Imprint device

Abstract

The utility model discloses an imprint device which comprises a sample table used for bearing a sample; the imprinting mechanism comprises a driving part and a pressing plate assembly, the pressing plate assembly comprises a pressing plate body connected with the driving part and a flexible pressing film arranged on the side, facing the sample table, of the pressing plate body, a containing cavity is formed between the flexible pressing film and the pressing plate body, and pressure applying liquid is contained in the containing cavity. According to the imprinting device, the pressing plate assembly is driven to move through the driving piece, the flexible pressing film containing the pressing liquid abuts against the upper surface of the sample, then pressure is gradually applied, the pressing process is completed in cooperation with the sample table, and in the pressing process, the flexible pressing film can deform and completely cover the upper surface of the sample; by utilizing the characteristic that the pressures at all positions in the liquid are consistent, the pressures at all positions between the surfaces in contact with the liquid are equal, so that the pressures at any contact positions of the flexible pressing film and the upper surface of the sample are equal, and the uniform stress of the sample in the pressurizing process is ensured.

Description

Technical Field

[0001] This invention belongs to the field of nanoimprint technology, specifically relating to an imprinting device. Background Technology

[0002] Nanoimprint lithography is a novel micro / nano fabrication technology. It mainly consists of three steps: template fabrication, pattern transfer, and substrate fabrication. In the pattern transfer step, photoresist is typically applied to the surface of the material to be processed, and then the template is pressed onto its surface, using pressure to transfer the pattern onto the photoresist. The pressure application is generally achieved by using hydraulic pressure to apply mechanical pressure between the plate and the sample, or by applying pressure through vacuum. However, both of these methods result in uneven stress distribution on the sample.

[0003] The information disclosed in this background section is intended only to enhance the understanding of the overall background of this utility model and should not be construed as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Utility Model Content

[0004] The purpose of this invention is to provide an imprinting device that can solve the problem of uneven force on the sample during the imprinting process.

[0005] To achieve the above objectives, a specific embodiment of this utility model provides the following technical solution: an embossing device, comprising:

[0006] The sample stage is used to hold the sample.

[0007] An imprinting mechanism includes a drive unit and a pressure plate assembly. The pressure plate assembly includes a pressure plate body connected to the drive unit and a flexible pressure film disposed on the pressure plate body facing the sample stage. A receiving cavity is provided between the flexible pressure film and the pressure plate body, and the receiving cavity contains a pressurized liquid.

[0008] In one or more embodiments of this utility model, the distance between the flexible pressure film and the pressure plate body gradually decreases from the center of the flexible pressure film outwards.

[0009] In one or more embodiments of this utility model, the pressure plate body is provided with an inlet and an outlet that communicate with the receiving cavity.

[0010] In one or more embodiments of this utility model, the imprinting device further includes a circulating temperature control mechanism, the circulating heating mechanism comprising:

[0011] A shell containing an internal cavity;

[0012] A circulation pipe has an outlet connected to an inlet and an inlet connected to an outlet, a portion of which is located within an inner cavity, and the circulation pipe is a heat-conducting circulation pipe.

[0013] A circulation pump, connected to a circulation pipeline, is used to drive pressurized liquid to circulate within the circulation pipeline and containment chamber.

[0014] The temperature controller is located inside the housing.

[0015] In one or more embodiments of this utility model, the circulation pipe is arranged in a bent and spiral configuration within the inner cavity.

[0016] In one or more embodiments of this utility model, the temperature controller is a TEC temperature controller.

[0017] In one or more embodiments of this utility model, the flexible pressure film is a polyimide film.

[0018] In one or more embodiments of this utility model, the sample stage is provided with an ultraviolet lamp, and the sample stage has a light-transmitting loading part for carrying a sample, wherein the ultraviolet light emitted by the ultraviolet lamp can irradiate the sample through the light-transmitting loading part.

[0019] In one or more embodiments of this utility model, the sample stage is provided with a heater for heating the sample placed on the sample stage.

[0020] In one or more embodiments of this utility model, the driving component is a hydraulic press, the output end of which is connected to the side of the pressure plate body away from the flexible pressure film, and is used to drive the pressure plate assembly closer to or away from the sample stage.

[0021] Compared with the prior art, the imprinting device of this utility model places the sample (a template and a substrate placed together) on the sample stage. The driving component drives the pressure plate assembly to move, so that the flexible pressure film containing the pressurizing liquid abuts against the upper surface of the sample. Then, pressure is gradually applied to complete the pressurization process in conjunction with the sample stage. During the pressurization process, the flexible pressure film will deform and completely cover the upper surface of the sample. By utilizing the characteristic that the pressure is uniform throughout the liquid, it is ensured that the pressure is equal at all points where the liquid contacts the surface. This ensures that the pressure at any point of contact between the flexible pressure film and the upper surface of the sample is the same, thereby ensuring that the sample is subjected to uniform force during the pressurization process. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the embossing device in one embodiment of the present invention;

[0024] Figure 2 This is a schematic diagram of the embossing mechanism in one embodiment of the present invention;

[0025] Figure 3 This is a schematic diagram of a circulating temperature control mechanism in one embodiment of the present invention;

[0026] Figure 4 This is a schematic diagram of the sample stage in one embodiment of the present invention.

[0027] Explanation of key figure labels:

[0028] 1. Sample stage; 11. Loading section; 12. UV lamp; 2. Imprinting mechanism; 21. Drive unit; 22. Pressure plate assembly; 221. Pressure plate body; 2211. Liquid inlet; 2212. Liquid outlet; 222. Flexible pressure film; 223. Receiving cavity; 3. Circulation temperature control mechanism; 31. Housing; 311. Inner cavity; 32. Circulation pipe; 321. Inlet; 322. Outlet; 33. Circulation pump; 34. Temperature controller; 4. Sample. Detailed Implementation

[0029] To enable those skilled in the art to better understand the technical solutions of this utility model, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.

[0030] like Figure 1 and 2As shown, the imprinting device in one embodiment of the present invention includes a sample stage 1 and an imprinting mechanism 2; the sample stage 1 is used to support the sample 4; the imprinting mechanism 2 includes a driving member 21 and a pressure plate assembly 22, the pressure plate assembly 22 includes a pressure plate body 221 connected to the driving member 21, and a flexible pressure film 222 disposed on the pressure plate body 221 facing the sample stage 1, a receiving cavity 223 is provided between the flexible pressure film 222 and the pressure plate body 221, and the receiving cavity 223 contains a pressurized liquid.

[0031] It is understood that sample 4 consists of a template and a substrate stacked together, with photoresist coated on the substrate. In this invention, sample 4 is placed on sample stage 1, and drive component 21 drives pressure plate assembly 22 to move, so that flexible pressure film 222 containing pressurized liquid abuts against the upper surface of sample 4. Then, pressure is gradually applied, and the pressurization process is completed in conjunction with sample stage 1. During the pressurization process, flexible pressure film 222 will deform and completely cover the upper surface of sample 4. By utilizing the characteristic that the pressure is consistent throughout the liquid, the pressure between the liquid and the surfaces in contact with the liquid is equal at all points, so that the pressure at any point of contact between flexible pressure film 222 and the upper surface of sample 4 is the same, thereby ensuring that sample 4 is subjected to uniform force during the pressurization process.

[0032] Specifically, the pressurizing fluid can be temperature-resistant and highly fluid silicone oil, other commonly used ionic liquids that can be used as hydraulic fluids, or other organic substances.

[0033] In this embodiment, the flexible pressure film 222 is a polyimide film. Polyimide films possess excellent mechanical properties, electrical properties, heat resistance, and radiation resistance. It is formed by polycondensation and casting of pyromellitic dianhydride and diaminodiphenyl ether as raw materials, followed by imidization. The polyimide film is a commercially available type. In other embodiments, the flexible pressure film 222 may also be a film made of other materials.

[0034] Specifically, the distance between the flexible pressure film 222 and the pressure plate body 221 gradually decreases from the center of the flexible pressure film 222 outwards. With this configuration, when the pressure plate assembly 22 approaches the sample 4 on the sample stage 1, the central portion of the flexible pressure film 222 contacts the sample 4 first, followed by the peripheral portions of the flexible pressure film 222 gradually contacting the sample 4. This helps to displace residual gas between the template and substrate in the sample 4, as well as residual gas at the contact point between the flexible pressure film 222 and the sample 4, ensuring complete contact between the sample 4 and the flexible pressure film 222. Under the action of the pressurized liquid, the pressure on the contact surface between the flexible pressure film 222 and the sample 4 is equal everywhere, resulting in uniform force distribution.

[0035] like Figure 2As shown, in this embodiment, the pressure plate body 221 is provided with an inlet 2211 and an outlet 2212 that communicate with the receiving cavity 223. The pressurized liquid in the receiving cavity 223 can be injected and discharged through the inlet 2211 and the outlet 2212.

[0036] like Figure 3 As shown, the imprinting device further includes a circulating temperature control mechanism 3. The circulating heating mechanism includes: a housing 31, a circulating pipe 32, a circulating pump 33, and a temperature controller 34. The housing 31 has an inner cavity 311. The circulating pipe 32 has an outlet 322 connected to the liquid inlet 2211 and an inlet 321 connected to the liquid outlet 2212. A portion of the circulating pipe 32 is located within the inner cavity 311. The circulating pipe 32 is a heat-conducting circulating pipe 32. The circulating pump 33 is connected to the circulating pipe 32 and is used to drive the pressurized liquid to circulate within the circulating pipe 32 and the receiving cavity 223. The temperature controller 34 is located within the inner cavity 311 of the housing 31.

[0037] Understandably, the temperature controller 34 controls the internal temperature of the housing 31. A portion of the heat-conducting circulation pipe 32 is located within the inner cavity 311, allowing the temperature controller 34 to adjust the temperature of the pressurized liquid within the circulation pipe 32, for example, by heating the pressurized liquid, thereby achieving the thermal curing process during the imprinting process. Furthermore, the heating effect of the circulating pressurized liquid is better.

[0038] The inlet 2211 and outlet 322 can be connected and interconnected using common fitting assemblies, and the outlet 2212 and inlet 321 can also be connected and interconnected using common fitting assemblies. That is, the circulation pipe 32 and the pressure plate body 221 are connected using common fitting assemblies.

[0039] Furthermore, a heater (not shown in the figure) is provided inside the sample stage 1 to heat the sample 4 placed on the sample stage 1. This arrangement allows for simultaneous heating of the sample 4 from both the top and bottom sides during the imprinting process, which is superior to the conventional process of heating only the lower surface. This reduces the problem of uneven curing of the colloid on the substrate in the sample 4 due to uneven heat conduction. The heater can also be a commercially available TEC temperature controller.

[0040] Furthermore, since the heated sample needs to be cooled after the imprinting process, the temperature controller 34 is a TEC temperature controller. A TEC temperature controller (Thermo Electric Cooler, TEC) can both heat and cool. The TEC temperature controller operates using the Peltier effect; when current passes through a thermocouple composed of two different semiconductor materials, heat absorption and release occur at its two ends respectively. By controlling the direction and magnitude of the current, cooling or heating at one end can be achieved, thus achieving temperature control. TEC temperature controllers are characterized by being noiseless, vibration-free, requiring no refrigerant, small in size, and lightweight, and are reliable and easy to operate.

[0041] Furthermore, the circulation pipe 32 is arranged in a bend and spiral within the inner cavity 311. This arrangement increases the contact area of ​​the circulation pipe 32 within the inner cavity 311 within a limited space, thereby improving heating or cooling efficiency.

[0042] like Figure 4 As shown in a specific example, the sample stage 1 is equipped with an ultraviolet lamp 12, and the sample stage 1 has a light-transmitting carrier part 11 for holding the sample 4. The ultraviolet light emitted by the ultraviolet lamp 12 can irradiate the sample 4 through the light-transmitting carrier part 11. With this configuration, the imprinting device of this invention can also perform ultraviolet curing of the sample 4 during the imprinting process, increasing the applicability and functionality of the imprinting device of this invention.

[0043] like Figure 1 As shown, in this embodiment, the driving component 21 is a hydraulic press, the output end of which is connected to the side of the pressure plate body 221 away from the flexible pressure film 222. It is used to drive the pressure plate assembly 22 closer to or away from the sample stage 1, that is, to drive the pressure plate assembly 22 closer to or away from the sample stage 1 by the hydraulic press, and to provide pressure for the imprinting process.

[0044] The imprinting process of the imprinting device according to a specific embodiment of this utility model is as follows:

[0045] Sample 4 is prepared by combining a template and a substrate coated with adhesive. Sample 4 is placed on sample stage 1. Drive unit 21 drives the pressure plate assembly 22 to descend and approach sample 4, making the flexible pressure film 222 fully contact sample 4. Drive unit 21 continues to apply pressure until the pressure of the flexible pressure film 222 on sample 4 reaches the target pressure and is maintained. Then, the heater, temperature controller 34 and circulation pump 33 in sample stage 1 are activated to heat the upper and lower sides of sample 4 simultaneously. After reaching the target temperature, the temperature is maintained to allow sample 4 to be thermo-cured. After thermo-curing, the heater and temperature controller 34 simultaneously cool down. When the required cooling value is reached, drive unit 21 controls the pressure plate assembly 22 to release the pressure of the flexible pressure film 222 on sample 4, and the pressure plate assembly 22 moves upward to detach from sample 4, performing demolding operation on sample 4 and completing the imprinting process.

[0046] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0047] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. An embossing apparatus, characterized in that, include: The sample stage is used to hold the sample. An imprinting mechanism includes a drive unit and a pressure plate assembly. The pressure plate assembly includes a pressure plate body connected to the drive unit and a flexible pressure film disposed on the pressure plate body facing the sample stage. A receiving cavity is provided between the flexible pressure film and the pressure plate body, and the receiving cavity contains a pressurized liquid.

2. The imprinting apparatus according to claim 1, characterized in that, The distance between the flexible membrane and the pressure plate body gradually decreases from the center of the flexible membrane outwards.

3. The imprinting apparatus according to claim 1, characterized in that, The pressure plate body is provided with an inlet and an outlet that are connected to the receiving cavity.

4. The imprinting apparatus according to claim 3, characterized in that, The imprinting device further includes a circulating temperature control mechanism, which comprises: A shell containing an internal cavity; A circulation pipe has an outlet connected to an inlet and an inlet connected to an outlet, a portion of which is located within an inner cavity, and the circulation pipe is a heat-conducting circulation pipe. A circulation pump, connected to a circulation pipeline, is used to drive pressurized liquid to circulate within the circulation pipeline and containment chamber. The temperature controller is located inside the housing.

5. The imprinting apparatus according to claim 4, characterized in that, The circulation pipe is arranged in a bend and spiral within the inner cavity.

6. The imprinting apparatus according to claim 4, characterized in that, The temperature controller is a TEC temperature controller.

7. The imprinting apparatus according to claim 1, characterized in that, The flexible pressure film is a polyimide film.

8. The imprinting apparatus according to claim 1, characterized in that, The sample stage is equipped with an ultraviolet lamp and has a light-transmitting loading section for holding the sample. The ultraviolet light emitted by the ultraviolet lamp can irradiate the sample through the light-transmitting loading section.

9. The imprinting apparatus according to claim 1, characterized in that, The sample stage is equipped with a heater for heating the sample placed on the sample stage.

10. The imprinting apparatus according to claim 1, characterized in that, The driving component is a hydraulic press, the output end of which is connected to the side of the pressure plate body away from the flexible pressure film, and is used to drive the pressure plate assembly closer to or away from the sample stage.

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