Locking structure, film magazine loading frame and semiconductor processing equipment

Abstract

The utility model discloses a locking structure, a film magazine loading frame and semiconductor processing equipment, and relates to the field of semiconductor equipment. The locking structure comprises a clamping seat provided with a locking groove; the locking assembly comprises a pressing rod with one end hinged to the installation base, a balancing weight connected with the other end of the pressing rod and a locking piece installed on the clamping base, the locking piece can move relative to the clamping base under external force so as to have an unlocking state and a locking state, and when the locking piece is in the locking state, a locking gap is formed between the locking piece and the locking groove; wherein the locking piece comprises a locking part capable of moving relative to the locking groove, the locking part comprises a first end and a second end which are oppositely arranged, and the locking part is provided with a guide inclined surface which is inclined from top to bottom from the first end to the second end; the pressing rod is configured to be capable of rotating and pressing down the locking part under the action of the balancing weight, and the pressing rod slides to the locking gap along the guide inclined face. The locking structure provided by the utility model can conveniently and quickly complete locking operation and unlocking operation, and has a stable and reliable locking effect.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of semiconductor equipment, specifically, relate to a locking structure, piece box loading frame and semiconductor processing equipment. BACKGROUND

[0002] In the wafer preparation process, piece box is often used to carry wafer, in order to avoid causing wafer pollution, piece box needs to be handled. In the handling process, piece box is loaded on the loading frame configured by the handling equipment, and the piece box is handled in the process of the rotation of the loading frame, and the piece box is taken out from the loading frame after the handling is completed.

[0003] In order to avoid that the piece box is thrown out in the rotation process of the loading frame, the loading frame on the market is configured with a door stop, the piece box is loaded in the case of opening the door stop, and the door stop is closed after loading is completed and is locked through the locking structure on the loading frame to prevent the piece box from being taken out. The locking operation and unlocking operation of the locking structure configured on the loading frame are complicated, and the locking effect is unstable. UTILITY MODEL CONTENTS

[0004] The utility model aims at providing a kind of locking structure, it can be conveniently and quickly complete locking operation and unlocking operation, and with stable and reliable locking effect.

[0005] Another purpose of the utility model is to provide a kind of piece box loading frame, it can be conveniently and quickly complete locking operation and unlocking operation of door stop, and can realize the stable and reliable locking of door stop.

[0006] Still another purpose of the utility model is to provide a kind of semiconductor processing equipment, it has the characteristics of simple operation and high safety.

[0007] Embodiment of the utility model provides a kind of technical scheme:

[0008] A kind of locking structure, comprising:

[0009] card seat, with locking slot;

[0010] Locking assembly, including one end with the mounting seat articulates pressure rod, with the other end of the pressure rod connecting counterweight and being installed on the locking piece of card seat, the locking piece is moved relative to the card seat under external force to have unlocking state and locking state, when being in the locking state, locking gap is formed between the locking piece and the locking slot;

[0011] The locking member comprises a locking part movable relative to the locking groove, the locking part comprises oppositely arranged first and second ends, and the locking part has a guide slope inclined downward from the first end to the second end; the pressing rod is configured to rotate and press the locking part under the action of the counterweight, and the pressing rod slides along the guide slope to the locking gap.

[0012] In an optional embodiment, the locking member further comprises a pull cap, a pull rod and an elastic member, one end of the pull rod is connected with the pull cap, the other end of the pull rod is connected with the locking part, and the elastic member is sleeved outside the pull rod and abuts against the clamping seat and the locking part at two ends respectively.

[0013] In an optional embodiment, a surface of the clamping seat corresponding to one end of the locking groove is provided with a concave arc matching surface;

[0014] The counterweight is provided with a convex arc matching surface, and the convex arc matching surface is embedded with the concave arc matching surface after the pressing rod enters the locking gap.

[0015] The embodiment of the utility model further provides a sheet box loading rack, including frame body, door stop and at least two preceding locking structures, the frame body has loading cavity for loading sheet box, the pressing rod is installed on the door stop through mounting seat, the clamping seat is installed on the frame body, and the locking structure is configured to lock the door stop and the frame body.

[0016] In an optional embodiment, the sheet box loading rack further comprises a detection structure connected with a controller, the detection structure comprises a first detection member arranged on the counterweight and a second detection member installed on the frame body, and the detection structure can transmit an in-place signal to the controller when the pressing rod is in the locking gap.

[0017] In an optional embodiment, the sheet box comprises a cover body and a box body;

[0018] The loading cavity comprises a first loading cavity and a second loading cavity, the cover body is configured to be placed in the first loading cavity in an inclined state, and the box body is configured to be placed in the second loading cavity with an opening facing the door stop.

[0019] In an optional embodiment, the sheet box loading rack further comprises a support structure, the support structure comprises a first support member and a second support member arranged in the first loading cavity, the first support member is used for supporting a first side surface of the cover body, and the second support member is used for supporting a front end part of the cover body close to the door stop.

[0020] In an optional embodiment, the film cassette loading rack further comprises a resisting structure, the resisting structure comprises a first resisting block mounted on the door stopper and a second resisting block mounted on the rack body, the first resisting block is arranged towards the second side of the cover body, and the second resisting block is arranged towards the rear end of the door stopper away from the cover body.

[0021] In an optional embodiment, the film cassette loading rack further comprises a limiting structure arranged in the second loading cavity and two positioning members, the limiting structure comprises a first limiting member mounted on the rack body and a second limiting member mounted on the door stopper, and in the first direction, the positioning members are located between the first limiting member and the second limiting member, and the cassette body is provided with a positioning hole matched with the positioning members.

[0022] Embodiments of the present application also provide a semiconductor processing device, comprising a processing mechanism, a driving mechanism and at least one aforementioned film cassette loading rack, the driving mechanism is used for driving the film cassette loading rack to rotate with the opening facing outward, and the processing mechanism is suitable for processing the cover body and the cassette body in the film cassette loading rack.

[0023] Compared with the prior art, the locking structure provided by the present application has the following beneficial effects: by arranging the locking member, the pressure rod hinged to one end of the mounting seat, and the counterweight connected to the other end of the pressure rod, and the locking part of the locking member has a guide slope, so that the pressure rod can rotate around the mounting seat under the action of the counterweight, press down the locking part, slide downward along the guide slope, and slide into the locking gap until the pressure rod is locked, without the need for a complex manual driving mechanism or an additional power source, simplifying the operation process, improving the work efficiency, and having stable and reliable locking effect. BRIEF DESCRIPTION OF DRAWINGS

[0024] In order to more clearly illustrate the technical scheme of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as limiting the scope. For those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0025] Figure 1 The structure diagram of the film cassette loading rack provided by the embodiments of the present application is shown in the figure.

[0026] Figure 2 The structure diagram of the locking structure and the magnetic induction member cooperating in the locked state is shown in the figure.

[0027] Figure 3 The structure diagram of the locking structure and the magnetic induction member cooperating in the locked state is shown in the figure. Figure 2 The structure diagram of the locking structure and the magnetic induction member cooperating in the locked state is shown in the figure.

[0028] Figure 4 is a structural schematic view of the structure shown in another perspective view. Figure 2 is a structural schematic view of the structure shown in another perspective view.

[0029] Figure 5 is a structural schematic view of the structure shown in another perspective view.

[0030] Figure 6 is a structural schematic view of the structure shown in another perspective view.

[0031] Figure 7 is a structural schematic view of the structure shown in another perspective view. Figure 6 is a structural schematic view of the structure shown in another perspective view.

[0032] Icon: 100 - locking structure; 110 - card seat; 111 - locking groove; 1111 - concave arc matching surface; 120 - locking assembly; 121 - mounting seat; 122 - pressing rod; 123 - counterweight; 1231 - convex arc matching surface; 1232 - first detection piece; 124 - locking piece; 1241 - locking part; 1244 - guide inclined surface; 1245 - pull cap; 130 - locking gap; 200 - film box loading rack; 210 - rack body; 211 - first loading cavity; 2111 - first supporting piece; 2112 - second supporting piece; 212 - second loading cavity; 2121 - positioning piece; 2122 - first limiting piece; 213 - second abutting stop block; 214 - third abutting stop block; 220 - door stop; 221 - first abutting stop block; 222 - second limiting piece; 230 - second detection piece; 300 - cover body; 400 - box body. DETAILED DESCRIPTION

[0033] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations.

[0034] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative labor are within the scope of protection of the present application.

[0035] It should be noted that: similar reference numbers and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0036] In the description of the utility model, it is necessary to understand that the orientation or position relationship indicated by the terms "upper", "lower", "inner", "outer", "left", "right" and the like is based on the orientation or position relationship shown in the drawings, or is the orientation or position relationship commonly placed when the utility model product is used, or is the orientation or position relationship commonly understood by the person skilled in the art, and is only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element indicated must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the utility model.

[0037] In addition, the terms "first", "second" and the like are only used for differentiation in description and cannot be understood as indicating or implying relative importance.

[0038] In the description of the utility model, it is also necessary to note that, unless otherwise explicitly specified and limited, the terms "arrange", "connect" and the like should be understood broadly, for example, "connect" can be fixedly connected, or can be detachably connected, or integrally connected; can be mechanically connected, or can be electrically connected; can be directly connected, or indirectly connected through an intermediate medium, or can be the communication inside two elements. For the person skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0039] The specific embodiments of the utility model will be described in detail below with reference to the drawings.

[0040] Embodiment

[0041] Please refer to Figure 1 , Figure 1 The structure schematic view of the film box loading rack 200 provided by the embodiment is shown.

[0042] The film box loading rack 200 provided by the embodiment is applied to a semiconductor processing equipment, which comprises a processing mechanism, a driving mechanism and the film box loading rack 200, the driving mechanism is used to drive the film box loading rack 200 to rotate with the opening facing outward, and the processing mechanism is suitable for processing the cover 300 and the box body 400 in the film box loading rack 200. It can be understood that the processing mechanism can comprise a cleaning assembly and a drying assembly, which can clean and dry the cover 300 and the box body 400 after cleaning. Of course, the processing mechanism can also comprise other processing processes, which are not exemplified here.

[0043] The film box loading rack 200 is used to load the film box, so that the semiconductor processing equipment can clean the loaded film box.

[0044] The sheet box loading rack 200 provided by the embodiment comprises a rack body 210, a door stop 220 and at least two locking structures 100. The rack body 210 has a loading cavity for loading sheet boxes, and the opening of the loading cavity is located at one side of the rack body 210. The door stop 220 is hinged to the rack body 210 and is used to rotate relative to the rack body 210 to shield or open the opening of the loading cavity. The locking structure 100 is used to lock the door stop 220 when the door stop 220 rotates to shield the opening of the loading cavity.

[0045] In the embodiment, at least two locking structures 100 are provided to prevent the sheet boxes in the sheet box loading rack 200 from being thrown out when one of the locking structures 100 fails when the sheet box loading rack 200 rotates in a state with the opening facing outward.

[0046] The sheet box comprises a cover body 300 and a box body 400. In the embodiment, the loading cavity comprises a first loading cavity 211 and a second loading cavity 212. The cover body 300 is configured to be placed in the first loading cavity 211 in an inclined state, and the box body 400 is configured to be placed in the second loading cavity 212 with the opening facing the door stop 220. The cover body 300 and the box body 400 are placed separately in the loading cavity, which can improve the processing effect and efficiency of the cover body 300 and the box body 400. In addition, since the cover body 300 is usually configured as a hollow structure, there is processing liquid in the hollow structure during the processing. By placing the cover body 300 in the first loading cavity 211 in an inclined state, the processing liquid in the hollow structure can be gathered at the bottom end during the rotation of the cover body 300 and thrown out through the opening at the end. On the other hand, placing the cover body 300 in the first loading cavity 211 in an inclined state can also effectively reduce the height occupied by the cover body 300 on the sheet box loading rack 200, thereby reducing the height of the entire sheet box loading rack 200.

[0047] It should be noted that when the door stop 220 is locked by the locking structure 100, the door stop simultaneously shields the openings of the first loading cavity 211 and the second loading cavity 212 to prevent the cover body 300 and the box body 400 from being taken out of the openings of the first loading cavity 211 and the second loading cavity 212, respectively.

[0048] In actual application, before starting the cleaning, the door stop 220 is rotated to open the first loading cavity 211 and the second loading cavity 212, the cover body 300 of the sheet box to be cleaned is loaded into the first loading cavity 211, and the box body 400 is loaded into the second loading cavity 212. After completion, the door stop 220 is rotated to shield the openings of the first loading cavity 211 and the second loading cavity 212, and is locked by the locking structure 100 to achieve the blocking of the cover body 300 and the box body 400, thereby preventing the cover body 300 and the box body 400 from being thrown out of the openings of the first loading cavity 211 and the second loading cavity 212, respectively, under the action of centrifugal force during the cleaning.

[0049] The cassette loading rack 200 provided in this embodiment also includes a detection structure connected to a controller. The detection structure includes a first detection element 1232 disposed on the locking structure 100 and a second detection element 230 mounted on the rack body 210. The locking structure 100 has an unlocked state and a locked state. When the locking structure 100 switches from the unlocked state to the locked state, the detection mechanism can transmit a positioning signal to the controller. In practical applications, after receiving the positioning signal, the controller of the semiconductor processing equipment can execute a corresponding processing program to clean or dry the cover 300 and the cassette body 400 loaded on the cassette loading rack 200. Please refer to [reference needed]. Figure 2 , Figure 3 and Figure 4 , Figure 2 The diagram shows the structure of the locking structure 100 and the detection structure in the locked state. Figure 3 As shown Figure 2 The diagram shown is a structural illustration from another perspective. Figure 4 As shown Figure 2 The diagram shows the structure from another perspective.

[0050] In this embodiment, the locking structure 100 includes a card holder 110 and a locking assembly 120. The card holder 110 is disposed on the frame 210 of the disc cassette loading rack 200, and the card holder 110 has a locking groove 111. The locking assembly 120 includes a pressure rod 122 with one end hinged to the mounting base 121, a counterweight block 123 connected to the other end of the pressure rod 122, and a locking member 124 mounted on the card holder 110. The mounting base 121 is mounted on the door stop 220. The locking member 124 can move relative to the card holder 110 under external force to have an unlocked state and a locked state. When in the locked state, a locking gap 130 is formed between the locking member 124 and the locking groove 111.

[0051] The locking member 124 includes a locking part 1241 that can move relative to the locking groove 111. The locking part 1241 includes a first end and a second end that are disposed opposite each other. The locking part 1241 has a guide slope 1244 that slopes downward from the first end to the second end. The pressure rod 122 is configured to rotate and press down the locking part 1241 under the action of the counterweight 123. The pressure rod 122 slides down along the guide slope 1244 to the locking gap 130.

[0052] During the rotation of the door stop 220 relative to the frame 210, the mounting base 121 and the pressure rod 122 move synchronously. In practical applications, when the door stop 220 rotates to block the openings of the first loading cavity 211 and the second loading cavity 212, the pressure rod 122 can rotate into the locking groove 111 of the card seat 110, pushing the locking member 124 to move out of position and enter the locking gap 130, thus completing the switch from the unlocked state to the locked state and locking the door stop 220.

[0053] Specifically, the locking member 124 further comprises a pull cap 1245, a pull rod and an elastic member. One end of the pull rod is connected with the pull cap 1245, and the other end is connected with the locking portion 1241. The elastic member is sleeved outside the pull rod, and the two ends thereof abut against the card seat 110 and the locking portion 1241 respectively, so that the locking portion 1241 can be compressed by external force to exit the locking slot 111, or enter the locking slot 111 under the elastic force of the elastic member, thereby realizing the switching between the unlocking state and the locking state of the locking member 124.

[0054] The locking member 124 is movably arranged on the card seat 110. The locking portion 1241 of the locking member 124 extends into the locking slot 111 from the slot side wall of the locking slot 111. The locking gap 130 is formed between the locking portion 1241 and the slot bottom wall of the locking slot 111. The guide inclined surface 1244 is arranged on the side of the locking portion 1241 away from the slot bottom wall. It can be understood that, in the absence of external force, the locking portion 1241 is kept in the state of extending into the locking slot 111 under the action of the elastic member.

[0055] In actual application, when the door stop 220 is rotated to block the openings of the first loading cavity 211 and the second loading cavity 212, the mounting seat 121 is located at one end of the locking slot 111. In this state, the pressing rod 122 is positively rotated into the locking slot 111 around the mounting seat 121, and in the process of rotating into the locking slot 111, the pressing rod 122 abuts against the guide inclined surface 1244 to push the locking portion 1241 to exit the locking slot 111, until the pressing rod 122 enters the locking gap 130.

[0056] In fact, the first end of the locking portion 1241 abuts against the elastic member, and the second end is closer to the other slot side wall of the locking slot 111. When the pressing rod 122 relatively slides on the guide inclined surface 1244, the locking portion 1241 gradually exits the locking slot 111, that is, the gap between the second end of the locking portion 1241 and the other slot side wall of the locking slot 111 gradually increases. When the gap increases to more than the diameter of the pressing rod 122, the pressing rod 122 can successfully enter the locking gap 130.

[0057] After the pressing rod 122 enters the locking gap 130, the counterweight 123 is located at the end of the locking slot 111 away from the mounting seat 121, and is used to abut against the card seat 110 to prevent the pressing rod 122 from exiting the locking gap 130 from the extension direction of the locking slot 111. The locking portion 1241 of the locking member 124 is driven by the elastic member to move into the locking slot 111, so as to prevent the pressing rod 122 from being reversely rotated out of the locking gap 130 around the mounting seat 121. The locking member 124 is also used to exit the locking slot 111 under the action of external force, so as to release the prevention of the pressing rod 122.

[0058] In actual application, when the door stop 220 is rotated to shield the openings of the first loading cavity 211 and the second loading cavity 212, the mounting seat 121 is located at one end of the locking groove 111. At this time, the rotating plane of the pressing rod 122 is coplanar with the plane where the locking groove 111 is located. In the embodiment, the opening of the locking groove 111 faces upward. After an acting force is applied to the pressing rod 122, the pressing rod 122 is quickly rotated downward into the locking groove 111 under the action of the counterweight 123, and gradually approaches the locking gap 130 near the groove bottom wall of the locking groove 111.

[0059] The locking member 124 is located in the rotating path of the pressing rod 122. Before the pressing rod 122 enters the locking gap 130, the pressing rod 122 will first contact the guide inclined surface 1244 of the locking member 124, and an acting force is applied to the guide inclined surface 1244 to relatively slide on the surface of the guide inclined surface 1244, so as to gradually push the locking part 1241 out of the locking groove 111. In this process, the elastic member is compressed and accumulates elastic potential energy.

[0060] When the pressing rod 122 completely passes the locking member 124 and enters the locking gap 130, the acting force of the pressing rod 122 on the locking part 1241 disappears, the elastic member releases the elastic potential energy, and drives the locking part 1241 to move to extend into the locking groove 111 again and be located above the pressing rod 122, thereby preventing the pressing rod 122 from rotating upward out of the locking gap 130 around the mounting seat 121.

[0061] In addition, when the pressing rod 122 completely passes the locking part 1241 and enters the locking gap 130, the counterweight 123 is located at the end of the locking groove 111 away from the mounting seat 121. In the width direction of the locking groove 111, the size of the counterweight 123 is greater than the width of the locking groove 111, and the counterweight 123 can resist the clamping seat 110 to prevent the pressing rod 122 from exiting the locking gap 130 from the extension direction of the locking groove 111.

[0062] The locking structure 100 provided in the embodiment can complete the locking by rotating the pressing rod 122 of the locking assembly 120 around the mounting seat 121 under the action of the gravity of the counterweight 123, and does not need to apply an external force artificially during the locking process. After the acting force is applied to the locking member 124 to make the locking member 124 exit the locking groove 111, the pressing rod 122 can be rotated upward out of the locking groove 111 to complete the unlocking state. It can be seen that the locking structure 100 can conveniently and quickly complete the locking operation and the unlocking operation, and saves time and effort. In the locking state, the counterweight 123 and the locking member 124 jointly limit the pressing rod 122, and have a stable and reliable locking effect.

[0063] In the embodiment, the second detection member 230 is arranged at one end of the locking groove 111 away from the mounting base 121, and the first detection member 1232 is arranged on the counterweight 123. After the pressing rod 122 enters the locking gap 130, the counterweight 123 passes the locking groove 111 to reach one end where the second detection member 230 is located. At this time, the second detection member 230 senses the first detection member 1232, and sends a signal indicating that the door stop 220 is locked. The processing device receives the signal indicating that the door stop 220 is locked, and then performs the cleaning operation, so that the cover 300 and the box 400 are cleaned in a stable state, which can prevent safety risks caused by misoperation, avoid damage caused by the cover 300 and the box 400 being thrown out, and avoid causing personal injury.

[0064] In the embodiment, the first detection member 1232 is a magnetic member, and the second detection member 230 is a magnetic induction member. In another embodiment, the first detection member 1232 and the second detection member 230 can be selected according to actual application conditions.

[0065] In order to further improve the convenience of the unlocking operation, in the embodiment, the card seat 110 is provided with a sliding channel, one end of the sliding channel is arranged on the side wall of the locking groove 111, the locking part 1241 is slidably arranged in the sliding channel, the pull cap 1245 is arranged outside the card seat 110 and at one end of the sliding channel away from the locking groove 111, the pull cap 1245 is connected with the locking part 1241 through a pull rod, and is used to pull the locking part 1241 out of the locking groove 111 under the action of external force. The elastic member is arranged in the sliding channel and abuts against one end of the sliding channel away from the locking groove 111 and the locking part 1241.

[0066] In the embodiment, the elastic member is a spring, which is coaxially sleeved on the pull rod, one end of the spring abuts against the locking part 1241, and the other end abuts against one end of the sliding channel away from the locking groove 111. One end of the sliding channel away from the locking groove 111 is provided with a clearance hole, and one end of the pull rod away from the locking part 1241 penetrates through the clearance hole and is connected with the pull cap 1245. In actual application, the pressing rod 122 applies a force to the locking part 1241 through the guide inclined surface 1244, pushes the locking part 1241 to retract into the sliding channel, drives the pull rod and the pull cap 1245 to move synchronously in the process, and compresses the elastic member. After the pressing rod 122 passes the locking part 1241 and enters the locking gap 130, the spring relaxes, pushes the locking part 1241 to extend out of the sliding channel and into the locking groove 111.

[0067] When unlocking is needed, the operator applies a pulling force to the pull cap 1245 in a direction away from the locking groove 111, so as to retract the locking part 1241 into the sliding channel through the pull rod, realize the clearance of the pressing rod 122 from the path, and compress the spring in the process. After the pressing rod 122 is turned out of the locking groove 111 and the unlocking is completed, the pulling force applied to the pull cap 1245 is removed, the spring relaxes, and the locking part 1241 is pushed to extend into the locking groove 111 again.

[0068] In order to further improve the stability of the locking state and improve the accuracy of the signal, in the embodiment, the surface of the card seat 110 corresponding to one end of the locking groove 111 is provided with a concave arc matching surface 1111, and the counterweight block 123 is provided with a convex arc matching surface 1231. After the pressing rod 122 enters the locking gap 130, the convex arc matching surface 1231 is embedded with the concave arc matching surface 1111.

[0069] It can be understood that the concave arc matching surface 1111 provided on the surface of the card seat 110 is embedded with the convex arc matching surface 1231 on the counterweight block 123, which realizes the positioning of the counterweight block 123 when locking is completed. On the one hand, it ensures that the matching block can move to the position after locking is completed, driving the first detection member 1232 provided thereon to accurately and timely trigger the second detection member 230 to send a signal to the position; on the other hand, it also avoids the counterweight block 123 from being unstable after locking is completed due to lack of constraint, thereby further improving the stability and reliability of the locking effect.

[0070] Please refer to Figure 5 , Figure 5 for the partial structure schematic diagram of the film box loading rack 200.

[0071] In the embodiment, the film box loading rack 200 further includes a support structure, which includes a first support member 2111 and a second support member 2112 provided in the first loading cavity 211. The first support member 2111 is used to support the first side of the cover body 300, and the second support member 2112 is used to support the front end of the cover body 300 close to the door stop 220.

[0072] Compared with the first support member 2111, the second support member 2112 is arranged closer to the opening of the first loading cavity 211, and in the vertical direction, the first support member 2111 is above the second support member 2112. The first support member 2111 and the second support member 2112 are used to jointly support the cover body 300.

[0073] It can be understood that since the first support member 2111 is above the second support member 2112, in the case that the first support member 2111 and the second support member 2112 jointly support the cover body 300, the cover body 300 is in an inclined state, that is, the end of the cover body 300 closer to the opening of the first loading cavity 211 is lower than the end farther away from the opening. When cleaning in this state, the water in the hollow structure of the cover body 300 can be discharged in time from the opening of the first loading cavity 211, thereby obtaining better treatment effect.

[0074] Please refer to Figure 6 and Figure 7 , Figure 6 for the structure schematic diagram of the film box loading rack 200 in actual application, Figure 7As shown Figure 6 Structure diagram of the structure from another perspective.

[0075] The cassette loading rack 200 further comprises a resisting structure, which comprises a first resisting block 221 mounted on the door stop 220 and a second resisting block 213 mounted on the rack body 210, the first resisting block 221 is arranged towards the second side of the cover body 300, and the second resisting block 213 is arranged towards the rear end of the door stop 220 away from the cover body 300. In addition, the resisting structure further comprises a third resisting block 214 arranged in the first loading cavity 211, which is arranged above the first supporting piece 2111 and used to stop the cover body 300 from being flipped up from the opening of the first loading cavity 211.

[0076] In the actual cleaning process, the cover body 300 is supported by the first supporting piece 2111 and the second supporting piece 2112 when the cassette loading rack 200 is not rotated, and the first resisting block 221, the second resisting block 213 and the third resisting block 214 are not in contact with the cover body 300. The first resisting block 221 prevents the cover body 300 from being pulled out of the opening of the first loading cavity 211, the cassette loading rack 200 is actually a hollow structure, the second resisting block 213 prevents the cover body 300 from being pulled out of the opening of the first loading cavity 211, and the third resisting block 214 prevents the cover body 300 from being flipped up from the opening of the first loading cavity 211. The first resisting block 221, the second resisting block 213 and the third resisting block 214 together realize reliable limiting of the cover body 300, ensure that the cover body 300 remains stable during the cleaning process, and thus achieve ideal treatment effect and safety.

[0077] The cassette loading rack 200 further comprises a limiting structure arranged in the second loading cavity 212 and two positioning pieces 2121, the limiting structure comprises a first limiting piece 2122 mounted on the rack body 210 and a second limiting piece 222 mounted on the door stop 220, in the first direction, the positioning piece 2121 is located between the first limiting piece 2122 and the second limiting piece 222, and the box body 400 is provided with a positioning hole matched with the positioning piece 2121.

[0078] It should be noted that the first direction is the direction in which the opening of the second loading cavity 212 penetrates into the inside thereof, the first limiting piece 2122 limits the box body 400 at the end of the box body 400 away from the second loading cavity 212, the second limiting piece 222 limits the box body 400 at the end of the box body 400 close to the second loading cavity 212, and the two positioning pieces 2121 limit the box body 400 from the left and right sides of the box body 400 respectively. It can be seen that the first limiting piece 2122, the second limiting piece 222 and the two positioning pieces 2121 jointly realize the limiting of the box body 400 in multiple directions, so as to ensure that the box body 400 maintains a stable state during the cleaning process, thereby obtaining ideal treatment effect and safety.

[0079] In conclusion, the locking structure 100 provided in the embodiment can conveniently and quickly complete the locking operation and the unlocking operation, and has stable and reliable locking effect. The sheet box loading rack 200 provided in the embodiment and configured with the locking structure 100 can conveniently and quickly complete the locking operation and the unlocking operation of the door stop 220, and can stably and reliably lock the door stop 220.

[0080] The above merely describes the preferred embodiments of the present application and is not intended to limit the present application. For those skilled in the art, the present application can be variously modified and changed. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A locking structure, characterized in that, include: Card holder (110) has a locking slot (111); The locking assembly (120) includes a pressure rod (122) hinged at one end to the mounting base (121), a counterweight (123) connected to the other end of the pressure rod (122), and a locking member (124) mounted on the card seat (110). The locking member (124) can move relative to the card seat (110) under external force to have an unlocked state and a locked state. When in the locked state, a locking gap (130) is formed between the locking member (124) and the locking groove (111). The locking member (124) includes a locking part (1241) movable relative to the locking groove (111). The locking part (1241) includes a first end and a second end disposed opposite to each other. The locking part (1241) has a guide slope (1244) that slopes downward from the first end to the second end. The pressure rod (122) is configured to rotate and press down on the locking part (1241) under the action of the counterweight (123). The pressure rod (122) slides down along the guide slope (1244) into the locking gap (130).

2. The locking structure according to claim 1, characterized in that, The locking member (124) also includes a pull cap (1245), a pull rod, and an elastic member. One end of the pull rod is connected to the pull cap (1245), and the other end is connected to the locking part (1241). The elastic member is sleeved on the outside of the pull rod, and its two ends abut against the card seat (110) and the locking part (1241) respectively.

3. The locking structure according to claim 1, characterized in that, The card holder (110) has a concave arc mating surface (1111) on one end of the locking groove (111); The counterweight (123) is provided with a convex arc mating surface (1231). After the pressure rod (122) enters the locking gap (130), the convex arc mating surface (1231) and the concave arc mating surface (1111) are engaged.

4. A disc cassette loading rack, characterized in that, The device includes a frame (210), a door stop (220), and at least two locking structures (100) as described in any one of claims 1-3, the frame (210) having a loading cavity for loading a cassette, the pressure bar (122) being mounted on the door stop (220) via a mounting base (121), the card holder (110) being mounted on the frame (210), and the locking structures (100) being configured to lock the door stop (220) to the frame (210).

5. The disc cassette loading rack according to claim 4, characterized in that, The cassette loading rack (200) also includes a detection structure connected to the controller. The detection structure includes a first detection element (1232) disposed on the counterweight (123) and a second detection element (230) mounted on the frame (210). When the pressure rod (122) is within the locking gap (130), the detection structure can transmit a positioning signal to the controller.

6. The disc cassette loading rack according to claim 4, characterized in that, The tablet box includes a cover (300) and a box body (400); The loading chamber includes a first loading chamber (211) and a second loading chamber (212). The cover (300) is configured to be placed in the first loading chamber (211) at an angle, and the box (400) is configured to be placed in the second loading chamber (212) with its opening facing the door stop (220).

7. The disc cassette loading rack according to claim 6, characterized in that, The cassette loading rack (200) also includes a support structure, which includes a first support member (2111) and a second support member (2112) disposed in the first loading cavity (211). The first support member (2111) is used to support the first side of the cover (300), and the second support member (2112) is used to support the front end of the cover (300) near the door stop (220).

8. The disc cassette loading rack according to claim 7, characterized in that, The cassette loading rack (200) further includes a supporting structure, which includes a first supporting block (221) mounted on the door stop (220) and a second supporting block (213) mounted on the frame (210). The first supporting block (221) is disposed facing the second side of the cover (300), and the second supporting block (213) is disposed facing the rear end of the cover (300) away from the door stop (220).

9. The disc cassette loading rack according to claim 6, characterized in that, The cassette loading rack (200) further includes a limiting structure and two positioning members (2121) disposed in the second loading cavity (212). The limiting structure includes a first limiting member (2122) installed on the frame (210) and a second limiting member (222) installed on the door stop (220). In the first direction, the positioning member (2121) is located between the first limiting member (2122) and the second limiting member (222). The cassette body (400) is provided with a positioning hole adapted to the positioning member (2121).

10. A semiconductor processing apparatus, characterized in that, The device includes a processing mechanism, a driving mechanism, and at least one cassette loading rack (200) as described in any one of claims 4-9, wherein the driving mechanism is used to drive the cassette loading rack (200) to rotate with the opening facing outward, and the processing mechanism is adapted to process the cover (300) and the cassette (400) inside the cassette loading rack (200).

Images