Jacking movement device

Abstract

The utility model provides a jacking motion device. The jacking motion device comprises a base, a lifting driving component, a linear displacement component, a jacking piece component and a decoupling connecting piece. A stator of the lifting driving part is installed on the base, and a rotor is installed on the stator and can do lifting motion. The linear displacement part is installed on the base, and the displacement output direction is parallel to the lifting direction of the rotor. The sheet ejecting part comprises an ejecting disc and a plurality of sheet ejecting claws arranged on the ejecting disc, and the ejecting disc is located above the lifting driving part and connected with the rotor. One end of the decoupling connecting piece is connected with the output end of the linear displacement component, and the other end is connected with the top tray. The lifting direction of the mover is used as the z direction, and the direction of rotating around the axis in the z direction is used as the Rz direction; the direction perpendicular to the z direction is the n direction, and the direction rotating around the axis in the n direction is the Rn direction. The decoupling connection has an Rz direction flexibility and an Rn direction flexibility. According to the jacking movement device, impact on materials in the lifting process can be reduced, and the lifting stability is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor manufacturing, in particular to a lifting motion device. BACKGROUND

[0002] Under the background of rapid development of semiconductor manufacturing technology, the yield requirement of chip products is continuously improved, and the efficiency and accuracy of wafer loading and unloading as one of the key process links are crucial to the whole production process. In some production processes, the wafer needs to be precisely lifted and loaded and unloaded to ensure that the mechanical hand can normally carry out loading and unloading operation, avoid the wafer position deviation and sliding precision reduction caused by improper operation, and thus affect the quality and production efficiency of the product.

[0003] In the prior art, the lifting action of the wafer is usually realized by a cylinder lifting mechanism. However, this cylinder lifting mechanism has certain limitations, mainly manifested in unstable lifting posture, which further leads to poor lifting precision.

[0004] Specifically, when the cylinder lifting mechanism lifts the wafer, due to the motion inertia and structural problems, the component carrying the wafer may bear unbalanced force, which further causes the component carrying the wafer to have excessive tilting or torsional action, so that the lifting posture is unstable, which further brings impact to the wafer and affects the lifting precision, which may damage the wafer when taking the wafer. CONTENT OF THE INVENTION

[0005] The purpose of the present application is to provide a lifting motion device which can reduce excessive impact on the material during lifting and improve lifting stability.

[0006] The lifting motion device provided by the present application comprises a base, a lifting driving component, a linear displacement component, a wafer lifting component and a decoupling connecting piece. The lifting driving component comprises a stator and a rotor, the stator is installed on the base, and the rotor is installed on the stator and can make lifting motion relative to the stator. The linear displacement component is installed on the base, and its displacement output direction is parallel to the lifting direction of the rotor. The wafer lifting component comprises a top disc and a plurality of wafer lifting claws arranged on the top disc, and the top disc is connected with the rotor above the lifting driving component. The decoupling connecting piece is connected with the displacement output end of the linear displacement component at one end and connected with the top disc at the other end.

[0007] Wherein, the lifting direction of the rotor is z direction, the direction of rotation around the axis along z direction is Rz direction, and the direction perpendicular to z direction is n direction, and the direction of rotation around the axis along n direction is Rn direction; wherein, the decoupling connecting piece has flexibility in Rz direction and flexibility in Rn direction.

[0008] In an implementation, the decoupling connector comprises a first connecting part, a second connecting part and a flexible spring; the first connecting part is connected with the displacement output end of the linear displacement component; the second connecting part is connected with the top plate; the flexible spring extends along the z direction and the n direction; the two ends of the flexible spring along the z direction are respectively connected with the first connecting part and the second connecting part.

[0009] In an implementation, the thickness of the flexible spring is uniform.

[0010] In an implementation, the thickness of the flexible spring gradually decreases from the two ends to the middle along the z direction.

[0011] In an implementation, the second connecting part of the decoupling connector comprises a first plate structure and a second plate structure connected perpendicularly with each other; the first plate structure is attached to and fixed with the bottom surface of the top plate; the end of the second plate structure is connected with the flexible spring.

[0012] In an implementation, the mover abuts against the bottom surface of the first plate structure; the top plate is provided with a first through hole; the first plate structure is provided with a second through hole; the top lifting movement device further comprises a fixing bolt; the fixing bolt passes through the first through hole of the top plate, the second through hole of the first plate structure and is threadedly connected with the mover from top to bottom.

[0013] In an implementation, the base comprises a vertical plate structure extending along the z direction and the n direction; the stator of the lifting driving component and the linear displacement component are installed on the vertical plate structure and are arranged on two sides.

[0014] In an implementation, the top lifting movement device comprises a fixing member; the fixing member is in a U-shaped structure; the concave side of the fixing member wraps around the stator of the lifting driving component and is fixed to the surface of the vertical plate structure.

[0015] In an implementation, the linear displacement component comprises a slide rail and a slide block; the slide rail is installed on the base; the slide block is slidably installed on the slide rail; the sliding direction of the slide block is along the z direction; one end of the decoupling connector is connected with the slide block.

[0016] In an implementation, the top plate claw comprises a top rod and a suction disc; the bottom of the top rod is installed on the top plate; the top end of the top rod is installed with the suction disc.

[0017] Compared with the prior art, the application has at least the following beneficial effects:

[0018] The jacking movement device of the present application is provided with a linear displacement component and a decoupling connecting piece. On the one hand, the linear displacement component is connected to the top disc through the decoupling connecting piece, which plays a guiding role in the lifting of the top disc. Meanwhile, the flexible deformation of the decoupling connecting piece can also absorb the deformation caused by the parallel error between the displacement direction of the linear displacement component and the lifting direction of the mover, which helps to improve the stability and jacking positioning accuracy. On the other hand, when the top disc is tilted or twisted, the decoupling connecting piece can accommodate the twisting and tilting change of the top piece component, preventing the displacement of the linear displacement component or the lifting of the mover from being stuck, improving the stability and positioning accuracy, and effectively reducing the impact of unbalanced force on the material. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0020] Figure 1 FIG. 1 is a perspective view of a jacking movement device according to an embodiment of the present application;

[0021] Figure 2 FIG. 2 is a side view of a jacking movement device according to an embodiment of the present application;

[0022] Figure 3 FIG. 3 is a perspective view of a decoupling connecting piece according to an embodiment of the present application;

[0023] Figure 4 FIG. 4 is a perspective view of another decoupling connecting piece according to an embodiment of the present application.

[0024] In the drawings: 1, base; 11, vertical plate structure; 2, lifting driving component; 201, stator; 202, mover; 3, linear displacement component; 31, slide rail; 32, slide block; 4, top piece component; 41, top disc; 411, first through hole; 42, top piece claw; 421, top rod; 422, suction cup; 5, decoupling connecting piece; 51, first connecting part; 52, second connecting part; 521, first plate structure; 5211, second through hole; 522, second plate structure; 53, flexible spring piece; 6, fixing piece. DETAILED DESCRIPTION

[0025] In order to make the purposes, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings can be arranged and designed in various different configurations.

[0026] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor are within the scope of protection of the present application.

[0027] As shown in Figure 1 and Figure 2 The embodiments of the present application provide a jacking motion device, which comprises a base 1, a lifting driving component 2, a linear displacement component 3, a top sheet component 4 and a decoupling connecting piece 5.

[0028] The lifting driving component 2 comprises a stator 201 and a rotor 202, the stator 201 is installed on the base 1, and the rotor 202 is installed on the stator 201 and can make lifting motion relative to the stator 201. The linear displacement component 3 is installed on the base 1, and the displacement output direction thereof is parallel to the lifting direction of the rotor 202. The top sheet component 4 comprises a top disc 41 and a plurality of top sheet claws 42 provided on the top disc 41, the top disc 41 is located above the lifting driving component 2 and connected with the rotor 202. The decoupling connecting piece 5 is connected with the displacement output end of the linear displacement component 3 at one end and connected with the top disc 41 at the other end.

[0029] The lifting direction of the rotor 202 is the z direction, the direction of rotation around the axis along the z direction is the Rz direction, the direction perpendicular to the z direction is the n direction, and the direction of rotation around the axis along the n direction is the Rn direction. The decoupling connecting piece 5 has flexibility in the Rz direction and flexibility in the Rn direction.

[0030] When the jacking motion device of the present embodiment is used, the top sheet claws 42 of the top sheet component 4 carry the material (for example, a wafer), the rotor 202 of the lifting driving component 2 drives the top disc 41 to lift, so as to realize the lifting of the wafer. At the same time, the decoupling connecting piece 5 is connected with the linear displacement component 3 at one end and connected with the top disc 41 at the other end, so that the lifting of the top disc 41 by the linear displacement component 3 plays a guiding role, so as to make the lifting action more stable.

[0031] During the lifting of the top plate 41, the top plate 41 can be tilted or twisted due to the influence of the unbalanced force. The tilting of the top plate 41 is equivalent to the rotation of the top plate 41 around an axis along the n direction, and the twisting of the top plate 41 is equivalent to the rotation of the top plate 41 around an axis along the z direction (i.e. the axis of the mover 202). The displacement direction of the linear displacement component 3 is parallel to the lifting direction of the mover 202, and if the top plate 41 is excessively tilted or twisted, it can cause the displacement of the linear displacement component 3 or the lifting of the mover 202 to be stuck, thereby affecting the jacking position accuracy.

[0032] In the jacking motion device of the embodiment, since the decoupling connecting piece 5 has flexibility in the Rn direction and flexibility in the Rz direction, it can accommodate the change amount of the tilting or twisting of the top plate 41, thereby playing a decoupling role, so that when the top plate 41 is tilted or twisted, the displacement of the linear displacement component 3 or the lifting of the mover 202 can still be normally performed, preventing the jacking accuracy problem caused by motion jamming, and reducing the impact on the material.

[0033] In addition, even if there is a parallelism error between the displacement output direction of the linear displacement component 3 and the lifting direction of the mover 202, the flexible deformation of the decoupling connecting piece 5 can also absorb the deformation amount caused by the parallelism error.

[0034] Therefore, the jacking motion device of the present application sets the linear displacement component 3 and the decoupling connecting piece 5, on the one hand, the linear displacement component 3 is connected to the top plate 41 through the decoupling connecting piece 5, which plays a guiding role in the lifting of the top plate 41, and the flexible deformation of the decoupling connecting piece 5 can also absorb the deformation amount caused by the parallelism error between the displacement direction of the linear displacement component 3 and the lifting direction of the mover 202, which helps to improve stability and jacking positioning accuracy; on the other hand, when the top plate 41 is tilted or twisted, the decoupling connecting piece 5 can accommodate the twisting and tilting change amount of the top plate component 4, prevent the displacement of the linear displacement component 3 or the lifting of the mover 202 from being stuck, improve stability and positioning accuracy, and effectively reduce the impact of the unbalanced force on the material.

[0035] In an embodiment, the lifting driving component 2 can adopt a micro electric cylinder device, the micro electric cylinder device can adopt a hollow cup motor plus a lead screw transmission structure inside, and a position sensor can be arranged inside to realize the identification and control of the jacking height of the mover 202. Through the closed-loop control of the lifting height of the mover 202 of the lifting driving component 2, the precise positioning accuracy of the jacking height is further improved.

[0036] In an embodiment, as shown in Figure 3 and Figure 4As shown, the decoupling connecting piece 5 can include a first connecting part 51, a second connecting part 52 and a flexible spring piece 53. The first connecting part 51 is connected with the displacement output end of the linear displacement part 3, and the second connecting part 52 is connected with the top disc 41. The flexible spring piece 53 extends along the z direction and the n direction, and the two ends of the flexible spring piece 53 along the z direction are respectively connected with the first connecting part 51 and the second connecting part 52.

[0037] In an embodiment, the axis along which the decoupling connecting piece 5 is flexibly deformed in the Rn direction does not intersect the mover 202, which can provide better protection against the influence of the inclination change of the top disc 41.

[0038] In an embodiment, as shown in Figure 3 , the thickness of the flexible spring piece 53 of the decoupling connecting piece 5 can be set to be uniform.

[0039] In an embodiment, as shown in Figure 4 , the thickness of the flexible spring piece 53 can gradually decrease from the two ends to the middle along the z direction.

[0040] In an embodiment, as shown in Figure 3 and Figure 4 , the second connecting part 52 of the decoupling connecting piece 5 can include a first plate structure 521 and a second plate structure 522 connected perpendicularly to each other, the first plate structure 521 is attached to and fixed with the bottom surface of the top disc 41, and the end of the second plate structure 522 is connected with the flexible spring piece 53. Among them, by means of the first plate structure 521, the contact area of the decoupling connecting piece 5 with the top disc 41 can be increased, the lifting effect on the top disc 41 can be enhanced, and the stability during the jacking process can be improved.

[0041] In an embodiment, as shown in Figure 2 , the mover 202 can abut against the bottom surface of the first plate structure 521. As shown in Figure 1 , the top disc 41 is provided with a first through hole 411. As shown in Figure 3 and Figure 4 , a second through hole 5211 is arranged on the first plate structure 521. The jacking movement device further includes a fixing bolt (not shown in the figure), which passes through the first through hole 411 of the top disc 41, the second through hole 5211 of the first plate structure 521 and is threadedly connected with the mover 202 from top to bottom.

[0042] In an embodiment, as shown in Figure 1 and Figure 2 , the base 1 includes a vertical plate structure 11 extending along the z direction and the n direction, and the stator 201 of the lifting driving part 2 and the linear displacement part 3 are installed on the vertical plate structure 11 and are placed on two sides, so that the structure is more compact and coordinated.

[0043] In an embodiment, as shown in Figure 1As shown, the jacking movement device can include a fixing member 6, which is in a U-shaped structure, the concave side of the fixing member 6 wraps around the stator 201 of the lifting driving component 2 and is fixed to the surface of the vertical plate structure 11. The fixing member 6 and the vertical plate structure 11 are detachably connected.

[0044] In an embodiment, as shown in Figure 2 The linear displacement component 3 can include a slide rail 31 and a slide block 32, the slide rail 31 is installed on the base 1, the slide block 32 is slidably installed on the slide rail 31, the sliding direction of the slide block 32 is along the z direction, and one end of the decoupling connecting member 5 is connected to the slide block 32.

[0045] In addition, the linear displacement component 3 can also adopt a structure of a linear bearing and a guide rod, the linear bearing is installed on the base 1, the guide rod is installed in the linear bearing and can reciprocate and slide along the z direction, and one end of the decoupling connecting member 5 is connected to the guide rod.

[0046] In an embodiment, as shown in Figure 1 and Figure 2 The top sheet claw 42 can include a top rod 421 and a suction cup 422, the bottom of the top rod 421 is installed on the top disc 41, and the top end of the top rod 421 is installed with the suction cup 422. The suction cup 422 can be made of rubber, silicone or other materials, which is anti-static and can reduce the impact between the product and the top sheet claw 42, thereby buffering and keeping the position of the product to avoid drifting.

[0047] In an embodiment, as shown in Figure 1 The top disc 41 can be a regular triangle or other regular polygon, and one top sheet claw 42 is installed at each vertex of the top disc 41. The mover 202 of the lifting driving component 2 is connected to the center position of the top disc 41, and the plurality of top sheet claws 42 are uniformly distributed on the top disc 41.

[0048] The above only describes some embodiments of the present application and is not intended to limit the present application. Those skilled in the art can make various changes and modifications to the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A jacking movement device, characterized in that The utility model relates to a lifting device, including: a base (1); a lifting driving component (2) including a stator (201) and a rotor (202), the stator (201) is installed to the base (1), the rotor (202) is installed on the stator (201) and can make lifting motion relative to the stator (201); a linear displacement component (3) is installed to the base (1), and its displacement output direction is parallel with the lifting direction of the rotor (202); a top sheet component (4) including a top disc (41) and a plurality of top sheet claws (42) arranged on the top disc (41), the top disc (41) is located above the lifting driving component (2) and is connected with the rotor (202); a decoupling connecting piece (5) is connected with the displacement output end of the linear displacement component (3) on one end and is connected with the top disc (41) on the other end; wherein the lifting direction of the rotor (202) is the z direction, the direction of rotation around the axis along the z direction is the Rz direction, the direction perpendicular to the z direction is the n direction, and the direction of rotation around the axis along the n direction is the Rn direction, wherein the decoupling connecting piece (5) has flexibility in the Rz direction and flexibility in the Rn direction.

2. The jacking movement device of claim 1, wherein, The decoupling connecting piece (5) includes a first connecting part (51), a second connecting part (52) and a flexible spring piece (53); The first connecting part (51) is connected with the displacement output end of the linear displacement component (3), and the second connecting part (52) is connected with the top disc (41); The flexible spring piece (53) extends in the z direction and the n direction, and the two ends of the flexible spring piece (53) in the z direction are respectively connected with the first connecting part (51) and the second connecting part (52).

3. The jacking movement device of claim 2, wherein, The thickness of the flexible spring piece (53) is uniform at all places.

4. The jacking movement device of claim 2, wherein, In the z direction, the thickness of the flexible spring piece (53) gradually decreases from both ends to the middle.

5. The jacking movement device of claim 2, wherein, The second connecting part (52) of the decoupling connecting piece (5) includes a first flat plate structure (521) and a second flat plate structure (522) connected with each other perpendicularly, the first flat plate structure (521) is attached to and fixed with the bottom surface of the top disc (41), and the end of the second flat plate structure (522) is connected with the flexible spring piece (53).

6. The jacking movement device of claim 5, wherein, The rotor (202) abuts against the bottom surface of the first flat plate structure (521), a first through hole (411) is arranged on the top disc (41), and a second through hole (5211) is arranged on the first flat plate structure (521); The jacking movement device further includes a fixing bolt, the fixing bolt passes through the first through hole (411) of the top disc (41), the second through hole (5211) of the first flat plate structure (521) and the rotor (202) in sequence from top to bottom and is threadedly connected.

7. The jacking motion apparatus of claim 1 wherein, The base (1) includes a vertical plate structure (11) extending in the z direction and the n direction, and the stator (201) of the lifting driving component (2) and the linear displacement component (3) are installed on the vertical plate structure (11) and are arranged on two sides.

8. The jacking movement device of claim 7, wherein, The fixing part (6) is in U-shaped structure, the concave side of the fixing part (6) wraps the stator (201) of the lifting driving part (2), and is fixed to the surface of the vertical plate structure (11).

9. The jacking motion apparatus of claim 1 wherein, The linear displacement part (3) comprises a sliding rail (31) and a sliding block (32), the sliding rail (31) is installed on the base (1), the sliding block (32) is slidably installed on the sliding rail (31), and the sliding direction of the sliding block (32) is along the z direction; one end of the decoupling connecting piece (5) is connected with the sliding block (32).

10. The jacking movement device of claim 1, wherein, The top sheet claw (42) comprises a top rod (421) and a suction disc (422), the bottom of the top rod (421) is installed on the top disc (41), and the top end of the top rod (421) is installed with the suction disc (422).

Images