which limits the performance and reliability of the motion stage device in the semiconductor manufacturing process. Therefore, the existing technology needs to be improved to reduce the impact of thermal drift on positioning accuracy. CONTENT OF THE UTILITY MODEL

[0004] The purpose of the present application is to provide a motion stage that effectively blocks the influence of heat generated by motor operation on the positioning signal feedback device through a decoupling structure, reduces the positioning error caused by thermal drift, and helps the motion stage to maintain high-precision positioning in a temperature-varying environment, improving the stability and reliability of the system.

[0005] The present application provides a motion stage, which includes a motor mounting seat, a motor, a grating ruler seat, a decoupling structure, a grating ruler, and a grating read head.

[0006] The length direction of the motor mounting seat is the x direction, its width direction is the y direction, and the direction perpendicular to the xOy plane is the z direction. The motor includes a stator and a mover, the stator is installed on the motor mounting seat, and the stator drives the mover to move linearly along the x direction. The grating ruler seat extends along the x direction and includes a first mounting part and a second mounting part, the first mounting part is fixed to the motor mounting seat, and the second mounting part is connected to the motor mounting seat through a decoupling structure. The grating ruler is installed on the grating ruler seat and extends along the x direction. The grating read head is installed on the mover and faces the grating ruler, and the grating read head is driven by the mover to move along the grating ruler. The decoupling structure has deformation or movement ability along the x direction.

[0007] In an embodiment, the decoupling structure comprises a first connecting part, a second connecting part and a flexible spring, the first connecting part and the second connecting part are connected by the flexible spring; the first connecting part is fixedly connected with the grating ruler seat, the second connecting part is connected with the motor mounting seat, and the flexible spring extends along the y direction and the z direction.

[0008] In an embodiment, the decoupling structure comprises a sliding rail and a sliding block; the sliding rail is mounted on the motor mounting seat and extends along the x direction, and the sliding block is fixedly connected with the grating ruler seat on one side and is slidingly mounted on the sliding rail on the other side.

[0009] In an embodiment, the decoupling structure comprises a center block, a first spring and a second spring; the center block is connected with the body of the motor mounting seat through the first spring and the second spring at both ends along the y direction; the first spring extends along the y direction and the z direction, the second spring extends along the y direction and the z direction, and the center block is fixedly connected with the grating ruler seat.

[0010] In an embodiment, a through slot matching the shape of the center block is arranged in the motor mounting seat, and the center block is arranged in the through slot; one end of the first spring extends into the body of the motor mounting seat, and the other end of the first spring extends into the center block; one end of the second spring extends into the body of the motor mounting seat, and the other end of the second spring extends into the center block.

[0011] In an embodiment, the decoupling structure is symmetrical along the x direction and the y direction.

[0012] In an embodiment, the motor mounting seat comprises a groove structure extending along the x direction, the stator is mounted in the groove structure, the grating ruler seat is mounted in the groove structure, the mover is provided with an extension extending into the groove structure, and the grating reader is mounted on the extension.

[0013] In an embodiment, the first mounting part and the second mounting part of the grating ruler seat are respectively at both ends along the length direction of the grating ruler seat.

[0014] In an embodiment, the grating ruler seat further comprises a third mounting part, the third mounting part and the second mounting part are respectively at both ends along the length direction of the grating ruler seat, the third mounting part is also connected with the motor mounting seat through a decoupling structure, and the first mounting part is between the third mounting part and the second mounting part.

[0015] In an embodiment, the motor mounting seat is provided with a guide rail extending along the x direction, and the mover is slidingly mounted on the guide rail along the x direction.

[0016] Compared with the prior art, the beneficial effects of the application at least include: in the motion table of the application, the core of the technical solution lies in the design of the grating ruler seat, which extends along the x direction and is composed of a first mounting part and a second mounting part, the first mounting part is fixed on the motor mounting seat, and the second mounting part is connected with the motor mounting seat through a decoupling structure. Since the decoupling structure has the ability of deformation or movement along the x direction, when the motor mounting seat expands or shrinks due to heat, the decoupling structure makes the grating ruler seat basically immune to the thermal expansion or shrinkage of the motor mounting seat, greatly reduces the degree of deformation of the grating ruler seat, that is, effectively blocks the influence of the heat generated by the operation of the motor on the positioning signal feedback device (grating ruler and grating reader), maintains the relative position between the grating ruler and the grating reader stable, helps the motion table to maintain high-precision positioning in a temperature-varying environment, reduces the positioning error caused by thermal drift, and improves the stability and reliability of the system. BRIEF DESCRIPTION OF DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the application, the drawings needed in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the application, and therefore should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0018] Figure 1 A side view of a motion table according to Embodiment 1 of the application is shown.

[0019] Figure 2 A top view of the motion table according to Embodiment 1 of the application is shown.

[0020] Figure 3 A Figure 1 enlarged view of part A in FIG. 4;

[0021] Figure 4 A Figure 3 perspective view of the decoupling structure in FIG. 5;

[0022] Figure 5 A Figure 4 side view of the decoupling structure in FIG. 5;

[0023] Figure 6 A Figure 2 cross-sectional view along A-A in FIG. 5;

[0024] Figure 7 A side view of a motion table according to Embodiment 2 of the application is shown.

[0025] Figure 8 A top view of the motion table according to Embodiment 2 of the application is shown.

[0026] Figure 9 for Figure 8 A sectional view along the middle edge BB;

[0027] Figure 10 for Figure 9 A magnified view of a section at point B in the middle;

[0028] Figure 11 This is a perspective view of the decoupling structure connection shown in Embodiment 2 of this application;

[0029] Figure 12 This is a top view of a motion table shown in Embodiment 3 of this application;

[0030] Figure 13 This is a side view of the motion table shown in Embodiment 3 of this application;

[0031] Figure 14 for Figure 12 A sectional view along the center CC;

[0032] Figure 15 This is a top view of the motor mounting base of the motion table shown in Embodiment 3 of this application;

[0033] Figure 16 for Figure 15 A magnified view of a section at point C;

[0034] Figure 17 This is a perspective view of the connection point of the decoupling structure shown in Embodiment 3 of this application;

[0035] Figure 18 This is a side view of a motion table shown in Embodiment 4 of this application;

[0036] Figure 19 for Figure 18 Top view of the motion table after partial sectioning along the middle DD;

[0037] Figure 20 for Figure 19 A sectional view along the middle of EE;

[0038] Figure 21 This is a top view of the motor mounting base of the motion table shown in Embodiment 4 of this application.

[0039] In the diagram: 1. Motor mounting base; 11. Slotted structure; 2. Stator; 3. Mover; 31. Extension; 4. Grating ruler base; 41. First mounting part; 42. Second mounting part; 43. Third mounting part; 5. Decoupling structure; 501. First connecting part; 502. Second connecting part; 503. Flexible spring; 511. Slide rail; 512. Slider; 521. Center block; 522. First spring; 523. Second spring; 524. Through slot; 6. Grating ruler; 7. Grating reader; 8. Guide rail; 9. Suction cup. Detailed Implementation

[0040] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0041] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0042] This application provides a motion stage, including a motor mounting base, a motor, a grating ruler base, a decoupling structure, a grating ruler, and a grating read head. The length direction of the motor mounting base is defined as the x-direction, its width direction as the y-direction, and the direction perpendicular to the xOy plane as the z-direction. The motor includes a stator and a mover. The stator is mounted on the motor mounting base and drives the mover to perform linear motion along the x-direction. The grating ruler base extends along the x-direction and includes a first mounting portion and a second mounting portion. The first mounting portion is fixed to the motor mounting base, and the second mounting portion is connected to the motor mounting base via a decoupling structure. The grating ruler is mounted on the grating ruler base and extends along the x-direction. The grating read head is mounted on the mover and faces the grating ruler. The grating read head is driven by the mover to move along the grating ruler. The decoupling structure has the capability of deformation or movement along the x-direction.

[0043] In the motion stage of this application, the core technical solution lies in the design of the grating ruler holder. This grating ruler holder extends along the x-direction and consists of a first mounting part and a second mounting part. The first mounting part is fixed to the motor mounting base, while the second mounting part is connected to the motor mounting base via a decoupling structure. Because the decoupling structure has the capability to deform or move along the x-direction, when the motor mounting base experiences thermal expansion or contraction, the decoupling structure essentially protects the grating ruler holder from the effects of thermal expansion or contraction, greatly reducing the degree of deformation of the grating ruler holder. This maintains the relative positional stability between the grating ruler and the grating read head, ensuring that the reading of the grating read head in the x-direction is not disturbed by thermal drift, thereby ensuring that the positioning accuracy of the mover in the x-direction remains unaffected.

[0044] In summary, the grating ruler seat is connected with the motor mounting seat through the decoupling structure, which effectively blocks the influence of the heat generated by the motor operation on the positioning signal feedback device (grating ruler and grating reader), helps the motion table to maintain high-precision positioning in a temperature-varying environment, reduces the positioning error caused by thermal drift, and improves the stability and reliability of the system.

[0045] When the motion table of the application is applied in the field of semiconductor manufacturing, the grating ruler seat is connected with the motor mounting seat through the decoupling structure, which improves the performance of the motion table in high-precision applications such as semiconductor manufacturing, enhances its adaptability and reliability in various environmental conditions, and has important significance for improving the technical level of the precision engineering field such as semiconductor manufacturing.

[0046] In order to describe the structure and working principle of the motion device of the application in more detail, the following embodiments are provided. It should be noted that the technical features and technical solutions in each embodiment can be combined with each other without conflict.

[0047] Embodiment one

[0048] As shown in Figures 1 to 6 , the application provides a motion table, which includes a motor mounting seat 1, a motor, a grating ruler seat 4, a decoupling structure 5, a grating ruler 6 and a grating reader 7.

[0049] The length direction of the motor mounting seat 1 is the x direction, the width direction of the motor mounting seat 1 is the y direction, and the direction perpendicular to the xOy plane is the z direction. The motor includes a stator 2 and a rotor 3, the stator 2 is installed on the motor mounting seat 1, and the stator 2 drives the rotor 3 to move linearly along the x direction. The grating ruler seat 4 extends along the x direction and includes a first mounting part 41 and a second mounting part 42, the first mounting part 41 is fixed to the motor mounting seat 1 (i.e. the first mounting part 41 is rigidly connected with the motor mounting seat 1), and the second mounting part 42 is connected with the motor mounting seat 1 through a decoupling structure 5. The grating ruler 6 is installed on the grating ruler seat 4 and extends along the x direction, and the grating reader 7 is installed on the rotor 3 and faces the grating ruler 6, the grating reader 7 is driven by the rotor 3 to move along the grating ruler 6.

[0050] Among them, the decoupling structure 5 of the embodiment has the deformation ability along the x direction, that is, the decoupling structure 5 has flexibility along the x direction, and remains rigid in other directions.

[0051] Specifically, in the embodiment, as shown in Figure 3 , Figure 4 and Figure 5As shown, the decoupling structure 5 includes a first connecting part 501, a second connecting part 502, and a flexible spring 503, and the first connecting part 501 is connected with the second connecting part 502 through the flexible spring 503. The first connecting part 501 is fixedly connected with the grating ruler seat 4, the second connecting part 502 is connected with the motor mounting seat 1, and the flexible spring 503 extends along the y direction and the z direction.

[0052] In the mounted decoupling structure 5, the flexible spring 503 extends along the y direction and the z direction, and the flexible spring 503 of the sheet structure has the deformation ability along the x direction. When the motor mounting seat 1 appears thermal expansion or shrinkage, the second connecting part 502 will be caused to produce displacement along the x direction. Since the flexible spring 503 has the deformation ability along the x direction, the first connecting part 501 will not move with the movement of the second connecting part 502 within a certain x direction range, that is, the decoupling structure 5 makes the grating ruler seat 4 basically not affected by the thermal expansion or shrinkage of the motor mounting seat 1, greatly reduces the deformation of the grating ruler seat 4, keeps the relative position between the grating ruler 6 and the grating reader 7 stable, ensures that the reading of the grating reader 7 in the x movement direction is not affected by thermal drift, and further ensures that the positioning accuracy of the mover in the x direction movement is not disturbed.

[0053] In the embodiment, as shown in Figure 1 , Figure 2 and Figure 6 , a guide rail 8 extending along the x direction can be mounted on the motor mounting seat 1, and the mover 3 is mounted on the guide rail 8 in a slidable manner along the x direction. The guide rail 8 forms a guide effect on the mover 3, which helps to keep the movement state of the mover 3 stable.

[0054] In the embodiment, as shown in Figure 1 and Figure 2 , the first mounting part 41 and the second mounting part 42 of the grating ruler seat 4 can be respectively at two ends of the length direction of the grating ruler seat 4.

[0055] In the embodiment, as shown in Figure 1 and Figure 2 , a chuck 9 for carrying objects can be mounted on the mover 3, and the chuck 9 can be an electrostatic chuck or a vacuum chuck.

[0056] In the embodiment, the grating ruler seat 4 can generally be a material with a low thermal expansion coefficient, such as SiC.

[0057] Embodiment Two

[0058] As shown in Figures 7 to 11 , the application provides a motion stage, which is different from the embodiment one in that the decoupling structure 5 of the embodiment adopts a slide rail and slide block cooperation structure.

[0059] Specifically, as shown in Figure 9 ,Figure 10 and Figure 11 As shown in

[0060] In the event of thermal expansion or contraction of the motor mount 1, the slide rail 511 will be displaced in the x direction. Since the slide block 512 can slide relative to the slide rail 511, the end of the grating scale holder 4 connected to the slide block 512 will not move with the slide rail 511, i.e. the grating scale holder 4 is immune to the thermal expansion or contraction of the motor mount 1, substantially eliminating the deformation of the grating scale holder 4, maintaining the relative position between the grating scale 6 and the grating reader 7 stable, ensuring that the reading of the grating reader 7 in the x direction of movement is not affected by thermal drift, and further ensuring that the positioning accuracy of the mover in the x direction of movement is not disturbed.

[0061] Embodiment Three

[0062] As shown in Figures 12 to 17 The application provides a motion stage. Unlike the first and second embodiments, the decoupling structure 5 of the present embodiment can be directly integrated in the motor mount 1.

[0063] Specifically, as shown in Figure 15 , Figure 16 and Figure 17 The decoupling structure 5 of the present embodiment includes a center block 521, a first spring sheet 522 and a second spring sheet 523, which are directly machined in the motor mount 1. The center block 521 is connected to the body of the motor mount 1 through the first spring sheet 522 and the second spring sheet 523 at both ends in the y direction. The first spring sheet 522 extends in the y direction and the z direction, the second spring sheet 523 extends in the y direction and the z direction, and the center block 521 is fixedly connected to the grating scale holder 4.

[0064] In the event of thermal expansion or contraction of the motor mount 1, since the first spring sheet 522 and the second spring sheet 523 both have the ability to deform in the x direction, the influence of the thermal expansion or contraction of the motor mount 1 on the grating scale holder 4 is weakened, the deformation of the grating scale holder 4 is reduced, the relative position between the grating scale 6 and the grating reader 7 is maintained stable, the reading of the grating reader 7 in the x direction of movement is ensured not to be affected by thermal drift, and further the positioning accuracy of the mover in the x direction of movement is ensured not to be disturbed.

[0065] In the present embodiment, as shown in Figure 16As shown, the decoupling structure 5 of the embodiment can be formed by subtractive machining on the motor mount 1. Specifically, a through slot 524 matching the shape of the center block 521 is machined in the motor mount 1, and then the structure of the center block 521 is formed. The center block 521 is placed in the through slot 524, and the gap between the through slot 524 and the center block 521 provides space for the variation of the center block 521 along the x direction. Meanwhile, further, the two sides of the first spring 522 and the second spring 523 can also be machined with a through slot 524 structure, so that the first spring 522 and the second spring 523 have sufficient deformation space.

[0066] In order to make the first spring 522 and the second spring 523 have better deformation ability, one end of the first spring 522 extends into the body of the motor mount 1, and the other end of the first spring 522 extends into the center block 521; one end of the second spring 523 extends into the body of the motor mount 1, and the other end of the second spring 523 extends into the center block 521.

[0067] As shown, Figure 17 Since the decoupling structure 5 of the embodiment is integrated in the motor mount 1, the surface of the center block 521 of the decoupling structure 5 does not exceed the surface of the motor mount 1, so the decoupling structure 5 occupies small space and has compact structure.

[0068] In the embodiment, as shown, Figure 16 The decoupling structure 5 has a symmetrical structure along the x direction and along the y direction, which ensures that the deformation amounts of the first spring 522 and the second spring 523 along the x direction are consistent when the motor mount 1 expands or shrinks, so as to prevent the grating ruler seat 4 from being deflected along the y direction, thereby ensuring that the relative position of the grating reader 7 and the grating ruler 6 remains stable.

[0069] In the embodiment, as shown, Figure 14 The motor mount 1 can include a slot structure 11 extending along the x direction, the stator 2 is installed in the slot structure 11, the grating ruler seat 4 is installed in the slot structure 11, the mover 3 is provided with an extension 31 extending into the slot structure 11, and the grating reader 7 is installed on the extension 31. Meanwhile, the center block 521 of the decoupling structure 5 and the mounting surface of the grating ruler seat 4 are also in the slot structure 11. The design here makes the grating ruler seat 4, the grating ruler 6 and the grating reader 7 all included in the motor mount 1, which not only solves the influence of thermal drift on positioning accuracy, but also makes the overall structure of the motion stage more compact, occupies less space, and expands the applicable scenarios of the motion stage.

[0070] In the embodiment, as shown, Figure 12 The first mounting portion 41 and the second mounting portion 42 of the grating ruler seat 4 are respectively at the two ends of the grating ruler seat 4 in the length direction.

[0071] Embodiment Four

[0072] As Figures 18 to 21 shown, the application provides a motion stage, different from embodiment three, the grating ruler seat 4 of the present embodiment further comprises a third mounting portion 43.

[0073] Specifically, as Figure 19 and Figure 21 shown, the grating ruler seat 4 comprises a first mounting portion 41, a second mounting portion 42 and a third mounting portion 43. The third mounting portion 43 and the second mounting portion 42 are respectively at both ends of the length direction of the grating ruler seat 4, the second mounting portion 42 and the third mounting portion 43 are respectively connected with the motor mounting seat 1 through a decoupling structure 5, and the first mounting portion 41 is between the third mounting portion 43 and the second mounting portion 42, and the first mounting portion 41 is fixedly connected with the motor mounting seat 1.

[0074] When the motor mounting seat 1 is deformed by thermal expansion or contraction, the decoupling structure 5 connected on both sides of the grating ruler seat 4 can absorb the deformation of the grating ruler seat x direction. Because the first mounting portion 41 is at the central position of the grating ruler seat 4 (that is, the fixed part of rigid connection is at the middle position), compared with embodiment three, in the structure of the present embodiment, the closer to the central position of the grating ruler seat 4 has higher positioning accuracy, and the influence of thermal drift is significantly improved.

[0075] It should be noted that the connection relationship between the first mounting portion 41, the second mounting portion 42 and the third mounting portion 43 of the grating ruler seat 4 and the motor mounting seat 1 in the present embodiment four is not limited to the structure of the motor mounting seat 1 in embodiment three, and is also applicable to different structures of the motor mounting seat 1 in embodiment 1, embodiment 2 or other embodiments.

[0076] The above only describes some embodiments of the present application and is not intended to limit the present application. Those skilled in the art can make various changes and modifications to the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A motion table, characterized in that, include: The motor mounting base (1) has its length direction as the x direction, its width direction as the y direction, and the direction perpendicular to the xOy plane as the z direction; The motor includes a stator (2) and a mover (3), the stator (2) is mounted on the motor mounting base (1), and the stator (2) drives the mover (3) to perform linear motion along the x direction; The grating ruler base (4) extends along the x-direction and includes a first mounting part (41) and a second mounting part (42). The first mounting part (41) is fixed to the motor mounting base (1), and the second mounting part (42) is connected to the motor mounting base (1) through a decoupling structure (5). A grating ruler (6) is mounted on the grating ruler base (4) and extends along the x-direction; A grating reading head (7) is mounted on the mover (3) and faces the grating ruler (6). The grating reading head (7) is driven by the mover (3) to move along the grating ruler (6). The decoupling structure (5) has the ability to deform or move along the x-direction.

2. The motion table according to claim 1, characterized in that, The decoupling structure (5) includes a first connecting part (501), a second connecting part (502), and a flexible spring (503), wherein the first connecting part (501) and the second connecting part (502) are connected by the flexible spring (503); The first connecting part (501) is fixedly connected to the grating ruler base (4), the second connecting part (502) is connected to the motor mounting base (1), and the flexible spring (503) extends along the y and z directions.

3. The motion table according to claim 1, characterized in that, The decoupling structure (5) includes a slide rail (511) and a slider (512); The slide rail (511) is mounted on the motor mounting base (1) and extends in the x direction. One side of the slider (512) is fixedly connected to the grating ruler base (4), and the other side of the slider (512) is slidably mounted on the slide rail (511).

4. The motion table according to claim 1, characterized in that, The decoupling structure (5) includes a central block (521), a first reed (522), and a second reed (523); The two ends of the central block (521) along the y direction are connected to the body of the motor mounting base (1) through the first spring (522) and the second spring (523) respectively; The first reed (522) extends along the y and z directions, the second reed (523) extends along the y and z directions, and the center block (521) is fixedly connected to the grating ruler base (4).

5. The motion table according to claim 4, characterized in that, The motor mounting base (1) is provided with a through groove (524) that matches the shape of the center block (521), and the center block (521) is placed in the through groove (524); One end of the first spring (522) extends into the body of the motor mounting base (1), and the other end of the first spring (522) extends into the center block (521); One end of the second reed (523) extends into the body of the motor mounting base (1), and the other end of the second reed (523) extends into the center block (521).

6. The motion table according to claim 4, characterized in that, The decoupling structure (5) is symmetrical along both the x and y directions.

7. The motion table according to any one of claims 1 and 4-6, characterized in that, The motor mounting base (1) includes a slotted structure (11) extending along the x-direction, the stator (2) is installed in the slotted structure (11), the grating ruler base (4) is installed in the slotted structure (11), the mover (3) is equipped with an extension (31) extending into the slotted structure (11), and the grating reading head (7) is installed on the extension (31).

8. The motion table according to any one of claims 1-6, characterized in that, The first mounting portion (41) and the second mounting portion (42) of the grating ruler (4) are respectively located at both ends of the length direction of the grating ruler (4).

9. The motion table according to any one of claims 1-6, characterized in that, The grating ruler base (4) also includes a third mounting part (43), the third mounting part (43) and the second mounting part (42) are respectively located at both ends of the length direction of the grating ruler base (4), and the third mounting part (43) is also connected to the motor mounting base (1) through a decoupling structure (5); The first mounting part (41) is located between the third mounting part (43) and the second mounting part (42).

10. The motion table according to any one of claims 1-6, characterized in that, The motor mounting base (1) is equipped with a guide rail (8) extending in the x direction, and the mover (3) is mounted on the guide rail (8) in a manner that allows it to slide in the x direction.

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