Dark field optical flaw detection device
The dark-field optical defect detection device utilizes an adjustable light source, shielding components, and optical lens components to form a dark-light field of view, overcoming the shortcomings of existing technologies in detecting minute defects and defects in the direction of movement of film materials, and achieving efficient and accurate defect detection.
Patent Information
- Application Number
- CN202423028985.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-09
- Publication Date
- 2025-11-25
- Estimated Expiration
- 2034-12-09
AI Technical Summary
Existing technologies cannot effectively detect minute defects on membrane materials or defects in the direction of membrane material movement. Furthermore, they suffer from low detection efficiency and insufficient accuracy, failing to meet the diverse needs of membrane material testing.
The dark field optical defect detection device includes an illumination source, a blocking component, an optical lens component, and a camera component. The adjustable light source component independently emits light beams, and the design of the blocking component and optical lens component forms a dark field of view, which improves the richness of the light beam and the imaging effect. The camera component acquires the image to be detected.
It improves the accuracy of defect detection on thin films, especially the detection of defects in the direction of film movement, thus improving detection efficiency and precision.
Smart Images
Figure CN223597538U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to detection technical field especially relates to a dark field optical flaw detection device. BACKGROUND
[0002] In recent years, due to the film material in the production or transmission process, will cause various flaws to film material, serious damage to film material, these flaws will cause raw material waste, if the flaw product flows into the market after the quality problem caused by the film material manufacturer may cause serious credibility problem. Need to detect the flaw on the film material, currently utilize traditional lighting lighting scheme to carry out flaw detection, but for subtle flaw and film material moving direction flaw still cannot be accurately detected, there is the problem of low detection efficiency, and the limitation of flaw detection, cannot satisfy the demand of film material detection precision and diversity flaw detection. SUMMARY
[0003] The utility model provides a dark field optical flaw detection device to solve the problem of subtle flaw and film material moving direction flaw detection, and low detection efficiency and low precision.
[0004] According to one aspect of the utility model, a kind of dark field optical flaw detection device is provided, it include: illumination light source equipment, shielding component, optical lens component and camera component, wherein, illumination light source equipment, including multiple adjustable light source components, each adjustable light source component independently emits light beam;Shielding component is set to the top of illumination light source equipment, and the distance between shielding component and illumination light source equipment satisfies first distance;Shielding component shields part adjustable light source component in illumination light source equipment, and shielding component includes light transmission area and non-light transmission area;Optical lens component is set to the top of shielding component, and is set to the below of the film to be detected;Camera component is set to the top of the film to be detected, obtains the detected image corresponding to the film to be detected.
[0005] Optionally, each adjustable light source component is a codeable segmented light source component, and the codeable segmented light source component includes multiple adjustable lamp beads, the angle and brightness of the light beam emitted by each adjustable lamp bead are adjustable.
[0006] Optionally, the multiple adjustable light source components include a first adjustable light source component, and the first adjustable light source component is located in the central region of the illumination light source equipment;The shielding component is located above the first adjustable light source component and shields the light beam emitted by the first adjustable light source component.
[0007] Optionally, the first adjustable light source component in the illumination light source equipment, the shielding component, the optical lens component and the camera component are located on the same central axis.
[0008] Optionally, the plurality of adjustable light source components further comprises a second adjustable light source component and a third adjustable light source component, and the second adjustable light source component and the third adjustable light source component are respectively distributed on two sides of the first adjustable light source component.
[0009] Optionally, the device further comprises a condenser lens arranged above the second adjustable light source component and the third adjustable light source component respectively.
[0010] Optionally, a second distance is satisfied between the optical lens component and the shielding component, a third distance is satisfied between the optical lens component and the to-be-detected film, and a fourth distance is satisfied between the camera component and the to-be-detected film.
[0011] Optionally, the corresponding curvatures of the incident surface and the exit surface of the optical lens component satisfy a preset curvature threshold, and an angle between the light ray cluster emitted by the optical lens component and a normal plane corresponding to the to-be-detected film is less than a preset angle.
[0012] Optionally, the optical lens component comprises a first lens and a second lens, and the first lens and the second lens are both plano-convex lenses, the convex surfaces of the first lens and the second lens face inward, and the planes of the first lens and the second lens face outward and serve as the light beam incident surface and the light beam exit surface of the optical lens component respectively.
[0013] Optionally, a camera scanning line of the camera component is perpendicular to the moving direction of the to-be-detected film.
[0014] The technical scheme of the embodiment of the utility model provides a kind of dark field optical flaw detection device, dark field optical flaw detection device includes: illumination light source equipment, including a plurality of adjustable light source components, and each adjustable light source component independently emits light beam;Shielding component is arranged in the upper of illumination light source equipment, and the distance between shielding component and illumination light source equipment satisfies first distance;Shielding component shields part adjustable light source component in illumination light source equipment, and shielding component includes light transmission area and non-light transmission area;Optical lens component is arranged in the upper of shielding component, and is arranged below to-be-detected film;Camera component is arranged in the upper of to-be-detected film, obtains the to-be-detected image corresponding to to-be-detected film.The device of the utility model can provide multiple light beams, for detecting different types of flaws, improve the accuracy of detecting flaws on film, especially the detection effect of flaw in the moving direction of film is more remarkable.
[0015] It should be understood that the content described in this part is not intended to identify the key or important features of the embodiments of the utility model, and is not used to limit the scope of the utility model. Other features of the utility model will become easy to understand through the following description. BRIEF DESCRIPTION OF DRAWINGS
[0016] In order to more clearly illustrate the technical scheme in the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiment description, obviously, the drawings described in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.
[0017] Figure 1 is a structural schematic diagram of a dark-field optical flaw detection device provided by the embodiments of the present application;
[0018] Figure 2 is a side structural schematic diagram of a dark-field optical flaw detection device provided by the embodiments of the present application;
[0019] Figure 3 is a structural schematic diagram of a shielding component provided by the embodiments of the present application;
[0020] Figure 4 is a structural schematic diagram of a dark-field optical flaw detection device provided by the embodiments of the present application;
[0021] Figure 5 is a structural schematic diagram of a shielding component provided by the embodiments of the present application;
[0022] Figure 6 is a structural schematic diagram of a lighting source device provided by the embodiments of the present application;
[0023] Figure 7 is a schematic diagram of an optical lens component provided by the embodiments of the present application;
[0024] Figure 8 is a schematic diagram of a curved surface of an optical lens component provided by the embodiments of the present application;
[0025] Figure 9 is a schematic diagram of a light refraction principle of an optical lens component provided by the embodiments of the present application. DETAILED DESCRIPTION
[0026] In order to make the person skilled in the art better understand the present application scheme, the following will combine the drawings in the embodiments of the present application to clearly and completely describe the technical scheme in the embodiments of the present application, obviously, the described embodiments are only some embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor should belong to the scope of protection of the present application.
[0027] It should be noted that the terms "first", "second", and the like in the description and in the claims of the utility model and the above-mentioned drawings are used to distinguish similar objects, and do not have to be used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged under appropriate circumstances, so that the embodiments of the utility model described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "include" and "have" and any variations thereof are intended to cover non-exclusive inclusion, for example, a device, system, product or equipment including a series of units does not have to be limited to those units clearly listed, but can include other units not clearly listed or inherent to these devices, products or equipment.
[0028] Figure 1 It is a kind of structure schematic diagram of the dark field optical flaw detection device provided by the utility model, structure schematic diagram is the front view of dark field optical flaw detection device, the dark field optical flaw detection device includes: illumination light source equipment 7, shielding component 9, optical lens component 8 and camera component 1, wherein, illumination light source equipment 7, including multiple adjustable light source components, and each adjustable light source component independently emits light beam;Shielding component 9 is arranged above illumination light source equipment 7, and the distance between shielding component 9 and illumination light source equipment 7 satisfies first distance, first distance is as shown in Figure 1 Shielding component 9 shields part adjustable light source component in illumination light source equipment 7, shielding component 9 includes light-transmitting area and non-light-transmitting area;Optical lens component 8 is arranged above shielding component 9 and below the film to be detected 3;Camera component 1 is arranged above the film to be detected 3, obtains the corresponding image to be detected of the film to be detected 3.
[0029] Wherein, for the convenience of understanding, reference is made to the simple side view of the dark field optical flaw detection device as shown in Figure 2 The moving direction of the film to be detected 3 is x-axis direction, the scanning line direction of camera component 1 is y-axis direction, the light source exit upper side of illumination light source equipment 7 is z-axis, the light ray area 6 generated by the light source emitted by illumination light source equipment 7 is the dark light field of view 90 in the front view as shown in Figure 4 The area between two edge light rays 17 and 18 emitted by first adjustable light source component, the installation position of camera component 1 can be adjusted according to actual demand inclination angle, Figure 2 The position 5 in the above-mentioned is an example of a kind of flaw consistent with the moving direction of the film to be detected 3.
[0030] The lighting light source device 7 is a device with a light beam emitting function, which can be an industrial lighting light source, including a plurality of adjustable light source parts, which are obtained by sequentially splicing to obtain the lighting light source device 7. There can be a certain gap between each adjustable light source part, or they can be tightly connected and freely placed according to actual conditions. Each adjustable light source part can independently emit a light beam. In the specific application process, each adjustable light source part in the lighting light source device 7 can receive light source adjustment information and independently emit a corresponding light beam according to the corresponding light source adjustment information, so that the lighting light source device 7 can automatically adjust according to the actual detection requirements to improve the richness of the emitted light beam, thereby meeting the requirements of different defect detection.
[0031] The shielding part 9 is a part for shielding the light beam, which is arranged above the lighting light source device 7, i.e. above the light emitting surface of the lighting light source device 7. The distance between the shielding part 9 and the lighting light source device 7 satisfies the first distance, such as Figure 1 The first distance 10 in the figure can be adjusted according to the actual light shielding requirements. By shielding part 9 shielding part of the adjustable light source part in the lighting light source device 7, a certain range of dark light field is formed above the shielding part 9. The light beam emitted by the part of the adjustable light source part not shielded by the shielding part 9 can enter the dark light field 90, which is equivalent to lighting the dark light field 90. The shielding part 9 is not a whole piece of opaque material, but is spliced from two materials with different light transmittance, such as Figure 3 The light transmittance material corresponds to the light transmittance area 902 and the opaque area 901. In this way, the to-be-detected film 3 with concave-convex defects will present obvious "bright part" and "dark part" on the imaging image. The to-be-detected film 3 is in a state of motion, and each defect on the to-be-detected film 3 has undergone a scanning process, so that the defect imaging is more three-dimensional, and the gray difference presented on the imaging image has a concave-convex feeling, which can be obviously distinguished from the imaging image of the dust-like defect, which helps to quickly detect whether it is a concave-convex defect or a dust-like defect.
[0032] The optical lens part 8 is arranged above the shielding part 9, and the lower surface of the optical lens part 8 can receive the light beam not shielded by the shielding part 9, such as Figure 4The light beams 17 and 18 emitted by the light beads 19a and 19b in the illumination light source device 7 in the schematic diagram of the dark field optical flaw detection device shown in the figure cannot pass through the light shielding component 9. The light beams 26 and 27 emitted by the light bead 20 and the light beams 24 and 25 emitted by the light bead 21 in the illumination light source device 7 pass through the optical lens component 8, and the emergent light rays are 29, 28, 31 and 30, respectively, which are finally converged to points 22 and 23. The light ray emergent surface of the optical lens component 8 emits light rays at a rich angle. The optical lens component 8 can be composed of one lens or multiple lenses. For example, the optical lens component 8 is composed of two plano-convex lenses as shown in the figure. Figure 1 or Figure 4 .
[0033] The light ray clusters emitted from the light ray emergent surface of the optical lens component 8 to the to-be-detected film 3 are used to light the to-be-detected film 3, that is, to light the dark light area on the to-be-detected film 3, and then participate in the imaging of the light in the scanning line range of the camera component 1 on the to-be-detected film 3. The dark light area is formed on the to-be-detected film 3 by the dark light field of view 90.
[0034] The camera component 1 is arranged above the to-be-detected film 3 and is composed of a camera and a matching lens. The camera can be a line array camera or a plane array camera. The camera component 1 can define a camera scanning area on the to-be-detected film 3. The length of the camera scanning area of the camera component 1 in the x-axis direction can not be limited according to the parameters of the camera component 1. The length of the camera scanning area of the camera component 1 in the y-axis direction needs to be greater than the length of the to-be-detected film 3 in the y-axis direction, that is, the camera scanning area of the camera component 1 should completely cover the to-be-detected film 3 in the y-axis direction. For example, as shown in the figure, Figure 2 If the camera scanning area of the camera component 1 does not completely cover the to-be-detected film 3 in the y-axis direction, the coverage range of the camera scanning area of the camera component 1 in the y-axis direction can be expanded by adding the camera component 1 to ensure that the camera component 1 can obtain the complete to-be-detected image corresponding to the to-be-detected film 3. The distance between the camera component 1 and the to-be-detected film 3 can also be adjusted to ensure that the camera component 1 can obtain the complete to-be-detected image corresponding to the to-be-detected film 3, that is, the coverage range of the camera scanning area of the camera component 1 in the y-axis direction needs to completely cover the to-be-detected film 3. In the case that the to-be-detected film 3 is flawless, the light rays passing through the to-be-detected film 3 will not enter the camera component 1, but will be converged to Figure 4The points 22 and 23 shown in the middle are not present in the detected image. In the case that the to-be-detected film 3 has a defect, the light passing through the to-be-detected film 3 will be strongly refracted or diffusely reflected at the defect into the camera component 1, thereby presenting a high gray scale on the imaged image, so that the complete to-be-detected image of the to-be-detected film 3 acquired by the camera component 1 is identified and classified to realize detection of different defects.
[0035] Optionally, each adjustable light source component is a codeable segmented light source component, and the codeable segmented light source component includes a plurality of adjustable lamp beads, and the angle and brightness of the light beam emitted by each adjustable lamp bead are adjustable.
[0036] In this embodiment, the codeable segmented light source component is an adjustable component that can be automatically adjusted, and the codeable segmented light source component includes a plurality of adjustable lamp beads. Each adjustable lamp bead can emit a light beam with a corresponding angle or a corresponding brightness according to different control signals, so that each codeable segmented light source component can emit a plurality of light beams with different angles and different brightnesses. In the case of starting the defect detection of the to-be-detected film 3, the adjustable light source component independently emits a light beam according to an adjustment instruction. The light beam emitted by the adjustable light source component provides rich lighting angles on the to-be-detected film 3 under the action of the optical lens component 8. When the to-be-detected film 3 has a defect, the light clusters will have a strong refraction or diffuse reflection phenomenon, so that the light enters the photographic system, thereby strongly changing the gray scale of the image formation, and the contrast of the defect imaging is high. The adjustable light source component adopts the codeable segmented light source component, can realize automatic uniform dimming, and makes the lighting and imaging effect of the defect at any position in the camera field of view basically consistent, thereby improving the stability of the visual detection system and reducing the missed detection rate of the visual detection system.
[0037] Optionally, the plurality of adjustable light source components include a first adjustable light source component 702, and the first adjustable light source component 702 is located in the central region of the illumination light source device 7. The shielding component 9 is located above the first adjustable light source component 702 and shields the light beam emitted by the first adjustable light source component 702.
[0038] In this embodiment, as Figure 5As shown in the schematic diagram of the lighting source component, the schematic diagram is a front view, the first adjustable light source component 702 refers to the adjustable light source component located in the central region of the lighting source device 7, arranged above the shielding component 9, in the process of detection by the detection device, the first adjustable light source component 702 emits a light beam, and the light shielding component above the first adjustable light source component 702 shields all the emitted light beams, so that the distance between the shielding component 9 and the adjustable light source component can be adjusted, or the range of the light beam emitted by the first adjustable light source component 702 can be adjusted, so that the shielding component 9 can shield all the light beams emitted by the first adjustable light source component 702, and the size of the corresponding dark light field of view of the optical lens component 8 is adjusted at the same time.
[0039] Optionally, the plurality of adjustable light source components further include a second adjustable light source component 701 and a third adjustable light source component 703, and the second adjustable light source component 701 and the third adjustable light source component 703 are respectively distributed on both sides of the first adjustable light source component 702.
[0040] In the embodiment, as shown in the schematic diagram of the lighting source component, the schematic diagram is a front view, the first adjustable light source component 702 refers to the adjustable light source component located in the central region of the lighting source device 7, arranged above the shielding component 9, in the process of detection by the detection device, the first adjustable light source component 702 emits a light beam, and the light shielding component above the first adjustable light source component 702 shields all the emitted light beams, so that the distance between the shielding component 9 and the adjustable light source component can be adjusted, or the range of the light beam emitted by the first adjustable light source component 702 can be adjusted, so that the shielding component 9 can shield all the light beams emitted by the first adjustable light source component 702, and the size of the corresponding dark light field of view of the optical lens component 8 is adjusted at the same time. Figure 5
[0041] Optionally, the first adjustable light source component 702, the shielding component 9, the optical lens component 8 and the camera component 1 in the lighting source device 7 are located on the same central axis.
[0042] In the embodiment, the first adjustable light source component 702, the shielding component 9, the optical lens component 8 and the camera component 1 in the lighting source device 7 are arranged on the same central axis 100, as shown in the central axis 100 in the schematic diagram of the lighting source component, so that the overall illumination distribution in the scanning field of view of the camera component 1 on the film to be detected 3 remains consistent. Figure 4
[0043] Optionally, the device further includes a condenser lens arranged above the second adjustable light source component 701 and the third adjustable light source component 703, respectively.
[0044] In this embodiment, the brightness of the light area generated by the light beams emitted by the second adjustable light source component 701 and the third adjustable light source component 703 generally shows a decreasing trend from the center to the edge of the light area. One or more focusing lenses can be respectively disposed above the second adjustable light source component 701 and the third adjustable light source component 703 to focus the light beams emitted by the second adjustable light source component 701 and the third adjustable light source component 703, such as... Figure 6 The lighting source device 7 shown has a condenser lens 704 disposed above a second adjustable light source component 701 and a condenser lens 705 disposed above a third adjustable light source component 703. The condenser lenses can improve the luminous efficacy of the light beam emitted by the adjustable light source components at corresponding positions, thereby enhancing the lighting effect in low-light fields. It should be noted that if the lengths of the second and third adjustable light source components 701 and 703 are longer than the length of a single condenser lens, multiple condenser lenses can be used.
[0045] Optionally, a second distance 14 is satisfied between the optical lens component 8 and the illumination source device 7, a third distance 12 is satisfied between the detection plane and the optical lens component 8, and a fourth distance 11 is satisfied between the camera component 1 and the film to be detected 3.
[0046] In this embodiment, the first distance, second distance, third distance, and fourth distance represent the distances between different components in the detection device, and can be set according to actual conditions. Figure 4 The diagram shows a detailed schematic of a dark-field optical defect detection device. The field-of-view edges 15 and 16 of the camera component 1 are adjacent to the upper surface of the optical lens component 8. The distance between the two adjacent points is the effective working length D of the optical lens. The working distance of the camera component 1 is set as the fourth distance 11, denoted as H. The distance between the optical lens component 8 and the film 3 to be detected is set as the third distance 12, denoted as h. The size of the corresponding field of view 2 provided by the camera component 1 is considered as the FOV. The effective length of the optical lens component 8 then follows this relationship:
[0047] D≥FOV*(H+h) / H;
[0048] According to optical principles, after the edge rays 15 and 16 are converged by the optical lens, the edge rays 17 and 18 exit from the lower surface of the optical lens component 8 and finally fall at the center of the lighting source device 7. Similarly, for the blocking component 9, its own dimension d and the distance l between its dimension and the light-emitting surface of the lighting source device 7 are related as follows:
[0049] d≥D*l / L;
[0050] Where L represents the distance from the lower surface of the optical lens component 8 to the illumination source device 7, i.e., the second distance 14; l represents the distance between the light-shielding component 9 and the illumination source device 7, i.e., the first distance 10. By optimizing the optical lens component 8, the energy utilization rate of the light source is improved, thereby enabling the external illumination intensity to still meet the lighting conditions required for imaging by the camera in the camera component 1 even when the exposure time of the camera in the camera component 1 is greatly compressed at higher production line speeds or higher detection accuracy exposure times.
[0051] Optionally, the camera scan line of the camera component 1 is perpendicular to the movement direction of the film 3 to be detected.
[0052] In this embodiment, as Figure 2 The schematic diagram of a dark-field optical defect detection device shown can better illustrate that the film 3 to be detected moves in a set direction, namely the x-axis direction, and the camera scan line of the camera component 1 (e.g., Figure 2 The scan line shown in 301 should be perpendicular to the moving direction of the film 3 to be tested, that is, the camera scan line direction of the camera component 1 is the y-axis direction, so as to obtain a complete image of the film 3 to be tested.
[0053] Optionally, the curvature of the incident surface and the exit surface of the optical lens component 8 respectively meets the preset curvature threshold, and the angle between the light cluster emitted by the optical lens component 8 and the normal plane corresponding to the thin film 3 to be tested is less than the preset angle.
[0054] In this embodiment, as Figure 7 The diagram shows a schematic of an optical lens component. Figure 8 Yes Figure 7 A schematic diagram of the contour on the upper surface of the optical lens component 8 is shown. Figure 8 In 8-a, curve 40 is a curve in the y-axis direction in the middle of the modified optical lens component 8, and curves 42 and 45 are curves in the x-axis direction. The edge rays 43 and 44 emitted by the lamp beads 706 on the lighting source device 7 pass through the curved surface 45 that satisfies the preset curvature threshold, and the outgoing rays 46 and 47 converge at point 302 on the film to be tested 3. The angle between the outgoing rays and the normal plane corresponding to the film to be tested 3 is less than the preset angle. It should be noted that the normal plane is a plane on the y-coordinate plane. Figure 8 Figure 8-b shows a schematic diagram of one side surface of the optical lens component 8. The optical lens component 8 provides abundant dark-field illumination directions for the thin film 3 under test in the y-direction, but in the x-direction, the light from the illumination source device 7 is generally divergent. (See figure 8-b for details.) Figure 9The schematic diagram of the lens working principle shown in Figure 9-a illustrates that the light 32 emitted by the illumination source device 7 is deflected to 33 by a general optical lens, and then exits as light 34 parallel to light 32, reaching position 303 on the film to be tested 3. In the x-direction, the energy utilization rate of the light source is low, which is equivalent to deviating from the scanning line of the camera component 1. Figure 9 As shown in -b, the optical lens component 8 is modified in the x direction to obtain an optical lens with an incident surface and an exit surface that are curved surfaces with a certain curvature in the direction of movement of the object to be detected. This allows the light 35 emitted by the illumination source device 7 to be deflected into light 36 inside the lens. After exiting above the optical lens component 8, the light falls near 304 on the film to be detected 3. The angle between the light 36 and the normal plane corresponding to the film to be detected 3 is less than a preset angle. This allows the light cluster to be projected onto the scanning line of the camera device on the film to be detected 3 as much as possible, thereby improving the imaging brightness. While improving the energy utilization rate of the light source, it also greatly reduces the hardware pressure on the camera component 1 and the illumination source device 7.
[0055] Optionally, the optical lens component 8 includes a first lens 801 and a second lens 802, both of which are plano-convex lenses. The convex surface of the first lens 801 and the convex surface of the second lens 802 face inwards; the plane of the first lens 801 and the plane of the second lens 802 face outwards, respectively serving as the beam incident surface and beam exit surface of the optical lens component 8.
[0056] In this embodiment, as Figure 4 The schematic diagram of an optical lens component 8 shown in the figure illustrates an optical lens component 8. The optical lens component 8 is formed by two lenses, referred to as the first lens 801 and the second lens 802, respectively. By connecting the convex surface of the first lens 801 to the convex surface of the second lens 802, that is, with the convex surfaces of the first lens 801 and the second lens 802 facing inwards and the plane of the first lens 801 and the plane of the second lens 802 facing outwards, they serve as the beam incident surface and beam exit surface of the optical lens component 8, respectively. That is, the beam of light emitted from the illumination source device 7 that is not blocked by the blocking component 9 is transmitted to the plane of the first lens 801, and a beam cluster is emitted from the convex surface of the first lens 801. The beam cluster is transmitted to the convex surface of the second lens 802, and a beam cluster is emitted from the second lens 802, thereby transmitting to the film 3 to be tested, illuminating the film 3 to be tested.
[0057] Furthermore, let's illustrate the overall working process of this dark-field optical defect detection device with a specific example: (e.g.) Figure 5As shown, in the case of placing the to-be-detected film 3 on the to-be-detected film 3 for defect detection, the illumination light source device 7 receives the start signal for starting, and controls the corresponding adjustable light source part to emit a light beam independently according to the received signal, that is, controls the first adjustable light source part 702, the second adjustable light source part 701 and the third adjustable light source part 703 included in the illumination light source device 7 to emit light beams respectively, wherein the light beam emitted by the first adjustable light source part 702 is blocked by the shielding part 9, so as to form a dark light area on the to-be-detected film 3 above the shielding part 9, and the blocked light beam cannot directly enter the camera device and cannot participate in lighting imaging, thereby providing a dark state background for the camera part 1; the light beams emitted by the second adjustable light source part 701 and the third adjustable light source part 703 are not blocked by the shielding part 9, and the emitted light beams can be emitted to the lower surface of the optical lens part 8, pass through the optical lens part 8, and exit the light clusters from the optical lens part 8, so as to light the to-be-detected film 3, that is, light the scanning area of the camera device, and the camera device scans the to-be-detected film 3, so as to obtain the corresponding complete to-be-detected image of the to-be-detected film 3, which is used for identifying and classifying the to-be-detected image, so as to obtain whether there is a defect on the to-be-detected film 3 and the category of the defect.
[0058] The above specific embodiments do not constitute a limitation on the protection scope of the present application. It should be understood by those skilled in the art that various modifications, combinations, sub-combinations and substitutions can be made according to design requirements and other factors. Any modification, equivalent replacement and improvement made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims
1. A dark-field optical flaw detection apparatus, characterized by, The dark field optical flaw detection device comprises an illumination light source device, a shielding component, an optical lens component and a camera component, wherein The illumination light source device comprises a plurality of adjustable light source components, each of which independently emits a light beam; The shielding component is arranged above the illumination light source device, and the distance between the shielding component and the illumination light source device satisfies a first distance; the shielding component shields part of the adjustable light source components in the illumination light source device, and comprises a light-transmitting region and a non-light-transmitting region; The optical lens component is arranged above the shielding component and below the film to be detected; The camera component is arranged above the film to be detected and acquires the corresponding detection image of the film to be detected.
2. The dark-field optical flaw detection apparatus according to claim 1, characterized in that, Each of the adjustable light source components is a codeable segmented light source component, which comprises a plurality of adjustable lamp beads, and the angle and brightness of the light beam emitted by each adjustable lamp bead are adjustable.
3. The dark-field optical flaw detection apparatus according to claim 1, characterized by The plurality of adjustable light source components comprises a first adjustable light source component, which is located in the central region of the illumination light source device; The shielding component is arranged above the first adjustable light source component and shields the light beam emitted by the first adjustable light source component.
4. The dark-field optical flaw detection apparatus according to claim 3, characterized in that, The first adjustable light source component in the illumination light source device, the shielding component, the optical lens component and the camera component are located on the same central axis.
5. The dark-field optical flaw detection apparatus according to claim 3, characterized by The plurality of adjustable light source components further comprises a second adjustable light source component and a third adjustable light source component, which are respectively distributed on both sides of the first adjustable light source component.
6. The dark-field optical flaw detection apparatus according to claim 5, characterized in that, The device further comprises a condenser lens arranged above the second adjustable light source component and the third adjustable light source component, respectively.
7. The dark-field optical fault detection apparatus of claim 1, wherein, The distance between the optical lens component and the shielding component satisfies a second distance, the distance between the film to be detected and the optical lens component satisfies a third distance, and the distance between the camera component and the film to be detected satisfies a fourth distance.
8. The dark-field optical fault detection apparatus of claim 1, wherein, The curvatures of the incident surface and the exit surface of the optical lens component respectively satisfy a preset curvature threshold, and the angle between the light ray cluster emitted by the optical lens component and the normal plane corresponding to the film to be detected is less than a preset angle.
9. The dark-field optical fault detection apparatus of claim 1, wherein, The optical lens component comprises a first lens and a second lens, both of which are plano-convex lenses, the convex surfaces of the first lens and the second lens face inward, and the flat surfaces of the first lens and the second lens face outward, serving as the light beam incident surface and the light beam exit surface of the optical lens component, respectively.
10. The dark-field optical fault detection apparatus of claim 1, wherein, The camera scanning line of the camera component is perpendicular to the moving direction of the film to be detected.